JP3944471B2 - Driving device and XY table using the same - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a drive device using electromagnetic force and an XY table used for a semiconductor manufacturing device using the drive device as a drive source.
[0002]
[Prior art]
As a driving device used as a driving source for a conventional semiconductor manufacturing apparatus or the like, there is, for example, Japanese Patent Laid-Open No. 2001-288 (hereinafter referred to as Conventional Example 1). In Conventional Example 1, a plurality of permanent magnets are arranged on the mover so that the magnetization directions are alternate, the stator has two types of magnetic cores, and a plurality of armatures each having a coil wound thereon. What is arranged in series is described. Japanese Patent Application Laid-Open No. 11-262237 describes that a position sensor for detecting the position of the mover is arranged on the stator side in order to improve the position control of the mover and reduce the thrust pulsation. Yes.
[0003]
[Patent Document 1]
Japanese Patent Laid-Open No. 2001-288 [Patent Document 2]
JP-A-11-262237 [0004]
[Problems to be solved by the invention]
When a magnetic pole position detection device is placed on a drive device that uses electromagnetic force in order to improve the accuracy of position control, reduce thrust pulsation, etc., the size of the drive device as a whole becomes larger and the installation location becomes larger. There may be restrictions. In particular, when the above driving device is used as a driving source of an electronic apparatus manufacturing apparatus using a semiconductor or the like that requires compactness, the above-described problem becomes significant.
[0005]
An object of the present invention is to provide a compact structure for a drive device equipped with a magnetic pole position detection device and an XY table using such a drive device as a drive source.
[0006]
[Means for Solving the Problems]
In order to achieve the above object, an XY table of the present invention has a first facing portion in which an upper magnetic pole tooth and a lower magnetic pole tooth face each other, a first core having a magnetic body, an upper magnetic pole tooth, and a lower magnetic pole tooth. And a second core having a magnetic body, wherein the first core and the second core are alternately arranged, and the first counter portion And a plurality of armature units in which the directions of the magnetic poles of the second facing portion oppose each other, and an armature in which the plurality of armature units are arranged side by side for a plurality of phases, and between the first facing portions and A secondary member having a permanent magnet is disposed between the second opposing portions, and an upper magnetic pole tooth disposed on the first core and the second core are disposed above the secondary member. The upper magnetic pole teeth are alternately arranged, and are arranged on the first core below the secondary side member. The partial magnetic pole teeth and the lower magnetic pole teeth arranged on the second core are alternately arranged, a coil is wound around the first core and the second core in common, and between the multiphase armatures The drive source is a drive device in which a spacer is disposed and a position detection device is disposed at a location facing the coil across the secondary member in the spacer.
[0007]
Still another feature of the present invention is that the drive device includes a plurality of armatures each having a magnetic body and wound with a coil, and a secondary member having a plurality of permanent magnets. A first opposing portion having a tooth portion and a lower magnetic pole tooth portion opposed via a gap, and an upper magnetic pole tooth and a second opposing portion opposed to the lower magnetic pole tooth via a gap, wherein the first opposing portion A secondary side member is provided in the gap between and the gap between the second opposing portions, a plurality of armatures are arranged at a predetermined interval, and a position detection device is arranged between the plurality of armatures It is to do.
[0008]
Still another feature of the present invention is that the drive device has a first facing portion in which the upper magnetic pole teeth and the lower magnetic pole teeth face each other, and includes a first core having a magnetic body, an upper magnetic pole tooth, and a lower magnetic pole tooth. Has a plurality of armatures having a second facing portion facing each other and a second core having a magnetic body, and is secondary between the first facing portion and between the second facing portions. Side members are arranged, and upper magnetic pole teeth arranged in the first core and upper magnetic pole teeth arranged in the second magnetic pole unit are alternately arranged above the secondary side member, and the secondary side member is arranged. The lower magnetic pole teeth arranged on the first core and the lower magnetic pole teeth arranged on the second core are alternately arranged below, and a coil is wound around the first core and the second core in common, It is assumed that a position detection device is arranged between a plurality of armatures.
[0009]
According to the present invention, the space provided between a plurality of armatures is used to suppress thrust pulsation, and the position detector is disposed at the position, thereby increasing the size of the drive device and the manufacturing device. It is possible to attach a position detection device.
