JP4024252B2 - Resist removing device, resist removing jig and resist removing method for cup inner surface - Google Patents

Description

  The present invention adheres to the inner surface of a cup that covers a turntable for fixing an object to be processed in an apparatus for removing a resist from a plate-like object to be processed such as a substrate for various electronic parts or an IC wafer or an apparatus for applying a resist The present invention relates to an apparatus for removing a resist, a jig thereof, and a method for removing the jig.

When a resist is applied to a plate-like workpiece such as an electronic component substrate or an IC wafer, and the resist at the exposed or non-exposed portion is dissolved and removed (exfoliated) with a solvent after exposure, the following steps are performed. Adopted. That is, an object to be processed is fixed on a turntable, and a resist dissolving solvent such as acetone is supplied from above the object to be processed. Then, the object to be processed is rotated together with the turntable so that the resist at the exposed or non-exposed portion is dissolved and discharged together with the solvent and scattered in the radial direction. At this time , in order to prevent the resist and the solvent from splashing around the resist removing apparatus, a cup having a tapered upper diameter is provided around the turntable .

  The cup is configured to be vertically extendable, that is, to have a position where the height of the upper end is higher and lower than that of the turntable (for example, see Patent Document 1). The reason is that when the workpiece is set on the turntable, the position of the cup is lowered so that the cup does not get in the way, while when the resist is removed by the solvent, the resist dissolved in the solvent is resisted. This is because it is necessary to raise the position of the cup in order to prevent scattering around the removing device.

  In such a resist removing apparatus, if resist fine particles remain as a viscous fluid on the inner surface of the cup, there arises a situation in which the shrinkable cup is not smoothly reduced. Thus, when the reduction of the cup is incomplete, it becomes difficult to set the workpiece on the turntable. For this reason, as described in Patent Document 1, a solvent for dissolving the resist is caused to flow down from the upper side to the contact portion of the inner and outer cups that are telescopically fitted to cause the resist to flow down together with the solvent. It is. This operation is performed by an operator manually opening a container (washing bottle) containing the solvent and allowing the solvent to flow down.

  For example, also in a resist coating apparatus as shown in Patent Documents 2 and 3, a cup that covers the periphery of the turntable is provided in order to prevent scattering of the resist around the periphery. Even if the cup used in this resist coating apparatus is non-stretchable, the work of dissolving and removing the resist adhering to and remaining on the inner surface of the cup with a solvent is performed manually by the operator.

JP 2002-110503 A JP-A-6-252038 JP-A-8-31722

  As described above, conventionally, since the worker manually removes the resist adhered and remaining on the inner surface of the cup with a solvent, the amount of solvent used and the finish vary depending on the worker, and the resist is sufficient. However, the solvent may not be removed or an unnecessarily large amount of solvent may be used.

  In view of the above problems, the present invention eliminates the burden of resist removal work by an operator and removes the resist when removing the resist adhering to the inner surface of the cup surrounding the turntable for fixing the object to be processed. An object of the present invention is to provide a resist removing device, a resist removing jig, and a resist removing method for the inner surface of a cup that can be reliably and simply added with a necessary and sufficient solvent.

The resist removal apparatus for the inner surface of the cup according to claim 1, the plate-like object to be processed is fixed to the turntable, and the object to be processed is surrounded by a cup having an upper surface opening in which a plurality of cylindrical cups having different sizes are stretchably combined . An apparatus for removing resist adhering to the inner surface of the cup, used in an apparatus for applying or removing a resist by introducing a resist or a solvent thereof into the object to be processed while rotating the turntable,
A jig that is detachably fixed to the turntable;
A solvent supply device having a nozzle for supplying a solvent for dissolving the resist in the jig from above,
The jig is provided with a fixing part that is detachably fixed to the turntable, a cylindrical receiving part that receives the solvent from the solvent supply device, and extends outward from the receiving part. And a tubular jet part for jetting the solvent toward the inner surface of the engaging part between the cylindrical cups in the extended cup by the centrifugal force generated by the rotation of the rotary table. To do.

An apparatus for removing a resist on an inner surface of a cup according to claim 2,
The tip of the tubular ejection part of the jig is located outside the peripheral part of the upper surface of the cover that covers the rotary table drive motor provided at the lower part of the rotary table.

The apparatus for removing a resist on the inner surface of a cup according to claim 3 is characterized in that in claim 1 or 2,
It has a tapered portion that is formed continuously on the receiving portion of the jig, has a smaller diameter toward the upper portion, and has an opening for introducing a solvent at the upper end.
It is characterized by that.

