JP3874687B2 - Liquid supply device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention provides a liquid supply for supplying a liquid onto the substrate in a stripe pattern by moving the nozzle relative to the substrate while discharging a liquid such as an organic EL (electroluminescence) material or a resist solution from the nozzle. It relates to the device. Here, the “substrate” means various substrates such as a semiconductor wafer, a glass substrate for organic EL display, a glass substrate for photomask, a glass substrate for liquid crystal display, a glass substrate for plasma display, and a substrate for optical disk.
[0002]
[Prior art]
As an apparatus for forming a display device such as an organic EL display device, for example, there is a manufacturing apparatus described in JP-A-2002-75640. This apparatus is equipped with the above-described liquid supply apparatus in order to apply an organic EL material in a stripe shape on a substrate.
[0003]
FIG. 7 is a diagram showing an organic EL display device manufacturing apparatus equipped with a conventional liquid supply device. As shown in the figure, this manufacturing apparatus includes a stage 1 on which a glass substrate S that receives application of red, green, and blue organic EL materials 10a to 10c is placed, and a stage movement that moves the stage 1 in a predetermined direction. A mechanism part 2, an alignment mark detection part 3 for detecting the position of the alignment mark formed on the glass substrate S, and a first supply part 5 for supplying the red organic EL material 10a to the red nozzle 4a; The second supply unit 6 that supplies the green organic EL material 10b to the green nozzle 4b, the third supply unit 7 that supplies the blue organic EL material 10c to the blue nozzle 4c, and the nozzles 4a to 4 for each color. Nozzle moving mechanism 8 for moving 4c in a predetermined direction, controller 9 for controlling stage moving mechanism 2, alignment mark detector 3, first to third supply units 5-7, and nozzle moving mechanism 8 And consist of To have.
[0004]
Among these components, the first supply unit 5 includes, for example, a supply source 20a of the red organic EL material 10a, a pump 21 for taking out the red organic EL material 10a from the supply source 20a, and a red organic EL material. A flow meter 22 for detecting the flow rate of the EL material 10a and a filter 23 for removing foreign matter in the red organic EL material 10a are provided.
[0005]
The second supply unit 6 includes, for example, a supply source 20b of the green organic EL material 10b, a pump 21 for taking out the green organic EL material 10b from the supply source 20b, and a flow rate of the green organic EL material 10b. And a filter 23 for removing foreign matter in the green organic EL material 10b.
[0006]
In addition, the third supply unit 7 includes, for example, a supply source 20c for the blue organic EL material 10c, a pump 21 for taking out the blue organic EL material 10c from the supply source 20c, and a flow rate of the blue organic EL material 10c. And a filter 23 for removing foreign matter in the blue organic EL material 10c.
[0007]
The control unit 9 controls the stage moving mechanism unit 2 to move the stage 1 by a predetermined amount in a predetermined direction, and controls the nozzle moving mechanism unit 8 to move the nozzles 4a to 4c by a predetermined amount in the predetermined direction. In addition, the first to third organic EL materials 10a to 10c having a predetermined flow rate are flowed out from the nozzles 4a to 4c according to the detection values a to c from the flow meters 22 of the first to third supply units 5 to 7, respectively. Commands df are output to the pumps 21 of the third supply units 5-7. Specifically, the control unit 9 controls each part of the apparatus as follows to apply the organic EL material on the glass substrate S in a stripe shape.
[0008]
When the nozzles 4a to 4c are positioned at the application start position of the glass substrate S, the controller 9 instructs each pump 21 to start discharging the organic EL materials 10a to 10c from the nozzles 4a to 4c onto the glass substrate S, and Control is performed so that the nozzles 4a to 4c are moved substantially linearly. As a result, red, green, and blue organic EL materials 10a to 10c are simultaneously applied to the glass substrate S in a stripe shape.
[0009]
And if the nozzles 4a-4c are located in the application | coating stop position of the glass substrate S, the control part 9 will make each pump 21 stop discharge of the organic EL material 10a-10c from each nozzle 4a-4c to the glass substrate S. While instructing, the movement of the nozzles 4a to 4c is stopped.
