JP3903053B2 - Manufacturing method of image forming apparatus - Google Patents

Description

  The present invention relates to a method for manufacturing an image forming apparatus using a spacer.

  Conventionally, two types of electron-emitting devices, a hot cathode device and a cold cathode device, are known. Among these, as the cold cathode device, for example, a surface conduction type emission device, a field emission type device (hereinafter referred to as FE type), a metal / insulating layer / metal type emission device (hereinafter referred to as MIM type), and the like are known. Yes.

  As the surface conduction electron-emitting device, for example, M.I.Elinson, Radio Eng. Electron Phys., 10, 1290, (1965) and other examples described later are known.

  The surface conduction electron-emitting device utilizes a phenomenon in which electron emission occurs when a current flows in parallel to a film surface in a small-area thin film formed on a substrate. As the surface conduction electron-emitting device, in addition to the SnO2 thin film by Erinson et al., An Au thin film [G. Dittmer: "Thin Solid Films", 9,317 (1972)], or an In2O3 / SnO2 thin film [M.Hartwell and CGFonstad: "IEEETrans.ED Conf.", 519 (1975)] and carbon thin film [Hisa Araki et al .: Vacuum, Vol. 26, No. 1, 22 (1983)] Has been.

  As a typical example of the device configuration of these surface conduction electron-emitting devices, FIG. 20 shows a plan view of the device by M. Hartwell et al. In the figure, reference numeral 3001 denotes a substrate, and 3004 denotes a conductive thin film made of a metal oxide formed by sputtering. The conductive thin film 3004 is formed in an H-shaped planar shape as shown. By applying an energization process called energization forming described later to the conductive thin film 3004, an electron emission portion 3005 is formed. The interval L in the drawing is set to 0.5 to 1 [mm], and the width W is set to 0.1 [mm]. For convenience of illustration, the electron emission portion 3005 is shown as a rectangular shape in the center of the conductive thin film 3004. However, this is a schematic shape and faithfully represents the actual position and shape of the electron emission portion. I don't mean.

  In the above-described surface conduction electron-emitting devices such as the device by M. Hartwell et al., The electron emission portion 3005 is generally formed by applying an energization process called energization forming to the conductive thin film 3004 before electron emission. It was the target. That is, energization forming means applying a constant DC voltage or a DC voltage boosted at a very slow rate of about 1 V / min to both ends of the conductive thin film 3004 to energize the conductive thin film 3004. This is to form the electron emitting portion 3005 in an electrically high resistance state by being locally destroyed, deformed or altered. Note that a crack is generated in a part of the conductive thin film 3004 that is locally broken, deformed, or altered. When an appropriate voltage is applied to the conductive thin film 3004 after the energization forming, electrons are emitted near the crack.

  Examples of FE types include, for example, WPDyke & WWDolan, “Field emission”, Advance in Electron Physics, 8, 89 (1956), or CASpindt, “Physical properties of thin-film field emission cathodes with molybdenium cones ", J. Appl. Phys., 47, 5248 (1976).

  As a typical example of this FE type element configuration, FIG. 21 shows a cross-sectional view of the element according to C.A. In this figure, 3010 is a substrate, 3011 is an emitter wiring made of a conductive material, 3012 is an emitter cone, 3013 is an insulating layer, and 3014 is a gate electrode. This element causes field emission from the tip of the emitter cone 3012 by applying an appropriate voltage between the emitter cone 3012 and the gate electrode 3014.

  As another element configuration of the FE type, there is an example in which an emitter and a gate electrode are arranged on a substrate substantially parallel to the substrate plane, instead of the laminated structure as shown in FIG.

  Further, as an example of the MIM type, for example, C.A.Mead, “Operation of tunnel-emission Devices”, J.Appl.Phys., 32,646 (1961) is known.

  A typical example of the MIM type element configuration is shown in FIG. This figure is a sectional view, in which 3020 is a substrate, 3021 is a lower electrode made of metal, 3022 is a thin insulating layer having a thickness of about 100 angstroms, and 3023 is made of a metal having a thickness of about 80 to 300 angstroms. Electrode. In the MIM type, an appropriate voltage is applied between the upper electrode 3023 and the lower electrode 3021 to cause electron emission from the surface of the upper electrode 3023.

  Since the above-described cold cathode device can obtain electron emission at a lower temperature than a hot cathode device, a heater for heating is not required. Therefore, the structure is simpler than that of the hot cathode device, and a fine device can be produced. Further, even if a large number of elements are arranged on the substrate at a high density, problems such as thermal melting of the substrate hardly occur. Further, unlike the case where the hot cathode element operates by heating of the heater, the response speed is slow. In the case of the cold cathode element, there is also an advantage that the response speed is fast.

  For this reason, research for applying cold cathode devices has been actively conducted.

  For example, the surface conduction electron-emitting device has an advantage that a large number of devices can be formed over a large area because the structure is particularly simple and easy to manufacture among the cold cathode devices. Therefore, for example, as disclosed in Japanese Patent Application Laid-Open No. 64-31332 by the applicant of the present application, a method for arranging and driving a large number of elements has been studied.

  As for the application of the surface conduction electron-emitting device, for example, image forming apparatuses such as an image display apparatus (display) and an image recording apparatus, a charged beam source, and the like have been studied.

  In particular, as an application to an image display device, as disclosed in, for example, Patent Document 1, Patent Document 2, and Patent Document 3 by the applicant of the present application, a phosphor that emits light by collision between a surface conduction electron-emitting device and electrons. An image display device using a combination of the two has been studied. An image display device using a combination of a surface conduction electron-emitting device and a phosphor is expected to have characteristics superior to those of other conventional image display devices. For example, it can be said that it is superior in that it does not require a backlight and has a wide viewing angle because it is a self-luminous type as compared with a liquid crystal display device that has become widespread in recent years.

  Further, a method for driving a number of FE types in a row is disclosed, for example, in Patent Document 4 by the applicant of the present application. As an example of applying the FE type to an image display device, for example, a flat plate type image display device reported by R. Mayer et al. Is known (Non-Patent Document 1).

An example in which a large number of MIM types are arranged and applied to an image display device is disclosed in, for example, Patent Document 5 by the present applicant.
Among the image forming apparatuses using the electron-emitting devices as described above, a flat-type image display apparatus with a small depth is attracting attention as a replacement for a cathode ray tube type image display apparatus because it is space-saving and lightweight.

  A flat-type image display device (flat panel display) in which an electron source in which the above-described electron-emitting devices are arranged in a matrix is accommodated in an airtight container has been proposed. This hermetic container is configured by making a face plate on which a phosphor is disposed and a rear plate on which an electron source is disposed to face each other and sealing the periphery. The inside of the airtight container is maintained in a vacuum of about 10 to the sixth power [torr]. Therefore, as the display area of the image display device increases, a means for preventing deformation or destruction of the rear plate and the face plate due to a pressure difference between the inside and outside of the hermetic container is required. Therefore, conventionally, a structural support (called a spacer or a rib) made of a relatively thin glass plate for withstanding atmospheric pressure is provided between the rear plate and the face plate.

For example, US Pat. No. 4,923,421, US Pat. No. 5,063,327, US Pat. No. 5,205,770, US Pat. No. 5,232,549, and US Pat. US Pat. No. 5,509,840, US Pat. No. 5,712,050, European Publication No. 0725416, European Publication No. 0725417, European Publication No. 0725418, European Publication No. 0725419, and the like.
US Pat. No. 5,066,883 JP-A-2-257551 JP-A-4-28137 US Patent 4,904,895 JP-A-3-55738 R. Meyer: "Recent Development on Microtips Display at LETI", Tech. Digest of 4th Int. Vacuum Microelectronics Conf., Nagahama, pp. 6-9 (1991)

  However, the image forming apparatus and the flat panel display using the spacers described above have the following problems.

  First, a part of the electrons emitted from the electron-emitting devices in the vicinity of the spacer may strike the spacer, or ions ionized by the action of the emitted electrons may adhere to the spacer, thereby causing the spacer to be charged. There is sex. The electrons emitted from the electron-emitting device due to the charging of the spacer are bent in the trajectory, reach a place different from the normal position on the phosphor provided on the face plate, and the image near the spacer is distorted and displayed. End up.

  Second, in order to accelerate electrons emitted from the electron-emitting device, a high voltage of several hundred volts or higher: Va (for example, a high electric field of 1 kV / mm or higher) is applied between the rear plate and the face plate. Therefore, creeping discharge on the surface of the spacer is a concern. In particular, when the spacer is charged as described above, discharge may be induced.

  In order to solve these problems, proposals have been made to remove the charge so that a minute current flows through the spacer (Japanese Patent Laid-Open Nos. 57-118355 and 61-124031). There, a high resistance film is formed on the surface of the insulating spacer base so that a minute current flows on the spacer surface. The high resistance film used here is tin oxide, or a mixed crystal thin film or metal film of tin oxide and indium oxide.

  However, depending on the type of image, when the duty of electron emission is large, the reduction of image distortion may not be sufficient only by the method of removing the charge by the high resistance film. This problem is that the electrical connection between the high resistance film and the upper and lower substrates, that is, the face plate (hereinafter referred to as FP) and the rear plate (hereinafter referred to as RP) is insufficient, and charging is concentrated near the joint. It is considered as a factor.

  In order to solve this point, as shown in FIG. 23, the insulating spacer base 21 has a lower resistance than the high resistance film 22 on the end face and side face in contact with the face plate 17 or the rear plate 11. It has been proposed to arrange a membrane (electrode) 25. Thereby, electrical contact between the upper and lower substrates 17 and 11 and the high resistance film 22 can be ensured. FIG. 23 shows an example in which the low-resistance film (electrode) 25 is disposed on the end surface that contacts the face plate 17 and the rear plate 11 and the side surface that contacts the end surface in the above configuration. FIG. 23 is a cross-sectional view taken along a plane including a spacer among the cross sections in the direction perpendicular to the plane of the rear plate 11.

  On the other hand, even if the spacer is exposed in vacuum by setting the Va low without controlling the high resistance film 22 or controlling the shape of the side surface of the insulating spacer base 21, And the second problem may be suppressed. However, even in this case, if the potential of the end face of the insulating spacer base 21 is not fixed, the emitted electron trajectory may be changed. Therefore, as shown in FIG. 27, even when the insulating spacer 21 is disposed between the face plate 17 and the rear plate 11, an electrode (low resistance film) 25 is provided on at least one end surface of the spacer 21. It is necessary to arrange.

  FIG. 24 schematically shows an AA cross section when the spacer base 21 in FIG. 23 is flat. FIG. 25 shows an enlarged schematic view of the RP side end B of the spacer 20 surrounded by a circle in FIGS. FIG. 25 shows a case where a high resistance film is not applied to the surface of the spacer base 21 for the sake of simplicity. FIG. 26 schematically shows a perspective view of the spacer base 21 when the spacer base 21 has a flat plate shape. FIG. 31 shows a perspective view when the spacer base 21 is cylindrical. When the spacer base is cylindrical, the diameter R of the cylinder corresponds to the length L and thickness D of the flat spacer base.

  In the present application, the term “spacer” and the term “spacer base” are used separately. As shown in FIG. 23 and the like, a film on which a certain film (for example, the high resistance film 22 or the low resistance film 25 described above) is applied is referred to as a “spacer base”. On the other hand, the “spacer” is a general term for members arranged to support between the face plate 17 and the rear plate 11, and includes at least the spacer base and the low-resistance film (electrode).

  Forming a metal or a material with high conductivity on the end face of the spacer is disclosed in Japanese Patent Application Laid-Open No. 8-180821, US Pat. No. 5,561,343 (IBM: 96/10/1 registration), US Pat. No. 5,561,481, US Pat. No. 5675212, U.S. Patent No. 5746635, U.S. Patent No. 5742117, U.S. Patent No. 5777432, International Publication WO94 / 18694A, International Publication WO96 / 30926A, International Publication WO98 / 02899A, International Publication WO98 / 03986A, International Publication WO98 / 28774A, etc.

  The above-mentioned publications disclose various methods such as sputtering film formation, resistance heating vapor deposition, coating, dipping, and printing as a method for forming a metal or a material having high conductivity on the end face of the spacer.

  Among the above forming methods, a method of applying a liquid to a spacer substrate and baking it (liquid phase forming method) such as coating, dipping, and printing can form the low resistance film (electrode) 25 easily and inexpensively. preferable.

  However, when the low-resistance film (electrode) 25 is formed on the spacer base 21 described above, if the liquid phase forming method is simply used, the following problems may occur.

  That is, when the above liquid phase forming method is used, the dependence on the surface shape of the spacer base 21 appears remarkably in the film formation state of the low resistance film (electrode) 25.

  In particular, when the shape of the spacer base 21 is as shown in FIGS. 26 and 31 where the corners are substantially perpendicular, the formation of the low resistance film (electrode) 25 at the corners is insufficient. There was a case. More specifically, the film thickness of the low-resistance film (electrode) 25 is reduced at the corners during film formation, and as a result, a part of the high-resistance film or the insulating spacer base 21 is exposed. There was a case. As a result, the electron trajectory in the vicinity of the contact portion between the spacer and RP and / or FP may deviate from the desired trajectory.

