JP3965216B2 - CFC decomposition method using high frequency plasma - Google Patents

CFC decomposition method using high frequency plasma Download PDF

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Publication number
JP3965216B2
JP3965216B2 JP09447196A JP9447196A JP3965216B2 JP 3965216 B2 JP3965216 B2 JP 3965216B2 JP 09447196 A JP09447196 A JP 09447196A JP 9447196 A JP9447196 A JP 9447196A JP 3965216 B2 JP3965216 B2 JP 3965216B2
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Japan
Prior art keywords
frequency plasma
freon
air
furnace
plasma decomposition
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Expired - Fee Related
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JP09447196A
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Japanese (ja)
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JPH09276691A (en
Inventor
隆一 阿部
淳志 小林
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Nippon Steel Engineering Co Ltd
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Nippon Steel Engineering Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0894Processes carried out in the presence of a plasma

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  • Fire-Extinguishing Compositions (AREA)
  • Treating Waste Gases (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Description

【0001】
【発明の属する技術分野】
本発明は、家庭用冷蔵庫、業務用冷蔵庫、自動車等から回収されたフロンを高周波プラズマ分解反応炉で加水分解する高周波プラズマによるフロン分解方法に関する。
【0002】
【従来の技術】
有機化合物中にフッ素、塩素などを含むフロンガス、トリクロロエチレン等のハロゲン化合物を効率よく分解する方法として、高周波プラズマを用いてフロンを加水分解して無害化する高周波プラズマによるフロン分解方法が知られている(特開平3−90172号公報参照)。
【0003】
前記方法は、高周波プラズマ中に有機ハロゲン化合物とともに水を導入することを基本としており、プラズマ中に有機ハロゲン化合物と水とを効率よくプラズマ中に拡散させて導入するため、アルゴンガス中に有機ハロゲン化合物を含ませて水に導入してバブリングして有機ハロゲン化合物を蒸気とし、水蒸気と混合してプラズマ内に導入し、高周波プラズマの高熱により加水分解するものである。
フロン及び代替フロンの加水分解の基本反応は、例えば、
フロン(CFC113)の場合
23Cl3+4H2O=2CO2+3HF+3HCl+H2
代替フロン(HCFC22)の場合
CHClF2+2H2O→CO2+HCl+2HF+H2
で表される。
【0004】
【発明が解決しようとする課題】
しかしながら、フロン及び代替フロン(以下「フロン」という。)に水蒸気のみを加えて高周波プラズマで分解させた場合、分解反応により発生したH2とCO2とが水性ガス化反応
2+CO2←→CO+H2
により、有害物質であるCOあるいはH2が発生する。
【0005】
そこで、本発明は、高周波プラズマ分解反応炉によりフロンを加水分解させる高周波プラズマによるフロン分解法において、有害物質であるCOあるいはH2を発生させないでフロンを分解する高周波プラズマによるフロン分解方法を提供するものである。
【0006】
【課題を解決するための手段】
本発明は、高周波プラズマ分解反応炉によりフロンを加水分解させる高周波プラズマによるフロン分解法において、回収フロンボンベをフロン蒸発器中の温水で温めて、ガス状フロンとし、該ガス状フロンと水蒸気を混合して混合ガスを160〜180℃に加熱して、高周波プラズマ分解炉へ供給し、且つ空気を常温で高周波プラズマ分解反応炉の肩口より供給するとともに、空気の一部は前記混合ガスに加えて高周波プラズマ分解反応炉へ吹き込んでフロンを加水分解させるとともにH2及びCOを燃焼させて無害化する。
【0007】
高周波プラズマ分解反応炉へ空気を吹き込むと、次式により高周波プラズマ分解反応炉内に発生したCO及びH2と吹き込んだ空気中のO2とが次の反応式によって燃焼し、無害化される。
【0008】
CO+H2 2 →CO2+H2
高周波プラズマ分解反応炉へ吹き込む空気は、プラズマ本体へ吹き込む方法、もしくは高周波プラズマの下部分に当たる高周波プラズマ分解反応炉肩口より高周波プラズマ分解反応炉内の炉壁に沿う旋回流にして吹き込むことにより、空気の混合性をより高めることができる。
【0009】
【発明の実施の形態】
図1は、本発明による高周波プラズマによるフロン分解法のフロー図である。フロンは、回収フロンボンベをフロン蒸発器中の温水で温めてガス状のフロンにして供給し、ヒーター1で約145°Cに加熱する。
【0010】
加熱したフロンは、ヒーター2で約145°Cに加熱された水蒸気と混合し、フロンと水蒸気との混合ガスは混合ガスヒーター3で160〜180°Cに加熱し、高周波プラズマ分解反応炉4へ供給する。
【0011】
分解反応により発生したH2とCOとを燃焼させて無害化するための空気は、常温で高周波プラズマ分解反応炉4の肩口より供給する。空気の一部はプラズマを安定させるためにフロンと水蒸気の混合ガスに加える。
【0012】
フロン、水蒸気及び空気の各流量は、流量調節計FICにより流量調整弁を制御して所定流量に調節する。
【0013】
高周波プラズマ分解反応炉4は高アルミナ等の耐火物からなり、炉の頭部にはアルゴンガスで起動するプラズマトーチ5を有し、炉内圧力は200Torr〜400Torrに保つ。
【0014】
高周波プラズマ分解反応炉4の下部には、炉内で発生した排ガスを冷却する冷却缶6が設けられ、高周波プラズマ分解反応炉4と冷却缶6の間のスロート7において冷却缶循環液により分解ガスを冷却し、HCl及びHFを吸収する。
【0015】
冷却缶を出た排ガスは排ガス処理設備へ、また、冷却缶循環液は排水処理設備へ送られる。
【0016】
図2は空気を旋回流で吹き込むための高周波プラズマ分解反応炉の炉壁の横断面図で、空気は高周波プラズマ分解反応炉4の炉壁に設けられた吹込み口8から炉壁に沿って旋回流となって吹き込まれる。
【0017】
【実施例】
処理条件は次のとおりである。
【0018】
HCFC22処理量・・・36〜50Kg/h
2O/フロンモル比・・・2.2〜3.5
空気挿入量・・・・・・・・518Nl/分
炉内圧力・・・・・・・・・200〜400Torr
前記条件で、H2及びCOを燃焼させるため、挿入空気の空気比(HCFC22が加水分解される時に発生するH2及びCOの燃焼に必要な理論空気量と実際に挿入する空気量との比)を1.0、1.2、1.4に変化させた場合の空気挿入比とCO発生量の変化は、図3に示すとおりで、高周波プラズマ分解反応炉に直接挿入する空気量が多くなるほどCO発生量が小さくなることが分かる。
【0019】
【発明の効果】
フロンを加水分解する高周波プラズマ分解反応炉に空気を挿入することによりCO及びH2を燃焼させて有害なCO及びH2の発生を抑えることができる。
