JP3897072B2 - Flat glass for electronic parts - Google Patents

Flat glass for electronic parts Download PDF

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Publication number
JP3897072B2
JP3897072B2 JP03428098A JP3428098A JP3897072B2 JP 3897072 B2 JP3897072 B2 JP 3897072B2 JP 03428098 A JP03428098 A JP 03428098A JP 3428098 A JP3428098 A JP 3428098A JP 3897072 B2 JP3897072 B2 JP 3897072B2
Authority
JP
Japan
Prior art keywords
plate glass
glass
package
electronic parts
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP03428098A
Other languages
Japanese (ja)
Other versions
JPH11217232A (en
Inventor
正良 日下部
修司 三部
設雄 増田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Electric Glass Co Ltd
Original Assignee
Nippon Electric Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Glass Co Ltd filed Critical Nippon Electric Glass Co Ltd
Priority to JP03428098A priority Critical patent/JP3897072B2/en
Publication of JPH11217232A publication Critical patent/JPH11217232A/en
Application granted granted Critical
Publication of JP3897072B2 publication Critical patent/JP3897072B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Light Receiving Elements (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Solid State Image Pick-Up Elements (AREA)

Description

【0001】
【発明の属する技術分野】
本発明は、表面波フィルター用基板、水晶発振子の小型パッケージ、固体撮像素子、発光素子、受光素子等の光半導体パッケージ等に使用する電子部品用板ガラスに関するものである。
【0002】
【従来の技術】
従来、電子部品用板ガラス、例えば、光半導体の固体撮像素子を収納するパッケージの光透過窓に使用する板ガラスは、図4に示すように、略矩形の薄板ガラスの4つの角部を直線的なC面取り1aが施された板ガラス1が使用される。
【0003】
【発明が解決しようとする課題】
しかしながら、従来の板ガラス1の場合、図4に示すように、板ガラス1の各角部のC面取り1aの形状とパッケージ2の嵌入部3の形状が略等しいため、応力が集中し易いC面取り1aに接着剤4が十分に回り込まず、気密封止部の接着強度及び温度サイクル負荷による熱応力に対する信頼性が不足するといった懸念がある。
【0004】
本発明は、以上のような従来の問題点を解決した電子部品用板ガラスを提供することを目的とする。
【0005】
【課題を解決するための手段】
本発明に係る電子部品用板ガラスは、略矩形の板ガラスからなり、該板ガラスの各角部が内側に凹んだ略円弧状に面取りされてなることを特徴とする。
【0006】
【作用】
本発明の電子部品用板ガラスによれば、略矩形の板ガラスからなり、該板ガラスの各角部が内側に凹んだ略円弧状に面取りされてなるので、板ガラスとパッケージとの接着面積が従来より3〜10%大きくなり、板ガラスの各略円弧状の面取り部とパッケージの嵌入部の各面取り部との間隙に接着剤を十分に溜めることができるため、接着の信頼性を向上させることができる。
【0007】
【発明の実施の形態】
図1は、本発明に係る電子部品用板ガラスの説明図であって、1は電子部品用板ガラスを、2はパッケージを、3は電子部品用板ガラス1が嵌入されるパッケージ2の嵌入部を、4は接着剤を各々示しており、前記で説明した図4と同一部分には同一符号を付してそれぞれ示してある。
【0008】
本発明の電子部品用板ガラス1(以下、板ガラス1と称す)は、例えば、膨張係数が50〜70×10-7/℃のホウ珪酸ガラスからなり、長辺11.0mm、短辺10.0mm、厚さ0.5〜1.4mmの寸法を有し、その表面は鏡面に研磨されており、各角部に施された面取り1aは、曲率半径が1.5mm、弦の長さが1.4mmとなる内側に凹んだ略円弧状をしている。また、全てのエッジ部には一辺が約0.1mmの糸面取り1bが施されている。
【0009】
上記板ガラス1を構成する材料としては、ホウ珪酸ガラスの他、無アルカリガラス等が使用可能である。材料の膨張係数は、電子部品のパッケージに近いものであることが好ましい。
【0010】
上記板ガラス1を使用して、固体撮像素子をパッケージする場合を説明する。
【0011】
板ガラス1のパッケージ2と当接する部分にスクリーン印刷機を用いて熱硬化性を有するエポキシ系の接着剤4を印刷して塗布する。この際、板ガラス1の内側に凹んだ略円弧状の面取り1aに多くの接着剤4を付着させておく。次に、接着剤4が塗布された板ガラス1をパッケージ2の上部の嵌入部3に嵌入する。次いで、板ガラス1が嵌入されたパッケージ2をオーブンに入れ、接着剤4を硬化させて板ガラス1をパッケージ2に接着する。
【0012】
上記板ガラス1の面取り1aとパッケージ2の嵌入部3との接着面積は従来のC面取りが施された板ガラスに比べて約5%増え、これによって接着強度が向上し、かつ、面取り部1aと嵌入部3との間隙3aに蓄えられる接着剤4により、応力が集中しやすい角部に対する緩衝層が形成され、各角部を保護する。
【0013】
上記の電子部品用板ガラス1を製造する場合、図2(A)に示すように、例えば、50枚の研磨仕上げされた短辺200mm、長辺300mm、厚さ0.5mmの寸法を有するホウ珪酸ガラスからなる材料板ガラス10を逐次重ね合わせて基台11上に積層し、基台11と材料板ガラス10の間隙及び積層した材料板ガラス10の相互の間隙に、加熱され液体状となった仮止め接着剤12を充填し、冷却固化させて積層体13を形成する。この積層体13を、図2(B)に示すように、回転駆動軸14に12mmピッチまたは10mmピッチに配置された複数の回転する厚さ2mmの切断刃15を備えたマルチブレード切断機(本体は図示せず)に装着して切り分け、基台11上に縦10mm、横8mm、高さ35mmの寸法を有する四角柱体16を551本隣立した状態に形成する。
【0014】
次に、図3(A)に示すように、複数本の回転砥石からなる角取り用のツール17を12mmピッチに配置した角取り装置18を使用して、図3(B)に示すように、基台11上の内側の4つの四角柱体16の相対向する4つの角部16a、外側の辺の対向する2つの角部16b、及び外側のコーナーの角部16cを、ツール17により研削して一斉に角取りし、面取り16dを形成する。
【0015】
次いで、基台11上にあって面取り16dが形成された四角柱体16を、弗化水素酸を含むエッチング液を満たした槽(図示せず)内に浸漬して四角柱体16を構成する全ての板ガラスのエッジ部に一辺が約0.1mmとなるようにエッチング液の濃度、温度、及び四角柱体16の浸漬時間を制御して糸面取りを施す。
【0016】
その後、上記四角柱体16の仮止め接着剤12を溶媒に溶かして基台11から個々の板ガラスを分離し、洗浄、乾燥して、図1に示すような角部が内側に凹んだ略円弧状の面取り1aが施され、かつ、エッジ部に糸面取り1bが施された27,550枚の電子部品用板ガラス1を得る。
【0017】
上記の電子部品用板ガラス1は、整列配置された四角柱体16の相対向する4つの角部16aを一斉に面取りすることができ、かつ、四角柱体16をエッチング液に浸漬することにより一斉に糸面取りを施すことができる大量生産に適した形状を有するものである。
【0018】
上記の実施の形態では、正方形に近い電子部品用板ガラスを示したが、本発明の電子部品用板ガラスは、ファクシミリやスキャナー等の画像入力装置のラインセンサを保護する短冊状のカバーガラスにも適用が可能である。
【0019】
【発明の効果】
本発明の電子部品用板ガラスによれば、電子部品のパッケージの気密性を向上させ、信頼性を高めることが可能であり、かつ、大量生産に適した形状を有するので安価に製造することができる実用上優れた効果を奏するものである。
【図面の簡単な説明】
【図1】本発明の電子部品用板ガラスの説明図であって、(A)は電子部品用板ガラスの斜視図、(B)は固体撮像素子パッケージの平面図、(C)は(B)のY−Y断面図
【図2】本発明の電子部品用板ガラスを製造する工程の説明図であって、(A)は材料板ガラスからなる積層体の側面図、(B)は積層体を切り分ける工程の説明図
【図3】板ガラスの角部を回転砥石により一斉に角取りする工程の説明図であって、(A)は断面図、(B)は平面図
【図4】従来の電子部品用板ガラスの説明図であって、(A)は電子部品用板ガラスの斜視図、(B)は固体撮像素子パッケージの平面図、(C)は(B)のY−Y断面図
【符号の説明】
1 電子部品用板ガラス
1a 面取り
1b 糸面取り
2 パッケージ
3 嵌入部
4 接着剤