  SUMMARY An advantage of some aspects of the invention is that it provides an image forming apparatus manufacturing method that does not cause the above-described problems.

In order to achieve the above object, the image forming apparatus manufacturing method of the present invention includes the following steps. That is,
Manufacturing of an image forming apparatus having a first substrate on which an image forming member is disposed, a second substrate on which an electron-emitting device is disposed, and a spacer disposed between the first and second substrates. A method,
Preparing a spacer base material;
Processing a corner portion of the spacer base material into a planar shape or an arc shape, and forming a spacer base;
An application step of applying a liquid in which a conductive material is dispersed or dissolved to an end portion of a spacer base including a corner portion processed into a planar shape or an arc shape , and
Heating the applied liquid on the end of the spacer substrate, and forming an electrode on an end portion of the spacer substrate,
Contacting the electrode formed on the end of the spacer base with the first substrate or the second substrate;
It is characterized by having.

  According to the present invention, it is possible to obtain an image forming apparatus capable of displaying a good image with a stable orbit of electrons emitted from the electron-emitting device and suppressed discharge for a long time.

  Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings.

  In the present embodiment, as shown in FIG. 25, low resistance films (electrodes) 25 are formed on the end face and side face of the spacer base 21 using a liquid phase forming method.

  The resistance value of the low resistance film (electrode) 25 according to the present embodiment is preferably 10 7 [Ω / □] or less.

  Then, according to the present embodiment, in the liquid phase forming method, the low resistance film (electrode) formed on the end face and side face of the spacer base 21 is further obtained by adopting the following aspect (1) and / or (2). ) Good film continuity can be ensured.

That is,
(1) As the spacer base, a spacer base having an arc shape or a taper shape at the end in contact with FP and / or RP is used.
(2) When the immersion transfer method (dipping) described later is used as the liquid phase forming method, a liquid containing a conductive material having a viscosity of 10 cps or more is used.

  In the present embodiment, the liquid phase forming method is a method in which a liquid in which the conductive material constituting the low resistance film 25 is dispersed or dissolved is applied to the end portions (end surfaces and side surfaces) of the spacer base 21 and heated and fired. This refers to the process of forming a low resistance film (electrode).

  First, the above aspect (1) will be described below.

  As described above, when the low resistance film (electrode) 25 is formed on the end portion of the spacer base 21 having a right angle or an acute angle as shown in FIG. 25, FIG. 26, FIG. In some cases, the low resistance film 25 is not sufficiently formed at the corners.

  Therefore, the inventors of the present application have made an effort to make the corners obtuse as shown in the cross-sectional views of FIGS. I found out.

  FIG. 3 is a schematic diagram showing an end portion (FIGS. 3A to 3D) of a spacer base 21 suitable for the present embodiment and a state in which a low resistance film (electrode) 25 is coated on the end portion of the spacer. (FIGS. 3E to 3H) Note that the spacer end portion in FIG. 3 is cut in a direction perpendicular to the rear plate (or face plate) plane in the same manner as the end portion of the spacer shown in FIG. 26 is a cross-sectional view taken along a plane including a spacer, and when the spacer base is flat as shown in FIG. 25 and 27 indicate cross-sectional views at a location where the thickness of the spacer base is D (minimum) Furthermore, when the spacer base 21 is columnar as shown in FIG. It corresponds to a cross-sectional view when cut along a plane including the center of the end face of 21 .

  In other words, the above-mentioned requirement (1) is equivalent to the spacer substrate 21 (FIGS. 25 and 26) whose corners are substantially perpendicular to the surface area of the portion of the spacer substrate 21 covered with the low resistance film (electrode) 25. It is solved by making it smaller than. Furthermore, from the viewpoint of securing the assembly accuracy of the spacer and from the viewpoint of ensuring the electrical connection between the FP 17 and / or the RP 11 and the low resistance film (electrode) 25, the end surface of the spacer base (the plane of the FP or RP). It is necessary to secure an area of a plane substantially parallel to the surface.

  From the above requirements, it is desirable that the shape of the end portion of the spacer base 21 satisfies the following expression (1).

That is,
(T ² + 4 × h ² ) <s ² <(t + 2h) ² ... Formula (1)
It is. Where t, s and h are
t: In the cross-sectional view (FIG. 4) of the spacer base described above, this is the maximum value of the thickness of the portion of the spacer base 21 covered with the low resistance film 25. This thickness is the minimum distance in the cross section when the spacer substrate is cut along a plane substantially parallel to FP or RP.

  h: Approximate to the height of the low resistance film 25 in the cross-sectional view (FIG. 4) of the spacer base described above. More precisely, it is the length (= height) of the low resistance film 25 in the direction perpendicular to the rear plate (or face plate) plane from the end face of the spacer base 21.

  s: The inner circumferential length of the low resistance film 25 is meant. This is the length of the surface of the spacer base 21 in the portion where the low resistance film 25 is formed in the cross-sectional view (FIG. 4).

  Any means may be used as a specific method for obtaining an end shape that satisfies the above requirements.

  As an example, when using a flat spacer base 21 as shown in FIG. 26, first, from a glass plate (base material) 281 as shown in FIG. 28 having the same thickness D as the spacer base. The base material of the spacer base (hereinafter referred to as “spacer base material”) 282 is cut out by cutting with a diamond cutter or the like. By the above cutting, a spacer base material 282 having a thickness D, a height H, and a length L is obtained as in FIG.

  Then, edge processing as shown in FIGS. 3A to 3D is performed on the corners of the spacer base material 282. Specifically, this edge processing is performed by a process of making an arc shape (FIG. 3D) or a process of making a taper shape (a flat corner) (FIGS. 3A to 3C). This is a process for removing sharp corners from the corners of the material. By performing the edge processing in this way, the corners of the spacer base material become obtuse. As a specific means for this edge treatment, sand blasting, laser scribe, water blast, scribe cut, polishing, chemical etching treatment with hydrofluoric acid, or the like can be used.

  In the arc-shaped processing of the corners of the spacer base material 282 (FIG. 3D), the radius of curvature r is preferably D / 2 or less with respect to the thickness D of the spacer base material 282. More preferably, if the radius of curvature r is (D × 1/100) or more, the continuity of the low-resistance film (electrode) 25 and the assembly accuracy of the spacer can be satisfied. The above D is preferably 10 μm to 500 μm, and more preferably 20 μm to 200 μm. Accordingly, the radius of curvature r is preferably 0.1 μm or more and 250 μm or less, and more preferably 0.2 μm or more and 100 μm or less.

  FIGS. 3A to 3D are diagrams showing an example of a cross-sectional shape of a spacer applicable to the embodiment of the present invention. FIGS. 3A and 3B show a shape in which the corners of the spacer base material 282 are chamfered in one direction. FIG. 3C shows a shape chamfered in two directions, and FIG. 3D shows a case where the shape is an arc. Further, each of FIGS. 3E to 3H shows an example of a low resistance film (electrode) 25 formed corresponding to each of FIGS. 3A to 3D.

  Further, when the material is glass, the plate shape is as shown in FIG. 26, and the end portion is to form the spacer base 21 as shown in FIG. 3D, the cutting is performed as shown in FIG. The heating stretching method described later is preferably applied rather than the method. According to such a heat-stretching method, the above-described spacer base material 282 and end face processing (processing into a shape in which the corner portion has the curvature) can be performed simultaneously.

An example of the heat stretching method will be described below using the apparatus shown in FIGS. 5 and 30 (steps A to C). FIG. 30 shows the apparatus of FIG. 5 more specifically.
(Step A) First, a glass plate (base material) 501 is prepared. At this time, when the sectional area of the spacer base 21 to be finally obtained is S2, and the sectional area of the glass plate (base material) 501 is S1, S1 and S2 satisfy (S2 / S1) <1. .

The “cross section” is a plane perpendicular to the direction component of the velocity v 1 or v 2 in FIG. 30 and refers to a cross section when the glass plate (base material) 501 and the spacer base 21 are cut.
(Step B) Next, both ends of the glass plate (base material) 501 prepared in the above step A are fixed, a part in the longitudinal direction is heated by the heating means (heater) 502, and one end is heated. The first feed means (for example, a roller) 504 feeds toward the heating means at a speed v1 in the direction 502. At the same time, the glass plate (base material) 501 is pulled out from the heating unit 502 by the second feeding unit (for example, a stretching roller) 503 at the other end at the speed v2. The glass plate (base material) 501 is stretched while being heated by the first feeding means 504, the heating means (heater) 502 and the second feeding means 503.
The direction of the speed v2 is substantially the same as the direction of the speed v1. For this reason, the speeds v1 and v2 are considered to be speeds and there is no problem. At this time, it is preferable that the speeds v1 and v2 satisfy (S2 / S1) = (v1 / v2). The value of v2 / v1 is preferably 10 or more and 10,000 or less, and more preferably 100 or more and 10,000 or less.

  The heating temperature of the heating means (heater) 502 at this time depends on the type and shape of the glass, but is preferably a temperature equal to or higher than the softening point of the glass plate (base material) 501, specifically 500 to 700 ° C. preferable.

  By satisfying each of the above conditions, a cross section having a corner portion with the preferred radius of curvature r described above can be obtained.

Further, as the feeding means 504 and 503, it is preferable to transport a rotating body such as a roller or a belt rotated by a plurality of rotating bodies in contact with the spacer base 21 and the glass plate (base material) 501.
(Step C) Next, after sufficiently cooling the stretched glass plate (base material) 501 in the above-mentioned step B, the stretched glass plate (base material) 501 is cut to a desired length by the cutting means 504. The spacer base 21 is formed by cutting. The cooling temperature is simply room temperature.

  Through the above steps A to C, the spacer base 21 having the corner portion with the preferable curvature radius r is obtained.

  In addition, it is particularly preferable that the cross-sectional shape of the glass plate (base material) 501 prepared in the step A is formed in advance at the end (corner) of the shape shown in FIG. In this way, the spacer base 21 having a shape similar to the cross section of the glass plate (base material) 501 prepared in the step A can be easily formed by performing the steps A to C. Therefore, by appropriately setting the ratio of the speeds v1 and v2 described above, the spacer base 21 in which the radius of curvature of the glass plate (base material) 501 is arbitrarily reduced can be obtained with good reproducibility.

  Therefore, if the above-described heating and stretching method is used, it is not necessary to directly process a minute radius of curvature required for the spacer base 21. In other words, since processing can be performed with the radius of curvature enlarged, a small radius of curvature of the corner portion of the spacer base 21 can be obtained easily and accurately.

  Further, in the above heat stretching method, as shown in FIG. 30 or FIG. 5, the delivery means 504 and 503 are the side surfaces (long) of the spacer base 21 and the glass plate (base material) 501 as defined in FIG. It is desirable to arrange on the side surface in the vertical direction. This is because when the spacer base 21 and the glass plate (base material) 501 are conveyed / stretched at the speed v1 or v2, the stability is higher and the speed can be controlled with high accuracy. Further, as shown in FIG. 30 or FIG. 5, each of the delivery means 504 and 503 is a pair of delivery that sandwiches the spacer substrate 21 and the side surface (side surface in the length direction) of the glass plate (base material) 501. Preferably it consists of means. Further, as the delivery means, a means for conveying the spacer base 21 and the glass plate (base material) 501 by rotating as shown in FIG. 30 is simple and preferable, but is not particularly limited thereto.

  For the spacer base 21 having the end face shape defined by the above formula (1) obtained by each method described above, a low resistance film (for example, immersion transfer method described later) is used. By forming the (electrode) 25, the corners of the spacer base 21 can be sufficiently covered with the low resistance film (electrode) 25.

  In particular, when the spacer substrate 21 is formed using the above-described heating and stretching method, after cutting into a desired length L by the above-described step C, a liquid phase forming method (for example, an immersion transfer method described later) is used. It is desirable to form the low resistance film (electrode) 25. This is because when the low resistance film (electrode) 25 is to be formed by using a liquid phase formation method (for example, immersion transfer method described later), the spacer substrate 21 is easy to handle.

  Of course, the spacer base material 282 can be formed by the steps A to C described above, and the spacer base 21 can be formed by performing the end face processing described above.

Next, the method (2) will be described.
(2) In the liquid phase formation method, when the following immersion transfer method (dipping) is used, the viscosity is preferably 10 cps or more as a liquid in which the conductive material is dispersed or dissolved. Thus, the corners of the spacer base can be sufficiently covered with the low resistance film (electrode) 25. The viscosity of the liquid is more preferably 100 cps or more, and still more preferably 1000 cps or more.

  According to this method, the low-resistance film (electrode) 25 can be sufficiently covered even when the spacer base 21 has a substantially right angle without performing the above-described spacer end face treatment.

  Of course, it is also preferable to use a method in which the low resistance film (electrode) 25 is formed on the spacer base 21 prepared by the method shown in (1) by the immersion transfer method (dipping).

