JP3784687B2 - Method for manufacturing flexible IC module and method for manufacturing information carrier using flexible IC module - Google Patents

Method for manufacturing flexible IC module and method for manufacturing information carrier using flexible IC module Download PDF

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JP3784687B2
JP3784687B2 JP2001318142A JP2001318142A JP3784687B2 JP 3784687 B2 JP3784687 B2 JP 3784687B2 JP 2001318142 A JP2001318142 A JP 2001318142A JP 2001318142 A JP2001318142 A JP 2001318142A JP 3784687 B2 JP3784687 B2 JP 3784687B2
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chip
winding coil
flexible
module
information carrier
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JP2003006604A (en
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吉晴 日野
正樹 福原
和彦 大道
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Hitachi Maxell Energy Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554External layer
    • H01L2224/0555Shape
    • H01L2224/05552Shape in top view
    • H01L2224/05554Shape in top view being square
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/4501Shape
    • H01L2224/45012Cross-sectional shape
    • H01L2224/45015Cross-sectional shape being circular
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144Gold (Au) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/4554Coating
    • H01L2224/45565Single coating layer
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
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    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/4813Connecting within a semiconductor or solid-state body, i.e. fly wire, bridge wire
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/858Bonding techniques
    • H01L2224/85801Soldering or alloying
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00011Not relevant to the scope of the group, the symbol of which is combined with the symbol of this group
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details

Description

【0001】
【発明の属する技術分野】
