JP2010239724A - Drive, xy stage, and xyz stage - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a compact and light-weight drive, and to provide an XY or XYZ stage having improved accuracy and high responses by use of the compact and light-weight drives. <P>SOLUTION: Magnetic pole teeth disposed across a gap at both sides of a permanent magnet, a core for connecting the magnetic pole teeth, an armature including armature winding wound around each of the plurality of magnetic pole teeth, and an array of permanent magnets disposed to alternate the magnetic poles, thereby configuring a stage using the compact and light-weight drive. By changing the number of magnetic poles in the armature according to thrust patterns required for the drive, the compact and light-weight drive can be configured. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a drive device using electromagnetic force, an XY stage and an XYZ stage used in a semiconductor manufacturing apparatus or industrial machine using the drive device as a drive source.

  A conventional stage uses a cylindrical actuator or a driving device in which magnetic pole teeth are alternately arranged as a driving source. [Patent Document 1] describes a table configured by alternately combining magnetic pole teeth with the same winding. [Patent Document 2] also describes a table using a driving device having a first facing portion and a second facing portion having different polarities.

JP 2002-142438 A JP 2005-51869 A

  Since the conventional XYZ stage driving device has a large amount of leakage magnetic flux, it becomes large and heavy. For this reason, there is a problem in that deformation due to its own weight occurs due to the heavy weight of the drive device, and the accuracy is reduced and the installation location is restricted.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a small and light driving device, and to provide an XY stage or an XYZ stage with improved accuracy and high response by the small and light driving device.

  One feature of the present invention is that an electric machine having magnetic pole teeth arranged on both sides of a permanent magnet via a gap, an iron core connecting these magnetic pole teeth, and an armature winding wound around the magnetic pole teeth. It is a stage constituted by a small and light drive device by comprising a permanent magnet array in which a child and magnetic poles are alternately arranged.

  Furthermore, by changing the number of magnetic poles of the armature according to the thrust pattern required for the drive device, the drive device can be configured to be small and lightweight.

  According to the present invention, since a small and lightweight drive device can be configured, the weight of the drive unit can be reduced, and a highly accurate and highly responsive XY stage or XYZ stage can be provided.

The perspective view of the armature unit which comprises the drive device by Example 1 of this invention. Sectional drawing of the armature unit of FIG. Sectional drawing of the armature unit of FIG. The example of the drive device of this invention. 2 is a configuration example of an XY stage according to the present invention. The structural example of the XYZ stage of this invention. The block diagram of the Z-axis drive system by this invention. 4 shows another embodiment of the driving device of the present invention. 4 shows another embodiment of the driving device of the present invention. 4 shows another embodiment of the driving device of the present invention. 4 shows another embodiment of the driving device of the present invention. 4 shows another embodiment of the driving device of the present invention. The block diagram of the control system of the drive device of this invention. The block diagram of the other control system of the drive device of this invention. The block diagram of the other control system of the drive device of this invention. 4 shows another embodiment of the driving device of the present invention. The structural example of the XYZ stage of this invention. The other example of a structure of the XYZ stage of this invention.

  Embodiments of the present invention will be described below with reference to the drawings.

  FIG. 1 is a perspective view of an armature unit constituting the drive device according to the first embodiment of the present invention. The armature unit 10 is composed of a magnet row 12 including a row of stators 3 and permanent magnets 4 composed of one phase winding 1 and a plurality of magnetic poles 2. FIG. 2 is a cross-sectional view of the armature unit 10 of the drive device according to the first embodiment of the present invention cut along a plane perpendicular to the traveling direction of the magnet row 12. As shown in FIG. 2, the magnetic pole 2 is composed of an upper magnetic pole tooth 6 and a lower magnetic pole tooth 7 arranged so as to face the magnet 4 and an iron core 8 connecting them. The winding 1 is wound around the upper and lower magnetic pole teeth 6, 7 of the plurality of magnetic poles 2. The winding 1 can be wound around other portions of the magnetic pole 2, and the upper and lower magnetic pole teeth 6, 7 and the iron core 8 can be integrally formed.