Here, an example of the immersion transfer method (dipping) according to the present embodiment will be described with reference to FIGS. FIG. 2 is a view seen from the side of the spacer base.
That is, the immersion transfer method (dipping) according to the present embodiment is
(A) A step (FIGS. 2A and 2B) in which a liquid 2002 in which a conductive material constituting the low resistance film 25 is dispersed or dissolved is spread on the substrate 2001 and applied (FIGS. 2A and 2B);
(B) a step (FIGS. 2C and 2D) in which an end portion of the spacer base 21 (corresponding to 21 in FIG. 2) is brought into contact with the liquid 2002 developed on the substrate 2001 (FIGS. 2C and 2D);
(C) a step of separating the spacer base body 21 (corresponding to 21 in FIG. 2) from the substrate 2001 on which the liquid 2002 is spread, and transferring the liquid 2002 (FIG. 2E);
(D) forming a low resistance film (electrode) 25 by heating the liquid 25 transferred to the spacer base 21 (corresponding to 21 in FIG. 2);
It is the method which has.

  In the present embodiment, the liquid in which the conductive material constituting the low resistance film 25 is dispersed or dissolved may be referred to as “coating liquid”.

  According to this immersion transfer method (dipping), the low resistance film (electrode) 25 can be easily formed simultaneously on the end face and the side face of the spacer base 21.

  In addition, as a developing means for the coating liquid of the dip transfer method (dipping), it is possible to use an extending and developing method using a bar coat or a doctor blade, or a developing method using a spin coat.

  Further, the substrate 2001 to be developed is not necessarily a flat surface, and a groove 292 for storing the coating liquid 293 may be formed on the substrate 291 as shown in FIG.

  Further, in the transfer step in which the spacer base 21 is brought into contact with the coating liquid and then separated, it is possible to lower the spacer base 21 onto the development surface, and conversely, the development liquid level is lowered onto the spacer base 21. It is also possible to make it contact.

  By using the method (1) and / or (2) described above, a low resistance film (electrode) 25 is sufficiently provided at the corner of the spacer base 21 when a simple and inexpensive liquid phase forming method is used. Can be coated.

  On the other hand, when the corner of the low resistance film 25 formed on the side surface of the spacer base 21 is a right angle or an acute angle as shown in FIGS. 24 and 32A, the electric field tends to concentrate on that portion. For this reason, in some cases, discharge starting from the corner may occur.

  Therefore, after the low resistance film 25 is coated by the above method (1) and / or (2), it is effective to process the corner so as to have a curvature as shown in FIG. .

  Further, when the spacer substrate after coating the low resistance film 25 is transported or depending on the coating conditions, a part of the interface between the low resistance film 25 and the spacer substrate 21 as shown in FIG. In some cases, a film peeling portion, a film floating portion, or a protruding portion is formed. In such a case, electric field concentration is likely to occur in these portions, which may cause not only discharge but also distortion in the equipotential surface.

  Therefore, in such a case, as shown in FIG. 33B, the low resistance film 25 can be removed from h to h ′ in the height direction (direction between FP and RP). It is valid. Note that h> h ′.

  In particular, when the above-described high resistance film 22 is not applied to the insulating spacer base 21, a triple point of a vacuum, an insulator (spacer base), and a metal (low resistance film) is formed at the above-described interface. As a result, the discharge phenomenon due to the shape of the low-resistance film 25 tends to occur remarkably, so that the processing of the low-resistance film 25 described above is very effective.

  As a specific method of processing (removing) the coated low resistance film 25, for example, the following means can be used. That is, an etching process corresponding to a low resistance film, removal by laser repair, patterning formation by photolithography or a lift-off process, coating liquid partial development by a mask, and the like can be applied.

  When the spacer base 21 is made of glass or ceramic, it is possible to produce a spacer that is inexpensive, easy to cut and polish, and has good assembly strength, and an image forming apparatus using the spacer. In particular, it is preferable from the viewpoint of matching of thermal expansion coefficients that the face plate, rear plate, and spacer base material are the same.

  In addition, the insulating spacer base 21 provided with the low resistance film (electrode) 25 by the liquid phase forming method according to the present embodiment, in particular, between the rear plate (electron source) 11 and the face plate 17 is several. When applied to a high Va type image forming apparatus that applies a voltage of kV to several tens of kV, a high resistance film 22 is further disposed on the side surface of the spacer base 21 as shown in FIGS. It is preferable. By disposing the high resistance film 22 on the side surface of the insulating spacer base 21 in this way, charging of the spacer surface (side surface) is suppressed, and as a result, a good image without a light emission point shift is obtained.

  23 and 24 show an example in which the high resistance film 22 covers only the side surface of the spacer base 21, but the high resistance film 22 covers all surfaces (side and end surfaces) of the spacer base. Also good.

  Furthermore, the high resistance film 22 does not necessarily need to cover all the side surfaces of the spacer base 21. That is, a portion of the side surface of the spacer base 21 exposed in the vacuum vessel that is not covered with the electrode (low resistance film) 25 may be covered with the high resistance film 22. However, as described above, since the electrical connection between the high resistance film 22 and the low resistance film (electrode) 25 is necessary, the low resistance film (electrode) 25 and the high resistance film 22 are overlapped to be electrically connected. It is preferable to secure a general connection.

  Further, FIGS. 23 and 24 show an example in which the low resistance film (electrode) 25 covers the high resistance film 22. However, conversely, the end portion of the spacer base 21 may be covered with the low resistance film (electrode) 25 and the high resistance film 22 may cover the side surface of the spacer base 21. With this configuration, the high resistance film 22 can cover the interface between the low resistance film (electrode) 25 and the spacer base 21, and as a result, the shape of the low resistance film (electrode) 25 at the above interface is obtained. This is preferable because the resulting discharge can be suppressed.

  The surface resistance value of the high resistance film 22 is preferably 10 5 [Ω / □] to 10 12 [Ω / □]. By having such a surface resistance value, it becomes possible to suppress charging and current consumption and heat generation between the upper and lower substrates (FP and RP). On the other hand, the resistance value of the low resistance film (electrode) 25 is the resistance value of the high resistance film 22 as the area resistance for the purpose of improving the electrical connection between the face plate and / or the rear plate and the high resistance film 22. It is desirable that it is 1/10 or less and 10 7 [Ω / □] or less.

  Furthermore, the above-described cold cathode devices (MIM, FE, surface conduction electron-emitting devices, etc.) can be used as the electron source preferably used in the image forming apparatus of the present invention.

  Among the cold cathode devices, the surface conduction electron-emitting device is particularly preferable because it has a simple device structure and is suitable for a large area flat panel display.

  In addition to the display, the image forming apparatus according to the present embodiment uses, for example, an electron beam resist or the like as a target (image forming member) that irradiates electrons emitted from the electron-emitting devices. Also includes an apparatus for forming an image.

(Configuration and manufacturing method of display panel 101)
Next, an example of the configuration of the image display apparatus (display panel) 101 applied to this embodiment and an example of a manufacturing method thereof will be specifically described.

  FIG. 7 is an external perspective view of the display panel 101 used in this embodiment, and a part of the display panel 101 is cut away to show the internal structure.

  In the figure, reference numeral 1015 denotes a rear plate, 1016 denotes a side wall, and 1017 denotes a face plate. These 1015 to 1017 form an airtight container for maintaining the inside of the display panel 101 in a vacuum. When assembling this hermetic container, it is necessary to seal the joints of each member in order to maintain sufficient strength and airtightness. For example, frit glass is applied to the joints in the atmosphere or in a nitrogen atmosphere. Thus, sealing was achieved by baking at 400 to 500 degrees Celsius for 10 minutes or more. Since the inside of this hermetic container is maintained in a vacuum of about 10 to the sixth power [torr], this embodiment is implemented as an atmospheric pressure resistant structure for the purpose of preventing damage to the hermetic container due to atmospheric pressure or unexpected impact. A spacer 20 according to the embodiment is provided.

  Here, the substrate 1011 is fixed to the rear plate 1015, and N × M cold cathode elements 1012 are formed on the substrate 1011. Here, these N and M are positive integers of 2 or more, and are appropriately set according to the target number of display pixels. For example, in a display device for the purpose of displaying high-definition television, it is desirable to set the numbers N = 3000 and M = 1000 or more. These N × M cold cathode elements 1012 are simply matrix-wired by M row-directional wirings 1013 and n column-directional wirings 1014. Here, a portion constituted by the substrate 1011 to the column wiring 1014 is referred to as a multi-electron source. As long as the multi-electron source of the present embodiment is an electron source in which cold cathode elements are wired in a simple matrix, there is no limitation on the material, shape, or manufacturing method of the cold cathode elements. Therefore, for example, a cold cathode device such as a surface conduction electron-emitting device, FE type, or MIM type can be used.

  Next, the structure of a multi-electron source in which surface conduction electron-emitting devices (described later) are arranged as a cold cathode device on a substrate and wired in a simple matrix will be described.

  FIG. 8 is a plan view of the multi-electron source used in the display panel 101 of FIG. On the substrate 1011, surface conduction electron-emitting devices similar to those shown in FIG. 12 described later are arranged, and these devices are wired in a simple matrix by row-direction wiring electrodes 1003 and column-direction wiring electrodes 1004. In the portion where the row direction wiring electrode 1003 and the column direction wiring electrode 1004 intersect, an insulating layer (not shown) is formed between the electrodes, and electrical insulation is maintained.

  FIG. 9 shows a cross section along AA ′ of FIG. Note that the multi-electron source having such a structure has a row-direction wiring electrode 1013, a column-direction wiring electrode 1014, an inter-electrode insulating layer (not shown), and element electrodes 1102 and 1103 of surface conduction electron-emitting devices on a substrate 1011 in advance. And the conductive thin film 1104 is formed, and then power is supplied to each element via the row direction wiring electrode 1013 and the column direction wiring electrode 1014 to perform energization forming processing (described later) and energization activation processing (described later). .

  In this embodiment, the multi-electron source substrate 1011 is fixed to the rear plate 1015 of the hermetic container. However, when the multi-electron source substrate 1011 has sufficient strength, The substrate 1011 itself of the multi-electron source may be used as the rear plate of the hermetic container.

  A fluorescent film 1018 is formed on the lower surface of the face plate 1017. Since this embodiment is a color display device, the phosphor film 1018 is coated with phosphors of three primary colors red, green, and blue used in the field of CRT. For example, as shown in FIG. 10A, the phosphors of the respective colors are separately applied in stripes, and a black conductor 1010 is provided between the stripes of the phosphors. The purpose of providing the black conductor 1010 is to prevent the display color from being shifted even if there is a slight shift in the electron irradiation position, or to prevent the reflection of external light and prevent the display contrast from being lowered. This is for preventing the fluorescent film from being charged up by electrons. For the black conductor 1010, graphite is used as a main component, but other materials may be used as long as they are suitable for the above purpose.

  Further, the method of separately applying the phosphors of the three primary colors is not limited to the stripe arrangement shown in FIG. 10A. For example, a delta arrangement as shown in FIG. It may be. When the monochrome display panel 101 is formed, a monochromatic phosphor material may be used for the phosphor film 1018, and the black conductive material 1010 is not necessarily used.

  Further, a metal back 1019 known in the field of CRT is provided on the surface of the fluorescent film 1018 on the rear plate side. The purpose of providing the metal back 1019 is to increase the light utilization rate by specularly reflecting a part of the light emitted from the fluorescent film 1018 and to protect the fluorescent film 1018 from the collision of negative ions. This is because it acts as an electrode for application, or as a conductive path for excited electrons in the fluorescent film 1018. The metal back 1019 was formed by forming a fluorescent film 1018 on the face plate substrate 1017, smoothing the surface of the fluorescent film, and vacuum-depositing aluminum (Al) thereon. Note that when a low-voltage phosphor material is used for the fluorescent film 1018, the metal back 1019 is not used.

  Although not used in the present embodiment, a transparent electrode made of, for example, ITO is used between the face plate substrate 1017 and the fluorescent film 1018 for the purpose of applying an acceleration voltage or improving the conductivity of the fluorescent film. It may be provided.

  Further, the row wiring terminals Dx1 to DxM and the column wiring terminals Dy1 to DyN and Hv are electrical connection terminals having an airtight structure provided for electrically connecting the display panel 101 and the above-described circuits and the like. The row wiring terminals Dx1 to DxM are electrically connected to the row direction wiring 1013 of the multi electron source, the column wiring terminals Dy1 to DyN are electrically connected to the column direction wiring 1014 of the multi electron source, and Hv is electrically connected to the metal back 1019 of the face plate 1017. Connected to.

  Further, in order to evacuate the inside of the hermetic container to a vacuum, after assembling the hermetic container, an exhaust pipe (not shown) and a vacuum pump are connected, and the inside of the hermetic container is evacuated to about 10 to the seventh power [torr] Exhaust to a degree. Thereafter, the exhaust pipe is sealed. In order to maintain the degree of vacuum in the hermetic container, a getter film (not shown) is formed at a predetermined position in the hermetic container immediately before or after sealing. This getter film is, for example, a film formed by heating and vapor-depositing a getter material mainly composed of Ba by a heater or high-frequency heating, and the inside of the hermetic container is 1 × 10 minus 5th power by the adsorption action of this getter film, It is maintained at a vacuum degree of 1 × 10 minus 7 [torr].

