JP3990177B2 - Microscope equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a microscope apparatus for inspecting a radiation exposure amount such as neutrons or a cellular tissue in a hospital, a laboratory, or the like, and more particularly to a microscope apparatus for imaging a sample by a line sensor.
[0002]
[Prior art]
In recent years, the number of facilities that generate radiation, such as radiation therapy in hospitals and nuclear power plants, has increased, and the need to measure the personal exposure of persons engaged in such places has increased. By the way, conventionally, the measurement of the personal exposure amount is performed by wearing a sample on a jacket or the like as disclosed in JP-A-11-174157 and JP-A-2001-42038. Means for measuring the amount of incident light and the direction of incidence have been proposed. This measuring means is generally as follows.
[0003]
This sample is made of an organic plastic or the like. When radiation passes through this sample, the polymer bond is damaged. When this damaged portion is etched with a predetermined solution, minute etch pits are generated. The shape of this etch pit differs depending on the amount of incident radiation and the incident direction. Therefore, the amount of incident radiation and the direction of incidence can be measured by examining and counting the shape of etch pits generated in the sample with a microscope. In medical institutions such as hospitals and research laboratories in universities, cell tissue examinations such as cancer cells using a microscope are frequently performed.
[0004]
By the way, it is possible to visually inspect and determine the shape and cellular structure of etch pits while looking through a microscope. However, it is a great labor and burden to visually inspect and determine many samples. Is required. Furthermore, there may be variations in the inspection and determination results due to individual differences among persons performing the inspection and determination. For this reason, a so-called two-dimensional CCD camera is attached to a microscope, and an image picked up by this charge coupled device (CCD) sensor is displayed on a computer screen to inspect the amount and direction of radiation, or cell tissue. Means are conceivable. It is also conceivable that the image processing means is used to automatically determine the amount of incident radiation and the direction of incidence from the image captured by a microscope, or to determine the range and progress of cancer cells.
[0005]
[Problems to be solved by the invention]
However, as a CCD sensor used in a conventional CCD camera, for example, a two-dimensional sensor is used in which 600 charge coupled devices each having a side of 21 micrometers are arranged vertically and approximately 350,000 in a plane. ing. Therefore, for example, when imaging at a magnification of 30 times, only a range of 21 micrometers × 600 ÷ 30 = 0.42 mm square can be captured at a time.
[0006]
For this reason, it is necessary to repeat imaging of a sample as a subject while moving the imaging range of 0.42 mm square in order from the end. By the way, in order to obtain a clear imaging screen, it is necessary to stop and sample the sample every time the screen is moved, and it takes a lot of time to image a predetermined area. Furthermore, in order to obtain a clear imaging screen, it is necessary to correctly set the focus for each imaging. For this reason, it is conceivable to use a two-dimensional CCD sensor to automatically set the focus like a normal CCD camera.
[0007]
However, such an automatic focus setting means has the following problems. That is, in the adjustment of the focus of a normal CCD camera using a two-dimensional CCD sensor, the focal position where the captured image is the sharpest, that is, the contrast is strong, is set as the focused position. For this reason, in order to adjust the focus with a two-dimensional CCD sensor, it is necessary to check the maximum value of the contrast by checking before and after the in-focus position in order to find the position having the strongest contrast. In other words, since it is necessary to check before and after the in-focus position, there is a disadvantage that it takes time to focus. SUMMARY OF THE INVENTION An object of the present invention is to provide an apparatus microscope apparatus that can rapidly and accurately image a predetermined region of a sample in examination of radiation incident amount, cellular tissue, and the like.
[0008]
[Means for Solving the Problems]
In order to solve the above problems, a first feature of the microscope apparatus according to the present invention is a microscope that images a sample with a line sensor, and an image processing unit that creates an image of the sample from the line image captured with the line sensor. The microscope has a focusing means for projecting a laser spot on the sample and determining a focus shift from the shape of the reflected light . The focusing means is on the sample and has the line The light projection position is provided in the front position of the range imaged by the sensor.
