JP3979170B2 - Auto handler - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an auto handler that delivers a semiconductor integrated circuit (device to be measured), which is an object of an operation test, to a semiconductor integrated circuit testing apparatus and collects a tested device to be measured from the semiconductor integrated circuit testing apparatus.
[0002]
[Prior art]
In a conventional auto handler, a supply tray that accommodates a device to be measured before the test is regulated in order to reliably deliver the device to be measured to a measuring unit connected to a semiconductor integrated circuit testing apparatus. Then, the device under measurement is sucked and gripped from above by a pick-and-press from the inside of the supply tray whose position is previously regulated at a predetermined position, and transferred to the measuring unit. In a certain type of auto handler, as a mechanism for regulating the position of the supply tray, the supply tray supported by the lifting mechanism is engaged with a positioning groove formed on the lower surface of the positioning member disposed above. To regulate the position of the supply tray at a predetermined position.
[0003]
[Problems to be solved by the invention]
However, variations in the relative positional relationship between the supply tray and the positioning grooves may occur due to variations in the dimensions and assembly of the lifting mechanism, the positioning member, and various members that support them. If such a variation occurs, the supply tray cannot be reliably engaged with the positioning groove. As a result, the positional relationship between the pick and press and the device under measurement is also displaced from the original positional relationship. Therefore, the pick and press cannot reliably suck and grip the device under measurement, or even if it can be picked up and gripped, the positional relationship between the pick and press and the device under measurement will be distorted. There arises a problem that the measuring device cannot be accurately delivered to the measuring unit.
[0004]
Note that the auto handler also has a function of storing the tested device to be measured in a collection tray (empty tray) whose position is regulated in the same manner as the supply tray. When storing the device to be measured in the collection tray, if the position of the collection tray is not reliably regulated, the device to be measured that has been picked up and pressed by the pick and press is securely stored in the collection tray. A state that cannot be done occurs.
[0005]
The present invention has been made in view of the above-described problems, and an object thereof is to more reliably regulate the position of a supply tray and / or a collection tray.
[0006]
[Means for Solving the Problems]
In order to achieve the above-mentioned object, in the first means according to the present invention, the device under test storing the device under test being stored is raised by the lifting mechanism to be engaged with the positioning groove and positioned. In the automatic handler, the device under test is transported to a measurement unit connected to the semiconductor integrated circuit testing apparatus by the device under test suction mechanism, and the device under test storage is supported by a support mechanism having play with respect to the lifting mechanism. Adopt means.
[0007]
As a second means, in the first means, the support mechanism having play is fixed to the tray table on which the device storage device to be measured is placed in a predetermined posture and the movable portion of the lifting mechanism, and has a through hole. A base plate formed with a hollow elastic member interposed between the base plate and the tray table in accordance with the position of the through hole, and inserted into the through hole and the elastic member. A means is adopted in which the other end is constituted by a shaft having a smaller diameter than a through hole which is locked to the tray table and is locked to the base plate.
[0008]
As the third means, in the second means, a means is adopted in which the elastic member is a spring.
[0009]
As a fourth means, in the second means, a means that the elastic member is rubber is adopted.
[0010]
As a fifth means, in any one of the first to fourth means, a means is adopted in which the elevating mechanism is an air cylinder.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment of an auto handler according to the present invention will be described with reference to the drawings. This embodiment relates to a case where the present invention is applied to a horizontal conveyance type auto handler.
[0012]
FIG. 1 is a front view showing a schematic configuration of the horizontal conveyance type auto handler. In this figure, reference numeral 1 is a transport plate, 2A is a supply tray opening, 2B is an empty tray opening, 2C to 2F are collection tray openings, 3 is a supply P & P (measuring device suction mechanism), and 4 is a recovery P & P. (Measurement device adsorption mechanism), Ta is a supply tray (device to be measured), Tb is an empty tray (device to be measured), Tc to Tf are collection trays (device to be measured), and X is a measurement object Is a semiconductor integrated circuit (device under test).
[0013]
The transport plate 1 is a rectangular flat plate material and constitutes a transport reference surface of the device to be measured X. The transport plate 1 is provided with a supply / accommodating section, a lift section, a preheating section, a measurement section, a drying section, a buffer section, and the like as shown in the figure, and for a rectangular tray at a predetermined interval along one side (lower side). The openings 2A to 2F, that is, the supply tray opening 2A, the empty tray opening 2B, and the collection tray openings 2C to 2F are formed in a line. A supply tray Ta is arranged in the supply tray opening 2A, an empty tray Tb is arranged in the empty tray opening 2B, and collection trays Tc to Tf are arranged in the collection tray openings 2C to 2F, respectively. In the following description, these supply tray Ta, empty tray Tb, and collection trays Tc to Tf are collectively referred to as trays Ta to Tf.
[0014]
Each tray Ta to Tf has a substantially rectangular shape, and a plurality of receiving grooves for receiving the device to be measured X are formed, and names are classified according to applications. Among the trays Ta to Tf, the supply tray Ta accommodates a plurality of devices to be measured X before the test, the empty tray Tb is prepared for backup, and the recovery trays Tc to Tf indicate the test results. The devices to be measured X classified according to each are accommodated. The upper surface of the device X to be measured in the supply tray Ta is adsorbed and held by the supply P & P3 and transferred to the supply / accommodating unit, and the test is completed by making a round of each part on the transport plate 1 as indicated by the arrows. Return to the supply / accommodation section. The recovery P & P4 sucks and grips the device under test X that has been tested in this manner in the same manner as the supply P & P3, and transfers it to one of the recovery trays Tc to Tf according to the test result.
[0015]
Next, FIG. 2 is a perspective view of a frame structure provided under the transport plate 1. In this frame structure, an upper frame 6 and a lower frame 7 are assembled in a box shape by left and right vertical frames 5 and 8, and the upper frame 6 is formed in accordance with the shape of each tray Ta to Tf. The rectangular tray openings, that is, the openings 6a to 6f corresponding to the positions and shapes of the supply tray opening 2A, the empty tray opening 2B, and the collection tray openings 2C to 2F are formed. Tray vertical transport mechanisms 9A to 9F are provided directly below 6f.
[0016]
Each of the tray vertical transport mechanisms 9A to 9F is configured in exactly the same manner. FIG. 3 is an enlarged view of a main part of the tray vertical transport mechanisms 9A to 9F. In this figure, reference numeral 10 is a support, 11 is an air cylinder (elevating mechanism), 12 is a base plate, 13 is a tray table, and 14 is a table coupling mechanism. Among these components, the base plate 12, the tray table 13, and the table coupling mechanism 14 constitute a support mechanism having play that characterizes the present embodiment.
[0017]
The supports 10 are erected at regular intervals in the frame structure. The air cylinder 11 is provided along the support column 10 such that the moving direction of the rod 10a (movable part) is the vertical direction, and a flat base plate 12 is attached to the tip of the rod 10a in a horizontal state. ing. A flat tray table 13 is attached to the upper surface of the base plate 12 by a table coupling mechanism 14.
[0018]
The tray table 13 is a portion where the trays Ta to Tf are placed in a horizontal state on the upper surface, and a plurality of positioning pins 13a for positioning the trays Ta to Tf are provided at predetermined positions separated from each other. . The table coupling mechanism 14 is inserted at four positions with a predetermined interval between the tray table 13 and the base plate 12 in order to stably fix the tray table 13 to the base plate 12.
[0019]
FIG. 4 is a cross-sectional view showing a detailed configuration of the table coupling mechanism 14. As shown in this figure, the table coupling mechanism 14 is compressed between the base plate 12 and the tray table 13 according to the positions of the through holes 12a formed in the base plate 12 and the through holes 13a formed in the tray table 13. While inserting the spring 15, a bolt 16 having a diameter smaller than that of the through hole 12 a of the base plate 12 is inserted from the base plate 12 side so as to pass through each of the through holes 12 a, 13 a and the compression spring 15 and locked to the tip of the bolt 16. The nut 17 is mounted and fixed.
[0020]
That is, the tray table 13 and the base plate 12 are locked by the bolt 16 (more precisely, the head of the bolt 16) and the locking nut 18 with the compression spring 15 sandwiched therebetween. Moreover, since the outer diameter of the bolt 16 is set to be smaller than the inner diameter of the through hole 12a of the base plate 12, the tray table 13 has a certain degree of freedom not only in the vertical direction but also in the horizontal direction with respect to the base plate 12. Are connected. That is, the tray table 13 can be moved up and down with respect to the base plate 12 by the elastic action of the compression spring 15, and the bolt 16 can be inclined because there is a gap S between the through hole 12 a of the base plate 12 and the bolt 16. Therefore, the tray table 13 can move in a certain range in the horizontal direction with respect to the base plate 12.
