JP3792379B2 - 湾曲荷電粒子通路の真空排気方法 - Google Patents
湾曲荷電粒子通路の真空排気方法 Download PDFInfo
- Publication number
- JP3792379B2 JP3792379B2 JP33190097A JP33190097A JP3792379B2 JP 3792379 B2 JP3792379 B2 JP 3792379B2 JP 33190097 A JP33190097 A JP 33190097A JP 33190097 A JP33190097 A JP 33190097A JP 3792379 B2 JP3792379 B2 JP 3792379B2
- Authority
- JP
- Japan
- Prior art keywords
- passage
- cryopump
- shield
- curved
- end station
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002245 particle Substances 0.000 title claims description 15
- 238000000034 method Methods 0.000 title claims description 7
- 230000002093 peripheral effect Effects 0.000 claims 1
- 150000002500 ions Chemical class 0.000 description 12
- 238000010926 purge Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- 238000005192 partition Methods 0.000 description 6
- 238000010884 ion-beam technique Methods 0.000 description 5
- 230000001771 impaired effect Effects 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000008929 regeneration Effects 0.000 description 2
- 238000011069 regeneration method Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000009191 jumping Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Images
Landscapes
- Particle Accelerators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33190097A JP3792379B2 (ja) | 1997-12-02 | 1997-12-02 | 湾曲荷電粒子通路の真空排気方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33190097A JP3792379B2 (ja) | 1997-12-02 | 1997-12-02 | 湾曲荷電粒子通路の真空排気方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH11162700A JPH11162700A (ja) | 1999-06-18 |
| JPH11162700A5 JPH11162700A5 (enExample) | 2005-05-19 |
| JP3792379B2 true JP3792379B2 (ja) | 2006-07-05 |
Family
ID=18248892
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33190097A Expired - Lifetime JP3792379B2 (ja) | 1997-12-02 | 1997-12-02 | 湾曲荷電粒子通路の真空排気方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3792379B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101194652B1 (ko) * | 2008-08-11 | 2012-10-29 | 이온빔 어플리케이션스 에스.에이. | 고전류 디시 양성자 가속기 |
-
1997
- 1997-12-02 JP JP33190097A patent/JP3792379B2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH11162700A (ja) | 1999-06-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR960003788B1 (ko) | 진공배기 시스템 및 배기방법 | |
| EP0789788B1 (en) | In situ getter pump system and method | |
| EP0117523B2 (en) | Reduced vacuum cryopump | |
| JP4457018B2 (ja) | サーチガス漏れ検出器 | |
| CN106014916B (zh) | 低温泵 | |
| CN106246564B (zh) | 真空泵以及质量分析装置 | |
| JP3792379B2 (ja) | 湾曲荷電粒子通路の真空排気方法 | |
| US20050155358A1 (en) | Method and apparatus for detecting and measuring state of fullness in cryopumps | |
| EP0155700B1 (en) | Apparatus for quantitative secondary ion mass spectrometry | |
| CN107430972B (zh) | 带电粒子束装置及其真空排气方法 | |
| JP4008081B2 (ja) | クライオポンプの再生方法 | |
| EP0678165B1 (en) | Cryopump with differential pumping capability | |
| EP0128716A2 (en) | Inlet system for a mass spectrometer | |
| JPH11162700A5 (enExample) | ||
| JPH0442557Y2 (enExample) | ||
| JPH09195936A (ja) | 密閉型電動圧縮機 | |
| RU2023910C1 (ru) | Вакуумная установка | |
| JP2000117093A (ja) | 極高真空環境装置及び極高真空環境の形成方法 | |
| JPS5812700B2 (ja) | 電子線装置 | |
| JP4427402B2 (ja) | 真空装置 | |
| JPH08232840A (ja) | 極高真空ポンプ系 | |
| JPH08319946A (ja) | 核融合装置の真空排気システム | |
| GB2632683A (en) | Mass spectrometer comprising a vacuum system and a method of operation | |
| JPH11166478A5 (enExample) | ||
| JPH10208690A (ja) | 質量分析装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20040715 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20040715 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20060228 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20060307 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20060405 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100414 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110414 Year of fee payment: 5 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110414 Year of fee payment: 5 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120414 Year of fee payment: 6 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130414 Year of fee payment: 7 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130414 Year of fee payment: 7 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140414 Year of fee payment: 8 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |