JP4006507B2 - Light switch - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an optical switch used for optical communication and optical measurement, for switching connection between optical fibers and optical waveguides.
[0002]
[Prior art]
As a typical example of an optical switch that has been put to practical use so far, a nickel tube is attached near the tip of one input optical fiber whose tip is fixed and the tip can freely move, and two of them are attached to this. The output optical fibers are arranged so as to face each other, and the one input optical fiber itself is moved by an electromagnet provided outside so as to face either one of the two output optical fibers. There is a mechanical optical switch that presses against the stopper.
[0003]
Another system that has been put to practical use so far is an interferometric optical switch in which a heater is patterned on a flat optical waveguide made of quartz and a change in refractive index due to temperature is combined with a Mach-Zehnder interferometer.
[0004]
In addition to the above methods, various methods have been developed for future practical use. A typical example is the use of micromachining technology to reduce the size and integration of mechanical switches, such as a method of driving a movable micromirror with static electricity, and moving a cantilevered optical waveguide with static electricity or magnetism. And a method of moving the sealed liquid by heat are known.
[0005]
[Problems to be solved by the invention]
However, the above-mentioned mechanical optical switch that moves the optical fiber by an electromagnet has a simple structure, but it moves a large structure, so the switching speed is slow, unsuitable for integration, and may cause mechanical damage. It was also expensive.
[0006]
In addition, the interference type optical switch using the above-mentioned quartz planar optical waveguide is suitable for integration, but feedback from the output side is indispensable to maintain an accurate interference state, and the configuration of the entire system is complicated. there were. Furthermore, since there is no moving part, it is necessary to repeat heating and cooling, so there was still concern about long-term stability.
[0007]
On the other hand, various new methods based on micromachining technology are ideally inexpensive and can be integrated on a large scale, but because they make full use of sophisticated and complex microfabrication technology, we consider the production yield. In reality, it is difficult to inexpensively provide elements integrated on a large scale.
[0008]
Further, for example, in the case of a method using a geometric optical element such as a micromirror, a mirror having a size of about several tens of μm is required to reflect a light beam geometrically, so that integration is performed. The density that was possible was also limited. Further, the method using a semiconductor material such as silicon requires special consideration for mode matching with a single mode optical fiber and elimination of polarization dependency.
[0009]
Although the optical switch is a very basic element as described above, there is still no definitive method for realizing this.
[0010]
In view of the above situation, the present invention uses a sphere that can be easily and inexpensively obtained with high shape accuracy and dimensional accuracy as a switching component, and exhibits a specular resonance phenomenon exhibited by two adjacent or closely attached transparent spheres. By using this, an optical switch that can be realized with a simple structure without requiring an advanced microfabrication technique and that is suitable for integration and does not require difficult control is provided.
[0011]
[Means for Solving the Problems]
In order to achieve the above object, the present invention provides
[1] In an optical switch, at an operating wavelength close to or in close contact within an input optical waveguide, a plurality of output optical waveguides, and a vertical hole disposed between the input optical waveguide and the plurality of output optical waveguides Transparent input and output spheres, Depending on the voltage applied to the plurality of electrodes patterned so as to surround the vertical hole, it is attracted to any surface of the tube wall, Drive means for changing an angle formed by an axis connecting the centers of the input side sphere and the output side sphere with respect to the traveling direction of the light emitted from the input optical waveguide.
[0012]
[2] The optical switch according to [1], wherein a relative refractive index of the input-side sphere and the output-side sphere with respect to a medium surrounding the input-side sphere and the output-side sphere is 1.3 to 2.2. To do.
[0013]
[3] The optical switch according to [1], wherein the diameters of the input side sphere and the output side sphere are 1 μm to 5 mm.
[0014]
[4] In the optical switch according to [1], a diameter ratio of the two spheres (input sphere: output sphere or output sphere: input sphere) is 1: 1 to 1: 4. It is characterized by.
[0015]
[5] The optical switch according to [2], [3] or [4] is a one-input two-output type composed of one input optical waveguide and two output optical waveguides. And
[0016]
[6] The optical switch according to [2], [3] or [4], wherein the optical switch is a two-input one-output type composed of two input optical waveguides and one output optical waveguide. And
[0017]
[7] The optical switch according to [2], [3] or [4], wherein a concave portion is provided to restrain movement of the input side sphere and the output side sphere.
