JP2004337707A - Imaging system, imaging method, device, and electronic device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an imaging system which can collect a defective parts approximately simultaneously without stopping a line even when defects occur in a pattern drawn on a substrate by nozzle clogging. <P>SOLUTION: The imaging system for drawing the pattern PA by arranging a liquid material at a prescribed position on the substrate P has a first discharge part 10 discharging the liquid material from nozzles 211 toward the substrate P, a first moving part relatively moving the first discharge part 10 and the substrate P, a drawing inspection part 30 detecting the defective part D of the pattern PA drawn by the first discharge part 10, a second discharge part which has at least one nozzle 211 and discharges the liquid material from the nozzle 211 toward the defective part D, and a second moving part 50 moving the second discharge part 40 relatively to the defective part D based on information from the drawing inspection part 30. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a drawing apparatus for drawing a pattern by discharging a liquid material from a nozzle to a predetermined position on a substrate.
[0002]
[Prior art]
2. Description of the Related Art As a method for manufacturing a device having a fine wiring pattern such as a semiconductor integrated circuit, and a method for manufacturing a liquid crystal display or an organic EL (electroluminescence) element, a manufacturing method using an ink-jet method has attracted attention. In these manufacturing techniques, a liquid material containing a pattern forming material is discharged from a discharge head onto a pattern forming surface to form (draw) a material layer on a substrate, thereby forming a device. This is very effective in that it can be used for various types of production.
This discharge head discharges a liquid material from a plurality of nozzles having a diameter of about several tens of μm. However, since the nozzle diameter is small, foreign matter, a lump of the liquid material, and the like are easily clogged, and a discharge failure occurs. The nozzle clogging itself can be removed by performing a cleaning process such as wiping on the ejection head. However, a pattern (or substrate) on which a discharge (drawing) operation has been performed by a discharge head in which nozzle clogging has occurred includes defects, and is generally discarded.
Therefore, as disclosed in Japanese Patent No. 3093952, after cleaning a discharge head in which nozzle clogging has occurred, a liquid material is discharged toward a defective portion of a pattern (or a substrate) to repair the substrate, or a substrate including a defect. There is a technology that removes a device from a production line and repairs the device using a dedicated repair device.
[0003]
[Patent Document 1]
Japanese Patent No. 3093952 (page 6, FIG. 8)
[0004]
[Problems to be solved by the invention]
By the way, a large substrate is used in accordance with a demand for improvement in production efficiency and a large display, and since this large substrate is expensive, there is a problem that a large amount of waste causes a large loss. Further, even in the case of repairing a substrate having a defect, the production line is stopped when the liquid material is discharged again to the defective portion of the substrate after cleaning the discharge head in which the nozzle clogging has occurred. It is necessary to reduce the line operation rate and production efficiency. Furthermore, when a substrate containing a defect is removed from the production line for repair, a dedicated repair device, a transport device, and the like are required, and there is a problem that it is necessary to secure a space for installing them.
[0005]
The present invention has been made in view of such a problem, and even when a defect occurs in a pattern drawn on a substrate due to nozzle clogging, a defective portion can be substantially simultaneously removed without stopping a line. It is an object of the present invention to provide a drawing device capable of collecting.
[0006]
[Means for Solving the Problems]
The drawing device and the like according to the present invention employ the following means in order to solve the above-mentioned problems.
According to a first aspect of the present invention, in a drawing apparatus for drawing a pattern by arranging a liquid material at a predetermined position on a substrate, a first discharge unit that discharges the liquid material from a plurality of nozzles toward the substrate, a first discharge unit and the substrate A first moving unit that relatively moves the liquid, a drawing inspection unit that detects a defective portion of the pattern drawn by the first discharging unit, and at least one or more nozzles, and discharges the liquid from the nozzles toward the defective portion. And a second moving unit that relatively moves the second discharging unit to the defective portion based on information from the drawing inspection unit. According to the present invention, even if a defective portion occurs in the pattern drawn by the first discharge portion, the pattern is repaired by the second discharge portion, so that the substrate including the defective portion does not need to be discarded, and the yield can be improved. Can be.
