JP4002989B2 - Fluid suction and / or fluid press-fitting device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention allows a large amount of fluid to flow by supplying a small amount of pressurized fluid while being small in size, and also allows fluid suction and / or fluid with excellent durability, heat resistance and corrosion resistance. The present invention relates to a pressure feeding device.
[0002]
[Prior art]
In general, in order to give a flow to the fluid to be delivered in the flow path, the supply pressure of a pressure vessel containing the fluid to be delivered at a predetermined pressure, the discharge pressure or suction pressure of a pump such as a piston pump or a rotary pump, A suction pressure, a supply pressure of a compressor including a pump and a pressure accumulator that stores a pressure fluid discharged from the pump at a predetermined pressure, a discharge pressure or a suction pressure of a blower that forms a flow with a centrifugal fan, and the like are used.
[0003]
That is, the fluid to be fed is pressed into the flow channel with the supply pressure of the pressure vessel connected upstream of the flow channel, or the fluid to be fed is pressed into the flow channel with a pump, compressor, and blower connected to the upstream side of the flow channel. Or sucking the fluid to be fed with a suction pump connected downstream of the flow channel, or sucking the fluid to be fed upstream of the fluid by interposing a pump, blower, suction pump, etc. in the middle of the flow channel The fluid to be delivered is press-fitted or used in combination.
[0004]
[Problems to be solved by the invention]
Among the fluid suction and / or fluid press-fitting devices that give flow to these fluids to be delivered, in pumps, compressors, blowers, etc., the flow rate of the fluid to be delivered depends on the capabilities of the pumps, compressors, blowers, suction pumps, etc. When a large amount of fluid to be delivered is circulated, large capacity pumps, compressors, blowers and the like are inevitably used, and there is a problem that the installation volume of the equipment increases and the equipment cost becomes remarkably expensive.
[0005]
In addition, when the fluid to be delivered is a high-temperature fluid, parts such as pumps, compressors, blowers, and suction pumps may be deformed by being exposed to high temperatures or damaged by thermal fatigue, resulting in durability and heat resistance. There is a problem of lowering.
[0006]
Furthermore, when the delivered fluid is a corrosive fluid containing a corrosive component such as hydrogen fluoride or hydrogen chloride, parts such as the pump, compressor, blower, and suction pump are relatively short-termed depending on the delivered fluid. There is a problem in that it is corroded and the function is remarkably deteriorated or unusable.
[0007]
The present invention solves the above-mentioned technical problems and allows a large amount of fluid to flow by supplying a small amount of pressurized fluid while being small in size, and also has durability, heat resistance and corrosion resistance. An object of the present invention is to provide a fluid suction and / or fluid press-fitting device.
[0008]
[Means for Solving the Problems]
In the fluid suction and / or fluid press-fitting device according to the present invention, in order to achieve the above-mentioned object, the fluid to be delivered is disposed in a flow path that flows in one direction, and the pressurized fluid is disposed downstream of the flow of the fluid to be delivered. A nozzle having a streamlined outer shape that jets in a direction, and a pressurized fluid supply device that supplies pressurized fluid to the nozzle from the outside of the flow path, and between the nozzle and the inner surface of the flow path, A passage of the fluid to be delivered is formed over the circumference, communicated with the pressurized fluid supply device inside the nozzle, and a pressurized fluid ejection passage opening in the downstream direction, and continuously formed with a larger diameter than this. A fluid mixing path that opens to the downstream end face of the nozzle, and a suction hole that communicates the upstream side of the flow path to the fluid mixing path. The ejecting action in these fluid mixing chambers and the downstream end of the nozzle With Ejection in the Head By the ejection action, it is characterized in that it has to flow to the downstream side further small amount of pressurized fluid in a more large amount of the feed fluid from the upstream side.
[0009]
According to the present invention, the pressurized fluid supplied from the pressurized fluid supply device is ejected from the nozzle into the flow of the fluid to be fed in the downstream direction of the flow, and the so-called ejector action causes the fluid to be delivered downstream. As a result of being sucked to the side, a large amount of fluid to be fed can be circulated through the flow path by supplying a small amount of pressurized fluid.
[0010]
Further, since the nozzle and the terminal pipe of the pressurized fluid supply device are merely arranged in the flow path through which the high temperature and / or corrosive fluid is flowed, they have heat resistance and / or corrosion resistance. Durability, heat resistance, and corrosion resistance can be increased by forming with a material, or durability, heat resistance, and corrosion resistance can be increased by appropriately replacing parts.
[0011]
Hereinafter, the present invention will be described in detail.
In the present invention, the fluid to be delivered is not particularly limited as long as it is a fluid, and its composition, temperature, presence or absence of corrosiveness, etc. are not limited. The use of the fluid to be delivered is not particularly limited, and includes exhaust gas discharged into the atmosphere from various devices in addition to combustion, chemical processing gas, carrier carrier, mechanical drive, and the like.
[0012]
Examples of the delivered fluid for combustion include air, gaseous fuel, liquid fuel, and a mixture of air and fuel. Examples of the supply fluid include combustors such as dust incinerators and incinerators. Examples include furnace chambers, steam generating boilers, heating boilers, internal combustion engines, and the like.
[0013]
Delivered fluids for chemical processing can be classified into reactive fluids that cause chemical processing, catalytic fluids that promote or suppress chemical reactions, and reactive fluids or dilution fluids that dilute catalytic fluids. it can.
[0014]
Examples of the reactive fluid include air (oxygen) used for combustion, hydrogen fluoride, hydrogen chloride, nitrogen-containing acidic gases such as NO and NO ₂ , and sulfur-containing acidic gases such as SO ₂ and SO _3. Can be mentioned. Examples of catalytic fluids that have a catalytic action to promote chemical treatment include transition metals, platinum group chlorides and oxides, and sulfates. Examples of catalytic fluids having oxygen include oxygen and bromine in the reaction between chlorine and hydrogen, and the action of hydrogen in the ammonia decomposition reaction with an iron catalyst. Further examples of the diluting fluid include water, solvent liquid, air, and inert gas.
[0015]
The cross-sectional shape of the flow path for flowing the fluid to be delivered of the present invention in one direction is not particularly limited, and may be formed in a generally used rectangle, a square such as a square, a circle, or an ellipse.
[0016]
Further, as a means for forming the flow of the fluid to be delivered in the flow path, the present invention has a function of forming a unidirectional flow in the fluid by the so-called ejector action, so that the suction pressure and / or the discharge of the present invention is used. The pressure of the pressure vessel may be a supply pressure, such as a suction pressure and / or a discharge pressure of a pump such as a piston pump or a rotary pump, a supply pressure of a compressor, a suction pressure and / or a discharge pressure of a blower, etc. You may use together suction pressure and / or discharge pressure.
[0017]
The pressurized fluid ejected in the downstream direction of the flow of the fluid to be delivered by the nozzle is not particularly limited as long as the fluid is pressurized to a pressure higher than that of the fluid to be delivered, and the composition may be the same as that of the fluid to be delivered. , May be different. Therefore, the presence or absence of corrosiveness is not questioned, and the temperature, supply pressure, supply amount, etc. of the pressurized fluid may be appropriately set according to the use and scale.
[0018]
Furthermore, when the composition of the pressurized fluid is different from that of the fluid to be fed, it does not matter whether it is reactive with the fluid to be fed. As the pressurized fluid having reactivity with the fluid to be delivered, in addition to a fluid containing a substance (for example, an oxidizing agent, a reducing agent, etc.) that reacts with the fluid to be delivered and contains a harmful substance to render it harmless, Those containing substances that react explosively (for example, fuel) are also included. Typical examples of the pressurized fluid that is not reactive with the fluid to be delivered are inert gases such as nitrogen, carbon dioxide, and argon.
[0019]
The outer shape of the nozzle that ejects the pressurized fluid in the downstream direction of the flow of the fluid to be fed is a streamlined outer shape so as not to disturb the flow of the surrounding fluid to be fed as much as possible.
[0020]
The shape of the nozzle hole of the nozzle is not particularly limited as long as it is formed so that the pressurized fluid can be ejected in the downstream direction of the flow of the fluid to be fed. The cross section of the flow path that opens in the downstream direction of the fluid flow may have a constant cylindrical hole shape.