[0018]
[8] In the optical switch described in [7] above, by providing three or more electrodes around the input side sphere and the output side sphere, and switching the voltage applied between them, the input side sphere and the output sphere are switched. The axis connecting the centers of the side spheres Said The angle formed by the light emitted from the input optical waveguide is changed.
[0019]
[9] The optical switch according to [7], wherein the surface of at least one of the input side sphere and the output side sphere is hydrophilic and the wall surface of the recess is hydrophobic.
[0020]
[10] The optical switch according to [7], wherein the surface of at least one of the input side sphere and the output side sphere is hydrophobic, and the wall surface of the recess is hydrophilic.
[0021]
[11] The optical switch according to [7], wherein the recess is filled with a liquid.
[0022]
The specular resonance phenomenon refers to an axis connecting the centers of two spheres when two transparent spheres having a relative refractive index of 1.3 to 2.2 are close to or in close contact with the surrounding medium. On the other hand, a light scattering phenomenon in which a light beam obliquely incident is strongly specularly reflected as if a mirror is placed on the shaft.
[0023]
This specular reflection occurs when the diameters of the two spheres are equal, but when the diameters of the two spheres are different, the light is emitted in a specific direction determined by the ratio of the diameters and the incident direction (in this case Although the emission direction is not a specular reflection direction, it is essentially a phenomenon based on the same principle, and is similarly called specular resonance). In addition, the range of the diameter of a sphere exhibiting such a phenomenon is very wide. For example, for visible light having a wavelength of about 400 to 700 nm, specular resonance is similar from a microsphere having a diameter of about 1 μm to an infinitely large sphere. Observed.
[0024]
This phenomenon is based on experimental results and calculation results. T.A. Miyazaki, H .; Miyazaki and K.M. Miyano, “Anomalous scattering from dielectricbispheres in the specular direction”, Optics Letters, Vol. 27, no. 14, pp. 1208-1210 (2002).
[0025]
In short, the two transparent spheres have the function of deflecting light as if they were one micromirror. Therefore, if the angle formed by the axis connecting the two spheres to the incident light is changed, The direction of light emission can be switched. Further, since the movable part is only a sphere, it can be easily and rapidly switched by a force such as electrostatic force. At this time, if a structure that restricts the movement of the sphere is provided, switching can be performed by digitally switching the voltage without particularly controlling the magnitude of the electrostatic force.
[0026]
The specular resonance phenomenon is a special geometric optical phenomenon that can be expressed even from a very small sphere with a diameter of only 1 μm. Is suitable. However, since the same principle can be applied in a wide range, it can also be used for switching a collimated light beam having a diameter several hundred times the wavelength.
[0027]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail.
[0028]
FIG. 1 is a block diagram of an optical switch according to a first embodiment of the present invention. FIG. 1 (a) is a plan view thereof, FIG. 1 (b) is a sectional view taken along line AA ', and FIG. Is a perspective view thereof. Here, an example applied to a planar polymer optical waveguide circuit is shown.
[0029]
In these drawings, reference numeral 101 denotes an optical waveguide substrate, 102 denotes an input optical waveguide, 103 denotes a wedge-shaped vertical hole with rounded corners facing the rear end portion of the input optical waveguide 102, and 104 denotes the vertical hole 103. A first output optical waveguide facing the tip, 105 is a second output optical waveguide facing the vertical hole 103, and 106 is a first output light waveguide facing the vertical hole 103. The first electrode 107 disposed on the side of the waveguide 104 is a second electrode disposed between the first output optical waveguide 104 and the second output optical waveguide 105 whose front end faces the vertical hole 103. The electrode 108 is a third electrode 109 disposed on the second output optical waveguide 105 side with its tip facing the vertical hole 103, and 109 is disposed on the input optical waveguide 102 side of the vertical hole 103, and has a diameter of 10 μm. , With a refractive index of 1.8 An input side sphere 110 made of a glass sphere is arranged on the first and second output optical waveguides 104 and 105 side of the vertical hole 103, and an output side sphere made of a transparent glass sphere having a diameter of 10 μm and a refractive index of 1.8, 111 Is a glass or polymeric sealing layer.