[0010]
The other features of the present invention are as described in the claims.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 5 shows a driving device of a comparative example. In the comparative example, the magnetic pole position detection device 101 is disposed at a position separated by n times the pole pitch from the effective conductor portion of the armature coil 4. In the configuration of the comparative example, the length of the entire armature in the driving direction is increased by the length of the magnetic pole position detection device 101. Further, the magnetic pole position detecting device 101 may be damaged by colliding with an obstacle during use.
[0012]
FIG. 1 is an overall view of a driving apparatus according to an embodiment of the present invention. In FIG. 1, an armature coil 4 made of a conductor is wound around an armature 3, and a plurality of armatures 3 are arranged in series to constitute a primary side member, and a secondary side member 6 is a primary side by a bearing or the like. It is movably supported in the gap of the armature 3 of the member. In this embodiment, the primary side member is fixed and the secondary side member is moved, but the secondary side member is fixed and the primary side member is moved. Adjacent armatures 3 are maintained at a predetermined interval in order to suppress thrust pulsation and to improve position control. Therefore, the spacer 100 is provided between the adjacent armatures 3. Here, the magnetic pole position detection device 101 is provided in the spacer 100. According to the present embodiment, the space provided between the adjacent armatures 3 is used for the purpose of suppressing thrust pulsation due to a change in position, and the magnetic pole position detection device 101 is disposed at that position, thereby driving. The length of the drive direction of the device can be shortened, and the entire drive device can be made compact. Further, by preventing the magnetic position detection device from colliding with an external obstacle, it is possible to prevent the magnetic position detection unit from being damaged.
[0013]
FIG. 2 shows a driving device used in this embodiment. FIG. 2A is a diagram showing the flow of magnetic flux of the drive device, and FIG. 2B is an overall view of the drive device. A plurality of permanent magnets 34 are arranged so that the N poles and the S poles are alternated to become the secondary side member 6 of the driving device. The armature 3 corresponds to a primary side member (side having a magnetic body wound with a coil) of the driving device, and includes the cores 51 and 52 and the armature coil 4.
[0014]
The cores 51 and 52 are made of a magnetic material, and the core 51 and the core 52 are configured such that the upper and lower magnetic poles are alternated. Here, the upper magnetic pole teeth 11a and the lower magnetic pole teeth 21b of the core 51 are defined as first opposing portions, and the lower magnetic pole teeth 12b and the upper magnetic pole teeth 22a of the core 52 are defined as second opposing portions. Therefore, the armature 3 is configured so that the (2n-1) th core has the first facing portion and the (2n) th core has the second facing portion (where n = 1, 2, 3 ...). When a certain gap is provided between the upper magnetic pole teeth and the lower magnetic pole teeth of the opposing portions of the cores 51 and 52, and the secondary member 6 is passed through the gap, the secondary member 6 becomes the first opposing portion and the second opposing member. The structure arrange | positioned between the opposing parts is formed. When a single-phase alternating current is applied to the coil 4 in accordance with the relative positions of the secondary member 6 and the armature 3, the gap between the upper magnetic pole teeth and the lower magnetic pole teeth of each opposed portion of the driving device has no magnetic flux. Alternates between the upper and lower magnetic pole teeth and passes up and down, and the directions of the magnetic fluxes flowing in the first facing portion and the second facing portion are alternately reversed. Due to the interaction between the magnetic flux flowing in the first facing portion and the second facing portion and the magnetic flux generated by the permanent magnet 34, the secondary member 6 generates a driving force due to electromagnetic force in the x direction.
[0015]
FIG. 3 shows an embodiment relating to the arrangement of the magnetic pole position detecting device. As described above, in order to reduce the thrust pulsation at the time of driving, it is necessary to arrange the spacer 100 between the magnetic pole tooth centers of adjacent armatures to maintain a predetermined interval (k · P + P / M) (here K = 0, 1, 2, 3..., P = magnetic pole pitch, M = number of phases). By incorporating the magnetic pole position detection device 101 into the spacer 100, a compact drive device can be provided without increasing the overall size, and there is also an effect of protecting the magnetic pole position detection device from the outside.
