JP3953400B2 - Ion dissociation promotion method, electrode for electrolytic processing, electrolytic processing method and apparatus - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an ion dissociation promoting method, and more particularly to an ion dissociation promoting method for promoting ion dissociation in a liquid in electrolytic processing or the like. The present invention also relates to an electrode for electrolytic processing that brings a workpiece into contact or close proximity in electrolytic processing. Furthermore, the present invention relates to an electrolytic processing method and apparatus for performing electrolytic processing using such an ion exchanger.
[0002]
[Prior art]
Common ion exchangers include styrene and divinylbenzene copolymers, fluororesins, etc., sulfonic acid groups, carboxyl groups, quaternary ammonium groups (= N ⁺ =), tertiary and lower amino groups, etc. An ion exchange resin or an ion exchange membrane to which an ion exchange group is bonded. Also known are ion exchange fibers in which ion exchange groups are introduced into a nonwoven fabric or the like by a graft polymerization method.
[0003]
For example, in the electrolytic processing, particularly electrolytic processing using ultrapure water, the above-described ion exchange membrane, ion exchange fiber, and the like are used to increase the processing speed. FIG. 1 is a schematic view showing an electrolytic processing apparatus using a conventional ion exchanger. As shown in FIG. 1, in this electrolytic processing apparatus, ion exchangers 230 and 240 are respectively attached to the surfaces of an anode 210 and a cathode 220 connected to a power source 200, and these electrodes 210 and 220 and a workpiece (for example, A fluid 260 such as pure water or ultrapure water is supplied to the copper film 250. The workpiece 250 is brought into contact with or close to the ion exchangers 230 and 240 attached to the surfaces of the electrodes 210 and 220, and a voltage is applied between the anode 210 and the cathode 220 via the power source 200. Water molecules in the fluid 260 are dissociated into hydroxide ions and hydrogen ions by the ion exchangers 230 and 240, and for example, the generated hydroxide ions are supplied to the surface of the workpiece 250. As a result, the concentration of hydroxide ions in the vicinity of the workpiece 250 is increased, and the atoms of the workpiece 250 and the hydroxide ions react to perform removal processing of the surface layer of the workpiece 250. As described above, the ion exchangers 230 and 240 are considered to have a catalytic action for decomposing water molecules in the fluid 260 into hydrogen ions and hydroxide ions.
[0004]
[Problems to be solved by the invention]
However, when ion exchange fibers are used as in the prior art, the fibers are detached during the processing, and the processing characteristics change with time due to the influence of the detached fibers. There are also concerns about the effect of fiber seams on the surface roughness of the workpiece. From this point of view, attempts have been made to flatten the entire surface of the workpiece by wrapping a reticulated ion exchange fiber on a nonwoven fabric and attaching it to a cylindrical electrode. However, the thickness of the ion exchange fiber is not satisfactory. Uniformity becomes an obstacle, and flattening of the workpiece surface is hindered.
[0005]
In addition, with regard to conventional ion exchange resins and ion exchange fibers, particularly when trying to form fine (small-diameter) electrodes 210 and 220, the ion exchangers 230 and 240 are separated on the surfaces of the anode 210 and the cathode 220, respectively. These electrodes 210 and 220 must be covered with an ion exchanger that extends over both the anode 210 and the cathode 220.
[0006]
In this case, if the distance L ₁ between the anode 210 and the cathode 220 is shorter than the distance L ₂ between the electrodes 210 and 220 and the metal (for example, copper) 250 as the workpiece, the electrodes 210 and 220 are used. The energization between them has priority over the energization between the electrodes 210, 220 and the workpiece 250. Therefore, it is necessary to arrange a electrode 210 and 220 to be longer than the distance _{L 2} between the distance _{L 1} between the electrodes 210, 220 and the electrode 210, 220 and the workpiece 250.
[0007]
However, it is impossible to sufficiently reduce the distance _{L 2} between the ion exchangers 230, 240 themselves in thickness between electrodes 210 and 220 and the workpiece 250. For this reason, the anode 210 and the cathode 220 cannot be brought closer to each other than a certain level, and as a result, the shapes of the electrodes 210 and 220 are limited.