[0030]
Here, the cross sections of the optical waveguides 102, 104, and 105 are squares each having a side of 6 μm, which is a size that matches a general optical fiber for optical communication.
[0031]
Further, the vertical hole 103 has a width in which the input-side sphere 109 is almost fitted on the side where the input optical waveguide 102 is disposed, and the first and second output optical waveguides 104 and 105 are wide. The depth is slightly larger than the diameter of the balls 109 and 110, and these balls 109 and 110 are movable because they are not fixed anywhere.
[0032]
In the vertical hole 103, the output side sphere 110 is turned on to the first output optical waveguide 104 by the action of the first electrode 106 and the second electrode 107 in the loose fitting space, or the second electrode 107 and the third electrode The second output optical waveguide 105 can be turned on by the action of the electrode 108.
[0033]
Such a vertical hole 103 can be easily formed by using photolithography and dry etching. In particular, when the material of the optical waveguides 102, 104, and 105 is a polymer, efficient and highly accurate processing can be realized by using reactive ion etching using oxygen.
[0034]
The cross-sectional shape of the vertical hole 103 is such that the input side sphere 109 is substantially fitted to the tip of the wedge, and the output side sphere 110 can move somewhat freely with respect to it. The axis connecting the centers is constrained within a range of ± 20 degrees with respect to the input optical waveguide 102, and the positions of the two spheres 109 and 110 cannot be freely interchanged in the vertical hole 103. .
[0035]
Moreover, the high refractive index glass spheres used here as the spheres 109 and 110 are mass-produced as reflective particles used in traffic paints and can be easily obtained. It is not difficult to accurately place such fine spheres in the vertical holes. When a suspension in which the spheres are dispersed in an appropriate solvent is allowed to flow on the substrate on which the vertical holes have been processed, 2 It is known that individual particles enter vertical holes.
[0036]
This technique is described in Y.W. Yin and Y. Xia, Self-Assembly of Monodispersed Spherical Colloids into Complex Aggregates with WellDefined Sizes, Shapes, and Structured Advanceds. 13, pp. 267-271 (2001).
[0037]
FIG. 1 shows a part of a circuit in which a large number of optical switches are integrated on an optical waveguide substrate 101. The input optical waveguide 102 may be connected to an input optical fiber, or may be connected to an output optical waveguide of an optical waveguide device such as an optical switch or multiplexer / demultiplexer in the previous stage.
[0038]
Similarly, the first output optical waveguide 104 and the second output optical waveguide 105 may be directly connected to the output optical fiber, or may be connected to the input optical waveguide of a subsequent optical waveguide device. Sometimes it is.
[0039]
In order to connect an optical fiber to such an optical waveguide circuit, an optical fiber having a cleaved tip is pressed against the end face of the substrate and bonded, as is done with conventional planar optical waveguide type optical switches and optical multiplexer / demultiplexers. It is common to fix with an agent. At this time, in order to accurately align the end face of the optical waveguide and the waveguide of the optical fiber, a glass or silicon V-groove substrate is used.
[0040]
2A and 2B are diagrams for explaining the operation of the optical switch according to the first embodiment of the present invention. FIG. 2A is a diagram showing a switching state to the first output optical waveguide, and FIG. It is a figure which shows the switching state to the output optical waveguide.
[0041]
The two spheres 109 and 110 accommodated in the vertical hole 103 are formed on either surface of the tube wall according to the voltage applied to the three electrodes 106, 107 and 108 patterned so as to surround the vertical hole 103. Fixed to be attracted.
[0042]
As shown in FIG. 2A, when the second electrode 107 is grounded and a voltage (for example, 5 V) is applied to the first electrode 106 (the third electrode 108 is open), the first electrode A line of electric force is generated between 106 and the second electrode 107. At this time, the output side sphere 110 is attracted between the first electrode 106 and the second electrode 107 by an electrostatic force called a gradient force generated by a non-uniform electric field (positive dielectrophoresis).