[0021]
In the present invention, in order to enhance the ejecting action, the nozzle is formed in the inside thereof with a pressurized fluid ejection path that opens downstream, and continuously formed with a larger diameter than this, and is opened at the downstream end face of the nozzle. a fluid mixing passage that forms a upstream side of the flow path to the fluid mixing passage to and a suction hole for communicating.
[0022]
In this case, due to the ejecting action of the pressurized fluid ejected from the pressurized fluid ejection path, a part of the transported fluid in the flow path is sucked into the fluid mixing path via the suction hole and mixed with the pressurized fluid to be fluid It ejects from the mixing channel to the channel. And the to-be-delivered fluid which did not flow into the suction path by the eject action produced by the ejection of the mixed fluid of the pressurized fluid and the to-be-delivered fluid from the fluid mixing path is sucked and pumped downstream. In other words, the fluid to be delivered is sucked from the upstream side to the downstream side by the double ejecting action, and as will be described later, the pressurized fluid is ejected from the nozzle, thereby at least 3 times, preferably 10 times the ejection amount. As described above, it is particularly preferable that the exhaust gas as the fluid to be fed 15 times or more can flow to the downstream side.
[0023]
As described above, the shape of the nozzle hole may be a cylindrical hole with a uniform cross-section of the flow path. However, in order to minimize the pressure fluctuation during ejection and enhance the ejecting action, at least the outlet It is preferable to form a divergent, that is, divergent toward the outlet in the vicinity.
[0024]
The material of the nozzle is not particularly limited, and may be appropriately selected depending on use conditions. Therefore, in the case of a nozzle used in a high temperature environment, a metal (for example, stainless steel), ceramics, or a composite material thereof excellent in heat resistance and shape retention at high temperature may be used. When a corrosive fluid or pressurized fluid is used, a metal (for example, stainless steel) having excellent corrosion resistance, ceramics, or a composite material thereof may be used.
[0025]
However, even if the function is reduced or lost due to high temperature and / or corrosion, the function as the fluid suction and / or fluid press-in device can be restored by replacing the nozzle. The function can be maintained at low cost over a long period of time.
[0026]
The pressurized fluid supply device only needs to be able to pressurize and supply a fluid to a predetermined pressure. For example, the pressurized fluid supply device may include a pressure vessel, a pump such as a piston pump or a rotary pump, a blower, or a compressor.
[0027]
In addition, a part of the terminal pipe of the pressurized fluid supply device connected to the nozzle is disposed in a flow path through which the high temperature and / or corrosion resistant fluid flows, and there is a case where the function is deteriorated or lost due to the high temperature and / or corrosion. However, in this case, it is possible to restore the function by exchanging the terminal pipe, and thereby it is possible to maintain the function as the fluid suction and / or fluid press-fitting device at low cost over a long period of time.
[0028]
As described above, the present invention is arranged in the flow path in which the fluid to be fed flows in one direction, and the nozzle that ejects the pressurized fluid in the downstream direction of the flow of the fluid to be fed; Since the pressurized fluid supply device that supplies the pressurized fluid to the nozzle is provided, the ejected fluid of the pressurized fluid ejected from the nozzle can increase the amount of fluid to be delivered in the flow path from the amount of pressurized fluid supplied. The effect | action which can be flowed downstream is acquired.
[0029]
Further, since the components arranged in the flow path are the nozzle that does not rotate or reciprocate itself and the terminal piping of the pressurized fluid supply device, the heat and corrosion of the fluid flowing through the flow path The function of not easily losing the function can be obtained.
[0030]
Furthermore, the function arrange | positioned easily and cheaply can be obtained by forming or replacing | exchanging the components arrange | positioned in a flow path with the raw material which has heat resistance and / or corrosion resistance.
[0031]
DETAILED DESCRIPTION OF THE INVENTION
An embodiment of the present invention will be specifically described with reference to the drawings as follows.
[0032]
FIG. 2 is a block diagram of a semiconductor manufacturing apparatus. A main body 1 of this semiconductor manufacturing apparatus is provided between a semiconductor material such as a silicon wafer and a doping material while supplying a reaction gas from a reaction gas supply source 2 comprising a pressure vessel. Impurities are doped on the surface of the semiconductor by applying a voltage. In addition, the atmosphere is introduced into the main body 1 through the air cleaner 3 and the intake duct 4, while the exhaust gas in the main body 1 is released into the atmosphere through the exhaust gas treatment device 5.
