JP3920897B2

JP3920897B2 - Developing apparatus and developing method

Info

Publication number: JP3920897B2
Application number: JP2005214805A
Authority: JP
Inventors: 太郎山本; 昭浩藤本; 孝介吉原; 秀治京田; 博史竹口
Original assignee: Tokyo Electron Ltd
Current assignee: Tokyo Electron Ltd
Priority date: 2005-07-25
Filing date: 2005-07-25
Publication date: 2007-05-30
Anticipated expiration: 2021-10-19
Also published as: JP2005328083A

Description

本発明は、レジストが塗布され、露光処理が施された基板の表面に現像液を供給して現像処理を行う現像装置及び現像方法に関する。 The present invention relates to a developing apparatus and a developing method for performing a developing process by supplying a developing solution to a surface of a substrate coated with a resist and subjected to an exposure process.

従来、半導体製造工程の一つであるフォトレジスト工程においては、例えば半導体ウェハ（以下ウェハＷという）表面に形成された薄膜状にレジストを塗布し、レジストを所定のパターンで露光し、現像してマスクパターンを形成している。このような処理は、一般にレジストの塗布・現像を行う塗布・現像装置に、露光装置を接続したシステムを用いて行われる。 Conventionally, in a photoresist process which is one of semiconductor manufacturing processes, for example, a resist is applied to a thin film formed on the surface of a semiconductor wafer (hereinafter referred to as wafer W), and the resist is exposed in a predetermined pattern and developed. A mask pattern is formed. Such processing is generally performed using a system in which an exposure apparatus is connected to a coating / developing apparatus that performs resist coating / development.

露光後のウェハＷに対して、現像処理を行う手法の一つとして、図１４に示すようにウェハＷの直径に見合う長さに亘って吐出口が形成されたノズル１を用い、このノズル１を、例えばスピンチャック１１に水平に保持されたウェハＷの表面に対して、例えば１ｍｍ程度浮かせた状態でウェハＷの後端側から前端側に移動させながら、ノズル１の吐出口からウェハＷ表面に現像液１２を液盛し、ウェハＷ表面全体に現像液１２の、例えば１ｍｍ程度の液膜を形成する方法が実施、検討されている。 As one method for developing the exposed wafer W, as shown in FIG. 14, a nozzle 1 in which an ejection port is formed over a length corresponding to the diameter of the wafer W is used. Is moved from the rear end side of the wafer W to the front end side in a state of being lifted, for example, by about 1 mm with respect to the surface of the wafer W held horizontally by the spin chuck 11, for example, from the discharge port of the nozzle 1 to the surface of the wafer W. A method of forming a liquid film of, for example, about 1 mm of the developing solution 12 on the entire surface of the wafer W is being implemented and studied.

しかしながら、上述した手法では以下の様な課題がある。即ち、円形状であるウェハＷにおいては、前記ノズル１が現像液１２を吐出しながら、ウェハＷの直径部を越えて前端に向かって移動する際、ノズル１の長さに対してウェハＷの有効領域の長さが順次短くなることが問題となる。この場合ウェハＷの周縁部のある部位で見ると、ノズル１の吐出圧が現像液Ｄの自重程度と小さいことから、ノズル１が移動してその部位から離れて行くときに、ウェハＷの周縁部から離れた吐出口より吐出された現像液１２が直ぐに落下せずに、既にウェハＷ表面に盛られた現像液１２と表面張力で繋がったまま引張られた状態なる。更にノズル１が前端に向かうにつれて、前記現像液１２は表面張力で繋がった状態を維持できなくなり、ウェハＷ表面上に塗布される部位と、塗布されない部位との間で液切れが起こる。つまりウェハＷ表面と対向しないノズル１の吐出口とウェハＷ周縁部との間で液が切れながらノズル１は移動する。この液切れしたときの液の寄り戻し（引き戻し）の力により、ウェハＷ表面に液盛された現像液１２に、例えば周縁部から内側方向に向かう流れが生じる。特にウェハＷの前端においては、ノズル１がウェハＷ表面から離れるときの液の寄り戻しによる力は大きく、液盛された現像液１２に波立ちが起こる場合がある。また本発明者らは、その結果として現像後に得られるマスクパターンに線幅精度の均一性が低下することを把握している。 However, the method described above has the following problems. That is, in the wafer W having a circular shape, when the nozzle 1 moves toward the front end beyond the diameter portion of the wafer W while discharging the developer 12, There is a problem that the length of the effective area is sequentially shortened. In this case, since the discharge pressure of the nozzle 1 is as small as the weight of the developing solution D when viewed at a part of the peripheral part of the wafer W, the peripheral part of the wafer W is moved when the nozzle 1 moves away from the part. The developer 12 discharged from the discharge port away from the part does not fall immediately but is pulled while being connected to the developer 12 already deposited on the surface of the wafer W by surface tension. Further, as the nozzle 1 moves toward the front end, the developer 12 cannot maintain the state connected by the surface tension, and the liquid runs out between the portion applied on the surface of the wafer W and the portion not applied. That is, the nozzle 1 moves while the liquid is cut between the discharge port of the nozzle 1 not facing the wafer W surface and the peripheral edge of the wafer W. Due to the force of returning (retracting) the liquid when the liquid runs out, for example, a flow from the peripheral edge portion toward the inner side is generated in the developer 12 that is liquid-filled on the surface of the wafer W. In particular, at the front end of the wafer W, the force due to the liquid returning when the nozzle 1 moves away from the surface of the wafer W is large, and the liquid developer 12 may be rippled. In addition, the present inventors have grasped that as a result, the uniformity of line width accuracy is reduced in the mask pattern obtained after development.

上述の問題を解決するために、図１５に示すようにウェハＷ周縁部での液切れをスムーズにするナイフリング１３をウェハＷの周縁に設ける手法があるが、ノズル１から吐出する現像液１２は吐出圧がほぼ自重程度に小さいので、ナイフリング１３の液切り面においても液の表面張力が作用してスムーズな液切りが行われない場合が懸念される。 In order to solve the above-described problem, there is a method of providing a knife ring 13 on the periphery of the wafer W to smoothly drain the liquid at the periphery of the wafer W as shown in FIG. Since the discharge pressure is almost as low as its own weight, there is a concern that the surface tension of the liquid acts on the liquid cutting surface of the knife ring 13 and smooth liquid cutting is not performed.

