JP3839872B2 - Manufacturing method of two-dimensional panel - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention mainly relates to a method of manufacturing a two-dimensional panel configured to increase the area, such as a two-dimensional photosensor, a liquid crystal display, and a plasma display.
[0002]
[Prior art]
Usually, the X-ray inspection machine used in the medical field converts X-rays into visible light with a fluorescent screen and exposes it to a film in close contact with the fluorescent screen because of the need to accurately detect an abnormal part of the patient. The method of confirming is the mainstream. However, with this confirmation method, there is no problem in the resolution of the image at a practical level, but it takes time from measurement to diagnosis, and in order to specify the measurement location, a large part depends on the skill and feeling of the laboratory technician. The problem is pointed out.
[0003]
However, in recent years, development of large area sensors using amorphous silicon diodes has progressed, and the reliability has increased, and this is because it is easy to increase the area as an advantage of using amorphous silicon. It has been considered to obtain an enhanced image by image processing in real time by using the conventional X-ray examination. As a result, development is urgently required to increase the efficiency of patient abnormality diagnosis.
[0004]
At that time, the problem is how to achieve a large area, but a large change in the process size of panel creation at one time is important for film formation and photo processes. New capital investment is required, which is not realistic. Therefore, in practice, a method is employed in which panels created with an existing process size are bonded together in a state where the pixel pitches are aligned in the two-dimensional direction. In particular, such a technique for bonding panels in a two-dimensional direction with high accuracy is indispensable in view of the recent demand for larger display panels.
[0005]
FIG. 6 shows a part of a bonding process of a medical X-ray sensor panel that is being developed recently. 6A shows a state where four area sensor panels are aligned in a two-dimensional direction as viewed from above, and FIG. 6B shows a state where the area sensor panel is observed from a lateral direction. Further, FIG. 6 (c) is a view in which a state in which a fluorescent plate for converting X-rays into visible light is bonded to four aligned panels from the top is observed from the lateral direction. .
[0006]
Reference numerals 601 to 604 denote area sensor panels formed on a transparent substrate, and vertical and horizontal line groups indicated by reference numeral 600 are simplified representations of sensor pixel groups arranged at equal pitches in a two-dimensional direction. Reference numerals 621 ′ to 628 ′ represent pixel observation areas at the time of alignment, reference numerals 621 to 628 represent reflection microscopes corresponding thereto, and reference numerals 651 to 662 represent alignment alignments provided on the outer periphery of the panel. Numerals 611 to 614 are panel support stages, 606 is a fluorescent plate, 605 is an adhesive layer for attaching the fluorescent plate 606 to the panel, and 631 is a pressing roller for attaching the fluorescent plate 606.
[0007]
As shown in FIGS. 6A and 6B, in order to align the four panels 601 to 604, first, alignment marks are provided at arbitrary positions on the panels. The panel is fixed to a stage that is independently supported by a method such as vacuum contact, and each stage is arbitrarily moved in the X, Y, and θ directions while detecting the alignment mark using an observation means such as a microscope. To adjust the position.
[0008]
In this case, since each pixel is fully formed up to its edge on the connection side between adjacent panels, and the area sensor described above is configured using an amorphous silicon semiconductor, a microscope is used. Therefore, the alignment mark needs to be provided on the outer peripheral edge of the enlarged surface composed of four panels, as shown in FIG. 6 (a).
[0009]
As a specific alignment method, first, the alignment marks 652 and 653, 655 and 656, 658 and 659, and 661 and 662 are observed by the microscope observation areas 622 ′, 624 ′, 626 ′, and 628 ′, respectively. A method for performing alignment will be described below.
[0010]
First, after placing the panels 601 to 604 on the stages 611 to 614 and fixing them by vacuum contact, the alignment marks 652 and 653 are similarly set with the microscope 622, the alignment marks 655 and 656 are similarly set with the microscope 624, In the microscope 626, the alignment marks 658 and 659 and the microscope 628 are similarly placed in the alignment marks 661 and 662, respectively, and the two alignment marks on the adjacent panels are observed.
