JP3874876B2 - ウェーハ移載装置のツィーザ傾き確認治具 - Google Patents

ウェーハ移載装置のツィーザ傾き確認治具 Download PDF

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Publication number
JP3874876B2
JP3874876B2 JP4918697A JP4918697A JP3874876B2 JP 3874876 B2 JP3874876 B2 JP 3874876B2 JP 4918697 A JP4918697 A JP 4918697A JP 4918697 A JP4918697 A JP 4918697A JP 3874876 B2 JP3874876 B2 JP 3874876B2
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Japan
Prior art keywords
tweezer
wafer
adjustment
tweezers
wafer transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP4918697A
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English (en)
Japanese (ja)
Other versions
JPH10245122A5 (enExample
JPH10245122A (ja
Inventor
智 柿崎
誠 津里
満 坂本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Hitachi Kokusai Electric Inc
Kokusai Denki Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kokusai Electric Inc, Kokusai Denki Electric Inc filed Critical Hitachi Kokusai Electric Inc
Priority to JP4918697A priority Critical patent/JP3874876B2/ja
Publication of JPH10245122A publication Critical patent/JPH10245122A/ja
Publication of JPH10245122A5 publication Critical patent/JPH10245122A5/ja
Application granted granted Critical
Publication of JP3874876B2 publication Critical patent/JP3874876B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP4918697A 1997-03-04 1997-03-04 ウェーハ移載装置のツィーザ傾き確認治具 Expired - Fee Related JP3874876B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4918697A JP3874876B2 (ja) 1997-03-04 1997-03-04 ウェーハ移載装置のツィーザ傾き確認治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4918697A JP3874876B2 (ja) 1997-03-04 1997-03-04 ウェーハ移載装置のツィーザ傾き確認治具

Publications (3)

Publication Number Publication Date
JPH10245122A JPH10245122A (ja) 1998-09-14
JPH10245122A5 JPH10245122A5 (enExample) 2004-10-07
JP3874876B2 true JP3874876B2 (ja) 2007-01-31

Family

ID=12824012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4918697A Expired - Fee Related JP3874876B2 (ja) 1997-03-04 1997-03-04 ウェーハ移載装置のツィーザ傾き確認治具

Country Status (1)

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JP (1) JP3874876B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100575450B1 (ko) 2004-12-16 2006-05-03 삼성전자주식회사 포크 플레이트의 높이정렬 부재 및 이를 포함하는 반도체기판의 이송 장치
CN108315695B (zh) * 2018-05-04 2023-11-17 苏州东福来机电科技有限公司 一种智能真空镀膜机构
CN112563173B (zh) * 2020-12-22 2025-09-02 北京华卓精科科技股份有限公司 硅片传送工装

Also Published As

Publication number Publication date
JPH10245122A (ja) 1998-09-14

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