JP3834433B2 - XY stage - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an XY stage for positioning a two-dimensional position of an object.
[0002]
[Prior art]
The XY stage is used in a semiconductor manufacturing apparatus such as a prober.
FIG. 6 is a configuration diagram of a conventional example of an XY stage.
In FIG. 6, a positioning object is placed on the slider unit 1. The guide bars 2 and 3 are drawn on the plate 4 and extend in the X-axis direction. The support member 5 supports the slider portion 1 so as to be movable on the guide bars 2 and 3. A screw 7 is connected to the output shaft of the motor 6. A screw 7 is screwed to the member 8. The member 8 is fixed to the slider portion 1. When the motor 6 is driven to rotate, the slider unit 1 moves in the X-axis direction.
[0003]
The guide bars 9 and 10 are pulled by the plate 11 and extend in the Y-axis direction. The support member 12 supports the plate 4 movably on the guide bars 9 and 10. A screw 14 is connected to the output shaft of the motor 13. A screw 14 is screwed to the member 15. The member 15 is fixed to the plate 4. When the motor 13 is driven to rotate, the plate 4 moves in the Y-axis direction.
[0004]
Thus, by the rotational drive of the motors 6 and 13, the slider portion 1 is positioned in the X and Y axis directions.
For example, a wafer is placed on the slider unit 1 as a positioning object. When the slider unit 31 moves in the two-dimensional direction, the probe whose position is fixed is applied to each chip of the wafer in turn, and each chip is inspected.
[0005]
However, the conventional example of FIG. 6 has the following problems.
[0006]
(Problem 1)
As shown in FIG. 7, if the guide bars 9 and 10 are bent due to processing errors, the plate 4 is rotationally displaced in the b direction when moved along the guide bars 9 and 10. This is called yawing.
When the angle deviation due to yawing is Δθ and the arm length from the fulcrum of the slider part 1 to the position where the slider part 1 is L is L, the positional deviation of the slider part 1 becomes ΔY = L · Δθ. As described above, the angular deviation due to yawing is amplified by the arm length, and a position error occurs in the slider unit 1.
[0007]
For example, when L = 500 mm and Δθ = 5 seconds (here, “second” is a unit of angle), the positional deviation ΔY is as follows.
ΔY = 500 × (5/360 × 60 × 60) × 2π
= 12μm
[0008]
(Problem 2)
Since there is a mechanical support portion composed of a guide bar, a support member, etc., the configuration becomes large.
[0009]
[Problems to be solved by the invention]
[0010]
The present invention has been made in order to solve the above-described problems. A position feedback control unit in the X-axis direction is provided at a position symmetric with respect to the center of the slider unit, and the same position feedback control system is provided. By providing a command position to control the position of the slider, and supporting the slider using compressed air, a position error due to yawing can be eliminated, and an XY stage that can reduce the size of the device by eliminating the mechanical support is realized. The purpose is to do.
[0011]
[Means for Solving the Problems]
The present invention is an XY stage configured as follows.
[0012]
(1) In an XY stage for positioning a two-dimensional position of an object,
A lattice platen in which teeth are formed at a constant pitch along the X-axis direction and the Y-axis direction;
A slider portion on which the object is placed;
An air bearing is constituted by flowing compressed air between the slider portion and the lattice platen, and a levitation means for levitating the slider portion on the lattice platen;
Mounted on the slider portion, teeth are formed at a constant pitch along the Y-axis direction, and a magnetic attractive force is generated between the teeth and the teeth of the lattice platen to move the slider portion in the Y-axis direction. A motor,
Mounted on the slider portion, teeth are formed at a constant pitch along the X-axis direction, and a magnetic attraction force is generated between the teeth and the teeth of the lattice platen to move the slider portion in the X-axis direction. And a second X-axis motor;
A Y-axis mirror mounted on the side surface of the grating platen and having a mirror surface in the X-axis direction;
An X-axis mirror mounted on the side surface of the grating platen and having a mirror surface in the Y-axis direction;
A Y-axis sensor mounted on the slider unit, irradiating the Y-axis mirror with light, receiving the reflected light, and detecting the position of the slider unit in the Y-axis direction using light interference;
First and second X-axes mounted on the slider unit for irradiating the X-axis mirror with light, receiving the reflected light, and detecting the position of the slider unit in the X-axis direction using light interference A sensor,
A Y-axis control unit that outputs a control signal for position feedback of the Y-axis motor based on the detection position of the Y-axis sensor, and feedback-controls the position of the slider unit in the Y-axis direction;
A control signal for position feedback of the first and second X-axis motors is output based on the detection positions of the first and second X-axis sensors, and the position of the slider portion in the X-axis direction is feedback-controlled. In addition, the slider portion is controlled in the rotational direction by a control signal for position feedback of the first and second X-axis motors, and the rotational deviation due to yawing of the slider portion floating on the lattice platen is corrected. First and second X-axis control units;
An XY stage characterized by comprising:
[0013]
(2) The XY stage according to (1 ), wherein the first and second X-axis motors are mounted at positions symmetrical with respect to the center of the slider portion.