[0016]
The magnetic pole position detection device 101 shown in FIG. 3 is composed of magnetic pole position detection units such as Hall elements and Hall ICs, and means a magnetic pole position detection device unit that combines three phases.
[0017]
FIG. 4 shows an example of the arrangement interval of the magnetic pole position detection devices for each phase. FIG. 4A shows an example in which the magnetic pole position detectors are arranged at intervals of approximately π / 3 (approximately P / 6 when the magnetic pole pitch is P) in the three-phase driving device, and FIG. An example in which the position detection devices 101 are arranged at intervals of approximately 2π / 3 (approximately P / 3) will be described.
[0018]
Similarly, a predetermined interval (k · P + P / M) (where k = 0, 1, 2, 3..., P = magnetic pole pitch, M = between the magnetic pole teeth centers of adjacent armatures using a spacer 100. If the number of phases is maintained, two-phase and five-phase driving devices are possible.
[0019]
Of course, even in a magnetic pole detection device incorporated in a two-phase, five-phase, etc. drive device, if the magnetic pole position detection device 101 is arranged at an interval of approximately π / M or 2π / M (M is the number of phases), the same thing is obtained. An effect is obtained.
[0020]
Further, in the method of providing the magnetic pole position detecting device 101 in the spacer 100, the control circuit uses a control circuit in accordance with a deviation between the magnetic pole center of the primary side member made of the armature 3 and the permanent magnet magnetic pole center of the secondary side member 6 made of the permanent magnet. If the advance angle of the current supply is corrected, the arrangement restriction of the magnetic pole position detection can be reduced. That is, as described above, the thrust pulsation can be reduced by the control of the control circuit even if the interval between the adjacent armatures is not (k · P + P / M).
[0021]
FIG. 6 is an overall view of an XY table using the driving device of the present invention. In FIG. 6, the armature 3 is a three-phase driving device that is a combination of the A-phase, B-phase, C-phase, and three armatures shown in FIG. 1, and a spacer 100 is provided between each phase of the armature 3. . Here, the magnetic pole position detection device 101 is provided in the spacer 100. In FIG. 6, 3X represents the armature 3 of the X-direction drive device, and 3Y represents the armature 3 of the Y-direction drive device. A linear guide mechanism 121 (linear bearing) is disposed on the base 120 of the XY table so that the armature 3X of the X-direction drive device can be freely driven. A linear guide mechanism 121 (linear bearing) is also arranged on the Y axis so that the armature 3Y of the Y-direction drive device can be freely driven. It is also possible to use a XY stage 123 that can be driven in the X direction or XY for the base 120 to fix the work and obtain a minute displacement movement.
[0022]
FIG. 11 shows a block diagram of the position control system of the linear motor of the present invention. In FIG. 11, the linear motor means a combination of the armature 3 and the secondary side member 6 which are the driving device of the present invention. Similarly, the magnetic pole detecting device means the magnetic pole position detecting device 101 arranged between the phases of the armature 3 shown in FIG.
[0023]
The magnetic pole position obtained from the magnetic pole position detection device 101 is fed back to the current controller 203 and controlled while maintaining a predetermined load angle so as not to be out of synchronization with load fluctuations. Regarding the relative position displacement between the armature 3 and the secondary side 6 with respect to the traveling direction, information obtained from the position detector (linear scale) 206 is processed as a speed signal and a position signal, and speed control is performed. Is fed back to the device 202 and the position controller 201, respectively. A current value to be controlled by the current controller 203 is calculated from the signals and current values of the speed controller 202 and the position controller 201, and the output of the power amplifier circuit 204 is controlled so as to be the current value.
[0024]
FIG. 7 is an overall view of another embodiment of the XY table using the driving device of the present invention. In this embodiment, an embodiment in which a plurality of armatures 3Y (two in FIG. 7) of the Y-direction drive device are used is shown. By using the secondary member 6 in common for the two electromagnetic elements 3Y of the Y-direction drive device, a compact structure can be achieved.
[0025]
FIG. 8 is an overall view of another embodiment of the XYZ table using the driving device of the present invention. In FIG. 8, the armature 3Y of the Y-direction drive device is provided with the armature 3Z of the Z-axis direction drive device, and the secondary side 6 member moves up and down. Of course, in the Z-axis direction drive device, it is also possible to fix the secondary side member 6 so that the armature 3Z moves up and down relatively.