[0010]
[Problems to be solved by the invention]
By the way, in the apparatus configured as described above, when the pump 21 is operated according to the discharge start instruction from the control unit 9, the organic EL materials 10 a to 10 c are transferred to the nozzles 4 a to 4 c via the flow meter 22 and the filter 23. The nozzles 4a to 4c are respectively pumped and discharged from the nozzles 4a to 4c toward the glass substrate S. Also, the supply is stopped by stopping each pump 21 in accordance with an instruction from the control unit 9. For this reason, in any organic EL material 10a to 10c, the distance from the pump 21 to the nozzles 4a to 4c becomes relatively long, the control responsiveness (response) is poor, and it is difficult to accurately control the minute flow rate. It has become.
[0011]
Further, when the pump 21 is simply stopped simultaneously with the completion of application, the organic EL materials 10a to 10c may adhere to the discharge ports of the nozzles 4a to 4c, respectively. Here, if the deposits are dried and peeled off, if these deposits adhere to the glass substrate S as particles, the product becomes defective and becomes one of the main causes of yield reduction.
[0012]
The present invention has been made in view of the above problems, and it is a first object of the present invention to provide a liquid supply apparatus capable of accurately setting or controlling the discharge amount with excellent responsiveness in discharging and stopping the liquid from the nozzle. The purpose.
[0013]
In addition to the first object described above, the present invention further provides a liquid supply apparatus capable of preventing liquid from adhering to the tip of the nozzle when the liquid discharge from the nozzle is further stopped. The purpose.
[0014]
[Means for Solving the Problems]
The present invention is a liquid supply device that supplies liquid in a stripe shape onto a substrate by moving the nozzle relative to the substrate while discharging the liquid to flow out from the nozzle toward the substrate, In order to achieve the first object, a micropump that is incorporated in the nozzle and pumps the liquid in the nozzle is provided, and a drive control unit that drives and controls the micropump.
[0015]
In the invention configured as described above, a micro pump is incorporated at the tip of the nozzle . In the micropump, a liquid flow path is formed, and a traveling wave toward the substrate is formed while ensuring a liquid flow in the entire flow path. Then, the traveling wave is discharged so that the liquid flows out toward the substrate. Therefore, the control response (response) is significantly improved compared to the conventional technology in which the nozzle and the pump are separated, and the discharge and stop of the liquid from the nozzle are responsive and the discharge amount is set accurately. Is possible. In particular, it is more preferable to attach the micropump to the tip of the nozzle.
[0016]
Here, the following configuration can be adopted for the micropump.
[0017]
(1) A plurality of piezoelectric elements are arranged along the outer peripheral surface of the elastic member forming the liquid flow path substantially parallel to the flow path, and the voltage applied to each of the piezoelectric elements is controlled to control the elastic member. You may comprise so that the traveling wave which goes to a board | substrate may be formed in the flow-path surface, and a liquid may be discharged from a nozzle.
[0018]
(2) A plurality of magnetostrictive elements are arranged substantially parallel to the flow path along the outer peripheral surface of the elastic member forming the liquid flow path, and the voltage applied to each of the magnetostrictive elements is controlled to control the elastic member. You may comprise so that the traveling wave which goes to a board | substrate may be formed in the flow-path surface, and a liquid may be discharged from a nozzle.
[0019]
(3) A surface acoustic wave directed toward the substrate in the surface acoustic wave device is arranged by arranging a surface acoustic wave device on the outer peripheral surface of the elastic member forming the liquid flow path and controlling an electric signal applied to the surface acoustic wave device. The surface acoustic wave may be applied to the liquid in the flow path via the elastic member to discharge the liquid from the nozzle.
[0020]
(4) A surface acoustic wave element is arranged in the liquid flow path formed in the micropump, and an acoustic wave directed to the substrate is generated in the surface acoustic wave element by controlling an electric signal applied to the surface acoustic wave element. The liquid may be ejected from the nozzle.