[0008]
The present invention has been made in view of such problems of the prior art, and a first object of the present invention is to provide an ion dissociation promoting method capable of obtaining stable processing characteristics.
[0009]
The second object of the present invention is to provide an electrode for electrolytic processing that can obtain stable processing characteristics and can easily cope with the miniaturization of electrodes and the flexibility of the shape of the electrodes. .
[0010]
Furthermore, a third object of the present invention is to provide an electrolytic processing method and apparatus for performing electrolytic processing using such an ion exchanger.
[0011]
[Means for Solving the Problems]
In order to solve such problems in the prior art, a first aspect of the present invention is an organic compound selected from the group consisting of thiols and disulfides having an ion exchange group, and an aqueous solution containing the organic compound. A conductive substance made of a substance containing at least one selected from the group consisting of gold, silver, platinum, copper, and indium (III) oxide, wherein the organic compound can be chemically bonded to the surface by being immersed in Using a conductive substance prepared and immersed in an aqueous solution containing the organic compound to chemically bond the organic compound to the surface, and the conductive substance is disposed in pure water or ultrapure water; This method promotes dissociation of hydroxide ions and hydrogen ions in pure water or ultrapure water by applying a voltage to the ion dissociation promoting method.
[0012]
According to a second aspect of the present invention, a workpiece is fed from a feeding electrode, a voltage is applied between the feeding electrode and the machining electrode, and the machining electrode is brought into contact with or in proximity to the workpiece, In the presence of a liquid consisting of water or ultrapure water, the liquid is dissociated into hydroxide ions and hydrogen ions by an ion exchange material having an ion exchange capacity attached to at least one of the feeding electrode and the processing electrode, A group consisting of thiol and disulfide having an ion exchange group , which is an electrode used for at least one of the feeding electrode and the processing electrode to which the ion exchange material is attached, which performs electrolytic processing on the surface of the workpiece. an organic compound selected from the organic compound by dipping in an aqueous solution containing an organic compound capable chemically bonded to the surface, gold, silver, platinum, copper, and oxide indium Preparing a conductive material made of a material containing at least one selected from the group consisting of (III), wherein is immersed in an aqueous solution containing an organic compound is chemically bonded to the surface of said organic compound The electrode for electrolytic processing.
[0013]
According to a third aspect of the present invention, there is provided a holding unit that holds a workpiece, a machining electrode, a feeding electrode that feeds power to the workpiece, and a power source that applies a voltage between the machining electrode and the feeding electrode. If the between the machining electrode and the workpiece, and a fluid supply unit for supplying a fluid consisting of pure water or ultrapure water, to claim 4 as at least one of the processing electrode and the feeding electrode 6 Electrolytic machining of the surface of the workpiece in the presence of a fluid made of pure water or ultrapure water , using the electrode for electrolytic machining according to any one of the above, and bringing the workpiece into contact with or in proximity to the machining electrode It is an electrolytic processing apparatus characterized by performing.
[0014]
A fourth aspect of the present invention is to feed the feeding electrode to the workpiece, a voltage is applied between the feeding electrode and the processing electrode, said machining electrode in contact or close to the workpiece, pure The electrolytic processing method for performing electrolytic processing on the surface of the workpiece in the presence of water or a liquid made of ultrapure water, according to any one of claims 4 to 6 as at least one of the processing electrode and the feeding electrode. An electrolytic processing method using an electrode for electrolytic processing.
[0015]
According to the present invention, since the conductive material is used as the base material, it can be used as an electrode in electrolytic processing or the like. With such a configuration, the distance between the electrode and the workpiece can be shortened. Therefore, the distance between the anode and the cathode can be shortened, and it is possible to easily cope with the miniaturization of the electrode and the flexible shape of the electrode. In addition, since the ion exchange material can be individually bonded to each of the conductive substance used as the cathode and the conductive substance used as the anode, leakage current generated between the anode and the cathode can be suppressed.
[0017]
In a preferred aspect of the present invention, the ion exchange group is at least one selected from the group consisting of a sulfonic acid group, a carboxyl group, a quaternary ammonium group, and an amino group.