本発明は、非接触式ICカードなどの情報担体の元になるフレキシブルICモジュールと、当該フレキシブルICモジュールの製造方法と、当該フレキシブルICモジュールを用いた情報担体と、当該情報担体の製造方法とに関する。
【0002】
【従来の技術】
非接触式ICカード等の非接触式情報担体は、定期券、運転免許証、テレホンカード、キャッシュカード等の代替品として使用されるか、使用が検討されており、大量の使用が見込まれるところから、構造及び製造工程をいかに簡略化し、単価を下げるかが最も重要な技術的課題の1つになっている。
【0003】
本願出願人は、先に、かかる情報担体の製造方法として、ICチップの入出力端子に巻線コイルの両端部を直接接続することによってICチップと巻線コイルの接続体を作製し、次いで、当該ICチップと巻線コイルの接続体を例えば不織布などからなるフレキシブル基体に熱圧着して、中間体であるフレキシブルICモジュールを作製し、しかる後に、当該フレキシブルICモジュールの外面に例えばポリプロピレンシートなどからなるカバーシートを接着して、完成品である情報担体を得る方法を提案した(特開平11−333561号)。
【0004】
この方法によれば、ICチップと巻線コイルの接続体をフレキシブル基体に熱圧着するので、接続体の保護効果が高められ、破壊されやすいICチップの取り扱いや低剛性のコイルの取り扱いが容易になって、情報担体を製造する際の接続体の取扱いを容易化できて情報担体の生産性を高めることができる。また、この方法によれば、フレキシブルICモジュールの外面にカバーシートを接着するだけで完成品である情報担体を得ることができるので、この点からも情報担体の生産性を高めることができる。さらに、この方法によれば、ICチップと巻線コイルとの接続体として、ICチップの入出力端子に巻線コイルの両端部が直接接続されたものを用いるので、ICチップと巻線コイルとの接続の信頼性を高めることができ、情報担体の耐久性の向上と通信特性の改善とを図ることができる。
【0005】
【発明が解決しようとする課題】
ところで、前記情報担体の製造に際しては、作製されたICチップを巻線コイルの接続装置まで搬送する工程、搬送されたICチップを当該接続装置上の所定位置にチャッキングする工程、ICチップの入出力端子に巻線コイルを直接接続する工程、ICチップと巻線コイルの接続体をフレキシブル基体に熱圧着する工程及びフレキシブルICモジュールの外面にカバーシートを熱圧着する工程等において、ICチップに外力が負荷される。そして、非接触式ICカード等の薄形の情報担体については、樹脂モールドを有しないベアチップが前記ICチップとして用いられるので、このようなベアチップを用いた情報担体においては、製造段階でICチップに割れや欠けを生じやすく、良品を歩留まり良く製造することが難しいという問題があった。
【0006】
これらの問題は、ICチップとして高度に薄形化処理されたベアチップを用いた場合に特に顕著になる。
【0007】
また、入出力端子に巻線コイルを直接接続する工程におけるICチップの割れや欠けは、バンプとして高硬度のニッケルバンプが入出力端子に設けられたベアチップに巻線コイルの両端を拡散接合法やウェッジボンディング法によって直接接続する場合に特に顕著になる。実験によると、100μm×100μmの入出力端子を有する厚さが50〜100μmのベアチップを線径が25μmで純度が99.99%の金線を用いてワイヤボンディング接続する場合には、ベアチップに作用する押圧力は約40g/mm程度であり、ベアチップには割れや欠けが一切発生しなかったが、入出力端子にニッケルバンプが設けられた前記と同一のベアチップに線径が60μmの銅線を拡散接合法で接続する場合には、ベアチップに作用する押圧力は80〜160g/mm程度となり、ほとんど全てのベアチップに割れや欠けが発生した。
【0008】
前記の条件でワイヤボンディング接続されたベアチップと金線との引張強度は約10g/mmであるのに対して、前記の条件で拡散接合されたベアチップと銅線との引張強度は約60g/mmとなり、著しく接続の信頼性を高めることができるので、入出力端子にニッケルバンプが設けられたベアチップを用いて巻線コイルを構成する線材の両端を拡散接合法やウェッジボンディング法によって直接接続可能な情報担体及びその製造方法の開発が強く望まれている。
【0009】
なお、前記においては、情報担体の製造時を例にとって説明したが、フレキシブルICモジュールの製造時にも、同様の問題がある。
【0010】
本発明は、かかる従来技術の不備を解決するためになされたものであって、その目的は、ICチップに割れや欠けがなく信頼性に優れたフレキシブルICモジュールを提供すること、及び当該フレキシブルICモジュールを安価かつ高能率に製造する方法を提供すること、並びにICチップに割れや欠けがなく信頼性に優れた情報担体を提供すること、及び当該情報担体を安価かつ高能率に製造する方法を提供することにある。
【0026】
【課題を解決するための手段】
〈フレキシブルICモジュールの製造方法〉
本発明は、前記の課題を解決するため、フレキシブルICモジュールの製造方法に関しては、個片に切り出されたICチップの裏面に補強板を接着する工程と、当該ICチップの入出力端子に巻線コイルの両端部を直接接続する工程と、これらICチップと巻線コイルの接続体をフレキシブル基体に熱圧着する工程とを含んでフレキシブルICモジュールを製造するという構成にした。
【0027】
かように、個片に切り出されたICチップの裏面に補強板を接着すると、ICチップに対する補強板の接着位置を厳密に規制することができるので、例えば補強板が接着されたICチップを巻線コイルの接続装置まで搬送する工程や搬送されたICチップを当該接続装置上の所定位置にチャッキングする工程において、硬質の治具を確実に補強板にチャッキングさせることができるので、ICチップに応力が作用せず、ICチップの割れや欠けを防止することができる。また、ICチップの裏面に補強板を接着した後に、当該ICチップの入出力端子に巻線コイルの両端部を直接接続するので、巻線コイルの接続時に作用する外力によってICチップに割れや欠けが発生しにくく、良品を高能率に製造することができる。さらに、ICチップと巻線コイルの接続体をフレキシブル基体に熱圧着するので、巻線コイルの巻き乱れや変形を抑制することができて、カード打抜き時における巻線コイルの断線や通信特性のバラツキを抑制することができ、良品の歩留まりの向上することができる。
【0028】
なお、本明細書において、「熱圧着」とは、加熱下で構成部材に圧縮力を負荷する処理をいい、平行平板状の金型を使用するホットプレス法と、ローラ状の金型を使用するロールプレス法とがある。
また、本明細書において、「自己圧着性」とは、常温又は加熱下で不織布に圧縮力を負荷したとき、当該不織布を構成する各繊維が接合されると共に、複数枚の不織布を重ねあわせて圧縮力を負荷した場合にはそれら重ね合わされた各不織布が互いに接合され、不織布の形状が圧縮前より体積が減少した状態に保たれる特性をいう。
【0031】
〈情報担体の製造方法〉
本発明は、前記の課題を解決するため、情報担体の製造方法に関しては、個片に切り出されたICチップの裏面に補強板を接着する工程と、当該ICチップの入出力端子に巻線コイルの両端部を直接接続する工程と、これらICチップと巻線コイルの接続体をフレキシブル基体に熱圧着する工程と、前記フレキシブル基体の外面にカバーシートを接着する工程とを含んで情報担体を製造するという構成にした。
【0032】
かように、個片に切り出されたICチップの裏面に補強板を接着すると、ICチップに対する補強板の接着位置を厳密に規制することができるので、例えば補強板が接着されたICチップを巻線コイルの接続装置まで搬送する工程や搬送されたICチップを当該接続装置上の所定位置にチャッキングする工程において、硬質の治具を確実に補強板にチャッキングさせることができるので、ICチップに応力が作用せず、ICチップの割れや欠けを防止することができる。また、ICチップの裏面に補強板を接着した後に、当該ICチップの入出力端子に巻線コイルの両端部を直接接続するので、巻線コイルの接続時に作用する外力によってICチップに割れや欠けが発生しにくく、良品を高能率に製造することができる。さらに、ICチップと巻線コイルの接続体をフレキシブル基体に熱圧着するので、巻線コイルの巻き乱れや変形を抑制することができて、カード打抜き時における巻線コイルの断線や通信特性のバラツキを抑制することができ、良品の歩留まりの向上することができる。加えて、フレキシブル基体の外面にカバーシートを接着するので、デザイン印刷等の所要の印刷を施すことが可能になり、各使用目的に適合する各種の情報担体を得ることができる。
【0033】
【発明の実施の形態】
〈フレキシブルICモジュールの構成〉
本発明に係るフレキシブルICモジュールの実施形態例を、図1及び図2に基づいて説明する。図1は本実施形態例に係るフレキシブルICモジュール1Aの要部断面図、図2は第2不織布を除去した本実施形態例に係るフレキシブルICモジュール1Aの要部平面図である。
【0034】
これらの図から明らかなように、本例のフレキシブルICモジュール1Aは、入出力端子にバンプ1aが形成されたICチップ1と、当該ICチップ1の裏面に接着剤層2を介して接着された補強板3と、前記バンプ1aに直接接続された巻線コイル4と、これらの各部材1〜4を保持するフレキシブル基体5とをもって構成されている。