The resist removing jig of the cup the inner surface of the fourth aspect, the plate-shaped object to be processed is fixed to the turntable, different tubular cup wherein the object to be processed by telescopically combined top opening of the cup sizes A jig for removing resist adhering to the inner surface of the cup, which is used in an apparatus for applying or removing a resist by introducing a resist or its solvent into the object to be processed while rotating and rotating the turntable. ,
A fixing part detachably fixed to the turntable;
A cylindrical receiving portion for receiving a resist dissolving solvent supplied from above;
The solvent that extends outward from the receiving portion and accumulates in the receiving portion is directed toward the inner surface of the engaging portion between the cylindrical cups in the extended cup by centrifugal force generated by the rotation of the turntable. It has a tubular ejection part for ejecting a solvent .

The resist removing jig according to claim 5 is characterized in that in claim 4,
The jig further includes a tapered portion that is continuously formed at an upper portion of the receiving portion and has a smaller diameter toward the upper portion and an opening for solvent introduction formed at an upper end.
It is characterized by that.

The resist removal method of the cup inner surface according to claim 6 , wherein the plate-like workpiece is fixed to the turntable, and the workpiece is surrounded by a cup having an upper surface opening in which a plurality of cylindrical cups having different sizes are stretchably combined . A method of removing a resist adhering to the inner surface of the cup, used in an apparatus for applying or removing a resist by introducing a resist or a solvent thereof into the object to be processed while rotating the turntable,
Wherein the turntable, fixed and receiving of the solvent forming a tubular shape, a resist removing jig and a jet of the tubular that is provided extending outwardly from said receiving portion,
While supplying a solvent for dissolving the resist in the jig from above the jig, the solvent accumulates in the receiving portion by the centrifugal force generated by rotation of the turntable, from the ejection portion of the tubular inner surface of the cup The resist on the inner surface of the cup is removed by spraying toward the inner surface of the engaging portion between the cylindrical cups in the extended cup .

  According to the first aspect of the present invention, the solvent is supplied from the solvent supply device to the resist removing jig fixed to the turntable, and the resist is removed from the cup inner surface by using the rotation of the turntable to be scattered on the cup inner surface. is there. For this reason, there is no variation in the amount of solvent used or variation in the finish as in the case where the resist removal operation is performed manually, and the resist on the inner surface of the cup can be reliably removed with a certain amount of solvent without excess or deficiency. . In addition, since the worker only needs to set the jig, human work can be reduced. Moreover, since the amount of the solvent can be reduced, it is good for the working environment.

In addition, since the resist removing jig included in the resist removing device for the inner surface of the cup according to the first aspect is attached using a turntable that is originally provided in the device, it is easy to detach and has a simple structure. It is. In addition, since the solvent supply device that supplies the solvent to the resist removal jig is already provided in the resist removal apparatus, a resist removal jig is added to realize the resist removal device on the inner surface of the cup. This can be realized easily and inexpensively. In addition, even when applied to a resist coating apparatus, it can be realized by providing a diversion mechanism in a solvent supply apparatus for the back surface of an object originally provided in the resist coating apparatus. And it can be realized at low cost. Further, since the solvent can be ejected from the tubular ejection portion toward the engaging portion between the cylindrical cups in the elongated cup, that is, the portion where the resist is likely to remain, the resist can be removed efficiently.

  According to the second aspect of the present invention, since the solvent ejection port of the resist removing jig is located outside the cover of the rotary table drive motor, it is possible to prevent the solvent from entering the motor and adversely affecting the motor.

In the invention of claim 3, since it has a taper part formed continuously from the upper part of the receiving part of the jig and having a smaller diameter at the upper part and an opening for solvent introduction formed at the upper end, it is supplied to the receiving part. It can prevent that a solvent leaks from an opening part with the centrifugal force accompanying rotation.

In the invention of claim 4 , the resist removing jig can be attached to the turntable, and the solvent can be ejected by the centrifugal force accompanying the rotation of the turntable and the receiving portion of the solvent from the solvent supply device. Therefore, the resist on the inner surface of the cup can be removed by applying this to a resist coating apparatus or a resist removing apparatus having a solvent supply device. Accordingly, there is no variation in the amount of solvent used or variation in the finish as in the case where the resist removal operation is performed manually, and the resist on the inner surface of the cup can be reliably removed with a certain amount of solvent without excess or deficiency. In addition, since the worker only needs to set the jig, human work can be reduced. Moreover, since the amount of the solvent can be reduced, it is good for the working environment. Further, since the solvent can be ejected from the tubular ejection portion toward the engaging portion between the cylindrical cups in the extended cup, that is, the portion where the resist tends to remain, the resist can be removed efficiently.