[0021]
Next, FIG. 5 is a rear view of the upper frame 6. A pair of positioning members 17a to 17f having a substantially “U” shape that regulate the positions of the corners of the respective trays Ta to Tf are opposed to the peripheral edge portions of the respective openings 6a to 6f formed in a rectangular shape. Is provided. FIG. 6 is an enlarged view showing a detailed shape of the positioning member 17f as an example (an enlarged view of A in FIG. 5). As shown in this figure, the positioning member 17f is a substantially “U” -shaped plate, and the two corners k, k of the tray Tf are formed by two sides s, s that form an angle of 90 ° with each other. Regulate position. That is, the position of the tray Tf is regulated by the positioning groove M formed by the two two sides s and s of the four positions by the two positioning members 17 a and the back surface of the upper frame 6.
[0022]
Next, the operation of the main part of the horizontal conveyance type auto handler configured as described above will be described.
[0023]
First, in the initial operation state, for example, a plurality of supply trays Ta are stacked on the tray table 13 of the leftmost tray vertical transport mechanism 9A, while the right four tray vertical transport mechanisms 9C to 9C are placed. On each tray table 13 of 9F, a plurality of collection trays Tc to Tf are respectively stacked and stacked. The empty tray Tb is not placed on the tray table 13 of the remaining tray vertical transport mechanism 9B.
[0024]
When the air cylinders 11 of the tray vertical transport mechanism 9A and the tray vertical transport mechanisms 9C to 9F are operated, the uppermost supply tray Ta and the recovery trays Tc to Tf are opened to the openings 6a and 6c to 6f of the upper frame 6, respectively. Each is positioned by being engaged with a positioning groove M formed on the lower side. That is, the supply tray Ta containing the device to be measured X is placed in the exposed state in the supply tray opening 2A located immediately above the opening 6a of the upper frame 6, and is positioned directly above each of the openings 6c to 6f. In each of the collection tray openings 2C to 2F, empty collection trays Tc to Tf in which the device to be measured X is not accommodated are arranged in an exposed state.
[0025]
In such a state, the devices to be measured in the supply tray Ta are sucked and held by the supply P & P 3 and sequentially carried out to the supply / accommodating unit. On the other hand, the device under test X that has been tested is sequentially carried into the collection trays Tc to Tf by the collection P & P4. When the supply tray Ta becomes empty, the air cylinder 11 of the tray up-and-down conveying mechanism 9A is operated, and the tray table 13 is lowered to remove the uppermost supply tray Ta that is empty, and the tray table 13 is further removed. Rises, the supply tray Ta in which the device to be measured X is accommodated is exposed and arranged in the supply tray opening 2A.
[0026]
On the other hand, when any one of the collection trays Tc to Tf, for example, the collection tray Tc is filled with the tested device X to be measured, the tray table 13 of the tray up-and-down transport mechanism 9C is lowered once and the collection tray Tc in the full state is full. Is removed, and the tray table 13 is further lifted, so that the empty collection tray Tc is exposed at the supply tray opening 2C.
[0027]
In such a series of operations, the supply tray Ta and each of the collection trays Tc to Tf are moved to the openings 6a and 6c to 6f (that is, the supply tray opening 2A and the collection tray openings 2C to 2F) by the following actions. Positioned. In the following, positioning of the supply tray Ta with respect to the supply tray opening 2A will be described as an example.
[0028]
In this horizontal transfer type auto handler, the tray table 13 is lifted by the operation of the air cylinder 11, and the supply tray Ta mounted on the tray table 13 is finally accommodated in the positioning groove M positioned immediately above. This completes positioning. However, a deviation may occur in the relative positional relationship between the tray table 13 (that is, the supply tray Ta) and the positioning groove due to variations in dimensions and assembly accuracy of each member of the frame structure shown in FIG. In such a case, the positioning groove M exists at a position displaced from directly above the supply tray Ta.
