JP3828044B2 - Lamination method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a technical field of a laminator used for bonding a resin film such as a dry film to a substrate such as a glass substrate for display or a copper clad laminated substrate for printed wiring.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, in an auto-cut laminator (hereinafter referred to as “auto-cut laminator”) in which a film is attached to a substrate of a sheet to be conveyed, the leading end of the film is attached to the substrate. Sometimes, the film is cut at a predetermined position on the top of the substrate, and the lamination is continuously performed. At this time, by cutting the film, the rear end of the film that has lost its support falls on the substrate. There was a phenomenon of end up. If the film falls on the substrate, the film will be affixed on the substrate at the position where it was dropped, so when the film is crimped with a laminating roll, wrinkles or air may enter the substrate. There was a problem that became a defective product.
[0003]
For this reason, a method is generally used in which the rear end of the film is held so as not to fall by a method such as providing an adsorption plate that runs along the film flowing surface at the same speed as the laminating speed. When the rear end of the film reaches very close to the laminar roll, a member (hereinafter referred to as “vacuum shoe”) provided adjacent to the laminar roll for sucking and holding the rear end of the film after cutting the film. The film trailing edge is handed over and laminated to prevent the film from falling onto the substrate as much as possible. The structure of this vacuum shoe is made of metal whose surface is polished so that the film does not wrinkle, and a plurality of holes or grooves for sucking and holding the film are formed on the side in contact with the film. In general, suction is performed by connecting a vacuum pump or the like from both ends of the vacuum shoe with a hose or the like.
[0004]
[Problems to be solved by the invention]
However, depending on the conditions of the film material, lamination speed, film tension, etc., the film may be damaged by contact with the vacuum shoe and rubbing. For example, when the film is a photosensitive dry film resist, the scratched portion on the film becomes optically non-uniform, and a pattern different from the mask due to the scratch at the time of exposure is resist. A defect may occur in the resist pattern after being exposed and developed, and only one resist pattern defect may cause the entire substrate to be defective.
[0005]
Therefore, in order to reduce the friction between the film and the vacuum shoe, which is the cause of scratches, a polytetrafluoroethylene resin or the like is coated on the side in contact with the film of the vacuum shoe to laminate it. In this method, the polytetrafluoroethylene resin is gradually peeled off due to friction with the film, so that it is necessary to change the vacuum shoe at a constant cycle. However, since the vacuum shoe is expensive and the replacement work is not easy, there is a problem that the load is increased on the laminator of the production factory. In addition, as shown in Model Registration No. 3082668, in order to prevent the base film of the photosensitive film affixed to the substrate from being easily damaged by the laminator, A laminator is disclosed in which at least the surface in contact with the film is mirror-finished by metal plating such as chrome plating. However, the plating work such as chrome plating requires special equipment with sufficient consideration for environmental measures and skilled skills, and there is a problem that scratches on the film cannot be solved even in metal plating with a mirror finish.
[0006]
Accordingly, the present invention has been made to solve such problems. The object is to provide a resist pattern having no defects by preventing the base film surface from being scratched at the time of lamination to the substrate by a method having excellent productivity.
[0007]
[Means for Solving the Problems]
In order to solve the above-mentioned problem, the lamination method according to the invention of claim 1 is such that when a film is bonded to a substrate of a sheet to be conveyed, the film is cut at a predetermined position and the bonding is continuously performed. When a film is laminated on a substrate with an auto cut laminator, the mesh is interposed between a member for sucking and holding the rear end of the film after the film is cut, and the mesh is a film. It is characterized by being fixed to the upper part of the member which sucks and holds the rear end of the film after cutting .
[0009]
The lamination method according to the invention of claim 2 is characterized in that the mesh is a nylon mesh.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings. Figure 1 lamination is using the method of the present invention - data - is a schematic configuration diagram showing the whole, FIG. 2 is a vacuum shoe of Figure 1 illustrating the method of the present invention - Ru enlarged view der around. In FIG. 1, A is a laminating portion for bonding a film F to a substrate G, B is a conveyor for carrying the substrate G into the laminating portion A, and is usually laminated in a preheating furnace (not shown). The substrate G that has been warmed up to the substrate temperature is carried into the laminated portion A, and the film F is laminated and carried out from the laminated portion A.
[0011]
In the laminating portion A, the film F for bonding is unwound from the supply roll 1, and the protective film f is wound up and removed before reaching the guide roll 2. Then, the film F from which the protective film f has been removed passes through the dancer roll 3, is sent from the guide roll 4 to the laminating roll portion, and is transported by the conveyor B to the substrate G. The film F is bonded by the first rolls 5a and 5b and the second rolls 6a and 6b. While this bonding is performed, the film F is cut into a predetermined length by the auto cutter 7. While the auto cutter 7 moves downward together with the film F, the cutter blade 7a moves in the lateral direction to cut the film F in a right angle direction. At this time, the holding member 8 moves downward together with the auto cutter 7 while holding the film. Next, as shown in FIG. 2, the cut film F is sucked and held by the vacuum shoe 9 through the mesh 10 near the rear end of the cut film F, and the vicinity of the rear end of the film F is along the substrate G. Pasted together. And the board | substrate G which finished bonding is carried out by the delivery conveyor.
[0012]
As the mesh 10 used in the present invention, a highly flexible material that does not damage the film surface even when in contact with the film F is suitable. As the mesh material, nylon mesh, polyester mesh, polypropylene as a mesh made of synthetic fibers is suitable. A mesh or the like is used, and a silk mesh is used as the natural fiber. Nylon mesh is a more preferable material in terms of availability, flexibility and cost. The number of lines of the mesh 10 is not particularly limited as long as the suction force of the vacuum shoe 9 is not significantly reduced and the film F is not damaged. For example, about 50 to 400 mesh / inch is used. Used. In the method of the present invention, it is possible to select an appropriate number of lines of the mesh 10 according to the hole diameter of the suction part of the vacuum shoe 9 and the degree of vacuum suction.
[0013]
As the size of the mesh 10 used in the present invention, the width perpendicular to the flow direction of the film F is slightly longer than the width of the film F to be used so that the film F does not directly contact the vacuum shoe 9. The vertical width of the mesh 10, which is the flow direction of the film F, is a length that is not entangled in the first roll 5a to be laminated, and the mesh 10 is inserted from the tip of the vacuum shoe 9 at the time of lamination. If it is too long, the film F will be wrinkled, and if it is too short, the film will be scratched. Accordingly, the mesh 10 is preferably about ± 15 mm long with respect to the tip of the vacuum shoe, and may be determined according to the size of the vacuum shoe 9.
[0014]
The mesh 10 is fixed to the vacuum shoe 9 only at the upper part of the mesh 10. For example, an adhesive tape having a certain width is applied to the upper end of the mesh 10 perpendicular to the flow direction of the film F from the front and back, and the adhesive tape is attached from the front and back with a fixing plate such as a metal plate or a plastic plate. A plurality of consistent screw holes are formed in the sandwiching plate, the fixing plate and the adhesive tape, and fixed to the end of the upper surface portion of the vacuum shoe 9 with a screw to form a mesh fixing portion 11. In the present invention, if the adhesive tape is applied not only to the upper end portion of the mesh but also to the left and right mesh end portions in the flow direction of the film F or the lower end portion of the mesh, the mesh 10 is wrinkled, which is not preferable. In the vacuum shoe 9 and the mesh 10, only the mesh 10 is in direct contact with the film F, but even if the mesh 10 is fixed only at the upper part, the film smoothly flows evenly due to its own weight and the flow of the film F. The film F is brought into contact with the vacuum shoe 9 and the suction hole provided in the vacuum shoe 9 and the film F is brought into direct contact with the film F, and the film F is sucked and held. As a result, the film F can be bonded to the substrate G without being scratched. If the corners of the upper surface of the vacuum shoe in contact with the mesh are sharp, excessive force will be applied to a fixed part of the mesh and the mesh will be easily cut. Therefore, at least the corner on the side of the vacuum shoe in contact with the mesh should be rounded. It is preferable to leave.
[0015]
【Example】
An example in which the present invention is applied to manufacture of a back plate for a plasma display panel (hereinafter referred to as PDP) will be described. As a glass substrate for a PDP back plate, a high strain point glass (“PD200” manufactured by Asahi Glass Co., Ltd.) having a size of 1400 mm × 1000 mm and a thickness of 2.8 mm is used. After forming a dielectric layer thereon, a paste-like rib (also referred to as a barrier) forming material was applied by a die coating method. Next, the applied rib forming material was dried with warm air to obtain a dry film having a thickness of 170 μm.
[0016]
Next, a photosensitive dry film resist (“NCP225” manufactured by Nippon Synthetic Chemical Industry Co., Ltd.) was bonded onto the dried rib forming material by an auto-cut laminator using the laminating method of the present invention. As the mesh, the upper end in the longitudinal direction of a nylon mesh (200 mesh / inch) having a size of 1110 mm × 170 mm is pressed from the front and back with an adhesive tape having a size of 1110 mm × 50 mm, and then from above the tape. The metal plate and tape were pressed from front and back with a stainless metal plate of 1110 mm × 50 mm and 1 mm thickness, and screw holes were made in the metal plate and tape, and fixed to the end of the upper surface portion of the vacuum shoe with screws. The corners of the upper surface in contact with the vacuum shoe mesh were rounded with a curvature radius of 25 mm. The length of the mesh was set to a length just reaching the tip of the vacuum shoe during use. Nylon mesh comes into contact with the film smoothly and smoothly due to the flow of the film, the film does not directly contact the vacuum shoe and the suction hole provided in the vacuum shoe, and the function of sucking the film is maintained. Therefore, the film was not scratched and wrinkled, and the film could be bonded in good condition to each substrate that was conveyed one after another.
[0017]
Next, using a photomask having a line pattern with a line width of 80 μm and a pitch of 220 μm, the photosensitive dry film was exposed to ultraviolet light and developed to form a resist pattern with a line width of 80 μm and a pitch of 220 μm. Subsequently, sandblasting was performed using fused alumina # 1000 as a grinding material, and unnecessary portions exposed from the resist pattern were cut and removed, and then the resist pattern was peeled off. Next, firing was performed at a peak temperature of 550 ° C. in a firing furnace to form ribs having high surface smoothness and good shape.
[0018]
Next, as a post-process, a normal UV-excited phosphor used for PDP is screen-printed and baked to form red, green, and blue phosphor layers between the ribs. A back plate for PDP was obtained.
[0019]
【The invention's effect】
The laminating method according to the present invention prevents the base film surface from being scratched or wrinkled at the time of laminating, so that a product free from defects caused by laminating can be obtained. It is a good and inexpensive method, and it is possible to increase the productivity of the laminate. Further, by interposing the mesh, the dust adhering to the film surface is transferred to the mesh and removed immediately before lamination, thereby eliminating the pattern defect due to dust on the film surface.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram showing an entire laminator using the method of the present invention. FIG. 2 is an enlarged explanatory diagram of FIG. 1 illustrating the method of the present invention.
A Laminate part B Conveyor F Film f Protective film G Substrate 1 Supply roll 2 Guide roll 3 Dancer roll 4 Guide roll 5a, 5b First roll 6a, 6b Second roll 7 Auto cutter
8 Holding member 9 Vacuum shoe
10 mesh 11 mesh fixing part

Claims (2)

When laminating a film on a substrate with an auto-cut laminator that cuts the film at a predetermined position and continuously laminates it when the film is bonded to a substrate of a single wafer to be conveyed, A mesh is interposed between the film that sucks and holds the rear end of the film after cutting the film and the film, and the mesh is fixed to an upper part of the member that sucks and holds the rear end of the film after cutting the film. Lamination method. 2. The lamination method according to claim 1 , wherein the mesh is a nylon mesh.

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