[0019]
Here, it is preferable to use a net-like material as the conductive substance to which the organic compound is bonded. By using a net-like metal as a base material, the ion exchanger can be made water-permeable, so that water can be efficiently decomposed. In addition, when electrolytic processing is performed by bringing the workpiece into contact with the ion exchanger, scratching of the surface of the workpiece becomes a problem, and therefore, the electrolytic processing is performed without bringing the workpiece into contact with the ion exchanger. Is preferred.
[0020]
DETAILED DESCRIPTION OF THE INVENTION
The ion exchanger according to the present invention is formed by chemically bonding an organic compound having an ion exchange group to a conductive material as a base material. Here, “bond” refers to a state in which a substance having an ion exchange group is bonded to a conductive substance by a chemical bond without using an adhesive or the like. In a normal ion exchange resin, an organic substance constituting the resin and a substance having an ion exchange group are “bonded”.
[0021]
Hereinafter, the ion exchanger according to the present invention will be described in detail. Here, sodium propanethiolsulfonate (HSC ₃ H ₆ —SO ₃ Na) was used as an organic compound having an ion exchange group, and this was directly bonded to a platinum (Pt) substrate to produce an ion exchanger. This sodium propanethiolsulfonate (thiol) is obtained by replacing one end of propanethiol with a sulfonic acid group that is one of ion exchange groups.
[0022]
A flat platinum substrate (for example, 34 mm long, 12.5 mm wide, 0.5 mm thick) was prepared, and organic substances on the surface of the platinum substrate were removed with a sulfuric acid / hydrogen peroxide solution. This platinum substrate was immersed in an aqueous solution (several mmol / l) of sodium propanethiolsulfonate for about 12 hours. Since sodium propanethiolsulfonate has hydrophilicity due to the influence of the sulfonic acid group, which is a functional group, the surface of the platinum substrate, which was hydrophobic before immersion, changed to hydrophilic and thiol was bonded to the surface. Thus, the catalytic flat platinum electrode having (ion dissociation _{capability) (Pt-SC 3 H 6} -SO 3 Na) was obtained.
[0023]
The catalytic effect of the water molecule dissociation reaction on the platinum electrode modified with sodium propanethiolsulfonate (hereinafter referred to as thiol platinum electrode) was investigated. That is, the thiol platinum electrode obtained as described above was attached to a parallel plate type experimental apparatus as described below, electrolysis using ultrapure water was performed, and current-voltage characteristics were measured in each case. In addition, as a comparative experiment, current-voltage characteristics were measured when ordinary platinum electrodes were used for the anode and the cathode.
(1) A thiol platinum electrode was used for the anode, and a normal platinum electrode was used for the cathode.
(2) A normal platinum electrode was used for the anode, and a thiol platinum electrode was used for the cathode.
[0024]
A fluororesin sheet was placed between the electrodes, and the opposing area of the electrodes was about 0.4 cm ² . The distance between the electrodes was adjusted according to the thickness of the fluororesin sheet, and the measurement was performed when the distance between the electrodes was 50 μm and 12 μm.
[0025]
FIG. 2A is a graph showing experimental results when the distance between electrodes is 12 μm, and FIG. 2B is a graph showing experimental results when the distance between electrodes is 50 μm. From FIG. 2 (a) and FIG. 2 (b), when the thiol platinum electrode is used as an anode or a cathode, the electrolytic current value is several times to several times as compared with the case where a normal platinum electrode is used for both electrodes. It can be seen that the number has increased ten times (up to 50 times). Thus, the thiol platinum electrode functions as a catalyst that dissociates water into ions. The liquid that promotes dissociation is not limited to water.
[0026]
2A and 2B show that the effect of increasing the electrolytic current value is greater as the distance between the electrodes is shorter. That is, when the distance between the electrodes is 12 μm, the current value is nearly 50 times that when a normal platinum electrode is used (see FIG. 2A), but when the distance between the electrodes is 50 μm, The current value is about five times that of the case where the platinum electrode is used (see FIG. 2B).