【0035】
ICチップ1としては、従来より非接触式ICカードに搭載されている任意のICチップを用いることができるが、非接触式ICカードなどの薄形の情報担体に適用する場合には、全厚が300μm以下、好ましくは200μm以下に薄形化されたベアICチップを用いることが望ましい。なお、特に薄形の情報担体に適用する場合には、ICチップ1として全厚が50μm〜150μm程度まで薄形化されたベアICチップを用いることもできる。前記バンプ1aとしては、ニッケルバンプや金バンプ或いはハンダバンプ等を形成することができるが、拡散接合法やウェッジボンディング法によって巻線コイル4を構成する銅線を接合することができて、入出力端子(バンプ1a)に対する導線の接合位置を厳密に規制できることから、ニッケルバンプを用いることが特に好ましい。なお、バンプ1aとしてニッケルバンプを形成する場合には、ニッケルバンプの表面に酸化層が生成されるのを防止し、巻線コイル4の接続を容易かつ確実にするため、ニッケルバンプ1aの表面にフラッシュメッキ等のメッキ層を形成することが望ましい。
【0036】
補強板3としては、所要の強度及び剛性を有するものであれば任意の材料からなるものを用いることができるが、安価に実施できること、及び外力を受けても割れや欠けを生じないことなどから、プラスチック板又は金属板が特に好適である。当該補強板3の平面サイズは、例えば作製されたICチップ1を巻線コイル4の接続装置まで搬送する工程や、搬送されたICチップ1を当該接続装置上の所定位置にチャッキングする工程において、硬質の治具を確実に補強板3にチャッキングさせるため、ICチップ1の平面サイズと同等か、これよりも大型にすることが望ましい。また、当該補強板3の厚みは、ICチップ1に実用上十分な強度を付与するため、ICチップ1の厚みと同等か、これよりも厚くすることが望ましい。
【0037】
接着剤層2を構成する接着剤としては、所要の接着強度を有するものであれば公知に属する任意の接着剤を用いることができるが、硬化時間が短く、かつ、ICチップ1に高温を負荷しないで硬化するものを用いることが特に望ましい。この種の接着剤としては、常温硬化型接着剤又はホットメルト接着剤を挙げることができる。
【0038】
巻線コイル4は、図示しないリーダライタからICチップ1への電源の供給を非接触で受けると共に、当該図示しないリーダライタとの間でデータの伝送を非接触で行うものであって、心線の直径が20μm〜200μmの被覆銅線をICチップ1の特性に合わせて数回〜数十回ターンさせることにより形成される。巻線コイル4の巻回形状は、所要の通信距離が得られるものであれば、任意の形状にすることもできるが、線間に生じる浮遊容量の発生を防止又は抑制してフレキシブルICモジュールの通信特性を良好なものにするため、図2に示すように、線間にスペースを有する間隔巻きにすることが望ましい。なお、図2の例では、全ての線間に一定のスペースを設けたが、当該巻線コイル4を含む共振回路の容量値を調整するため、巻線コイル4の一部を密巻きにすることもできる。
【0039】
前記巻線コイル4を構成する被覆銅線としては、銅線の周囲に絶縁層が直接被覆されたもののほか、バンプ1aとの接続性をより高めるために、銅線の周囲に金などの接合用金属層が被覆され、当該接合用金属層の周囲に絶縁層が被覆されたものを用いることもできる。
【0040】
ICチップ1と巻線コイル4との直接接続方式としては、拡散接合、ウェッジボンディング、溶接又はハンダ付け等を適用することができるが、接続部に大きな変形を生じさせず、かつ、接続部に介在物を発生させないことから、拡散接合法によることが特に好ましい。
【0041】
フレキシブル基体5は、図1に示すように、第1不織布5aと第2不織布5bとから構成されており、これら2枚の不織布5a,5bは、前記各部材1,3,4を挟み込んだ後に、熱圧着により一体化される。前記第1不織布5a及び第2不織布5bとしては、前記ICチップ1、補強板3及び巻線コイル4の保持を容易かつ確実に行うため、自己圧着性を有するものが用いられる。自己圧着性を有する不織布としては、公知に属する任意のものを用いることができるが、自己圧着性が特に高く、かつ熱収縮が小さく、しかも熱と圧力を負荷した後も多孔質で樹脂の含浸性に優れることから、結晶性樹脂と非結晶性共重合ポリエステルとを含む繊維からなる不織布、例えば、結晶性樹脂と非結晶性共重合ポリエステルとの複合繊維からなるもの又は結晶性樹脂繊維と非結晶性共重合ポリエステル繊維の混合体からなるものを用いることが特に望ましい。
【0042】
以下、ICチップ1と巻線コイル4との直接接続方法を、図3乃至図5を用いて説明する。図3はウェッジボンディング法とその接続部の状態を示す断面図、図4はハンダ付け法とその接続部の状態を示す断面図、図5は拡散溶接法に適用される接合装置の使用状態の構成図である。