本発明はこのような事情に基づきなされたものであり、その目的はレジストが塗布されて、露光処理が施された基板を現像処理する場合において、基板表面に液盛された現像液に流れおよび波立ちを形成しないで、基板の表面に現像液を塗布することができ、これにより線幅の均一性の高いマスクパターンを得ることのできる技術を提供することにある。 The present invention has been made based on such circumstances. The object of the present invention is to develop a substrate coated with a resist and subjected to an exposure process, and to flow into a developer accumulated on the surface of the substrate. It is an object of the present invention to provide a technique capable of applying a developing solution to the surface of a substrate without forming undulations, and thereby obtaining a mask pattern with high uniformity of line width.

本発明の現像装置は、表面にレジストが塗布されて、露光処理がされた基板を現像する現像装置において、
前記基板を水平に保持する基板保持部と、
基板の有効領域の幅とほぼ同じかそれ以上の長さに亘って吐出口が形成され、前記基板に現像液を供給するための供給ノズルと、
この供給ノズルを基板の後端側から前端側に亘って移動させる移動機構と、
基板上の現像液の液流を抑制するために基板表面に沿って気流を形成するための気流形成手段と、を備えたことを特徴とする。前記気流形成手段は、基板の周縁に沿って通気孔が配列されると共に昇降自在に設けられた構成である。また前記通気孔は、前記基板の後端側の周縁に沿って設けられていることが好ましい。 The developing device of the present invention is a developing device for developing a substrate having a resist coated on the surface and subjected to exposure processing.
A substrate holding part for horizontally holding the substrate;
A discharge nozzle is formed over a length substantially equal to or longer than the width of the effective area of the substrate, and a supply nozzle for supplying a developer to the substrate;
A moving mechanism for moving the supply nozzle from the rear end side to the front end side of the substrate;
An airflow forming means for forming an airflow along the surface of the substrate in order to suppress the flow of the developer on the substrate. The airflow forming means has a structure in which air holes are arranged along the peripheral edge of the substrate and can be moved up and down. Moreover, it is preferable that the said vent hole is provided along the periphery of the rear-end side of the said board | substrate.

また本発明の他の現像装置は、表面にレジストが塗布されて、露光処理がされた基板を現像する現像装置において、
前記基板を水平に保持する基板保持部と、
基板の有効領域の幅とほぼ同じかそれ以上の長さに亘って吐出口が形成され、前記基板に現像液を供給するための供給ノズルと、
この供給ノズルを基板の後端側から前端側に亘って移動させる移動機構と、
供給ノズルに沿った基板の直径部から、前端部の周縁部に沿って設けられた複数の通気口と、
前記通気口の各々に接続された開閉自在のバルブと、を備え、
前記供給ノズルが前記通気口を通過したときに順次前記バルブを開いて前記通気口から上方に向けて気体を流すことを特徴とする。前記通気口は、例えば円弧状に形成されていることが好ましい。 According to another aspect of the present invention, there is provided a developing device for developing a substrate having a resist coated on the surface and subjected to exposure processing.
A substrate holding part for horizontally holding the substrate;
A discharge nozzle is formed over a length substantially equal to or longer than the width of the effective area of the substrate, and a supply nozzle for supplying a developer to the substrate;
A moving mechanism for moving the supply nozzle from the rear end side to the front end side of the substrate;
A plurality of vent holes provided along the peripheral edge portion of the front end portion from the diameter portion of the substrate along the supply nozzle;
An openable / closable valve connected to each of the vents,
When the supply nozzle passes through the vent, the valve is sequentially opened to allow gas to flow upward from the vent. The vent is preferably formed in an arc shape, for example.

また本発明の現像方法は、基板表面にレジストが塗布されて、露光処理がされた基板を現像する現像方法において、
前記基板を水平に保持する工程と、
基板の有効領域の幅とほぼ同じかそれ以上の長さに亘って供給ノズルに形成された吐出口から現像液の供給を行いながら、当該供給ノズルを基板の後端側から前端側に亘って移動させる工程と、
基板上の現像液の液流を抑制するために基板表面に沿って気流を流す工程と、を備えたことを特徴とする。 Further, the development method of the present invention is a development method for developing a substrate that has been subjected to exposure processing by applying a resist to the substrate surface.
Holding the substrate horizontally;
While supplying the developer from the discharge port formed in the supply nozzle over a length substantially equal to or longer than the width of the effective area of the substrate, the supply nozzle is extended from the rear end side to the front end side of the substrate. A process of moving;
And a step of flowing an air flow along the surface of the substrate in order to suppress the flow of the developer on the substrate.

さらに本発明の他の現像方法は、基板表面にレジストが塗布されて露光処理がされた基板を現像する現像方法において、
前記基板を水平に保持する工程と、
基板の有効領域の幅とほぼ同じかそれ以上の長さに亘って供給ノズルに形成された吐出口から現像液の供給を行いながら、当該供給ノズルを基板の後端側から前端側に亘って移動させる工程と、
供給ノズルに沿った基板の直径部から前端部の周縁部に沿って設けられた複数の通気口を前記供給ノズルが通過したときに順次前記通気口から上方に向けて気体を流す工程と、を備えたことを特徴とする。 Furthermore, another development method of the present invention is a development method for developing a substrate that has been subjected to an exposure process by applying a resist to the substrate surface.
Holding the substrate horizontally;
While supplying the developer from the discharge port formed in the supply nozzle over a length substantially equal to or longer than the width of the effective area of the substrate, the supply nozzle is extended from the rear end side to the front end side of the substrate. A process of moving;
A step of flowing gas upward from the vents sequentially when the supply nozzles pass through a plurality of vents provided along the peripheral edge of the front end from the diameter part of the substrate along the supply nozzles. It is characterized by having.

以上のように本発明によれば、レジストが塗布されて、露光処理が施された基板を現像処理する際、基板表面にある現像液膜に流れおよび波立ちが形成されるのを抑えて、基板の表面に現像液を供給することができる。このため現像により得られるマスクパターンの線幅の均一性が向上する。 As described above, according to the present invention, when developing a substrate that has been coated with a resist and subjected to an exposure process, flow and undulations are prevented from being formed in the developer film on the substrate surface. The developer can be supplied to the surface of the film. For this reason, the uniformity of the line width of the mask pattern obtained by development is improved.

以下の説明において図１〜図９に関する説明は、その後に記載された本発明の実施の形態の説明を補助する参考例である。先ずこの参考例に関して述べる。図１〜３に示す現像装置の概略図を用いて説明する。この現像装置は、例えばウェハＷの裏面中心部を吸引吸着し、ウェハＷを水平に保持する基板保持部であるスピンチャック２を備え、このスピンチャック２は主軸が駆動部２１に接続されており、回転および昇降できる構成である。また現像処理の際、現像液および洗浄液のミストが周囲に飛び散るのを防ぐための四角形状の外カップ３１と円環状の内カップ３２が、ウェハＷを囲う処理空間を形成するように設けられている。この処理空間の底面は円形板３３および円形板３３の周縁に現像液および洗浄液を回収するため空間である液受部３４とで構成されており、現像液および洗浄液は液受部３４底面に設けられた排出口３５を介して装置外に排出される。また円形板３３の周縁部には上端がウェハＷの裏面に近接する断面山形のリング体３６が設けられている。更に外カップ３１は昇降機構４により昇降可能な構成であり、内カップ３２は外カップ３１に連動して昇降可能に構成される。 In the following description, the description regarding FIGS. 1 to 9 is a reference example for assisting the description of the embodiment of the present invention described later. First, this reference example will be described. This will be described with reference to schematic views of the developing device shown in FIGS. The developing device includes, for example, a spin chuck 2 that is a substrate holding unit that sucks and sucks the central portion of the back surface of the wafer W and holds the wafer W horizontally. The main axis of the spin chuck 2 is connected to the drive unit 21. It is the structure which can rotate and raise / lower. In addition, a rectangular outer cup 31 and an annular inner cup 32 are provided so as to form a processing space that surrounds the wafer W in order to prevent the mist of the developer and the cleaning solution from splashing around during the developing process. Yes. The bottom surface of the processing space is composed of a circular plate 33 and a liquid receiving portion 34 that is a space for collecting the developing solution and the cleaning solution at the periphery of the circular plate 33. The developing solution and the cleaning solution are provided on the bottom surface of the liquid receiving portion 34. It is discharged out of the apparatus through the discharged outlet 35. Further, a ring body 36 having a mountain-shaped cross section whose upper end is close to the back surface of the wafer W is provided at the peripheral edge of the circular plate 33. Further, the outer cup 31 can be lifted and lowered by the lifting mechanism 4, and the inner cup 32 is configured to be lifted and lowered in conjunction with the outer cup 31.

前記内カップ３２の上部にはスピンチャック２に保持されたウェハＷの外周縁を囲むように、例えばリング幅３０ｍｍ、厚さ１．５ｍｍのリング状の液受け板３７が設けられ、液受け板３７の内周縁はウェハＷの周囲に液受け板３７が位置したときにウェハＷの外周縁との間に、例えば０．５〜３ｍｍの隙間が形成されるように設定される。この液受け板３７の取り付け構造については、例えば内カップ３２の内縁に段部を形成すると共に、液受け板３７がこの段部に係合して内カップ３２に保持されるように構成し、液受け板３７を交換できるようにすることが望ましい。また液受け板３７は、例えば直径３ｍｍの通流孔３８が、例えば５ｍｍピッチで千鳥配列あるいは正則配列に穿設され、この液受け板３７の材質は、例えばＳＵＳ、セラミックスおよび樹脂から選択されるもので構成される。本発明は上述の通流孔３８の配列構成に限定されるものではなく、例えば同心円状にスリット形状の開口部を設けるか、あるいはメッシュ形状の部材で液受け板３７を構成しても良い。 A ring-shaped liquid receiving plate 37 having a ring width of 30 mm and a thickness of 1.5 mm, for example, is provided on the inner cup 32 so as to surround the outer peripheral edge of the wafer W held by the spin chuck 2. The inner peripheral edge of 37 is set such that a gap of, for example, 0.5 to 3 mm is formed between the outer periphery of the wafer W when the liquid receiving plate 37 is positioned around the wafer W. As for the mounting structure of the liquid receiving plate 37, for example, a step is formed on the inner edge of the inner cup 32, and the liquid receiving plate 37 is configured to be engaged with the step and held by the inner cup 32. It is desirable that the liquid receiving plate 37 can be replaced. The liquid receiving plate 37 has, for example, flow holes 38 having a diameter of 3 mm formed in a staggered arrangement or a regular arrangement at a pitch of 5 mm, for example, and the material of the liquid receiving plate 37 is selected from, for example, SUS, ceramics, and resin. Composed of things. The present invention is not limited to the arrangement configuration of the flow holes 38 described above. For example, concentric slit-shaped openings may be provided, or the liquid receiving plate 37 may be configured by a mesh-shaped member.

ウェハＷの表面に現像液を供給するための供給ノズル５１は、内部に現像液の流路を備えた細長い四角形状のノズル本体５２の下面長手方向に、ウェハＷの有効領域の幅とほぼ同じかそれ以上の長さの吐出口５３が設けられている。この吐出口５３は、例えばウェハＷの直径と同じ長さに多数の吐出孔が一列に配列された構成でも良く、あるいはウェハＷの直径と同じ長さのスリット形状の開口部を設けた構成としても良い。この供給ノズル５１はアーム部５４を介して第１の移動機構５５の移動部５６に接続されている。この第１の移動機構５５は、ガイドレール６に沿って水平移動し、供給ノズル５１がウエハＷの前端側から後端側に水平移動可能に構成され、更に第１の移動機構５５は、例えばボールネジ機構５７を備えており、供給ノズル５１が上下移動可能に構成される。 The supply nozzle 51 for supplying the developer to the surface of the wafer W is substantially the same as the width of the effective area of the wafer W in the longitudinal direction of the bottom surface of the elongated rectangular nozzle body 52 having a developer flow path therein. A discharge port 53 having a length longer than that is provided. For example, the discharge port 53 may have a structure in which a number of discharge holes are arranged in a line at the same length as the diameter of the wafer W, or a slit-shaped opening having the same length as the diameter of the wafer W is provided. Also good. The supply nozzle 51 is connected to the moving part 56 of the first moving mechanism 55 via the arm part 54. The first moving mechanism 55 is configured to move horizontally along the guide rail 6 so that the supply nozzle 51 can move horizontally from the front end side to the rear end side of the wafer W. Further, the first moving mechanism 55 includes, for example, A ball screw mechanism 57 is provided, and the supply nozzle 51 is configured to be movable up and down.

また現像後の洗浄工程において洗浄液、例えば純水をウェハＷ表面に供給するための洗浄ノズル７１は、第２の移動機構７２に接続されており、洗浄液の吐出口７３がウェハＷの中心上に位置設定されるように、ガイドレール６に沿って水平移動可能に構成されている。なお上述の駆動部２１、昇降機構４、第１の移動機構５５及び第２の移動機構７２は夫々制御部と接続されており、例えば駆動部２１によるスピンチャック２の昇降に応じて第１の移動機構５５による現像液の供給を行うような、各部を連動させた動作制御が可能な構成である。 Further, a cleaning nozzle 71 for supplying a cleaning liquid such as pure water to the surface of the wafer W in the cleaning process after development is connected to the second moving mechanism 72, and the discharge port 73 for the cleaning liquid is located on the center of the wafer W. It is configured to be horizontally movable along the guide rail 6 so that the position is set. Note that the drive unit 21, the elevating mechanism 4, the first moving mechanism 55, and the second moving mechanism 72 are each connected to a control unit, and for example, according to the elevating and lowering of the spin chuck 2 by the driving unit 21. The configuration is such that operation control is performed in conjunction with each other such that the developer is supplied by the moving mechanism 55.

次に上述の現像装置を用いた現像処理工程について説明する。先ずスピンチャック２が外カップ３１の上方まで上昇し、既に前工程でレジストが塗布され、露光処理が施されたウエハＷが図示しない搬送アームからスピンチャック２に受け渡され、次いでスピンチャック２はウェハＷの中心部を吸引吸着した状態で下降し、ウェハＷに現像処理を行う設定位置、例えば図１の実線で示す位置に設定される。この場合、液受け板３７の内周縁とウェハＷの外周縁とが、例えば０．５〜３ｍｍの離間距離をもってかつ液受け板３７表面とウェハ表面とが同じかあるいは僅かに低い高さ位置になるように設定される。この場合、液受け板３７（液受け板３７表面）はウェハＷ（ウェハＷ表面）よりも０．３〜２．５ｍｍ低く設定するのが好ましい。続いて供給ノズル５１が外カップ３１とウエハＷの周縁との間の走査開始位置に水平移動され、更に供給ノズル５１は下降し、ウエハＷに対して現像液の供給を行う高さ、例えば吐出口５３の先端面がウェハＷ表面から１ｍｍ程度高い位置に設定される。 Next, a developing process using the above developing device will be described. First, the spin chuck 2 is raised above the outer cup 31, and the wafer W on which the resist has already been applied and exposed in the previous process is transferred from the transfer arm (not shown) to the spin chuck 2, and then the spin chuck 2 is The wafer W is lowered in a state where it is sucked and sucked, and is set to a setting position for developing the wafer W, for example, a position indicated by a solid line in FIG. In this case, the inner peripheral edge of the liquid receiving plate 37 and the outer peripheral edge of the wafer W have a separation distance of, for example, 0.5 to 3 mm, and the surface of the liquid receiving plate 37 and the wafer surface are at the same or slightly lower height. Is set to be In this case, the liquid receiving plate 37 (the surface of the liquid receiving plate 37) is preferably set to be 0.3 to 2.5 mm lower than the wafer W (the surface of the wafer W). Subsequently, the supply nozzle 51 is horizontally moved to a scanning start position between the outer cup 31 and the peripheral edge of the wafer W, and the supply nozzle 51 is further lowered to a height at which the developer is supplied to the wafer W, for example, discharge. The front end surface of the outlet 53 is set at a position about 1 mm higher than the surface of the wafer W.

続いて図４（ａ）（ｂ）に示すように、供給ノズル５１の吐出口５３から現像液Ｄを吐出すると共に、供給ノズル５１をウエハＷの後端側から、吐出口５３の中心がウエハＷの中心上方を通過して前端側に向かうように、例えば１００ｍｍ／ｓｅｃの速度で走査することにより、現像液ＤがウェハＷおよび液受け板３７に供給される。このときウェハＷ表面においては現像液Ｄが供給ノズル５１の先端面で押し広げられながら液盛され、例えば１ｍｍの厚さの液膜を形成する。一方液受け板３７に供給された現像液Ｄは通流孔３８を介して下方に流れ落ち、液受け部３４を介して排出口３５から排出される。 Subsequently, as shown in FIGS. 4A and 4B, the developing solution D is discharged from the discharge port 53 of the supply nozzle 51, and the supply nozzle 51 is moved from the rear end side of the wafer W so that the center of the discharge port 53 is at the center of the wafer. The developer D is supplied to the wafer W and the liquid receiving plate 37 by scanning at a speed of, for example, 100 mm / sec so as to pass through the upper center of W toward the front end side. At this time, the developer D is poured on the surface of the wafer W while being spread on the front end surface of the supply nozzle 51 to form, for example, a liquid film having a thickness of 1 mm. On the other hand, the developer D supplied to the liquid receiving plate 37 flows down through the flow holes 38 and is discharged from the discharge port 35 through the liquid receiving portion 34.

現像液Ｄの液盛終了後、供給ノズル５１が退避し、図４（ｃ）に示す状態を例えば５５秒間維持して静止現像が行われ、ウェハＷ表面のレジストの溶解性部位が現像液Ｄに溶解してマスクパターンを形成する。続いて外カップ３１が上昇し、この外カップ３１に連動して内カップ３２および液受け板３７が上昇して内カップ３２の傾斜面部をウェハＷの外周縁の側方に位置させ、次いで洗浄液Ｒの吐出部７３がウエハＷの中心上方に位置するように、洗浄ノズル７１が移動し、図４（ｄ）に示すように洗浄ノズル７１から洗浄液ＲをウエハＷ中心部に供給すると共に、スピンチャック２を回転させてウェハＷ表面に介在する現像液Ｄを遠心力によりウエハＷの中心部から周縁部へ向かって洗浄液Ｒで置換することにより現像液Ｄが洗い流される。更に図４（ｅ）に示すようにスピンチャック２を回転させてスピン乾燥を行い現像処理が終了する。このとき現像液Ｄと洗浄液Ｒは液受部３４を介して排出口３５から排出される。 After the liquid deposition of the developer D is completed, the supply nozzle 51 is retracted, and the static development is performed while maintaining the state shown in FIG. 4C for 55 seconds, for example, and the resist soluble portion on the surface of the wafer W becomes the developer D. To form a mask pattern. Subsequently, the outer cup 31 is raised, and the inner cup 32 and the liquid receiving plate 37 are raised in conjunction with the outer cup 31 to position the inclined surface portion of the inner cup 32 on the side of the outer peripheral edge of the wafer W, and then the cleaning liquid. The cleaning nozzle 71 moves so that the R discharge portion 73 is positioned above the center of the wafer W, and the cleaning liquid R is supplied from the cleaning nozzle 71 to the center of the wafer W as shown in FIG. The developing solution D is washed away by rotating the chuck 2 and replacing the developing solution D interposed on the surface of the wafer W with the cleaning solution R from the central portion to the peripheral portion of the wafer W by centrifugal force. Further, as shown in FIG. 4E, the spin chuck 2 is rotated to perform spin drying, and the development processing is completed. At this time, the developing solution D and the cleaning solution R are discharged from the discharge port 35 via the liquid receiving portion 34.

