JP3981199B2 - Rotating surface plate for double-sided lapping machine - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a rotating surface plate for a double-sided lapping machine.
[0002]
[Prior art]
In the manufacturing process of various recording media such as compact disk (CD) disk, glass plate for liquid crystal display, hard disk for magnetic storage, and display device parts, a polishing process with diamond pellets is necessary. Has been done. As shown in FIG. 1, the double-sided lapping machine 15 sandwiches the front and back of the workpiece 12 between rotating surface plates 13 and 13, and rotates the rotating surface plates 13 and 13 reversely to each other. the diamond pellets 4 which is allowed secured to plate surface 2 and performs surface grinding of the workpiece 12.
[0003]
Rotating platen 13 used at this time is as shown in FIG. 2, a cast iron disc, although a large number of diamond pellets 4 are brought planted at predetermined intervals on the surface plate surface 2, a diamond with the polishing operation Since the pellet 4 is gradually worn out, it is necessary to renew the diamond pellet 4 every fixed work period. This update operation is performed according to the following procedure.
[0004]
That the rotating platen 13 which is worn from both sides lapping machine 15 removed by using a forklift or the like, to carry the rotating platen 13 removed by truck or the like to the installation location of the reference stone surface plate, the surface plate surface of the rotating plate 13 2 the worn diamond pellets 4 and the adhesive, etc. was completely removed from the plate surface 2 smooth and clean. This work is using a wire brush and iron Bella like, like, not scratched the surface plate surface 2, carried out with great care by hand, the final finish is carried out by means of sandpaper.
[0005]
On the other hand, a plan view of the rotating surface plate 13 to be updated is drawn on the reference stone surface plate, and the fixing position of the diamond pellet 4 is accurately marked thereon, and the end surface of the diamond pellet 4 is at the same height. That is, the height is aligned and temporarily fixed so as to be flush with each other. Furthermore, mixing the two-component curable adhesive is applied to this so as to become a uniform thickness (about 1mm) to the base surface 2 of the rotary platen 13 within the curing time. Thereafter, the rotating surface plate 13 plate surface 2 lifting the chain block or the like so as facing downward, the stone surface plate accurately down to the temporary fixed number of diamond pellets 4 above, as 2-3 days stand To do. Since the rotating surface plate 13 is a set of two upper and lower surfaces, these operations are repeated for the other rotating surface plate 13.
[0006]
In this way, the rotating surface plate 13 on which the diamond pellets 4 are fixed is lowered again from the stone surface plate using the chain block, and once placed on a frame made of square materials so as to face upward, a forklift is used. The truck is loaded onto the truck, delivered to the user, and remounted on the double-sided lapping machine 15 using a forklift.
If the diamond pellet 4 is fixed to the rotating surface plate 13 in an inaccurate position or if the height of the end face of the diamond pellet is inconsistent , accurate polishing work cannot be performed, resulting in defective products. Become.
[0007]
[Problems to be solved by the invention]
However, in these conventional renewal operations, the rotating surface plate 13 must be sent back to the factory, and the transportation work of the rotating surface plate 13 ranging from several hundred kilograms to several tons is dangerous and takes a lot of time and cost. It was. Also, the work of removing the diamond pellet 4 and the adhesive from the worn rotating surface plate 13 is very laborious, which is a major factor in increasing the overall cost. Particularly plate surface 2 of the rotary platen 13 is required very high degree of smoothness, the removing work of the diamond pellet residue and adhesive layer (stripping operations) requires careful attention, use of chemicals The forcible methods using chemical processing and mechanical force that can be used cannot be used, and it is necessary to rely on inefficient and manual work such as stripping with a wire brush or iron spatula and applying sandpaper. It was.
[0008]
Furthermore, the diamond pellet 4 must be planted on the surface plate surface 2 with the same height so that the end faces thereof are the same height, that is, flush with each other. It was a laborious task that was required. Further, since the diamond pellet 4 was adhered to the rotating surface plate 13 with a two-component curable adhesive, it took two to three days for curing, and the work efficiency was not good in terms of days. Of course, the lap operation had to be stopped during the series of operations, which was a serious problem for the user.
[0009]
Therefore, the present inventor as Japanese Patent Application No. 9-55472, a constant of the rotary platen body 1 a disk divided piece 3 which allowed fixing the diamond pellets 4 at predetermined intervals on the surface as shown in FIG. 3 by a double-sided adhesive tape 5 proposed a rotary platen 13 allowed to adhered to the panel surface 2. The rotating surface plate 13 in which the disk divided pieces 3 can be peeled off by the double-sided adhesive tape 5 is easy to renew the diamond pellets 4. It is difficult to apply the disc segment 3 to the predetermined position of the rotating surface plate body 1 at the time of renewal. When the disc segment 3 is to be peeled off and re-executed, the double-sided adhesive tape 5 In some cases, the disc splitting piece 3 is deformed by the sticking force and cannot be used. In addition, when the disk divided piece 3 is replaced, the entire rotating surface plate 13 must be removed from the double-sided lapping machine 15, and this work itself is time-consuming.
The present invention is a further improvement of the above-mentioned Japanese Patent Application No. 9-55472, which facilitates the work of attaching the disk divided pieces to the rotating surface plate main body, and allows the disk divided pieces to be repeated many times without being deformed even if the application fails. but you can attempt to re-paste to correct position, moreover even if there is some uneven in the height of the end face of the diamond pellets is allowed, without removing the entire rotary platen from both lapping machine during work It is intended to provide a new rotating surface plate with good workability.
[0010]
[Means for Solving the Problems]
In this invention , pins 7 are implanted at a predetermined interval on a disk-shaped surface plate surface 2, and a rubber magnet 6 having a sheet shape passing through the pins 7 is attached to the surface plate surface 2. A positioning through hole 8 is provided at a position corresponding to the position where the board 7 and the pin 7 are planted, and a plurality of diamond pellets 4 are fixed to the surface at predetermined intervals. The above-mentioned problem has been solved by constituting a rotating surface plate for a double-sided lapping machine from a disk-shaped piece 3 made of a ferromagnetic material adsorbed on the surface of 6.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
4 is a perspective view of an embodiment of a rotating surface plate for a double-sided lapping machine according to the present invention, FIG. 5 is a perspective view of a state in which a disk segment piece 3 is separated, and FIGS. 6 and 7 are enlarged cross-sectional views of essential parts thereof. It is. Figure 1 is a rotating polishing plate, has a pair in upper and lower surface plate surface 2 facing is finished with a very high degree of smoothness. In this embodiment, the rotary platen body 1 is made of cast iron, but may be made of other materials, for example, ceramics. Reference numeral 3 denotes a disk divided piece. When all of the disk divided pieces 3 are assembled, the shape matches the surface plate surface 2 of the rotary surface plate body 1 as shown in FIG.
[0012]
In this embodiment the disc split piece 3 is divided into four radially piece each is formed into a fan shape in plan view is not limited thereto, and surface plate surface 2 of the rotary polishing plate 1 when it is set As long as it becomes an overlapping shape, it may be divided into any shape. Further, in this embodiment, an iron plate is used as the material in order to bring about magnetization, but other materials may be used as long as they are ferromagnetic.
Further, on the surface plate surface 2 of the rotary polishing plate 1 as shown in FIG. 5 is attached to the rubber magnet 6 sheet of one surface, from the surface plate surface 2 through the rubber magnet 6 A plurality of short pins 7 are planted radially upward. Affixed to the surface plate surface 2 of the rubber magnet 6 takes place with double-sided adhesive tape or an adhesive known means. 6 and 7, reference numeral 17 represents a layer of these bonding means. Further, when the rotary platen main body 1 is a ferromagnetic material, the adhesion means layer 17 may be omitted and the rubber plate 6 may be attracted by the magnetic force of the rubber magnet 6 itself.
[0013]
On the other hand, a positioning through hole 8 penetrating the front and back is formed at a position corresponding to the pin 7 when the disk divided piece 3 is superimposed on the surface plate surface 2 of the rotating surface plate body 1.
[0014]
Then, diamond pellets 4 are fixed to the surface side of the disk segment 3 at a predetermined interval. Note that it is preferable that the end surfaces of the tips of the diamond pellets 4 to be fixed are all the same height, that is, flush, but even if there is a slight discrepancy in height, that is, there is variation. The The diamond pellet 4 is a cylindrical solid material in which diamond abrasive grains are dispersed in a metal or a synthetic resin, and the disk divided piece 3 is fixed to the surface with an adhesive or a double-sided adhesive tape. In the figure, reference numeral 16 denotes an adhesive layer using an adhesive or a double-sided adhesive tape.
[0015]
For fixing with an adhesive, a two-component curable adhesive is generally used, but a heating type one-component curable adhesive can also be used. In that case, there is an advantage that the time required for curing can be shortened as compared with the case where a two-component curable adhesive is used.