【図面の簡単な説明】
【図1】本発明による高周波プラズマによるフロン分解法のフロー図である。
【図2】空気を旋回流で吹き込むための高周波プラズマ分解反応炉の炉壁の横断面図である。
【図3】空気挿入比とCO発生量の変化を示すグラフである。
【符号の説明】
1 ヒーター
2 ヒーター
3 混合ガスヒーター
4 高周波プラズマ分解反応炉
5 プラズマトーチ
6 冷却缶
7 スロート
8 吹込み口
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a freon decomposing method using high-frequency plasma in which flon recovered from a home refrigerator, commercial refrigerator, automobile, or the like is hydrolyzed in a high-frequency plasma decomposition reactor.
[0002]
[Prior art]
As a method for efficiently decomposing halogen compounds such as chlorofluorocarbons and trichloroethylene containing fluorine and chlorine in organic compounds, a chlorofluorocarbon decomposing method using high frequency plasma that hydrolyzes chlorofluorocarbon using detoxification is known. (See JP-A-3-90172).
[0003]
The above method is based on introducing water together with an organic halogen compound into the high-frequency plasma, and the organic halogen compound and water are efficiently diffused and introduced into the plasma. A compound is introduced into water and bubbled to convert the organic halogen compound into vapor, mixed with water vapor, introduced into the plasma, and hydrolyzed by the high heat of the high-frequency plasma.
The basic reaction of the hydrolysis of Freon and alternative Freon is, for example,
In the case of chlorofluorocarbon (CFC113), C 2 F 3 Cl 3 + 4H 2 O = 2CO 2 + 3HF + 3HCl + H 2
In case of CFC substitute (HCFC22) CHClF 2 + 2H 2 O → CO 2 + HCl + 2HF + H 2
It is represented by
[0004]
[Problems to be solved by the invention]
However, when only water vapor is added to chlorofluorocarbon and alternative chlorofluorocarbon (hereinafter referred to as chlorofluorocarbon) and decomposed by high-frequency plasma, H 2 and CO 2 generated by the decomposition reaction are converted into water gasification reaction H 2 + CO 2 ← → CO + H 2 O
As a result, CO or H 2 which is a harmful substance is generated.
[0005]
Accordingly, the present invention provides a freon decomposing method using high-frequency plasma, in which freon is decomposed without generating CO or H 2 , which are harmful substances, in a freon decomposing method using high-frequency plasma in which freon is hydrolyzed by a high-frequency plasma decomposition reactor. Is.
[0006]
[Means for Solving the Problems]
The present invention relates to a freon decomposing method using high-frequency plasma in which freon is hydrolyzed by a high-frequency plasma decomposition reactor. The recovered flon cylinder is heated with hot water in a freon evaporator to form gaseous freon, and the gaseous flon and water vapor are mixed. Then, the mixed gas is heated to 160 to 180 ° C. and supplied to the high-frequency plasma decomposition furnace, and air is supplied from the shoulder of the high-frequency plasma decomposition reaction furnace at room temperature, and a part of the air is added to the mixed gas. It is blown into a high-frequency plasma decomposition reactor to hydrolyze chlorofluorocarbon and burn H 2 and CO to make them harmless.
[0007]
When air is blown into the high frequency plasma decomposition reaction furnace, CO and H 2 generated in the high frequency plasma decomposition reaction furnace and O 2 in the blown air are burned by the following reaction expression and rendered harmless.
[0008]
CO + H 2 + O 2 → CO 2 + H 2 O