[0009]
Here, the sample means a solid for track detection for measuring the incident amount and direction of radiation, and a cell tissue piece for examination of cancer cells, etc. Includes everything to be inspected and measured. The line sensor means a sensor composed of one charge-coupled element arranged in a straight line, for example, thousands of lines. However, the line sensor is not necessarily limited to one, and a plurality of charged elements of about 2 to 10 are used. Also included is a linear arrangement of coupling elements. The image processing means is a known technique, and means means for superimposing individual line images picked up by the line sensor to create an image of a predetermined range of the sample, or for comparison and collation. The focusing means provided with the light projecting means is a known technique, for example, projecting a circular laser spot on the sample, and measuring the deviation from the proper focus from the deformation of the reflected light shape. Mean means.
[0010]
By configuring the invention in this way, when the measurement range of the sample is sequentially imaged by the line sensor, it is possible to measure and adjust the focus of the imaging target in advance, and the light projecting means can project light. It can be reliably prevented from entering the line image.
[0011]
A second feature of the microscope apparatus according to the present invention is that the light projecting means described in the first feature is a front light projecting device that projects light to a front position within a range imaged by the line sensor , and an image that is captured by the line sensor . And a rear light projecting means for projecting light to a rear position within the range to be performed. Here, the front position of the line sensor means the position in the traveling direction of the imaging range of the line sensor that moves horizontally, and the rear position of the line sensor means the opposite of the traveling direction of the imaging range of the line sensor that moves horizontally. Mean side position.
[0012]
By configuring the invention in this way, when the sample is moved and sequentially imaged by the line sensor, the scanning direction is changed from left to right and then right to left, for example, and bidirectional scanning is performed. In addition, the focus of the imaging target of the line sensor can be adjusted in advance, and the projection of the projection unit can be reliably prevented from entering the line image. A third feature of the microscope apparatus according to the present invention is that it comprises an adjusting means for adjusting the tilt and the vertical position of the sample support.
[0013]
DETAILED DESCRIPTION OF THE INVENTION
With reference to FIGS. 1 to 3, an embodiment in which the microscope apparatus according to the present invention is used in a radiation track detection apparatus will be described. The radiation track detection apparatus picks up a moving means 2 that moves a track detection solid 1 as a sample, a microscope 3 that expands the track detection solid 1, and the expanded track detection solid as a line image. The line sensor 4 includes an image of the track detection solid 1 from the line image, and a determination unit 5 that determines an incident amount and an incident direction of the radiation from the image. In addition, a tilting table 6 that is a support base for supporting the track detection solid 1 and adjusting its inclination and focus is provided above the moving means 2. The moving means 2 and the microscope 3 are respectively supported by an L-shaped gantry 7.
[0014]
The moving means 2 is installed on the horizontal part of the L-shaped gantry 7 and horizontally moves the tilting table 6 on which the track detection solid 1 is mounted in the left and right and front and rear directions by a linear motor. This linear motor is a known technique in which an armature moves on a permanent magnet arranged in a strip shape, and can be driven at high speed, high responsiveness, and highly accurate positioning. As will be described later, this linear motor is remotely controlled by a computer to move the track detection solid 1 to a predetermined position. An encoder is also provided in the vicinity of the linear motor, and the amount of movement of the tilting table 6 by the linear motor is fed back to the arithmetic processing unit 51.
[0015]
Next, the microscope 3 is composed of an optical microscope, and includes an objective lens 31, a lamp unit 32 for irradiating a track detection solid, an AF unit 33 for autofocus, a lens barrel 34, and an eyepiece 35 for visual observation. Composed. These will be described in order below.