The first moving unit and the second moving unit move the substrate relatively continuously in a predetermined direction, and move the first discharging unit and the second discharging unit relatively in a direction substantially orthogonal to the predetermined direction. In this case, since the substrate is sent in a fixed direction, the discharge operation from the first discharge unit and the second discharge unit can be performed in a flow operation, and the production efficiency can be improved.
[0007]
According to a second aspect of the present invention, in a drawing apparatus for drawing a pattern by arranging a liquid material at a predetermined position on a substrate, the drawing device includes a plurality of nozzles arranged corresponding to a pattern forming region of the substrate, and the nozzles are directed toward the substrate from the nozzles. A first ejecting unit for ejecting the liquid material, a first moving unit for relatively moving the substrate in a direction substantially orthogonal to the direction in which the nozzles are arranged, and a drawing inspection for detecting a defective portion of a pattern drawn by the first ejecting unit And a second ejection unit having at least one or more nozzles and ejecting the liquid material from the nozzles toward the defective portion, and relatively moving the second ejection unit to the defective portion based on information from the drawing inspection unit. And a second moving unit to be operated. According to the present invention, even if a defective portion occurs in the pattern drawn by the first discharge portion, the pattern is repaired by the second discharge portion, so that the substrate including the defective portion does not need to be discarded, and the yield can be improved. Can be.
[0008]
In addition, in synchronization with the movement of the substrate by the first moving unit, the second moving unit moves the second ejection unit in a direction substantially parallel to the direction in which the nozzles are arranged, and the second ejection unit faces the defective portion. In the case where the liquid material is ejected, the second ejection portion can be reliably moved to the position of the linear defect generated on the substrate, so that the repair can be performed efficiently.
In the case where a plurality of the second ejection units and the plurality of the second moving units are provided, it is possible to perform the repair even when a plurality of defective portions occur on the substrate.
In the case where a plurality of drawing inspection units are provided, it is possible to reliably detect a defective portion even when the substrate feeding direction changes.
In the case where the defective portion is a portion where the liquid material has not landed due to nozzle clogging, the defect can be repaired by discharging the same liquid material used for the first discharge portion from the second discharge portion. it can.
The second discharge unit is connected to the first discharge unit, and the second moving unit moves the second discharge unit relative to the first discharge unit. Since the parts are close to each other, the device can be made compact.
Further, with respect to the moving direction of the substrate, in the case where the drawing detecting unit and the second discharging unit are provided on both sides of the first discharging device, it is possible to repair the defective portion even when the substrate is reciprocated in the feeding direction. it can.
[0009]
According to a third aspect, in a drawing method for drawing a pattern by arranging a liquid material at a predetermined position on a substrate, a step of drawing the pattern by discharging the liquid material from the first discharge unit having a plurality of nozzles toward the substrate Detecting a defective portion of the pattern drawn by the first discharge portion, and moving the second discharge portion having at least one or more nozzles to the defective portion based on information of the detected defect. And repairing the liquid material by discharging the liquid material toward the liquid material. According to the present invention, even if a defective portion occurs in the pattern drawn by the first discharge portion, the pattern is repaired by the second discharge portion, so that the substrate including the defective portion does not need to be discarded, and the yield can be improved. Can be.
[0010]
Further, in the case where the step of detecting a defective portion of the pattern and the repairing step by the second ejection unit are performed on the same line as the drawing process by the first ejection unit, it is necessary to transfer the substrate including the defective portion to another apparatus. Since there is no such, production efficiency can be improved. Further, when a process of detecting a defective portion of a pattern and a repairing process by a second discharging unit are performed substantially simultaneously on a substrate on which a drawing process by the first discharging unit is performed, the processes may be performed at different times. Since it is performed not simultaneously but substantially simultaneously, the defective portion is repaired in a short time, and the production efficiency can be improved.
Further, in the drawing step on the substrate subsequent to the substrate on which the repairing step has been performed, almost simultaneously with discharging the liquid material from the first discharge unit toward the substrate, the second discharge is performed based on the result of the detection step on the previous substrate. When the pattern is drawn by discharging the liquid material from the portion toward the substrate, the pattern can be drawn on the next substrate even if the nozzle clogging occurs in the first discharge portion. The frequency of processing can be suppressed, and the line operation rate can be improved.
