JP3916929B2 - Attachment method and attachment structure of accessory parts to the ion gun body - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method and a structure for attaching accessory parts such as a neutralizer unit and an ion collector unit to an ion gun body in an ion gun apparatus used for frequency adjustment of a crystal resonator.
[0002]
[Prior art]
Conventionally, as a frequency adjusting device for a crystal resonator, a device using a resistance heating evaporation source has been generally used. However, the frequency adjustment by vacuum deposition using this resistance heating evaporation source has the disadvantage that the electrode becomes smaller as the work is downsized, and the base electrode and the adjustment film are displaced. Therefore, at present, an ion gun apparatus having advantages such as the above-described disadvantages, continuous operation is possible because the replenishment of the evaporating material is unnecessary, and the device characteristics are good because the electrodes are not multi-layered. Frequency adjustment by ion beam etching has been widespread. The frequency adjustment of a crystal resonator using such an ion gun apparatus is disclosed in, for example, Japanese Patent Laid-Open No. 2000-323442.
[0003]
A schematic configuration of the ion gun apparatus as described above will be described with reference to FIG. In the figure, 1 is a substantially cylindrical ion gun body, 2 is a water-cooling jacket surrounding the periphery of the ion gun body 1, and 3 is an anti-adhesion cylinder fitted to the top of the ion gun body 1. In the center of the deposition preventing cylinder 3, a hole for allowing the ion beam from the ion beam irradiation port 140 of the ion gun main body 1 to pass therethrough is provided. 100 is a neutralizer unit installed at a predetermined interval from the ion beam irradiation port 140, and 120 is an ion collector unit. The neutralizer unit 100 and the ion collector unit 120 are attached to the ion gun body 1, and are supported by the ion gun body 1 or the water cooling jacket 2 surrounding the ion gun body by a support member not shown in FIG. .
[0004]
When this ion gun apparatus is used, Ar gas is first introduced into an ion gun body 1 having an anode and a hot cathode in a vacuum vessel to generate Ar plasma. Next, Ar positive ions are extracted from the plasma to form an ion beam 130. The frequency of the crystal unit is adjusted by irradiating the electrode film of the crystal unit 131 with the ion beam 130 and performing sputter etching on the electrode surface.
[0005]
However, when frequency measurement is performed while oscillating a crystal resonator as described above, the crystal substrate is charged with a positive charge simultaneously with the irradiation of the ion beam, and the oscillation becomes unstable, or the oscillation is stopped. In some cases, there is a problem that accurate frequency measurement cannot be performed. Therefore, the filament 101 attached to the tip of the neutralizer unit 100 is energized to emit electrons (negative charges) to neutralize the charge on the quartz substrate, and the frequency measurement is performed simultaneously with the ion beam irradiation. . Also, an ion collector unit 120 is provided to control the power of the neutralizer, and the neutralizer output is adjusted by keeping the current flowing through the ion collector constant.
[0006]
In such an ion gun apparatus, the distance from the ion beam to the filament 101 of the neutralizer unit 100 is extremely important because it affects the neutralization of Ar ions, and the center of the ion beam through hole 122 of the ion collector unit 120 is the center. If it does not coincide with the center of the ion beam, the power of the neutralizer cannot be accurately controlled. Therefore, the positioning of the neutralizer unit 100 and the ion collector unit 120 with respect to the ion gun body 1 is very important.
[0007]
When the neutralizer unit 100 and the ion collector unit 120 are attached to the ion gun main body 1 or the water cooling jacket 2, the external dimensions of the ion gun main body 1 and the water cooling jacket 2 vary somewhat depending on the device, so that each part is adjusted with respect to the installation position. If it is fixed without having the degree of freedom, accurate adjustment cannot be performed because the attachment position cannot be finely adjusted. Therefore, in the prior art, a play for positioning is made in the attachment portion of the accessory, and the positioning in the vertical direction and the horizontal direction is performed by visual observation.
[0008]
This visual positioning method will be described with reference to FIG. 8a and FIG. 8b which is a cross-sectional view taken along the line AA 'in FIG. In the following description, an ion gun body equipped with a neutralizer unit, an ion collector unit, and the like is collectively referred to as an ion gun apparatus. The water-cooling jacket surrounding the ion gun main body will be described as a part of the ion gun main body except for the case where it is specifically described by reference numerals.