[0016]
Objective lenses 31 having a magnification of 10 and 20 are used, and can be manually switched by a revolver 36. In order to obtain clear imaging, the lamp unit 32 bends light from a halogen lamp (not shown) provided inside the lamp unit 32 at a right angle along the optical axis of the microscope 3 by a half mirror. The detection solid 1 is irradiated and the reflected light from the track detection solid 1 is enhanced. Further, an optical fiber 8 for introducing light from a halogen lamp (not shown) provided outside the gantry 7 is provided so as to be able to irradiate from the back surface of the track detection solid 1. The autofocus AF unit 33 includes a focusing unit 331 including a laser projecting unit and a two-dimensional CCD sensor 332.
[0017]
As shown in FIG. 3, the laser light projecting means includes a front light projecting means including a laser light projecting unit 331b and a light receiving unit 331a, and a rear light projecting unit including a laser light projecting unit 331d and a light receiving unit 331c. Each of which is disposed on a printed circuit board 333. The printed circuit board 333 is attached to the inner wall surface of the AF unit 33. The laser light emitted from the light projecting units 331b and 331d is bent at a right angle along the optical axis of the microscope 3 by the lens system and the half mirror, and projected onto the track detection solid 1, and the reflected light travels along the path. Conversely, the light is detected by the light receiving units 331a and 331c, respectively.
[0018]
As shown in FIG. 4R> 4, the projection position on the track detection solid 1 is the upper surface of the track detection solid 1 in the field of view A of the microscope 3 and is within the range B captured by the line sensor 4. It is set at the neighboring positions C1 and C2 on both sides. Here, the vicinity position C1 is a projection position of the laser beam from the projection unit 331b of the front projection unit, and the vicinity position C2 indicates a projection position of the laser beam from the projection unit 331d of the rear projection unit. ing. Therefore, it is possible to reliably prevent the laser reflected light from the track detection solid 1 from entering the line screen imaged by the line sensor 4 and to measure the focus up to the imaging range B as close as possible. It becomes possible to measure. In addition, as will be described later, the focusing unit 331 including the two sets of laser projecting units can quickly adjust the inclination and focus of the track detection solid 1. In addition, as described later, two sets of laser projecting means are provided so that when the line sensor 4 sequentially captures line images while moving the track detection solid 1 in the X direction, This is because the proximity position C1 or the like where the laser light is projected is moved in the right direction so as to be positioned in front of the range B where the line image is captured. Thus, also to adjust the focus in front side of the range of imaging by the line sensor by bidirectional scanning of the line sensor alternately left and right, focus adjustment is accurately performed.
[0019]
The two-dimensional CCD sensor 332 is a planar arrangement of 600 × 600 = about 350,000 charge coupled devices having a side of 21 μm, which is used in a general CCD camera. The printed circuit board 333 shown in FIG. As shown in FIG. 5, the two-dimensional CCD sensor 332 is a surface of the track detection solid 1, and a rectangular range sandwiching the imaging range C of the line image is an imaging range E of the two-dimensional CCD sensor 332. To capture images. Note that the area D in FIG. 3 is the imaging surface D of the two-dimensional CCD sensor 332. As will be described later, the imaging region 11 of the track detection solid 1 can be designated by imaging with the two-dimensional CCD sensor 332.
[0020]
The lens barrel 34 supports the eyepiece 35 for visual observation and the line sensor 4, and the side portion of the lens barrel is an upright portion of the L-shaped gantry 7 via a rack and pinion mechanism 71. It is attached to. Therefore, when placing the track detection solid 1 on the tilting table 6, the microscope 3 itself can be manually moved up and down by the rack and pinion mechanism 71. The eyepiece 35 for visual observation tilts the optical axis from the objective lens 31 with a prism so as to facilitate visual observation.
[0021]
The line sensor 4 is housed in a case, and this case is detachably attached to the tip of the lens barrel 34. In addition, the shape of this attachment part employ | adopts F mount which is the standard attachment shape of a single-lens reflex camera about a lens attachment part. The line sensor 4 is configured by arranging approximately 4000 charged coupled elements each having a side of 7 micrometers in a straight line. Therefore, when the imaging magnification is 10 times, the range of 7 μm ÷ 10 = 0.7 μm in width and 7 μm × 4000 ÷ 10 = 2.8 mm in length is imaged at once. can do. Then, as will be described later, the line sensor 4 sequentially captures the track detection solid 1 horizontally moved by the moving means 2 for each range, and each line image data is connected via a connection code (not shown). Then, it is transmitted to the determination means 5 described next.
[0022]
The determination means 5 uses a commercially available computer, a so-called personal computer, and comprises an arithmetic processing unit 51, a display unit 52, and a memory unit 53 for recording line image data. As will be described later, the arithmetic processing unit 51 sets the imaging area of the track detection solid 1, moves the moving means 2, adjusts the tilt and focus of the tilting table 6, and feeds back from the encoder of the moving means 2. An imaging execution instruction of the line sensor 4 based on the movement amount, capturing of line image data captured by the line sensor 4, creation of an entire image of the imaging region from the line image data, and radiation incident amount from the entire image And the incident direction are determined.
[0023]
Next, the tilting table 6 will be described. The tilting table 6 includes three ultrasonic motors 61 arranged so as to form an equilateral triangle, a flat plate-like table portion 62 supported at three points by the tip of the vertical output shaft 61a of the ultrasonic motor, It is comprised from the fixing member 63 which fixes the mutual position of the ultrasonic motor 61. FIG. In the present embodiment, the three ultrasonic motors 61 are adjusting means for adjusting the tilt and the vertical position of the tilting table 6 as a support. Note that the tip of the vertical output shaft 61a is in contact with a recess formed on the back surface of the table portion 62 so that the horizontal positions of the vertical output shaft 61a do not shift.
[0024]
The ultrasonic motor 61 is a known technique, and an elastic member is placed on a piezoelectric ceramic that deforms when a voltage is applied, and a voltage in the ultrasonic region is applied to the piezoelectric ceramic to generate a bending vibration in the elastic member. This rotates the output shaft, and has characteristics such as high responsiveness and controllability and low operating noise. In the ultrasonic motor 61 used in the present invention, the output shaft has a screw structure, and the output shaft rotates and moves up and down. As will be described later, the tilting table 6 adjusts the inclination and focus of the track detection solid 1 by computer control based on the signal from the focusing means 331 described above. Since the ultrasonic motor 61 that performs tilt adjustment of the tilting table 6 is used to perform focus adjustment by the ultrasonic motor 61, it is not necessary to provide a separate focus adjustment drive means.
[0025]
Next, the use of the radiation track detection apparatus according to the present invention will be described with reference to FIGS. As shown in FIG. 6, first, the track detection solid 1 that is the object of radiation measurement is set on the upper surface of the table section 62 of the tilting table 6 (A), and this track detection is performed by a vacuum means or the like so as not to move. The solid for use is fixed to the table portion by adsorption or the like (B). Next, the measurement area 11 of the track detection solid 1 is set by input from a personal computer (C).
[0026]
As shown in FIG. 7, the measurement region 11 is on the surface of the track detection solid 1 and is a rectangular area that actually images an etch pit. The reason for designating the measurement region 11 is that when the track detection solid 1 has a different size, it is necessary to capture an image within a range that does not protrude from the periphery of the track detection solid, and the line sensor 4 sequentially This is because the start point 11a and the end point 11b of the line image to be picked up are set. The measurement region 11 can be set while viewing the eyepiece 35 for visual observation, but it is much more workable to display and set the image of the track detection solid 1 on the display unit 52 of the personal computer. Can be improved.
[0027]
By the way, in the present invention, as will be described later, since the imaging from the line sensor 4 is sent to the determination means 5, this imaging is displayed on the display unit 52, and the measurement region 11 is set while viewing this imaging screen. Is also possible. However, since each line image captured by the line sensor 4 is in a very narrow range having a width of 0.7 micrometers as described above, it is difficult to confirm the peripheral portion of the track detection solid 1. Therefore, it is practically impossible to set the measurement region 11 so as not to protrude from the periphery of the track detection solid 1 while viewing the line image. Therefore, in the present invention, the measurement region 11 is set by the two-dimensional CCD sensor 332 that can image a two-dimensional extent to some extent.