[0011]
In the field of view of each microscope, reference lines for confirming the alignment mark positions are previously placed in the two-dimensional direction, that is, the X and Y directions, and the intervals between these reference lines are adjusted to the desired intervals. Put. Then, as shown in FIG. 6B, the light of the microscope is irradiated from the upper surface of the area sensor panel, avoiding the location of the amorphous semiconductor element, and the reflected light is confirmed with the microscope while checking the alignment mark and position. Each stage is moved by the operator by operating a switch for moving the stage so that the confirmation lines match. If necessary, a sensor such as a CCD may be set on the microscope, and the obtained image data may be linked to the stage.
[0012]
Next, as shown in FIG. 6A, a method for performing alignment by observing all the alignment marks in all the observation areas shown in the same manner will be described. Also in this method, an alignment mark position confirmation line is previously placed in the X and Y directions in the field of view of the microscope. First, a single master substrate on which an alignment absolute position for obtaining the absolute position of the microscope is formed is prepared, and first, the microscope is aligned. This determines the absolute position of the microscope.
[0013]
Next, after placing the four area sensor panels 601 to 604 on the above-described stages 611 to 614 and fixing them by vacuum contact, the alignment mark 651 is similarly fixed by the microscope 621 and the microscope 622 is similarly fixed. Alignment marks 652, 653, alignment mark 654 with microscope 623, similarly, alignment mark 655, 656 with microscope 624, alignment mark 657 with microscope 626, alignment mark 658, 659 with microscope 626 The alignment mark 660 is observed at 627, and the alignment marks 661 and 662 are observed with the microscope 628.
[0014]
Similarly to the method described above, the microscope light is irradiated from the upper surface of the area sensor panel, and each stage is moved so that each alignment mark matches the reference line for confirming the alignment mark position provided in the field of view of the microscope. . In this method, in order to confirm the absolute position of the alignment, a master substrate is created, and a microscope is attached to the master substrate. This requires considerable effort, but three alignment marks per position substrate are required. Since alignment is performed, the alignment accuracy is considerably improved as compared with the above-described method.
[0015]
As shown in FIG. 6C, the fluorescent plate 606 is bonded to the four area sensor panels aligned in this manner by the adhesive 605. Each panel after being bonded is fixed by a single fluorescent plate bonded across the panels.
[0016]
[Problems to be solved by the invention]
In this way, when trying to create a panel with a large area by laminating a plurality of panels in which pixels are arranged at an equal pitch in a two-dimensional direction, the continuity of the pixel pitch at the joint is ensured. If it is not done, even if it is a sensor or a display, image moire or disturbance will occur.
[0017]
In particular, if only alignment is performed with the alignment mark provided on the outer peripheral edge of the enlargement panel, it is unavoidable that the panel is distant from the alignment mark. However, since it becomes the largest, it becomes easy to cause the above-mentioned problem.
[0018]
In order to solve the above problems, the present invention substitutes the alignment mark with a semiconductor element or an electric wiring pattern on the panel arranged in a two-dimensional direction at the time of laminating the panels, so that two or more locations near the joint portion are used. To provide a method for manufacturing a two-dimensional panel that can maintain pixel pitch continuity by performing alignment at a location, and can minimize image disturbance on a display and moire phenomenon on a sensor. It is the purpose.
[0019]
[Means for Solving the Problems]
For this reason, in the present invention, a plurality of panels in which semiconductor elements and / or electrical wiring patterns are two-dimensionally arranged at a desired pitch, Position control using alignment marks provided on each of the panels, A method of manufacturing a two-dimensional panel for fixing the panel to a required member, wherein the position control is performed ,in front A part of the semiconductor element and / or electrical wiring pattern, Any of the arrays provided on the side adjacent to the panel adjacent to the other adjacent panel In at least two places, Said A plurality of the panels are fixed by the required member by being aligned as alignment marks.
[0020]
in this case, In the position control, The semiconductor element and / or electric wiring pattern in adjacent panels Array direction Each having a reference line parallel to each other, and the interval between the parallel reference lines is set so as to satisfy a desired relationship between semiconductor elements and / or electrical wiring patterns between adjacent panels. Is preferred.