  The magnet row 12 shown in FIG. 1 includes magnets 4 arranged so that the magnetic poles of adjacent magnets are reversed. The stator 3 is normally fixed to a structure or the like, and the magnet row 12 including the magnets 4 moves relative to the stator 3. A configuration in which the magnet array 12 is fixed and the magnetic pole 2 side is moved is also possible.

  FIG. 3 is a cross-sectional view of the armature unit 10 constituting the drive device according to the first embodiment of the present invention cut along a plane parallel to the traveling direction of the magnet row 12. When the pitch of the magnets is P, the magnetic poles 2 are arranged at intervals of about 2 nP in the traveling direction of the magnet row 12. Here, n is n = 1, 2, 3,. Although the pitch of the magnetic poles 2 constituting the armature unit is approximately 2 nP, the pulsation of thrust can be reduced by adjusting the pitch.

  FIG. 4 shows an example of a driving device that uses three armature units 10 each having four magnetic poles 2 shown in FIG. When the pitch of the magnets 4 in the traveling direction of the magnet row 12 is P, the drive unit can be configured by arranging the armature units 10 with a phase difference of 2P / M (M is the number of phases of the drive unit). By setting the pitch between the armature units 10 to kP + (2P / M) (k = 1, 2, 3,...), The armature unit 10 can be driven with M-phase alternating current. The M-phase driving device can be configured by the M armature units 10. In FIG. 4, the number of the magnetic poles 2 of the armature unit 10 is four, but is not limited thereto.

  FIG. 5 shows an example in which an XY stage is configured by the driving device 11 shown in FIG. A magnet row fixing base 13 is attached to the base 14. The X-axis magnet row 121 is held by the magnet row fixing base 13, and the X-axis drive device 111 is arranged so as to maintain a constant interval with respect to the X-axis magnet row 121. The driving in the X-axis direction is driven by two X-axis driving devices 111 installed in parallel with the X direction. A Y-axis magnet row 122 is fixed to a magnet row fixing base 131 installed in the X-axis drive device 111. The Y-axis driving device 112 moves relative to the magnet array, and can operate as an XY-axis stage. By configuring the X-axis and Y-axis drive devices with the drive device of the present invention, the weights of the X-axis and Y-axis magnet arrays 121 and 122 can be reduced, and the entire device becomes lighter. In addition, the X-axis and Y-axis drive devices are lighter, and the system response is improved and the load is reduced.

  FIG. 6 shows the configuration of the second embodiment of the present invention. A Z-axis base 141 is mounted on an XY stage in which the X-axis and the Y-axis are configured by the driving device shown in FIG. 4, and a Z-axis driving device 113 and a Z-axis magnet row 123 are provided. Further, the Z-axis drive device 113 can be directly fixed to the Y-axis drive device 112 or the like without installing the Z-axis base 141 or the like. In this embodiment, since the Z-axis drive device can be configured to be light, a relative position change between the axes occurs due to deformation caused by the self-weight of the Z-axis that is conventionally generated when the XY-axis is driven. However, by reducing the weight of the drive unit, the relative position between the axes is stabilized, and the position accuracy is improved. Furthermore, since the weight of the entire stage can be reduced, the responsiveness of the stage is improved by reducing the load.