[0026]
FIG. 9 is an overall view of another embodiment of the XY table using the driving apparatus of the present invention. FIG. 9 shows an embodiment in which a plurality of sets (two sets in FIG. 9) of the gantry (moving hoist gantry) 124 shown in FIG.
[0027]
FIG. 10 is another overall view of an XY table using the driving apparatus of the present invention. In FIG. 10, a uniaxial basic unit is fixed to the base 120, and a linear guide mechanism 121 (linear bearing) and the secondary member 6 are fixed to the base 120 in parallel so that the armature 3 can be driven freely. . The Y-direction drive device is fixed to the armature 3X of the X-axis direction drive device.
[0028]
The arrangement of the magnetic pole position detection device of the present invention is not limited to the configuration of the drive device as described above, and can be applied to any drive device having a plurality of armatures and having an interval between the armatures. . In addition, the configuration of the driving device as in the above embodiment is particularly effective when applied to an XY table used in an apparatus for manufacturing an electronic device such as a semiconductor that is strongly demanded to be compact.
[0029]
【The invention's effect】
According to the present invention, the magnetic pole position detection device can be made compact in the drive device and the XY table.
[Brief description of the drawings]
FIG. 1 is an overall view of an embodiment of the present invention.
FIG. 2 is a structural diagram of a driving device used in an embodiment of the present invention.
FIG. 3 is a structural diagram (No. 1) in which a magnetic pole position detection device of the present invention is arranged.
FIG. 4 is a structural diagram (part 2) in which the magnetic pole position detection device of the present invention is arranged.
FIG. 5 is an arrangement structure diagram of a magnetic pole position detection device of a driving device of a comparative example.
FIG. 6 is an overall view of an embodiment of an XY table using the driving device of the present invention.
FIG. 7 is an overall view (No. 1) of an embodiment of an XY table using the driving device of the present invention.
FIG. 8 is an overall view of an embodiment of an XYZ table using the driving device of the present invention (part 2).
FIG. 9 is an overall view of an embodiment of an XYZ table using the driving apparatus of the present invention (No. 3).
FIG. 10 is an overall view (No. 4) of an embodiment of an XYZ table using the driving apparatus of the present invention.
FIG. 11 is a block diagram of a position control system using the driving apparatus according to the embodiment of the present invention.
[Explanation of symbols]
3 ... Armature, 3X ... X-axis armature, 3Y ... Y-axis armature, 4 ... Coil, 6 ... Secondary member, 11a ... Upper magnetic pole tooth of magnetic pole 1, 12b ... Lower magnetic pole tooth of magnetic pole 1, 21b ... Lower magnetic pole teeth of magnetic pole 2, 22a ... Upper magnetic pole teeth of magnetic pole 2, 34 ... Permanent magnet, 51 ... Core having a first opposing portion, 52 ... Core having a second opposing portion, 100 ... Interphase spacer, 101 ... Magnetic pole position detection device, 120 ... base, 121 ... linear guide mechanism.

Claims (1)

The upper magnetic pole teeth and the lower magnetic pole teeth have a first opposed portion facing each other, the first core having a magnetic body, the upper magnetic pole teeth and the lower magnetic pole teeth have a second opposed portion opposed to each other, and magnetic A second core having a body, wherein the first core and the second core are arranged alternately, and the magnetic poles of the first facing portion and the second facing portion are opposed to each other. A plurality of armature units;
An armature in which the plurality of armature units are arranged side by side for multiple phases;
A secondary member having a permanent magnet is disposed between the first facing portion and the second facing portion;
Above the secondary member, upper magnetic pole teeth arranged on the first core and upper magnetic pole teeth arranged on the second core are alternately arranged,
Below the secondary member, lower magnetic pole teeth arranged on the first core and lower magnetic pole teeth arranged on the second core are alternately arranged,
A coil is wound in common on the first core and the second core,
An XY table using as a drive source a drive device in which a spacer is disposed between the multiphase armatures and a position detection device is disposed at a location facing the coil across the secondary member in the spacer.

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