[0021]
Furthermore, the reference line is Used for the position control It is provided within the field of view of the microscope, and a part of the semiconductor element and / or electric wiring pattern is aligned with respect to this. Also, The position control When supporting each panel Position control is performed using a stage, and the stage Is capable of moving and adjusting in a two-dimensional direction in which the semiconductor elements and / or electrical wiring patterns are arranged, and the driving means for moving and adjusting the stage is interlocked with an observation image of the microscope processed by a computer. Good.
[0022]
In addition, a wave such as an electromagnetic wave or a sound wave is used as the detection unit when aligning with the reference line. In particular, the detection unit includes visible light having a wavelength of 700 nm or less. and The semiconductor elements two-dimensionally arranged on the panel are amorphous silicon semiconductors In case The position detection for alignment may be performed by irradiating the visible light, avoiding the portion used for the active layer of the semiconductor element.
[0023]
DETAILED DESCRIPTION OF THE INVENTION
(Embodiment 1)
FIG. 1 shows a case where four area sensors using amorphous silicon semiconductor diodes are bonded as an embodiment of the present invention. Specifically, the alignment and the process of bonding fluorescent plates are displayed. . FIG. 1 (a) shows a state where an area sensor panel using an amorphous silicon semiconductor is combined with four alignments, which is observed from the upper surface of the panel, and (b) is observed from the lateral direction. It is in the state. Further, FIG. 1C shows a state in which the process of attaching and fixing one fluorescent plate to four aligned panels is observed from the lateral direction.
[0024]
Here, reference numerals 101 to 104 are area sensor panels in which pixels are formed on a substrate made of a transparent substrate, and vertical and horizontal line groups of reference numeral 120 are simplified representations of sensor pixel groups arranged two-dimensionally at equal pitches, Reference numerals 141 ″ to 145 ″ represent pixel observation areas for alignment, reference numerals 141 to 145 indicate magnified observation means including a transmission microscope corresponding thereto, and reference numerals 141 ′ to 145 ′ are also visible. A light source of a microscope composed of light, reference numerals 131 to 134 are panel stages, 106 is a fluorescent plate, 105 is an adhesive layer for attaching the fluorescent plate 106 to the sensor panel, and 135 is a pressing roller for attaching the fluorescent plate. is there.
[0025]
Moreover, the dotted lines 161-164 shown to (a) of FIG. 1 are the centerlines of each panel parallel to the edge part of adjacent panels in this embodiment, and if needed, a panel is For example, in the shape of a parallelogram, when crossing the parallel edge of adjacent panels and the other center line that is not a parallel component, the latter is calculated as two sides of the center line parallel to the edge. It represents a straight line connecting the midpoints.
[0026]
2A shows the observation area 141 ″ in detail as an example, and FIG. 2B shows a simplified cross section. Here, reference numeral 121 denotes Cr or the like. The first metal layer 122, the gate insulating layer 122 made of SiN or the like, 123 the amorphous silicon semiconductor layer, 124 the n-type semiconductor layer, 125 the second metal layer made of Al or the like, 126 the semiconductor made of PI or the like The hatched portion of the protective layer 127 represents the active region of the amorphous silicon semiconductor 123. Reference numeral 100 represents an end surface portion of the two panels, and 151 to 153 are used for alignment position confirmation provided in advance in the field of view of the microscope. Are reference lines in the two-dimensional direction, that is, in the X and Y directions.
[0027]
As shown in FIGS. 1A and 1B, the outline of the alignment method of the four area sensor panels is as follows. Here, the four sensor panels 101 to 104 are fixed to the independently provided stages 131 to 134 with a method such as vacuum contact, with the element side facing up, and the sensor back surface ((b of FIG. From the lower side)), a part of the pattern is detected for each of the required observation areas 141 ′ to 145 ′ using observation means 141 to 145 such as a transmission microscope, and each stage is set to X, Y, θ. Move in any direction.
[0028]
In addition, as shown in FIG. 2A, alignment is realized by aligning the outer periphery of the pattern with reference lines 151 to 153 provided in the microscope visual field. If the horizontal direction in FIG. 1A is the X direction, the vertical direction is the Y direction, and FIG. 2A is similarly defined, in this case, the alignment in the X direction is the first metal layer 121. Is aligned with the reference lines 152 and 153, and alignment in the Y direction is achieved by aligning the first metal layer 121 with the reference line 151.
[0029]
At this time, the distance between the reference lines 152 and 153 is preferably set closest to the distance so as to satisfy a predetermined distance, that is, a desired relationship between semiconductor elements and / or electrical wiring patterns between adjacent panels. It is necessary that the relationship between existing corresponding patterns is set as desired. In the embodiment of the present invention, the pattern used as the alignment is the first metal layer 121, but any pattern may be used as long as the target device is not adversely affected. In addition, as shown in FIG. 2B, as long as the light of the microscope is incident from the back surface of the panel, the first metal layer 121 blocks the active region 127 of amorphous silicon, and the amorphous silicon is Does not cause light deterioration.
[0030]
Furthermore, in the embodiment of the present invention, an example in which the transmitted light from the back surface of the panel is observed with a microscope from the panel surface is shown. However, as long as this panel is created, a reflective microscope is set on the back. In the case of infrared light that does not include light having a wavelength of 700 nm or less as a light source used for the microscope, the reflection microscope may be set on the table and observed. Thus, in the observation area 141 ″, the panels 101 and 102, in the observation area 142 ″, the panels 102 and 103, in the observation area 143 ″, the panels 103 and 104, and in the observation area 144 ″, the panels 104 and 101 are displayed. Furthermore, in the observation area 145 ″, all panels, that is, at least two positions per joint line, are simultaneously aligned in the X and Y direction components, and finally an optimum alignment state is created. It is.
[0031]
Further, in the embodiment of the present invention, as shown in the alignment observation areas 141 ″ to 145 ″, the pattern position used for alignment is closer to the panel joint (joint edge of the adjacent panel) than the center lines 161 to 164. Since alignment is performed using patterns that are close to each other and more preferably in the shortest positional relationship of the panel joints, continuity of pixel pitch (arrangement pitch) is most easily secured.
[0032]
In particular, even when compared with the above-described FIG. 6A, the alignment accuracy of the joint is further increased by the amount that the alignment observation area 145 ″ can be aligned in FIG. It should be noted that the stage 131 to 134 is driven when the pixel pitch of the panel exceeds 100 μm, and it is not impossible to control even if it is performed by a manual method using a micro, etc., but the pixel pitch becomes 100 μm or less. Is preferably driven by means that can be controlled automatically, such as a pulse motor, etc. In this case, it is desirable to link the observation images of a computerized microscope.
[0033]
Furthermore, when the pixel pitch is less than 50 μm, all the alignment systems including the stages 131 to 134 and the microscopes 141 to 145 are stored in the thermal chamber in order to suppress the influence of expansion and contraction due to temperature changes. In addition, it is preferable to always manage the temperature including the panels 101 to 104 at a constant temperature or use a single wavelength light source (wave) of the microscope.
[0034]
As shown in FIG. 1 (c), the panel aligned in this manner is subjected to the condition that the fluorescent plate 106 from the top does not cause a positional deviation between the panels after the adhesive 105 is applied. , While being pressed by the roller 135, they are bonded together to connect and fix the panels to each other. The adhesive used here is preferably a room-temperature curable adhesive as much as possible in order to suppress the influence of temperature change. Furthermore, the thickness of the adhesive 105 after pasting is as thin as possible, preferably 10 μm or less, in order to suppress the influence of shrinkage of the adhesive during curing.
[0035]
Finally, the positions of the four panels 101 to 104 aligned on the stages 131 to 134 are fixed by the fluorescent plate 106 and the adhesive 105.
[0036]
(Embodiment 2)
FIG. 3 shows another embodiment of the present invention, in which four amorphous silicon semiconductors each having a fluorescent plate bonded to the upper surface of a semiconductor element are bonded in advance. For example, alignment in the case of a diode area sensor and This represents the process of attaching it to the base. FIG. 3A is a diagram in which four area sensor panels are aligned in the vertical and horizontal directions, and is observed from the upper surface of the panel, and FIG. 3B is a diagram in which they are observed in the horizontal direction. Moreover, (c) of FIG. 3 is the figure which observed the process which bonds and fixes one base to 4 aligned panels from the horizontal direction.