[0011]
In a fourth aspect, the device has a pattern drawn by the drawing apparatus according to the first and second aspects, or a pattern drawn by the drawing method according to the third aspect. According to the present invention, device production efficiency and product yield are improved, so that high-quality and low-cost devices can be manufactured.
[0012]
In a fifth aspect, an electronic apparatus includes the device according to the fourth aspect. According to the present invention, since a high-quality and low-priced display is provided as the display means, it is possible to manufacture an inexpensive electronic device in which the display on the display means is easy to see.
[0013]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of a discharge apparatus, a discharge method, a device, and an electronic apparatus according to the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a drawing system 1 according to the present invention, and FIG. 2 is a schematic diagram showing the drawing system 1.
The drawing system (drawing apparatus) 1 forms a pattern PA by discharging a liquid material toward a substrate P using an inkjet method, and includes a discharge device 10, a substrate moving device 20, a line sensor 30, and a repair. And a repair head moving device 50, a control device 80, and the like.
[0014]
The ejection device (first ejection unit) 10 includes an ejection unit 12 including a plurality of inkjet heads 200, a tank 14 storing fluid, and a pipe 16 (not shown) for sending the fluid in the tank 14 to the ejection unit 12. Etc. are provided.
The ejection unit 12 is configured by arranging a plurality of inkjet heads 200 to have a length substantially equal to the width of the substrate P in the Y direction. Since each of the ink jet heads 200 includes a plurality of nozzles 211 (see FIG. 3), the nozzles 211 are arranged uniformly with almost no gap in the width direction (Y direction) of the substrate P (see FIG. 2). . Note that the nozzles 211 need not necessarily be arranged in a line, but may be arranged approximately in the Y direction. Further, it is not necessary to arrange the nozzles 211 completely without gaps, and the nozzles 211 may be arranged only in a portion corresponding to the pattern formation area PA.
Thus, by flowing the substrate P in a direction substantially perpendicular to the discharge unit 12 (X direction, a predetermined direction), it is possible to discharge the liquid over the entire surface of the pattern formation area PA at once.
[0015]
FIG. 3 is an exploded perspective view illustrating an example of a configuration of the ink jet head 200, and FIG.
The ink jet head 200 has a configuration in which a nozzle plate 210 provided with a nozzle 211 and a pressure chamber substrate 220 provided with a vibration plate 230 are fitted in a housing 250. The main structure of the ink jet head 200 has a structure in which a pressure chamber substrate 220 is sandwiched between a nozzle plate 210 and a vibration plate 230 as shown in FIG. The nozzle plate 210 has nozzles 211 formed at positions corresponding to the cavities 221 when the nozzle plate 210 is bonded to the pressure chamber substrate 220. The pressure chamber substrate 220 is provided with a plurality of cavities 221 each of which can function as a pressure chamber by etching a silicon single crystal substrate or the like. The cavities 221 are separated by side walls (partition walls) 222. Each cavity 221 is connected via a supply port 224 to a reservoir 223 which is a common flow path. The diaphragm 230 is made of, for example, a thermal oxide layer. The vibration plate 230 is provided with an ink tank port 231 so that a fluid can be supplied from the tank 14. A piezoelectric element 240 is formed at a position corresponding to the cavity 221 on the vibration plate 230. The piezoelectric element 240 has a structure in which a crystal of a piezoelectric ceramic such as a PZT element is sandwiched between an upper electrode and a lower electrode (not shown). The shape of the piezoelectric element 240 changes in response to the ejection signal supplied from the control device 80.
The ink-jet head 200 is not limited to a configuration in which a shape change is caused in the piezoelectric element 240 to discharge a fluid. It may be a configuration.
[0016]
Referring back to FIGS. 1 and 2, the substrate moving device (first moving unit) 20 is disposed below the ejection device 10 and includes a table driving unit 21, a substrate position measuring unit 22 (not shown), and a suction table 23. You.
The suction table 23 holds the substrate P, and the table driving unit 21 transports the substrate P in the X direction together with the suction table 23. The substrate position measurement unit 22 measures the position (X direction) of the substrate P being transported, and transmits the information to the control device 80.