[0009]
Reference numeral 1 denotes an ion gun main body, and a water cooling jacket 2 and a protection cylinder 3 are attached to the ion gun main body 1 as shown in FIG. A mounting plate 80 is fixed to the water cooling jacket 2 by screws 81. As shown in FIG. 9, the mounting plate 80 has an L-shaped cross section, and the portion provided with the mounting portion 83 of the screw 81 is greatly U-shaped and is mounted in the x- and y-directions of the water cooling jacket 2. Can be adjusted. An insulating support 90 shown in FIG. 10 is fixed to the screw hole 82 at the rising portion of the mounting plate 80 with a screw 91. A mounting portion 92 of the screw 91 is a long hole extending in the z direction, and the mounting position of the insulating support 90 on the mounting plate 80 can be adjusted in the z direction.
[0010]
A neutralizer unit 100 shown in FIG. The screw 103 passes through the screw hole 102 of the neutralizer unit 100 and is fixed to the screw hole 94 of the insulating column 90. The neutralizer unit 100 is fixed to the upper part of the insulating support column 90, and the deposition preventing plate 110 is further arranged on the upper part. As shown in FIG. 12, the adhesion preventing plate 110 is configured by fixing a sheet metal part 111 to an insulating part 112 shown by hatching with screws 113, and the sheet metal part 111 and the insulating part 112 are screw holes 114. It is fixed to the portion of the screw hole 93 of the insulating support 90 through. At this time, the adhesion preventing plate 110 is visually arranged so that the through hole 115 having the inner diameter B provided in the sheet metal portion 111 is located at the center of the ion beam irradiation port of the ion gun body. Furthermore, an ion collector unit 120 shown in FIG. The ion collector unit 120 is also visually arranged so that the ion beam through hole 122 having an inner diameter C provided in the ion collector unit 120 is located at the center of the ion beam irradiation port.
[0011]
As described above, after the arrangement of the deposition preventing plate 110 and the ion collector unit 120 is determined by visual observation, the attachment plate 110 and the ion collector unit 120 are fixed to the insulating support 90 by the screws 123 that pass through the screw holes 121, 114, and 93. The fixing position of the mounting plate 80 by the screw 81 and the fixing position of the insulating column 90 by the screw 91 are determined by visual observation so that the neutralizer unit 100 and the ion collector unit 120 are arranged at appropriate positions with respect to the ion beam. It had been.
[0012]
[Problems to be solved by the invention]
In the ion gun apparatus, the material to be etched generated by etching with an ion beam may adhere to the grid surface and cause a short circuit between the acceleration grid and the shielding grid. Therefore, periodic cleaning is performed at least once a day. Work is necessary. Moreover, since a neutralizer unit, a deposition prevention plate, an ion collector unit, etc. are consumable parts, it is necessary to replace them as appropriate. For this reason, it is necessary to frequently disassemble and assemble the ion gun apparatus for maintenance work such as cleaning and parts replacement. At that time, as described above, the positioning of the neutralizer unit, the deposition preventing plate and the ion collector unit with respect to the ion gun main body is very important.
[0013]
However, in the past, positioning, which is important for attaching accessory parts such as a neutralizer unit and an ion collector unit to the ion gun main body, has been performed visually as described above, so that the ion gun apparatus for maintenance work can be disassembled. The attachment positions of the accessory parts sometimes differed before and after assembly. As a result, there are problems that the attachment position of the accessory in the horizontal direction and the vertical direction with respect to the ion gun body varies from device to device, and that the attachment position of the accessory varies depending on the device assembler. It was a cause of adverse effects on accuracy.
[0014]
[Means for Solving the Problems]
In order to solve the above-described problems, in the present invention, a jig is used to accurately position the neutralizer unit and the ion collector unit with respect to the ion gun body. That is, in the method of attaching the neutralizer unit and the ion collector unit which are accessory parts at a predetermined interval from the ion beam irradiation port of the ion gun main body, the positioning plate which can be attached to and detached from the predetermined portion of the ion gun main body and the front and rear, The accessory is temporarily fixed to the ion gun body with play in any of the front, rear, left, and right directions via a support that can adjust the position in the left and right and up and down directions. The attachment parts are fixed at an accurate position with respect to the ion gun body using a plurality of attachment jigs interposed between the plurality of attachment jigs, and then the attachment parts supported by the plurality of attachment jigs and the positioning plate are fixed. Remove everything from the ion gun body as it is, remove only the mounting jig used here, It is intended to attach the accessory to the ion gun body by attaching again the positioning plate to a predetermined point of the ion gun body.