  FIG. 7 shows Embodiment 3 of the present invention. FIG. 7 shows a configuration diagram of a Z-axis drive system according to the present invention. The drive device 11 is attached to the Z-axis base 141. In the configuration of the present invention, it is possible to manufacture the Z-axis magnet row 123 in a light weight by reducing the leakage magnetic flux. The Z-axis direction is a direction in which gravity works, and the weight of the Z-axis magnet row 123 is always generated as a load. Therefore, it is necessary to supply power to the drive device 11 to support the weight of the Z-axis magnet row. . In the present invention, since the lightweight Z-axis magnet array 123 can be configured, the electric power for supporting its own weight may be small. In addition, when the magnet row is about to fall due to its own weight, the Z-axis magnet row 123 generates a force in a direction that prevents the fall due to the attractive force of the magnet 4, thereby preventing the magnet row from falling. Furthermore, since the Z-axis magnet row 123 is lightweight, it is possible to improve responsiveness and position accuracy when positioning the magnet row 123. At the same time, the overall weight of the Z-axis drive system is light and can be configured to be small, so that it is difficult to be restricted by the mounting space and the mounting workability is improved.

  FIG. 8 shows an example of the fourth embodiment of the present invention. FIG. 8 shows an example in which a driving device is configured by three armature units. In the drive device of the present invention, it is shown that a small and light drive device can be configured by changing the number of magnetic poles of the armature unit according to a required thrust pattern. FIG. 8 shows an example in which the driving device is configured with two armature units 103 having four magnetic poles and one armature unit 102 having two magnetic poles. For example, when the required thrust differs depending on the position of the magnet row 12, a small and light driving device can be configured by changing the number of magnetic poles of the armature unit.

  FIG. 9 shows an example in which a driving device is configured by an armature unit 103 having four magnetic poles, an armature unit 101 having three magnets, and an armature unit 102 having two magnets. FIG. 10 shows an example in which a drive device is configured with two armature units 103 having four magnetic poles and two armature units 102 having two magnetic poles. The interval between the armature units can be changed according to the required thrust pattern. For example, when driving M armature units with M-phase AC, the pitch between the armature units may be kP + (2P / M) (k = 1, 2, 3,...). Is possible. It is also possible to adjust the arrangement interval of the armature units according to the required thrust pattern.

  FIG. 11 shows a fifth embodiment of the present invention. FIG. 11 shows an embodiment in which the number of windings or the cross-sectional area of the wires arranged in the armature unit 10 of the driving device shown in FIG. 4 is changed for each armature unit.

  FIG. 11 shows an example in which the driving device 11 is constituted by three armature units 10. Each armature unit is composed of four magnetic poles, but is not limited thereto, and the number of magnetic poles may be different for each armature unit. Furthermore, a thrust corresponding to a necessary thrust pattern can be generated by changing the number of turns of the winding 301, the winding 302, and the winding 303 installed in the armature unit.

  For example, an armature unit that requires a large thrust can be realized by increasing the number of turns. Furthermore, if there is an armature unit for which heat generation is desired to be reduced, this can be achieved by increasing the cross-sectional area of the winding of the armature unit. Further, in the driving apparatus shown in FIG. 11, when it is desired to reduce the heat generation only in the central portion, the winding cross-sectional area of the armature unit in the central portion is increased, and the windings of the armature units at both ends are the windings in the central portion. It is possible to control the heat generation part by making it small with respect to the cross-sectional area. In this way, a small and lightweight drive device can be configured by changing the number of windings and the cross-sectional area of the armature unit in consideration of the thrust pattern and heat generation. In addition, by changing the number of windings and the cross-sectional area, the inductance, resistance, and the like of each armature unit change, and it becomes possible to control responsiveness for each armature unit.

  FIG. 12 shows a sixth embodiment of the present invention. The drive device 11 of FIG. 12 shows the drive device shown in FIG. 4 and discloses these control systems. In this drive device, a linear scale 205 for detecting a relative position between the stator and the magnet array is disposed. The linear scale 205 can be installed anywhere as long as the relative position between the stator and the magnet array can be detected. The position information obtained from the linear scale is fed back to the current controller 203 as magnetic pole position (phase) information, and is controlled so as to maintain a predetermined phase difference between the magnetic flux of the magnet array and the magnetic flux generated by the stator. The information of the linear scale 205 is fed back to the position controller 201 and the speed controller 202 as position information and speed information, and the current flowing through the windings of the armature unit of the drive device is calculated from these values by the current controller. Looking for. The output of the power amplifier 204 is adjusted so that the current value is obtained. Information on the current value of the output of the power amplifier 204 is fed back to the current controller and controlled so that the thrust of the driving device becomes a predetermined value.