[0017]
A line sensor (drawing inspection unit) 30 is provided downstream of the ejection device 10 (downstream in the direction of feeding the substrate P) so as to be parallel to the ejection device 10. Then, when the substrate P on which the pattern PA has been drawn by the discharge device 10 is transported below the line sensor 30 by the substrate moving device 20, the line sensor 30 captures the surface of the substrate P in a line view, and the discharge device The undischarged portion of the liquid material by 10 is detected. Then, the detection information is transmitted to the control device 80.
[0018]
Further, on the downstream side of the line sensor 30, a repair discharge device (second discharge portion) 40 and a repair head moving device (second move portion) 50 are installed. The repair discharge device 40 includes a discharge unit 42 including an inkjet head 200, a tank 44, a pipe 46, and the like (not shown). The repair discharge device 40 repairs the defective portion D of the substrate P, and the repair head moving device 50 moves the discharge portion 42 toward the defective portion D of the substrate P. Specifically, based on information from the line sensor 30, the repair head moving device 50 is driven in synchronization with the transport of the substrate P, and the ejection unit 42 is moved above the defective portion D of the substrate P (Y Direction). Then, the repair discharge device 40 discharges the same liquid material as the discharge device 10 toward a defective portion D (a non-discharged portion of the liquid material) of the substrate P on which the pattern PA has been drawn by the discharge device 10. Thus, the defective portion D of the substrate P is repaired.
Note that the repairing discharge device 40 may include at least one nozzle 211, but the manufacturing cost and the like may be reduced by using the same ink jet head 200 as the discharge device 10.
Further, the repair discharge device 40 is not limited to the case where one discharge unit 42 is provided, but may be plural. In that case, the repair head moving device 50 may be provided for each of the discharge units 42, or a plurality of discharge units 42 may be moved by one repair head moving device 50. Since the repair discharge device 40 includes the plurality of discharge portions 42, it is possible to cope with a case where a plurality of defective portions D (non-discharge portions of the liquid material) occur on the substrate P. That is, the number of ejection units 42 to be installed may be determined according to the frequency (reliability) of nozzle clogging of the ejection device 10.
[0019]
The control device 80 (not shown) is a computer device and includes a CPU, a memory, an interface circuit, and the like. The control device 80 causes the discharge device 10 to discharge the fluid containing the luminescent material by executing a predetermined program.
Further, based on the information from the line sensor 30, the repair discharge device 40 and the repair head moving device 50 are operated to perform the repair work.
[0020]
The substrate P is formed of a material such as glass, quartz, sapphire, or a synthetic resin such as polyester, polyacrylate, polycarbonate, and polyetherketone. For example, a large substrate having a size of several m square is used, and a single substrate P is provided with a plurality of pattern formation areas PA. The size of the substrate P and the size and number of the pattern formation areas PA are arbitrarily determined according to the device DS to be manufactured.
Further, the fluid discharged onto the substrate P can be changed according to the device to be manufactured. In the case of manufacturing an EL element, a light-emitting material is sometimes used as a fluid. The light-emitting material is, for example, an organic material, and an aluminum quinolinol complex (Alq ₃ ) is used as a low-molecular-weight organic material. As a molecular organic material, there is polyparaphenylene vinylene (PPV) or the like. In any case, the viscosity of the fluid may be adjusted with a solvent or the like so that the fluid exhibits fluidity that can be ejected from the inkjet head 200 as droplets.
[0021]
The drawing system 1 having the above configuration operates as follows.
In the drawing method using the drawing system 1, the step of forming the pattern PA on the substrate P by the discharge device 10, the step of detecting the defective portion D of the substrate P by the line head 40, the repair discharge device 40 and the movement of the repair head Repairing the defective portion D by the device 50.
[0022]
In the step of forming the pattern PA on the substrate P by the ejection device 10, first, the substrate P is transported onto the suction table 23 by a substrate transport device (not shown). The suction table 23 finely adjusts the position of the substrate P and holds it by suction. Next, the substrate P is transported by the table driving unit 21 at a substantially constant speed in the X direction together with the suction table 23. Then, the position (X direction) of the substrate P being transported is measured by the substrate position measurement unit 22, and the information is sent to the control device 80.
Then, when the substrate P is transported below the discharge device 10, the control device 80 controls the liquid material to land on the pattern formation area PA on the substrate P based on the information sent from the substrate position measurement unit 22. Then, the ejection signal is sent to the ejection device 10 at a proper timing (in synchronization).
[0023]
The ejection unit 12 of the ejection device 10 that has received the ejection signal operates as follows.
First, an ejection signal is sent from the control device 80 almost at the same time when the pattern formation area PA of the substrate P moves below the ejection section 12 (the inkjet head 200). At this time, the fluid flows into the cavity 221 of the ink jet head 200, and in the ink jet head 200 to which the ejection signal is supplied, the piezoelectric element 240 applies the voltage applied between its upper electrode and lower electrode. Is generated. This change in the outer shape deforms the diaphragm 230 and changes the volume of the cavity 221. As a result, droplets of the fluid are ejected from the nozzle 211 of the cavity 221 toward the upper surface of the substrate P and land. The fluid reduced by the discharge is newly supplied from the tank 14 to the cavity 221 from which the fluid has been discharged.
As described above, the liquid material such as the light emitting material is arranged at the designated position on the substrate P.
[0024]
Next, in the step of detecting the defective portion D of the substrate P by the line sensor 30, the line sensor 30 arranged on the downstream side of the ejection device 10 detects the position of the substrate P transported together with the suction table 23 by the substrate moving device 20. The surface is grasped in a line visual field, and an undischarged portion of the liquid material by the discharge device 10 is detected. That is, when dust or the like is clogged in some of the plurality of nozzles 211 of the ink-jet head 200, as shown in FIG. Appear in the shape. FIG. 5 is a conventional example showing a defective portion D generated on the substrate P, and shows a case where nozzle clogging of two nozzles 211 occurs. If the nozzle 211 has been clogged since the start of the discharge operation, a linear defective portion D1 as shown in FIG. 5 will appear. Defect portion D2 appears. Therefore, by arranging the line sensor 30 on the downstream side of the ejection device 10, the Y position of the defective portion D of the pattern PA and the starting point (X direction) thereof are detected. Then, the information is sent to the control device 80.
[0025]
Then, the step of repairing the defective portion D by the repairing discharge device 40 and the repair head moving device 50 is performed only when the defective portion D has occurred on the substrate P. That is, only when there is an undischarged portion, the repair discharge device 40 and the repair head moving device 50 are driven to repair the undischarged portion. Specifically, the control device 80 instructs the repair head moving device 50 based on the information from the substrate position measuring unit 22 and the information on the unejected portion from the line sensor 30 to cause the ejection unit 42 to Move to D. Then, when the defective portion D is sent directly below the discharge section 42, the fluid is discharged to the defective portion D. As a result, the fluid lands on the defective portion D, which is the undischarged portion of the fluid, and the defective portion D is repaired. The operation of the ejection unit 42 (the inkjet head 200) is as described above.
[0026]
As described above, the defective portion D of the pattern PA formed on the substrate P can be repaired. In particular, by disposing a line sensor 30 for detecting a defective portion D of the substrate P, a repairing discharging device 40 for repairing the defective portion D, and a repair head moving device 50 on the downstream side of the discharging device 10, Since the defective portion D can be repaired without performing the cleaning process described above, there is no need to stop the transport of the substrate P by the table driving unit 21. Further, since it is not necessary to transfer the substrate P including the defective portion D from the line of the drawing system 1 to a device dedicated to repair, the manufacturing line can be made compact. Further, since the drawing of the pattern PA, the detection of the defect, and the repair of the defect can be performed substantially simultaneously on one substrate P, the production efficiency can be improved.
[0027]
In addition, in the drawing of the pattern PA on the substrate P2 next to the substrate P1 after the repair process, the detection result of the line sensor 30 on the preceding substrate P1 is almost simultaneously with the ejection of the liquid material from the ejection device 10 toward the substrate P2. , The liquid material is also discharged from the repairing discharge device 40 toward the substrate P2 to draw the pattern PA. That is, the nozzle 211 in which the nozzle clogging has occurred during the drawing operation on the substrate P1 has not been eliminated even in the next drawing operation on the substrate P2. The liquid material may be ejected from the repair ejection device 40 based on the positional information of the defective portion D of the previous substrate P1. Then, the line sensor 30 only needs to detect only the newly generated defect portion D. Accordingly, the frequency of the cleaning process of the ejection device 10 can be suppressed, the line stop time can be reduced, and the manufacturing efficiency can be improved.
[0028]
When nozzle clogging is likely to occur due to the nozzle diameter of the discharge device 10 or the characteristics of the fluid, a plurality of repair discharge devices 40 are provided as shown in FIG.
When the processing speed of the control device 80 or the like is sufficiently high with respect to the substrate feeding speed, as shown in FIG. 6, the ejection device 10, the line sensor 30, the repair ejection device 40, and the repair head moving device 50 are used. , The device can be made compact.
[0029]
By connecting a plurality of (for example, three) drawing systems 1 to each other, a luminescent material such as red, green, and blue is sequentially discharged from each drawing system 1 toward the substrate P, so that a color for a liquid crystal display is obtained. Devices DS such as filters and organic EL elements can be manufactured continuously.
[0030]
Next, an example of an electronic apparatus EQ including the display device DS manufactured using the above-described drawing system 1 will be described with reference to FIG.
FIG. 7A is a perspective view illustrating an example of a mobile phone. In FIG. 7A, a mobile phone 1000 (electronic device EQ) includes a display unit 1001 using the above-described display device DS.
FIG. 7B is a perspective view illustrating an example of a wristwatch-type electronic device. In FIG. 7B, a wristwatch 1100 (electronic device EQ) includes a display unit 1101 using the above-described display device DS.
FIG. 7C is a perspective view showing an example of a portable information processing device such as a word processor or a personal computer. 7C, the information processing apparatus 1200 (electronic device EQ) includes an input unit 1202 such as a keyboard, an information processing apparatus main body 1204, and a display unit 1206 using the above-described organic EL display device DS.
As described above, the electronic device EQ illustrated in FIGS. 7A to 7C includes the display device DS according to the above-described embodiment as a display unit. Can be realized.
[0031]
Note that the technical scope of the present invention is not limited to the above embodiment, and various changes can be made without departing from the spirit of the present invention. And the like are merely examples, and can be appropriately changed.
[0032]
When manufacturing various devices, the present invention can be applied not only to color materials such as light emitting materials, but also to manufacturing of metal wiring by discharging a conductive material and an insulating material.
[0033]
The discharge unit 12 of the discharge device 10 has been described in the case where the inkjet heads 200 are arranged to have substantially the same length as the width of the substrate P. However, the present invention is not limited to this, and a head moving device that moves the discharge unit 12 in the Y direction Alternatively, the ejection may be performed while moving the ejection unit 12 in the Y direction.
[0034]
The case where the ejection device 10 and the like are fixed and the substrate P is transported by the substrate moving device 20 has been described. However, the present invention is not limited to this, and the substrate P is fixed and the ejection device 10 and the like are moved in the X direction. Good.
[0035]
As shown in FIG. 8, a line sensor 30, a repair discharge device 40, and a repair head moving device 50 can be provided on both sides of the discharge device 10, respectively. In this case, the substrate P can be transported so as to reciprocate. That is, when the substrate P is sent from the right side to the left side in FIG. 7, a part of the defective portion D of the substrate P is repaired by using the line sensor 30a and the repair discharge device 40a, and the substrate P is moved from the left side. In the case where the sheet is turned rightward, the remaining defective portion D may be repaired by using the line sensor 30b and the repair ejection device 40b.
[0036]
Although the case where the line sensor 30 is used as a device for detecting the defective portion D of the substrate P has been described, the invention is not limited to this, and a camera device or the like that detects the entire surface of the substrate P at once may be used.
[0037]
The display device DS is applicable to various devices such as a PDP (plasma display panel) device and a liquid crystal display device in addition to the organic EL display device.
[Brief description of the drawings]
FIG. 1 is a perspective view showing a drawing system 1. FIG. 2 is a schematic view showing a drawing system 1. FIG. 3 is an exploded perspective view showing a configuration example of an ink jet head. FIG. FIG. 5 is a view showing a defective portion generated on a substrate (conventional example)
FIG. 6 is a diagram illustrating another configuration example of the drawing system. FIG. 7 is a diagram illustrating an example of an electronic apparatus including a device. FIG. 8 is a diagram illustrating another configuration example of the drawing system.