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a glass plate for an electronic component used for an optical semiconductor package such as a surface wave filter substrate, a crystal oscillator small package, a solid-state imaging device, a light emitting device, and a light receiving device.
[0002]
[Prior art]
Conventionally, plate glass for electronic parts, for example, a plate glass used for a light transmission window of a package containing a solid-state image sensor of an optical semiconductor, as shown in FIG. A plate glass 1 having a C chamfer 1a is used.
[0003]
[Problems to be solved by the invention]
However, in the case of the conventional plate glass 1, as shown in FIG. 4, since the shape of the C chamfer 1a at each corner of the plate glass 1 and the shape of the fitting portion 3 of the package 2 are substantially equal, the C chamfer 1a where stress tends to concentrate. There is a concern that the adhesive 4 does not sufficiently wrap around and the adhesive strength of the hermetic sealing portion and the reliability against thermal stress due to the temperature cycle load are insufficient.
[0004]
An object of this invention is to provide the plate glass for electronic components which solved the above conventional problems.
[0005]
[Means for Solving the Problems]
The plate glass for an electronic component according to the present invention is made of a substantially rectangular plate glass, and is characterized in that each corner of the plate glass is chamfered in a substantially arc shape recessed inward.
[0006]
[Action]
According to the plate glass for electronic parts of the present invention, the plate glass is made of a substantially rectangular plate glass, and each corner of the plate glass is chamfered in a substantially arc shape recessed inward, so that the bonding area between the plate glass and the package is 3 than before. Since the adhesive can be sufficiently stored in the gap between each substantially chamfered chamfered portion of the plate glass and each chamfered portion of the package fitting portion, the reliability of adhesion can be improved.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 is an explanatory view of an electronic component plate glass according to the present invention, wherein 1 is an electronic component plate glass, 2 is a package, 3 is an insertion portion of a package 2 into which the electronic component plate glass 1 is inserted, Reference numeral 4 denotes an adhesive, and the same parts as those in FIG. 4 described above are denoted by the same reference numerals.
[0008]
The plate glass 1 for electronic parts of the present invention (hereinafter referred to as plate glass 1) is made of, for example, borosilicate glass having an expansion coefficient of 50 to 70 × 10 −7 / ° C., and has a long side of 11.0 mm and a short side of 10.0 mm. , Having a dimension of thickness 0.5 to 1.4 mm, the surface thereof is polished to a mirror surface, and the chamfer 1a applied to each corner has a curvature radius of 1.5 mm and a chord length of 1 It has a substantially arc shape recessed inward to be 4 mm. In addition, a thread chamfer 1b having a side of about 0.1 mm is applied to all edge portions.
[0009]
As a material constituting the plate glass 1, alkali-free glass or the like can be used in addition to borosilicate glass. The expansion coefficient of the material is preferably close to that of the electronic component package.
[0010]
The case where a solid-state image sensor is packaged using the plate glass 1 will be described.
[0011]
A thermosetting epoxy adhesive 4 is printed and applied to a portion of the plate glass 1 that comes into contact with the package 2 using a screen printer. At this time, a large amount of adhesive 4 is adhered to the substantially arc-shaped chamfer 1 a that is recessed inside the plate glass 1. Next, the plate glass 1 to which the adhesive 4 is applied is inserted into the insertion portion 3 at the top of the package 2. Next, the package 2 in which the plate glass 1 is inserted is put in an oven, the adhesive 4 is cured, and the plate glass 1 is bonded to the package 2.
[0012]
The bonding area between the chamfer 1a of the plate glass 1 and the fitting portion 3 of the package 2 is increased by about 5% compared to the conventional plate glass with C chamfering, thereby improving the bonding strength and fitting with the chamfered portion 1a. The adhesive 4 stored in the gap 3a with the part 3 forms a buffer layer for corners where stress is likely to concentrate, and protects each corner.