[0028]
The measurement area 11 is set by moving the moving means 2 in the XY directions in response to an instruction from the input means 53 of the personal computer while viewing the imaging screen on which the area of the imaging area E (see FIG. 5) of the two-dimensional CCD sensor 332 is projected. Adjust and do. That is, the two-dimensional CCD sensor 332 projects the periphery of the position 11a near the corner of one end on the diagonal line of the track-shaped solid 1 having a rectangular shape shown in FIG. The periphery of the position 11b near the corner of the other end on the diagonal line is projected, an end point of imaging is set, and the position is recognized by a personal computer. Thereby, the XY coordinates of the positions 11a and 11b are recorded in the arithmetic processing unit 51 of the personal computer as information corresponding to the movement start point and end point position of the linear motor of the moving unit 2. Therefore, as will be described later, when imaging is performed by the line sensor 4, the linear motor of the moving unit 2 is moved from the inner position 11a that is the first imaging position to the last imaging position in accordance with an instruction from the arithmetic processing unit 51. Move sequentially to the horizontal position 11b.
[0029]
When the setting (C) of the measurement region 11 is completed, the focus and inclination of the track detection solid 1 are adjusted (D). This adjustment is automatically performed according to an instruction from the arithmetic processing unit 51 of the personal computer based on information from the focusing means 331 provided with the laser projection means provided in the AF unit 33 according to the procedure shown in FIG. Here, the reason why adjustment of the inclination and focus of the track detection solid 1 is performed by the focusing unit 331 including the light projecting unit will be described. That is, as described above, the present invention has the two-dimensional CCD sensor 332 attached to the line sensor 4 and the AF unit 33. Therefore, it is conceivable that the focus is automatically set by these sensors as in a normal CCD camera.
[0030]
However, this method has the following problems. The automatic setting of the focus of a normal CCD camera using the two-dimensional CCD sensor 332 is to set the focus position where the captured image is the sharpest, that is, the contrast is strong, as the focused position. Therefore, in order to adjust the focus with the two-dimensional CCD sensor 332, it is necessary to check the maximum value of the contrast by checking before and after the in-focus position in order to search for the position having the strongest contrast. However, since the line sensor 4 captures an extremely narrow range, it is difficult to detect the contrast of the image, and it is also necessary to check before and after the in-focus position. is there. Therefore, in the present invention, the focusing means 331 by laser projection that can measure the focus with extremely high accuracy and high speed is employed.
[0031]
Now, returning to FIG. 8, the adjustment procedure of the inclination of the track detection solid 1 will be described. This adjustment is controlled by a program built in the arithmetic processing unit 51 of the personal computer. First, the arithmetic processing unit 51 sets (G) the central portion of the measurement region 11 of the track detection solid 1 as a measurement point i = 1 so that the optical axis of the microscope 3 coincides with the XY coordinate position. The moving means 2 is moved (H). At this position, a laser spot is projected from the light emitting units 331b and 331d, and it is determined whether or not the distance to the track detection solid 1 is out of focus (I).
[0032]
The deviation from the proper focus is determined from the shape of the reflected light incident on the light receiving means 331a and 331c. In other words, the shape of the reflected light is a circle as shown in FIG. 9B when the correct focus is achieved, and when it is closer than the proper focus , it is tilted to the left as shown in FIG. 9A and far from the proper focus. In this case, it is deformed diagonally to the right as shown in FIG. 9C. Therefore, when the arithmetic processing unit 51 recognizes the shape of the reflected light incident on the light receiving units 331a and 331c and the focus is shifted, the distance is longer (far) or shorter (near) than the proper focus. If it is close, the output shafts 61a of the three ultrasonic motors 61 of the tilting table 6 are lowered by the same amount and adjusted to an appropriate focus (K). On the other hand, if it is far away, the output shafts 61a of the three ultrasonic motors 61 of the tilting table 6 are raised by the same amount by the amount of deviation and adjusted to an appropriate focus (L). As described above, the measurement point i = 1 is set to an appropriate focus position (M).