[0033]
The main body 1 and the exhaust gas treatment device 5 communicate with each other via an exhaust duct 6, and a nozzle 8 of a fluid suction and fluid press-fitting device 7 according to an embodiment of the present invention is provided in the middle of the exhaust duct 6.
[0034]
In addition to the nozzle 8, the fluid suction and fluid press-fitting device 7 includes a pressurized air supply device 9 that supplies pressurized air to the nozzle 8 from outside the exhaust duct 6, and the nozzle 8 is reactive at high temperatures. For example, it is formed of stainless steel which is excellent in heat resistance and corrosion resistance against exhaust gas.
[0035]
Further, as shown in the cross-sectional view of FIG. 1, the nozzle 8 is disposed at an appropriate interval from the inner peripheral surface of the exhaust duct 6 over the entire circumference in order to flow the exhaust gas with high efficiency. 8 and the terminal pipe 23 of the pressurized air supply device 9 are fixed to the connection portion 10 of the exhaust duct 6 via the mounting bracket 11 in order to facilitate replacement.
[0036]
The structure of the connection part 10 of the exhaust duct 6 is not particularly limited, but a flare 12 is formed at the ends of the exhaust duct 6 on both sides, and the peripheral part of the mounting bracket 11 and the seal member S are provided between the flares 12. A band 13 wound around the outer periphery of both flares 11 is clamped.
[0037]
The mounting bracket 11 is formed in a dish shape, and has a land 15 through which the base end portion 14 of the nozzle 8 is inserted, and the land 15 and the peripheral portion are arranged at an appropriate interval in the circumferential direction. Are connected by a plurality of frames 16. In addition, an air passage 17 is formed between the frames 16 to communicate the upstream side and the downstream side.
[0038]
The base end portion 14 of the nozzle 8 is formed in a stepped cylindrical shape, is inserted into the land 15 so that the stepped surface is received by the downstream side surface of the land 15, and is fixed to the base end portion 14 from the upstream side of the land 15. The nut 18 is fixed to the mounting bracket 11 by screwing.
[0039]
The nozzle 8 has, in addition to the base end portion 14, a nozzle portion 19 that is continuous to the downstream side of the base end portion 14, and the outer shape of the nozzle portion 19 does not disturb the flow of exhaust gas formed around it as much as possible. In this way, the hemispherical surface and the tapered tapered surface are formed in a so-called streamline shape in order from the upstream side.
[0040]
Further, a pressurized air ejection path 20 made of a circular hole is formed in the base end portion 14, and the nozzle section 19 is continuous with the pressurized air ejection path 20 and is larger than the pressurized air ejection path 20. An air mixing path 21 having a diameter and opening on the downstream end face of the nozzle 8 and a suction hole 22 for communicating the upstream side of the exhaust duct 6 with the air mixing path 21 are formed. Although four suction ports 22 are formed at equal intervals in the circumferential direction, three or less suction ports 22 may be formed, or five or more suction holes 22 may be formed.
[0041]
In addition, the outlet side portion of the air mixing passage 21 is formed in a divergent manner toward the downstream side in order to minimize pressure loss during ejection.
[0042]
A terminal pipe 23 of the pressurized air supply device 9 is connected to the upstream end of the exhaust duct 6 by a union nut 24, and a passage 25 that allows the pressurized air ejection path 20 to communicate with the terminal pipe 23 in the fixed nut 18. Is formed.
[0043]
The pressurized air supply device 9 includes, for example, an air compressor that sucks and pressurizes the atmosphere and supplies pressurized air with a controllable supply pressure, and supplies the nozzle 8 with a predetermined flow rate and supply pressure that are arbitrarily controlled. Pressurized air is supplied.