[0021]
In the liquid supply device adopting the configuration as described in (1) to (4) above, the flow of liquid is secured in the entire flow path by controlling the voltage, magnetic field, electric signal, etc. applied to each element. A traveling wave toward the side opposite to the substrate can be formed to suck the liquid into the nozzle. Therefore, after the liquid supply to the substrate is stopped, the liquid at the nozzle tip is sucked into the nozzle, so that the liquid can be prevented from adhering to the nozzle tip .
[0022]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 is a perspective view showing a first embodiment of a liquid supply apparatus according to the present invention. FIG. 2 is a diagram showing the shape of a piezoelectric element applied to and applicable to the liquid supply apparatus of FIG. Further, FIG. 3 is a cross-sectional view of a micropump constituting the liquid supply apparatus of FIG. This liquid supply device includes a micropump 50 incorporated in a nozzle 40 used in the organic EL display device manufacturing apparatus of FIG. 7 and the like, and a drive control unit 60 that drives and controls the micropump 50.
[0023]
In this micropump 50, a hollow cylindrical elastic member 51 is connected to the tip of a tube 41 constituting the nozzle 40 by an adhesive or a joint (not shown), and the tube 41 is connected to the hollow portion as a flow path 511. A liquid such as an organic EL material flowing through the glass substrate S can be distributed to the glass substrate S. Thus, in this embodiment, the elastic member 51 functions as a flow path forming member. In addition, a slit 53 is attached to the distal end portion of the elastic member 51 via a slit support member 52, and two discharges in which the liquid flowing through the flow path 511 is drilled in the central portion of the slit 53. It is possible to discharge from the hole 531 toward the glass substrate S. In this embodiment, the number of ejection holes is “2”, but the number and shape of the ejection holes 531 are arbitrary.
[0024]
Further, along the outer peripheral surface of the elastic member 51 configured as described above, four ring-shaped piezoelectric elements 54 having an annular shape in plan view as shown in FIG. 511 is arranged almost in parallel. Each ring-shaped piezoelectric element 54 is electrically connected to the drive control unit 60, and is mechanically displaced according to the voltage applied from the drive control unit 60 to be elastic from the direction substantially perpendicular to the flow path 511. The member 51 is deformed isotropically. Further, in this embodiment, the surface of the elastic member 51 is controlled by periodically changing the polarity (see the arrow in FIG. 3) of the piezoelectric element 54 by controlling the voltage applied to each ring-shaped piezoelectric element 54 from the drive control unit 60. A traveling wave (broken line in FIG. 3) directed toward the glass substrate S is formed on the glass substrate S so that the liquid L can be discharged from the discharge hole 531 toward the glass substrate S.
[0025]
Next, the operation of the liquid supply apparatus configured as described above will be described. When the liquid L is applied to the glass substrate S in a stripe shape, the nozzle 40 is first moved to the application start position of the glass substrate S. When the nozzle 40 is positioned at the application start position, the drive control unit 60 applies a predetermined voltage to each piezoelectric element 54 to form a traveling wave toward the glass substrate S on the surface of the flow path of the elastic member 51. Thereby, the liquid in the flow path 511 is pumped toward the glass substrate S, and the discharge of the liquid L from the discharge hole 531 is started.
[0026]
Then, the nozzle 40 is moved linearly relative to the glass substrate S while discharging the liquid L from the nozzle 40 as described above. As a result, the liquid L is supplied to the glass substrate S in the form of stripes, thereby forming the stripe-shaped coating portions 70.
[0027]
On the other hand, when the nozzle 40 is positioned at the application stop position of the glass substrate S, the drive control unit 60 stops the application of voltage to each piezoelectric element 54 and stops the discharge of the liquid L. At this time, not only the discharge of the liquid L from the nozzle 40 is stopped, but a suck back operation may be executed as necessary. That is, in the micro pump 50 according to this embodiment, not only can the traveling wave toward the glass substrate S be formed as described above by periodically changing the voltage applied to each piezoelectric element 54, but also the applied voltage is By controlling, a traveling wave toward the opposite side of the glass substrate S can be generated. Therefore, after the discharge of the liquid L from the nozzle 40 is stopped, the drive control unit 60 applies a predetermined voltage to each piezoelectric element 54 so that a traveling wave toward the opposite side of the glass substrate S is generated on the flow path surface of the elastic member 51. When applied, the liquid at the tip of the nozzle 40 can be sucked back into the nozzle 40, so-called suck back can be performed, and the liquid can be prevented from remaining at the tip of the nozzle 40. Generation | occurrence | production can be prevented effectively. The suck back operation is the same in the later embodiments.