[0043]
When light from the input optical waveguide 102 enters the two spheres 109 and 110 arranged in this way, the light is specularly reflected as if the mirror indicated by Q is virtually present (mirror surface). Resonance phenomenon). As a result, the light travels toward the first output optical waveguide 104.
[0044]
On the other hand, as shown in FIG. 2B, when the second electrode 107 is grounded and a voltage is applied to the third electrode 108, an electric force is generated between the second electrode 107 and the third electrode 108. A line is generated, and the light travels toward the second output optical waveguide 105 by a specular resonance phenomenon.
[0045]
In this manner, light can be switched by manipulating the voltages of the first electrode 106 and the third electrode 108. The optical waveguide substrate 101 (see FIG. 1) is covered with a glass or polymer sealing layer 111 after the spheres 109 and 110 are arranged, and the spheres 109 and 110 come out of the vertical holes 103. It is restrained so that it cannot be done.
[0046]
In the above-described embodiment, the two balls 109 and 110 are not joined, and the vertical hole 103 is manufactured with a positive tolerance so that the balls 109 and 110 can move freely. Although there is a possibility that a finite gap is formed between the sphere 109 and the sphere 110, the specular resonance phenomenon occurs until the sphere and the sphere are separated from each other by a radius, so that there is no problem in operation as an optical switch.
[0047]
In addition, Y. Yin and Y. In the document by Xia, there is also introduced a method in which two spheres are fused and connected at the contact portion by heating, but such connected particles may be used. In order to obtain the optimum transmission efficiency and extinction ratio, an angle (± 20 degrees in the above embodiment) at which the axis formed by the two spheres 109 and 110 can rotate in the vertical hole 103 and the spheres 109 and 110 can be rotated. It is necessary to carefully select the relationship between the refractive index, the tolerance of the size of the vertical hole 103 with respect to the diameter of the spheres 109 and 110, and the position and angle of the output optical fiber end face. Further, the applied voltage is not limited to direct current, but may be alternating current or a single polarity pulse train.
[0048]
The above is the basic embodiment of the present invention, but some ingenuity is necessary to realize a stable operation. For example, a minute object having a size of μm often cannot be peeled off by a force of an electrostatic force by an externally applied voltage once it comes into contact with another object. This is because the minute object is strongly adsorbed to the interface that first contacts the surface due to the Van der Waals force, electrostatic force due to electric charges localized near the interface, and meniscus force of water condensed on the edge of the interface. For this reason, once contacted, it is not so easy to freely switch the states of FIG. 2A and FIG.
[0049]
As one effective method for preventing the adsorption, for example, the output side sphere 110 has a hydrophilic surface, the tube wall surface of the vertical hole 103, the inner surface of the sealing layer 111, the surface of the input side sphere 109, and the like. There is a method in which the surfaces of all objects in contact with the surface are treated to be hydrophobic. In this case, a film of water at the molecular layer level is formed on the surface of the output side sphere 110 in the manufacturing process. On the other hand, the other surfaces try to eliminate the water film, so that the adsorption force between the sphere and the tube wall is weakened.
[0050]
In this embodiment, an example using a polymer optical waveguide has been described. Therefore, the output side sphere 110 is described as hydrophilic and the tube wall of the vertical hole 103 is described as hydrophobic. The effect is obtained.
[0051]
Further, when the vertical hole 103 is filled with a liquid such as hydrocarbon or water, the liquid always tries to separate the sphere from the wall surface, so that the output-side sphere 110 is not always adsorbed to any surrounding objects, but only the electrostatic force. The position is controlled only by the distribution.
[0052]
By the way, when the vertical hole 103 is filled with liquid, some attention is required to operate the optical switch as expected.
[0053]
First, the behavior of the sphere when a voltage is applied differs depending on the relationship between the dielectric constant of the filled liquid and the sphere. When the dielectric constant of the liquid is lower than that of the sphere, the same phenomenon as in FIG. 2 occurs (positive dielectrophoresis).
