JP3809263B2 - Dicing machine - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a leakage detection device that is disposed in a portion where there should be no leakage in a processing apparatus that supplies liquid during processing, and can detect leakage.
[0002]
[Prior art]
This type of leakage detection device is disposed in a dicing device 20 for dicing a semiconductor wafer as shown in FIG. 5, for example. In the dicing apparatus 20, for example, when the semiconductor wafer W is diced, the semiconductor wafer W held on the frame F is held on the chuck table 21 via the holding tape T. Then, the chuck table 21 is moved in the X-axis direction along with the expansion and contraction of the bellows 21 a, the cutting position is aligned through processing such as pattern matching by the alignment means 22, and then the semiconductor wafer is rotated by the rotating blade 23. Dicing is performed by cutting the required position of W in the X-axis direction.
[0003]
When dicing, a liquid such as a cooling liquid for cooling the semiconductor wafer W and a cleaning liquid for cleaning a cooling liquid containing cutting waste generated by cutting is supplied. In addition, since the liquid is scattered by the rotation of the blade 23, the liquid may invade the portion of the dicing apparatus where the liquid originally should not enter.
[0004]
If liquid enters a portion where liquid should not enter, it may cause a failure of the dicing apparatus 20. Therefore, in the conventional dicing apparatus, for example, FIG. A liquid leakage detection device 60 as shown in FIG.
[0005]
In the liquid leakage detection device 60, the liquid receiving portion 61 or the second liquid receiving portion 62 receives cutting fluid or cleaning liquid entering from the upper portion, and arbitrary positions of the liquid receiving portion 61 and the second liquid receiving portion 62, for example, In the example of FIG. 6, the liquid sensing members 63a, 63b, 64a, 64b provided at both ends sense that the liquid has adhered to the liquid, so that the liquid has entered the part that should not enter. That is, it is possible to detect that the liquid has leaked.
[0006]
[Problems to be solved by the invention]
However, since the liquid receiving portion 61 and the second liquid receiving portion 62 are disposed horizontally, even if the liquid enters the inside, the liquid enters the liquid sensing members 63a, 63b, 64a, 64b. In some cases, the liquid does not adhere, and the liquid intrusion cannot be detected even though the liquid has invaded. Even if it can be detected, it may take some time to detect. As described above, when the liquid leakage cannot be detected or when the detection is delayed, a considerable amount of the liquid may enter the portion where the liquid should not enter, which may cause a failure of the apparatus.
[0007]
Therefore, the conventional liquid leakage detection device has a problem that must be solved by preventing the failure of the device by detecting the intrusion of the liquid quickly and surely.
[0008]
[Means for Solving the Problems]
The present invention as specific means for solving the above problems includes a chuck table, by contributing to the dicing liquid adheres to the required position of performing dicing apparatus dicing while supplying contributes liquid dicing A dicing apparatus provided with a liquid sensing member that senses liquid leakage, wherein the chuck table is guided by a pair of guide rails and is movable in a cutting direction, inside the guide rails, and / or on the outside of the guide rail, and a liquid receiving portion inclined to form so as to flow down receiving a contributing liquid dicing was leakage, contributes liquid dicing portion receiving liquid is liquid leakage was received flows down position A dicing apparatus provided with a liquid sensing member disposed on the surface is provided.
[ 0009 ]
According to such a dicing apparatus, since all the invading liquid always flows downstream of the liquid receiving portion, liquid leakage is reliably and promptly detected by the liquid sensing member disposed at the position where the liquid finally accumulates. be able to.
[ 0010 ]
DETAILED DESCRIPTION OF THE INVENTION
Next, embodiments of the present invention will be described with reference to the drawings. Note that portions common to those of the dicing apparatus described in the related art will be described with the same reference numerals.
[ 0011 ]
The liquid leakage detection device 10 is configured as shown in FIG. 1, and is incorporated in the dicing device 20 shown in FIG. 5, for example. As shown in FIG. 1, in the dicing apparatus 20, a ball screw 25 that rotates with the rotation of the pulse motor 24 is disposed in the X-axis direction, and the base 26 is paired with the rotation of the ball screw 25. It is guided by the guide rail 27 and can move in the X-axis direction.
[ 0012 ]
A chuck table 21 is fixed to the upper part of the base 26, and a water cover 28 for preventing a liquid such as a cutting fluid or a cleaning fluid from flowing downward is disposed around the chuck table 21. Bellows 21 a that follow the movement of the chuck table 21 and the water cover 28 in the X-axis direction and are expanded and contracted by the bellows guide 29 are disposed at both ends of the water cover 28 in the X-axis direction. The bellows 21a has the fixed plates 31 at both ends fixed at predetermined positions of the dicing device 20, and expands and contracts within a certain range in the X-axis direction to prevent leakage into the device. Further, a drainage port 30 for draining the liquid accumulated on the bellows 21 a is provided at a required position of the bellows guide 29.
[ 0013 ]
The pair of guide rails 27 are both provided upright, but there is a difference in height at the lower end, and the lower ends are constructed by inclined surfaces, and the inclined surfaces form the liquid receiving portion 12. is doing. The liquid sensing member 13 is supported by the guide rail 27 and disposed in the X-axis direction at a position where the liquid flows, for example, inside the lower end of the inclined surface.
[ 0014 ]
The liquid receiving portion 12 is connected to a second liquid receiving portion 15a having an inclined surface inclined at substantially the same angle as the inclined surface of the liquid receiving portion 12, and a lower end positioned outside the guide rail 27, That is, the receiving wall 16a is erected at the position where the liquid flows down, and the liquid sensing member 17a is disposed adjacent to the receiving wall 16a. In addition, a third liquid receiving portion 15b is connected to the liquid receiving portion 12 in a direction opposite to that of the second liquid receiving portion 15a, and is erected at the lower end of the third liquid receiving portion 15b. A liquid sensing member 17b is disposed adjacent to the receiving wall 16b.
[ 0015 ]
As described above, when the dicing apparatus 20 in which the liquid leakage detection device 10 is disposed under the chuck table 21 performs dicing while supplying a liquid such as a cutting liquid or a cleaning liquid, the liquid leakage by the water cover 28 is performed. For example, when a part of the liquid enters the liquid receiving portion 12, the liquid that has entered flows down along the inclined surface and always adheres to the liquid sensing member 13.
[ 0016 ]
In addition, even when the liquid does not enter the liquid receiving portion 12, if the liquid enters the second liquid receiving portion 15a or the third liquid receiving portion 15b, the intruded liquid flows down along the respective inclined surfaces. And adheres to the liquid sensing member 17a or 17b.
[ 0017 ]
For example, as shown in FIG. 7, each of the liquid sensing members 13, 17a, and 17b has two terminals a and b, and is configured such that the terminals are short-circuited via the liquid L that is attached. When liquid is attached to any of the sensing members 13, 17a, 17b, a short circuit is detected, an alarm can be issued to the operator by immediately sounding the buzzer 32, etc. I can inform you as soon as possible.
[ 0018 ]
The liquid leakage detection device can also be disposed in the lower region 41 of the polishing device 40 as shown in FIG. In the polishing apparatus 40 of FIG. 3, an object to be polished is placed on the chuck table 42, and a polishing grindstone 46 is mounted on the tip of a spindle 44 constituting the polishing means 43 via a mounter 45. It is driven and rotated by a drive source 47 provided at the top.
[ 0019 ]
As shown in FIG. 4, a pulse motor 49 is disposed on the top of the back side of the wall body 48, and a drive unit 51 is screwed into a ball screw 50 that is driven by the pulse motor 49 and rotates. . When the ball screw 50 rotates, the drive unit 51 moves up and down. As the drive unit 51 moves up and down, the polishing means 43 connected to the drive unit 51 is guided by the pair of rails 52 and moves up and down. Further, the position information of the driving unit 51 is measured by the linear scale 53, and the position information is used for driving control of the pulse motor 49.
[ 0020 ]
At the time of polishing, the spindle 44 rotates by being driven by the drive source 47, and the polishing means 43 is lowered by being driven by the pulse motor 49 to apply an appropriate pressing force to the object to be polished. At that time, a cooling liquid or a cleaning liquid is supplied.
[ 0021 ]
Also in the polishing apparatus 40, as shown in FIG. 4, when the liquid enters the liquid receiving portion 55 having the inclined surface in the lower region 41 located at the lower portion of the chuck table 42, the intruded liquid is moved along the inclined surface. Since it flows down and adheres to the liquid sensing member 56, it can be reliably detected that there is a liquid leak.
[ 0022 ]
Although not shown, in the polishing apparatus 40, as in the case of the dicing apparatus 30, a second liquid receiving portion and a third liquid receiving portion may be provided.
[ 0023 ]
【The invention's effect】
As described above, in the dicing apparatus according to the present invention, since all the invading liquid always flows to the downstream side of the liquid receiving portion, the liquid disposed at the position where the liquid flows down, for example, the position where the liquid finally accumulates. Liquid leakage can be detected reliably and promptly by the sensing member, and failure of the dicing apparatus can be prevented beforehand.
[Brief description of the drawings]
FIG. 1 is a schematic perspective view showing a state in which a liquid leakage detection device is disposed below a chuck table of a dicing device.
FIG. 2 is an explanatory diagram when the leakage detecting device is viewed from the side surface side of the dicing device.
FIG. 3 is a perspective view showing a part of the appearance of the polishing apparatus.
FIG. 4 is an explanatory view when a state in which a water leakage detecting means is disposed at the lower part of the chuck table of the polishing apparatus is viewed from the side surface side.
FIG. 5 is a perspective view showing an appearance of a dicing apparatus.
FIG. 6 is an explanatory diagram showing a configuration of a conventional water leak detection means disposed in the dicing apparatus.
FIG. 7 is an explanatory diagram showing a configuration of a liquid sensing member.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 ... Liquid leak detection device 12 ... Liquid receiving part 13 ... Liquid sensing member 15a ... 2nd liquid receiving part 15b ... 3rd liquid receiving part 16a, 16b ... Receiving wall 17a, 17b ... Liquid Sensing member 20 ... Dicing device 21 ... Chuck table 21a ... Bellows 22 ... Alignment means 23 ... Blade 24 ... Pulse motor 25 ... Ball screw 26 ... Base 27 ... Guide rail 28 ... Water cover 29 ... Bellows guide 30 ... Drain port 31 ... Fixed plate 32 ... Buzzer 40 ... Polishing device 41 Lower area 42 ... Chuck table 43 ... Polishing means 44 ... Spindle 45 ... Mounter 46 ... Polishing wheel 47 …… Drive source 48 …… Wall body 49 …… Pulse motor 50 …… Ball screw 51 …… Drive unit 52 …… Rail 53 …… Linear scale 55 …… Liquid receiving part 56 …… Liquid sensing member 60 …… Leak detecting device 61 …… Liquid receiving part 62 …… Second liquid receiving parts 63a, 63b, 64a, 64b …… Liquid Sensing member

Claims (1)

Has a chuck table, dicing liquid sensing member for sensing the liquid leakage by contributing liquid to the dicing to the required position of performing dicing apparatus dicing while supplying contributes liquid dicing is attached is disposed A device,
The chuck table is guided by a pair of guide rails and is movable in the cutting direction. The chuck table receives liquid that contributes to leaked dicing inside and / or outside the guide rails. A dicing apparatus comprising: a liquid receiving portion formed to be inclined so as to flow down; and a liquid sensing member disposed at a position where the liquid contributing to leaked dicing received by the liquid receiving portion flows down.

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