JP3815081B2 - Manufacturing method of liquid crystal device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for manufacturing a liquid crystal device, and more particularly, to a technique for manufacturing a liquid crystal device including an alignment film subjected to alignment treatment on an inner surface of a substrate.
[0002]
[Prior art]
Conventionally, as a method of manufacturing a liquid crystal device, after forming wirings, electrodes, active elements, etc. on the inner surfaces of a pair of transparent substrates, an alignment film is formed thereon, and a predetermined direction with respect to the alignment film May be subjected to an alignment treatment, or may be simultaneously applied when forming an alignment film. In the former, the alignment film is subjected to alignment treatment in a predetermined direction by rubbing, light (ultraviolet ray) irradiation, ion irradiation, etc., and in the latter, the alignment film itself formed by oblique vapor deposition has an alignment ability. It is.
[0003]
After forming such an alignment film, two transparent substrates are bonded together with a sealing material. As the sealing material, there is a photopolymerizable material that is polymerized and cured by irradiating ultraviolet rays or the like, and is cured by irradiating light after the transparent substrates are bonded to form a liquid crystal device. There are various methods for the substrate bonding step. For example, after two transparent substrates are bonded together through a sealing material, the sealing material may be cured (temporary curing and main curing in this order). ) And then injecting liquid crystal.
[0004]
[Problems to be solved by the invention]
However, in the step of photocuring the sealing material (hereinafter referred to as the sealing material curing step), for example, the liquid crystal device is irradiated with ultraviolet rays. Since the main chain is broken and the alignment force of the alignment film is weakened, there is a problem in that the alignment direction of the liquid crystal molecules is disturbed and the display quality may be deteriorated due to poor alignment. That is, a decrease in the pretilt angle occurs due to the weakening of the alignment force of the alignment film. Such a decrease causes a decrease in contrast and a response delay of the liquid crystal. Such a problem becomes a significant problem as the pitch becomes finer.
[0005]
Therefore, the present invention solves the above-described problems, and its object is to prevent alignment defects caused by the photocuring step in the method of manufacturing a liquid crystal device having the photocuring step of the sealing material.
[0006]
[Means for Solving the Problems]
In order to solve the above problems, a first means taken by the present invention is a method of manufacturing a liquid crystal device in which a liquid crystal is sandwiched between a pair of substrates. at least A step of forming an alignment film on an inner surface of one of the substrates, a step of performing an alignment process on the alignment film, a step of bonding the pair of substrates through a sealant, and a step of attaching at least one of the pair of substrates. Irradiating light to the pair of substrates from the side and curing the sealing material, and in the step of curing the sealing material in the previous period, the pair of substrates is irradiated with light inside the sealing material. The light irradiation is performed in a state where the light is selectively weakened or cut off in the region.
[0007]
According to this means, the alignment film is irradiated to the alignment film by selectively weakening or blocking light for curing the sealing material in the inner region of the sealing material where the liquid crystal is disposed, for example, the liquid crystal display region. It is possible to reduce the influence of the light and suppress the alignment failure.
[0008]
The second means is a method of manufacturing a liquid crystal device in which a liquid crystal is sandwiched between a pair of substrates. at least A step of forming an alignment film on an inner surface of one of the substrates, a step of performing an alignment process on the alignment film, a step of bonding the pair of substrates through a sealant, and a step of attaching at least one of the pair of substrates. Irradiating light to the pair of substrates from the side and curing the sealing material, and in the step of curing the sealing material, an optical having a light-absorbing or light-reflecting light modulation region The pair of substrates is irradiated with light through a base having a mask.
[0009]
According to such a configuration, light irradiation is performed on the pair of substrates through the substrate having an optical mask having a light-absorbing or light-reflecting light modulation region, thereby reducing the influence of light on the alignment film, Orientation defects can be suppressed.
[0010]
In the second means, the light modulation region of the optical mask is preferably a light shielding mask for shielding light.
[0011]
According to this configuration, since the light is shielded by the optical mask, it is possible to further reduce the influence of light on the alignment film and further suppress alignment defects.
[0012]
In the second means, the light shielding film is provided on a side of the base facing the pair of substrates, and the optical mask and the pair of substrates are arranged with an interval of 50 μm to 100 μm. The pair of substrates is preferably irradiated with light.