[0014]
(3) A correction table is provided for each of the first and second X-axis control units, and stores a correction table that associates the position of the slider unit with a correction amount for removing yawing of the slider unit, and is provided with a given command position. And a first correction unit for correcting a command position to be supplied to the first and second X-axis control units with the read correction amount. The XY stage according to (1) or (2).
[0015]
(4) The Y-axis control unit, the first and second X-axis control units perform motor position feedback control, speed feedback control, and commutation control of current flowing in the motor coil (1). XY stage in any one of (3) thru | or.
[0016]
(5) The rotational position of the slider unit is obtained by adding a predetermined value to one command position and subtracting the predetermined value from the other command position with respect to the command position given to the first and second X-axis control units. The XY stage according to any one of (1) to (4), further including a rotation control unit that controls the rotation.
[0017]
(6) The XY according to any one of (1) to (5), wherein the first and second X-axis sensors detect a rotation angle of the slider portion based on a difference between the respective detection positions. stage.
[0018]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be described in detail with reference to the drawings.
FIG. 1 is a block diagram showing an embodiment of the present invention. In FIG. 1, the same reference numerals are assigned to the same parts as those in the previous figure.
[0019]
In FIG. 1, the lattice platen 30 has teeth formed at a constant pitch along the X-axis direction and the Y-axis direction. In the figure, only a part of the teeth is shown for simplification. Such a lattice platen 30 is formed by cutting grooves in a lattice shape on a flat surface. The lattice platen 30 is made of a magnetic material.
An object to be positioned is placed on the slider portion 31.
[0020]
The levitation means 32 levitates the slider portion 31 on the lattice platen 30. A nozzle is provided on the surface of the slider portion 31 that faces the grid platen 30, and the levitation force is obtained by the levitation means 32 ejecting compressed air from the nozzle. Air blown from the nozzle flows between the slider portion 31 and the lattice platen 30 to constitute an air bearing. The gap between the slider portion 31 and the grating platen 30 is about several tens of μm.
[0021]
The Y-axis motor 33 is mounted on the slider portion 31, and teeth 332 are formed at a constant pitch in the Y-axis direction on the surface of the core 331 that faces the lattice platen 30. The Y-axis motor 33 generates a magnetic attractive force between the teeth 332 and the teeth 301 of the lattice platen 30 to move the slider portion in the Y-axis direction. The coil 333 is wound around the core 331.
[0022]
The X-axis motors 34 and 35 are mounted at positions symmetrical with respect to the center of the slider portion 31. In the X-axis motors 34 and 35, teeth 342 and 352 are formed at a constant pitch in the X-axis direction on the surfaces of the cores 341 and 351 facing the lattice platen 30. The X-axis motors 34 and 35 generate a magnetic attractive force between the teeth 342 and 352 and the teeth 301 to move the slider portion in the X-axis direction. The coils 343 and 353 are wound around the cores 341 and 351.
[0023]
The connecting members 311 and 312 connect the Y-axis motor 33 and the X-axis motors 34 and 35.
[0024]
The X-axis mirror 36 is mounted on the side surface of the grating platen 30 and has a mirror surface in the Y-axis direction. The Y-axis mirror 37 is mounted on the side surface of the grating platen 30 and has a mirror surface in the X-axis direction.
[0025]
The Y-axis sensor 38 is mounted on the Y-axis motor 33 and detects the position of the slider portion 31 in the Y-axis direction. The Y-axis sensor 38 is an interferometer that irradiates the Y-axis mirror 37 with light, receives the reflected light, and detects the position of the slider portion 31 in the Y-axis direction using light interference.