[0037]
Here, reference numerals 301 to 304 are area sensor panels in which pixels are formed on a substrate made of a transparent substrate, and vertical and horizontal dotted line groups of reference numeral 310 are simplified representations of sensor pixel groups arranged two-dimensionally at equal pitches ( The reference numeral 311 to 314 is a sensor substrate, the corresponding reference numerals 321 to 324 are fluorescent plates, and the reference numeral 315 is an adhesive for bonding the sensor substrate and the fluorescent plate. Reference numeral 317 denotes a base, and reference numeral 316 denotes an adhesive layer for fixing the base and the area sensor panel.
[0038]
The above-described area sensor panels 301 to 304 are in a state where the sensor substrates 311 to 314 and the fluorescent plates 321 to 324 are bonded by the adhesive layer 315. Reference numerals 341 ′ to 345 ′ represent pixel observation areas for alignment, reference numerals 341 to 345 correspond to magnified observation means such as a reflection microscope using visible light as a light source, and reference numeral 331. Reference numeral 334 denotes a panel stage, and reference numeral 335 denotes a stage for fixing the base.
[0039]
Also, reference numerals 351 to 354 (shown by dotted lines) shown in FIG. 3A are adjacent to the center line parallel to the edge of the adjacent panel, for example, when the panel is a parallelogram. It represents a straight line connecting the midpoints of two sides that are not components parallel to the edge of the panel.
[0040]
Furthermore, FIG. 4 is a diagram showing the observation area 341 ′ in detail as an example. Here, reference numeral 400 is an end surface portion of the two area sensor panels, and reference numerals 401 to 403 are two-dimensional directions for confirming the alignment position provided in advance in the field of view of the microscope, that is, reference lines in the X and Y directions. is there.
[0041]
As shown in FIGS. 3A and 3B, the outline of the alignment method of the four area sensor panels is as follows. That is, the phosphor side of the area sensor panels 301 to 304 is fixed to the independently provided stages 331 to 334 by a technique such as vacuum contact, and reflected from the back side of the sensor (the lower side of FIG. 3B). Each stage is arbitrarily moved in the X, Y, and θ directions while detecting a part of the pattern using observation means 341 to 345 such as a scanning microscope.
[0042]
As shown in FIG. 4, the alignment is performed by aligning the outer peripheral edge of the pattern with reference lines 401 to 403 provided in the field of view of the microscope. 3A, the horizontal direction is the X direction, the vertical direction is the Y direction, and FIG. 4 is also defined. In this example, the alignment in the X direction is the outer peripheral edge of the first metal layer 121. Is aligned with the reference lines 402 and 403, and alignment in the Y direction is performed by aligning the metal layer 121 with the reference line 401.
[0043]
At this time, the distance between the reference lines 402 and 403 is preferably present in the nearest vicinity so as to satisfy a predetermined distance, that is, a desired relationship between semiconductor elements and / or electrical wiring patterns between adjacent panels. It is necessary that the relationship between the corresponding patterns is set as desired. In this embodiment, the first metal layer 121 in the pattern is used for alignment, but any pattern portion may be used as long as there is no adverse effect on the target device.
[0044]
Further, as shown in FIG. 2B, even in this method, as long as the light of the microscope is incident from the back surface of the sensor panel, the first metal layer 121 blocks the active region 127 of amorphous silicon. There is an advantage that amorphous silicon does not cause photodegradation. Furthermore, in this embodiment, the form of observation with a reflection microscope is shown from the back side. However, as long as the panel according to the present invention is prepared, it may be observed with an ultrasonic microscope from the fluorescent plate side. However, in that case, the stages 331 to 334 need to have a gap enough to install the ultrasonic microscope.
[0045]
As described above, the panels 301 and 302 are formed in the observation area 341 ′, the panels 302 and 303 are formed in the observation area 342 ′, the panels 303 and 304 are formed in the observation area 343 ′, and the panel 304 is formed in the observation area 344 ′. , 301 in the observation area 345 ′, the components in the X and Y directions are simultaneously aligned with each other, that is, at least two sets of positions per joint line, and finally the optimum alignment state is obtained. It creates.
[0046]
Furthermore, in the embodiment of the present invention, as shown in the alignment observation areas 341 ′ to 345 ′, the respective alignment points are closer to the panel joints than the center lines 351 to 354, Preferably, since alignment is performed using patterns in the shortest positional relationship with each other, the continuity of the pixel pitch is most easily secured.