[0028]
As described above, according to the liquid supply apparatus according to the first embodiment, since the micropump 50 is incorporated in the nozzle 40, the conventional technique in which the nozzle and the pump are separately disposed (Japanese Patent Laid-Open No. 2002-75640). Control response (response) is remarkably improved as compared with the device described in the publication, and it is possible to accurately set or control the discharge amount of the liquid from the nozzle 40 with high responsiveness and the discharge amount.
[0029]
In the first embodiment, the piezoelectric element 54 has an annular shape in plan view as shown in FIG. 2A. However, the shape and arrangement of the piezoelectric element 54 are not limited to those in the above embodiment. However, the elastic member 51 is arbitrary as long as the elastic member 51 can be deformed to generate a traveling wave on the surface of the flow path of the elastic member 51. For example, as shown in FIG. 5B, a piezoelectric element 54a having a notch in a part thereof and having a substantially C shape in plan view, or a piezoelectric element formed by combining a plurality of piezoelectric element pieces 541b as shown in FIG. 54b can be used. In particular, since these piezoelectric elements 54, 54 a, 54 b are all disposed so as to surround the outer peripheral surface of the elastic member 51, the elastic member 51 is arranged with respect to the elastic member 51 from a direction substantially orthogonal to the flow path 511. This is suitable for enhancing the pumping efficiency of the liquid L.
[0030]
In the first embodiment, piezoelectric elements are used to generate traveling waves on the flow path surface of the elastic member 51. However, instead of these, magnetostrictive elements are arranged and applied to these magnetostrictive elements. You may comprise so that a mechanical wave of each magnetostriction element may be controlled by controlling a magnetic field, and a traveling wave may be generated on the flow-path surface of the elastic member 51. FIG.
[0031]
In the first embodiment, a piezoelectric element is used to generate a traveling wave on the surface of the flow path of the elastic member 51, but a surface acoustic wave element may be used instead. Hereinafter, second to fourth embodiments using surface acoustic wave elements will be described with reference to FIGS. 4 to 6 respectively.
[0032]
FIG. 4 is a diagram showing a second embodiment of the liquid supply apparatus according to the present invention. The second embodiment is greatly different from the first embodiment in that the surface acoustic wave element 80 is used to generate a traveling wave on the flow path surface of the elastic member 51. The rest of the configuration is basically the same as that of the first embodiment. Hereinafter, the configuration and operation of the liquid supply apparatus according to the second embodiment will be described focusing on the differences.
[0033]
In this liquid supply apparatus, the surface 81 of the surface acoustic wave element 80 is connected to the outer peripheral surface of the elastic member 51 by an adhesive 82. Then, an electric signal is applied to the electrode 83 formed on the surface 81 from a drive control unit (not shown) so that a surface acoustic wave is electrically generated on the surface 81. For this reason, the surface acoustic wave generated on the surface 81 is given to the liquid in the flow path 511 via the elastic member 51. Therefore, by controlling an electric signal applied to the electrode 83, a surface acoustic wave directed toward the glass substrate S and conversely a surface acoustic wave directed toward the opposite side of the glass substrate S can be generated.
[0034]
Therefore, when applying the liquid L, the drive control unit applies a predetermined electrical signal to the surface acoustic wave element 80 to generate a surface acoustic wave toward the glass substrate S. Thus, the surface acoustic wave is given as a traveling wave toward the glass substrate S to the liquid in the flow path 511 via the elastic member 51, and the liquid L in the flow path 511 is pumped toward the glass substrate S. Then, the discharge of the liquid L from the discharge hole 531 is started. Then, the nozzle 40 is moved linearly relative to the glass substrate S while discharging the liquid L from the nozzle 40 as described above. As a result, the liquid L is supplied to the glass substrate S in a stripe shape, thereby forming a stripe-shaped coating portion 70 (see FIG. 1). On the other hand, when the nozzle 40 is positioned at the application stop position of the glass substrate S, the drive control unit stops the application of the electric signal to the surface acoustic wave element 80 and stops the discharge of the liquid L. And you may perform a suckback process similarly to 1st Embodiment as needed.
[0035]
As described above, also in the liquid supply apparatus according to the second embodiment, the micro pump 50 is incorporated in the nozzle 40 as in the first embodiment, and thus the conventional technology in which the nozzle and the pump are separately arranged. Control responsiveness (response) is remarkably improved as compared with (the device described in Japanese Patent Application Laid-Open No. 2002-75640), and the discharge / stop of the liquid from the nozzle 40 is responsive and the discharge amount is set accurately. Can be controlled.
[0036]
The arrangement position of the surface acoustic wave element 80 is not limited to the second embodiment, and may be directly attached to the surface of the flow path 511 as in the third embodiment shown in FIG. It may be arranged in the flow path 511 as in the fourth embodiment shown in FIG. In these third and fourth embodiments, surface acoustic waves (traveling waves) are generated compared to the first and second embodiments in which traveling waves are given to the liquid L in the flow path 511 via the elastic member 51. It can be given directly and efficiently. In particular, considering the efficiency of the surface acoustic wave, it is more preferable to provide electrodes 83 on both surfaces of the surface acoustic wave element 80 to generate the acoustic waves on each surface as shown in FIG. In addition, the code | symbol "84" in FIG. 5 and FIG. 6 is an electrode seal.
[0037]
In addition, according to the third and fourth embodiments, the material constituting the flow path forming member 51 that forms the flow path 511 is arbitrary, and the degree of freedom in design can be increased as compared with the first and second embodiments. This is also advantageous in this respect.
[0038]
The present invention is not limited to the above-described embodiment, and various modifications other than those described above can be made without departing from the spirit of the present invention. For example, in the above embodiment, the case where the liquid supply device according to the present invention is applied to an apparatus for manufacturing an organic EL display device has been described. However, the scope of the present invention is not limited to this, and a liquid is applied on a substrate. The present invention can be applied to all liquid supply devices that supply the liquid in a stripe shape.
[0039]
【The invention's effect】
As described above, according to the present invention, the micro pump is incorporated in the nozzle . Then, a traveling wave toward the substrate is formed in the entire flow path formed in the micropump while securing a liquid flow, and the liquid is discharged so as to flow out toward the substrate by the traveling wave. Therefore, the control responsiveness (response) is improved, and the discharge / stop of the liquid from the nozzle can be set with high responsiveness, and the discharge amount can be accurately set or controlled.
[0040]
In addition, after stopping the liquid supply to the substrate, a traveling wave toward the opposite side of the substrate is formed while ensuring the flow of the liquid in the entire flow path formed in the micropump so that the liquid at the tip of the nozzle enters the nozzle. By sucking the liquid, so-called suck back, it is possible to effectively prevent the liquid from adhering to the nozzle tip.
[Brief description of the drawings]
FIG. 1 is a perspective view showing a first embodiment of a liquid supply apparatus according to the present invention.
FIG. 2 is a diagram showing a shape of a piezoelectric element applied to and applicable to the liquid supply apparatus of FIG.
3 is a cross-sectional view of a micropump constituting the liquid supply apparatus of FIG. 1. FIG.
FIG. 4 is a diagram showing a second embodiment of the liquid supply apparatus according to the present invention.
FIG. 5 is a diagram showing a third embodiment of a liquid supply apparatus according to the present invention.
FIG. 6 is a diagram showing a fourth embodiment of a liquid supply apparatus according to the present invention.
FIG. 7 is a diagram showing an organic EL display device manufacturing apparatus equipped with a conventional liquid supply device.