[0015]
DETAILED DESCRIPTION OF THE INVENTION
(1) Description of Configuration of Examples Hereinafter, embodiments of the present invention will be described with reference to FIGS. In these drawings, the same parts as those of the conventional example described above are denoted by the same reference numerals as those of the conventional example, and the detailed description thereof refers to the description of the conventional example.
[0016]
In carrying out the present invention, first, the positioning plate 20 is attached to a predetermined portion of the water cooling jacket 2 covering the ion gun main body 1. As shown in FIG. 2, the positioning plate 20 connects a plate portion 21 that regulates the mounting position of the positioning plate 20 in the x direction and an L-shaped plate portion 22 that regulates the mounting position in the y direction with screws 24. It is constituted by. At one end of the plate portion 21 in the x direction, a right-angled bent portion that contacts the ion gun body is formed. Further, the plate portion 22 is provided with an attachment portion 25 that enables the position of the plate portion 22 in the y direction to be adjusted by a screw 24 penetrating a long hole provided on one side thereof. The other side of the plate portion 22 is brought into contact with the ion gun body. The position of the plate portion 22 can be adjusted in this way because there is some variation in the size of the water cooling jacket surrounding the ion gun main body, and the positioning plate 20 of the positioning plate 20 is adjusted according to the dimension in the y direction of the water cooling jacket. By determining the dimension in the y direction and fixing the plate portions 21 and 22 with screws 24, a positioning plate that can be attached to a predetermined position of the water cooling jacket is obtained no matter how many times it is attached or detached. The positioning plate 20 is fixed to the water cooling jacket 2 with screws 81.
[0017]
Next, an insulating support 90 similar to the conventional example in which the neutralizer unit 100 is fixed with the screw 103 is disposed in a portion corresponding to the screw hole 33 of the mounting plate 30 shown in FIG. The attachment portion 92 of the screw 91 is a through hole that is long in the z direction, so that the fixing position of the insulating support 90 can be adjusted in the vertical direction. Therefore, the screw 91 is temporarily fixed without being fixed in the state where the mounting portion 92 and the screw hole 33 are passed.
[0018]
Next, the mounting plate 30 described above is disposed on the positioning plate 20. As shown in FIG. 3, the mounting plate 30 is provided with a mounting portion 32 of a screw 31 for fixing the mounting plate 30 to the positioning plate 20, and the screw 31 is inserted into the screw hole 23 of the positioning plate 20. It is like that. The attachment portion 32 is an oval hole that is larger than the effective diameter of the screw 31 so that the fixing position of the attachment plate 30 with respect to the positioning plate 20 can be adjusted in the x direction and the y direction. Therefore, the screw 31 is also temporarily fixed without being fixed.
[0019]
In this way, the ion gun is not fixed by fixing the screw 91 for fixing the mounting plate 30 and the insulating support 90 and the screw 31 for fixing the positioning plate 20 and the mounting plate 30 constituting the supporting member of the accessory part. The positioning of the accessory parts of the main body can have play in the x, y and z directions.
[0020]
Next, similarly to the conventional example, the deposition preventing cylinder 3 is removed, and the base plate 40 is disposed above the ion beam irradiation port of the ion gun body 1. As shown in FIG. 4, the base plate 40 is provided with a plurality of circular through holes circumferentially, and one of the circular through holes is a through hole 43 for attaching a positioning pin. Yes. A fixing pin 41 is provided on the back surface of the base plate at a position symmetrical to the through hole 43 with respect to the center of the circumference, and a center through hole 42 is provided in the center of the circumference.
[0021]
FIG. 15 is a schematic view when the ion beam irradiation port of the ion gun main body 1 is viewed from above. At the center of the ion gun body 1, there is provided an ion beam irradiation port 140 in which a large number of small holes are arranged, and a through hole for inserting a positioning pin on the outer circumference of the ion beam irradiation port. 141 and 142 are provided. The aforementioned base plate 40 is disposed on the upper surface of the ion gun body 1 with the fixing pin 41 inserted into the through hole 142 and the positioning pin 44 inserted into the through hole 141 through the through hole 43. Thereby, the base plate 40 is fixed in a state where the ion beam irradiation port 140 at the center of the ion gun main body 1 and the center of the base plate 40 coincide.
[0022]
Next, the quadrangular prism block 50 shown in FIG. The rectangular column block 50 is provided with a central through hole 51 having the same inner diameter that is linearly connected to the central through hole 42 of the base plate 40 at the center thereof, and is perpendicular to the central through hole 51, that is, x Two screw holes 52 are provided in the direction.
[0023]
Next, the neutralizer unit 100 is disposed in the screw hole 52 portion of the quadrangular prism block 50 and fixed with the screw 53. At this time, the neutralizer unit 100 is positioned in the z direction at a position where the neutralizer unit 100 contacts the base plate 40.
[0024]
Next, a disc-shaped collar 60 shown in FIG. The collar 60 has a through hole 61 having the same inner diameter as the through hole 51 of the rectangular column block 50.
[0025]
Next, the positioning pin 70 shown in FIG. 7 is inserted into the central through hole 61 of the collar 60, the central through hole 51 of the quadratic prism block 50, and the central through hole 42 of the base plate 40. Further, a part of the collar 60 is inserted into the ion beam through hole 115 of the deposition preventing plate 110, and a part of the positioning pin 70 is sequentially inserted in a state of being inserted into the ion beam through hole 122 of the ion collector unit 120. In this case, the outer diameters of the collar 60 and the positioning pin 70 are sized according to the inner diameters of the ion beam through holes 115 and 122, respectively. For example, the outer diameter of the positioning pin 70 is substantially equal to the inner diameter C of the ion beam through hole 122 of the ion collector unit 120.
[0026]
In this state, the deposition preventing plate 110 and the ion collector unit 120 are fixed to the insulating support 90 with screws 123. Further, the position of the insulating support 90 relative to the mounting plate 30 and the position of the mounting plate 30 relative to the positioning plate 20 are determined at positions where the positioning pins 70 can be smoothly extracted, and the screws 91 and 31 are fixed.
[0027]
After completing the above-described steps, the screw 81 is removed, and the positioning plate 20 and the accessory parts fixed to the upper portion thereof are once removed from the ion gun main body 1 as they are. Then, jigs such as the positioning pin 70, the collar 60, the quadrangular prism block 50, and the base plate 40 used for positioning are removed. After that, the attachment cylinder 3 is attached to the ion gun main body 1 and the positioning plate 20 is fixed to a predetermined portion of the ion gun main body 1 with a screw 81 again. Is fixed to the ion gun main body 1 at an accurate position.
[0028]
(2) Description of Action and Operation of Embodiment In the above-described steps, the base plate 40 is attached to the upper part of the ion gun body 1 with the fixing pins 41 and the positioning pins 44, so that the ion beam irradiation port 140 at the center of the ion gun body 1 is provided. And the center of the base plate 40 coincide. In addition, the square pole block 50 is disposed at the center of the base plate 40 by extension by the positioning pins 70, and thus at the center of the ion gun main body 1. Furthermore, the neutralizer unit 100 is fixed to the square pillar block 50, and the screw 91 is fixed at a position where the base plate 40 and the neutralizer unit 100 are in contact with each other, so that the neutralizer unit 100 is positioned in the z direction for maintenance work. Even in the reassembly after the disassembly, the neutralizer unit 100 can always be fixed at a position separated from the ion beam irradiation port 140 by the same distance as the thickness of the base plate 40. As a result, the insulating support 90 is positioned with respect to the mounting plate 30 in the z direction.
[0029]
In addition, the inner diameter of the ion beam through hole 115 of the deposition preventing plate 110 is aligned with the outer diameter of the positioning pin 70 and the concentric collar 60 positioned at the center of the ion gun body, and the ion of the ion collector unit 120 is aligned with the outer diameter of the positioning pin 70. By arranging the components so that the inner diameters of the beam through holes 122 are matched, the deposition preventing plate 110 and the ion collector unit 120 are accurately arranged at the center of the ion gun body 1. In this state, the attachment plate 30 and the ion collector unit 120 are fixed to the insulating support 90 and the screw 31 is fixed, whereby the mounting plate 30 is positioned with respect to the positioning plate 20.
[0030]
As described above, the neutralizer unit 100, the adhesion preventing plate 110, and the ion collector unit 120 are positioned with respect to the ion gun body 1 in the x, y, and z directions.
[0031]
Since the positioning plate 20 is fixed at a predetermined position according to the dimensions of the water-cooling jacket 2, no matter how many times the positioning plate 20 is attached or detached, the attachment parts fixed to the positioning plate 20 are attached to the ion gun body. The position does not change. Therefore, after positioning jigs such as positioning pins 70, collars 60, quadratic prism blocks 50, base plate 40, etc. between the ion gun body and the accessory parts and positioning the accessory parts with respect to the ion gun body, the accessory parts etc. Even if the positioning plate 20 that has been fixed is removed from the ion gun body once and then the jig is removed and then attached to the ion gun body again in the specified position, the position of the accessory relative to the ion gun body does not change, so it is high Attached parts can be attached with high accuracy.