The air to be blown into the high-frequency plasma decomposition reactor is blown into the plasma main body, or blown as a swirling flow along the furnace wall in the high-frequency plasma decomposition reactor from the shoulder of the high-frequency plasma decomposition reactor that hits the lower part of the high-frequency plasma. The mixing property can be further increased.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 is a flow diagram of a CFC decomposition method using high-frequency plasma according to the present invention. Fluorocarbon is heated and heated to about 145 ° C. with heater 1 by heating the recovered CFC cylinder with hot water in a CFC evaporator to form gaseous CFC.
[0010]
The heated chlorofluorocarbon is mixed with water vapor heated to about 145 ° C. by the heater 2, and the mixed gas of chlorofluorocarbon and water vapor is heated to 160 to 180 ° C. by the mixed gas heater 3, and is sent to the high-frequency plasma decomposition reactor 4. Supply.
[0011]
Air for detoxifying H 2 and CO generated by the decomposition reaction is supplied from the shoulder of the high-frequency plasma decomposition reactor 4 at normal temperature. Part of the air is added to the mixed gas of CFC and water vapor to stabilize the plasma.
[0012]
The flow rates of chlorofluorocarbon, water vapor, and air are adjusted to a predetermined flow rate by controlling the flow rate adjustment valve with a flow rate controller FIC.
[0013]
The high-frequency plasma decomposition reactor 4 is made of a refractory such as high alumina, and has a plasma torch 5 activated by argon gas at the head of the furnace, and the pressure in the furnace is maintained at 200 Torr to 400 Torr.
[0014]
A cooling can 6 for cooling the exhaust gas generated in the furnace is provided at the lower part of the high-frequency plasma decomposition reaction furnace 4, and the decomposition gas is generated by the cooling can circulating liquid in the throat 7 between the high-frequency plasma decomposition reaction furnace 4 and the cooling can 6. Is cooled and absorbs HCl and HF.
[0015]
The exhaust gas exiting the cooling can is sent to the exhaust gas treatment facility, and the cooling can circulating liquid is sent to the waste water treatment facility.
[0016]
FIG. 2 is a cross-sectional view of the furnace wall of the high-frequency plasma decomposition reactor for blowing air in a swirl flow. Air flows along the furnace wall from the inlet 8 provided in the furnace wall of the high-frequency plasma decomposition reactor 4. It is blown as a swirl flow.
[0017]
【Example】
The processing conditions are as follows.
[0018]
HCFC22 throughput: 36-50Kg / h
H 2 O / CFC molar ratio: 2.2 to 3.5
Air insertion amount ... 518 Nl / min furnace pressure ... 200 to 400 Torr
In order to burn H 2 and CO under the above-mentioned conditions, the air ratio of the inserted air (the ratio of the theoretical air amount necessary for the combustion of H 2 and CO generated when the HCFC 22 is hydrolyzed and the actually inserted air amount) ) Is changed to 1.0, 1.2, and 1.4, the change in the air insertion ratio and the amount of CO generated is as shown in FIG. 3, and a large amount of air is directly inserted into the high-frequency plasma decomposition reactor. It turns out that the amount of CO generated becomes smaller.
[0019]
【The invention's effect】
By inserting air into a high-frequency plasma decomposition reactor that hydrolyzes chlorofluorocarbon, CO and H 2 can be burned, and generation of harmful CO and H 2 can be suppressed.
[Brief description of the drawings]
FIG. 1 is a flow diagram of a CFC decomposition method using high-frequency plasma according to the present invention.
FIG. 2 is a cross-sectional view of a furnace wall of a high-frequency plasma decomposition reactor for blowing air in a swirling flow.
FIG. 3 is a graph showing changes in air insertion ratio and CO generation amount.
[Explanation of symbols]
1 Heater 2 Heater 3 Mixed Gas Heater 4 High Frequency Plasma Decomposition Reactor 5 Plasma Torch 6 Cooling Can 7 Throat 8 Inlet