[Explanation of symbols]
40 ... Nozzle 50 ... Micro pump 51 ... Elastic member, flow path forming members 54, 54a, 54b ... Piezoelectric element 60 ... Drive controller 80 ... Surface acoustic wave element 511 ... Flow path L ... Liquid S ... Glass substrate

Claims (7)

In a liquid supply apparatus that supplies liquid in a stripe shape on the substrate by moving the nozzle relative to the substrate while discharging the liquid to flow out from the nozzle toward the substrate,
A micropump incorporated in the tip of the nozzle to pump the liquid in the nozzle;
A drive control unit for driving and controlling the micropump,
The micropump includes an elastic member that forms a flow path for liquid, and a plurality of piezoelectric elements that are arranged substantially parallel to the flow path along the outer peripheral surface of the elastic member,
The drive control unit controls a voltage applied to each of the plurality of piezoelectric elements to secure a flow of liquid in the entire flow path while generating a traveling wave toward the substrate on the flow path surface of the elastic member. A liquid supply apparatus which is formed and discharges liquid from the nozzle. The drive control unit, after stopping the liquid supply to the substrate, controls the voltage applied to each of the plurality of piezoelectric elements, thereby ensuring the flow of the liquid in the entire flow path and the elastic member. The liquid supply apparatus according to claim 1, wherein a traveling wave toward the opposite side of the substrate is formed on a flow path surface to suck the liquid at the tip of the nozzle into the nozzle. In a liquid supply apparatus that supplies liquid in a stripe shape on the substrate by moving the nozzle relative to the substrate while discharging the liquid to flow out from the nozzle toward the substrate,
A micropump incorporated in the tip of the nozzle to pump the liquid in the nozzle;
A drive control unit for driving and controlling the micropump,
The micropump includes an elastic member that forms a liquid flow path, and a plurality of magnetostrictive elements arranged substantially parallel to the flow path along the outer peripheral surface of the elastic member,
The drive control unit controls a magnetic field applied to each of the plurality of magnetostrictive elements to secure a flow of liquid in the entire flow path, while generating a traveling wave toward the substrate on the surface of the flow path of the elastic member. A liquid supply apparatus which is formed and discharges liquid from the nozzle. The drive control unit, after stopping the liquid supply to the substrate, controls the magnetic field applied to each of the plurality of magnetostrictive elements, thereby ensuring the flow of the liquid in the entire flow path and the elastic member. The liquid supply apparatus according to claim 3, wherein a traveling wave is formed on the surface of the flow path toward the opposite side of the substrate to suck the liquid at the tip of the nozzle into the nozzle. In a liquid supply apparatus that supplies liquid in a stripe shape on the substrate by moving the nozzle relative to the substrate while discharging the liquid to flow out from the nozzle toward the substrate,
A micropump incorporated in the tip of the nozzle to pump the liquid in the nozzle;
A drive control unit for driving and controlling the micropump,
The micropump includes an elastic member that forms a liquid flow path, and a surface acoustic wave element that is disposed on an outer peripheral surface of the elastic member.
The drive control unit generates an elastic wave toward the substrate in the surface acoustic wave element while securing a liquid flow in the entire flow path by controlling an electric signal applied to the surface acoustic wave element. A liquid supply apparatus that discharges the liquid from the nozzle by applying the elastic wave to the liquid in the flow path via the elastic member. In a liquid supply apparatus that supplies liquid in a stripe shape on the substrate by moving the nozzle relative to the substrate while discharging the liquid to flow out from the nozzle toward the substrate,
A micropump incorporated in the tip of the nozzle to pump the liquid in the nozzle;
A drive control unit for driving and controlling the micropump,
While the micropump includes a flow path forming member that forms a liquid flow path, and a surface acoustic wave element disposed in the flow path,
The drive control unit generates an elastic wave toward the substrate in the surface acoustic wave element while ensuring a liquid flow in the entire flow path by controlling an electric signal applied to the surface acoustic wave element. A liquid supply apparatus for discharging liquid from the nozzle. The drive control unit controls the electrical signal applied to the surface acoustic wave element after stopping the supply of the liquid to the substrate, thereby ensuring the flow of the liquid in the entire flow path and the surface acoustic wave element. The liquid supply apparatus according to claim 5, wherein a traveling wave toward the opposite side of the substrate is formed to suck the liquid at the tip of the nozzle into the nozzle.

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