DESCRIPTION OF SYMBOLS 1 Drawing system (drawing apparatus) 10 Discharge device (first discharge part) 20 Substrate moving device (first moving part) 30 Line sensor (drawing inspection part) 40 Repair discharge device (second discharge part) 50 Repair head moving device (2nd moving part) 211 nozzle P substrate PA pattern (pattern formation area) D defect part DS device (display device) EQ electronic equipment

Claims (15)

In a drawing apparatus that draws a pattern by arranging a liquid material at a predetermined position on a substrate,
A first discharge unit configured to discharge a liquid material from the plurality of nozzles toward the substrate;
A first moving unit that relatively moves the first ejection unit and the substrate;
A drawing inspection unit that detects a defective portion of a pattern drawn by the first ejection unit;
A second discharge unit that has at least one or more nozzles and discharges a liquid material from the nozzle toward the defective portion;
A second moving unit that relatively moves the second ejection unit to the defective portion based on information from the drawing inspection unit. The first moving part and the second moving part move the substrate relatively continuously in a predetermined direction, and move the first discharging part and the second discharging part relative to each other in a direction substantially orthogonal to the designated direction. The drawing apparatus according to claim 1, wherein the drawing apparatus is moved. In a drawing apparatus that draws a pattern by arranging a liquid material at a predetermined position on a substrate,
A first discharge unit that has a plurality of nozzles arranged corresponding to the pattern formation region of the substrate, and discharges the liquid material from the nozzles toward the substrate;
A first moving unit that relatively moves the substrate in a direction substantially orthogonal to the direction in which the nozzles are arranged;
A drawing inspection unit that detects a defective portion of a pattern drawn by the first ejection unit;
A second discharge unit that has at least one or more nozzles and discharges a liquid material from the nozzle toward the defective portion;
A second moving unit that relatively moves the second ejection unit to the defective portion based on information from the drawing inspection unit. In synchronization with the movement of the substrate by the first moving part, the second moving part moves the second discharge part in a direction substantially parallel to the direction in which the nozzles are arranged, and the second discharge part 4. The apparatus according to claim 3, wherein the device discharges a liquid material toward the defective portion. The drawing apparatus according to claim 1, wherein a plurality of the second ejection units and the plurality of the second movement units are provided, respectively. The drawing apparatus according to any one of claims 1 to 5, wherein a plurality of the drawing inspection units are provided. The drawing apparatus according to any one of claims 1 to 6, wherein the defective portion is a portion of the liquid material that has not landed due to nozzle clogging. The said 2nd discharge part is connected with the said 1st discharge part, and the said 2nd moving part moves the said 2nd discharge part relatively with respect to the said 1st discharge part, The said 1st discharge part. The drawing apparatus according to any one of claims 1 to 7. 9. The drawing apparatus according to claim 1, wherein the drawing detection unit and the second ejection unit are provided on both sides of the first ejection device with respect to a moving direction of the substrate. 10. . In a drawing method of drawing a pattern by arranging a liquid material at a predetermined position on a substrate,
Discharging the liquid material from the first discharging unit having a plurality of nozzles toward the substrate to draw the pattern,
Detecting a defective portion of the pattern drawn by the first discharge unit;
Moving a second ejection section having at least one or more nozzles to the defective portion based on the detected defect information, and discharging and repairing the liquid toward the defective portion. Characteristic drawing method. 11. The drawing method according to claim 10, wherein the step of detecting a defective portion of the pattern and the step of repairing by the second discharge unit are performed on the same line as the step of drawing by the first discharge unit. 11. The method according to claim 10, wherein a detection step of a defective portion of the pattern and a repair step by the second discharge unit are performed substantially simultaneously on the substrate on which the drawing process by the first discharge unit is performed. The drawing method according to claim 11. In the drawing process on the substrate next to the substrate on which the repair process has been performed,
Almost simultaneously with discharging the liquid from the first discharge unit toward the substrate, based on the result of the detection step on the previous substrate, discharging the liquid from the second discharge unit toward the substrate, The drawing method according to any one of claims 10 to 12, wherein the pattern is drawn. It has a pattern drawn by the drawing device according to any one of claims 1 to 9, or a pattern drawn by the drawing method according to any one of claims 10 to 12. A device, characterized in that: An electronic apparatus comprising the device according to claim 14.

Images