[0016]
Since this embodiment as described above, the disk divided pieces 3 with rubber magnet 6 is attached to the plate surface 2 of the rotary polishing plate 1 is ferromagnetic, a disk divided pieces as shown in FIG. 7 3 is attracted to the surface plate surface 2 of the rotating surface plate body 1 by the magnetic force.
At that time, the pin 7, which is implanted from the surface plate surface 2 is inserted into the positioning hole 8 of the disk split pieces 3 will prevent the deviation in the positioning and the lapping operation.
[0017]
Thus, since the fixing of the surface plate surface 2 of the disk split piece 3 it is performed by a magnetic force, detachable is free, when displaced in a fixed position occurs can re-paste many times, reattachment There is no risk of the disk segment 3 being deformed or damaged by the work. Further, a rubber magnet 6 is interposed between the disk division piece 3 and the surface plate surface 2, and since this rubber magnet has appropriate elasticity, the height of the end face of the diamond pellet 4 is somewhat higher. This variation is eliminated by the elasticity of the rubber magnet 6, and a lapping operation with a desired accuracy can be performed.
[0018]
The rotating surface plate for a double-sided lapping machine according to the present invention has the configuration as described above, and the disk divided pieces 3 with diamond pellets for one set on the upper and lower sides of the rotating surface plate 1 are preliminarily set in the work place of the user using the double-sided lapping machine When the double-sided lapping machine 15 has been in operation for a long time, the diamond pellet 4 of the rotating surface plate body 13 is worn heavily, and when it exceeds a predetermined use limit, the double-sided lapping machine 15 rotates. while still wearing the platen 13, stripping the disk split piece 3 from the platen surface 2 of the rotary platen 13. This disc divided piece 3 only is fixed to the base surface 2 by the magnetic force, it can take easily stripped.
Then, if the new disk segment 3 with diamond pellets is attracted to the surface plate surface 2 using the pins 7 and the positioning through holes 8 , the renewal operation is completed. If a deviation occurs in the fixed position during this operation, the disk divided piece 3 may be peeled off once and adsorbed again at the correct position. In this case as well, since the adsorption is performed by magnetic force, it is possible to try to adjust the position as many times as you like without being deformed or damaged as in the case of the double-sided adhesive tape. . Even if there is some variation in the height of the end face of the diamond pellet 4, this variation is absorbed by the elasticity of the rubber magnet 6 interposed therebetween, so that the diamond pellet 4 is fixed to the disk segment 3. However, high accuracy is not required as in the conventional case, and it can be implemented much more easily.
[0019]
【The invention's effect】
In this way, the disc split piece is fixed to the rotating platen body by magnetic force, so the disc split piece can be easily peeled off from the rotating platen body any number of times, and the installation work is accurate and easy. In addition, it is not necessary to remove the rotating surface plate from the double-sided lapping machine at this time, and it is excellent in workability and extremely practical.
[0020]
[Brief description of the drawings]
FIG. 1 is a side view of an example of a double-sided lapping machine conventionally used.
FIG. 2 is a perspective view of a conventional rotating surface plate for a double-sided lapping machine.
FIG. 3 is a partial enlarged cross-sectional view of a main part of an embodiment of a rotating surface plate for a double-sided lapping machine proposed by the present inventor as Japanese Patent Application No. 9-55472.
FIG. 4 is a perspective view of an embodiment of a rotating surface plate for a double-sided lapping machine according to the present invention.
FIG. 5 is a perspective view showing a state where a disk segment is separated.
FIG. 6 is a partial enlarged cross-sectional view of the main part.
FIG. 7 is a partially enlarged cross-sectional view of the main part.
[Explanation of symbols]
A layer of one rotation polishing plate 2 plate surface 3 disc split pieces 4 Diamond pellets 5 the double-sided adhesive tape 6 rubber magnet 7 pin 8 positioning holes 12 workpiece 13 rotating platen 15 sided lapping machine 16 adhesive layer 17 the adhesive means

Claims (1)

A rotating platen main body 1 in which pins 7 are implanted at predetermined intervals on a disk-shaped surface plate surface 2 and a rubber magnet 6 having a sheet shape passing through the pins 7 is attached to the surface plate surface 2. In addition, a positioning through hole 8 is provided at a position corresponding to the planting position of the pin 7, and a plurality of diamond pellets 4 are fixed to the surface at predetermined intervals, and the surface of the rubber magnet 6 is magnetically applied. A rotating surface plate for a double-sided lapping machine, comprising a ferromagnetic disk divided piece 3 to be adsorbed.

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