[0044]
When this pressurized air supply device 9 supplies, for example, 250 liters of pressurized air of 4 kg / cm ² per minute to the nozzle 8, the pressurized air ejected from the pressurized air ejection path 20 in the nozzle 8 to the air mixing path 21. However, the exhaust gas upstream of the exhaust duct 6 is sucked into the air mixing path 21 through the suction hole 22 by the ejecting action, and is mixed with the exhaust gas sucked into the air mixing path 21 from the downstream end face of the nozzle 8. It is ejected toward the downstream side of the exhaust duct 6. The exhaust gas that has not been sucked into the suction hole 22 on the upstream side of the exhaust duct 6 is sucked by the ejecting action of the mixed air flow that is ejected from the downstream end face of the nozzle 8 toward the downstream side of the exhaust duct 6. 8 is caused to flow downstream along with the mixed air current ejected from the downstream end face. In this case, the flow rate on the downstream side is 3375 liters per minute (13.5 times), and about 3125 liters of exhaust gas is flowed from the upstream side to the downstream side.
[0045]
In other words, about 3125 liters of exhaust gas can be flowed every minute by using a compressor having a size and capacity capable of supplying 250 liters of pressurized air per minute. As a result, the apparatus can be downsized using a small compressor, so that the exhaust gas can be efficiently flowed. This can significantly reduce the burden on the suction pump 5 and reduce the size of the suction pump. In some cases, the suction pump 5 can be omitted.
[0046]
Further, the nozzle 8 disposed in the exhaust duct 6 where heat resistance and corrosion resistance are problematic and the terminal pipe 23 of the pressurized air supply device 9 do not rotate or reciprocate themselves, so that they are deformed or corroded. However, its function is not easily greatly reduced or lost, and it can be used for a very long time.
[0047]
Further, when the nozzle 8 or the terminal pipe 23 of the pressurized air supply device 9 is deformed or corroded, the function is greatly reduced. The function of the fluid press-fitting device 7 can be restored, and the function of the fluid suction and fluid press-fitting device 7 can be maintained over a long period of time.
[0048]
As shown in FIG. 2, in this semiconductor manufacturing apparatus, in order to prevent reaction gas and exhaust gas from flowing out from the main body 1 to the surroundings when the apparatus is stopped, the suction duct 3 and the discharge path of the exhaust gas treatment apparatus 5 are respectively provided. On-off valves 26 and 27 are interposed.
[0049]
In the semiconductor manufacturing apparatus shown in FIG. 3, the reaction gas circulation path 28 is provided in the main body 1, and the nozzle 8 of the fluid suction and fluid press-fitting device 7 ′ of the present invention is provided in the reaction gas circulation path 28. In this case, the nozzle 8 of the fluid suction and fluid press-fitting device 7 ′ is connected to the reaction gas supply source 2 composed of a pressure vessel functioning as a pressurized air supply device via an on-off valve 29, and the concentration of the reaction gas in the main body 1. Is lowered, the on-off valve 29 is opened, the reaction gas circulation path 28 is replenished from the reaction gas supply source 2 through the nozzle 8, and the reaction gas is fed to the main body 1 and the reaction gas by the ejector action accompanying this replenishment. By circulating through the circulation path 28, the reaction gas replenished within a short time is diffused into the existing gas in the main body 1 and the reaction gas circulation path 28, and the concentration adjustment of the reaction gas in the main body 1 is achieved within a short time. To be.
[0050]
Since other configurations, operations, and effects of this semiconductor manufacturing apparatus are the same as those of the previous example, detailed description thereof will be omitted.
[0051]
In the dust incinerator shown in FIG. 4, secondary air necessary for the combustion of dust in the furnace chamber 32 and the start end of the primary air supply passage 31 for supplying primary air to the burner 30 for ignition or combustion maintenance are supplied. The nozzle 8 of the pneumatic inlet device 7 ″ according to the present invention is provided at the start end of the secondary air supply path 33, respectively.
[0052]
As a result, the primary air is efficiently supplied to the burner 30 and the secondary air is supplied to the furnace body 32 by the fluid press-fitting device 7 ″ using a compressor having a discharge capacity smaller than the total flow rate of the primary air amount and the secondary air amount. Is done.
[0053]
Although the nozzle 8 of the primary air supply path 31 and the nozzle 8 of the secondary air supply path 33 that supplies secondary air are significantly different in scale, they are the same as the previous two examples of fluid suction and fluid press-fitting devices. The configuration is the same as that of the nozzles 7 and 7 ′.