[0054]
However, when the dielectric constant of the liquid is higher than that of the sphere, negative dielectrophoresis occurs, and when a voltage is applied between the first electrode 106 and the second electrode 107 as shown in FIG. The sphere 110 moves in the direction to be excluded from the electric lines of force and is pressed against the wall surface on the third electrode 108 side, so that the light is switched to the second output optical waveguide 105 side. . When a liquid having a large dielectric constant such as water is used, negative dielectrophoresis often occurs. Further, the required refractive index of the sphere varies depending on the refractive index of the liquid. An important parameter in the specular resonance phenomenon is not the refractive index of the sphere itself but the ratio of the refractive index of the sphere and the medium surrounding it (relative refractive index).
[0055]
Therefore, for example, if the refractive index of the liquid is 1.3, in order to realize the same operation as in FIG. 2, the refractive index of the sphere is set so that the relative refractive index with respect to the medium of the sphere is 1.8. 2.34 is required. If the material of the sphere is made of special high refractive index glass or titanium oxide, it is possible to realize such a refractive index.
[0056]
As described above, several methods for preventing malfunction due to sphere adsorption have been described. However, an appropriate adsorption force may be useful for stability and power saving. If an appropriate adsorption force is realized by appropriate selection of the surface coating material, surface roughness, and the liquid to be sealed, switching can be performed with good reproducibility by the applied voltage. Self-holding that can be maintained can also be realized.
[0057]
FIG. 3 is a block diagram of an optical switch showing a second embodiment of the present invention. FIG. 3 (a) is a plan view thereof, FIG. 3 (b) is a sectional view taken along line BB 'of FIG. Is a perspective view thereof. Here, an example of realizing a large-sized optical switch that can be used by freely connecting optical fibers is shown.
[0058]
In these drawings, 200 is an optical switch substrate, 201 is an input optical waveguide, 202 is an input optical fiber, 203 is a split sleeve tube, 204 is a microcapillary, 205 is a selfoc lens, 206 is a screw cap, and 207 is vertical. Hole 210, first output optical waveguide, 211 first output optical fiber, 212 split sleeve tube, 213 microcapillary, 214 self-lock lens, 215 screw cap, 220 second output Optical waveguide, 221 is a second output optical fiber, 222 is a split sleeve tube, 223 is a microcapillary, 224 is a selfoc lens, 225 is a screw cap, 231 is a first electrode, 232 is a second electrode, 233 is the third electrode, 234 is the fourth electrode, 241 is the input side sphere, 242 is the output Side ball 243 is sealed layer.
[0059]
In this embodiment, large spheres 241 and 242 having a size of several mm are used. Each optical fiber can be fixed to the optical switch substrate 200 by inserting it from the tapered end of the microcapillary, pressing it against the SELFOC lens, and fastening a screw cap to the split sleeve tube. Light from the input optical fiber 202 is collimated by the Selfoc lens 205 and enters the input-side sphere 241. As in FIG. 1, two transparent spheres 241 and 242 are accommodated in a wedge-shaped vertical hole 207 with rounded corners, and the angles of the spheres 241 and 242 with respect to incident light can be changed by applying a voltage. ing. In this example, four electrodes 231 to 234 are used.
[0060]
4A and 4B are diagrams for explaining the operation of the optical switch according to the second embodiment of the present invention. FIG. 4A is a diagram showing a switching state to the first output optical waveguide, and FIG. It is a figure which shows the switching state to the output optical waveguide.
[0061]
As shown in FIG. 4A, when a voltage is applied between the first electrode 231 and the second electrode 232, the spheres 241 and 242 are attracted to the first electrode 231 and the second electrode 232 side, The light enters the SELFOC lens 214 on the first output optical fiber 211 side, is condensed again on the end face of the optical fiber, and is output to the first output optical fiber 211.
[0062]
Further, as shown in FIG. 4B, when a voltage is applied between the third electrode 233 and the fourth electrode 234, the voltage is similarly output to the second output optical fiber 221. Further, the surface treatment of the inner wall of the vertical hole 207 and the balls 241 and 242, the effect of sealing the liquid in the vertical hole 207, and the difference in operation at that time are the same as in the example of FIG. Similarly, the balls 241 and 242 may or may not be joined. However, in this embodiment, the vertical hole 207 has a slightly large dimension of several millimeters. , 242 should be connected.