[0047]
The stages 331 to 334 may not be driven even if a manual method using a micro or the like is employed when the pixel pitch of the panel exceeds 100 μm, but when the pixel pitch becomes 100 μm or less. It is desirable to drive by an automatically controllable means such as a pulse motor so as to link the observation image of the computer processed microscope.
[0048]
Furthermore, when the pixel pitch is less than 50 μm, all of the alignment system including the stages 331 to 334 and the microscopes 341 to 345 are placed in the thermal chamber in order to suppress the influence of expansion and contraction due to temperature change. Therefore, it is preferable that the temperature is always controlled at a constant temperature including the panels 301 to 304 and that the light source (wave) of the microscope has a single wavelength.
[0049]
As shown in FIG. 3C, the base 317 that is vacuum-contacted to the stage 335 from below is bonded to the panel thus aligned by an adhesive 316. In addition, although the adhesion part shown in figure is point-applied, there is no problem even if it adheres to the whole surface. Also, the adhesive used here is preferably a room-temperature curing type as much as possible in order to suppress the influence of temperature change, and the thickness can also be suppressed in order to suppress the influence of shrinkage of the adhesive during curing. It is desirable to make it as thin as possible. Then, the four area sensor panels 301 to 304 finally aligned at the stages 331 to 334 are fixed at the adjusted positions by the base 317 and the adhesive 316.
[0050]
(Embodiment 3)
FIG. 5 is a diagram for explaining a process of bonding two liquid crystal display panels and aligning a large screen and bonding a polarizing plate. FIG. 5A is a view of the alignment of two liquid crystal displays observed from above, and FIG. 5B is a view of the alignment from the side. FIG. 5C is a view of a state in which a polarizing plate is bonded to two aligned liquid crystal display panels from the side.
[0051]
Here, reference numerals 511 and 512 are panel panels on one side of the liquid crystal display, reference numerals 521 and 522 are the other panel boards corresponding thereto, and reference numeral 513 is a sealing resin. The panel plates 511 and 521 and the sealing resin 513 form a liquid crystal display panel 501, and the panel plates 512 and 522 and the sealing resin 513 similarly form a liquid crystal display panel 502.
[0052]
Reference numeral 515 denotes a polarizing plate, and 514 denotes an adhesive for attaching the polarizing plate to the liquid crystal display. A line group 510 in the X and Y directions is a simplified drawing of pixels arranged in two dimensions at an equal pitch. Reference numerals 541 and 542 are magnified observation means including a microscope, 541 'and 542' are light sources made of visible light corresponding thereto, and reference numerals 541 "and 542" are also microscope observations corresponding thereto. Areas, reference numerals 551 and 552 (indicated by dotted lines) indicate that the center line parallel to the edge of the adjacent panel is parallel to the edge of the adjacent panel, particularly when the panel is a parallelogram. It represents a straight line connecting the midpoints of two sides that are not components. Further, reference numerals 531 and 532 are stages for a liquid crystal display panel, and 533 is a pressing roller for attaching a polarizing plate to the liquid crystal display.
[0053]
The panels 501 and 502 before injecting the liquid crystal are fixed to the stages 531 and 532 by a method such as vacuum contact, light sources 541 ′ and 542 ′ are arranged from the lower part of the drawing, light is applied from there, and the transmitted light is transmitted. Are observed with the microscopes 541 and 542 to detect the pixel pattern.
[0054]
Since it is necessary to press the stage 531 and 532 with a roller when laminating the polarizing plate after alignment, it is desirable to have a structure that supports the lower surface of the liquid crystal panel as a minimum, but a light source is installed on the lower surface side. Therefore, it is necessary to provide a gap for that. In the field of view 541 and 542 of the microscope, the reference lines in the X and Y directions as shown in the first and second embodiments are drawn with the required intervals adjusted, and the pixel pattern of the liquid crystal Is adjusted to the reference line to adjust the position.
[0055]
In the alignment, when the pixel pitch exceeds 100 μm, it may be performed manually by observing the microscope visually and using a means such as a micro. However, when the pixel pitch is 100 μm or less, the stage is moved using a driving force that can be controlled automatically, such as a pulse motor, a microscope image is captured by a CCD, and image processing data by a computer is fed back. Is preferred.