[0033]
Next, the measurement is performed by measuring the shift in focus at two measurement points (i = 2, 3) in the same manner. That is, the arithmetic processing unit 51 sets (N) a second measurement point i = 2 that is a predetermined distance from the measurement point i = 1, and the optical axis of the microscope 3 coincides with the XY coordinate position. The moving means 2 is moved (H). Then, a laser spot is projected at this position, and a deviation amount between the measurement distance and the appropriate focus is calculated and recorded by the same means as described above (M). Then, the arithmetic processing unit 51 sets a third measurement point i = 3 at a predetermined distance from the measurement point i = 1, moves the moving means 2 to this XY coordinate position (H), and Similarly, the amount of deviation between this measured distance and the appropriate focus is calculated and recorded (M). Note that after the measurement at the measurement point i = 3, the focus measurement ends according to the discriminant i> 3 (O).
[0034]
As described above, since the amount of deviation from the appropriate focus at each of the XY coordinate positions of the three measurement points i = 1, 2, and 3 is found, the track detection solid 1 is determined from the three-dimensional coordinate positions. The X and Y direction inclinations are calculated geometrically, and the respective vertical adjustment amounts of the output shafts 61a of the three ultrasonic motors 61 necessary for correcting the deviation amount can be calculated. Then, the arithmetic processing unit 51 adjusts the amount of inclination of the output shafts 61a of the three ultrasonic motors 61 based on the calculation result and adjusts the amount of inclination (P).
[0035]
As described above, when the tilting table 6 is moved by the moving means 2, the surface of the imaging unit of the track detection solid 1 is horizontal. Next, with reference to FIG. 10, a procedure for imaging the track detection solid 1 with the line sensor 4 will be described. This imaging is controlled by a program built in the arithmetic processing unit 51 of the personal computer. First, the arithmetic processing unit 51 sets measurement positions j = 0 and k = 0 by the encoder (A1), and sets the measurement positions j = 0 to coordinates X = 0 and Y = 0 (0, dy × j). Recognize as The track detecting solid 1 is moved to the XY coordinate (0, 0) position by the moving means 2 (A2). This XY coordinate (0, 0) position is the lower left corner 11a of the measurement region 11 shown in FIG. 7, and this point is the starting point for starting imaging.
[0036]
Now, when the start point of the imaging position is set at the position of the lower left corner 11a of the measurement area 11, the arithmetic processing unit 51 performs focus adjustment (focal length adjustment) with the focusing unit 331, and if the focus is out of focus, three pieces are obtained. The ultrasonic motor 61 is driven by the same amount to adjust the focus (A3). That is, as shown in FIG. 11R> 1, focus adjustment is started (B1). The arithmetic processing unit 51 determines from the information obtained by the focusing means 331 whether the focus is more than the allowable amount (B2). If the focus is more than the allowable amount, the difference is close (B3) in the tilting table 6 The output shafts 61a of the three ultrasonic motors 61 are lowered by the same amount by the amount of deviation (B4) and adjusted to an appropriate focus . On the other hand, if the distance is far, the output shafts 61a of the three ultrasonic motors 61 are pulled up by the same amount by the amount of deviation (B5). Then, the movement amount dx = 0 of the X axis is set (A4), the line image captured by the line sensor 4 at the measurement position (0, 0) is recorded, and the moving means 2 is moved at a constant speed in the X direction. The movement is started (A5). The amount of movement of the moving means 2 is measured by an encoder and data is sent to the arithmetic processing unit 51. Then, when the arithmetic processing unit 51 determines that the moving unit 2 has moved the measurement region 11 in the X direction by one measurement width of the line sensor 4 (A6), the second measurement position (1dX, The line image from the line sensor 4 at 0) is recorded (A7). The arithmetic processing unit 51 adds 1 to k every time one line is recorded (A8). Then, the calculation processing unit 51 moves the X-direction length L until the measurement unit 11 moves to the lower right corner of the measurement region 11 shown in FIG. Record line images sequentially.