[0063]
As shown in FIG. 3, when a sphere having a size of several mm is used, care must be taken in designing the shape of the vertical hole 207 having a rounded corner and a wedge shape. In the specular resonance phenomenon in a sphere that is large with respect to such a wavelength, the incident position of light on the sphere has a large effect on the efficiency. Strictly speaking, it is necessary to accurately calculate by the ray tracing method. For example, when the refractive index is 1.8, the half of the radius of the sphere from the center of the sphere in the direction opposite to the direction in which the light is reflected. The light can be transmitted with the highest efficiency when the light is incident on a point that is shifted by a certain amount.
[0064]
In FIGS. 3 and 4, the shape of the vertical hole is such that the sphere on the input side can also be shifted so that light enters the optimal position in each switching state.
[0065]
FIG. 5 is a plan view of an essential part of an optical switch showing a third embodiment of the present invention, which is a modification of the first embodiment.
[0066]
In this figure, 301 is an optical waveguide substrate, 302 is an input optical waveguide, 303 is a wedge-shaped vertical hole with rounded corners facing the rear end of the input optical waveguide 302, and 304 is a tip of the vertical hole 303 at its tip. A first output optical waveguide facing the vertical hole 303, a second output optical waveguide facing the vertical hole 303, and a first output optical waveguide 306 facing the vertical hole 303. A first electrode 307 is disposed on the side of 304, and a second electrode 307 is disposed between the first output optical waveguide 304 and the second output optical waveguide 305 whose front end faces the vertical hole 303. , 308 is a third electrode disposed on the second output optical waveguide 305 side with its tip facing the vertical hole 303, and 309 is disposed on the input optical waveguide 302 side of the vertical hole 303 and has a large diameter. Input consisting of transparent glass balls Side balls, 310 is an output-side ball made of small transparent glass spheres having a diameter which is disposed in the first and second output optical waveguides 304 and 305 side of the vertical hole 303.
[0067]
As shown in FIG. 5, even if the sizes of the two spheres 309 and 310 are different, the specular resonance phenomenon occurs. In this case, the relationship between the incident angle and the outgoing angle is the diameter of the spheres 309 and 310. Varies according to the ratio. When the diameter of the input side sphere 309 is large and the diameter of the output side sphere 310 is small, the emission angle changes greatly with a slight change in the incident angle.
[0068]
In FIG. 5, a large branching angle of about 70 degrees is realized by selecting the ratio of the sphere diameters as 3: 1. Conversely, when the diameter of the input side sphere 309 is small, the exit angle does not change much with respect to a large change in incident angle. Such a case is effective for stabilizing the emission angle.
[0069]
Incidentally, one important characteristic required in an optical switch is that the operation does not depend on the polarization state of incident light. Since the specular resonance phenomenon is essentially caused by the refraction phenomenon at the dielectric interface, the efficiency varies depending on the polarization according to Fresnel's law. However, by applying appropriate antireflection processing such as coating or fine unevenness processing on the surface of the sphere, it is possible to eliminate Fresnel loss and realize a polarization-independent optical switch. The present invention includes an example in which such processing is performed on the surface of a sphere. In the case of a sphere of μm size, it is possible to find a condition that does not depend on polarization by selecting the refractive index of the sphere well.
[0070]
In all the embodiments described above, an example in which one input optical waveguide and two output optical waveguides are connected by an optical switch is taken up. However, when light is incident from the opposite side, two input signals are input. An optical switch that outputs any one of the above. The present invention naturally includes such an example. In this case, the input optical waveguide and the output optical waveguide described above may be read as the output optical waveguide and the input optical waveguide, respectively.
[0071]
Further, as shown in the second embodiment of FIG. 3, the optical waveguide of the present invention includes an optical fiber and a system in which a collimator is connected. The electrode arrangement of the present invention is not limited to the examples shown in FIGS. For example, a ground electrode on the back surface of the substrate may be used instead of the second electrode 107 (common electrode) of the first embodiment of FIG.
[0072]
In addition, this invention is not limited to the said Example, A various deformation | transformation is possible based on the meaning of this invention, and these are not excluded from the scope of the present invention.