  By constructing a control system and a control loop as shown in FIG. 12 in the drive device of the present invention, a highly responsive and accurate drive system can be constructed with a light magnet array and a drive device capable of generating a large thrust. .

  FIG. 13 shows a seventh embodiment of the present invention. FIG. 13 is a block diagram of a control system in the case where the drive device is configured by three armature units. The three armature units 10 have the same number of magnetic poles. A linear scale 205 is attached to the magnet array 12 arranged in common in the three armature units. Based on the signal, information on the magnetic pole position, speed, and position between the magnet array and the armature unit is fed back to the phase current command 206, the speed controller 202, and the position controller 201. In the phase current command 206, the value of current flowing through each armature unit 10 is calculated. In accordance with the command, the current controller 203 adjusts the current, and power is supplied by the power amplifier 204. The configuration of the present invention is characterized in that each armature unit 10 has an independent current control system. By doing so, it is possible to control the unbalance in manufacturing the armature unit by the current value. In addition, the influence of other disturbances can be reduced. FIG. 14 shows a control block diagram in the case where the number of magnetic poles of the armature unit constituting is different. The controllability is improved because the unbalance of armature units with different number of magnetic poles arranged according to the required thrust pattern can be individually controlled. Further, by controlling the current values individually, it is possible to control detents and thrust pulsations for each armature unit. FIG. 14 shows, as an example, a block diagram when the number of magnetic poles of the armature unit 10 is configured as 4 poles, 3 poles and 2 poles, respectively.

FIG. 15 shows an eighth embodiment of the present invention. FIG. 15 shows a control system that feeds back the magnetic pole position, velocity, and position from a linear scale signal that detects the relative positional relationship between the magnet array 12 and the armature unit 10 that are arranged in common in the three armature units 10. It is configured. When the three armature units 10 configured are U-phase, V-phase, and W-phase, the current command values iu ^* , iv ^* , and iw ^{* for} each phase are based on the position information of the linear scale 205. It is calculated by the value calculation 207 and the phase current command 206. In the current value calculation 207, the current command value i ^* is obtained from the relationship between the current and the thrust at the position of each magnet row. Based on the current command value i ^* , the current is distributed to each phase. In accordance with the phase current command values iu ^* , iv ^* , iw ^* , current control of each armature unit is performed. For example, control is possible even when the thrust with respect to the unit current is reduced due to magnetic saturation of the magnetic pole, and the controllable range is expanded and controllability is improved. In addition, it is possible to correct disturbances generated in the armature unit individually and to perform precise control.

For example, even when the windings, the number of magnetic poles, and the like of the armature unit 10 are changed for each armature unit, the thrust is controlled by changing the current command i ^* with respect to the thrust command f ^{* according} to the position of the magnet row 12. When determining the current command i ^* from the thrust instruction f ^*, it is possible to suppress the imbalance or disturbance of the armature unit by calculating using the position information of the magnet array.

  FIG. 16 shows Embodiment 9 of the present invention.

  FIG. 16 (a) shows a driving device including an armature unit 1 having four poles, an armature unit 2, and an armature unit 3 having two poles.

  Each armature unit is arranged so that the phase difference is 120 ° when the magnet pitch is 180 °. In this embodiment, the magnet pitch P is 12 mm.

  FIG. 16B shows the thrust characteristics of this drive device.

  The graph of FIG. 16B shows that the thrust of the drive device changes depending on the position of the magnet row. A graph 405 indicates the necessary thrust required for the driving device, and graphs 401, 402, and 403 indicate the thrusts of the armature units 1 to 3, respectively. And the graph 404 has shown the total thrust of the armature units 1-3.