[0027]
Here, it is preferable to use a net-like (for example, a lattice shape or a punching metal shape) as a conductive substance to which an organic compound is bonded. By using a net-like conductive material as a base material, the ion exchanger can be made water-permeable, so that water can be efficiently decomposed.
[0028]
In the above-described example, the case where platinum is used as the base material to which the organic compound is bonded has been described. However, the present invention is not limited to this, and a metal such as gold, silver, or copper can also be used as the base material. Further, a glass substrate with Au film, GaAs (gallium arsenide), CdS (cadmium sulfide), In ₂ O ₃ (indium oxide (III)), carbon (graphite), or the like can be used as a base material. According to experiments, it was confirmed that the same current-voltage characteristics as described above were obtained even when a glass substrate with an Au film was used. In addition, an organic conductive substance (polyaniline-based material, carbon nanotube, etc.) is used as an electrode, that is, an organic compound having an ion exchange group can be directly bonded to the organic conductive substance.
[0029]
In the above-described example, the case where thiol is used as the organic compound to be bonded to the base material has been described. However, the present invention is not limited to this example. ) Can also be used as an organic compound. Furthermore, not only the sulfonic acid group described above but also a carboxyl group, a quaternary ammonium group, or an amino group can be used as the ion exchange group. According to experiments, it was confirmed that the same effect as described above can be obtained even when a carboxyl group is used as the ion exchange group of thiol.
[0030]
FIG. 3 is a schematic view showing an example of an electrolytic processing apparatus using the ion exchanger according to the present invention. As shown in FIG. 3, in this electrolytic processing apparatus, a power source 3 is connected to the conductive materials 1a and 2a as the base materials in the ion exchangers 1 and 2 according to the present invention and used as an anode and a cathode, respectively. Yes. A fluid 5 such as pure water or ultrapure water is supplied between the ion exchangers 1 and 2 and the workpiece 4. Then, the workpiece 4 is brought into contact with or close to the ion exchange materials 1b and 2b having ion exchange capacity in the ion exchangers 1 and 2 and a voltage is applied between the anode 1a and the cathode 2a via the power source 3. . Water molecules in the fluid 5 are dissociated into hydroxide ions and hydrogen ions by the ion exchange materials 1b and 2b, and for example, the generated hydroxide ions are supplied to the surface of the workpiece 4. Thereby, the density | concentration of the hydroxide ion of the workpiece 4 vicinity increases, the atom of the workpiece 4 and a hydroxide ion react, and the removal process of the surface layer of the workpiece 4 is performed.
[0031]
Thus, according to the present invention, since the conductive material is used as the base material, it can be used as an electrode in electrolytic processing or the like. With such a configuration, the distance between the electrode and the workpiece can be shortened. Therefore, the distance between the anode and the cathode can be shortened, and it is possible to easily cope with the miniaturization of the electrode and the flexible shape of the electrode. In addition, since the ion exchange material can be individually bonded to each of the conductive substance used as the cathode and the conductive substance used as the anode, leakage current generated between the anode and the cathode can be suppressed.
[0032]
The ion exchanger according to the present invention can also be applied to an electrolytic processing apparatus as shown in FIGS. As shown in FIG. 4, this electrolytic processing apparatus is made of, for example, a processing apparatus main body 14 having a processing tank 12 made of stainless steel and holding ultrapure water 10, a waste liquid tank 16, an ultrapure water circulation / purification unit 18, and a high pressure. An ultrapure water circulation / purification device 22 having a pump 20 and a high pressure ultrapure water supply device 28 having a plunger pump 24 and a pressure transmitter 26 are provided.
[0033]
FIG. 5 is a longitudinal sectional view showing the processing apparatus main body 14 of the electrolytic processing apparatus shown in FIG. As shown in FIG. 5, the processing apparatus main body 14 includes a holding unit (holding table) 30 that detachably holds a workpiece W such as a semiconductor wafer horizontally by suction or the like. The holding unit 30 is disposed inside the processing tank 12 and has three degrees of freedom of XYθ. That is, the workpiece W held by the holding unit 30 is horizontally movable in the X and Y directions while being immersed in the ultrapure water 10, and rotates on the horizontal plane around the θ axis (Z axis). It is supposed to be. The holding unit 30 plays a role of holding the workpiece W and supplying power to the workpiece W, and is made of, for example, titanium and plated with 1 μm of platinum on the surface thereof. Further, both the radial direction and the thrust direction are supported by a hydrostatic bearing 32 (see FIG. 4) made of ultrapure water.