[0029]
In such a state, the supply tray Ta is placed on the tray table 13 in a state where it is allowed to move with a certain amount of width in the vertical direction and the horizontal direction by the action of the table coupling mechanism 14. Therefore, it is easily accommodated in the positioning groove M regardless of the displacement. That is, when the upper surface of the supply tray Ta comes into contact with the surface (lower surface) of the positioning member 17a due to the displacement, the supply tray Ta (that is, the tray table 13) is inclined from the horizontal state. Since the gap S between the 12 through holes 12a and the bolt 16 is formed, the bolt 16 is inclined or moved with respect to the base plate 12, so that the supply tray Ta is compared with the case where the gap S is not provided. Thus, it can be easily slid into the positioning groove M, and the position is more reliably regulated.
[0030]
In addition, this invention is not limited to the said embodiment, For example, the following modifications can be considered.
(1) The above embodiment relates to the case where the present invention is applied to a horizontal conveyance type auto handler, but it can also be applied to other types of auto handlers.
(2) The compression spring 15 is used between the base plate 12 and the tray table 13 to be inserted in accordance with the position of the through hole 12a. However, the compression spring 15 may be a hollow elastic body, for example, rubber.
(3) Although an air cylinder is used for the elevating mechanism 11, for example, a motor type or electric type elevating mechanism may be used.
[0031]
【The invention's effect】
As described above, according to the present invention, the relative positional relationship between each tray and the positioning groove varies due to variations in dimensions and assembly of the auto handler lifting mechanism, the positioning member, and various members that support them. Even if each tray cannot be reliably engaged with the positioning groove, the support mechanism has a play with respect to the lifting mechanism, so that each tray can be reliably placed in the positioning groove. Is possible.
[Brief description of the drawings]
FIG. 1 is a front view showing a schematic configuration of a horizontal conveyance type auto handler according to an embodiment of the present invention.
FIG. 2 is a perspective view of a frame structure of a horizontal conveyance type auto handler according to an embodiment of the present invention.
FIG. 3 is an enlarged view of a main part of tray vertical transport mechanisms 9A to 9F according to an embodiment of the present invention.
FIG. 4 is a cross-sectional view showing a detailed configuration of a table coupling mechanism 14 in an embodiment of the present invention.
FIG. 5 is a rear view of the upper frame 6 according to an embodiment of the present invention.
FIG. 6 is an enlarged view showing a detailed shape of a positioning member 17f according to an embodiment of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Conveyance board 2A ... Opening tray opening 2B ... Empty tray opening 2C-2F ... Collection tray opening 3 ... Supply P & P (measuring device adsorption mechanism)
4 ... P & P for collection (measuring device adsorption mechanism)
5 …… Vertical frame 6 …… Upper frames 6a to 6f …… Opening 7 …… Lower frame 8 …… Vertical frames 9A to 9F …… Tray vertical transport mechanism 10 …… Post 10a …… Rod 11 …… Air cylinder mechanism)
12 ... Base plate (support mechanism with play)
12a …… Through hole 13 …… Tray table (support mechanism with play)
13a …… Positioning pin 14 …… Table coupling mechanism (support mechanism with play)
15 ...... Compression spring 16 ...... Bolts 17 a to 17 f ...... Positioning member 18 ...... Bolt locking nut X ...... Device to be measured S …… Gap s ...... Side k ...... Corner M ...... Positioning groove

Claims (4)

The device under test (Ta) in which the device under test (X) is stored is moved up by the elevating mechanism (11) to be engaged with the positioning groove (M) and positioned in this state. The auto-handler transported to the measuring unit connected to the semiconductor integrated circuit test apparatus according to (3), wherein the device under test device (Ta) is supported by a support mechanism having play with respect to the lifting mechanism (11). ,
The support mechanism with play is fixed to the tray table (13) on which the device-under-measurement device (Ta) is placed in a predetermined posture and the movable part (10a) of the elevating mechanism (11) and the through hole ( 12a) and a hollow elastic member (15) inserted between the base plate (12) and the tray table (13) in accordance with the position of the through hole (12a). And the through hole (12) and the elastic member (15) are inserted, the one end is locked to the tray table (13), and the other end is locked to the base plate (12). An auto handler comprising a bolt (16) having a diameter smaller than that of the hole (12a) . The auto handler according to claim 1, wherein the elastic member (15) is a spring . The autohandler according to claim 1, wherein the elastic member (15) is rubber . The auto handler according to any one of claims 1 to 3, wherein the elevating mechanism (11) is an air cylinder .

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