  FIG. 11 is a schematic cross-sectional view taken along the line AA ′ in FIG. 7, and the numbers of the respective parts correspond to those in FIG.

  In the embodiment described here, the spacer 20 is formed by forming a high resistance film 22 for the purpose of preventing electrification on the surface of an insulating spacer base 21, and the inside of the face plate 1017 (metal back 1019 and the like) and the substrate. A member having a contact surface (end surface) 3 of the spacer base 21 facing the surface (row direction wiring 1013 or column direction wiring 1014) of 1011 and a member having a low resistance film (electrode) 25 formed on the side surface portion 5. As many as necessary to achieve the above-mentioned purpose and at a necessary interval, they are arranged on the inside of the face plate 1017 and the surface of the substrate 1011 by the bonding material 1041. The high resistance film 22 is formed on at least the surface of the insulating member 1 exposed in the vacuum in the hermetic container, and the low resistance film (electrode) 25 and the bonding material 1041 are interposed therebetween. , And electrically connected to the inside of the face plate 1017 (metal back 1019 and the like) and the surface of the substrate 1011 (row-direction wiring 1013 or column-direction wiring 1014). Here, the spacer 20 is connected to the inside of the face plate (metal back 1019 or the like) and the surface of the substrate 1011 (row-direction wiring 1013 or column-direction wiring 1014) by a conductive bonding member 1041. The joining member is not necessarily required.

  In the embodiment described here, the spacer 20 has a flat plate shape, is disposed in parallel to the row direction wiring 1013, and is electrically connected to the row direction wiring 1013. Further, the spacer 20 has an insulating property sufficient to withstand a high voltage applied between the row direction wiring 1013 and the column direction wiring 1014 on the substrate 1011 and the metal back 1019 on the inner surface of the face plate 1017, and the spacer 20. It is necessary to have a conductivity sufficient to suppress the charging of the surface.

  In the embodiment described here, examples of the spacer base 21 constituting the spacer 20 include quartz glass, glass with reduced impurity content such as Na, ceramic member such as soda lime glass, and alumina. The spacer base member 21 preferably has a thermal expansion coefficient close to that of the member that forms the hermetic container and the substrate 1011.

  A current obtained by dividing the acceleration voltage Va applied to the face plate 1017 (metal back 1019 or the like) on the high potential side by the resistance value Rs of the high resistance film 22 flows through the high resistance film 22 of the spacer 20. Therefore, the resistance value Rs of the spacer 20 is set in a desirable range from charging suppression and power consumption. From the viewpoint of suppressing charging, the surface resistance is preferably 10 12 [Ω / □] or less. Furthermore, in order to obtain a sufficient charge suppressing effect, 10 11 [Ω / □] or less is preferable. The lower limit of the surface resistance depends on the shape of the spacer 20 and the voltage applied between the spacers 20, but is preferably 10 5 [Ω / □] or more.

  The thickness t of the high resistance film 22 formed on the spacer base 21 is preferably in the range of 10 nm to 1 μm. Although it varies depending on the surface energy of the material of the spacer base 21, the adhesion to the spacer base 21 and the substrate temperature, a thin film of 10 nm or less is generally formed in an island shape, the resistance is unstable, and the reproducibility is poor. On the other hand, when the film thickness t is 1 μm or more, the film stress increases, the risk of film peeling increases, and the film formation time increases, resulting in poor productivity.

  Therefore, the film thickness is desirably 50 to 500 nm. The surface resistance is ρ / t, and the specific resistance ρ of the high resistance film 22 is 0.1 [Ω · cm] to 10 8 [Ω from the preferable range of the surface resistance and the film thickness t described above. • cm] is preferred. Further, in order to realize a more preferable range of the surface resistance and the film thickness t, it is preferable that ρ is 10 2 to 10 6 [Ω · cm].

  As described above, the temperature of the spacer 20 rises when a current flows through the high resistance film 22 or when the entire display panel 101 generates heat during operation. If the temperature coefficient of resistance of the high resistance film 22 is a large negative value, the resistance value decreases when the temperature rises, the current flowing through the spacer 20 increases, and the temperature rises further. The current continues to increase until it exceeds the power supply limit. The value of the resistance temperature coefficient at which such a current runaway occurs is empirically a negative value and the absolute value is 1% or more. That is, the temperature coefficient of resistance of the high resistance film 22 is desirably less than −1%.

  For example, a metal oxide can be used as the material of the high resistance film 22 having such an effect of suppressing charging. Among metal oxides, chromium, nickel, and copper oxides are preferable materials. The reason for this is considered that these oxides have a relatively low secondary electron emission efficiency and are not easily charged even when electrons emitted from the electron-emitting device 1012 hit the spacer 20. Besides metal oxides, carbon is a preferable material because it has a low secondary electron emission efficiency. In particular, since amorphous carbon has high resistance, it is easy to control the resistance of the spacer 20 to a desired value.

  As another material of the high-resistance film 22, aluminum and transition metal alloy nitride are suitable materials because the resistance value can be controlled in a wide range from a good conductor to an insulator by adjusting the composition of the transition metal. . Furthermore, it is a stable material with little change in resistance value in the manufacturing process of the display device described later. In addition, the temperature coefficient of resistance is less than -1%, and it is a material that is practically easy to use. Examples of the transition metal element include Ti, Cr, Ta and the like.

  The alloy nitride film is formed on the insulating member by thin film forming means such as sputtering, reactive sputtering in a nitrogen gas atmosphere, electron beam vapor deposition, ion plating, or ion assist vapor deposition. The metal oxide film can also be produced by a similar thin film formation method, but in this case, oxygen gas is used instead of nitrogen gas. In addition, a metal oxide film can be formed by a CVD method or an alkoxide coating method. The carbon film is produced by vapor deposition, sputtering, CVD, or plasma CVD. In particular, when producing amorphous carbon, the atmosphere during film formation should contain hydrogen or be used as a film formation gas. Use hydrocarbon gas.

  The low resistance film (electrode) 25 constituting the spacer 20 electrically connects the high resistance film 22 to the high potential side face plate 1017 (metal back 1019, etc.) and the low potential side substrate 1011 (wirings 1013, 1014, etc.). It is provided for connection.

The low resistance film (electrode) 25 can have a plurality of functions listed below.
(1) The high resistance film 22 is electrically connected to the face plate 1017 and the substrate 1011.

As already described, the high resistance film 22 is provided for the purpose of suppressing the charging on the surface of the spacer 20, but the high resistance film 22 is formed on the face plate 1017 (metal back 1019 or the like) and the substrate 1011 (wiring 1013). 1014 etc.) directly or via the contact material 1041, a large contact resistance is generated at the interface of the connecting portion, and there is a possibility that charges generated on the surface of the spacer 20 cannot be removed quickly. In order to avoid this, a low resistance film (electrode) 25 is provided on the contact surface 3 or the side surface portion 5 of the spacer 20 that contacts the face plate 1017, the substrate 1011, and the contact material 1041.
(2) The potential distribution of the high resistance film 22 is made uniform.

Electrons emitted from the electron-emitting device 1012 form an electron trajectory according to a potential distribution formed between the face plate 1017 and the substrate 1011. In order to prevent disturbance of the electron trajectory in the vicinity of the spacer 20, it is necessary to control the potential distribution of the high resistance film 22 over the entire region. When the high-resistance film 22 is connected to the face plate 1017 (metal back 1019, etc.) and the substrate 1011 (wirings 1013, 1014, etc.) directly or via the contact material 1041, the connection state is uneven due to the contact resistance at the interface of the connection portion. May occur, and the potential distribution of the high resistance film 22 may deviate from a desired value. In order to avoid this, the low resistance film (electrode) 25 is provided on the spacer end portions (end surface 3 and side surface portion 5) where the spacer 20 contacts the face plate 1017 and the substrate 1011. By applying a desired potential to the low resistance film (electrode) 25, the potential of the entire high resistance film 22 can be controlled.
(3) Control the orbit of emitted electrons.

  Electrons emitted from the electron-emitting device 1012 form an electron trajectory according to a potential distribution formed between the face plate 1017 and the substrate 1011. With respect to electrons emitted from the electron-emitting device 1012 in the vicinity of the spacer 20, restrictions (wiring, change in device position, etc.) associated with the installation of the spacer 20 may occur.

  In such a case, in order to form an image without distortion or unevenness, it is necessary to control the trajectory of the emitted electrons to irradiate the desired position on the face plate 1017 with electrons. By providing a low resistance film (electrode) 25 on the side surface portion 5 of the face plate 1017 and the substrate 1011 in contact with the surface plate 1017, the potential distribution in the vicinity of the spacer 20 has a desired characteristic and the trajectory of emitted electrons is controlled. I can do it.

  For the low resistance film (electrode) 25, a material having a resistance value sufficiently lower than that of the high resistance film 22 may be selected, such as Ni, Cr, Au, Mo, W, Pt, Ti, Al, Cu, and Pd. Metal or alloy, and printed conductor composed of metal such as Pd, Ag, Au, RuO2, Ag-PbO, metal oxide and glass, or conductive fine particles doped with SnO2 fine particles with Sb or the like are silica. Alternatively, a conductive fine particle dispersion film in which the terminal of silicon oxide is dispersed in a binder substituted with alkyl, alkoxy, fluorine or the like, a transparent conductor such as In2O3-SnO2, and a semiconductor material such as polysilicon are selected as appropriate.

  The bonding material 1041 needs to have conductivity so that the spacer 20 is electrically connected to the row direction wiring 1013 and the metal back 1019. That is, a frit glass to which a conductive adhesive, metal particles, or a conductive filler is added is preferable.

  In the image display apparatus using the display panel 101 described above, when a voltage is applied to each electron-emitting device 1012 through the external terminals Dx1 to DxM and Dy1 to DyN, electrons are emitted from the electron-emitting devices 1012. At the same time, a high voltage of several hundred [V] to several [kV] is applied to the metal back 1019 through the container outer terminal Hv, and the emitted electrons are accelerated in the direction of the face plate 1017 to collide with the inner surface of the face plate 1017. . As a result, the phosphors of the respective colors on the phosphor film 1018 are excited to emit light, and an image is displayed.

  Usually, the applied voltage to the surface conduction electron-emitting device 1012 of this embodiment which is an electron-emitting device (cold cathode device) is about 12 to 16 [V], and the distance d between the metal back 1019 and the cold cathode device 1012 is 0. The voltage between the metal back 1019 and the cold cathode element 1012 is about 0.1 [kV] to about 10 [kV].

  The basic configuration and manufacturing method of the display panel 101 according to the present embodiment and the outline of the image display device have been described above.

  Next, a method for manufacturing a multi-electron source used for the display panel 101 of this embodiment will be described. As long as the multi-electron source used in the image display apparatus of the present embodiment is an electron source in which the cold cathode elements are wired in a simple matrix, there is no limitation on the material, shape or manufacturing method of the cold cathode elements. Therefore, for example, a cold cathode device such as a surface conduction electron-emitting device, FE type, or MIM type can be used. However, a surface conduction electron-emitting device is particularly preferable among these cold cathode devices under the circumstances where a display device having a large display screen and a low price is required. In other words, in the FE type, the relative position and shape of the emitter cone and the gate electrode greatly affect the electron emission characteristics, and thus an extremely high-precision manufacturing technique is required. This achieves a large area and a reduction in manufacturing cost. This is a disadvantageous factor. Further, in the MIM type, it is necessary to make the insulating layer and the upper electrode thin and uniform, but this is also a disadvantageous factor in achieving a large area and a reduction in manufacturing cost. In that respect, since the surface conduction electron-emitting device is relatively simple to manufacture, it is easy to increase the area and reduce the manufacturing cost.

  The inventors of the present invention have also found that among the surface conduction electron-emitting devices, those in which the electron emission portion or its peripheral portion is formed of a fine particle film are particularly excellent in electron emission characteristics and can be easily manufactured. Therefore, it can be said that it is most suitable for use in a multi-electron source of an image display device with high brightness and a large screen. In view of this, in the display panel 101 of the present embodiment, a surface conduction electron-emitting device in which the electron emission portion or its peripheral portion is formed of a fine particle film is used. First, the basic configuration, manufacturing method, and characteristics of a suitable surface conduction electron-emitting device will be described, and then the structure of a multi-electron source in which a number of devices are wired in a simple matrix will be described.

(Suitable device structure and manufacturing method of surface conduction type emission device)
There are two types of typical structures of the surface conduction electron-emitting device in which the electron emission portion or the peripheral portion thereof is formed of a fine particle film, a planar type and a vertical type.

(Planar surface conduction electron-emitting devices)
First, the device configuration and manufacturing method of the planar surface conduction electron-emitting device of the present embodiment will be described.

  FIG. 12 shows a plan view (a) and a cross-sectional view (b) for explaining the configuration of a planar surface conduction electron-emitting device. In the figure, 1101 is a substrate, 1102 and 1103 are element electrodes, 1104 is a conductive thin film, 1105 is an electron emission portion formed by energization forming treatment, and 1113 is a thin film formed by energization activation treatment.

