JP3902360B2 - Magazine support device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To surely support a magazine both, with respect to generation of vibrations, etc., and a high weight of the magazine. SOLUTION: This magazine supporter displace the elevation of a magazine 1 along a guide rail 3 for guiding the displacement of the elevation of the magazine 1, and there is also provided a fork 4 for dropping the magazine 1, which ended in fetching a workpiece 2 to a feed-out position, and further there is provided a clamper 10, which presses the magazine 1 positioned directly above the lowermost step magazine against the guide rail 3, and further there is provided a vibration detent 14, which advances the lower face side of the remaining magazines 1, immediately after the downmost step magazine 1 separates downwardly of the remaining magazines 1 under action of the clamper 10.

Description

[0001]
BACKGROUND OF THE INVENTION
In the present invention, for example, in a semiconductor manufacturing process or the like, a plurality of plate-like workpieces stored therein are sequentially fed to a processing or processing apparatus from each stacked magazine to perform a predetermined processing or the like. In this case, the present invention relates to a magazine support device suitable for use in sending an empty magazine to the outside, and sufficiently removes the possibility of the magazine waiting for workpiece removal being dropped.
[0002]
[Prior art]
For example, delivery of workpieces between processes in a semiconductor manufacturing process is generally performed in units of magazines that store a plurality of workpieces in a state where the workpieces are positioned and supported. In each process, the workpieces are transferred from the previous process. Each workpiece taken out from the magazine is subjected to predetermined processing and the like, and then stored in the magazine again and transported to the next process.
[0003]
In this case, it is preferable that the plurality of magazines storing and holding the workpieces in each process are always on standby in order to increase productivity, and each magazine has been processed when all the stored workpieces are taken out. In order to receive the processed workpiece, the workpiece is delivered from the workpiece removal position to a storage position for the processed workpiece or the like.
[0004]
By the way, it is usual for a plurality of magazines supplied to each process to stand by in a stacked state for taking out workpieces from the magazines, and conventionally, the downward displacement of the stacked magazines is guided by a guide rail. At the same time, the forks that support these magazines are moved up and down along the guide rails by a motor, etc., so that each magazine is displaced to the workpiece removal position, and all magazines that have been unloaded are removed from the magazine. It is supposed to be moved down to the delivery position.
[0005]
Here, the removal of the workpiece from the magazine is performed sequentially from the lowest position of the magazine located at the bottom to the upper side, and the removed workpiece is fed to the processing section via the transport rail. However, since the height of the transport rail is fixed, when the workpiece is taken out, the height of the magazine is adjusted by a fork so that the workpiece height in the magazine becomes equal to the rail height. The empty magazine is delivered from the workpiece removal position by pressing and holding the magazine located immediately above the empty magazine against the guide rail by a clamper driven in the horizontal direction, and then forking the empty fork. By moving downward together with the magazine, the empty magazine is moved away from the remaining magazines and lowered to the delivery position, where the empty magazine is pushed by pushing it toward the receiving position for processed workpieces. .
[0006]
After the empty magazine has been sent out, the fork again moves up and contacts the lower surface of the magazine held by the side clamper, and supports the remaining magazines under the backward displacement of the clamper. Take over.
[0007]
[Problems to be solved by the invention]
Thus, in the prior art, while the fork is involved in the delivery of an empty magazine, the weight of all remaining magazines containing workpieces is pressed against the guide rail by the clamper on the side of one magazine. The magazine may fall due to a decrease in frictional force due to vibration, etc., and if the magazine is heavy, only the frictional force under the action of the clamper Could not fully support the weight of all magazines.
[0008]
In addition, malfunctions of the clamper's electrical control system, power failure, etc. may prevent the clamper from performing as expected, and in addition, when the clamper is driven by an air cylinder, the supply pressure decreases. There was also the pleasure of blocking.
[0009]
An object of the present invention is to solve such problems of the prior art, and the object of the present invention is firstly against the occurrence of vibration and the like, and also to the weight of the magazine. Magazine support that can achieve reliable support of the magazine even when the size of the magazine increases, and secondly, the magazine can be supported and released as expected even when the above-described situation occurs in the clamper To provide the equipment.