  In addition, since the solvent is scattered using a turntable, the resist removing jig has a simple structure and can be provided at low cost.

In the invention of claim 5, the solvent supplied to the receiving portion is formed continuously from the upper portion of the receiving portion of the jig, and has a tapered portion with a smaller diameter toward the upper portion and an opening for solvent introduction formed at the upper end. Can be prevented from leaking from the opening due to centrifugal force accompanying rotation.

The resist removal method for the inner surface of the cup according to claim 6 uses a resist removal jig attached to the turntable to supply the solvent to the turntable, while using the rotation of the turntable to spread the solvent onto the cup inner surface. The solvent can be supplied by an existing apparatus or a newly provided apparatus. Accordingly, there is no variation in the amount of solvent used or variation in the finish as in the case where the resist removal operation is performed manually, and the resist on the inner surface of the cup can be reliably removed with a certain amount of solvent without excess or deficiency. In addition, since the worker only needs to set the jig, human work can be reduced. Moreover, since the amount of the solvent can be reduced, it is good for the working environment. Further, since the solvent is ejected from the tubular ejection portion toward the engaging portion between the cylindrical cups in the elongated cup, that is, the portion where the resist is likely to remain, the resist can be removed efficiently.

  FIG. 1 is a side sectional view showing an example of a resist removing apparatus to which the method for removing a resist on the cup inner surface of the present invention is applied. Reference numeral 1 denotes a solvent receiving plate, which is fixed to the upper part of the frame 2 of the resist removing apparatus as shown in FIG. The receiving plate 1 has an opening 1a at the center, and the drive motor 4 of the turntable 3 is attached to the opening 1a with the following structure.

  That is, the mounting frame 5 of the turntable drive motor 4 is fixed to the opening 1a, the upper end of the housing 4a of the motor 4 is fixed to the upper part, and the lower part of the rotating shaft 4b is attached to the frame 2. The bearing 6 is rotatably supported.

  A cover 7 for the motor 4 is provided on the top of the mounting frame 5. A solvent supply nozzle (not shown) for removing the solvent including the resist on the back surface of the object 11 is attached to the cover 7. The rotation shaft 4b of the motor 4 is inserted through the center hole 7a of the cover 7, and the center of the disk-shaped turntable 3 is attached to the upper end.

  An intake hole 9 is provided at the center of the rotary table 3 and the rotary shaft 4b, and a connection tool 10 connected to a suction pipe of a vacuum suction device (not shown) is provided below the bearing 6. Accordingly, a workpiece 11 such as a plate-like substrate or wafer is set on the turntable 3 by a device (not shown), the motor 4 is driven to rotate the rotating shaft 4b, and at the same time, the vacuum suction device is operated. By reducing the air pressure in the suction hole 9, the workpiece 11 can be driven to rotate while being fixed to the turntable 3.

  Reference numeral 12 denotes a nozzle of a solvent supply device that supplies a solvent to the central portion of the workpiece 11. The nozzle 12 is supplied with a solvent from a solvent tank (not shown) via a solvent pipe 13 by a pump (not shown) and flows down to the object 11 to be processed.

  FIG. 3 is a side view for explaining an apparatus for changing the position of the nozzle 12 in the horizontal direction and the vertical direction. Reference numeral 14 denotes an elevating cylinder attached to the frame 2 and elevates and lowers a nozzle mounting arm 15 that supports the nozzle 12. The elevating cylinder 14 is a pneumatic cylinder or a hydraulic cylinder. A lift frame 17 that can be lifted and lowered along a guide 16 fixed to the frame 2 is coupled to the piston rod of the lift cylinder 14.

  A motor 19 for changing the direction of the arm 15 that supports the nozzle 12 is attached to the elevating frame 17, and a rod 20 that connects the arm 15 to the upper end is coupled to the rotating shaft 19 a. The rod 20 is supported by a cylindrical bearing 21 fixed to the receiving plate 1 so as to be rotatable and movable up and down. Therefore, the height of the nozzle 12 can be changed by the expansion and contraction of the elevating cylinder 14, and the position of the nozzle 12 can be positioned on the workpiece 11 and outside the cup 22 by the operation of the motor 19. . Further, a position detection mechanism is provided for restricting the rotation by the motor 19 so that the position of the nozzle 12 is accurately positioned directly above the workpiece 11 and at the retracted position outside the cup 22. Omitted.