[0032]
In the conventional method for attaching the neutralizer unit and ion collector unit by visual observation, the fixed position may be fixed with a deviation of about 2 mm in the x and y directions from the normal attachment position. However, according to the attachment method of the present invention, ± 0.1 Installation can be performed with an accuracy of less than mm, and the frequency adjustment accuracy can be stabilized. Specifically, the frequency adjustment result when the adjustment amount of 1000 MHz for the 24 MHz band VCXO (frequency variable crystal oscillator) is ± 15 PPM with respect to the target frequency in the ion gun device with the attached parts attached by the conventional method. In contrast, in the ion gun apparatus using the accessory mounting method of the present invention, it was within ± 2 PPM.
[0033]
(3) Description of other embodiments, description of examples of diversion to other applications The above embodiments correspond to neutralizers and ion collectors used in ion gun devices for frequency adjustment of crystal resonators. An ion gun apparatus used for an object other than the vibrator can also be dealt with by changing the shape.
[0034]
【The invention's effect】
According to the present invention, since assembly is performed using jigs such as a base plate, a square pole block, a collar, and a positioning pin, positioning accuracy of accessory parts such as a neutralizer unit and an ion collector unit with respect to the ion gun body is improved, and maintenance work is performed. When disassembling and reassembling, the attachment position of the accessory changes depending on the assembler, and the frequency adjustment accuracy of the crystal unit is no longer adversely affected. This makes it possible to stabilize the frequency adjustment accuracy of the ion gun type frequency adjustment device.
[Brief description of the drawings]
FIG. 1 is a schematic view of an ion gun apparatus equipped with a positioning jig used in the present invention.
2A and 2B show a positioning plate used in the present invention, in which FIG. 2A is a front view, FIG. 2B is a left side view, FIG. 2C is a right side view, and FIG.
3A and 3B show a mounting plate used in the present invention, in which FIG. 3A is a front view, FIG. 3B is a right side view, and FIG. 3C is a plan view.
4A and 4B show a base plate used in the present invention, in which FIG. 4A is a front view, FIG. 4B is a right side view, and FIG. 4C is a plan view.
5A and 5B show a quadrangular prism block used in the present invention, in which FIG. 5A is a front view, FIG. 5B is a right side view, and FIG. 5C is a plan view.
6A and 6B show a color used in the present invention. FIG. 6A is a front view, FIG. 6B is a right side view, and FIG. 6C is a plan view.
7A and 7B show positioning pins used in the present invention, in which FIG. 7A is a front view, FIG. 7B is a right side view, and FIG. 7C is a plan view.
FIG. 8A is a schematic view of an ion gun apparatus using a conventional accessory part mounting method, and FIG. 8B is a cross-sectional view of the AA ′ portion in the ion gun apparatus of FIG.
9A and 9B show a mounting plate used in a conventional method, in which FIG. 9A is a front view, FIG. 9B is a right side view, and FIG. 9C is a plan view.
FIGS. 10A and 10B show insulating posts used for supporting attached parts, wherein FIG. 10A is a front view, FIG. 10B is a right side view, and FIG. 10C is a plan view.
11A and 11B show a neutralizer unit, where FIG. 11A is a front view, FIG. 11B is a right side view, and FIG. 11C is a plan view.
FIGS. 12A and 12B show a protection plate, where FIG. 12A is a front view, FIG. 12B is a right side view, and FIG. 12C is a plan view;
FIG. 13 shows an ion collector unit, where (a) is a front view, (b) is a right side view, and (c) is a plan view.
FIG. 14 is a conceptual diagram of an ion gun device.
FIG. 15 is a schematic top view of an ion gun body.