  Examples of the substrate 1101 include various glass substrates such as quartz glass and blue plate glass, various ceramic substrates including alumina, or a substrate obtained by laminating an insulating layer made of, for example, SiO2 on the various substrates described above. , Etc. can be used.

  In addition, element electrodes 1102 and 1103 provided on the substrate 1101 so as to face the substrate surface in parallel are formed of a conductive material. For example, metals such as Ni, Cr, Au, Mo, W, Pt, Ti, Cu, Pd, and Ag, alloys of these metals, or metal oxides such as In2O3-SnO2, poly A material may be selected as appropriate from semiconductors such as silicon. In order to form an electrode, it can be easily formed by using a combination of a film forming technique such as vacuum deposition and a patterning technique such as photolithography and etching. However, the electrode can be formed using other methods (for example, a printing technique). No problem.

  The shapes of the device electrodes 1102 and 1103 are appropriately designed according to the application purpose of the electron-emitting device. In general, the electrode interval L is usually designed by selecting an appropriate value from the range of several hundreds of angstroms to several hundreds of micrometers, but among them, several tens of micrometers are preferred for application to a display device. Micrometer range. For the element electrode thickness d, an appropriate value is usually selected from the range of several hundred angstroms to several micrometers.

  A fine particle film is used for the conductive thin film 1104. The fine particle film described here refers to a film (including an island-like aggregate) containing a large number of fine particles as a constituent element. When the fine particle film is microscopically examined, a structure in which individual fine particles are arranged apart from each other, a structure in which the fine particles are adjacent to each other, or a structure in which the fine particles overlap each other is usually observed.

  The particle diameter of the fine particles used for the fine particle film is in the range of several angstroms to several thousand angstroms, and among them, the one in the range of 10 angstroms to 200 angstroms is preferable. The film thickness of the fine particle film is appropriately set in consideration of various conditions as described below. That is, the conditions necessary for a good electrical connection with the device electrodes 1102 or 1103, the conditions necessary for good energization forming described later, and the electrical resistance of the fine particle film itself to an appropriate value described later. Necessary conditions, etc. Specifically, it is set within a range of several angstroms to several thousand angstroms, and among them, it is preferably between 10 angstroms and 500 angstroms.

  Examples of materials that can be used to form the fine particle film include Pd, Pt, Ru, Ag, Au, Ti, In, Cu, Cr, Fe, Zn, Sn, Ta, W, and Pb. Starting metals, oxides such as PdO, SnO2, In2O3, PbO, Sb2O3, borides such as HfB2, ZrB2, LaB6, CeB6, YB4, GdB4, TiC, ZrC, Carbides such as HfC, TaC, SiC, WC, etc., nitrides such as TiN, ZrN, HfN, etc., semiconductors such as Si, Ge, etc., carbon, etc. It selects suitably from these.

  As described above, the conductive thin film 1104 is formed of a fine particle film, and the sheet resistance value is set to fall within the range of 10 3 to 10 7 [Ω / □].

  Note that it is desirable that the conductive thin film 1104 and the element electrodes 1102 and 1103 be electrically connected to each other, and thus the conductive thin film 1104 and the element electrodes 1102 and 1103 have a structure in which a part of each other overlaps. In the example of FIG. 12, the overlapping is performed in the order of the substrate, the device electrode, and the conductive thin film from the bottom. However, in some cases, the substrate, the conductive thin film, and the device electrode are stacked in this order. There is no problem.

  In addition, the electron emission portion 1105 is a crack-like portion formed in a part of the conductive thin film 1104, and has an electrical property higher than that of the surrounding conductive thin film. This crack is formed by performing a process of energization forming described later on the conductive thin film 1104. There are cases where fine particles having a particle diameter of several angstroms to several hundred angstroms are arranged in the crack. In addition, since it is difficult to accurately and accurately illustrate the actual position and shape of the electron emission portion, it is schematically shown in FIG.

  The thin film 1113 is a thin film made of carbon or a carbon compound, and covers the electron emission portion 1105 and the vicinity thereof. The thin film 1113 is formed by performing an energization activation process described later after the energization forming process.

  The thin film 1113 is one of single crystal graphite, polycrystalline graphite, and amorphous carbon, or a mixture thereof. The film thickness is 500 [angstroms] or less, but is preferably 300 [angstroms] or less. preferable.

  In addition, since it is difficult to accurately illustrate the position and shape of the actual thin film 1113, it is schematically shown in FIG. In addition, in the plan view (a), an element from which a part of the thin film 1113 is removed is shown.

  The basic configuration of a preferable element has been described above. In the embodiment, the following element is used.

  That is, blue plate glass was used for the substrate 1101 and Ni thin films were used for the device electrodes 1102 and 1103. The thickness d of the device electrode was 1000 [angstrom], and the electrode interval L was 2 [micrometer].

  Pd or PdO was used as a main material of the fine particle film, the thickness of the fine particle film was about 100 [angstrom], and the width W was 100 [micrometer].

  Next, a preferred method for manufacturing a planar surface conduction electron-emitting device will be described.

  13A to 13E are cross-sectional views for explaining the manufacturing process of the surface conduction electron-emitting device, and the notation of each member is the same as FIG.

  (1) First, device electrodes 1102 and 1103 are formed on a substrate 1101 as shown in FIG. In forming these, the substrate 1101 is previously thoroughly washed with a detergent, pure water, and an organic solvent, and then the element electrode material is deposited. (As a deposition method, for example, a vacuum film forming technique such as an evaporation method or a sputtering method may be used). Thereafter, the deposited electrode material is patterned using a photolithography / etching technique to form a pair of element electrodes (1102 and 1103) shown in FIG.

  (2) Next, a conductive thin film 1104 is formed as shown in FIG. In forming the conductive thin film 1104, first, an organometallic solution is applied to the substrate of (a), dried, heated and fired to form a fine particle film, and then formed into a predetermined shape by photolithography and etching. Pattern. Here, the organometallic solution is a solution of an organometallic compound whose main element is a fine particle material used for the conductive thin film. (Specifically, Pd is used as the main element in the present embodiment. Further, in the embodiment, the dipping method is used as the coating method, but other methods such as a spinner method and a spray method may be used. ).

  Further, as a method for forming the conductive thin film 1104 made of the fine particle film, for example, a vacuum vapor deposition method, a sputtering method, or a chemical vapor deposition method other than the method by applying the organometallic solution used in this embodiment mode. In some cases, the law is used.

  (3) Next, as shown in FIG. 5C, an appropriate voltage is applied between the forming power supply 1110 between the device electrodes 1102 and 1103, and energization forming processing is performed to form the electron emission portion 1105. .

  The energization forming process is a process in which a conductive thin film 1104 made of a fine particle film is energized, and a part thereof is appropriately destroyed, deformed, or altered, and changed into a structure suitable for electron emission. That is. In a portion of the conductive thin film made of the fine particle film that has been changed to a structure suitable for electron emission (that is, the electron emission portion 1105), an appropriate crack is formed in the thin film. Note that the electrical resistance measured between the device electrodes 1102 and 1103 significantly increases after the formation, compared to before the electron emission portion 1105 is formed.

  In order to explain the energization method in more detail, FIG. 14 shows an example of appropriate voltage waveforms applied from the forming power supply 1110. When forming a conductive thin film made of a fine particle film, a pulsed voltage is preferable. In the case of this embodiment, a triangular wave pulse having a pulse width T1 is continuously applied at a pulse interval T2 as shown in FIG. Applied. At that time, the peak value Vpf of the triangular wave pulse was boosted sequentially. Further, a monitor pulse Pm for monitoring the formation state of the electron emission portion 1105 was inserted between the triangular wave pulses at an appropriate interval, and the current flowing at that time was measured by an ammeter 1111.

  In the present embodiment, for example, in a vacuum atmosphere of about 10 to the fifth power [torr], for example, the pulse width T1 is set to 1 [millisecond], the pulse interval T2 is set to 10 [millisecond], and the peak value Vpf is set to 1 The voltage was increased by 0.1 [V] for each pulse. Then, every time 5 pulses of triangular waves were applied, the monitor pulse Pm was inserted at a rate of once. The monitor pulse voltage Vpm was set to 0.1 [V] so as not to adversely affect the forming process. Then, when the electrical resistance between the element electrodes 1102 and 1103 becomes 1 × 10 6 [ohm], that is, when the monitor pulse is applied, the current measured by the ammeter 1111 is 1 × 10 minus 7 [A At the stage where it became the following, energization related to the forming process was terminated.

  The above method is a preferred method for the surface conduction electron-emitting device according to the present embodiment. For example, when the design of the surface conduction electron-emitting device such as the material and film thickness of the fine particle film or the element electrode interval L is changed Therefore, it is desirable to change the energization conditions accordingly.

  (4) Next, as shown in FIG. 13D, an appropriate voltage is applied between the activation power supply 1112 between the device electrodes 1102 and 1103 to perform energization activation, thereby improving the electron emission characteristics. I do. The energization activation process is a process of energizing the electron emission portion 1105 formed by the energization forming process under appropriate conditions to deposit carbon or a carbon compound in the vicinity thereof. (In the figure, a deposit made of carbon or a carbon compound is schematically shown as the member 1113.) Note that, by conducting the energization activation process, the emission current at the same applied voltage is typically compared to before the conducting. Specifically, it can be increased 100 times or more.

  Specifically, by applying a voltage pulse periodically in a vacuum atmosphere in the range of 10 minus 4 to 10 minus 5 [torr], an organic compound existing in the vacuum atmosphere originates. Carbon or carbon compound to be deposited is deposited. The deposit 1113 is one of single crystal graphite, polycrystalline graphite, and amorphous carbon, or a mixture thereof, and has a film thickness of 500 [angstrom] or less, more preferably 300 [angstrom] or less.

  In order to explain this energization method in more detail, FIG. 15A shows an example of an appropriate voltage waveform applied from the activation power supply 1112. In the present embodiment, the energization activation process is performed by periodically applying a rectangular wave with a constant voltage. Specifically, the rectangular wave voltage Vac is 14 [V], and the pulse width T3 is 1 [ Millisecond] and the pulse interval T4 was set to 10 [millisecond]. The energization conditions described above are preferable conditions for the surface conduction electron-emitting device of the present embodiment, and when the design of the surface conduction electron-emitting device is changed, it is desirable to change the conditions accordingly.

  Reference numeral 1114 shown in FIG. 13D denotes an anode electrode for capturing the emission current Ie emitted from the surface conduction type emission element, and a DC high voltage power source 1115 and an ammeter 1116 are connected to the anode electrode 1114. Note that when the activation process is performed after the substrate 1101 is incorporated into the display panel 101, the phosphor screen of the display panel 101 is used as the anode electrode 1114. While the voltage is applied from the activation power supply 1112, the emission current Ie is measured by the ammeter 1116 to monitor the progress of the energization activation process, and the operation of the activation power supply 1112 is controlled.

  An example of the emission current Ie measured by the ammeter 1116 is shown in FIG. 15B. When a pulse voltage is applied from the activation power supply 1112, the emission current Ie increases with time, but eventually becomes saturated. Almost no increase. Thus, when the emission current Ie is almost saturated, the voltage application from the activation power supply 1112 is stopped, and the energization activation process is terminated.

  The energization conditions described above are preferable conditions for the surface conduction electron-emitting device of the present embodiment, and when the design of the surface conduction electron-emitting device is changed, it is desirable to change the conditions accordingly.

  As described above, the planar surface conduction electron-emitting device shown in FIG.

(Vertical surface conduction electron-emitting devices)
Next, another representative configuration of the surface conduction electron-emitting device in which the electron emission portion or its periphery is formed of a fine particle film, that is, the configuration of a vertical surface conduction electron-emitting device will be described.

  FIG. 16 is a schematic cross-sectional view for explaining a vertical basic configuration, in which 1201 is a substrate, 1202 and 1203 are element electrodes, 1206 is a step forming member, and 1204 is a conductive film using a fine particle film. 1205 is an electron emission portion formed by energization forming treatment, and 1213 is a thin film formed by energization activation treatment.

  This vertical type is different from the planar type described above in that one of the element electrodes (1202) is provided on the step forming member 1206, and the conductive thin film 1204 covers the side surface of the step forming member 1206. There is in point. Accordingly, the element electrode interval L in the planar type in FIG. 12 is set as the step height Ls of the step forming member 1206 in the vertical type. Note that for the substrate 1201, the device electrodes 1202 and 1203, and the conductive thin film 1204 using a fine particle film, the materials listed in the description of the planar type can be similarly used. The step forming member 1206 is made of an electrically insulating material such as SiO2.

  Next, a method for manufacturing a vertical surface conduction electron-emitting device will be described.

  17A to 17F are cross-sectional views for explaining the manufacturing process, and the notation of each member is the same as FIG.

  (1) First, as shown in FIG. 17A, an element electrode 1203 is formed on a substrate 1201.

  (2) Next, as shown in FIG. 2B, an insulating layer for forming a step forming member is laminated. The insulating layer may be formed by, for example, laminating SiO2 by a sputtering method, but other film forming methods such as a vacuum deposition method and a printing method may be used.