[0034]
FIG. 6 is a perspective view showing a main part of the processing apparatus main body 14 shown in FIG. As shown in FIG. 6, a columnar or cylindrical processing electrode body 34 whose axial center OO extends in the horizontal direction is disposed above the holding portion 30. This processed electrode body 34 is made of an ion exchanger according to the present invention, and is formed by binding an ion exchange material 34b having ion exchange capability to the outer peripheral surface of a cylindrical or cylindrical conductive material 34a. The conductive material 34a in the processed electrode body 34 is used as a processed electrode. The ion exchange material 34b acts as a catalyst for decomposing water molecules of the ultrapure water 10 between the processed electrode body 34 and the workpiece W into hydrogen ions and hydroxide ions.
[0035]
The machining electrode body 34 extends along the axis OO and is connected to a rotary shaft 36 that can move up and down. The rotating shaft 36 is supported by a hydrostatic bearing (not shown) made of ultrapure water in both the radial direction and the thrust direction, like the holding unit 30. With such a configuration, the machining electrode body 34 rotates about the axis OO as the rotation shaft 36 rotates, and the interval between the workpiece W held by the holding unit 30 can be adjusted. It has become. At the time of electrolytic processing, the processing electrode body 34 is lowered, and the lower end portion of the ion exchange material 34 b is brought into contact with or close to the surface of the workpiece W held by the holding portion 30.
[0036]
Further, as shown in FIG. 5, a power supply 38 for applying a voltage is provided between the electrode 34 a of the processed electrode body 34 and the workpiece W held by the holding unit 30. In this example, for example, the electrode 34a of the processed electrode body 34 is connected to the cathode of the power source 38 and the workpiece (copper) W is connected to the anode of the power source 38 in order to electrolytically process copper as the workpiece. Is shown. Depending on the type of workpiece, the electrode 34a of the machining electrode assembly 34 may be connected to the anode of the power source 38, and the workpiece (copper) W may be connected to the cathode of the power source 38.
[0037]
Here, the holding unit 30 is configured to rotate in the direction in which the ultrapure water 10 is wound around the vertical axis and the processing electrode body 34 is centered on the horizontal axis. An ultrapure water nozzle 40 that sprays ultrapure water at a high pressure is disposed between the workpiece W held by the holding unit 30 and the processed electrode body 34. As a result, while rotating at least one of the workpiece W and the machining electrode body 34, the ultrapure water 10 is sprayed between the machining electrode body 34 and the workpiece W from the upstream side in the rotation direction. Bubbles and processed products accumulated between the body 34 and the workpiece W can be effectively removed.
[0038]
As shown in FIG. 4, the ultrapure water purified by the ultrapure water circulation / purification unit 18 of the ultrapure water circulation / purification device 22 is supplied to the ultrapure water nozzle 40 of the high pressure ultrapure water supply device 28. The pressure is increased and supplied from the pressure transmitter 26 via the plunger pump 24. Further, as shown in FIG. 4, the ultrapure water 10 in the processing tank 12 overflows and accumulates in the waste liquid tank 16, is purified by the ultrapure water circulation / purification device 22, and then is supplied from the high-pressure pump 20 to the processing tank 12. Returned in. A part of the ultrapure water 10 is also supplied to the hydrostatic bearing 32.