[0026]
X-axis sensors 39 and 40 are mounted on the X-axis motors 34 and 35, respectively, and detect the position of the slider portion 31 in the X-axis direction. The X-axis sensors 39 and 40 are interferometers that irradiate the X-axis mirror 36 with light, receive the reflected light, and detect the position of the slider portion 31 in the Y-axis direction using light interference.
[0027]
The Y-axis control unit 41 feedback-controls the position of the slider unit 31 based on the detection position of the Y-axis sensor 38.
The X-axis control units 42 and 43 perform feedback control of the position of the slider unit 31 based on the detection positions of the X-axis sensors 39 and 40, respectively.
[0028]
The correction means 44 and 45 are provided for the X-axis control units 42 and 43, respectively, and hold correction tables 46 and 47 in which the position of the slider unit and the correction amount for removing yawing of the slider unit are associated. The correction means 44 and 45 read the correction amount from the correction tables 46 and 47 based on the given command position, and correct the command position given to the X-axis control units 42 and 43 with the read correction amount. The data in the correction tables 46 and 47 are data obtained by calibration.
The correcting means 44 and 45 are provided for correcting a bending due to a mechanical error between the X-axis mirror 36 and the Y-axis mirror 37. If the bends of the X-axis mirror 36 and the Y-axis mirror 37 do not affect the position detection, the correcting means 44 and 45 need not be provided.
[0029]
FIG. 2 is a configuration diagram of a surface of the slider portion 31 that faces the lattice platen 30. 3 is a cross-sectional view taken along the line AA ′ of FIG. In these drawings, an example of the X-axis motor 34 is shown. Other motors have the same configuration.
The groove 344 is formed on the opposing surface. The nozzle 345 is formed in the groove 344 and ejects compressed air supplied from the levitation means 32. The embedded member 346 is embedded in the recess of the tooth 342. The embedded member 346 is made of a nonmagnetic material. By applying the coating on the facing surface, the embedded member 346 can be formed in the recess of the tooth 342.
[0030]
The compressed air ejected from the nozzle 345 flows along the groove 344, and the core 341 is levitated by the pressure of the compressed air. The embedded member 346 prevents the compressed air from leaking outside through the recess of the tooth 342.
[0031]
FIG. 4 is a diagram illustrating a configuration example of the control unit in FIG. Although FIG. 4 shows an example of the X-axis control unit 42, the X-axis control unit 43 and the Y-axis control unit 41 have the same configuration. In FIG. 4, a photodiode array (PDA) 420 detects the brightness of the interference fringes formed on the X-axis sensor 39. The signal processing circuit 421 performs arithmetic processing on the detection signal of the PDA 420. Comparators 422 and 423 generate an A-phase pulse and a B-phase pulse from the calculation signal of the signal processing circuit 421.
[0032]
The direction discriminating circuit 424 discriminates the moving direction of the slider unit 31 from the phase relationship between the A-phase pulse and the B-phase pulse, and generates an up pulse or a down pulse according to the discrimination result.
The up / down counter 425 counts up or down according to the up pulse or the down pulse. The count of the up / down counter 425 becomes the detection position of the slider unit 31. In the initial state, it is known in advance how much the phases of the rotor teeth and the stator teeth are shifted when a known current is passed through each phase coil of the X-axis motor 34. The value of the up / down counter 425 at this time is set to a reference value, for example, 0. As the slider 31 moves, the up / down counter 425 detects the position by counting up or down from the reference value. In this way, position detection is performed incrementally.
[0033]
The subtractor 426 obtains a deviation between the position command value X ₀ and the count X ₁ (detection position) of the up / down counter 425. The position control means 427 outputs a control signal for performing position feedback control of the X-axis motor 34 based on the deviation taken by the subtractor 426. The speed calculation means 428 detects the moving speed of the slider unit 31 from the changing speed of the count X ₁ of the up / down counter 425. The speed calculation means 428 is, for example, an F / V converter.
[0034]
The subtractor 429 takes the deviation of the control signal from the position control means 427 and the speed calculation means 428. The speed control means 430 outputs a control signal for speed feedback control of the X-axis motor 34 based on the deviation taken by the subtractor 429.
[0035]
In the sin table 431, the count of the up / down counter 425 and the sin value are stored correspondingly. When the X-axis motor 34 is a three-phase motor, when the count of the up / down counter 425 is given, the values of sin (θ + 120 °) and sin (θ−120 °) are read from the sin table 431. θ is an angle that changes according to the count of the up / down counter 425.