  (3) Next, as shown in FIG. 3C, the device electrode 1202 is formed on the insulating layer.

  (4) Next, as shown in FIG. 4D, a part of the insulating layer is removed using, for example, an etching method to expose the device electrode 1203.

  (5) Next, a conductive thin film 1204 using a fine particle film is formed as shown in FIG. For the formation, as in the case of the planar type, for example, a film forming technique such as a coating method may be used.

(6) Next, as in the case of the planar type, an energization forming process is performed to form an electron emission portion. (The same process as the planar energization forming process described with reference to FIG. 13C may be performed.)
(7) Next, as in the case of the planar type, an energization activation process is performed to deposit carbon or a carbon compound in the vicinity of the electron emission portion. (A process similar to the planar energization activation process described with reference to FIG. 13D may be performed.)
As described above, the vertical surface conduction electron-emitting device shown in FIG.

(Characteristics of surface conduction electron-emitting devices used in display devices)
The device structure and manufacturing method of the planar and vertical surface conduction electron-emitting devices have been described above. Next, the characteristics of the devices used in the display device will be described.

  FIG. 18 shows typical (emitted current Ie) vs. (element applied voltage Vf) characteristics and (element current If) vs. (element applied voltage Vf) characteristics of the surface conduction electron-emitting device used in the display device of this embodiment. It is a figure which shows a typical example. The emission current Ie is remarkably smaller than the device current If and is difficult to show on the same scale, and these characteristics are changed by changing design parameters such as the size and shape of the device. Therefore, the two graphs are shown in arbitrary units.

  The surface conduction electron-emitting device used in this display device has the following three characteristics with respect to the emission current Ie.

  First, when a voltage greater than a certain voltage (threshold voltage Vth) is applied to the device, the emission current Ie increases abruptly. On the other hand, the emission current Ie is hardly detected at a voltage lower than the threshold voltage Vth. That is, it is a nonlinear element having a clear threshold voltage Vth with respect to the emission current Ie.

  Second, since the emission current Ie changes depending on the voltage Vf applied to the device, the magnitude of the emission current Ie can be controlled by the voltage Vf.

  Third, since the response speed of the current Ie emitted from the device is fast with respect to the voltage Vf applied to the device, the amount of electrons emitted from the device can be controlled by the length of time for which the voltage Vf is applied.

  Due to the above characteristics, the surface conduction electron-emitting device of this embodiment can be suitably used for a display device. For example, in a display device in which a large number of elements are provided corresponding to the pixels of the display screen, display can be performed by sequentially scanning the display screen by using the first characteristic described above. That is, a voltage equal to or higher than the threshold voltage Vth is appropriately applied to the driven element according to the desired light emission luminance, and a voltage lower than the threshold voltage Vth is applied to the non-selected element. By sequentially switching the elements to be driven in this way, it is possible to perform display by sequentially scanning the display screen.

  In addition, since the emission luminance can be controlled by using the second characteristic or the third characteristic, gradation display can be performed.

  The structure of a multi-electron source in which these surface conduction electron-emitting devices are arranged on a substrate and wired in a simple matrix is as shown in FIGS.

  Next, with reference to FIG. 19, a configuration of an image display device including a display panel 101 in which surface conduction electron-emitting devices according to the present embodiment are arranged will be described.

  In FIG. 19, the display panel 101 is externally driven through row wiring terminals Dx1 to DxM connected to the row wiring in the display panel 101 and column wiring terminals Dy1 to DyN connected to the column wiring of the display panel 101. Connected to the circuit. Among these, for the row wiring terminals Dx1 to DxM, a multi-electron source provided in the display panel 101, that is, a surface conduction electron-emitting device wired in a matrix of M rows and N columns is sequentially selected row by row. A scanning signal for driving is input from the scanning circuit 102. On the other hand, to the column wiring terminals Dy1 to DyN, electrons emitted from the respective elements of the surface conduction electron-emitting devices in one row selected by the scanning signal applied from the scanning circuit 102 to the row wiring are inputted video signal signals. A modulation signal for controlling in accordance with is applied.

  The control circuit 103 has a function of matching the operation timing of each unit so that appropriate display is performed based on a video signal input from the outside. Here, the video signal 120 input from the outside includes, for example, a case where image data and a synchronization signal are combined like an NTSC signal, and a case where both are separated in advance. The latter case will be described. For the former video signal, a well-known synchronization separation circuit is provided to separate the image data and the synchronization signal Tsync, and the image data is input to the shift register 104 and the synchronization signal is input to the control circuit 103. It can be handled in the same manner as in the embodiment.

  Here, the control circuit 103 generates control signals such as a horizontal synchronization signal Tscan, a latch signal Tmry, and a shift signal Tsft for each unit based on a synchronization signal Tsync input from the outside.

  Image data (luminance data) included in a video signal input from the outside is input to the shift register 104. The shift register 104 is used for serial / parallel conversion of image data serially input in time series in units of one line of an image. The shift register 104 is used as a control signal (shift signal) Tsft input from the control circuit 103. Synchronously input and hold the image data serially. Image data for one line (corresponding to drive data for N electron-emitting elements) converted into parallel signals by the shift register 104 is output to the latch circuit 105 as parallel signals Id1 to IdN.

  The latch circuit 105 is a storage circuit for storing and holding image data for one line for a necessary time, and stores parallel signals Id1 to IdN according to the control signal Tmry sent from the control circuit 103. The image data thus stored in the latch circuit 105 is output to the pulse width modulation circuit 106 as parallel signals I′d1 to I′dN. The pulse width modulation circuit 106 has a constant amplitude (voltage value) according to the parallel signals I′d1 to I′dN and a voltage signal whose pulse width is modulated according to the image data (I′d1 to I′dN). Are output as I ″ d1 to I ″ dN.

  More specifically, the pulse width modulation circuit 106 outputs a voltage pulse having a wider pulse width as the luminance level of the image data is larger. For example, the pulse width modulation circuit 106 outputs 30 μsec for the maximum luminance and 0 for the minimum luminance. A voltage pulse having an amplitude of 7.5 [V] is output. The output signals I ″ d1 to I ″ dN are applied to the column wiring terminals Dy1 to DyN of the display panel 101.

  Further, for example, a DC voltage Va of 5 kV is supplied from the acceleration voltage source 109 to the high voltage terminal Hv of the display panel 101.

  Next, the scanning circuit 102 will be described. The scanning circuit 102 includes M switching elements therein, and each switching element selects either the output voltage of the DC voltage source Vx or 0 [V] (ground level), and the display panel 101 The terminals Dx1 to DxM are electrically connected. Switching of these switching elements is performed based on a control signal Tscan output from the control circuit 103, but in practice, it can be easily configured by combining switching elements such as FETs. The DC voltage source Vx is set to output a constant voltage so that the drive voltage applied to the element not scanned based on the characteristics of the electron-emitting element illustrated in FIG. 18 is equal to or lower than the electron-emission threshold voltage Vth voltage. Has been. The control circuit 103 has a function of matching the operation of each unit so that appropriate display is performed based on an image signal input from the outside.

  The shift register 104 and the line memory 105 can be either a digital signal type or an analog signal type. That is, it is only necessary to perform serial / parallel conversion and storage of the image signal at a predetermined speed.

  In the image display apparatus of the present embodiment that can have such a configuration, electron emission occurs by applying a voltage to each electron-emitting device via the external terminals Dx1 to DxM and Dy1 to DyN. Further, a high voltage is applied to the metal back 1019 or the transparent electrode (not shown) via the high voltage terminal Hv to accelerate the electron beam. The accelerated electrons collide with the fluorescent film 1018, and light is emitted to form an image.

  The configuration of the image display apparatus described here is an example of an image forming apparatus applicable to this embodiment, and various modifications can be made based on the idea of the present invention. The NTSC system is used for the input signal. However, the input signal is not limited to this. In addition to the PAL, SECAM system, etc., the TV signal composed of a larger number of scanning lines (high-definition TV including the MUSE system). The system can also be adopted.

  Hereinafter, specific examples of the embodiment of the present invention will be described in further detail.

  In each of the embodiments described below, as a multi-electron source, N × M surface conduction electron-emitting devices (N = 3072, M = 1024) having the electron emission portion in the conductive fine particle film between the electrodes described above, A multi-electron source in which M rows of wiring and N columns of wiring were arranged in a matrix (see FIG. 7) was used.

Example 1
The spacer 20 used in Example 1 was prepared as follows.

  A soda lime glass of the same quality as the face plate and the rear plate 1015 is used as a spacer base material, and as shown in FIGS. 1A, 1B, and 3D, as a cross-sectional shape by the heat drawing method shown in FIG. A spacer base 21 was obtained. FIG. 1B is an enlarged view of the end of the side surface in the thickness direction of the spacer base 21 surrounded by a circle in FIG.

  Here, as shown in FIG. 26, the spacer base 21 prepared in Example 1 had a height: H of 3 mm, a thickness: D of 0.2 mm, and a length: L of 40 mm. As the glass base material 501 used in Example 1, flat soda lime glass having a height: H of 150 mm and a thickness: D of 10 mm was used as shown in FIG. Further, the feeding speed v1 is 4 microns / minute and the drawing speed v2 is 10 mm / minute so that the cross-sectional area ratio between the base material 501 and the spacer base 21 to be finally obtained is 1: 1/2500. Set. At this time, the heating temperature by the heater 502 was set to 600 ° C., and after the drawing step, cutting was performed so that the length L was 40 mm.

  In addition, the corner of the spacer base 21 obtained by the heating and stretching method had a radius of curvature r of 0.02 mm. The height: H, thickness: D, and length: L have the same definitions as those described using FIG.

  Hereinafter, with reference to FIG. 2, a procedure for creating the low resistance film (electrode) 25 by the transfer dipping method will be described.

  First, a bar coat made of (RK print-instrumental corp.) On a 100 × 100 × 5 ton thick glass glass 2001 that has been chemically cleaned with pure water, IPA and acetone and then UV ozone cleaned. In the apparatus. An organometallic salt-dissolved Pt paste (viscosity 30 kcps) manufactured by E. Chemcat: N.E.Chemcat was developed into a thin film as shown in FIG. At this time, the film thickness of the developing solution 2002 is 40 microns, and the spacer substrate 21 is formed on the developing film on the surface (end surface) of 40 mm × 0.2 mm as shown in FIGS. After being dipped vertically in a direction parallel to the development surface, the film was dipped and then transferred vertically.

  The series of operations of the development immersion transfer is performed once on the opposite surface (end surface), then dried at 120 ° C. for 10 minutes, and then baked at 600 ° C. for 10 minutes. 1 were formed as shown in FIGS. 1C and 1D. FIG. 1D is an enlarged view of the end portion of the spacer surrounded by a circle in FIG.

  At this time, the height h of the low resistance film (electrode) 25 was about 200 microns. At this time, the surface resistance of the low resistance film (electrode) 25 was 1 [Ω / □]. Thereafter, a Cr-Al alloy nitride film having a film thickness of 200 nm was formed on the surface of the spacer base 21 as a high resistance film 22 by simultaneously sputtering a Cr and Al target with a high frequency power source. The sputtering gas at this time is a mixed gas of Ar: N2 of 1: 2, and the total pressure is 1 m [torr]. The surface resistance R of the film formed simultaneously under the above conditions was 2 × 10 9 [Ω / □]. The present invention is not limited to this, and various materials and manufacturing methods of the high resistance film 22 can be used in the first embodiment. The spacer 20 created in this way is referred to as a spacer 20a.

  In the low resistance film (electrode) 25 portion of the spacer 20 thus obtained, gloss reflection was recognized, and the boundary region between the end surface and the side surface of the spacer base 21, that is, the corner portion was not partially peeled off. The covering property of the low resistance film (electrode) 25 was good.

  In Example 1, the display panel 101 having the spacers 20 as shown in FIG. 7 described above was manufactured.

  Hereinafter, a method for manufacturing the display panel 101 will be described in detail.

  First, a substrate 1011 in which row-direction wiring electrodes 1013, column-direction wiring electrodes 1014, interelectrode insulating layers (not shown), element electrodes 1102 and 1103 of surface conduction electron-emitting devices and a conductive thin film 1104 are formed on a substrate 1011 in advance. And fixed to the rear plate 1015. Next, the spacers 20 produced as described above were fixed on the row direction wiring 1013 of the substrate 1011 at regular intervals in parallel with the row direction wiring 1013. Thereafter, a face plate 1017 having a fluorescent film 1018 and a metal back 1019 provided on the inner surface is disposed via a side wall 1016 approximately 3 mm above the substrate 1011, and each of the rear plate 1015, the face plate 1017, the side wall 1016, and the spacer 20 is arranged. The joint was fixed. The joint portion between the substrate 1011 and the rear plate 1015, the joint portion between the rear plate 1015 and the side wall 1016, and the joint portion between the face plate 1017 and the ten side wall 1016 are coated with frit glass (not shown), and 400 ° C. to 500 ° C. in the atmosphere. Sealing was performed by baking at 10 ° C. for 10 minutes or more. The spacer 20 is formed on the row direction wiring 1013 (line width of about 300 [micrometers]) on the substrate 1011 side, on the metal back 1019 surface on the face plate 1017 side, and on a conductive material such as a conductive filler or metal. It is placed through a conductive frit glass (not shown) mixed with the above, and at the same time as sealing the above airtight container, it is bonded and electrically connected by firing at 400 ° C. to 500 ° C. for 10 minutes or more in the atmosphere. Also went.