[0039]
In such an electrolytic processing apparatus, the workpiece W is held by the holding unit 30, the machining electrode body 34 is lowered, and the ion exchange material 34 b of the machining electrode body 34 is in line contact with the surface of the workpiece W or Close. In this state, the ultrapure water circulation / purification device 22 circulates the ultrapure water 10 in the processing tank 12 while purifying it, while the electrode 34a of the processing electrode body 34 is used as the cathode of the power source 38, and the workpiece W is supplied. A voltage is applied between the electrodes 34a and 40 by connecting to the anode of the power source 38, respectively. At the same time, the holding unit 30 and the processing electrode body 34 are simultaneously rotated in the direction in which the ultrapure water 10 is wound, and the processing electrode body 34 and the workpiece W are connected to each other from the ultrapure water nozzle 40 disposed on the upstream side in the rotation direction. In between, spray ultra-pure water at high pressure. Thereby, the removal processing of the surface of the workpiece W is performed by the hydrogen ions and hydroxide ions generated by the chemical reaction on the solid surface of the ion exchange material (catalyst) 34b. In this case, a flow of the ultrapure water 10 is formed in the processing tank 12, and when this flows through the ion exchange material 34b, a large amount of hydrogen ions and hydroxide ions are generated. Efficient processing can be performed by supplying to the surface.
[0040]
Here, the holding unit 30 and the processed electrode body 34 are simultaneously rotated in the direction in which the ultrapure water 10 is wound, and ultrapure water is supplied between the processed electrode body 34 and the workpiece W from the upstream side in the rotation direction. By spraying with, it becomes possible to effectively replace the ultrapure water 10 between the workpiece W and the processed electrode body 34, whereby the gas and processing products generated during processing can be reduced. Efficient removal and stable processing can be performed.
[0041]
The ion exchanger according to the present invention can also be applied to an electrolytic processing apparatus as shown in FIG. The electrolytic processing apparatus shown in FIG. 7 differs from the above-described electrolytic processing apparatus in that an ellipsoid or a spherical one is used as the processing electrode body 134, and when this processing electrode body 134 is lowered, the outer peripheral surface of the electrode 134a. The processing electrode body 134 and the holding unit 30 are rotated in a state where the lower part of the ion exchange material 134 b is in point contact with the workpiece W held by the holding unit 30. Other configurations are the same as those of the above-described electrolytic processing apparatus. According to the electrolytic processing apparatus shown in FIG. 7, the area of the processing portion is reduced, and the ultrapure water 10 is easily supplied to the periphery of the processing portion, so that processing can be performed under stable conditions. The ultrapure water as the processing liquid does not necessarily need to be sprayed by the nozzle 40. For example, the ultrapure water is placed in a tank and the electrode and the workpiece are placed therein. May be used.
[0042]
According to the above-described electrolytic processing apparatus, since no chemical other than ultrapure water is used, the contamination in the processing tank 12 is only the reaction product generated in the processing step. By performing ultrapure water circulation treatment, the amount of drainage is reduced, and no chemical treatment is required, so that the operating cost can be kept extremely low.
[0043]
Although one embodiment of the present invention has been described so far, it is needless to say that the present invention is not limited to the above-described embodiment, and may be implemented in various forms within the scope of the technical idea.
[0044]
【The invention's effect】
As described above, according to the present invention, since the conductive material is used as the base material, it can be used as an electrode in electrolytic processing or the like. With such a configuration, the distance between the electrode and the workpiece can be shortened. Therefore, the distance between the anode and the cathode can be shortened, and it is possible to easily cope with the miniaturization of the electrode and the flexible shape of the electrode. In addition, since the ion exchange material can be individually bonded to each of the conductive material used as the cathode and the conductive material used as the anode, leakage current generated between the anode and the cathode can be suppressed.
[Brief description of the drawings]
FIG. 1 is a schematic view showing an electrolytic processing apparatus using a conventional ion exchanger.
2 (a) and 2 (b) are graphs showing current-voltage characteristics when electrolysis is performed using the ion exchanger according to the present invention.
FIG. 3 is a schematic view showing an example of an electrolytic processing apparatus to which the ion exchanger according to the present invention is applied.
FIG. 4 is a conceptual diagram showing another example of an electrolytic processing apparatus to which the ion exchanger according to the present invention is applied.
5 is a longitudinal sectional view showing a processing apparatus main body of the electrolytic processing apparatus shown in FIG.
6 is a perspective view showing a main part of the processing apparatus main body shown in FIG. 5. FIG.
