JP3945551B2

JP3945551B2 - Application nozzle

Info

Publication number: JP3945551B2
Application number: JP14973498A
Authority: JP
Inventors: 太島井; 耕一永澤; 潤司沓澤; 宏仁佐合
Original assignee: Tokyo Ohka Kogyo Co Ltd
Current assignee: Tokyo Ohka Kogyo Co Ltd
Priority date: 1998-01-19
Filing date: 1998-05-29
Publication date: 2007-07-18
Anticipated expiration: 2018-05-29
Also published as: JPH11274071A

Description

【０００１】
【発明の属する技術分野】
本発明は例えばガラス基板や半導体ウェーハ等の板状被処理物表面にレジスト液や現像液等の塗布液を塗布するノズルに関する。
【０００２】
【従来の技術】
半導体ウェーハやガラス基板等の板状被処理物表面に塗布するレジスト液等の量を極力少なくする手段として、特開昭６１−６５４３５号公報、特開昭６３−１５６３２０号公報及び特開平４−１１８０７３号公報に開示されるようにスリット状開口部を有するノズルを用いることが知られている。
【０００３】
上記スリット状開口部を有するノズルの具体的な構造は上記公報からは明確ではないが、本発明者等はノズルの具体的な構造として図１０に示すものを製作した。
即ち、ノズルは左右の半体１０１，１０２の流路となる凹部１０３及びスリット状開口部となる凹部１０４を形成した面を合わせ、流路となる凹部１０３よりも上方位置をボルト１０５にて結合してノズルを製作した。
【０００４】
【発明が解決しようとする課題】
上述したように流路よりも上方をボルトにて結合すると、必然的にスリット状開口部の下端が開き、塗布液のボタ落ちが生じる。
また、逆に流路よりも下方をボルトにて結合すると、上方から液漏れを起こしたり、スリット状開口部の幅を設定することが難しく塗布液の途切れ等を生じる。
【０００５】
【課題を解決するための手段】
上記課題を解決すべく本発明に係るノズルは、左右の半体を合わせてノズルを構成し、左右の半体の合わせ面間には流路とスリット状開口部を形成し、また左右の半体の合わせ面のうちの少なくとも一方には前記スリット状開口部の幅を設定する凸部を設け、更に前記流路の上方位置及び下方位置においてボルトにて左右の半体を結合する構成とした。
【０００６】
また、本発明に係る他のノズルは、前記流路の一端を塗布液の供給管が嵌合する供給口とし、他端を塗布液の排出管が嵌合する排出口とし、更に前記供給口に連続する部分の流路断面形状を塗布液の供給管の流路断面形状に実質的に等しく、また前記排出口に連続する部分の流路断面形状を塗布液の排出管の流路断面形状に実質的に等しいくした。
このような構成とすることで、管と流路との継ぎ目に段差が生じることなく、気泡の発生を防止することができる。
【０００７】
更に、本発明に係る他のノズルは、前記流路の一端を塗布液の供給管が嵌合する供給口とし、他端を閉塞し、更に前記供給口に連続する部分の流路断面形状を塗布液の供給管の流路断面形状に実質的に等しくした。
このように構成することで、前記同様気泡の発生を防止することができる。
【０００８】
尚、下方のボルトの挿通穴については、凸部の部分に設ける方が塗布液にボルトが接触しないので好ましい。
【０００９】
また、凸部の形状としては、例えば正面から見て略紡錘形状をなすようにする。このようにすることで、スムーズに塗布液が流下し、スリット状開口部内での発泡を防止することができる。
【００１０】
【発明の実施の形態】
以下に本発明の実施の形態を添付図面に基づいて説明する。ここで、図１は本発明に係る塗布用ノズルを適用した回転カップ式の塗布ユニットの全体図、図２は本発明に係る塗布用ノズルの断面図、図３は本発明に係る塗布用ノズルを構成する左右の半体のうちの一方の正面図、図４は図３の塗布液の供給部の部分の拡大図、図５はボルト挿通穴の部分の拡大図、図６は図５のＡ−Ａ線断面図、図７は図５のＢ−Ｂ線断面図である。
尚、本発明はノズルに関するものなので、実施の形態は塗布用ノズルに限らない。
【００１１】
回転カップ式の塗布ユニットは下部分１と上部分２からなり、下部分１はベースに固定されたアウターカップ３とこのアウターカップ３内に設けられスピンナーにて回転せしめられるインナーカップ４とを備え、インナーカップ４内にはインナーカップ４と一体的に回転する載置テーブル５が設けられ、この載置テーブル５の中央部は図示しないが、独立して昇降動し且つ上昇した位置でガラス基板Ｗ（板状被処理物）の受け渡しを行い、下降位置で載置テーブル５と面一になるサブテーブルが設けられている。
【００１２】
一方、上部分２は下降した位置でアウターカップ３の周縁を閉塞するアウターカップ用蓋体６と、図示しないが、アウターカップ用蓋体６内に設けられ下降した位置でインナーカップ４の周縁を閉塞するインナーカップ用蓋体とを備え、アウターカップ用蓋体６はアーム７に支持され、インナーカップ用蓋体はアウターカップ用蓋体６とは独立して回転可能に支持されている。
【００１３】
一方、回転カップ式の塗布ユニットの両側にはレール８，８を備え、これらレール８，８間に門型フレーム９を移動可能に係合し、この門型フレーム９に本発明に係るノズル１０を取り付けている。
【００１４】
ノズル１０は図２〜図７に示すように、左右の半体１１，１１をボルト１２，１３で結合して構成される。
各半体１１はその合わせ面に塗布液の流路１５となる凹部１６が形成され、流路１５とつながるスリット状開口部１７となる凹部１８と、凹部１８内には一定間隔でスリット状開口部１７の幅を設定する凸部１９が一方の半体１１のみに設けられている。
【００１５】
凸部１９の形状は正面から見て略紡錘形状をなし、流路１５からの塗布液が出来るだけ抵抗を受けずにスリット状開口部１７を流下するようにしている。
【００１６】
また、各半体１１には流路１５となる凹部１６の上方に前記ボルト１２の挿通穴２０が形成され、凹部１６の下方に前記ボルト１３の挿通穴２１が形成されている。特に挿通穴２１については前記凸部１９の部分に開口せしめ、塗布液がボルト１３に接触しない構成になっている。尚、挿通穴２１を凸部１９から外して開口させてもよい。
【００１７】
また、ノズル１０に形成された直線状の流路１５の一端は塗布液の供給管３１が嵌合する供給口１５ａとされ、他端は塗布液の排出管３２が嵌合する排出口１５ｂとされ、これら供給口１５ａ及び排出口１５ｂは流路１５よりも若干大径とされ、供給口１５ａに供給管３１を、また排出口１５ｂに排出管３２をそれぞれ嵌合させた状態で、図４に示すように、供給口１５ａ及び排出口１５ｂの流路断面形状と流路１５の流路断面形状とが略同一になるようにしている。
斯かる構成とすることで、供給管３１及び排出管３２と流路１５との継ぎ目において段差がなくなり、塗布液が流れることにつれて気泡が発生するのを防止することができる。
【００１８】
図８は別実施例を示す図であり、前記実施例は左右の半体１１，１１を同一形状とすることで、製作の容易性を確保しているが、この実施例にあってはスリット状開口部１７となる凹部１８とスリット状開口部１７の幅決定する凸部１９を両方の半体１１に形成している。尚、流路１５となる凹部１６を一方の半体１１のみに形成してもよい。
【００１９】
図９は別実施例を示す図３と同様の断面図であり、この実施例にあっては流路１５の他端を栓３３で閉塞している。上述したように一端に供給口を他端に排出口を設けたノズルは、例えば現像液の循環流路の一部に設けるのに適しており、図９に示すように他端を閉じたノズルは、例えばレジスト液の塗布流路に適している。
【００２０】
また、図示しない別実施例にあっては、供給管と排出管を流路に対し、流路の端部においてＬ字型に連結してもよい。
【００２１】
【発明の効果】
以上に説明したように本発明によれば、左右の半体を合わせてスリット状開口部を有するノズルを作製するにあたり、左右の半体の合わせ面のうちの少なくとも一方にはスリット状開口部の幅を設定する凸部を設け、且つ左右の半体をボルトで結合する場合に、前記流路の上方位置及び下方位置をそれぞれ結合するようにしたので、スリット状開口部の下端が広がることがなく、また左右の半体の合わせ面のうちの少なくとも一方にスリット状開口部の幅を設定する凸部を設けたので、安定した塗布液を供給が可能になる。
【００２２】
また、下方のボルトの挿通穴を、凸部の部分に設けるようにすれば、塗布液にボルトが接触しないので異物等の混入を確実に防止することができ、更に、凸部の形状として、例えば正面から見て略紡錘形状とすることで、スムーズに塗布液が流下し、スリット状開口部内での発泡を防止することができる。
【００２３】
更に、ノズルに形成した塗布液の流路の断面形状と、塗布液の供給管の断面形状或いは塗布液の排出管の断面形状とをほぼ同一にしたので、管と流路との継ぎ目に段差が生じることなく、したがって気泡の発生を防止することができる。
【図面の簡単な説明】
【図１】本発明に係る塗布用ノズルを適用した回転カップ式の塗布ユニットの全体図
【図２】本発明に係る塗布用ノズルの断面図
【図３】本発明に係る塗布用ノズルを構成する左右の半体のうちの一方の正面図
【図４】図３の塗布液の供給部の部分の拡大図
【図５】図３のボルト挿通穴の部分の拡大図
【図６】図５のＡ−Ａ線断面図
【図７】図５のＢ−Ｂ線断面図
【図８】別実施例を示す図２と同様の断面図
【図９】別実施例を示す図３と同様の断面図
【図１０】従来例を示す図２と同様の断面図
【符号の説明】
１…塗布ユニットの下部分、２…塗布ユニットの上部分、３…アウターカップ、４…インナーカップ、５…載置テーブル、６…アウターカップ用蓋体、１０…ノズル、１１…ノズル半体、１２，１３…ボルト、１５…流路、１５ａ…供給口、１５ｂ…排出口、１６…流路となる凹部、１７…スリット状開口部、１８…スリット状開口部となる凹部、１９…凸部、２０，２１…ボルト挿通穴、３３…栓。[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a nozzle for applying a coating solution such as a resist solution or a developing solution to the surface of a plate-like workpiece such as a glass substrate or a semiconductor wafer.
[0002]
[Prior art]
As means for minimizing the amount of resist solution applied to the surface of a plate-like workpiece such as a semiconductor wafer or glass substrate, Japanese Patent Laid-Open Nos. 61-65435, 63-156320, and 4- As disclosed in Japanese Patent No. 118073, it is known to use a nozzle having a slit-like opening.
[0003]
Although the specific structure of the nozzle having the slit-shaped opening is not clear from the above publication, the present inventors have manufactured the specific structure of the nozzle shown in FIG.
In other words, the nozzles are combined with the surface where the concave portion 103 serving as the flow path of the left and right halves 101 and 102 and the concave portion 104 serving as the slit-like opening are formed, and the position above the concave portion 103 serving as the flow path is coupled with the bolt 105 And made a nozzle.
[0004]
[Problems to be solved by the invention]
As described above, when the upper side of the flow path is connected with the bolt, the lower end of the slit-shaped opening is inevitably opened, and the coating liquid drops off.
On the other hand, when the lower part of the flow path is connected with a bolt, liquid leakage occurs from above, it is difficult to set the width of the slit-shaped opening, and the coating liquid is interrupted.
[0005]
[Means for Solving the Problems]
In order to solve the above problems, the nozzle according to the present invention is configured by combining the left and right halves, forming a flow path and a slit-like opening between the mating surfaces of the left and right halves, and the left and right halves. Protrusions that set the width of the slit-like opening are provided on at least one of the mating surfaces of the bodies, and the left and right halves are joined by bolts at the upper and lower positions of the flow path. .
[0006]
The other nozzle according to the present invention has one end of the flow path as a supply port into which a coating liquid supply pipe is fitted, the other end as a discharge port into which a coating liquid discharge pipe is fitted, and the supply port The flow passage cross-sectional shape of the continuous portion is substantially equal to the flow passage cross-sectional shape of the coating liquid supply pipe, and the flow passage cross-sectional shape of the continuous portion to the discharge port is the flow passage cross-sectional shape of the coating liquid discharge pipe. To be substantially equal to
With such a configuration, generation of bubbles can be prevented without causing a step at the joint between the pipe and the flow path.
[0007]
Furthermore, the other nozzle according to the present invention has one end of the flow path as a supply port into which a supply pipe for a coating liquid is fitted, the other end is closed, and the flow path cross-sectional shape of a portion continuing to the supply port is formed. The flow path cross-sectional shape of the coating liquid supply pipe was substantially equal.
By comprising in this way, generation | occurrence | production of a bubble can be prevented like the above.
[0008]
In addition, about the insertion hole of a lower volt | bolt, since the volt | bolt does not contact a coating liquid, it is preferable to provide in the part of a convex part.
[0009]