  In the first embodiment, as shown in FIG. 10A, the fluorescent film 1018 employs a stripe shape in which each color phosphor extends in the column direction (Y direction), and the black conductor 1010 has each color fluorescence. The pixels are arranged not only between the bodies (R, G, B) but also between the pixels in the Y direction. The spacer 20 was disposed in a black conductor 1010 (line width of about 300 [micrometers]) parallel to the row direction (X direction) via a metal back 1019. Note that, when performing the above-described sealing, each color phosphor and each element arranged on the substrate 1011 must correspond to each other, so that the rear plate 1015, the face plate 1017, and the spacer 20 are sufficiently aligned. Went.

  The airtight container completed as described above is exhausted by a vacuum pump through an exhaust pipe (not shown), and after reaching a sufficient degree of vacuum, the row direction wiring electrodes are passed through the container external terminals Dx1 to DxM and Dy1 to DyN. A multi-electron source was manufactured by supplying power to each element via the line 1013 and the column direction wiring electrode 1014 and performing the above-described energization forming process and energization activation process. Next, the exhaust pipe (not shown) was welded by heating with a gas burner at a degree of vacuum of about 10 to the sixth power [torr], and the envelope (airtight container) was sealed. Finally, a getter process was performed to maintain the degree of vacuum after sealing.

  In the image display apparatus using the display panel 101 as shown in FIG. 7 completed as described above, each cold cathode element (surface conduction type emitting element) 1012 has external terminals Dx1 to DxM, Dy1 to DyN. Through which a scanning signal and a modulation signal are applied to emit electrons, and a high voltage is applied to the metal back 1019 through a high voltage terminal Hv to accelerate the emitted electron beam to collide electrons with the fluorescent film 1018. Images were displayed by exciting and emitting each color phosphor (R, G, B in FIG. 10). The applied voltage Va to the high voltage terminal Hv is applied up to a limit voltage at which discharge occurs in the range of 3 [kV] to 12 [kV], and the applied voltage Vf between the wirings 1013 and 1014 is 14 [V]. did. It was judged that the withstand voltage was good when the voltage could be continuously driven by applying a voltage of 8 kV or higher to the high voltage terminal Hv.

  At this time, no discharge occurred up to 9 kV drive in the vicinity of the spacer 20. Furthermore, two-dimensionally arranged light emitting spot rows including two-dimensional light emitting spots including the emitted light spots emitted from the cold cathode elements 1012 located close to the spacer 20 were formed, and a clear color image display with good color reproducibility was achieved. This indicates that even when the spacer 20 is installed, the electric field disturbance that affects the electron trajectory did not occur.

(Example 2)
Using the spacer base 21 prepared in Example 1 described above, a developing solution for applying the low resistance film (electrode) 25 is developed by a 40-micron gap gauge arranged in parallel with a stainless steel doctor blade having a thickness of 0.2 t. Except for this, a low resistance film (electrode) 25 having a height h of 200 microns is formed in the same manner as in the manufacturing method of the first embodiment, and the high resistance film by sputtering is further processed in the same manner as in the first embodiment. 22 was created. The spacer 20 thus created is referred to as a spacer 20b. The low resistance film (electrode) 25 portion of the spacer 20 thus obtained was recognized to have gloss reflection, and the boundary region between the end surface and the side surface of the spacer substrate 21, that is, the corner portion was not partially peeled off. The covering property of the low resistance film (electrode) 25 was good.

  Further, similarly to Example 1, a display panel 101 was prepared together with a rear plate or the like incorporating an electron beam emitting element, and high voltage application and element driving were performed under the same conditions as in Example 1.

  At this time, no discharge occurred up to 9 kV drive in the vicinity of the spacer 20. Furthermore, two-dimensionally arranged light emitting spot rows including two-dimensional light emitting spots including the emitted light spots emitted from the cold cathode elements 1012 located close to the spacer 20 were formed, and a clear color image display with good color reproducibility was achieved. This indicates that even when the spacer 20 is installed, the electric field disturbance that affects the electron trajectory did not occur.

(Example 3)
Except for using the spacer substrate 21 prepared in Example 1 and diluting the developing solution for applying the low resistance film (electrode) 25 with a terpene solvent and developing the solution by spin coating, the above-mentioned Example 1 A low resistance film (electrode) 25 having a height h of 10 microns was prepared in the same manner as the preparation method, and a high resistance film 22 was formed by sputtering in the same manner as in Example 1. The spacer 20 thus created is referred to as a spacer 20c. The viscosity of the developing solution diluted at this time was 1 kcP. The low resistance film portion 25 of the spacer 20 obtained in this way has gloss reflection, and there is no partial peeling at the boundary region between the end surface and the side surface of the spacer base 21, that is, the corner portion. The coverage of the electrode 25 was good. Further, in the same manner as in Example 1, a display panel was prepared together with a rear plate or the like incorporating an electron beam emitting element, and high voltage application and element driving were performed under the same conditions as in Example 1.

  At this time, no discharge occurred up to 10 kV drive in the vicinity of the spacer 20. Furthermore, two-dimensionally arranged light emitting spot rows including two-dimensional light emitting spots including the emitted light spots emitted from the cold cathode elements 1012 located close to the spacer 20 were formed, and a clear color image display with good color reproducibility was achieved. This indicates that even when the spacer 20 is installed, the electric field disturbance that affects the electron trajectory did not occur.

Example 4
Using the spacer substrate 21 prepared in Example 1 above, a developing solution for coating a low resistance film is dispersed in a silica binder with Sb-doped tin oxide fine particles manufactured by Sumitomo Osaka Cement Co., Ltd. and having an average particle size of 10 nm. A low resistance film (electrode) 25 having a height of 100 microns was prepared in the same manner as in the production method of Example 1 except that the developed solution was developed by bar coating. Further, high resistance was obtained by sputtering in the same manner as in Example 1. A membrane 22 was created. The spacer 20 thus created is referred to as a spacer 20d. At this time, the viscosity of the developing solution was 10 cP. The portion of the low resistance film (electrode) 25 of the spacer 20 thus obtained was recognized to have gloss reflection, and the boundary region between the end surface and the side surface of the spacer substrate 21, that is, the corner portion had no partial peeling. The coverage of the low resistance film (electrode) 25 was good. Further, in the same manner as in Example 1, a display panel 101 was prepared together with a rear plate or the like incorporating an electron beam emitting element, and high voltage application and element driving were performed under the same conditions as in Example 1.

  At this time, no discharge occurred up to 9 kV drive in the vicinity of the spacer 20. Furthermore, two-dimensionally arranged light emitting spot rows including two-dimensional light emitting spots including the emitted light spots emitted from the cold cathode elements 1012 located close to the spacer 20 were formed, and a clear color image display with good color reproducibility was achieved. This indicates that even when the spacer 20 is installed, the electric field disturbance that affects the electron trajectory did not occur.

(Example 5)
A low resistance film (electrode) 25 was prepared in exactly the same manner as in Example 1 using the spacer substrate 21 prepared in Example 1. Then, this low resistance film (electrode) 25 was partially etched from the side surface in the thickness direction of the spacer base 21 to a position of 150 microns as a distance: h ′ using aqua regia heated to 80 ° C. as an etchant (electrode 25 Processing (removal) process). At the same time, the corners of the low resistance film were also patterned to have a curvature (FIGS. 32 and 33). In this manner, a low resistance film (electrode) 25 having a height h ′ of 150 microns was formed, and a high resistance film 22 was formed by sputtering in the same manner as in Example 1. The spacer 20 created in this way is referred to as a spacer 20e. The low resistance film (electrode) 25 portion of the spacer 20e obtained at this time was recognized to have gloss reflection, and the boundary region between the end surface and the side surface of the spacer base 21, that is, the corner portion was also partially peeled off. In addition, the coverage of the low resistance film (electrode) 25 was good. Further, in the same manner as in Example 1, a display panel 101 was prepared together with a rear plate or the like incorporating an electron beam emitting device, and high voltage application and device driving were performed under the same conditions as in Example 1.

  At this time, no discharge occurred in the vicinity of the spacer 20 up to 10 kV drive. Furthermore, two-dimensionally arranged light emitting spot rows including two-dimensional light emitting spots including the emitted light spots emitted from the cold cathode elements 1012 located close to the spacer 20 were formed, and a clear color image display with good color reproducibility was achieved. This indicates that even when the spacer 20 is installed, the electric field disturbance that affects the electron trajectory did not occur.

(Example 6)
The processing (removal) step of the electrode 25 of Example 5 was performed with a laser processing apparatus on the spacer 20 in which the resistance film (electrode) 25 was formed by the same method as in Example 5 described above. The shape of the electrode 25 after processing is the same as in Example 5. In this way, a low resistance film (electrode) 25 was prepared, and a high resistance film 22 was obtained by sputtering in the same manner as in Example 1. The spacer 20 thus created is referred to as a spacer 20f. The low resistance film (electrode) 25 portion of the spacer 20 obtained at this time was recognized to have gloss reflection, and the boundary region between the end surface and the side surface of the spacer base 21, that is, the corner portion was also partially peeled off. In addition, the covering property of the resistance film (electrode) 25 was good.

  Further, in the same manner as in Example 1, a display panel 101 was prepared together with a rear plate or the like incorporating an electron beam emitting element, and high voltage application and element driving were performed under the same conditions as in Example 1. At this time, no discharge occurred up to 10 kV drive in the vicinity of the spacer 20. Furthermore, two-dimensionally arranged light emitting spot arrays including a light emitting spot due to emitted electrons from the cold cathode element 1012 located close to the spacer 2f were formed, and a clear color image display with good color reproducibility was achieved. . This indicates that even when the spacer 20 is installed, the electric field disturbance that affects the electron trajectory did not occur.

(Example 7)
Soda lime glass of the same quality as the face plate and rear plate 1015 is used as a spacer base material, and the height: H, thickness: D, and length: L specified in FIG. 26 are 3 mm by the heating and stretching method shown in FIG. A spacer base 21 of 0.2 mm, 40 mm was formed. In the present example, a spacer base having a radius of curvature r of 4 microns was prepared by the above-described heating and stretching method (FIG. 26, FIG. 3D).

  Thereafter, a low resistance film (electrode) 25 having a height of 200 microns was formed by the same manufacturing method as in Example 1, and a high resistance film 22 was formed by sputtering in the same manner as in Example 1. The spacer 20 thus created is referred to as a spacer 20g. The low resistance film (electrode) 25 portion of the spacer 20 obtained at this time showed glossy reflection, and there was no partial peeling at the boundary region between the end surface and the side surface of the spacer substrate 21, that is, the corner portion. The covering property of the low resistance film (electrode) 25 was good.

  Further, in the same manner as in Example 1, a display panel 101 was prepared together with a rear plate or the like incorporating an electron beam emitting device, and high voltage application and device driving were performed under the same conditions as in Example 1. At this time, no discharge occurred up to 10 kV drive in the vicinity of the spacer 20. Furthermore, two-dimensionally arranged light emitting spot rows including two-dimensional light emitting spots including the emitted light spots emitted from the cold cathode elements 1012 located close to the spacer 20 were formed, and a clear color image display with good color reproducibility was achieved. This indicates that even when the spacer 20 is installed, the electric field disturbance that affects the electron trajectory did not occur.

(Example 8)
An alumina substrate in which a boundary between the end surface and the side surface of the spacer base 21, that is, a corner portion was subjected to a taper process in a region of 10 microns from the edge by 45 degrees was used as a spacer substrate (FIG. 3A). A low resistance film (electrode) 25 having a height of 200 microns was formed on this substrate by the same production method as in Example 1, and a high resistance film 22 was formed by sputtering in the same manner as in Example 1. The spacer 20 created in this way is referred to as a spacer 20h. The low resistance film (electrode) 25 portion of the spacer 20 obtained at this time showed gloss reflection, and there was no partial peeling at the boundary region, that is, the corner portion between the end surface and the side surface of the spacer base 21, and the low resistance film (electrode) 25 The coverage of the resistance film (electrode) 25 was good.

  Further, in the same manner as in Example 1, a display panel 101 was prepared together with a rear plate or the like incorporating an electron beam emitting element, and high voltage application and element driving were performed under the same conditions as in Example 1. At this time, no discharge occurred up to 10 kV drive in the vicinity of the spacer 20. Furthermore, two-dimensionally arranged light emitting spot arrays including a light emitting spot due to emitted electrons from the cold cathode element 1012 located close to the spacer 20 were formed, and a clear color image display with good color reproducibility was achieved. . This indicates that even when the spacer 20 is installed, the electric field disturbance that affects the electron trajectory did not occur.

Example 9
The boundary between the end surface and the side surface of the spacer base 21 made of blue plate glass, that is, the corner portion was subjected to a taper process to a region of 10 microns from the edge by 45 ° (FIG. 3A).

  A low resistance film (electrode) 25 having a height of about 200 microns was formed on the spacer base 21 by the same manufacturing method as in Example 1, and a high resistance film 22 was formed by sputtering in the same manner as in Example 1. The spacer 20 thus created is referred to as a spacer 20i. The low resistance film (electrode) 25 portion of the spacer 20 obtained at this time showed gloss reflection, and there was no partial peeling at the boundary region between the end surface and the side surface of the spacer substrate 21, that is, at the corner. The coverage of the low resistance film (electrode) 25 was good.

  Further, in the same manner as in Example 1, a display panel 101 was prepared together with a rear plate or the like incorporating an electron beam emitting device, and high voltage application and device driving were performed under the same conditions as in Example 1. At this time, no discharge occurred up to 10 kV drive in the vicinity of the spacer 20. Furthermore, two-dimensionally arranged light emitting spot rows including two-dimensional light emitting spots including the emitted light spots emitted from the cold cathode elements 1012 located close to the spacer 20 were formed, and a clear color image display with good color reproducibility was achieved. This indicates that even when the spacer 20 is installed, the electric field disturbance that affects the electron trajectory did not occur.

(Example 10)
In this embodiment, as shown in FIG. 26, a soda-lime glass substrate polished so that all six surfaces (side surfaces, end surfaces, side surfaces in the thickness direction) of the spacer substrate 21 are arranged at right angles to each other by a polishing process is used. 21. A low resistance film (electrode) 25 having a height of 200 microns was formed on the spacer base 21 by the same manufacturing method as in Example 1, and a high resistance film 22 was formed by sputtering in the same manner as in Example 1. The spacer 20 created in this way is referred to as a spacer 20j. The low resistance film (electrode) 25 portion of the spacer 20 obtained at this time showed glossy reflection, and the coverage of the (electrode) 25 in the boundary region between the end surface and the side surface of the spacer base 21 was partially poor. It was.

  Further, in the same manner as in Example 1, a display panel 101 was prepared together with a rear plate or the like incorporating an electron beam emitting device, and high voltage application and device driving were performed under the same conditions as in Example 1. At this time, when the high voltage applied to the metal back was raised up to 10 kV in the vicinity of the spacer 20 as in the other examples, discharge was partially observed. When the high voltage applied to the metal back is up to 8 kV, two-dimensionally spaced light emitting spot arrays are formed, including light emitting spots due to emitted electrons from the cold cathode element 1012 located close to the spacer 20j, and it is clear and color A color image with good reproducibility was displayed. This indicates that even when the spacer 20 is installed, the disturbance of the electric field that affects the electron trajectory does not occur until the high voltage applied to the metal back is 8 kV. As described above, the disorder of the light emitting point was not recognized even though the coverage of the corner portion was partially poor because the low resistance film portion of most of the remaining portion was in good contact. It is understood that the common potential at the upper end of the low resistance film was maintained.

(Reference example)
In this comparative example, the spacer base 21 having a right angle shown in FIG. 26 was used. The low resistance film (electrode) 25 was produced by the method shown in FIG. The process will be specifically described below.

  A plurality of spacer bases 21 are fixed such that both side surfaces of the spacer base 21 are sandwiched between glass fixing jigs 2012 (FIG. 6A). Here, the thickness D1 of the glass fixing jig 2012 is 1.1 mm, the height H1 is 2.8 mm, and the length L1 is 42 mm. The spacer base body has a thickness D of 0.2 mm, a height H of 3 mm, and a length L of 40 mm.

  Then, a Ti film 2013 having a thickness of 10 nm is formed on the end portion of the spacer base exposed from the glass fixing jig 2012, and a Pt film 2013 having a thickness of 200 nm is formed in a vapor phase by sputtering (FIG. 6B). ), (C)). Through this process, a low resistance film (electrode) 25 having a height of 200 μm was formed.

  In the same manner as in the above process, a low resistance film (electrode) 25 was formed on the opposite end of the spacer base 21 (FIG. 6D).

  In the above process, the Ti film was necessary as an underlayer for reinforcing the film adhesion of the Pt film. Thereafter, in the same manner as in Example 1, a high resistance film 22 made of spack was produced.

  The spacer 20 created in this way is referred to as a spacer 20k. In the low resistance film (electrode) 25 portion of the spacer 20 obtained at this time, gloss reflection was observed, and a partial peeling occurred in the boundary region between the end surface and the side surface of the spacer base 21, that is, the corner portion. It was.

  Further, in the same manner as in Example 1, a display panel 101 was prepared together with a rear plate or the like incorporating an electron beam emitting device, and high voltage application and device driving were performed under the same conditions as in Example 1. At this time, no discharge occurred up to 7 kV drive in the vicinity of the spacer 20. Furthermore, two-dimensionally arranged light emitting spot rows including two-dimensional light emitting spots including the emitted light spots emitted from the cold cathode elements 1012 located close to the spacer 20 were formed, and a clear color image display with good color reproducibility was achieved. This indicates that even when the spacer 20 is installed, the electric field disturbance that affects the electron trajectory did not occur.

  Regarding the spacers 20a to 20j formed with the low resistance films (electrodes) 25 and the spacers 20k prepared in the above-described examples and the spacers 20k prepared in the above reference examples, this preparation method, electrical contact, emission point displacement, and discharge resistance When the spacer 20k of the reference example forms the low-resistance film (electrode) 25, not only a vacuum decompression device is required, but the sputtering with Pt alone has a problem in adhesion to the glass substrate. A separate process for providing the underlayer is required.

  In addition, the withstand voltage is slightly lower than that of the low resistance film (electrode) 25 formed by transfer dipping shown in this embodiment. This is a taper-shaped cross section in which the film thickness distribution of the low resistance film (electrode) 25 formed by transfer dipping is thinned toward the periphery, whereas the low resistance film (electrode) at the patterned end is formed in the sputtered film. ) The corners of 25 have a right-angle cross-section, or protrusions such as burrs are generated toward the outer space of the spacer when peeling from the mask, so that the electric field tends to concentrate on those protrusions in the electron source. It seems to be.

  Also, the withstand voltage and beam emission position of the spacer 20j were good, but it was confirmed that the coverage of the low resistance film (electrode) 25 was low at the corners of the spacer base 21, and the yield during mass production was high. From the above, it can be seen that the R treatment at the corners of the spacer base 21 is effective for improving the coverage.

  The low resistance film (electrode) 25 formed according to the present embodiment has a simple and easy production process, and the obtained low resistance film (electrode) 25 has good electrical contact, and Since the discharge withstand voltage is also good, the display quality by the electron beam can be improved. Further, it is particularly effective for a manufacturing process that requires mass productivity and low cost, and an electron source that uses the manufacturing process.

As described above, as an effect of forming a liquid phase forming method as a forming method of the low resistance film (electrode) 25 in the present embodiment, a vacuum decompression step is not required.
(1) Equipment costs can be reduced
(2) Tact time can be suppressed Low resistance film (electrode) 25 is in a metastable state after exhaust, decompression, film formation, and air leak, and low resistance is achieved by depositing another member in an unstable transient state. Problems such as peeling off of the film (electrode) 25 may occur, and it was necessary to relax the film to a stable state. This is considered to be related to the structure and surface activity of the low-resistance film (electrode) 25, but is considered to be particularly related to stabilization of water desorption. However, by adopting heating and baking without going through a vacuum process, the passage of these unstable states can be suppressed.
(3) High utilization efficiency of raw materials etc. Moreover, as an effect by making the boundary area | region (corner part) between the end surface and side surface of the spacer base | substrate 21 into a smooth continuous surface, such as performing circular arc processing, a corner | angular part, That is, the coverage of the low resistance film (electrode) 25 in the boundary region between the end surface and the side surface of the spacer base 21 can be improved.

  For this reason, the low resistance film (electrode) 25 is not divided at the end face and the side face of the spacer base 21, and good electrical contact on both sides can be obtained. When the spacer is incorporated as an electron source, the spacer The surface charge can be efficiently released to the FP and RP substrate surfaces.

  As described above, it is possible to obtain a simple and low-cost production process. This further reduces the manufacturing cost of the spacer and the electron source, and provides an image display device with high display quality, in which the displacement of the light emitting portion due to charging is suppressed, at a low cost.

It is a figure explaining the shape of the spacer which concerns on embodiment of this invention. It is a figure which shows the method to provide the low resistance film | membrane of the spacer which concerns on this Embodiment. It is a figure explaining the cross-sectional shape of the board | substrate of the spacer which concerns on this Embodiment, and the provision state of a low resistance film. It is a figure explaining prescription | regulation of the dimension of the formation part of the low resistance film | membrane of the spacer which concerns on this Embodiment. It is a figure explaining the heat | fever extending | stretching apparatus of the spacer which concerns on this Embodiment. It is explanatory drawing of the vapor phase formation process of the low resistance film | membrane used for the comparative example with embodiment of this invention. It is the external appearance perspective view which notched and showed a part of display panel of the image display apparatus which concerns on embodiment of this invention. It is a top view of the board | substrate of the multi-electron source used in this Embodiment. It is AA 'sectional drawing of the board | substrate of the multi electron source of FIG. It is the top view which illustrated fluorescent substance arrangement of the faceplate of the display panel of this embodiment. It is AA 'sectional drawing of the display panel of FIG. 2A is a plan view of a planar surface conduction electron-emitting device used in the present embodiment, and FIG. It is sectional drawing which shows the manufacturing process of the planar type surface conduction electron-emitting device which concerns on this Embodiment. It is a figure which shows the applied voltage waveform in the case of an energization forming process. It is a figure which shows the change (b) of the applied voltage waveform (a) in the case of an energization activation process, and the discharge current Ie. 2 is a cross-sectional view of a vertical surface conduction electron-emitting device used in the present embodiment. FIG. It is sectional drawing explaining the manufacturing process of a vertical type surface conduction electron-emitting device. It is a graph which shows the typical characteristic of the surface conduction type | mold emission element used by this Embodiment. It is a block diagram which shows the structure of the drive circuit of the image display apparatus of embodiment of this invention. It is a figure which shows an example of the conventionally known surface conduction electron-emitting device. It is a figure which shows an example of the FE type element known conventionally. It is a figure which shows an example of the conventionally known MIM type | mold element. It is a schematic diagram which shows the example which attached the low resistance film | membrane to the spacer. It is a cross-sectional schematic diagram in the AA part of FIG. It is the figure which showed the edge part of the spacer typically. It is a perspective view of a spacer base or a spacer. It is a schematic diagram which shows the example which attached the low resistance film | membrane to the spacer. It is a schematic diagram which shows the method of cutting out a spacer base material from a base material. It is a schematic diagram which shows an example of the formation method of the electrode to the spacer base | substrate which concerns on this Embodiment. It is a schematic diagram which shows an example of the manufacturing apparatus of the spacer base | substrate which concerns on this Embodiment. It is a perspective view of a spacer base or a spacer. It is a schematic diagram showing the mode of processing of a low resistance film. It is a schematic diagram showing the mode of processing of a low resistance film.

Claims (6)

Manufacturing of an image forming apparatus having a first substrate on which an image forming member is disposed, a second substrate on which an electron-emitting device is disposed, and a spacer disposed between the first and second substrates. A method,
Preparing a spacer base material;
Processing a corner portion of the spacer base material into a planar shape or an arc shape, and forming a spacer base;
An application step of applying a liquid in which a conductive material is dispersed or dissolved to an end portion of a spacer base including a corner portion processed into a planar shape or an arc shape , and
Heating the applied liquid on the end of the spacer substrate, and forming an electrode on an end portion of the spacer substrate,
Contacting the electrode formed on the end of the spacer base with the first substrate or the second substrate;
A method of manufacturing an image forming apparatus, comprising: The spacer base has a flat plate shape, and the end of the spacer base on which the electrodes are formed is cut in a plane substantially parallel to the first substrate or the second substrate , and the spacer base is short in cross section. The thickness in the side direction is t,
The electrode covers in a cross section when the end of the spacer base on which the electrode is formed is cut by the surface in the short side direction substantially perpendicular to the first substrate or the second substrate. When the length of the surface of the spacer base is s and the height of the electrode from the first substrate or the second substrate is h,
(T ² + 4 × h ² ) <s ² <(t + 2h) ²
The method of manufacturing an image forming apparatus according to claim 1, wherein:   The method of manufacturing an image forming apparatus according to claim 1, wherein the liquid in which the conductive material is dispersed or dissolved has a viscosity of 10 cps or more.   The method of manufacturing an image forming apparatus according to claim 1, wherein the liquid in which the conductive material is dispersed or dissolved has a viscosity of 100 cps or more.   The method for manufacturing an image forming apparatus according to claim 1, wherein the liquid in which the conductive material is dispersed or dissolved has a viscosity of 1000 cps or more.   6. The method of manufacturing an image forming apparatus according to claim 1, further comprising a step of forming a film having a higher resistance than the electrode on the surface of the spacer base.

Images