  The cup 22 according to the present embodiment includes an outer cup 22a having a lower end fixed to the receiving plate 1, an inner cup 22b fitted to the inner side thereof so as to be movable up and down, and an inner cup 22b fitted to the inner side thereof so as to be raised and lowered. And a cup 22c. As shown in FIG. 4, inward and outward engaging portions 22d and 22e are formed at the upper end of the middle cup 22b and the lower end of the inner cup 22c, respectively, and when the cup 22 is pulled up, When the locking portion 22e comes into contact with the locking portion 22d of the middle cup 22b, the middle cup 22b is also lifted along with the lifting of the middle cup 22c.

Next, a device for expanding and contracting the cup 22 will be described with reference to FIG. 2 and a plan view of FIG. A telescopic cylinder 23 for expanding and contracting the cup 22 is attached to the lower part of the frame 2. Reference numeral 24 denotes an elevating frame that moves up and down by expansion and contraction of the expansion cylinder 23, and the expansion cylinder 23 is coupled to the center of the elevating frame 24. Reference numeral 25 denotes a guide device that guides the elevating frame 24 so that the elevating frame 24 can be raised and lowered without inclination. Reference numeral 26 denotes a support column provided 90 degrees apart from the elevating frame 24. A rod 29 fitted to a cylindrical bearing 27 provided on the receiving plate 1 so as to be movable up and down is attached to each column 26. Each rod 29 is coupled to the inner cup 22c. Accordingly, when the telescopic cylinder 23 is extended, the top of the cup 22 becomes higher than the turntable 3 as shown by solid lines in FIGS. 1 and 2, and when the telescopic cylinder 23 is contracted, the cup 22 is contracted and the top of the cup 22 is Is lower than the turntable 3.

  Reference numeral 30 denotes a discharge port for discharging the solvent in which the resist flowing down by colliding with the inner surface of the cup 22 is discharged.

  In this resist removing apparatus, in a normal resist removing operation, first, the cup 22 is reduced as shown by a two-dot chain line in FIG. Then, a workpiece 11 such as a plate-like substrate or wafer is set on the turntable 3. Next, the cup 22 is lifted as shown in FIG. Then, the rotary shaft 4b is driven to rotate by the motor 4 and at the same time, the vacuum suction device is operated to lower the air pressure in the suction hole 9, thereby rotating the workpiece 11 to the rotary table 3 at, for example, 2000 to 3000 rpm. To drive. Then, the solvent 33 is supplied from the nozzle 12 positioned right above the workpiece 11 to the center of the workpiece 11. Then, the solvent dissolves the resist in the dissolvable state while flowing on the workpiece 11 by centrifugal force toward the outer periphery of the workpiece 11, and the outer periphery of the workpiece 11 is further dissolved together with the dissolved resist. To the inner surface of the cup 22. Then, the solvent containing the resist reaches the receiving plate 1 through the inner surface of the cup 22 and is discharged from the discharge port 30. At the same time, in order to remove the solvent including the resist that surrounds the back surface of the object 11 to be processed, the solvent is sprayed and supplied to the back surface of the object 11 from the nozzle attached to the cover 7.

A plan view of FIG. 6 and FIG. 7 show an embodiment of a resist removing jig 31 on the inner surface of the cup according to the present invention. The jig 31 is made of, for example, a resin such as polypropylene resin or polytetrafluoroethylene resin, or stainless steel. The jig 31 includes a cylindrical solvent receiving portion 31b having a bottom portion 31a, a fixing portion 31c to the turntable 3 provided at a lower portion thereof and fitted to the turntable 3, and a receiving portion 31b. And a solvent ejection portion 31d constituted by a pipe provided radially and extending outward . The upper part of the cylindrical receiving part 31b is formed as a tapered part 31e having a smaller diameter toward the upper part in order to prevent leakage of the solvent supplied to the receiving part 31b. The lower surface of the bottom 31a is formed on a smooth surface so that the jig 31 is firmly fixed by vacuum suction.

