JP4002097B2 - キャピラリー・アレイ・シートの検査装置及び検査方法 - Google Patents
キャピラリー・アレイ・シートの検査装置及び検査方法 Download PDFInfo
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- JP4002097B2 JP4002097B2 JP2001385035A JP2001385035A JP4002097B2 JP 4002097 B2 JP4002097 B2 JP 4002097B2 JP 2001385035 A JP2001385035 A JP 2001385035A JP 2001385035 A JP2001385035 A JP 2001385035A JP 4002097 B2 JP4002097 B2 JP 4002097B2
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JP2001385035A JP4002097B2 (ja) | 2001-12-18 | 2001-12-18 | キャピラリー・アレイ・シートの検査装置及び検査方法 |
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JP2001385035A JP4002097B2 (ja) | 2001-12-18 | 2001-12-18 | キャピラリー・アレイ・シートの検査装置及び検査方法 |
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JP2003185597A JP2003185597A (ja) | 2003-07-03 |
JP2003185597A5 JP2003185597A5 (enrdf_load_stackoverflow) | 2005-07-28 |
JP4002097B2 true JP4002097B2 (ja) | 2007-10-31 |
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JP2001385035A Expired - Fee Related JP4002097B2 (ja) | 2001-12-18 | 2001-12-18 | キャピラリー・アレイ・シートの検査装置及び検査方法 |
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008076223A (ja) * | 2006-09-21 | 2008-04-03 | Matsushita Electric Ind Co Ltd | 円筒状透明体の検査方法とそれに用いる検査装置 |
JP5198820B2 (ja) * | 2006-09-26 | 2013-05-15 | 三菱レイヨン株式会社 | キャピラリー・アレイ・シート検査装置及び検査方法 |
JP5845601B2 (ja) * | 2011-03-15 | 2016-01-20 | 三菱レイヨン株式会社 | ゲル濃度測定用チップ、ゲルの濃度を測定する方法、およびゲル濃度測定装置 |
CN105548179A (zh) * | 2015-12-04 | 2016-05-04 | 深圳市赛尔生物技术有限公司 | 一种基于透射光或自发光测定生物芯片的方法及系统 |
CN110095491B (zh) * | 2019-05-09 | 2021-08-20 | 上海华力微电子有限公司 | 一种缺陷检测系统、检测方法及电子束扫描机台 |
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