[0036]
Multiplexing digital-analog converters (MDAs) 432 and 4334 are analog input signals obtained from the speed control unit 430, sin (θ + 120 °) read from the sin table 431, and sin (θ-120). A current command value (I is a current amplitude) of Isin (θ + 120 °) and Isin (θ−120 °) is output using the value of °) as a gain setting signal. Here, the reason why the phases of the two command values are shifted by 120 ° is that the motor is a three-phase motor. When the number of phases is different, the phase shift has another value.
[0037]
The current sensors 434 and 435 detect the coil current flowing in the coils L1 and L2 of the X-axis motor 34.
Subtractors 436 and 437 take deviations of Isin (θ + 120 °) and Isin (θ−120 °) and current sensors 434 and 435, respectively.
Pulse width modulation circuits (referred to as PWM circuits) 438 and 439 generate pulse width modulation signals (referred to as PWM signals) for feedback control of the excitation current of the motor coil based on deviations taken by the current sensors 434 and 435. And output. A subtracter 440 subtracts the PWM signals from the PWM circuits 438 and 439. The PWM circuit 441 generates a PWM signal from the subtraction signal of the subtracter 440.
The drive circuit 442 is a bridge-type inverter circuit, and drives the X-axis motor 34 based on the three-phase PWM signals of the PWM circuits 438, 439, and 441.
[0038]
In the circuit of FIG. 4, when the power is turned on, a known current is passed through each coil of the X-axis motor 34, and the rotor teeth of the motor and the teeth of the stator are set to a known phase relationship. The phase relationship set in this way is set as the origin of the commutation angle. At this time, the count of the up / down counter 425 is set to a reference value, for example, 0. Thereafter, the detected value of the X-axis sensor 39 changes with the movement of the slider unit 31, and the current command values Isin (θ + 120 °) and Isin (θ−120 °) change according to the change of the count of the up / down counter 425. The commutation control is performed by changing the value of θ.
[0039]
FIG. 5 is a diagram showing a configuration example of the sensor of FIG. The Y-axis sensor 38 and the X-axis sensors 39 and 40 in FIG. 1 have the same configuration. The X-axis sensor 39 will be described as an example. In FIG. 5, the laser light source 391 emits laser light. Mirrors 392 and 393, a half mirror 394, a deflection beam splitter (referred to as PBS) 395, a λ / 4 plate 396, and a corner cube 397 are disposed in the optical path of the emitted light from the laser light source 391.
[0040]
The light emitted from the laser light source 391 includes light that travels in the path of the half mirror 394, the mirror 393, the mirror 392, and the half mirror 394 and travels in the direction a in the figure. This light is referred to as (1).
The light emitted from the laser light source 391 includes half mirror 394, PBS 395, λ / 4 plate 396, X axis mirror 36, λ / 4 plate 396, PBS 395, corner cube 397, λ / 4 plate 396, and X axis mirror. 36, λ / 4 plate 396, PBS 395, and half mirror 394. The light travels in the direction a in the figure. This light is referred to as (2).
[0041]
The light of (1) and (2) interfere with each other to form an interference fringe S. The PDA 398 detects the interference fringes S. The PDA 398 includes four photodiodes 398A to 398D. The four photodiodes 398A to 398D are arranged within one pitch of the interference fringes S. The photodiodes 398A to 398D are arranged so as to be shifted by P / 4 (P is a pitch of interference fringes).
[0042]
The subtractor 399 performs an operation of (detection signal of the photodiode 398A) − (detection signal of the photodiode 398C).
The subtractor 400 performs an operation of (detection signal of the photodiode 398B) − (detection signal of the photodiode 398D).
The subtracters 399 and 400 constitute the signal processing circuit 421 in FIG.
[0043]
When the slider portion 31 moves, the interference fringes move in the direction dd ′ in FIG. When the interference fringes move, the light and dark portions of the interference fringes that hit the photodiodes 398A to 398D move, and the detection values of the photodiodes 398A to 398D change. Based on this, the position of the slider portion 31 is detected.
[0044]
When the interference fringes move in the d direction, the photodiode outputs V _{A to} V _D are as follows.