[0013]
According to such a configuration, the optical mask can perform light modulation or light shielding at a position close to the liquid crystal device, which is preferable in reducing light leakage. That is, it is possible to prevent the alignment film from being affected by the oblique light entering the liquid crystal device.
[0014]
In the second means, a base provided with an optical mask is provided with a spacer such as a film on a surface facing the pair of substrates, and light irradiation is performed with the spacer in contact with the pair of substrates. In this case, since the distance between the light shielding film and the pair of substrates can be made constant, stable irradiation can be performed.
[0015]
Next, a third means is a method of manufacturing a liquid crystal device in which a liquid crystal is sandwiched between a pair of substrates. at least A step of forming an alignment film on the inner surface of one of the substrates, a step of performing an alignment process on the alignment film, a step of bonding the pair of substrates through a sealing material, and the step of forming one of the pair of substrates. A step of forming an optical mask that absorbs or reflects ultraviolet rays in an inner region of the sealing material; and the pair of substrates is irradiated with light from the side on which the optical mask is formed, and the sealing material is And a step of curing.
[0016]
According to such a configuration, an optical mask that absorbs or reflects ultraviolet rays is formed in the inner region of the sealing material. Therefore, even if light irradiation is performed on the entire substrate, the influence of light on the alignment film is reduced and alignment defects are reduced. Can be suppressed.
[0017]
Next, a fourth means is a method of manufacturing a liquid crystal device in which a liquid crystal is sandwiched between a pair of substrates. at least A step of forming an alignment film on an inner surface of one of the substrates, a step of performing an alignment process on the alignment film, a step of bonding the pair of substrates through a sealant, and on one of the pair of substrates Forming a transparent substrate having an optical mask that absorbs or reflects ultraviolet rays in an inner region of the sealing material, and irradiating the pair of substrates with light from the transparent substrate side to cure the sealing material It is characterized by having.
[0018]
According to such a configuration, a light-absorbing or reflective light-shielding film is formed in the inner region of the sealing material, so that even if light irradiation is performed on the entire substrate, the influence of light on the alignment film is reduced, resulting in poor alignment. Can be suppressed. In addition, since the transparent substrate is formed on one of the pair of substrates, when a liquid crystal device having the transparent substrate is used in a projector, it is possible to prevent dust from adhering to the transparent substrate. Such dust or the like may adhere to the transparent substrate, but in this case, the dust is defocused because it is separated from the liquid crystal device, and the influence on the display can be suppressed.
[0019]
A fifth means is a method of manufacturing a liquid crystal device in which a liquid crystal is sandwiched between a pair of substrates. at least A step of forming an alignment film on an inner surface of one of the substrates, a step of performing an alignment process on the alignment film in a predetermined direction, a step of bonding the pair of substrates through a sealing material, and the pair of substrates Irradiating the pair of substrates with light polarized in a direction crossing the predetermined direction of the alignment film from at least one side of the alignment film, and curing the sealing material.
[0020]
According to this means, since the sealing material is cured by light polarized in a direction crossing the alignment processing direction of the alignment film, the influence on the alignment processing state of the alignment film by irradiation light can be reduced. Generation | occurrence | production of the problem resulting from alignment processing states, such as alignment failure, can be suppressed. That is, the polarized light cuts the main chain of the alignment film extending in the polarization direction, and has little influence on the main chain of the alignment film extending in the direction orthogonal to the polarization direction. Therefore, by irradiating polarized light in a direction crossing the alignment treatment direction of the alignment film, deterioration of the alignment state can be suppressed as compared with the case of irradiating light that is not normally polarized.
[0021]
In the above means, the alignment films are formed on the inner surfaces of a pair of substrates, and the alignment treatment directions of the alignment films in the pair of substrates are substantially orthogonal to each other, and the light is emitted from any of the substrates. It is preferable that the linearly polarized light is polarized in a direction intersecting at about 45 degrees with respect to the alignment processing direction. With such a configuration, by irradiating polarized light in a direction intersecting the alignment treatment direction of the alignment film, deterioration of the alignment state can be suppressed as compared with the case of irradiating light that is not normally polarized.
[0022]
In any one of the above means, on the inner surface of the one substrate, a plurality of scanning lines and a plurality of data lines formed to intersect with each other, a switching element connected to the scanning lines and the data lines, And a pixel electrode connected to the switching element, and the alignment processing direction of the alignment film on the pair of substrates is preferably substantially coincident with the extension direction of the scanning lines or data lines. By causing the alignment process direction to substantially coincide with the wiring direction of the scanning lines or data lines formed on the substrate, it is possible to suppress the occurrence of alignment defects caused by the wiring step, particularly when the rubbing process is performed.
[0023]
The alignment film is preferably composed mainly of polyimide, and ultraviolet light is preferable as the light for curing the sealing material.
[0024]
The alignment treatment may be performed only on one inner surface of the two substrates. In this case, it is preferable that the polarization direction is substantially orthogonal to the alignment treatment direction.
[0025]
DETAILED DESCRIPTION OF THE INVENTION
Next, an embodiment according to the present invention will be described in detail. Although the present invention relates to a case of manufacturing a liquid crystal device including an active matrix type TN liquid crystal cell, the present invention can also be applied to various types of liquid crystal devices of other types, shapes, and structures.
[0026]
First, matters common to the embodiments of the present invention will be described with reference to FIGS.
[0027]
[Structure of liquid crystal device]
6 is a plan view of the liquid crystal device 10, and FIG. 7 is a cross-sectional view of FIG. As shown in FIGS. 6 and 7, the transparent substrate 11 (element substrate) made of glass or the like and the transparent substrate 12 (counter substrate) are bonded to each other with a predetermined gap (cell gap) through the sealing material 14. The liquid crystal 13 is injected into the liquid crystal sealing region 10 a formed inside the sealing material 14. The liquid crystal 13 is injected from a liquid crystal injection port 14a provided in the sealing material 14, and the liquid crystal injection port 14a is then sealed with a sealing agent 15 made of resin or the like. As the sealing material 14, an epoxy resin and various photo-curing resins can be used. In order to secure the cell gap, an inorganic or organic fiber or sphere having a particle size (about 2 to 10 μm) corresponding to the cell gap is mixed in the sealing material 14.
[0028]
The transparent substrate 11 has a slightly larger surface area than the transparent substrate 12, and active elements such as a wiring layer, a transparent electrode, and a TFT (thin film transistor) are formed on the inner surface corresponding to a large number of pixels. A wiring layer and a transparent electrode corresponding to the pixel are also formed on the inner surface of the transparent substrate 12. A light shielding film 12 a formed in a circular shape is formed inside the region where the sealing material 14 is formed outside the pixel corresponding region on the inner surface of the transparent substrate 12.
[0029]
A wiring pattern 11a that is conductively connected to a wiring layer formed on the inner surfaces of the transparent substrates 11 and 12 is formed outside the formation region of the sealing material 14 on the inner surface of the transparent substrate 11, and this wiring pattern 11a. Accordingly, a scanning line driving circuit 17 and a data line driving circuit 18 made of an integrated circuit chip or the like are mounted. Furthermore, an outer terminal portion 11b in which a large number of external terminals 19 are arranged is formed on one outer edge portion of the transparent substrate 11, and a flexible wiring substrate is connected to the external terminal portion 11b via an anisotropic conductive film or the like. A wiring member such as 16 is conductively connected.
[0030]
As the liquid crystal 13, a liquid crystal device suitable for various modes of liquid crystal devices can be used in addition to the TN type and the STN type. In the liquid crystal device 10, the polarizing film, the retardation film, the polarizing plate, etc. are oriented in a predetermined direction according to the type of liquid crystal 13 to be used, the operation mode, the display mode (normally white, normally black), and the like. Attached.
[0031]
FIG. 8 shows an equivalent circuit diagram on the transparent substrate 11 (element substrate or active matrix substrate) when an active matrix type liquid crystal device using TFTs is configured, and FIG. FIG. 10 schematically shows a cross-sectional structure taken along the line VI-VI in FIG. As shown in FIG. 8, a scanning line 101 and a data line 103 are formed on the element substrate so as to be parallel in the vertical and horizontal directions. The scanning line 101 is connected to the gate of the TFT 104 formed for each pixel. Is connected to the data line 103. The drain of the TFT 104 is electrically connected to the pixel electrode 106 and is also electrically connected to the storage capacitor 105. The storage capacitor 105 is connected to the capacitor line 102. As a method for forming the storage capacitor 105, the storage capacitor 105 may be connected to the preceding scanning line 101 instead of the capacitor line 102.
[0032]
The scanning signal Gn is applied to the scanning line 101 in a line-sequential manner in a pulsed manner, and the image signal Sn is applied to the data line 103 in a line-sequential manner, or a plurality of adjacent data lines are grouped. Applied. The TFT 104 appropriately writes a potential corresponding to the data signal Sn to the pixel electrode 106 in accordance with the scanning signal Gn. The pixel electrode 106 is opposed to a counter electrode (not shown) formed on the inner surface of the transparent substrate 12 via a liquid crystal layer (not shown), and applies a desired electric field to the liquid crystal layer between the counter electrode to which a predetermined potential is supplied. .
[0033]
As shown in FIGS. 9 and 10, the TFT 104 extends in the hatched area shown in FIG. 9, the source 1041 is conductively connected to the data line 103 through the opening 1041 a, and the gate 1042 is connected to the scanning line 101. Crossing with each other through a thin insulating film (not shown). The drain 1043 is conductively connected to the pixel electrode 106 through the opening 1043a. The lower electrode 1040 extending from these structures overlaps the capacitor line 102 in a plan view via the insulating layer, and constitutes the storage capacitor 105. The storage capacitor 105 is for holding the potential of the pixel electrode 106 for a long time against charge leakage as is well known.
[0034]
[First Embodiment]
Next, a first embodiment which is a method for manufacturing a liquid crystal device according to the present invention will be described. This embodiment is for forming the liquid crystal device 10 shown in FIG.
[0035]
First, after forming the transparent substrate 11 and the counter substrate 12 as described above, a film made of polyimide is applied on the inner surfaces of the transparent substrates 11 and 12 and baked to form an alignment film. There are various alignment film materials mainly composed of polyimide, for example, main chain polyimide poly [4,4′-oxydiphenylene-pyromerimide] (PMDA-ODA). The alignment film is subjected to an alignment process (rubbing process) in a predetermined direction by a known rubbing method. In this case, the alignment treatment may be performed by polarized ultraviolet rays or ion irradiation. Here, the ultraviolet rays linearly polarized in a predetermined direction on the surface of the liquid crystal device dissociate the bond extending in the polarization direction in the alignment film. An orientation treatment can be performed on the substrate. Further, by irradiating the ion beam with a tilt (for example, 40 to 50 °) from a predetermined direction, an alignment process can be performed in the direction of the irradiation direction.
[0036]
Next, a sealing material 14 made of an uncured ultraviolet curable resin is applied on the inner surface of the transparent substrate 11, and the transparent substrate 12 is bonded thereto. The distance between the transparent substrate 11 and the transparent substrate 12 at this time is regulated by the particle size of the spacer included in the sealing material 14.
[0037]
The transparent substrate 11 and the transparent substrate 12 are aligned, and the transparent substrate 12 is pressed against the transparent substrate 11, and 30 mW / cm with respect to the sealing material 14 from the transparent substrate 12 side. ² ~ 150mW / cm ² The sealing material 14 is temporarily cured by irradiating with ultraviolet rays at a illuminance of several seconds, for example, for 3 to 7 seconds. As a result, the transparent substrate 11 and the transparent substrate 12 are bonded together with a predetermined interval.
[0038]
In the above-described substrate bonding step and sealing material photocuring step, in the present embodiment, a large number of transparent substrates 12 are bonded on a large original substrate having a structure including a large number of transparent substrates 11. A plurality of liquid crystal device sections are manufactured at the same time. Therefore, in the following description, the large-sized panel body 100 including a plurality of liquid crystal device portions in which the original substrate and the plurality of transparent substrates 12 are bonded together is illustrated and described.
[0039]
FIG. 1 is a schematic schematic perspective view showing a state of a photocuring step of a sealing material in the first embodiment of the method for manufacturing a liquid crystal device according to the present invention. In the present embodiment, the light shielding mask 50 is disposed between the light source and the large panel body 100 during the above-described irradiation of ultraviolet rays. The light-shielding mask 50 is formed by forming a light-absorbing or light-reflecting light modulation region on a part of the surface of the light-transmitting plate in order to weaken or block ultraviolet rays.
[0040]
Specifically, the light shielding mask 50 is formed by selectively depositing aluminum on the back surface of the transparent plate (substrate) 51 such as glass facing the large panel body 100 by vapor deposition and forming the light shielding layer 52. It is composed. The light shielding layer 52 has a shape and an area that substantially match the liquid crystal display region inside the sealing material 14 for each of the plurality of liquid crystal device sections of the large panel body 100.
[0041]
A thin transparent resin film 53 is attached to a portion where the light shielding layer 52 is not formed on the back surface (the side facing the transparent substrate) of the transparent plate 51, and this film 53 (the light shielding mask 50 and the large format panel body). UV functions in the state where it is in contact with the surface of the large panel body 100 (the outer surface portion excluding the liquid crystal display region of the transparent substrate 11 or the outer surface of the outer peripheral portion of the transparent substrate 12). M is irradiated. The thickness of the film 53 (including the thickness of the adhesive layer in the case where an adhesive layer for sticking is included) is thicker than the light shielding layer 52 but is preferably as thin as possible. For example, the light shielding layer 52 and the large panel The thickness is adjusted so that the distance from the upper surface of the body 100 is within several mm, preferably about 50 μm to 100 μm.
[0042]
In this way, when the sealing material 14 is irradiated with light as described above, the light shielding layer 52 can prevent ultraviolet light from being irradiated onto the surface of the alignment film in the liquid crystal display region. It is possible to reduce deterioration in display quality due to alignment failure, such as the alignment treatment state of the alignment film being impaired and the alignment degree of the liquid crystal being reduced.
[0043]
Note that the light shielding layer 52 of the light shielding mask 50 may not completely block the light to be irradiated, and sufficiently weakens the light irradiated to the alignment film by weakening the light passing through the formation region. Any light modulation layer that can reduce alignment defects may be used.
[0044]
Moreover, FIG.1 (b) is a figure for demonstrating the light irradiation in the modification of the above-mentioned embodiment. The modified example of the first embodiment has the same configuration as that of the above-described first embodiment, and only different points will be described. As shown in FIG. 1B, after the transparent substrate 12 is bonded to a large substrate including a plurality of transparent substrates 11 in the large panel 100, the region other than the region where the sealing material is formed on the transparent substrate 12 is used. A cover glass 13 having a light-absorbing or reflective light-shielding film formed thereon is attached and irradiated with light so that the sealing material can be cured and light irradiation to the display area can be prevented. It is a thing.
[0045]
When the liquid crystal device having the cover glass 13 is used in a projector described later, it is possible to prevent dust from adhering to the transparent substrate 12. Such dust or the like may adhere to the cover glass 13, but in this case, the dust is defocused because it is separated from the liquid crystal device, and the influence on the display can be suppressed.
[0046]
[Second Embodiment]
Next, a second embodiment according to the present invention will be described in detail. This embodiment basically has the same photocuring process of the sealing material as the first embodiment, and only different points will be described. This embodiment is different from the above embodiment in that instead of using a mask, the irradiated ultraviolet ray N is linearly polarized light in a predetermined direction. In this embodiment, the alignment film formed on the inner surfaces of the transparent substrates 11 and 12 similar to that of the first embodiment is a schematic view showing the state of the photocuring step of the sealing material of the present embodiment, as shown in FIG. It is a typical schematic perspective view. FIG. 2B is a diagram showing scanning lines, data lines, alignment directions, and light polarization directions in the above active matrix liquid crystal device. As shown in FIG. 2A and FIG. 2B, rubbing processing is performed along the wiring directions X and Y of the scanning lines 101 and the data lines 103. As described above, when the rubbing process is performed along the wiring directions X and Y, it is possible to reduce alignment defects caused by the steps caused by the formation of the scanning lines 101 and the data lines 103. In this embodiment, since it is necessary to manufacture a TN liquid crystal cell structure, the alignment treatment directions of the alignment film of the transparent substrate 11 and the alignment film of the transparent substrate 12 are orthogonal to each other.
[0047]
In the large panel body 100, a plurality of liquid crystal display regions 100a subjected to the alignment treatment as described above are arranged. In the present embodiment, the large panel body 100 is, for example, a direction K inclined by approximately 45 ° with respect to the wiring directions X and Y so as to intersect both the wiring directions X and Y, or K Irradiate UV light N composed of linearly polarized light. As the polarized ultraviolet rays, laser light (for example, the fourth harmonic of a Q-switched Nd: YAG laser (wavelength 266 nm) or the like) can be used in addition to generation using a predetermined polarizing element.
[0048]
The ultraviolet light N polarized in the predetermined direction K or K ′ cuts the main chain of the alignment film extending in the polarization direction K, and has little influence on the main chain of the alignment film extending in the direction orthogonal to the polarization direction. Therefore, by irradiating polarized ultraviolet rays in a direction obliquely intersecting with the wiring directions X and Y, which is the alignment treatment direction of the alignment film, the alignment is made more than when irradiating normal unpolarized ultraviolet rays. The degree of damage to the orientation state of the film can be weakened. Therefore, it is possible to reduce the occurrence of alignment failure due to ultraviolet irradiation.
[0049]
The modification of the said embodiment is shown in FIG.3 and FIG.4. In FIG. 3, the polarization directions R and R ′ of the ultraviolet rays when the alignment processing directions P and Q in the transparent substrates 11 and 12 in the liquid crystal display region 100a are set obliquely to the wiring directions X and Y are shown. Show. The polarization direction may be either R or R ′. Usually, in a TN liquid crystal display device, a rubbing process is often performed on the rectangular liquid crystal display region 100a in directions P and Q of 45 degrees obliquely close to the diagonal direction. In such a case, as shown in the figure, the same effect as that of the present embodiment can be obtained by irradiating the ultraviolet rays polarized in the direction along the long side or the short side of the rectangular region.
[0050]
FIG. 4 (a) shows the polarization direction U of ultraviolet rays when the alignment processing direction S of each substrate is set to be parallel in two substrates. In this case, since the polarization direction U of the ultraviolet rays is orthogonal to the alignment directions S and T of the respective substrates, the influence on the alignment ability of the alignment film due to the ultraviolet irradiation can be further reduced.
[0051]
FIG. 4B and FIG. 4C are schematic diagrams of alignment directions when a GH (guest host) type liquid crystal display device is used. In the GH type liquid crystal display device, the orientation directions S and T of the two substrates are antiparallel as shown in FIG. 4B, or the orientation is only on one substrate as shown in FIG. 4C. Since the treatment is performed, the polarization direction of the ultraviolet rays and the orientation treatment direction can be orthogonal to each other.
[0052]
In the above embodiment, the case of irradiating linearly polarized ultraviolet rays has been described, but the polarization state of ultraviolet rays is not limited to linearly polarized light, and may be elliptically polarized light as long as it exhibits sufficiently high anisotropy.
[0053]
Hereinafter, a case where the above liquid crystal device is used as a light valve of a liquid crystal projector will be described.
[0054]
[Configuration of Projection Display Device]
FIG. 5 shows the structure of the optical system of a liquid crystal projector which is a projection display device.
[0055]
In the housing of the liquid crystal projector 20, an optical unit shown in the figure is built. The optical unit includes an illumination optical system including a light source, and light beams R, G, red, green, and blue. , B, a color synthesizing optical system for recombining each light beam R, G, B after passing through each liquid crystal light valve, which will be described later, and from a color separating optical system to a color synthesizing optical system A light guide system for guiding the light flux.
[0056]
The illumination optical system includes a light source lamp 21, integrator lenses 22 and 23 made of an assembly of minute lenses, a polarization conversion element 24 made of an assembly of a polarization separation film and a ¼ wavelength plate, and a reflection mirror 25. And are installed. As the light source lamp, a halogen lamp, a metal halide lamp, a xenon lamp, or the like can be used. The polarization conversion element 24 has a structure in which a translucent plate built in a state in which polarization separation films inclined with respect to the optical axis are arranged is in contact with a quarter-wave plate. P-polarized light that has been transmitted through the separation film and reflected by the polarization separation film is reflected by another adjacent polarization separation film and converted to S-polarization, so that incident light can be aligned with S-polarization.
[0057]
In the color separation optical system, a red-green reflecting dichroic mirror 26 and a green reflecting dichroic mirror 28 are installed, and the light beams R and G are reflected by the red-green reflecting dichroic mirror 26 and the light beam B is transmitted. Of the reflected light beams R and G, the light beam G is reflected by the green reflecting dichroic mirror 28, and the light beam R passes through the green reflecting dichroic mirror 28.
[0058]
In the light guide system, the light beam B is reflected by the reflection mirror 27 and enters the condenser lens 35. The light beam G is directly incident on the condenser lens 34 from the green reflecting dichroic mirror 27. The light beam R enters the condenser lens 33 through the incident side lens 29, the reflection mirror 30, the intermediate lens 31, and the reflection mirror 32.
[0059]
Liquid crystal light valves 36, 37, and 38 are attached to the tips of the condenser lenses 33, 34, and 35, respectively. These liquid crystal light valves are configured by a liquid crystal device module in which a liquid crystal device described later is housed in a panel mounting frame and a wiring member such as a flexible wiring board is connected, and the panel mounting frame described later is supported and fixed in an optical unit. It is installed by inserting and fixing to 39. These light valves are controlled for switching according to desired image information by control drive means (not shown) (conductively connected to the wiring member), and modulate the light beams R, G, and B.
[0060]
In the color synthesis optical system, a dichroic prism that receives the light beams R, G, and B, which are respectively modulated by the liquid crystal light valves 36, 37, and 38 to form predetermined image components, on three surfaces is configured. A cubic prism unit 40 is installed. The prism unit 40 combines the light beams R, G, and B to form a color image including desired image information. This color image is enlarged and projected on a screen (not shown) at a predetermined position by the projection lens unit 41.
[0061]
In such a liquid crystal projector 20, when FIG. 5 displays a cross section of the apparatus, among the image components modulated by the liquid crystal light valves 36, 37, 38, the liquid crystal light valves 36 and 38 are used. The image component formed by the above is reflected by the selective reflection surface in the prism unit 40, but the image component formed by the liquid crystal light valve 37 passes through the prism unit 40 without being reflected. Therefore, the image component formed based on the light beams R and B and the image component formed based on the light beam G are combined in a state where they are mirror-inverted with respect to each other about the vertical axis in the left-right direction. Will be projected.
[0062]
【The invention's effect】
As described above, according to the present invention, the light to the alignment film is irradiated by irradiating the light for selectively curing the sealing material in the inner region of the sealing material where the liquid crystal is disposed in a state where the light is selectively weakened or blocked. This can reduce the influence of orientation and suppress alignment defects.
[0063]
In addition, since the sealing material is cured by light polarized in a direction intersecting with the alignment treatment direction of the alignment film, the influence of the irradiation light on the alignment treatment state of the alignment film can be reduced, such as alignment failure. Occurrence of problems due to the alignment treatment state can be suppressed.
[Brief description of the drawings]
FIG. 1A is a schematic perspective view showing a state of a photocuring process of a sealing material for explaining a first embodiment of a manufacturing method of a liquid crystal device according to the present invention. (B) is a schematic perspective view for demonstrating the modification of 1st Embodiment.
FIG. 2A is a schematic perspective view schematically showing a photocuring process of a sealing material for explaining a second embodiment of the method for manufacturing a liquid crystal device according to the present invention. (B) is an explanatory view showing the relationship between the scanning lines and data lines of the active matrix type liquid crystal device, the alignment direction, and the polarization direction of ultraviolet rays.
FIG. 3 is an explanatory diagram showing a relationship between a panel orientation processing direction and a polarization direction of ultraviolet light for explaining a modification of the second embodiment.
FIG. 4A is an explanatory diagram showing a relationship between a panel orientation processing direction and an ultraviolet polarization direction for explaining a modification of the second embodiment. (B) And (c) is explanatory drawing which shows the relationship between the alignment process direction in a guest host type liquid crystal device, and the polarization direction of an ultraviolet-ray.
FIG. 5 is a schematic cross-sectional view showing the structure of a liquid crystal projector that uses the liquid crystal device manufactured according to each of the embodiments as a light valve.
FIG. 6 is a schematic schematic plan view of a liquid crystal device manufactured according to each of the embodiments.
FIG. 7 is a schematic schematic cross-sectional view of the liquid crystal device.
FIG. 8 is a circuit diagram showing an equivalent circuit of a structure configured on an element substrate in the liquid crystal device.
FIG. 9 is a plan layout view showing a planar structure on an element substrate in the liquid crystal device.
10 is a schematic enlarged cross-sectional view showing a cross-sectional structure on the element substrate in the same liquid crystal device (showing a state cut along line XX in FIG. 9). FIG.
[Explanation of symbols]
10 Liquid crystal device
11 Transparent substrate (element substrate)
12 Transparent substrate (counter substrate)
13 LCD
14 Sealing material
20 LCD projector
50 Shading mask
51 Transparent plate
52 Shading layer
53 films
100 large panel
M, N UV
K, K ', R, R', U Polarization direction
P, Q, S, T Orientation processing direction

Claims (7)

In a method of manufacturing a liquid crystal device in which liquid crystal is sandwiched between a pair of substrates,
Forming an alignment film on the inner surface of at least one of the pair of substrates;
Applying an alignment treatment to the alignment film;
Bonding the pair of substrates through a sealing material;
Irradiating light to the pair of substrates from the side of at least one of the pair of substrates, and curing the sealing material;
Injecting liquid crystal between the pair of substrates,
In the step of curing the sealing material, the pair of substrates is provided with a light shielding mask in which a light modulation layer is attached to a base provided outside the pair of substrates in an inner region of the sealing material constituting a liquid crystal sealing region. Then, the light irradiation is performed in a state where the irradiated light is selectively weakened.   2. The light shielding mask according to claim 1, wherein the light shielding mask is provided on a side of the base body facing the pair of substrates, and the light modulation layer and the pair of substrates are arranged with an interval of 50 μm to 100 μm, A method of manufacturing a liquid crystal device, wherein the pair of substrates is irradiated with light.   3. The liquid crystal according to claim 2, wherein a spacer is formed on the light-shielding mask on a surface facing the pair of substrates, and light is irradiated while the spacer is in contact with the pair of substrates. Device manufacturing method. In a method of manufacturing a liquid crystal device in which liquid crystal is sandwiched between a pair of substrates,
Forming an alignment film on the inner surface of at least one of the pair of substrates;
Performing an alignment treatment in a predetermined direction on the alignment film;
Bonding the pair of substrates through a sealing material;
Irradiating the pair of substrates with light polarized in a direction crossing the predetermined direction of the alignment film from the one substrate side to cure the sealing material. Method.   5. The alignment film according to claim 4, wherein the alignment films are formed on the inner surfaces of the pair of substrates, the alignment treatment directions of the alignment films on the pair of substrates are substantially perpendicular to each other, and the irradiated light is A method of manufacturing a liquid crystal device, wherein the liquid crystal device is linearly polarized light that is polarized in a direction that intersects at approximately 45 degrees with respect to the alignment processing direction in any of the pair of substrates.   5. The alignment film according to claim 4, wherein the alignment films are formed on the inner surfaces of the pair of substrates, and the alignment treatment directions of the alignment films on both the substrates are substantially parallel or anti-parallel to each other, and the irradiated light is A method of manufacturing a liquid crystal device, wherein the liquid crystal device is linearly polarized light polarized in a direction substantially orthogonal to the alignment treatment direction in any of the pair of substrates. 7. The method according to claim 1, wherein a plurality of scanning lines and a plurality of data lines formed on the inner surface of the one substrate so as to intersect with each other, and the scanning lines and the data lines are formed. A switching element electrically connected; and a pixel electrode electrically connected to the switching element;
A method for manufacturing a liquid crystal device, characterized in that an alignment process direction of the alignment film on the pair of substrates is substantially matched with an extension direction of the scanning lines or data lines.

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