上述の参考例によれば、図５に模式的に示すように供給ノズル５１が当該供給ノズル５１と平行なウェハＷの直径部を越えて前端側に向かって走査する際、ウェハＷの周縁を越えたときにウェハＷ上の現像液Ｄは吐出口５３の移動により外側に引張られるが、液切れが起こる前に吐出口５３からの液は液受け板３７に達して一旦隙間を跨いだ状態となり、その後自重により隙間を落下していく。現像液Ｄの落下時にもウェハＷ側の現像液Ｄの寄り戻しは僅かながら起こるが、液受け板３７がない場合のような大きな寄り戻しは起こらないので、ウェハＷ上の現像液Ｄは落ち着いた状態となっている。この結果ウェハＷ表面にある現像液Ｄに流れ、波立ちの形成が抑えられる。更に本発明者らは現像により得られるマスクパターンの線幅の均一性が向上したことを確認している。また液受け板３７をウェハＷ表面よりも低く設定した場合においては、前記隙間を跨いだ現像液Ｄが落下するときの僅かな寄り戻しを抑えることができると共に、仮に液受け板３７上にある現像液にパーティクルが付着していたとしても、僅かな寄り戻しによってパーティクルをウェハＷ側に引き込んでしまうのを効果的に抑制することができる。なお、液受け板３７を２．５ｍｍよりも低く設定すると、前記隙間を現像液Ｄが跨いだときにウェハＷ周縁部の現像液Ｄが液受け板３７に向かって流れてしまう懸念がある。 According to the above-described reference example, when the supply nozzle 51 scans toward the front end side beyond the diameter portion of the wafer W parallel to the supply nozzle 51 as schematically shown in FIG. When it exceeds, the developer D on the wafer W is pulled outward by the movement of the discharge port 53, but the liquid from the discharge port 53 reaches the liquid receiving plate 37 and temporarily straddles the gap before the liquid runs out. Then, the gap falls by its own weight. Even when the developer D falls, the developer D on the wafer W side slightly moves back. However, the developer D on the wafer W settles down because there is no large shift as in the case without the liquid receiving plate 37. It is in the state. As a result, it flows into the developer D on the surface of the wafer W, and the formation of ripples is suppressed. Furthermore, the present inventors have confirmed that the uniformity of the line width of the mask pattern obtained by development has been improved. Further, when the liquid receiving plate 37 is set lower than the surface of the wafer W, it is possible to suppress a slight back movement when the developer D straddling the gap falls and to be on the liquid receiving plate 37 temporarily. Even if the particles adhere to the developer, it is possible to effectively suppress the particles from being pulled to the wafer W side by slight back movement. If the liquid receiving plate 37 is set lower than 2.5 mm, the developing solution D at the peripheral edge of the wafer W may flow toward the liquid receiving plate 37 when the developing solution D straddles the gap.

また、他の例を以下に説明する。まず液受け板３７は上述したリング状に限られず、例えば図６（ａ）に示すように、馬蹄形状の液受け板３７をウェハＷの直径部から前端に対応する位置に設けるようにしても良い。又は図６（ｂ）に示すように、ウェハＷよりも僅かに大きいウェハＷと相似形の開口部が設けられた四角形状の液受け板３７を設けるようにしても良い。あるいは図６（ｃ）に示すようにウェハＷの直径部から前端の周縁部に対応する位置に、四角形状の液受け板３７を設ける構成であっても良い。更に液受け板３７は、ウェハＷ周縁側に位置する内周縁が高く、外周縁に向かうに従って低くなるように傾斜している構成としても良い。このような構成においても、上述の場合と同様に液の寄り戻しの力が低減され、ウェハＷに液盛された現像液Ｄに流れ、波立ちが形成されるのが抑えられる。 Another example will be described below. First, the liquid receiving plate 37 is not limited to the ring shape described above. For example, as shown in FIG. 6A, a horseshoe-shaped liquid receiving plate 37 may be provided at a position corresponding to the front end from the diameter portion of the wafer W. good. Alternatively, as shown in FIG. 6B, a rectangular liquid receiving plate 37 having an opening similar to the wafer W slightly larger than the wafer W may be provided. Alternatively, as shown in FIG. 6C, a configuration may be adopted in which a square liquid receiving plate 37 is provided at a position corresponding to the peripheral edge portion from the diameter portion to the front end of the wafer W. Furthermore, the liquid receiving plate 37 may have a configuration in which the inner peripheral edge located on the peripheral edge side of the wafer W is high and is inclined so as to become lower toward the outer peripheral edge. Even in such a configuration, the force of returning the liquid is reduced as in the case described above, and the flow of the liquid D to the developing solution D accumulated on the wafer W can be suppressed.

更に他の例を図７、図８を用いて説明する。この実施の形態では液受け板３７を設けるのではなく、供給ノズルの進行方向に向かうように吐出口７５が湾曲、例えば曲率がウェハＷの周縁と同じ円弧状に形成された供給ノズル７４を設けた構成とする。なお既述の実施の形態と共通する構成については説明を省略する。 Still another example will be described with reference to FIGS. In this embodiment, the liquid receiving plate 37 is not provided, but the supply nozzle 74 is provided so that the discharge port 75 is curved, for example, the curvature is the same as that of the peripheral edge of the wafer W, so as to go in the traveling direction of the supply nozzle. The configuration is as follows. Note that description of configurations common to the above-described embodiments is omitted.