[0013]
When manufacturing the above-described glass plate 1 for an electronic component, as shown in FIG. 2A, for example, 50 sheets of borosilicate having a short side of 200 mm, a long side of 300 mm, and a thickness of 0.5 mm that are polished and finished. The material plate glass 10 made of glass is sequentially stacked and laminated on the base 11, and is temporarily bonded to the gap between the base 11 and the material plate glass 10 and the gap between the laminated material plate glasses 10 in a liquid state by heating. The agent 12 is filled and cooled and solidified to form the laminate 13. As shown in FIG. 2 (B), this laminated body 13 is a multi-blade cutting machine (main body) provided with a plurality of rotating cutting blades 15 having a thickness of 2 mm arranged on a rotary drive shaft 14 at a pitch of 12 mm or 10 mm. Is mounted on the base 11 and is formed in a state where 551 rectangular column bodies 16 having dimensions of 10 mm in length, 8 mm in width, and 35 mm in height are adjacent to each other.
[0014]
Next, as shown in FIG. 3 (A), as shown in FIG. 3 (B), using a chamfering device 18 in which tools 17 for chamfering composed of a plurality of rotating grindstones are arranged at a pitch of 12 mm. The tool 17 is used to grind four opposing corners 16a of the four inner rectangular prisms 16 on the base 11, two opposite corners 16b on the outer side, and an outer corner 16c. Then, the chamfers 16d are formed at the same time.
[0015]
Next, the rectangular column 16 is formed by immersing the rectangular column 16 on the base 11 and having the chamfer 16d formed in a tank (not shown) filled with an etching solution containing hydrofluoric acid. The chamfering is performed by controlling the concentration of the etching solution, the temperature, and the immersion time of the rectangular column 16 so that the edge of all the plate glasses is about 0.1 mm on one side.
[0016]
Thereafter, the temporary fixing adhesive 12 of the rectangular column 16 is dissolved in a solvent to separate the individual glass plates from the base 11, washed and dried, and the substantially circular shape with the corners recessed inward as shown in FIG. There are obtained 27,550 sheets of glass 1 for electronic parts in which the arc-shaped chamfer 1a is applied and the thread chamfer 1b is applied to the edge portion.
[0017]
The plate glass 1 for electronic parts can chamfer the four corners 16a facing each other of the aligned quadrangular columnar bodies 16 at the same time, and simultaneously immerse the quadrangular columnar bodies 16 in an etching solution. It has a shape suitable for mass production that can be chamfered.
[0018]
In the above embodiment, an electronic component glass plate that is nearly square is shown. However, the electronic component glass plate of the present invention is also applicable to a strip-shaped cover glass that protects a line sensor of an image input device such as a facsimile or a scanner. Is possible.
[0019]
【The invention's effect】
According to the glass plate for an electronic component of the present invention, it is possible to improve the airtightness of the package of the electronic component, to improve the reliability, and since it has a shape suitable for mass production, it can be manufactured at low cost. It has a practically excellent effect.
[Brief description of the drawings]
1A and 1B are explanatory views of a glass sheet for electronic parts according to the present invention, in which FIG. 1A is a perspective view of a glass sheet for electronic parts, FIG. 1B is a plan view of a solid-state imaging device package, and FIG. FIG. 2 is an explanatory view of a process for producing a glass sheet for electronic parts according to the present invention, wherein (A) is a side view of a laminated body made of a material glass sheet, and (B) is a process of cutting the laminated body. FIG. 3 is an explanatory diagram of a process of chamfering corners of a sheet glass all at once with a rotating grindstone, wherein (A) is a sectional view and (B) is a plan view. FIG. 4 is for a conventional electronic component. It is explanatory drawing of plate glass, (A) is a perspective view of the plate glass for electronic components, (B) is a top view of a solid-state image sensor package, (C) is YY sectional drawing of (B).
DESCRIPTION OF SYMBOLS 1 Glass plate for electronic parts 1a Chamfer 1b Yarn chamfer 2 Package 3 Insertion part 4 Adhesive

Claims (1)

略矩形の板ガラスからなり、該板ガラスの各角部が内側に凹んだ略円弧状に面取りされてなることを特徴とする電子部品用板ガラス。A plate glass for electronic parts, which is made of a substantially rectangular plate glass and is chamfered in a substantially arc shape in which each corner of the plate glass is recessed inward.
JP03428098A 1998-01-30 1998-01-30 Flat glass for electronic parts Expired - Fee Related JP3897072B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP03428098A JP3897072B2 (en) 1998-01-30 1998-01-30 Flat glass for electronic parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP03428098A JP3897072B2 (en) 1998-01-30 1998-01-30 Flat glass for electronic parts

Publications (2)

Publication Number Publication Date
JPH11217232A JPH11217232A (en) 1999-08-10
JP3897072B2 true JP3897072B2 (en) 2007-03-22

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JP03428098A Expired - Fee Related JP3897072B2 (en) 1998-01-30 1998-01-30 Flat glass for electronic parts

Country Status (1)

Country Link
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Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4655985B2 (en) * 2006-04-07 2011-03-23 日本電気硝子株式会社 Glass plate alignment body and manufacturing method thereof
US20100119846A1 (en) * 2007-03-02 2010-05-13 Masahiro Sawada Reinforced plate glass and method for manufacturing the same
JP2009256125A (en) * 2008-04-15 2009-11-05 Shoda Techtron Corp Processing method of plate glass
JP5532681B2 (en) * 2009-05-28 2014-06-25 株式会社リコー Optical device, optical scanning apparatus, and image forming apparatus
JP5956449B2 (en) * 2011-09-22 2016-07-27 デンカ株式会社 Method for processing hard substrate laminate and method for manufacturing plate-like product
JP6525395B2 (en) * 2015-06-23 2019-06-05 日本電気硝子株式会社 Glass plate and method of manufacturing the same

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