V _A = K [1 + msin {x · 2π / (λ / 4)}] + K _n
V _B = K [1 + mcos {x · 2π / (λ / 4)}] + K _n
V _C = K [1-msin {x · 2π / (λ / 4)}] + K _n
V _D = K [1-mcos {x · 2π / (λ / 4)}] + K _n
x: distance to be detected, K, m: coefficient, K _n : noise component
The subtraction signals of the subtracters 399 and 400 are as follows.
V _A −V _C = 2 mKsin {x · 2π / (λ / 4)}
V _B −V _D = 2mK cos {x · 2π / (λ / 4)}
As a result of the subtraction, the DC noise component K _n generated by the disturbance light is canceled.
Signals V _A -V _C and V _B -V _D are converted into the aforementioned A-phase pulse and B-phase pulse.
When the interference fringe moves in the d ′ direction, the phase relationship between the signals V _A −V _C and V _B −V _D is reversed.
[0046]
The operation of the XY stage in FIG. 1 will be described.
When the power is turned on, a known current is passed through each coil of the X-axis motor 34 to position the slider portion 31 at the reference position. When the slider unit 31 moves in the X-axis direction and the Y-axis direction from the reference position, the two-dimensional position is detected incrementally by the X-axis sensor 39.40 and the Y-axis sensor 38.
[0047]
When the bending of the X-axis mirror 36 and the Y-axis mirror 37 does not affect the position detection, the correcting means 44 and 45 are not provided. At this time, the same command position is given to the X-axis controllers 42 and 43. For this reason, the X-axis motors 34 and 35 position the slider unit 31 at the same X-axis position by feedback control of the X-axis control units 42 and 43. Thereby, yawing of the slider part 31 is removed.
[0048]
A case where the bending of the X-axis mirror 36 and the Y-axis mirror 37 affects the position detection will be described. At this time, correction means 44 and 45 are provided.
Before performing the positioning operation, the XY stage is calibrated. When the slider unit 31 is positioned at the coordinates (X ₁ , Y ₁ ) during calibration, yawing occurs in the slider unit 31 due to mechanical errors of the XY stage, and the detected values of the X-axis sensors 39 and 40 are Let X ₁ + ΔX ₁ and X ₂ −ΔX ₂ respectively. At this time, (X ₁ , Y ₁ ) and −ΔX ₁ are stored in correspondence in the correction table 46, and (X ₁ , Y ₁ ) and + ΔX ₂ are stored in correspondence in the correction table 47. .
The slider portion 31 is positioned at other positions to determine the correction amount. In this way, a correction table is created.
[0049]
In the actual positioning operation, when the slider unit 31 is positioned at the coordinates (X ₁ , Y ₁ ), the correction unit 44 corrects the command position given to the X-axis control unit 42 by −ΔX, and the correction unit 45 performs the X-axis operation. The command position given to the control unit 43 is corrected by + ΔX. Thereby, yawing of the slider part 31 is removed.
In this way, the rotational deviation in the θ-axis direction of the slider portion 31 due to the bending of the mirror surface is corrected.
[0050]
A rotation control unit is provided for controlling the rotational position of the slider unit by adding a predetermined value to one command position and subtracting the predetermined value from the other command position with respect to the command position given to the X-axis control unit. A configuration may be used.
[0051]
Further, the two X-axis sensors may detect the rotation angle of the slider portion based on the difference between the detection positions.
[0052]
Further, a configuration may be adopted in which a mirror is mounted on the slider portion and the positions of the X-axis sensor and the Y-axis sensor are fixed.
[0053]
【The invention's effect】
According to the present invention, the following effects can be obtained.
[0054]
According to the first and second aspects of the invention, since the three-axis control in the X-axis direction, the Y-axis direction, and the θ-axis direction is performed, the yawing of the slider portion is corrected and high-precision positioning can be realized.
Moreover, since the slider part is supported using compressed air, a mechanical support part becomes unnecessary and the apparatus can be miniaturized.
Further, since the interferometer is used as the position sensor, the mechanism portion can be reduced and the apparatus can be miniaturized.
[0056]
According to the invention of claim 3 , it is possible to realize highly accurate positioning by removing the influence of the bending of the X-axis mirror and the Y-axis mirror.
[0057]
According to the invention of claim 4 , since the position feedback control, the speed feedback control and the commutation control are used in combination, a high level control can be realized.