[0056]
Further, when aligning a liquid crystal panel having a pixel pitch of less than 50 μm, an alignment apparatus including stages 531 and 532 and microscopes 541 and 542 is combined with panels 501 and 502 and a thermal chamber controlled at a constant temperature. It is desirable to manage it by putting it inside. Even in the method of laminating two liquid crystal panels in a two-dimensional direction, at least two pairs of positions per joint line are simultaneously aligned with respect to the components in the X and Y directions, and finally the optimum alignment state is obtained. Producing.
[0057]
In this embodiment, as shown in the alignment observation areas 541 ″ and 542 ″, the respective alignment points are closer to the panel junction than the center lines 551 and 552, and the shortest positional relationship is obtained. Since alignment is performed using a certain one, the continuity of the pixel pitch is most easily secured. The aligned panels 501 and 502 are bonded by pressing a polarizing plate with an adhesive material from a top surface with a roller having a constant pressure while being fixed to the stage. Finally, the two liquid crystal display panels 501 and 502 are fixed at their adjustment positions by the polarizing plate 515 and the adhesive material 514. Thereafter, a polarizing plate is attached to the other side of the panel, and finally the liquid crystal is injected to complete the panel.
[0058]
In the above-described embodiment, the method for increasing the area of the semiconductor element has been described. In the specific example, waves such as electromagnetic waves and sound waves are used as the alignment mark detection means. When amorphous silicon is used for the element, infrared light that does not include visible light having a wavelength of 700 nm or less is used for electromagnetic waves used for microscopic observation. Specific examples of use of the semiconductor element include an optical sensor, a transistor, and a light emitting element. Of course, the panel to which the present invention is applied includes not only the semiconductor element but also a case where electric circuit wiring for driving the display is two-dimensionally arranged.
[0059]
【The invention's effect】
As described above, according to the present invention, when a panel in which two-dimensional pixels are arranged at an equal pitch, such as an area sensor or a display, is bonded for the purpose of supporting a large screen, the pitch shift at the joint portion of the panel is prevented. Can be minimized. For this reason, finally, the disturbance of the image due to the pitch shift can be prevented.
[0060]
Further, since electromagnetic waves or sound waves are used as the alignment mark detection means at the time of alignment between panels, it is possible to minimize the restriction of the detection means due to the type of pattern.
[Brief description of the drawings]
FIG. 1 is a diagram for explaining a first embodiment of the present invention, in which FIG. 1 (a) shows a state in which four area sensor panels using an amorphous silicon semiconductor are combined and aligned; The figure observed from the upper surface, (b) is the figure observed from the horizontal direction, (c) is the figure which observed the state which bonded together the one fluorescent plate to the said panel, and was mutually fixed.
FIGS. 2A and 2B are a microscopic view illustrating an observation area in the first embodiment, and an enlarged cross-sectional view of the portion. FIGS.
FIG. 3 is a diagram for explaining a second embodiment of the present invention, in which (a) is a diagram in which four area sensor panels are combined and aligned and observed from the top surface of the panel; (B) is the figure observed from the horizontal direction, (c) is the figure which observed the state which bonded together the one base to the said panel and was mutually fixed, from the horizontal direction.
FIG. 4 is a view of a field of view of a microscope illustrating an observation area in a second embodiment.
FIG. 5 is a diagram for explaining a third embodiment of the present invention, and FIG. 5A is a diagram in which two liquid crystal display panels are combined and aligned and observed from the upper surface of the panel; (b) is the figure observed from the horizontal direction, (c) is the figure which observed the state which bonded the polarizing plate to the said panel and was mutually fixed from the horizontal direction.
6A and 6B are diagrams showing a conventional alignment method, in which FIG. 6A is a view of a state in which four area sensor panels are aligned in a two-dimensional direction, and FIG. The figure observed from the direction, (c) is the figure which observed from the horizontal direction the state which bonded the fluorescent plate for converting an X-ray into visible light on the upper surface of the aligned four panels.