Moreover, as a shape of a convex part, it makes it make a substantially spindle shape seeing from the front, for example. By doing in this way, a coating liquid flows down smoothly and foaming in a slit-shaped opening part can be prevented.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the accompanying drawings. Here, FIG. 1 is an overall view of a rotary cup type coating unit to which the coating nozzle according to the present invention is applied, FIG. 2 is a sectional view of the coating nozzle according to the present invention, and FIG. 3 is a coating nozzle according to the present invention. 4 is a front view of one of the left and right halves constituting FIG. 4, FIG. 4 is an enlarged view of the coating liquid supply portion of FIG. 3, FIG. 5 is an enlarged view of the bolt insertion hole portion, and FIG. AA line sectional view, FIG. 7 is a BB line sectional view of FIG.
In addition, since this invention is related with a nozzle, embodiment is not restricted to the nozzle for application | coating.
[0011]
The rotary cup type coating unit includes a lower part 1 and an upper part 2, and the lower part 1 includes an outer cup 3 fixed to a base and an inner cup 4 provided in the outer cup 3 and rotated by a spinner. In the inner cup 4, a mounting table 5 that rotates integrally with the inner cup 4 is provided, and although the central portion of the mounting table 5 is not shown, the glass substrate is moved up and down independently and moved upward. A sub-table that transfers W (plate-like object) and is flush with the mounting table 5 at the lowered position is provided.
[0012]
On the other hand, the upper portion 2 has an outer cup lid 6 that closes the outer periphery of the outer cup 3 at the lowered position, and an outer cup lid 6 that is provided in the outer cup lid 6 at a lowered position, not shown. The outer cup lid body 6 is supported by the arm 7, and the inner cup lid body is rotatably supported independently of the outer cup lid body 6.
[0013]
On the other hand, rails 8 and 8 are provided on both sides of the rotary cup type coating unit, and a portal frame 9 is movably engaged between the rails 8 and 8, and the nozzle 10 according to the present invention is connected to the portal frame 9. Is attached.
[0014]
As shown in FIGS. 2 to 7, the nozzle 10 is configured by connecting left and right half bodies 11 and 11 with bolts 12 and 13.
Each half body 11 is formed with a recess 16 to be a flow path 15 for the coating liquid on the mating surface, a recess 18 to be a slit-shaped opening 17 connected to the flow path 15, and slit-shaped openings in the recess 18 at regular intervals. The convex part 19 which sets the width | variety of the part 17 is provided only in one half body 11. FIG.
[0015]
The shape of the convex portion 19 is substantially spindle-shaped when viewed from the front, and the coating liquid from the flow path 15 flows down the slit-shaped opening 17 without receiving resistance as much as possible.
[0016]
In each half 11, an insertion hole 20 for the bolt 12 is formed above the recess 16 serving as the flow path 15, and an insertion hole 21 for the bolt 13 is formed below the recess 16. In particular, the insertion hole 21 is opened in the convex portion 19 so that the coating liquid does not contact the bolt 13. Note that the insertion hole 21 may be opened away from the convex portion 19.
[0017]
Further, one end of the linear flow path 15 formed in the nozzle 10 is a supply port 15a into which the coating liquid supply pipe 31 is fitted, and the other end is a discharge port 15b into which the coating liquid discharge pipe 32 is fitted. The supply port 15a and the discharge port 15b are slightly larger in diameter than the flow path 15, and the supply tube 31 is fitted in the supply port 15a and the discharge tube 32 is fitted in the discharge port 15b. As shown in FIG. 4, the flow path cross-sectional shape of the supply port 15a and the discharge port 15b and the flow path cross-sectional shape of the flow channel 15 are made substantially the same.