このような構成とした場合、供給ノズル７４が現像液Ｄを供給しながら走査された際、図９（ａ）に示すように上方向からみてウェハＷの直径部から前端にかけての周縁と吐出口７５が一致した後、供給ノズル７４はウェハＷの周縁から同時に離れていく。このため現像液Ｄは点ではなくウェハＷ周縁に沿った線状で液切れする。このため寄り戻しの力を分散して弱めることができ、上述の場合と同様の効果が得られる。また更に液の寄り戻しを小さくするために前記ウェハＷの直径部から前端にかけての周縁と吐出口７５が一致したときに、現像液Ｄの供給を停止するように構成しても良い。 In such a configuration, when the supply nozzle 74 is scanned while supplying the developing solution D, the peripheral edge and the discharge port from the diameter portion to the front end of the wafer W as viewed from above as shown in FIG. After 75 coincides, the supply nozzle 74 moves away from the periphery of the wafer W at the same time. For this reason, the developing solution D runs out of liquid in a line shape along the periphery of the wafer W, not a point. For this reason, the reverse force can be dispersed and weakened, and the same effect as described above can be obtained. Further, in order to further reduce the liquid return, the supply of the developer D may be stopped when the peripheral edge from the diameter portion to the front end of the wafer W coincides with the discharge port 75.

また前記吐出口７５の曲率は、ウェハＷの周縁と同じに限られず、ウェハＷの直径ｄに対してπｄ〜２πｄの範囲で設定しても良い。このような構成においても、例えば図９（ｂ）に示すようにウェハＷの前端を通過する際、ウェハＷの周縁に沿うように交わるので、現像液Ｄは点ではなくウェハＷ周縁に沿ってある程度幅を持った線状で液切れする。このため寄り戻しの力を分散して弱めることができ、上述の場合と同様の効果が得られる。 Further, the curvature of the discharge port 75 is not limited to the same as the periphery of the wafer W, and may be set in a range of πd to 2πd with respect to the diameter d of the wafer W. Even in such a configuration, for example, as shown in FIG. 9B, when passing through the front end of the wafer W, the developer D crosses along the periphery of the wafer W, so the developer D does not follow the periphery of the wafer W. The liquid runs out in a line with a certain width. For this reason, the reverse force can be dispersed and weakened, and the same effect as described above can be obtained.

以下に本発明の実施の形態について述べる。この実施の形態では、ウェハＷ表面に沿うように、ウェハＷ表面の後端側の周縁から前端に向かう気流を形成するための気流形成手段８を備えた構成としてもいる。一例として図１０に示すように、ウェハＷの後端から直径部の周縁に対応する半周に亘って、ウェハＷの周縁と内カップ３２との間に昇降機構８１により昇降自在な多数の通気管８２が設けられた構成とし、現像液Ｄの液盛の際に、通気管８２の通気孔８３をウェハＷ表面に対して例えば２ｍｍの高さ位置に設定し、例えば供給ノズル５１の進行方向に向かうように気体、例えば窒素ガスを流しても良い。なお既述の実施の形態と共通する構成については説明を省略する。 Embodiments of the present invention will be described below. In this embodiment, an airflow forming means 8 for forming an airflow from the peripheral edge on the rear end side of the wafer W surface toward the front end along the surface of the wafer W is also provided. As an example, as shown in FIG. 10, a large number of ventilation pipes that can be moved up and down by a lifting mechanism 81 between the periphery of the wafer W and the inner cup 32 from the rear end of the wafer W to a half periphery corresponding to the periphery of the diameter portion. 82, and when depositing the developer D, the vent hole 83 of the vent pipe 82 is set at a height of, for example, 2 mm with respect to the surface of the wafer W, for example, in the traveling direction of the supply nozzle 51. A gas, such as nitrogen gas, may be flowed in the direction of the head. Note that description of configurations common to the above-described embodiments is omitted.

このような構成によれば、供給ノズル５１がウェハＷの直径部から前端に亘って走査されながら現像液Ｄを供給する際、ウェハＷと供給ノズル５１の吐出口５３との間にその表面張力により跨る現像液Ｄが液切れした際に生じる液の寄り戻しの力をこの気体の風圧で押さえて弱めることができる。このためウェハＷに液盛された現像液Ｄに流れ、波立ちが形成されるのが抑えられ、現像後に均一性の高いマスクパターンが得られる。 According to such a configuration, when the supply nozzle 51 supplies the developing solution D while being scanned from the diameter portion of the wafer W to the front end, the surface tension between the wafer W and the discharge port 53 of the supply nozzle 51 is increased. Therefore, the force of returning the liquid generated when the developer D straddling the liquid runs out can be suppressed by the wind pressure of the gas and weakened. For this reason, it is suppressed that it flows into the developing solution D accumulated on the wafer W and a wave is formed, and a highly uniform mask pattern is obtained after development.

この気流形成手段８は上述の構成に限られず、例えば予め実験を行って液の寄り戻しが作用する方向を把握し、その方向に対向するように気流が形成される位置に通気管８２を配列するようにしても良い。更に通気管８２に図示しない吸引機構を接続して吸引することにより気流を形成する構成としても良い。このような構成においても液の寄り戻しの力を気体の風圧で弱めることができ、上述の場合と同様の効果が得られる。 The air flow forming means 8 is not limited to the above-described configuration. For example, an experiment is performed in advance to determine the direction in which the liquid retraction acts, and the air pipe 82 is arranged at a position where the air flow is formed so as to face the direction. You may make it do. Furthermore, it is good also as a structure which forms an airflow by connecting and attracting | sucking the suction mechanism which is not shown in figure to the vent pipe 82. FIG. Even in such a configuration, the force of returning the liquid can be weakened by the wind pressure of the gas, and the same effect as described above can be obtained.

更にまた気流形成手段８は、例えばウェハＷの直径部から前端の周縁部に対応する半周に亘って、開閉自在の自動バルブ８４が各々接続された通気管８２が設けられ、その先端は図１１に示すような短い円弧形状の通気口８５に形成された構成とし、例えばシーケンス制御により供給ノズル５１が通過したタイミングに合わせて自動バルブ８４を開閉させて各通気口８５から順次パージガスを上方に向かって流すようにしても良い。このような構成においては、ウェハＷの周縁と供給ノズル５１の吐出口５３との間に跨る現像液Ｄが液切れする程に引張られる前に、気体で順次切ることにより寄り戻しの力を弱めることができ、このためウェハＷに液盛された現像液Ｄに流れ、波立ちが形成されるのが抑えられ、上述と同様の効果が得られる。 Furthermore, the air flow forming means 8 is provided with a vent pipe 82 to which an openable / closable automatic valve 84 is connected, for example, from the diameter part of the wafer W to the half circumference corresponding to the peripheral edge part of the front end, and the tip thereof is shown in FIG. For example, the automatic valve 84 is opened and closed in accordance with the timing at which the supply nozzle 51 passes by sequence control, and the purge gas is sequentially directed upward from each vent 85. You may make it flow. In such a structure, before the developer D straddling between the peripheral edge of the wafer W and the discharge port 53 of the supply nozzle 51 is pulled to such an extent that the liquid runs out, the turn-back force is weakened by sequentially cutting with the gas. For this reason, it is possible to suppress the formation of undulations in the developing solution D accumulated on the wafer W, and the same effect as described above can be obtained.

以上において、既述した液受け板３７、円弧状の供給ノズル７４および気流形成手段８の構成は互いに組み合わせても良く、例えば液受け板３７を設け、円弧状の供給ノズル７４で液盛するように構成しても良いし、液受け板３７と気流形成手段８を設けた構成、あるいは円弧状の供給ノズル７４と気流形成手段８設けた構成でも良い。更には液受け板３７、円弧状の供給ノズル７４および気流形成手段８の全てを備えた構成であっても良い。 In the above, the configurations of the liquid receiving plate 37, the arc-shaped supply nozzle 74, and the airflow forming means 8 described above may be combined with each other. For example, the liquid receiving plate 37 is provided and the arc-shaped supply nozzle 74 is used for liquid accumulation. Alternatively, the liquid receiving plate 37 and the airflow forming means 8 may be provided, or the arcuate supply nozzle 74 and the airflow forming means 8 may be provided. Furthermore, a configuration including all of the liquid receiving plate 37, the arc-shaped supply nozzle 74, and the airflow forming means 8 may be adopted.

次に上述の現像装置を例えば現像ユニットに組み込んだ塗布・現像装置の一例について図１２及び図１３を参照しながら説明する。図１２及び図１３中、９１は例えば２５枚のウエハＷが収納されたカセットＣを搬入出するためのカセットステーションであり、このカセットステーション９１には前記カセットＣを載置する載置部９１ａと、カセットＣからウエハＷを取り出すための受け渡し手段９２とが設けられている。カセットステーション９１の奥側には、例えばカセットステーション９１から奥を見て例えば右側には塗布・現像系のユニットＵ１が、左側、手前側、奥側には加熱・冷却系のユニット等を多段に積み重ねた棚ユニットＵ２，Ｕ３，Ｕ４が夫々配置されていると共に、塗布・現像系ユニットＵ１と棚ユニットＵ２，Ｕ３，Ｕ４との間でウエハＷの受け渡しを行うための搬送アームＭＡが設けられている。但し図１２では便宜上受け渡し手段９２、ユニットＵ２及び搬送アームＭＡは描いていない。 Next, an example of a coating / developing apparatus in which the above developing apparatus is incorporated in a developing unit will be described with reference to FIGS. In FIG. 12 and FIG. 13, 91 is a cassette station for carrying in / out a cassette C in which, for example, 25 wafers W are stored, and in this cassette station 91, there is a mounting portion 91a for mounting the cassette C. The transfer means 92 for taking out the wafer W from the cassette C is provided. At the back side of the cassette station 91, for example, when viewed from the back of the cassette station 91, for example, the coating / developing system unit U1 is on the right side, and the heating / cooling system unit is multi-tiered on the left side, near side, and back side. Stacked shelf units U2, U3, and U4 are respectively disposed, and a transfer arm MA is provided for transferring the wafer W between the coating / developing system unit U1 and the shelf units U2, U3, and U4. Yes. However, in FIG. 12, the delivery means 92, the unit U2, and the transfer arm MA are not drawn for convenience.

塗布・現像系のユニットＵ１においては、例えば上段には２個の上述の現像装置を備えた現像ユニット９３が、下段には２個の塗布装置を備えた塗布ユニット９４が設けられている。棚ユニットＵ２,Ｕ３,Ｕ４においては、加熱ユニットや冷却ユニットのほか、ウエハの受け渡しユニットや疎水化処理ユニット等が上下に割り当てされている。 In the coating / developing system unit U1, for example, a developing unit 93 provided with the two developing devices described above is provided in the upper stage, and a coating unit 94 provided with two coating apparatuses is provided in the lower stage. In the shelf units U2, U3, and U4, in addition to the heating unit and the cooling unit, a wafer transfer unit, a hydrophobic treatment unit, and the like are assigned up and down.

この搬送アームＭＡや塗布・現像系ユニットＵ１等が設けられている部分を処理ブロックと呼ぶことにすると、当該処理ブロックはインタ−フェイスユニット９５を介して露光ブロック９６と接続されている。インタ−フェイスユニット９５はウエハＷの受け渡し手段９７により前記処理ブロックと露光ブロック９６との間でウエハＷの受け渡しを行うものである。 When the portion where the transport arm MA, the coating / developing unit U1, etc. are provided is called a processing block, the processing block is connected to the exposure block 96 via the interface unit 95. The interface unit 95 delivers the wafer W between the processing block and the exposure block 96 by the wafer W delivery means 97.

この装置のウエハの流れについて説明すると、先ず外部からウエハＷが収納されたウエハカセットＣが載置部９１ａに載置され、受け渡し手段９２によりカセットＣ内からウエハＷが取り出され、既述の加熱・冷却ユニットＵ３の棚の一つである受け渡し台を介して搬送アームＭＡに受け渡される。次いでユニットＵ３の一の棚の処理部内にて疎水化処理が行われた後、塗布ユニット９４にてレジスト液が塗布され、レジスト膜が形成される。レジスト膜が塗布されたウエハＷは加熱ユニットで加熱された後、ユニットＵ４のインターフェースユニット９５の受け渡し手段９７と受渡し可能な冷却ユニットに搬送され、処理後にインタ−フェイスユニット９５，受け渡し手段９７を介して露光装置９６に送られ、ここでパタ−ンに対応するマスクを介して露光が行われる。露光処理後のウエハを受け渡し手段９７で受け取り、ユニットＵ４の受け渡しユニットを介して処理ブロックのウエハ搬送アームＭＡに渡す。 The flow of wafers in this apparatus will be described. First, a wafer cassette C in which wafers W are stored from the outside is placed on a placement portion 91a, and the wafer W is taken out from the cassette C by the transfer means 92. -It passes to transfer arm MA via the delivery stand which is one of the shelves of cooling unit U3. Next, after the hydrophobic treatment is performed in the processing section of one shelf of the unit U3, a resist solution is applied by the coating unit 94 to form a resist film. The wafer W coated with the resist film is heated by the heating unit and then transferred to the delivery unit 97 of the interface unit 95 of the unit U4 and the cooling unit that can be delivered. After the processing, the wafer W passes through the interface unit 95 and the delivery unit 97. Is sent to the exposure device 96, where exposure is performed through a mask corresponding to the pattern. The wafer after exposure processing is received by the transfer means 97, and transferred to the wafer transfer arm MA of the processing block via the transfer unit of the unit U4.