Claims (1)

高周波プラズマ分解反応炉によりフロンを加水分解させる高周波プラズマによるフロン分解方法において、回収フロンボンベをフロン蒸発器中の温水で温めて、ガス状フロンとし、該ガス状フロンと水蒸気を混合して混合ガスを160〜180℃に加熱して、高周波プラズマ分解炉へ供給し、且つ空気を常温で高周波プラズマ分解反応炉の肩口より供給するとともに、空気の一部は前記混合ガスに加えて高周波プラズマ分解反応炉へ吹き込んでフロンを加水分解させるとともにH2及びCOを燃焼させて無害化することを特徴とする高周波プラズマによるフロン分解方法。In a freon decomposing method using high-frequency plasma in which freon is hydrolyzed by a high-frequency plasma decomposition reactor, the recovered flon cylinder is heated with hot water in a freon evaporator to form gaseous freon, and the gaseous flon and water vapor are mixed and mixed gas Is heated to 160 to 180 ° C. and supplied to the high-frequency plasma decomposition furnace, and air is supplied from the shoulder of the high-frequency plasma decomposition reaction furnace at room temperature, and a part of the air is added to the mixed gas and the high-frequency plasma decomposition reaction. A freon decomposing method using high-frequency plasma, wherein the freon is hydrolyzed by blowing into a furnace, and H 2 and CO are burned to make them harmless.
JP09447196A 1996-04-16 1996-04-16 CFC decomposition method using high frequency plasma Expired - Fee Related JP3965216B2 (en)

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JP3965216B2 true JP3965216B2 (en) 2007-08-29

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KR100348586B1 (en) * 1999-02-25 2002-08-13 송병무 Method and apparatus for treatment of hazardous and toxic gases
WO2000074822A1 (en) 1999-06-07 2000-12-14 Nkk Corporation Method and apparatus for decomposing halogenated hydrocarbon gas
KR100385157B1 (en) * 2000-10-10 2003-05-22 (주)케이.씨.텍 Method Of Treating perfluoro Compound Gas and Apparatus For Treating The Same
US8618436B2 (en) * 2006-07-14 2013-12-31 Ceramatec, Inc. Apparatus and method of oxidation utilizing a gliding electric arc
US8350190B2 (en) 2007-02-23 2013-01-08 Ceramatec, Inc. Ceramic electrode for gliding electric arc
JP5686527B2 (en) * 2010-04-26 2015-03-18 大陽日酸株式会社 Recovery method of residual gas
CA2753043A1 (en) * 2011-03-18 2012-09-18 Pyrogenesis Canada Inc. Steam plasma arc hydrolysis of ozone depleting substances
CN114288961A (en) * 2021-12-08 2022-04-08 核工业西南物理研究院 Device and method for reducing fluoride by thermal plasma

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