With such a configuration, there is no step at the joint between the supply pipe 31 and the discharge pipe 32 and the flow path 15, and it is possible to prevent bubbles from being generated as the coating liquid flows.
[0018]
FIG. 8 is a diagram showing another embodiment. In the above embodiment, the left and right halves 11 and 11 have the same shape, thereby ensuring the ease of manufacture. A concave portion 18 to be a cylindrical opening 17 and a convex portion 19 for determining the width of the slit-shaped opening 17 are formed in both halves 11. Note that the recess 16 serving as the flow path 15 may be formed only in one half 11.
[0019]
FIG. 9 is a cross-sectional view similar to FIG. 3 showing another embodiment. In this embodiment, the other end of the flow path 15 is closed with a plug 33. As described above, the nozzle having the supply port at one end and the discharge port at the other end is suitable for providing, for example, a part of the developer circulation path, and the nozzle having the other end closed as shown in FIG. Is suitable, for example, for a resist solution application channel.
[0020]
In another embodiment (not shown), the supply pipe and the discharge pipe may be connected to the flow path in an L shape at the end of the flow path.
[0021]
【The invention's effect】
As described above, according to the present invention, when producing a nozzle having a slit-shaped opening by combining the left and right halves, at least one of the mating surfaces of the left and right halves has a slit-shaped opening. When the convex part for setting the width is provided and the left and right halves are coupled with bolts, the upper position and the lower position of the flow path are coupled to each other, so that the lower end of the slit-shaped opening is widened. In addition, since a convex portion for setting the width of the slit-shaped opening is provided on at least one of the mating surfaces of the left and right halves, a stable coating liquid can be supplied.
[0022]
In addition, if the insertion hole of the lower bolt is provided in the portion of the convex portion, the bolt does not contact the coating liquid, so it is possible to reliably prevent foreign matters and the like, and further, as the shape of the convex portion, For example, when it is made into a substantially spindle shape when viewed from the front, the coating solution flows smoothly and foaming in the slit-shaped opening can be prevented.
[0023]
Furthermore, since the cross-sectional shape of the flow path of the coating liquid formed on the nozzle is substantially the same as the cross-sectional shape of the supply pipe of the coating liquid or the cross-sectional shape of the discharge pipe of the coating liquid, a step is formed at the joint between the pipe and the flow path. Therefore, the generation of bubbles can be prevented.
[Brief description of the drawings]
FIG. 1 is an overall view of a rotary cup type coating unit to which a coating nozzle according to the present invention is applied. FIG. 2 is a cross-sectional view of the coating nozzle according to the present invention. FIG. 4 is a front view of one of the left and right halves. FIG. 4 is an enlarged view of a portion for supplying a coating liquid in FIG. 3. FIG. 5 is an enlarged view of a bolt insertion hole in FIG. FIG. 7 is a sectional view taken along line BB of FIG. 5. FIG. 8 is a sectional view similar to FIG. 2 showing another embodiment. FIG. 9 is similar to FIG. 3 showing another embodiment. Sectional view [FIG. 10] Sectional view similar to FIG. 2 showing a conventional example [Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Lower part of application unit, 2 ... Upper part of application unit, 3 ... Outer cup, 4 ... Inner cup, 5 ... Mounting table, 6 ... Lid for outer cup, 10 ... Nozzle, 11 ... Half nozzle DESCRIPTION OF SYMBOLS 12,13 ... Bolt, 15 ... Flow path, 15a ... Supply port, 15b ... Discharge port, 16 ... Recessed part used as a flow path, 17 ... Slit-like opening part, 18 ... Recessed part used as a slit-like opening part, 19 ... Convex part , 20, 21 ... bolt insertion holes, 33 ... stoppers.

Claims

In a nozzle that applies a coating liquid with a predetermined width to the surface of a workpiece, this nozzle is configured by combining the left and right halves, and a flow path and a parallel run in the longitudinal direction between the mating surfaces of the left and right halves. A slit-shaped opening is formed below, and a convex part for setting the width of the slit-shaped opening is provided below at least one flow path of the mating surfaces of the left and right halves, and the flow path One end is a supply port to which a supply pipe for the coating liquid is fitted, the other end is a discharge port to which a discharge pipe for the coating liquid is fitted, and the flow passage cross-sectional shape of the portion continuing to the supply port is the coating liquid The flow passage cross-sectional shape of the supply pipe is substantially equal to the flow passage cross-sectional shape of the supply pipe, and the flow passage cross-sectional shape of the portion continuing to the discharge port is substantially equal to the flow passage cross-sectional shape of the discharge pipe of the coating liquid. nozzle.

In a nozzle that applies a coating liquid with a predetermined width to the surface of a workpiece, this nozzle is configured by combining the left and right halves, and a flow path and a parallel run in the longitudinal direction between the mating surfaces of the left and right halves. A slit-shaped opening is formed below, and a convex part for setting the width of the slit-shaped opening is provided below at least one flow path of the mating surfaces of the left and right halves, and the flow path One end is a supply port into which a coating liquid supply pipe is fitted, the other end is closed, and the flow path cross-sectional shape of the portion continuing to the supply port is substantially the flow path cross-sectional shape of the coating liquid supply pipe Nozzle for application characterized by being equal to.

The coating nozzle according to claim 1 , wherein an insertion hole for a lower bolt is provided in the convex portion.

In coating nozzle according to any one of claims 1 to 3, the shape of the protrusions coating nozzle, characterized in that a substantially spindle shape as viewed from the front.