  FIG. 8 is a view showing a state in which the jig attached to the turntable 3 and the resist adhering to the inner surface of the cup 22 are removed. The jig 31 fixes the jig 31 in place of the workpiece 11 by fitting a cylindrical fixing portion 31c to the turntable 3 and sucking air from the suction hole 9 by a vacuum suction device. Can do. The jig 31 is fixed to the turntable 3, and the position of the nozzle 12 is set at a position where the solvent can be supplied to the center of the jig 31 by the operation of the elevating cylinder 14 and the motor 19, and the telescopic cylinder 23 is extended. The cup 22 is lifted. Then, the motor 4 is driven to rotate the jig 31. Then, a solvent 33 such as acetone is supplied from the nozzle 12 and supplied to the receiving portion 31b. The solvent 33 that has entered the receiving portion 31 b is scattered from the ejection portion 31 d by centrifugal force and reaches the inner surface of the cup 22. The solvent that has reached the inner surface of the cup 22 flows down while dissolving the highly viscous resist adhering to the inner surface of the cup. Therefore, the solvent on the inner surface of the cup 22 can be removed.

  As described above, in the present invention, the resist removal jig 31 is fixed to the turntable 3, the solvent is supplied to the jig 31 from the nozzle 12 of the solvent supply device, and the cup 22 is utilized by using the rotation of the turntable 3. The resist is removed from the inner surface of the cup 22 by being scattered on the inner surface of the cup 22. For this reason, after setting the resist removal jig 31 on the turntable 3, the worker can perform the resist removal work on the inner surface of the cup 22 at a position away from the apparatus. Accordingly, there is no variation in the amount of solvent used and no variation in the finish as in the case where the resist removal operation is performed manually, and the resist on the inner surface of the cup can be reliably removed with a certain amount of solvent without excess or deficiency. Further, since the worker only needs to set the jig 31, human work can be reduced. Moreover, since the amount of the solvent can be reduced, it is good for the working environment.

  Further, since the resist removing jig 31 is attached by using the turntable 3 originally provided in the resist removing apparatus, it is easy to detach and to have a simple structure. Further, since the solvent supply device such as the nozzle 12 for supplying the solvent to the resist removal jig 31 is originally provided in the resist removal device, the resist removal device is required to realize the resist removal device on the inner surface of the cup. It can be realized easily and inexpensively by simply adding the jig 31 for use.

  Moreover, even if the present invention is applied to a resist coating apparatus, it can be realized by providing a diversion mechanism in a solvent supply apparatus for the back surface of an object originally provided in the resist coating apparatus. It can be realized relatively easily and inexpensively.

In this embodiment, the spray destination of the solvent 33 by the ejection portion 31d is a portion 32 where the locking portion 22d of the inner cup 22b and the locking portion 22e of the inner cup 22c overlap each other. It is preferable in the sense that it tends to remain , and the resist can be efficiently removed by scattering the solvent toward the locking portion 22e. The rotational speed of the turntable 3 when removing the resist on the inner surface of the cup was 300 rpm when the ejection angle θ shown in FIG. 7 was 40 degrees and the distance from the tip of the ejection portion to the cup 22 was about 30 cm. This rotational speed is changed according to the ejection angle θ and the distance from the tip of the ejection portion to the cup 22. The number of ejection portions 31d should be increased or decreased according to the amount of solvent supplied from the nozzle 12 and the number of rotations of the turntable 3, and cannot be determined in general, but generally one to four. It is preferable to make it about.

  Moreover, although the ejection part 31d may be constituted by a hole provided in the side surface of the cylindrical receiving part 31b, as shown in this embodiment, the ejection part 31d is constituted by a tube, so that the solvent can be targeted. It is preferable in terms of miniaturization of the jig 31 in addition to being easily scattered to the height.

  Further, by positioning the tip of the ejection part 31d outside the cover 7 of the turntable drive motor 4 as in this embodiment, it is possible to prevent the solvent from entering the motor 4 and adversely affecting the motor.

  The present invention can also be applied when the cup 22 is non-expandable.

It is side surface sectional drawing which shows an example of the resist removal apparatus to which this invention is applied. It is a side view which shows the expansion-contraction apparatus of the cup of the resist removal apparatus of FIG. It is a side view which shows the structure of the solvent supply apparatus of the apparatus of FIG. It is side surface sectional drawing which shows the latching | locking part of the cup of the apparatus of FIG. It is a top view which shows the cup expansion-contraction apparatus with respect to the raising / lowering frame shown in FIG. It is a top view which shows one Embodiment of the jig | tool for dys removal of the cup inner surface by this invention. FIG. 7 is a partial cross-sectional side view of the resist removal jig of FIG. 6. It is side surface sectional drawing which shows one Embodiment of the apparatus which enforces the resist removal method of the cup inner surface of this invention.

Explanation of symbols

1: receiving plate, 2: frame, 3: rotating table, 4: rotating table drive motor, 4a: housing, 4b: rotating shaft, 5: mounting frame, 6: bearing, 7: cover, 9: intake hole, 10: 11: workpiece, 12: solvent supply nozzle, 13: solvent piping, 14: lifting cylinder, 15: arm, 16: guide, 17: lifting frame, 19: motor, 20: rod, 21: bearing , 22: cup, 22e: locking part, 23: lifting cylinder, 24: lifting frame, 25: guide device, 26: support, 27: bearing, 29: rod, 30: solvent discharge pipe, 31: resist removal treatment 31a: bottom part, 31b: receiving part, 31c: fixing part, 31d: ejection part, 31e: taper part, 32: overlapping part of locking part

Claims (6)

A plate-like object to be processed is fixed to a turntable, and the object to be processed is surrounded by a cup having an upper surface opening in which a plurality of cylindrical cups having different sizes can be expanded and contracted , and the turntable is rotated while the object to be processed is rotated. An apparatus for removing or adhering to the inner surface of the cup, which is used in an apparatus for applying or removing a resist by introducing a resist or a solvent thereof,
A jig that is detachably fixed to the turntable;
A solvent supply device having a nozzle for supplying a solvent for dissolving the resist in the jig from above,
The jig is provided with a fixing part that is detachably fixed to the turntable, a cylindrical receiving part that receives the solvent from the solvent supply device, and extends outward from the receiving part. And a tubular jet part for jetting the solvent toward the inner surface of the engaging part between the cylindrical cups in the extended cup by the centrifugal force generated by the rotation of the rotary table. A resist removal device for the inner surface of the cup. In the cup inner surface resist removal apparatus according to claim 1,
The resist removal apparatus for the inner surface of the cup , wherein the tip of the tubular jet part of the jig is located outside the peripheral part of the upper surface of the cover that covers the rotary table drive motor provided at the lower part of the rotary table . In the cup inner surface resist removal apparatus according to claim 1 or 2,
The jig further includes a tapered portion that is continuously formed at an upper portion of the receiving portion and has a smaller diameter toward the upper portion and an opening for solvent introduction formed at an upper end.
An apparatus for removing a resist on the inner surface of a cup. A plate-like object to be processed is fixed to a turntable, and the object to be processed is surrounded by a cup having an upper surface opening in which a plurality of cylindrical cups having different sizes can be expanded and contracted , and the turntable is rotated while the object to be processed is rotated. A jig for removing resist adhering to the inner surface of the cup, which is used in an apparatus for applying or removing a resist by introducing a resist or a solvent thereof,
A fixing part detachably fixed to the turntable;
A cylindrical receiving portion for receiving a resist dissolving solvent supplied from above;
The solvent that extends outward from the receiving portion and accumulates in the receiving portion is directed toward the inner surface of the engaging portion between the cylindrical cups in the extended cup by centrifugal force generated by the rotation of the turntable. And a tubular ejection part for ejecting a solvent . A resist removal jig on the inner surface of the cup. In the resist removal jig on the inner surface of the cup according to claim 4,
The jig further includes a tapered portion that is continuously formed at an upper portion of the receiving portion and has a smaller diameter toward the upper portion and an opening for solvent introduction formed at an upper end.
A jig for removing the resist on the inner surface of the cup. A plate-like object to be processed is fixed to a turntable, and the object to be processed is surrounded by a cup having an upper surface opening in which a plurality of cylindrical cups having different sizes can be expanded and contracted , and the turntable is rotated while the object to be processed is rotated. A resist or a solvent thereof is used in an apparatus for applying or removing the resist to remove the resist adhering to the inner surface of the cup,
Wherein the turntable, fixed and receiving of the solvent forming a tubular shape, a resist removing jig and a jet of the tubular that is provided extending outwardly from said receiving portion,
While supplying a solvent for dissolving the resist in the jig from above the jig, the solvent accumulates in the receiving portion by the centrifugal force generated by rotation of the turntable, from the ejection portion of the tubular inner surface of the cup A resist removal method for an inner surface of a cup, wherein the resist on the inner surface of the cup is removed by spraying toward the inner surface of the engaging portion between the cylindrical cups in the extended cup.

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