  As shown in this graph, the maximum value of the armature unit 1 thrust 401 and the maximum value of the armature unit 2 thrust 402 are 400N, whereas the maximum value of the armature unit 3 thrust 403 is 200N. For example, when the magnet row position is in the range of 0 to 6 mm, the required thrust is 500 N, and when the magnet position is 6 mm to 10 mm, a thrust of 650 N is required. When the required thrust 405 is provided, the size and weight can be reduced by reducing the number of poles of the armature unit 3 in a small thrust range.

  Further, in FIG. 16B, when reciprocating at a position of 9 mm from the magnet row position 7, the armature unit 1 thrust 401 and the armature unit 2 thrust 402 are large, and the thrust of the armature unit 3 is Nearly zero. In such a case, the number of poles of the armature unit can be further reduced, or the drive device can be configured by the armature unit 1 and the armature unit 2. In this way, a small and light driving device can be provided by changing the number of magnetic poles, windings and position of the armature unit in accordance with the required thrust pattern.

  FIG. 17 shows an example of an XYZ stage according to the present invention. The XY stage is constituted by a total of four drive devices, two X-axis drive devices 111 and two Y-axis drive devices 112, a Z-axis base 141 is installed outside the stage, and the Z-axis drive device 113 is placed on the Z-axis base 141. Is an example in which

  FIG. 18 shows an example of an XYZ stage according to the present invention. It is possible to arrange the magnet rows horizontally or combine them depending on the layout of the stage and restrictions on the arrangement of the magnet rows.

  In the above-described embodiment of the present invention, an example in which the number of armature units, the number of magnetic poles of the armature unit, the number of turns of the winding and the cross-sectional area is changed is shown. It is not limited to that.

1, 301, 302, 303 Winding 2 Magnetic pole 3 Stator 4 Magnet 6 Upper magnetic pole tooth 7 Lower magnetic pole tooth 8 Iron core 10 Armature unit 11 Driving device 12 Magnet row 13, 131 Magnet row fixing base 14 Base 15 Rail 16 Stage 101 Armature unit (3 poles)
102 Armature unit (2 poles)
103 Armature unit (4 poles)
111 X-axis drive device 112 Y-axis drive device 113 Z-axis drive device 121 X-axis magnet row 122 Y-axis magnet row 123 Z-axis magnet row 141 Z-axis base 151 Rail base 201 Position controller 202 Speed controller 203 Current controller 204 Power amplifier 205 Linear scale 206 Phase current command 207 Current value calculation

Claims (12)