[0073]
【The invention's effect】
As described above in detail, according to the present invention, it is possible to provide an optical switch that is suitable for integration and can be simply configured.
[0074]
More specifically, as a sphere used as a component for optical switching in the present invention, a sphere having a high shape accuracy and dimensional accuracy made of various materials from a diameter of several μm to a few mm can be easily used. It can be obtained inexpensively. Further, the processing required for optical switching is simple as long as etching is performed perpendicular to a normal optical waveguide circuit. The step of arranging the spheres in the vertical holes can also be realized in a self-integrating manner.
[0075]
Furthermore, light can be switched only by a digital operation that does not require particularly difficult control, such as pulling (or pressing) a sphere against a wall surface by applying a voltage.
[Brief description of the drawings]
FIG. 1 is a configuration diagram of an optical switch according to a first embodiment of the present invention.
FIG. 2 is an operation explanatory view of an optical switch showing a first embodiment of the present invention.
FIG. 3 is a configuration diagram of an optical switch showing a second embodiment of the present invention.
FIG. 4 is an operation explanatory view of an optical switch showing a second embodiment of the present invention.
FIG. 5 is a plan view of an essential part of an optical switch showing a third embodiment of the present invention.
[Explanation of symbols]
101, 301 Optical waveguide substrate
102, 201, 302 Optical waveguide for input
103,207,303 Vertical hole
104, 210, 304 First output optical waveguide
105, 220, 305 Second optical waveguide for output
106,306 first electrode
107,307 Second electrode (common electrode)
108,308 Third electrode
109, 241, 309 Input side sphere
110,242,310 Output side sphere
111,243 sealing layer
200 Optical switch board
202 Input optical fiber
203, 212, 222 Split sleeve tube
204, 213, 223 Microcapillary
205, 214, 224 Selfox lens
206,215,225 screw cap
211 First output optical fiber
221 Second optical fiber for output
231 first electrode
232 second electrode
233 third electrode
234 fourth electrode

Claims (11)

(A) an input optical waveguide;
(B) a plurality of output optical waveguides;
(C) an input-side sphere and an output-side sphere that are transparent at a use wavelength that is close or in close contact within a vertical hole disposed between the input optical waveguide and the plurality of output optical waveguides;
(D) The input is applied to any surface of the tube wall according to a voltage applied to a plurality of electrodes patterned so as to surround the vertical hole, and the input with respect to the traveling direction of the light emitted from the input optical waveguide An optical switch comprising drive means for changing an angle formed by an axis connecting the center of the side sphere and the output side sphere.   2. The optical switch according to claim 1, wherein a relative refractive index of the input side sphere and the output side sphere with respect to a medium surrounding the input side sphere and the output side sphere is 1.3 to 2.2.   2. The optical switch according to claim 1, wherein the diameter of the input side sphere and the output side sphere is 1 μm to 5 mm.   2. The optical switch according to claim 1, wherein a ratio of the diameters of the two spheres is 1: 1 to 1: 4.   5. The optical switch according to claim 2, 3 or 4, wherein the optical switch is a one-input two-output type composed of one input optical waveguide and two output optical waveguides.   5. The optical switch according to claim 2, 3 or 4, wherein the optical switch is a two-input one-output type composed of two input optical waveguides and one output optical waveguide. In the optical switch according to claim 2, 3 or 4, wherein the vertical hole is characterized by a recess for restraining the movement of the output-side ball and the input side sphere. 8. The optical switch according to claim 7, wherein three or more electrodes are provided around the input-side sphere and the output-side sphere, and a voltage applied between them is switched so that a center between the input-side sphere and the output-side sphere is obtained. an optical switch, characterized in that to change the light and angle the axis is emitted from the input optical waveguide connecting the.   8. The optical switch according to claim 7, wherein the surface of at least one of the input side sphere and the output side sphere is hydrophilic and the wall surface of the recess is hydrophobic.   8. The optical switch according to claim 7, wherein the surface of at least one of the input-side sphere and the output-side sphere is made hydrophobic and the wall surface of the recess is made hydrophilic.   8. The optical switch according to claim 7, wherein the recess is filled with a liquid.

Images