[0054]
In this embodiment, in order to simplify the configuration of the dust incinerator, two nozzles 8 are connected to one pressurized air supply device 9 through a branch pipe. You may connect to the independent pressurized air supply apparatus 9, respectively.
[0055]
The action or effect of each fluid press-fitting device 7 ″ of this dust incinerator is essentially the same as those of the previous two examples except that the fluid to be delivered is the atmosphere.
[0056]
【The invention's effect】
As described above, in the present invention, the pressurized fluid supplied from the pressurized fluid supply device is ejected in the downstream direction of the flow of the fluid to be fed by the nozzle into the flow path in which the fluid to be fed flows in one direction. Therefore, it is possible to obtain the required flow rate of the delivered fluid using a pump, blower, compressor, suction pump, etc., whose capacity is smaller than the flow rate of the delivered fluid. can get.
[0057]
In addition, since only the nozzle that does not rotate or reciprocate in the flow path and the terminal pipe of the pressurized fluid supply device connected to the nozzle are disposed in the flow path, the function is deteriorated or lost due to heat or corrosion. This can be prevented over a long period of time, thereby obtaining the effect of significantly increasing durability.
[0058]
Furthermore, by replacing the nozzle and the terminal pipe of the pressurized fluid supply device connected to the nozzle, the function can be restored easily and inexpensively, and the durability of the fluid suction and / or fluid press-fitting device as a whole can be improved. It can be further enhanced.
[0059]
In the present invention, in particular, a passage of the fluid to be delivered is formed over the entire circumference of the nozzle between the nozzle having a streamlined outer shape and the inner surface of the flow path, and communicated with the pressurized fluid supply device inside the nozzle, A pressurized fluid ejection path that opens in the downstream direction, a fluid mixing path that is continuously formed with a larger diameter than this and that opens to the downstream end face of the nozzle, and an upstream side of the flow path in the fluid mixing path Since a suction hole is formed to communicate with each other, an ejecting action in the fluid mixing chamber and an ejecting action at the downstream end of the nozzle, or a so-called double ejecting action, cause a larger amount of fluid to be fed with a smaller amount of pressurized fluid. The effect that can flow from the upstream side to the downstream side is obtained.
[0060]
Furthermore, in the present invention, particularly when the nozzle is formed of a metal having high heat resistance and corrosion resistance, ceramics, or a composite material thereof, the durability of the nozzle against a high temperature, corrosive fluid to be fed is further enhanced. An effect is obtained.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view of the present invention.
FIG. 2 is a configuration diagram of exhaust gas treatment of a semiconductor manufacturing apparatus using the present invention.
FIG. 3 is a configuration diagram of exhaust gas treatment of a semiconductor manufacturing apparatus using the present invention.
FIG. 4 is a block diagram of a dust incinerator using the present invention.
[Explanation of symbols]
6 Exhaust duct 7 Fluid suction and fluid press-in device 8 Nozzle 9 Pressurized fluid supply source

Claims (2)

A nozzle having a streamlined shape that is disposed in a flow path in which a fluid to be fed flows in one direction and jets pressurized fluid in a downstream direction of the flow of the fluid to be fed, and pressurizes the nozzle from outside the flow path A pressurized fluid supply device for supplying fluid,
A passage of a fluid to be delivered is formed between the nozzle and the inner surface of the flow path over the entire circumference of the nozzle, and a pressurized fluid ejection path that communicates with the pressurized fluid supply device inside the nozzle and opens in the downstream direction. In addition, a fluid mixing path that is continuously formed with a larger diameter than this, and that opens to the downstream end face of the nozzle, and a suction hole that communicates with the fluid mixing path on the upstream side of the flow path are formed. ,
Due to the double ejecting action of the ejecting action in these fluid mixing chambers and the ejecting action at the downstream end of the nozzle, a larger amount of fluid to be sent flows from the upstream side to the downstream side with a smaller amount of pressurized fluid. A fluid suction and / or fluid pumping device.   The fluid suction and / or fluid pumping device according to claim 1, wherein the nozzle is formed of a metal having heat resistance and corrosion resistance, ceramics, or a composite material thereof.

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