In the drive device in which the armature unit composed of the magnetic pole and the winding and the magnet array having the permanent magnet are relatively movable,
The magnetic pole has magnetic pole teeth disposed opposite to each other with a gap on both sides of the permanent magnet,
And it has an iron core that connects the pole teeth arranged opposite to each other through a gap,
An XY stage comprising a driving device having a plurality of the magnetic poles, wherein the plurality of magnetic poles have the same polarity. In the drive device in which the armature unit composed of the magnetic pole and the winding and the magnet array having the permanent magnet are relatively movable,
The magnetic pole has magnetic pole teeth disposed opposite to each other with a gap on both sides of the permanent magnet,
And it has an iron core that connects the pole teeth arranged opposite to each other through a gap,
An XYZ stage comprising a driving device having a plurality of the magnetic poles, wherein the plurality of magnetic poles have the same polarity. In the drive device in which the armature unit composed of the magnetic pole and the winding and the magnet array having the permanent magnet are relatively movable,
The magnetic pole has magnetic pole teeth disposed opposite to each other with a gap on both sides of the permanent magnet,
And it has an iron core that connects the pole teeth arranged opposite to each other through a gap,
A drive device for Z-axis, comprising: a drive device having a plurality of the magnetic poles, wherein the plurality of magnetic poles have the same polarity. In the drive device in which the armature unit composed of the magnetic pole and the winding and the magnet array having the permanent magnet are relatively movable,
The magnetic pole has magnetic pole teeth disposed opposite to each other with a gap on both sides of the permanent magnet,
And it has an iron core that connects the pole teeth arranged opposite to each other through a gap,
And a plurality of armature units having a plurality of the magnetic poles, the plurality of magnetic poles having the same polarity,
A drive device characterized in that the number of magnetic poles constituting the plurality of armature units is different for each armature unit. In the drive device in which the armature unit composed of the magnetic pole and the winding and the magnet array having the permanent magnet are relatively movable,
The magnetic pole has magnetic pole teeth disposed opposite to each other with a gap on both sides of the permanent magnet,
And it has an iron core that connects the pole teeth arranged opposite to each other through a gap,
And a plurality of armature units having a plurality of the magnetic poles, the plurality of magnetic poles having the same polarity,
A driving device characterized in that the number of windings constituting the plurality of armature units and / or the winding cross-sectional area of the windings differ for each armature unit. In the drive device in which the armature unit composed of the magnetic pole and the winding and the magnet array having the permanent magnet are relatively movable,
The magnetic pole has magnetic pole teeth disposed opposite to each other with a gap on both sides of the permanent magnet,
And it has an iron core that connects the pole teeth arranged opposite to each other through a gap,
And a plurality of armature units having a plurality of the magnetic poles, the plurality of magnetic poles having the same polarity,
A drive device comprising a closed loop control system comprising a sensor that detects a relative position between a magnet array and an armature unit, a control unit that feeds back a signal thereof, and a power drive unit that supplies electric power. In the drive device in which the armature unit composed of the magnetic pole and the winding and the magnet array having the permanent magnet are relatively movable,
The magnetic pole has magnetic pole teeth disposed opposite to each other with a gap on both sides of the permanent magnet,
And it has an iron core that connects the pole teeth arranged opposite to each other through a gap,
And a plurality of armature units having a plurality of the magnetic poles, the plurality of magnetic poles having the same polarity,
A closed loop control system comprising a sensor that detects the relative position of the magnet array and the armature unit, a control unit that feeds back the signal, and a power drive unit that supplies power,
A driving apparatus comprising a plurality of the power drive units for the plurality of armature units. In the drive device in which the armature unit composed of the magnetic pole and the winding and the magnet array having the permanent magnet are relatively movable,
The magnetic pole has magnetic pole teeth disposed opposite to each other with a gap on both sides of the permanent magnet,
And it has an iron core that connects the pole teeth arranged opposite to each other through a gap,
And a plurality of armature units having a plurality of the magnetic poles, the plurality of magnetic poles having the same polarity,
A closed loop control system comprising a sensor that detects the relative position of the magnet array and the armature unit, a control unit that feeds back the signal, and a power drive unit that supplies power,
A drive apparatus comprising a control system that performs control in accordance with characteristics of current and thrust of a plurality of armature units applied to the plurality of armature units. In the drive device in which the armature unit composed of the magnetic pole and the winding and the magnet array having the permanent magnet are relatively movable,
The magnetic pole has magnetic pole teeth disposed opposite to each other with a gap on both sides of the permanent magnet,
And it has an iron core that connects the pole teeth arranged opposite to each other through a gap,
And a plurality of armature units having a plurality of the magnetic poles, the plurality of magnetic poles having the same polarity,
A closed loop control system comprising a sensor that detects the relative position of the magnet array and the armature unit, a control unit that feeds back the signal, and a power drive unit that supplies power,
A drive apparatus comprising a control system for calculating a current command using position information of a magnet array for a thrust command given to the plurality of armature units.   An XY stage comprising the drive device according to claim 4.   An XYZ stage comprising the drive device according to claim 4.   A Z-axis drive device comprising the drive device according to claim 4.

Images