[Explanation of symbols]
100 Edge of two panels
101-104 Area sensor panel formed on a transparent substrate
105 Adhesive for attaching fluorescent plate to sensor panel
106 Fluorescent screen
120 Sensor pixels grouped in two dimensions at equal pitch
First metal layer made of 121 Cr or the like
122 Gate insulating layer made of SiN or the like
123 Amorphous silicon semiconductor layer
124 n-type semiconductor layer
Second metal layer made of 125 Al or the like
126 Semiconductor protective layer made of PI, etc.
127 Active region of amorphous silicon semiconductor
131-134 Stage for panel
135 Pressing roller for attaching fluorescent screen
141 ″ to 145 ″ Pixel observation area for alignment
141-145 Transmission microscope
141'-145 'Microscope light source
151 to 153 Reference line provided in advance in the microscope field of view
161-164 Center line of each panel in the arrangement direction
301-304 Area sensor panel formed on transparent substrate
310 Sensor pixels grouped in two dimensions at equal pitch
311 to 314 sensor board
315 Adhesive layer for bonding the sensor substrate and fluorescent screen
316 Adhesive layer for fixing the base and area sensor panel
317 base
321-324 Fluorescent screen
331-334 Panel stage
335 Stage for fixing the base
341'-345 'Pixel observation area for alignment
341-345 Reflective microscope
351-354 The center line of each panel in the arrangement direction
400 Edge of two area sensor panels
401-403 Reference line in microscope field of view
501 and 502 Liquid crystal display panel
510 Pixels arranged in two dimensions at equal pitch
511, 512 Panel panel on one side of liquid crystal display
513 Sealing resin
514 Adhesive for attaching polarizing plate to LCD
515 Polarizer
521, 522 The other panel of the liquid crystal display
531 and 532 Stages for liquid crystal display panels
533 Pressing roller
541, 542 Microscope
541 ', 542' Light source
541 ″, 542 ″ Microscope observation area
551, 552 Center line of each panel
600 Sensor pixels grouped in two dimensions at equal pitch
601-604 Area sensor panel formed on a transparent substrate
605 Adhesive for attaching fluorescent plate to sensor panel
606 Fluorescent screen
611-614 Stage for panel
621-628 Reflective microscope
621'-628 'Pixel observation area for alignment
631 Pressing roller for attaching fluorescent screen
651 to 662 Alignment marks provided on the outer peripheral edge of the panel

Claims (6)

Position control of a plurality of panels in which semiconductor elements and / or electrical wiring patterns are two-dimensionally arranged at a desired pitch is performed using alignment marks provided on each of the panels, and the panel is attached to a required member. A method of manufacturing a two-dimensional panel to be fixed,
In the position control, a portion of the semiconductor device and / or electrical wiring patterns, at least two positions in one of the sequences provided in the side close to the panel where the other adjacent said panel, the alignment mark And a plurality of the panels are fixed by the required member. In the position control, the arrangement direction of the semiconductor device and / or electrical wiring pattern in the adjacent panels, respectively, has a reference line parallel to each other, and the spacing of the parallel reference line, the adjacent panels mutually 2. The method for manufacturing a two-dimensional panel according to claim 1, wherein the two-dimensional panel manufacturing method is set so as to satisfy a desired relationship between a semiconductor element and / or an electric wiring pattern. The reference line, the position control when provided within the field of view of the microscope used, according to claim 2, characterized in that the alignment part of the semiconductor device and / or electrical wiring pattern contrast A method for manufacturing a two-dimensional panel. In the position control , position control is performed using a stage that supports each panel, and the stage is movable and adjustable in a two-dimensional direction in which the semiconductor elements and / or electrical wiring patterns are arranged. 4. The method for manufacturing a two-dimensional panel according to claim 3 , wherein the driving means for adjusting the movement is interlocked with an observation image of the microscope that has been computer-processed. The method for manufacturing a two-dimensional panel according to any one of claims 2 to 4 , wherein a wave such as an electromagnetic wave or a sound wave is used as a detection means for alignment with the reference line. As the detection means, when visible light having an electromagnetic wave wavelength of 700 nm or less is included and the semiconductor element two-dimensionally arranged on the panel is an amorphous silicon semiconductor, avoid the portion used for the active layer of the semiconductor element. The method of manufacturing a two-dimensional panel according to claim 5 , wherein the visible light is irradiated to detect a position for alignment.

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