[0058]
According to the fifth and sixth aspects of the present invention, a predetermined value is added to one command position and a predetermined value is subtracted from the other command position with respect to the command positions given to the first and second X-axis control units. Thus, the rotational position of the slider portion is controlled. The first and second X-axis sensors detect the rotation angle of the slider part based on the difference between the detection positions. Thereby , not only positioning in the X-axis direction and Y-axis direction but also positioning in the θ-axis direction (rotation direction) can be performed.
[0059]
As described above, according to the present invention, it is possible to realize an XY stage that can eliminate the position error due to yawing and can reduce the size of the apparatus by omitting the mechanical support portion.
[Brief description of the drawings]
FIG. 1 is a configuration diagram showing an embodiment of the present invention.
FIG. 2 is a configuration diagram of a main part of the present invention.
FIG. 3 is a configuration diagram of a main part of the present invention.
FIG. 4 is a configuration diagram of a main part of the present invention.
FIG. 5 is a configuration diagram of a main part of the present invention.
FIG. 6 is a configuration diagram of a conventional example of an XY stage.
FIG. 7 is a configuration diagram of a conventional example of an XY stage.
[Explanation of symbols]
30 Grid platen 31 Slider part 32 Levitating means 33 Y-axis motors 34 and 35 X-axis motor 36 X-axis mirror 37 Y-axis mirror 38 Y-axis sensors 39 and 40 X-axis sensor 41 Y-axis control parts 42 and 43 X-axis control part 44 45 Correction means

Claims (6)

In an XY stage for positioning a two-dimensional position of an object,
A grating platen having teeth formed at a constant pitch along the X-axis direction and the Y-axis direction;
A slider portion on which the object is placed;
An air bearing is constituted by flowing compressed air between the slider portion and the lattice platen, and a levitation means for levitating the slider portion on the lattice platen;
Mounted on the slider portion, teeth are formed at a constant pitch along the Y-axis direction, and a magnetic attractive force is generated between the teeth and the teeth of the lattice platen to move the slider portion in the Y-axis direction. A motor,
Mounted on the slider portion, teeth are formed at a constant pitch along the X-axis direction, and a magnetic attraction force is generated between the teeth and the teeth of the lattice platen to move the slider portion in the X-axis direction. And a second X-axis motor;
A Y-axis mirror mounted on the side surface of the grating platen and having a mirror surface in the X-axis direction;
An X-axis mirror mounted on the side surface of the grating platen and having a mirror surface formed in the Y-axis direction;
A Y-axis sensor mounted on the slider unit, irradiating the Y-axis mirror with light, receiving the reflected light, and detecting the position of the slider unit in the Y-axis direction using light interference;
First and second X-axes mounted on the slider unit for irradiating the X-axis mirror with light, receiving the reflected light, and detecting the position of the slider unit in the X-axis direction using light interference A sensor,
A Y-axis control unit that outputs a control signal for position feedback of the Y-axis motor based on the detection position of the Y-axis sensor, and feedback-controls the position of the slider unit in the Y-axis direction;
A control signal for position feedback of the first and second X-axis motors is output based on the detection positions of the first and second X-axis sensors, and the position of the slider portion in the X-axis direction is feedback-controlled. In addition, the slider portion is controlled in the rotational direction by a control signal for position feedback of the first and second X-axis motors, and the rotational deviation due to yawing of the slider portion floating on the lattice platen is corrected. First and second X-axis control units;
An XY stage characterized by comprising: 2. The XY stage according to claim 1, wherein the first and second X-axis motors are mounted at positions symmetrical with respect to the center of the slider portion. A correction table is provided for each of the first and second X-axis control units, and stores a correction table in which the position of the slider unit and the correction amount for removing yawing of the slider unit are associated, and based on the given command position. The apparatus further comprises first and second correction means for reading a correction amount from the correction table and correcting a command position to be given to the first and second X-axis control units with the read correction amount. Item 3. The XY stage according to Item 1 or 2. 4. The Y-axis control unit, the first and second X-axis control units perform motor position feedback control, speed feedback control, and commutation control of current flowing in a motor coil. XY stage in any one of. The rotational position of the slider unit is controlled by adding a predetermined value to one command position and subtracting the predetermined value from the other command position with respect to the command position given to the first and second X-axis control units. The XY stage according to claim 1, further comprising a rotation control unit. The XY stage according to any one of claims 1 to 5, wherein the first and second X-axis sensors detect a rotation angle of the slider portion based on a difference between respective detection positions.

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