この後ウエハＷは加熱ユニットで所定温度に加熱され、しかる後冷却ユニットで所定温度に冷却され、続いて例えば図１〜図３で示した装置を備えた現像ユニット９３に送られて現像処理され、レジストのマスクパターンが形成される。しかる後ウエハＷは載置部９１ａ上のカセットＣ内に戻される。また本発明は、被処理基板に半導体ウエハ以外の基板、例えばＬＣＤ基板、フォトマスク用レチクル基板の現像処理にも適用できる。 Thereafter, the wafer W is heated to a predetermined temperature by the heating unit, then cooled to the predetermined temperature by the cooling unit, and then sent to the developing unit 93 including, for example, the apparatus shown in FIGS. 1 to 3 for development processing. Then, a resist mask pattern is formed. Thereafter, the wafer W is returned into the cassette C on the mounting portion 91a. The present invention can also be applied to development processing of a substrate other than a semiconductor wafer, such as an LCD substrate or a photomask reticle substrate, as a substrate to be processed.

本発明に係る現像装置の実施の形態を表す断面図である。1 is a cross-sectional view illustrating an embodiment of a developing device according to the present invention. 本発明に係る現像装置の実施の形態を表す平面図である。1 is a plan view illustrating an embodiment of a developing device according to the present invention. 本発明に係る現像装置の現像液供給部を示す側面図である。It is a side view showing a developer supply part of the developing device according to the present invention. 本発明に係る現像装置の現像処理を示す工程図である。It is process drawing which shows the image development processing of the image development apparatus concerning this invention. 本発明に係る現像装置の現像液供給手法を示す説明図である。It is explanatory drawing which shows the developing solution supply method of the developing device which concerns on this invention. 本発明に係る現像装置の他の実施の形態を示す説明図である。It is explanatory drawing which shows other embodiment of the image development apparatus concerning this invention. 本発明に係る現像装置の他の実施の形態を示す平面図である。It is a top view which shows other embodiment of the image development apparatus concerning this invention. 本発明に係る現像装置の他の実施の形態の供給ノズルを示す斜視図である。It is a perspective view which shows the supply nozzle of other embodiment of the developing device which concerns on this invention. 本発明に係る現像装置の他の実施の形態の現像液供給手法を示す説明図である。It is explanatory drawing which shows the developing solution supply method of other embodiment of the developing device which concerns on this invention. 本発明に係る現像装置の他の実施の形態を示す説明図である。It is explanatory drawing which shows other embodiment of the image development apparatus concerning this invention. 本発明に係る現像装置の他の実施の形態を示す説明図である。It is explanatory drawing which shows other embodiment of the image development apparatus concerning this invention. 前記現像装置を組み込んだ塗布・現像装置の一例を示す斜視図である。It is a perspective view which shows an example of the application | coating and developing apparatus incorporating the said developing device. 前記現像装置を組み込んだ塗布・現像装置の一例を示す平面図である。It is a top view which shows an example of the application | coating and developing apparatus incorporating the said developing device. 従来技術に係る現像液の供給方法を示す説明図である。It is explanatory drawing which shows the supply method of the developing solution which concerns on a prior art. 従来技術に係る現像液の供給方法を示す説明図である。It is explanatory drawing which shows the supply method of the developing solution which concerns on a prior art.

Explanation of symbols

Ｗウエハ
Ｄ現像液
Ｒ洗浄液
２スピンチャック
３１外カップ
３２内カップ
３７液受け板
３８通流孔
５１供給ノズル
６ガイドレール
７１洗浄ノズル
７４供給ノズル
８気流形成手段
８２通気管
８３通気孔
W Wafer D Developer R Cleaning solution 2 Spin chuck 31 Outer cup 32 Inner cup 37 Liquid receiving plate 38 Flow hole 51 Supply nozzle 6 Guide rail 71 Cleaning nozzle 74 Supply nozzle 8 Airflow forming means 82 Vent pipe 83 Vent hole

Claims

In a developing device for developing a substrate having a resist coated on the surface and subjected to an exposure process,
A substrate holding part for horizontally holding the substrate;
A discharge nozzle is formed over a length substantially equal to or longer than the width of the effective area of the substrate, and a supply nozzle for supplying a developer to the substrate;
A moving mechanism for moving the supply nozzle from the rear end side to the front end side of the substrate;
A developing device comprising: an airflow forming means for forming an airflow along the surface of the substrate in order to suppress the flow of the developer on the substrate.

2. The developing device according to claim 1, wherein the air flow forming means is provided so that air holes are arranged along a peripheral edge of the substrate and can be moved up and down.

The developing device according to claim 1, wherein the vent hole is provided along a peripheral edge on a rear end side of the substrate.

In a developing device for developing a substrate having a resist coated on the surface and subjected to an exposure process,
A substrate holding part for horizontally holding the substrate;
A discharge nozzle is formed over a length substantially equal to or longer than the width of the effective area of the substrate, and a supply nozzle for supplying a developer to the substrate;
A moving mechanism for moving the supply nozzle from the rear end side to the front end side of the substrate;
A plurality of vent holes provided along the peripheral edge portion of the front end portion from the diameter portion of the substrate along the supply nozzle;
An openable / closable valve connected to each of the vents,
2. A developing device according to claim 1, wherein when the supply nozzle passes through the vent, the valve is sequentially opened to allow gas to flow upward from the vent.

The developing device according to claim 4, wherein the air vent is formed in an arc shape.

In a developing method for developing a substrate that has been subjected to an exposure process by applying a resist to the substrate surface,
Holding the substrate horizontally;
While supplying the developer from the discharge port formed in the supply nozzle over a length substantially equal to or longer than the width of the effective area of the substrate, the supply nozzle is extended from the rear end side to the front end side of the substrate. A process of moving;
And a step of flowing an air flow along the surface of the substrate in order to suppress the flow of the developer on the substrate.

In a development method for developing a substrate on which a resist is applied and exposed to the substrate surface,
Holding the substrate horizontally;
While supplying the developer from the discharge port formed in the supply nozzle over a length substantially equal to or longer than the width of the effective area of the substrate, the supply nozzle is extended from the rear end side to the front end side of the substrate. A process of moving;
A step of flowing gas upward from the vents sequentially when the supply nozzles pass through a plurality of vents provided along the peripheral edge of the front end from the diameter part of the substrate along the supply nozzles. A development method comprising: