JP3820728B2 - 基板の測定装置 - Google Patents
基板の測定装置 Download PDFInfo
- Publication number
- JP3820728B2 JP3820728B2 JP02312998A JP2312998A JP3820728B2 JP 3820728 B2 JP3820728 B2 JP 3820728B2 JP 02312998 A JP02312998 A JP 02312998A JP 2312998 A JP2312998 A JP 2312998A JP 3820728 B2 JP3820728 B2 JP 3820728B2
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Images
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- Liquid Crystal (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP02312998A JP3820728B2 (ja) | 1998-02-04 | 1998-02-04 | 基板の測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP02312998A JP3820728B2 (ja) | 1998-02-04 | 1998-02-04 | 基板の測定装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH11218466A JPH11218466A (ja) | 1999-08-10 |
| JPH11218466A5 JPH11218466A5 (enExample) | 2005-02-10 |
| JP3820728B2 true JP3820728B2 (ja) | 2006-09-13 |
Family
ID=12101924
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP02312998A Expired - Lifetime JP3820728B2 (ja) | 1998-02-04 | 1998-02-04 | 基板の測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3820728B2 (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6684097B1 (en) | 1999-04-22 | 2004-01-27 | University Of Miami | Intraoperative monitoring of temperature-induced tissue changes with a high-resolution digital x-ray system during thermotherapy |
| KR101503992B1 (ko) | 2003-04-09 | 2015-03-18 | 가부시키가이샤 니콘 | 노광 방법 및 장치, 그리고 디바이스 제조 방법 |
| TWI609409B (zh) | 2003-10-28 | 2017-12-21 | 尼康股份有限公司 | 照明光學裝置、曝光裝置、曝光方法以及元件製造方法 |
| TW201809801A (zh) | 2003-11-20 | 2018-03-16 | 日商尼康股份有限公司 | 光學照明裝置、曝光裝置、曝光方法、以及元件製造方法 |
| TWI511182B (zh) | 2004-02-06 | 2015-12-01 | 尼康股份有限公司 | 光學照明裝置、曝光裝置、曝光方法以及元件製造方法 |
| JP2006105702A (ja) * | 2004-10-01 | 2006-04-20 | Keyence Corp | 光学式変位計とそれを用いた粘性液体の塗布断面積の測定方法、光学変位計の測定プログラムおよびコンピュータで読み取り可能な記録媒体。 |
| JP4696574B2 (ja) * | 2005-02-02 | 2011-06-08 | 株式会社ニコン | 半導体検査装置 |
| KR101455551B1 (ko) | 2005-05-12 | 2014-10-27 | 가부시키가이샤 니콘 | 투영 광학계, 노광 장치 및 노광 방법 |
| JP4123271B2 (ja) | 2005-11-28 | 2008-07-23 | 船井電機株式会社 | 液晶モジュール輝度測定装置 |
| JP5040227B2 (ja) * | 2006-09-11 | 2012-10-03 | 大日本印刷株式会社 | カラーフィルタの検査装置及びカラーフィルタの検査方法 |
| KR101530734B1 (ko) | 2007-10-05 | 2015-06-22 | 가부시키가이샤 니콘 | 표시디바이스의 결함검출방법 및 표시디바이스의 결함검출장치 |
| JP5267029B2 (ja) | 2007-10-12 | 2013-08-21 | 株式会社ニコン | 照明光学装置、露光装置及びデバイスの製造方法 |
| US8379187B2 (en) | 2007-10-24 | 2013-02-19 | Nikon Corporation | Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method |
| US9116346B2 (en) | 2007-11-06 | 2015-08-25 | Nikon Corporation | Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method |
| JP7602713B2 (ja) * | 2021-03-02 | 2024-12-19 | 株式会社東京精密 | パーティクル計測装置、三次元形状測定装置、プローバ装置、パーティクル計測システム及びパーティクル計測方法 |
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1998
- 1998-02-04 JP JP02312998A patent/JP3820728B2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH11218466A (ja) | 1999-08-10 |
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