FIG. 7 is a conceptual diagram showing another example of an electrolytic processing apparatus to which the ion exchanger according to the present invention is applied.
[Explanation of symbols]
1, 2 Ion exchanger 1a, 2a Conductive substance (electrode)
1b, 2b Ion exchange material 3 Power supply 4 Work piece 5 Fluid 10 Ultrapure water 12 Processing tank 14 Processing device body 16 Waste liquid tank 18 Ultrapure water circulation / purification unit 20 High pressure pump 22 Ultrapure water circulation / purification device 24 Plunger pump 26 Pressure Transmitter 28 High Pressure Ultrapure Water Supply Device 30 Holding Unit 32 Hydrostatic Bearings 34, 134 Processing Electrode Body 34a, 134a Conductive Substance (Electrode)
34b, 134b Ion exchange material 36 Rotating shaft 38 Power supply 40 Ultrapure water nozzle

Claims (8)

An organic compound selected from the group consisting of thiols and disulfides having an ion exchange group, and gold, silver, platinum, copper, which can be chemically bonded to the surface by immersion in an aqueous solution containing the organic compound And a conductive substance made of a substance containing at least one selected from the group consisting of indium (III) oxide, and immersed in an aqueous solution containing the organic compound to chemically bond the organic compound to the surface. By placing the conductive material in pure water or ultrapure water and applying a voltage to the conductive material, hydroxide ions and hydrogen ions in pure water or ultrapure water are used. A method for promoting ion dissociation, characterized by promoting dissociation of the ion. The method of promoting ion dissociation according to claim 1, wherein the ion exchange group is at least one selected from the group consisting of a sulfonic acid group, a carboxyl group, a quaternary ammonium group, and an amino group. The method of promoting ion dissociation according to claim 1 or 2, wherein the organic compound is sodium propanethiolsulfonate. A power is supplied to the workpiece from the feeding electrode, a voltage is applied between the feeding electrode and the machining electrode, and the machining electrode is brought into contact with or close to the workpiece so that a liquid made of pure water or ultrapure water is used. In the presence, the surface of the workpiece is electrolytically processed by dissociating the liquid into hydroxide ions and hydrogen ions by an ion exchange material having an ion exchange ability attached to at least one of the feeding electrode and the machining electrode. An electrode used for at least one of the feeding electrode and the processing electrode to which the ion exchange material is attached,
An organic compound selected from the group consisting of thiol and disulfide having an ion exchange group , and gold, silver, platinum, copper, which can be chemically bonded to the surface by immersion in an aqueous solution containing the organic compound and providing a conductive material made of a material containing at least one selected from the group consisting of indium oxide (III), it is chemically bonded to the surface of said organic compound is immersed in an aqueous solution containing an organic compound An electrode for electrolytic processing characterized by the above. The electrode for electrolytic processing according to claim 4 , wherein the ion exchange group is at least one selected from the group consisting of a sulfonic acid group, a carboxyl group, a quaternary ammonium group, and an amino group. The electrode for electrolytic processing according to claim 4 or 5, wherein the organic compound is sodium propanethiolsulfonate. A holding section for holding a workpiece;
A machining electrode;
A feeding electrode for feeding power to the workpiece;
A power source for applying a voltage between the machining electrode and the power supply electrode;
A fluid supply unit for supplying a fluid composed of pure water or ultrapure water between the workpiece and the processing electrode;
Using the electrode for electrolytic processing according to any one of claims 4 to 6 as at least one of the processing electrode and the feeding electrode,
An electrolytic processing apparatus that performs electrolytic processing on a surface of the workpiece in the presence of a fluid made of pure water or ultrapure water by bringing the workpiece into contact with or close to the processing electrode. A power is fed to the workpiece by a feeding electrode, a voltage is applied between the feeding electrode and the machining electrode, and a liquid made of pure water or ultrapure water is brought into contact with or in close proximity to the workpiece. In the electrolytic processing method of performing electrolytic processing of the surface of the workpiece in the presence of
An electrolytic processing method using the electrolytic processing electrode according to any one of claims 4 to 6 as at least one of the processing electrode and the feeding electrode.

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