JPH0415143U - - Google Patents

Info

Publication number
JPH0415143U
JPH0415143U JP5675590U JP5675590U JPH0415143U JP H0415143 U JPH0415143 U JP H0415143U JP 5675590 U JP5675590 U JP 5675590U JP 5675590 U JP5675590 U JP 5675590U JP H0415143 U JPH0415143 U JP H0415143U
Authority
JP
Japan
Prior art keywords
positioning component
jig base
electrode
jig
vertical positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5675590U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5675590U priority Critical patent/JPH0415143U/ja
Publication of JPH0415143U publication Critical patent/JPH0415143U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例の斜視図、第２図ａ
は第１図の治具を調整対象の電極が設けられてい
るイオン源ハウジングに取付けた状態の縦面図、
同図ｂは断面図、第３図ａは第２図のイオン源ハ
ウジングの縦面図、同図ｂは断面図である。 １……治具基体、２……支持アーム、２ａ……
固定部、３……水準器用台、４……溝穴、５……
上下位置決め部品、６……空所、７……上下目盛
、８……奥行位置決め部品、９……ストツパ、１
１……イオン源ハウジング、１２……ソースブツ
シング、１３……電極、１４……スリツト。 Figure 1 is a perspective view of one embodiment of the present invention, Figure 2 a
is a vertical view of the jig shown in Figure 1 attached to the ion source housing where the electrode to be adjusted is installed;
3B is a sectional view, FIG. 3A is a vertical view of the ion source housing of FIG. 2, and FIG. 3B is a sectional view. 1... Jig base, 2... Support arm, 2a...
Fixed part, 3... Level stand, 4... Slot, 5...
Vertical positioning component, 6... Blank space, 7... Vertical scale, 8... Depth positioning component, 9... Stopper, 1
DESCRIPTION OF SYMBOLS 1... Ion source housing, 12... Source butting, 13... Electrode, 14... Slit.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 調整対象の電極が設けられているイオン源ハウ
ジングに固定するための固定部および水準器用台
を有する治具基体と、この治具基体にあけられて
いる溝穴に挿入され、上下にスライド可能な上下
位置決め部品と、前記上下位置決め部品の中央空
所に挿入され、この挿入方向の位置決めストツパ
を有する奥行位置決め部品とを有することを特徴
とするイオン注入装置の電極調整治具。 A jig base that has a fixing part for fixing it to the ion source housing where the electrode to be adjusted is installed and a level stand, and a jig base that is inserted into a slot drilled in the jig base and can be slid up and down. 1. An electrode adjustment jig for an ion implantation apparatus, comprising a vertical positioning component and a depth positioning component inserted into a central cavity of the vertical positioning component and having a positioning stopper in the insertion direction.
JP5675590U 1990-05-30 1990-05-30 Pending JPH0415143U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5675590U JPH0415143U (en) 1990-05-30 1990-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5675590U JPH0415143U (en) 1990-05-30 1990-05-30

Publications (1)

Publication Number Publication Date
JPH0415143U true JPH0415143U (en) 1992-02-06

Family

ID=31580865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5675590U Pending JPH0415143U (en) 1990-05-30 1990-05-30

Country Status (1)

Country Link
JP (1) JPH0415143U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003151485A (en) * 2001-11-19 2003-05-23 Showa Shinku:Kk Mounting method and mounting structure of accessory part on ion gun main body

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003151485A (en) * 2001-11-19 2003-05-23 Showa Shinku:Kk Mounting method and mounting structure of accessory part on ion gun main body

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