[0037]
When the line image has been recorded up to k lines, that is, 25% of the length L in the X direction (corresponding to the region k in FIG. 7) (A9), the arithmetic processing unit 51 performs the region k's worth in parallel with the recording of the line image. Etch pit feature extraction is performed (A10). After extracting the etch pit feature quantity, k is set to k = 0 (A11). In the etch pit feature amount extraction, the arithmetic processing unit 51 recognizes the shape of the etch pit in the image in the region k, compares it with the pre-recorded etch pit pattern, determines the type of the etch pit, This is done by counting and recording quantities by type. In other words, the arithmetic processing unit 51 performs recording of a line image having a length L in the X direction, and when 25% of the length L (for k lines) is input, in parallel with the line image recording work. Then, the etch pit feature quantity is extracted based on the input data. Therefore, when the scanning of the range of one row of length L is completed, the etch pit feature quantity is extracted four times.
[0038]
When capturing of the imaged data at the bottom of the measurement area 11, that is, Y coordinate = 0 is completed (A12), the arithmetic processing unit 51 ends the focus adjustment work (A13) and sets j = 1 in the encoder. (A14) The measurement position is moved by the moving means 2 to the XY coordinates X = L, Y = dY (L, dY × j) positions. This position is a position moved from the lower left corner 11 a of the measurement region 11 shown in FIG. 7 to the right by L in the X direction and in the Y direction by the length of the line sensor 4. Then, line images are sequentially captured from the right end to the left end of the measurement region 11 at the position of Y coordinate = dY. In this way, at the moment when the line sensor 4 moves to a new imaging range while sequentially changing the scanning direction of the line image from right to left or from left to right, the arithmetic processing unit 51 sequentially converts the line image to the line image. Record with measurement coordinates. When j> n is reached (A15), the arithmetic processing unit 51 determines that the entire region of the measurement region 11 has been imaged, and displays the integration of the extraction results and the display of the entire region on the display unit 52 (A16). .
[0039]
In the continuous imaging as described above, each time the deviation from the focus according to the procedure described above are checked (the so-called focus adjustment), when the image is shifted over the allowable amount, to adjust the focus. By the way, as described above, the line sensor sequentially captures line images when the imaging range is moved one by one to the left and right. Therefore, the focus adjustment of the line image to be captured needs to be completed in advance before the line image is captured, that is, before the imaging range ends moving. For this purpose, it is necessary to always project the laser spot shown in FIG. 4 at a position preceding the imaging range B of the moving line image. For example, when the imaging range B of the line image moves in the right direction, it is necessary to project a laser spot at a neighboring position C1 on the right side of the imaging range B. When the imaging range B of the line image moves in the left direction, it is necessary to project a laser spot at a position C2 on the left side of the imaging range B.
[0040]
By the way, as described above, when the line image by the line sensor 4 is imaged in a single line in the X direction, the track detection solid 1 is moved by the moving means 2 in the Y direction by the length of the line sensor, and again the X Repeat one-row imaging in the direction. In this case, if the movement in the X direction is always the same direction from left to right, it is necessary to return the track detection solid 1 to the left end for each row. Therefore, it is possible to perform rapid imaging by changing the movement direction in the X direction for each column and moving in a zigzag manner such as moving from left to right and then moving from right to left.
[0041]
When moving zigzag in this way, as described above, it is necessary to change the position at which the laser spot is projected in accordance with the change in the traveling direction. However, changing the position for projecting the laser spot with a pair of light projecting unit and light receiving unit requires a very complicated switching structure. For this reason, in this invention, two sets of light projection parts 331b and 331d and light-receiving part 331a and 331c are employ | adopted, and the structure which uses each separately with respect to the change of the advancing direction is employ | adopted.
[0042]
The configuration of the line sensor 4 is not limited to the case where about 4000 CCDs are arranged one by one, and several units may be arranged longer. In addition, when the size of each pixel of the line sensor 4 is smaller, it is possible to capture an image with better resolution. However, when a larger size pixel is used, an image with better resolution can be obtained by increasing the magnification rate of imaging. An image can be taken. In consideration of shortening the processing time, the type of etch pits and the number of types are counted in a predetermined range of the measurement region 11, for example, 25% of the range of one row of length L as described above. Although it is desirable to perform the process for each part and to add up the last, it is also possible to perform the process in a lump after an image of a range of one column is obtained or after a line image is obtained for the entire range of the measurement region 11.
[0043]
Further, the picked-up image from the two-dimensional CCD sensor 332 and the reflected image of the laser spot are displayed on the display unit 53, and the moving means 2 and the tilting table 6 are manually input from the input means 52 while viewing this display screen. It can also be easily configured to adjust. The two-dimensional CCD sensor 332 is not limited to this and may be a solid-state imaging device such as a CMOS sensor.
[0044]
【The invention's effect】
Since the light projecting position of the light projecting means is provided in the vicinity of the range imaged by the line sensor, the focus adjustment is accurately performed when the image is captured by the line sensor. Further, to adjust the focus in the range front side of the imaging by the line sensor be bidirectional scanning the line sensor alternately left and right when provided with two light-projecting means and the forward projecting means and the backward light projecting means, Pinto Adjustments are made accurately.
[Brief description of the drawings]
FIG. 1 is a partial side view of a microscope apparatus.
FIG. 2 is a front view of the microscope apparatus.
FIG. 3 is a schematic configuration diagram of focusing means and a two-dimensional CCD sensor.
FIG. 4 is a field of view of a microscope showing an imaging range of a line sensor and a laser spot position.
FIG. 5 is a field of view of a microscope showing an imaging range of a line sensor and a two-dimensional CCD sensor.
FIG. 6 is a flowchart showing a procedure for using the microscope apparatus.
FIG. 7 is an explanatory diagram showing the imaging range and order of line images in a measurement area.
FIG. 8 is a flowchart showing a procedure for adjusting the focus and tilt of a sample.
FIG. 9 is an image diagram showing a reflection shape of a laser spot.
FIG. 10 is a flowchart showing a line image capturing procedure;
FIG. 11 is a flowchart illustrating a procedure for adjusting a focus shift amount;
[Explanation of symbols]
1 sample (solid for track detection)
DESCRIPTION OF SYMBOLS 11 Measurement area 2 Moving means 3 Microscope 31 Eyepiece 32 Lamp 33 AF unit 331 Focusing means 331a, 331b Forward light emitting means 331c, 331d Rear light emitting means 332 Two-dimensional CCD sensor 34 Lens barrel 35 Visual observation Eyepiece for use 4 Line sensor 5 Image processing means 51 Arithmetic processing part 52 Display part 53 Input means 6 Tilting table 61 Ultrasonic motor 61a Output shaft 7 Mounting base

Claims (3)

A microscope that images the sample with a line sensor; and image processing means that creates an image of the sample from the line image captured by the line sensor. The microscope projects a laser spot on the sample and reflects the reflected light. Focusing means for determining a focus deviation from the shape of the lens, wherein the focusing means is provided with a light projecting position on the sample and at a position in front of the range imaged by the line sensor. Microscope device to do. According to claim 1, said light projecting means includes a forward light projecting means for projecting a forward position of the range imaged by the line sensor, a rear light projecting means for projecting a rear position of the range imaged by the line sensor A microscope apparatus comprising: The microscope apparatus according to claim 1, further comprising an adjusting unit that adjusts an inclination and a vertical position of a support base of the sample.

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