[Explanation of symbols]
1 Ion gun body
2 Water cooling jacket
3 Anti-stick cylinder
20 Positioning plate
21 Plate
22 Plate
23 Screw holes
24 screws
25 Screw mounting part
30 Mounting plate
31 screw
32 Screw mounting part
33 Screw hole
40 base plate
41 Fixing pin
42 Center through hole
43 Through hole
44 Locating pin
50 square block
51 Center through hole
52 Screw holes
53 screw
60 colors
61 Center through hole
70 Positioning pin
80 Mounting plate
81 screw
82 Screw holes
83 Screw mounting part
90 Insulating post
91 screw
92 Screw mounting part
93 Screw hole
94 Screw hole
100 neutral unit
101 filament
102 Screw hole
103 screw
110 Armor plate
111 Sheet metal part
112 Insulation
113 screw
114 Screw hole
115 Ion beam through hole
120 ion collector unit
121 Screw hole
122 Ion beam through hole
123 screw
130 Ion beam
131 Quartz crystal
140 Ion beam irradiation port
141 Through hole
142 Through hole

Claims (8)

A method of attaching an accessory part consisting of a neutralizer unit and an ion collector unit having an ion beam through hole to a predetermined spatial position from an ion beam irradiation port of an ion gun body,
(A) Play the accessory part in the front / rear, left / right or up / down direction via a positioning plate at a predetermined position with respect to the ion gun body and a support member capable of adjusting the position in the front / rear, left / right and up / down directions. The process of holding and temporarily fixing,
(B) Using an attachment jig interposed between the ion gun body and the accessory part, attach the accessory part to the ion gun body so that the ion beam irradiation port and the ion beam through hole are coaxial. Fixing to,
(C) removing the attachment jig, the positioning plate, the support member, and the accessory from the ion gun body and the predetermined position while being fixed to each other;
(D) A method comprising the step of removing the attachment jig from the accessory part, and (e) a step of reattaching the positioning plate to the predetermined position. The method of claim 1, wherein
The method, wherein the predetermined position in the steps (a), (c) and (e) is a predetermined portion provided in a water cooling jacket fixed to the ion gun body. The method of claim 2, comprising:
In the step (a), the support member is composed of a mounting plate and an insulating column,
The step (a)
Fixing the positioning plate at a predetermined position of the water-cooling jacket;
The mounting plate is temporarily fixed to the positioning plate, and a screw is temporarily fixed to a slot provided in the mounting plate so that the position of the mounting plate can be adjusted in predetermined first and second directions with respect to the positioning plate. And a step of providing the insulating support post on the mounting plate, and a position of the insulating support post on the insulating support post so as to be adjusted in a third direction different from the first and second directions with respect to the mounting plate. A method characterized by comprising a step of temporarily fixing a screw through a long hole. A method according to any one of claims 1 to 3, comprising
In the step (b), the mounting jig is composed of a base plate, a square pole block, and a collar,
The step (b)
A step of arranging the base plate, the quadrangular prism block, and the collar in this order in accordance with the center of the ion gun main body at the top of the ion gun irradiation port;
A process of penetrating a center positioning pin at the center of the arranged mounting jig;
Fixing the square prism block and the neutralizer unit;
A method comprising: arranging the ion collector unit with the through hole aligned with the central positioning pin; and fixing a portion temporarily fixed by the temporary fixing step. A method according to any one of claims 2 to 4, comprising
In the step (c), the positioning plate is removed from the water-cooling jacket. A method according to claim 4 or claim 5, wherein
In the step (d), only the base plate, the quadrangular prism block, the collar and the central positioning pin are removed from the ion collector unit and the neutralizer unit. An ion collector unit having a neutralizer unit and an ion beam through hole at a predetermined spatial position from the ion beam irradiation port of the ion gun body. An attachment member for attaching a genus part to the ion gun body,
A positioning plate detachable at a predetermined position of the ion gun body;
A mounting plate having an elongated hole capable of adjusting a fixed position with respect to the positioning plate in predetermined first and second directions;
An insulating column having a slot that can adjust the fixing position with respect to the mounting plate in a third direction different from the first and second directions;
The mounting plate and the insulating column are
A jig comprising a base plate having a through-hole, a quadratic prism block, a collar, and a central positioning pin, and the jig detachable from the ion gun main body when the positioning plate is not attached to the ion gun main body. It is configured so that the neutralizer unit and the ion collector unit can be positioned by a tool,
The base plate is disposed at a predetermined position of the ion gun body so that the center of the through hole of the base plate matches the center of the irradiation port of the ion gun body,
The quadrangular prism block is fixed at a predetermined position of the neutralizer unit;
The collar is disposed between the base plate and the ion collector unit;
The central positioning pin is configured to pass through the ion beam through hole of the ion collector unit, the through hole of the base plate, the through hole of the rectangular column block, and the through hole of the collar,
By attaching and detaching the positioning plate and the ion gun body at the predetermined position, it is possible to attach and detach the mounting plate, the insulating column and the accessory fixed to the positioning plate to the ion gun body. A featured mounting member. An ion gun body to which the accessory is attached by the attachment method according to any one of claims 1 to 6.

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