[0010]
[Means for Solving the Problems]
A magazine support device according to the present invention is a fork that moves a magazine up and down along a guide rail that guides up and down displacement of the magazines stacked in a plurality of stages, and lowers and displaces the lowermost magazine after the workpiece has been taken out to a delivery position. For example, a clamper that presses and holds the magazine located immediately above the lowermost magazine on the guide rail until the fork returns to the support of the remaining magazine after the lowermost magazine is fed out to the outside. When the clamper is provided, when the fork supports the magazine stacked in a plurality of stages, the magazine positioned directly above the lowermost magazine supported by the fork is used as a guide rail. under conditions that are pressed by the, as soon as the magazine bottom is spaced below the remainder of the magazine, the remaining Enter the lower surface of the gadget to support the magazine, i.e., to contact the lower surface of the magazine and contribute to the support of the magazine, and be separated from the lower surface of the magazine by the subsequent upward displacement of the fork. A swinging claw configured to be provided is provided.
[0011]
In this support device, when the lowermost magazine after the workpiece has been taken out is lowered to the delivery position thereof, for example by a fork driven by a motor, the magazine located immediately above the magazine is pressed against the guide rail by the clamper. By holding and restraining the fall of all magazines containing workpieces, only the bottom magazine can be moved downward and separated from other magazines. In this case, the separation of the bottom magazine After that, the swinging claw immediately enters the lower surface of the magazine held by the clamper to contact the lower surface of the magazine and contribute to the support of the magazine. The rest of the workpiece is stored by both the moving claw and sometimes the swinging claw that is supported by the clamper. It is possible to reliably support the magazine.
[0012]
Therefore, here, even if the frictional force between the magazine and the clamper and the guide rail is reduced due to vibration or the weight of the magazine is increased, the magazine is placed under the engagement between the swinging claw and the magazine. The fear of falling can be sufficiently removed.
[0013]
However, more preferably in such a supporting device, the swing claw and is directly or indirectly pivoted to the upper end portion in the guide rail, a swing arm having a claw portion that enters displaced to the magazine side to the lower end portion A crank arm that is integrated with the swing arm and protrudes from the upper end of the swing arm to the opposite side of the claw portion, and is provided on the crank arm, and the claw portion is brought into contact with the fork by the magazine. A contact portion that moves backward from the side, a spring member that constantly urges the claw portion toward the magazine, and a stopper that specifies a rotation limit position in the entry direction of the claw portion.
[0014]
According to this, as soon as the lowermost magazine is separated from the other magazine under the action of the fork and the clamper, the claw portion of the swinging claw enters the separation gap by the action of the spring member, and is Abutting on the lower surface of the magazine located directly above the lower magazine, it can contribute to the support of other magazines containing workpieces. At this time, a change in the contact posture of the claw portion with the magazine due to excessive entry of the claw portion into the separation gap and the contact of the swinging arm with the side surface of the magazine, etc. are provided with a stopper. It can be effectively prevented by restricting the action of the member and preventing the pivoting arm from over-rotating.
[0015]
On the other hand, when the fork is lifted and displaced again after the empty magazine is delivered and directly or indirectly contacts the contact portion of the swing claw, the swing claw is The claw is gradually rotated in the direction of retreating from the lower surface of the magazine due to the fork lifting force surpassing the, and the claw is in contact with the bottom surface of the fork when the fork reaches very close to the magazine. At the same time, the engagement with the lower surface of the magazine is released. Therefore, after that, the remaining magazine storing the workpiece is normally supported by both the fork and the clamper, and the magazine is released from the restraint by the clamper when the workpiece in the magazine is taken out. become. Note that the restriction of the magazine by the clamper can be released, for example, at a time after the swinging claw is engaged with the lower surface of the magazine.
[0016]
Therefore, here, both the engagement and release of the swinging claw to the lower surface of the magazine can be mechanically performed without using any electrical control system. Even if a malfunction such as a malfunction occurs in the clamper by operating as expected without being affected by a power failure or the like, the swinging claw can function as a safety device.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a schematic front view of a section showing the embodiment of the present invention, and FIG. 2 is a schematic cross-sectional view taken along line II-II in FIG.
In FIG. 1, reference numeral 1 denotes a magazine. Here, the lowermost magazine 1 that has finished taking out the workpiece is in a state of being displaced downward to the delivery position, and supports the positioning of a plurality of plate-like workpieces 2. The two magazines 1 stored in a waiting state are waiting to be taken out in a stacked state.
In the figure, reference numeral 3 denotes each guide rail that engages with each corner of the magazine 1 that is square in plan view and guides the vertical displacement of the magazine.
[0018]
Here, a fork 4 which is driven by a motor (not shown) and is displaced up and down along the guide rail 3 is provided. The fork 4 is moved up and down by a slider 5 provided on the fork side and a slider provided on the fixed side. 5 and a guide member 6 that engages with the guide member 6. The fork 4 comes into contact with the lower surface of the magazine 1 with the fork pawls 7, supports the magazine 1 and the magazine 1 above it sufficiently stably, moves them up and down to a required position, It functions to lower and displace the lowermost magazine 1 that has finished taking out 2 to its delivery position.
[0019]
Here, this delivery position is lower than the magazine removal position from the magazine, more precisely, from the lower surface of the magazine pressed and held by the guide rail 3 by the action of the clamper described later. Therefore, the empty magazine 1 which is displaced downward by the fork 4 and placed on the delivery rail 8 laid there is surely separated from the upper magazine 1. become. Accordingly, when the empty magazine 1 on the delivery rail 8 is sent to the outside along the delivery rail 8 under the action of the pusher 9, the empty magazine 1 is placed on the upper side where the work 2 is stored. There is no risk of interference with other magazines 1.
[0020]
On the other hand, while the fork 4 is involved in such delivery of the empty bottom magazine 1, the empty magazine 1 is used to prevent the upper magazine 1 containing the workpieces 2 from falling. A side clamper 10 is provided that contacts the side surface of the upper magazine 1 and presses it against the guide rail 3. The side clamper 10 includes, for example, an air cylinder 11 arranged in a horizontal posture, and a pressing plate 12 attached to the rod end of the cylinder 11 and in surface contact with a side surface of the magazine 1 with a required area. The clamper 10 advances and displaces the pressing plate 12 under the action of the air cylinder 11, thereby pressing the magazine 1 against the rail 3 on the opposite side by the pressing plate 12, and the magazine 1 and the upper magazine 1 thereof. This function functions to release the support by reversing the pressing plate 12.
[0021]
In the figure, reference numeral 13 denotes a fixed position conveying rail for guiding the workpiece 2 taken out from the magazine 1 to the processing device or the processing device. As shown in FIG. 1, the transport rail 13 is disposed corresponding to the second work 2 from the bottom in the magazine 1 held by the side clamper 10. , And can be changed as necessary.
[0022]
Further, here, on the side opposite to the side clamper 10 with respect to the guide rail 3, a swinging claw 14 that engages with and supports the lower surface of the magazine 1 pressed and held by the clamper 10 is hinged to the guide rail 3. Provide. The swinging claw 14 includes a swinging arm 15 extending in the vertical direction, a claw 16 provided at the lower end of the swinging arm 15 and protruding toward the magazine, and an upper end of the swinging arm 15. A crank arm 17 that protrudes to the opposite side of the claw portion 16; a contact portion 18 that protrudes downward from the middle of the crank arm 17 to contact the fork 4; and a claw portion 16 in the entry direction, that is, a magazine. The swinging arm 15 includes a spring member 19 that constantly biases toward the side and a stopper 20 that specifies the advance limit position of the claw portion 16, and the swing arm 15 is pinned to a mounting plate 21 that is fixed to the guide rail 3. By being pivotally supported by 22, it is indirectly hinge-connected to the guide rail 3.
[0023]
The swing arm 15 has an approaching posture as shown in the figure of the claw portion 16, in addition to a length that allows the upper surface of the claw portion 16 to be just in surface contact with the horizontal lower surface of the magazine 1. The rotation limit position in the approach direction specified by the contact between the provided stopper 20 and the crank arm 17 is provided.
[0024]
Further, the claw portion 16 here is constantly urged in the approach direction by the tensile force of the spring member 19 having one end connected to the crank arm 17 and the other end connected to the mounting plate 21, and the rotation limit in the approach direction is limited. An abutment 18 which is securely held in position and protrudes downward from the crank arm 17 and is preferably adjustable in tip height by screw means or the like is shown directly on the fork 4 or in the figure. As described above, the claw portion 16 is separated from the lower surface of the magazine 1 against the spring force of the spring member 19 based on the indirect push-up operation through the contact plate 23 provided on the fork 4. When the fork claw 7 comes in close proximity to the lower surface of the magazine 1 or almost simultaneously with the fork claw 7 coming into contact with the lower surface of the magazine 1, the magazine 1 of the claw portion 16 of the swing claw 14 is moved. Also withdraw from Throw.
The operation of the apparatus configured as described above will be described below with the state shown in FIG.
[0025]
Under the state in which the lowermost magazine 1 that has been emptied is lowered to the delivery position by the fork 4, the magazine 1 and the upper magazine 1 that is pressed and held on the guide rail 3 by the side clamper 10 Since there is a gap between them, the claw portion 16 of the swinging claw 14 that is constantly urged in the entry direction by the spring member 19 enters the gap and contacts the lower surface of the upper magazine 1, thereby Together with the side clamper 10, it contributes to the support of all remaining magazines 1 in which the workpieces 2 are stored.
[0026]
Therefore, once such a support state of the magazine by the claw portion 16 is realized, the claw portion 16 can be sure of the magazine 1 regardless of the weight of the magazine, even if vibration is input to the magazine or the like. Support can be maintained, and even if the operation of the side clamper 10 is affected by electrical noise, power failure, etc., or the supply pressure of the side clamper 10 to the air cylinder 11 is reduced, etc. The support of the magazine 1 as intended by the claw portion 16 can be sufficiently continued.
[0027]
By the way, the magazine 1 lowered to the delivery position is moved on the delivery rail 8 by the push of the pusher 9 that functions without interfering with the fork 4, and is sent to the receiving position of the processed or processed workpiece. Be paid.
[0028]
After that, the fork 4 is lifted and the abutment plate 23 of the fork 4 abuts against the abutting portion 18 of the swinging claw 14 along with this ascending, so that the claw portion 16 moves away from the magazine 1. For example, when the fork claw 7 comes into contact with the lower surface of the magazine 1, the claw portion 16 is separated from the magazine 1. At the same time as the fork pawl 7 comes into contact with the magazine 1, the ascending operation of the fork 4 is temporarily stopped, and in this state, the pressing sheet 12 of the side clamper 10 is moved backward to displace the pressing of the magazine 1 on the guide rail 3. To release. By the way, the pressing of the magazine 1 by the side clamper 10 can be performed irrespective of the raising operation of the fork 4 after the claw portion 16 of the swing claw 14 is sufficiently engaged with the magazine 1, for example. It is.
[0029]
After the restriction on the magazine 1 is released in this way, the fork 4 is operated again so that the workpiece 2 in the lowermost magazine 1 that is directly supported is directed upward from the lowest position. Sequentially, the sheet is taken out onto the transport rail 13 by taking-out means (not shown). As shown in the figure, since the transport rail 13 is positioned corresponding to the second workpiece 2 from the bottom, here, first, the fork 4 causes the lowermost magazine 1 to be displaced upward by one workpiece. Then, align the bottom surface of the lowest workpiece 2 in the magazine with the top surface of the transport rail 13, take out the workpiece 2 onto the transport rail 13, and then move the magazine 1 downward and down one workpiece at a time. The work 2 is sequentially taken out.
[0030]
Then, the magazine 1 emptied by taking out the uppermost work 2 is lowered to the sending position for sending it to the outside. In this case, when the empty magazine 1 is lowered by the amount corresponding to the height of the magazine 1 from the position of the magazine 1 shown in FIG. Once stopped, the side clamper 10 is actuated, whereby the magazine 1 immediately above containing the workpiece 2 is pressed and held on the guide rail as shown in the figure.
[0031]
As a result, after the magazine 1 containing the work 2 is prevented from following down, the fork 4 and the empty magazine 1 are further moved downward to separate the empty magazine 1 below the remaining magazines 1. The empty magazine 1 is sent out and reaches the rail 8 as shown in the figure.
[0032]
On the other hand, during such downward displacement of the empty magazine 1, as soon as it is separated from the remaining magazine 1, the claw portion 16 of the swinging claw 14 that has been in contact with the side surface of the empty magazine 1 until then, Under the action of the spring member 19, it enters the lower surface side of the magazine 1 pressed and held by the side clamper 10, and contacts the lower surface thereof as shown in the figure. Therefore, after that, the magazine 1 storing the workpiece 2 is held and supported at a predetermined position under the cooperation of the clamper 10 and the swinging claw 14.
[0033]
As described above, since the swinging claw 14 is mechanically operated to support the magazine 1, the swinging claw 14 can always function reliably regardless of the occurrence of electrical noise, power failure, or the like. The same applies to the above-described backward displacement of the claw portion 16 of the swinging claw 14.
[0034]
After a series of operations for one magazine 1 is completed as described above, the same operation is repeated for the other magazines 1 that store the workpiece 2 and wait for the removal thereof.
[0035]
【The invention's effect】
Thus, according to the present invention, by engaging the claw portion of the swinging claw with the lower surface of the magazine and supporting the magazine waiting for the workpiece to be taken out, even if the magazine weight increases, the magazine or the like vibrates. Can be always reliably supported at a predetermined position.
Here, when the swinging claw, and thus the claw part, is mechanically moved forward and backward, it is operated as expected without being affected by the occurrence of electrical noise or power failure, and the invention relates to the invention. The device can function as an excellent safety device.
[Brief description of the drawings]
FIG. 1 is a schematic front view of a cross section of a portion showing an embodiment of the invention.
FIG. 2 is a schematic cross-sectional view taken along the line II-II in FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Magazine 2 Work 3 Guide rail 4 Fork 5 Slider 6 Guide member 7 Fork claw 8 Sending rail 9 Pusher 10 Side clamper 11 Air cylinder 12 Pressing plate 13 Transport rail 14 Swing claw 15 Swing arm 16 Claw part 17 Crank arm 18 Contact portion 19 Spring member 20 Stopper 21 Mounting plate 22 Pin 23 Contact plate

Claims (2)

A guide rail that guides the vertical displacement of the magazines stacked in a plurality of stages, a fork that supports the magazines and vertically displaces them, and lowers and displaces the lowermost magazine that has finished taking out the workpiece to the delivery position; and the fork Is equipped with a clamper that presses the magazine located directly above the lowermost magazine against the guide rail when supporting the magazines stacked in a plurality of stages ,
When the fork supports the magazines stacked in a plurality of stages, the clamper is pressing the magazine located directly above the lowest magazine supported by the fork against the guide rail , As soon as the lowermost magazine is separated downward by the lowering of the fork, the lowermost magazine is brought into contact with the lower surface of the remaining magazine and contributes to the support of the magazine, and the upward displacement of the fork A magazine support device provided with a swinging claw configured to be separated from the lower surface of the magazine.   The swinging claw is integrally formed with the swinging arm having a swinging arm having an upper end pivotally supported by a guide rail and having a lower end entering and displacing to the magazine side. A crank arm that protrudes to the opposite side of the magazine, a contact portion that is provided on the crank arm and that causes the claw portion to move backward from the magazine side by contact with the fork, and the claw portion on the magazine side The magazine support device according to claim 1, comprising a spring member that constantly urges the claw portion and a stopper that specifies a rotational limit position of the claw portion in the entry direction.

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