【0043】
ICチップ1と巻線コイル4とをウェッジボンディング法により接合する場合には、図3(a)に示すように、ICチップ1として入出力端子1bに予め金バンプ又はニッケルバンプ1aが形成されたものが用いられる。ニッケルバンプを形成した場合には、金バンプを形成した場合に比べて、ICチップ1の低コスト化を図ることができる。金バンプ又はニッケルバンプ1aが形成されたICチップ1を用いる場合、巻線コイル4用の線材としては、接合用金属層4cを有しないものを用いることもできるが、接合をより容易かつ確実にするため、心線4aの周囲に金などの接合用金属層4cが被覆されたものを用いることが特に好ましい。いずれの場合にも、巻線コイル4用の線材としては、図3(a)に示すように、金バンプ又はニッケルバンプ1aの幅よりも線径が小さい線材からなるものが用いられる。金バンプ又はニッケルバンプ1aと巻線コイル4とのウェッジボンディングは、同図に示すように、金バンプ又はニッケルバンプ1aに巻線コイル4の端部を重ねあわせ、巻線コイル4側よりボンディングツール101を押し付けて超音波を負荷し、そのエネルギによってバンプ1a及び巻線コイル4の心線4aを溶融することによって行う。これによって、図5(b)に示すように、ICチップ1の入出力端子1bと巻線コイル4とが直接接続される。なお、巻線コイル4に設けられた絶縁被覆は、接続部に加えられる熱によって蒸発し、巻線コイル4から自動的に除去されるので、バンプ1aへの接続に先立って予め剥離しておく必要はない。
【0044】
ICチップ1と巻線コイル4とをハンダ付けする場合には、図4(a)に示すように、ICチップ1として入出力端子1bにハンダバンプ1aが形成されたものが用いられる。この場合、巻線コイル4としては、接合用金属層4cを有しないものを用いることもできるが、ハンダに対するぬれ性を良好にしてハンダ付けを容易かつ確実にするため、心線4aの周囲に金などの接合用金属層4cが被覆されたものを用いることが特に好ましい。ハンダバンプ1aと巻線コイル4とのハンダ付けは、同図に示すように、ハンダバンプ1aに巻線コイル4の端部を重ねあわせ、巻線コイル4側より所定温度に加熱されたボンディングツール102を押し付け、そのエネルギによって絶縁層(図示省略)を炭化すると共にハンダバンプ1aを溶解することによって行う。これによって、図4(b)に示すように、ICチップ1の入出力端子1bと巻線コイル4とがハンダ1cを介してハンダ付けされる。なお、ICチップ1の入出力端子1bにハンダバンプ1aを形成する構成に代えて、巻線コイル4として心線4aの周囲にハンダ層が被覆されたものを用い、前記と同様の方法でハンダ付けすることも可能である。さらには、ICチップ1の入出力端子1bにハンダバンプ1aを形成し、かつ巻線コイル4として心線4aの周囲にハンダ層が被覆されたものを用いることもできる。
【0045】
また、ICチップ1と巻線コイル4とを拡散接合又は溶接する場合には、入出力端子に金バンプ又はニッケルバンプが形成されたICチップが用いられる。接合装置としては、図5に示すように、微小なギャップdを隔てて平行に配置された2つの電極111a,111bを有する加熱ヘッド112と、この加熱ヘッド112に付設されたリボン巻回リール113a,113bと、これらのリボン巻回リール113a,113bに巻回され、その一部が前記電極111a,111bの先端部に接触するように配線されたリボン状抵抗発熱体114と、原動リール113aを駆動するモータ115とを有し、前記2つの電極111a,111b間に電流を供給することによって、これら両電極間に配置されたリボン状抵抗発熱体114に局部的な抵抗発熱を生じさせるものを用いることができる。なお、前記リボン状抵抗発熱体114としては、比抵抗が大きくかつ熱伝導率が低いために高温を局部的に発生させることが可能で、しかも強度的にも優れることから、高純度の単結晶モリブデンから成るモリブデンリボンが最も好適である。
【0046】
拡散接合又は溶接に際しては、図5に示すように、ICチップ1の入出力端子に形成されたバンプ1a上に巻線コイル4の端部を直接重ねあわせ、巻線コイル4側より前記加熱ヘッド112を押し付ける。そして、前記電極111a,111bにパルス電力を供給し、リボン状抵抗発熱体114の抵抗発熱を利用して絶縁層を昇華させると共に、バンプ1aと巻線コイル4とを接合する。モータ115は、必要に応じて原動リール113aを駆動し、常時清浄なリボン状抵抗発熱体114を溶接ヘッド112に接触させる。なお、リボン状抵抗発熱体114に炭化物を除去するためのブラシ116を付設すれば、リボン状抵抗発熱体114の繰り返し使用が可能となり、ランニングコストを引き下げることができる。
【0047】
なお、図5の接合装置は、図4(a)に示したボンディングツール102に代えて、ハンダ付け用の熱源として利用することもできる。
【0048】
本例のフレキシブルICモジュール1Aは、ICチップ1の裏面に補強板3を接着するので、フレキシブルICモジュールの製造段階でICチップ1に外力が負荷されてもICチップ1に割れや欠けなどが生じにくく、良品の歩留まりを改善することができる。また、巻線コイル4の接合時にICチップ1に大きな外力が作用してもICチップ1が破壊しにくいことから、ICチップ1の入出力端子に軟質ではあるが高価な金バンプに代えて硬質ではあるが安価なニッケルバンプを設けることができ、フレキシブルICモジュールを低コスト化することができる。また、ICチップ1の入出力端子にニッケルバンプ1aを設けると、巻線コイル4を構成する銅線を拡散接合することができるので、ニッケルバンプ1aひいては入出力端子に対する巻線コイル4の接合位置を厳密に規制することができ、ICチップ1と巻線コイル4との接続をより安定化することができて、フレキシブルICモジュールの通信特性を安定化することができる。加えて、フレキシブル基体5にICチップ1と補強板3と巻線コイル4とを保持するので、フレキシビリティが高く、平板状の情報担体の構成部品として利用できるだけでなく、湾曲した部分や繰り返し変形を受ける部分に付設される情報担体としても適用することができる。
【0049】
なお、前記実施形態例においては、2枚の不織布5a,5bの間にICチップ1と補強板3と巻線コイル4とを挟み込んだが、かかる構成に代えて、1枚の不織布の片面にこれらの各部材1,3,4を熱圧着により保持することもできる。
【0050】
また、前記実施形態例においては、フレキシブル基体5を不織布5a,5bにて構成したが、かかる構成に代えて、フレキシブル基体5をシート状に成形されたホットメルト接着剤にて形成することもできる。この場合には、当該ホットメルト接着剤を利用してカバーシートを接着することができるので、カバーシートを有する情報担体の製造を容易化することができる。
【0051】
〈フレキシブルICモジュールの製造方法〉
以下、本発明に係るフレキシブルICモジュール1Aの製造方法を、図1及び図2を参照しつつ、図6に基づいて説明する。図6は実施形態例に係るフレキシブルICモジュール1Aの製造方法を示すフローチャートである。
【0052】
手順S1で、完成ウエハにバンプ1aを形成する。手順S2で、バンプ1aが形成された完成ウエハに薄形加工を施し、完成ウエハの総厚を所要の値に調整する。手順S3で、完成ウエハをダイシングし、所要のICチップ1の個片を切り出す。手順S4で、切り出されたICチップ1の裏面に接着剤層2を介して補強板3を貼り付ける。これによって、裏面に補強板3が貼り付けられたICチップ1が得られる。
【0053】
前記の各工程と平行して、手順S5で、被覆銅線を巻回し、所要形状の巻線コイル4を作製する。手順S6で、巻回された巻線コイル4の両端部をICチップ1の入出力端子に形成されたバンプ1aにボンディングする。手順S7で、ボンディングされたICチップ1と巻線コイル4の接続体を第1不織布5aと第2不織布5bの間に挟み込み、これらの各部材を熱圧着する。手順S8で、作製された熱圧着体を裁断して所要形状のフレキシブルICモジュールを得、得られたフレキシブルICモジュールの外観や通信特性等を検査する。これによって、所要のフレキシブルICモジュール1Aが製造される。
【0054】
本例の製造方法によると、個片に切り出されたICチップ1の裏面に補強板3を接着するので、ICチップ1に対する補強板3の接着位置を厳密に規制することができて、搬送等においてチャッキング用の治具を確実に補強板3にチャッキングさせることができ、ICチップに応力が作用せず、ICチップの割れや欠けを防止することができる。また、ICチップの裏面に補強板を接着した後に、当該ICチップの入出力端子に巻線コイルの両端部を直接接続するので、巻線コイルの接続時に作用する外力によってICチップに割れや欠けが発生しにくく、良品を高能率に製造することができる。さらに、ICチップと巻線コイルの接続体をフレキシブル基体に熱圧着するので、巻線コイルの巻き乱れや変形を抑制することができて、カード打抜き時における巻線コイルの断線や通信特性のバラツキを抑制することができ、良品の歩留まりの向上することができる。
【0055】
〈情報担体の構成〉
以下、実施形態例に係る情報担体の構成を、図7に基づいて説明する。図7は実施形態例に係る情報担体11Aの要部断面図である。
【0056】
図7に示すように、本例の情報担体11Aは、図1及び図2に示したフレキシブルICモジュール1Aの表裏両面に、接着剤層11を介してカバーシート12を接着してなる。その他の部分については、前出の図1と同じであるので、等価な部分に同一の符号を表示して説明を省略する。
【0057】
接着剤層11を構成する接着剤としては、所要の接着強度を有し、かつ、硬化後に所要の弾性を有するものであれば公知に属する任意の接着剤を用いることができるが、硬化時間が短く、かつ、硬化歪が小さく反りを生じないものを用いることが特に望ましい。この種の接着剤としては、ホットメルト接着剤を挙げることができる。
【0058】
カバーシート12を構成するシート材料としては、印刷性が良好で所要の耐摩耗性を有し、かつ前記接着剤層11を構成する接着剤との接着性が良好なものであれば、公知に属する任意のシート材料を用いることもできるが、焼却時に有害物質を発生しにくく、地球環境に優しいことから、例えばポリプロピレン等の非塩素系のプラスチックシートや紙を用いることが特に望ましい。
【0059】
本例の情報担体11Aは、予め作製されたフレキシブルICモジュール1Aの表裏両面に接着剤層11を介してカバーシート12を接着するだけで作製できるので、所要の情報担体を容易に作成することができる。その他、フレキシブルICモジュール1Aを利用したことから、前記〈フレキシブルICモジュールの構成〉の欄に記載したと同様の効果を有する。
【0060】
〈情報担体の製造方法〉
以下、本発明に係る情報担体の製造方法を、図7を参照しつつ、図8に基づいて説明する。図8は実施形態例に係る情報担体の製造方法を示すフローチャートである。
【0061】
手順S1から手順S7までの各工程は、図6に示したフレキシブルICモジュールの製造方法と同じであり、手順S7で得られた熱圧着体を利用して情報担体の製造が行われる。
【0062】
即ち、手順S9で、熱圧着体の表面に接着剤層11を介してカバーシート12をラミネートする。手順S10で、カバーシート12がラミネートされた熱圧着体を打ち抜き、所要形状の情報担体11Aを作製する。最後に、得られた情報担体11Aの外観や通信特性等を検査する。これによって、所要の情報担体11Aが製造される。
【0063】
本例の情報担体の製造方法は、予め作製されたフレキシブルICモジュール1Aを利用して所要の情報担体11Aを作製するので、所要の情報担体1Aを高能率に製造することができる。その他、フレキシブルICモジュール1Aを利用したことから、前記〈フレキシブルICモジュールの構成〉の欄に記載したと同様の効果を有する。
【0065】
【発明の効果】
本発明のフレキシブルICモジュールの製造方法は、個片に切り出されたICチップの裏面に補強板を接着するので、ICチップに対する補強板の接着位置を厳密に規制することができ、例えば補強板が接着されたICチップを巻線コイルの接続装置まで搬送する工程や搬送されたICチップを当該接続装置上の所定位置にチャッキングする工程において、硬質の治具を確実に補強板にチャッキングさせることができるので、ICチップに応力が作用せず、ICチップの割れや欠けを防止することができる。また、ICチップの裏面に補強板を接着した後に、当該ICチップの入出力端子に巻線コイルの両端部を直接接続するので、巻線コイルの接続時に作用する外力によってICチップに割れや欠けが発生しにくく、良品を高能率に製造することができる。さらに、ICチップと巻線コイルの接続体をフレキシブル基体に熱圧着するので、巻線コイルの巻き乱れや変形を抑制することができて、カード打ち抜き時における巻線コイルの断線や通信特性のバラツキを抑制することができ、良品の歩留まりを向上することができる。
【0067】
本発明の情報担体の製造方法は、個片に切り出されたICチップの裏面に補強板を接着するので、ICチップに対する補強板の接着位置を厳密に規制することができ、例えば補強板が接着されたICチップを巻線コイルの接続装置まで搬送する工程や搬送されたICチップを当該接続装置上の所定位置にチャッキングする工程において、硬質の治具を確実に補強板にチャッキングさせることができて、ICチップの割れや欠けを防止することができる。また、ICチップの裏面に補強板を接着した後に、当該ICチップの入出力端子に巻線コイルの両端部を直接接続するので、巻線コイルの接続時に作用する外力によってICチップに割れや欠けが発生しにくく、良品を高能率に製造することができる。さらに、ICチップと巻線コイルの接続体をフレキシブル基体に熱圧着するので、巻線コイルの巻き乱れや変形を抑制することができて、カード打抜き時における巻線コイルの断線や通信特性のバラツキを抑制することができ、良品の歩留まりの向上することができる。加えて、フレキシブル基体の外面にカバーシートを接着するので、デザイン印刷等の所要の印刷を施すことが可能になり、各使用目的に適合する各種の情報担体を得ることができる。
【図面の簡単な説明】
【図1】実施形態例に係るフレキシブルICモジュール1Aの要部断面図である。
【図2】第2不織布を除去した実施形態例に係るフレキシブルICモジュール1Aの要部平面図である。
【図3】ウェッジボンディング法とその接続部の状態を示す断面図である。
【図4】ハンダ付け法とその接続部の状態を示す断面図である。
【図5】拡散溶接法に適用される接合装置の使用状態の構成図である。
【図6】実施形態例に係るフレキシブルICモジュール1Aの製造方法を示すフローチャートである。
【図7】実施形態例に係る情報担体11Aの要部断面図である。
【図8】実施形態例に係る情報担体の製造方法を示すフローチャートである。
【符号の説明】
1A フレキシブルICモジュール
1 ICチップ
1a バンプ
2 接着剤層
3 補強板
4 コイル
5 フレキシブル基体
5a 第1不織布
5b 第2不織布
11A 情報担体
11 接着剤層
12 カバーシート
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a flexible IC module that is a source of an information carrier such as a non-contact IC card, a method of manufacturing the flexible IC module, an information carrier using the flexible IC module, and a method of manufacturing the information carrier. .
[0002]
[Prior art]
Non-contact type information carriers such as non-contact type IC cards are used as substitutes for commuter passes, driver's licenses, telephone cards, cash cards, etc. Therefore, how to simplify the structure and the manufacturing process and reduce the unit price is one of the most important technical issues.
[0003]
The applicant of the present application first made a connection body of an IC chip and a winding coil by directly connecting both ends of the winding coil to the input / output terminals of the IC chip as a method of manufacturing such an information carrier, The connection body of the IC chip and the winding coil is thermocompression-bonded to a flexible base made of, for example, a nonwoven fabric to produce a flexible IC module as an intermediate, and thereafter, the outer surface of the flexible IC module is made of, for example, a polypropylene sheet or the like A method for obtaining an information carrier as a finished product by adhering a cover sheet is proposed (Japanese Patent Laid-Open No. 11-333561).
[0004]
According to this method, since the connection body of the IC chip and the winding coil is thermocompression bonded to the flexible substrate, the protection effect of the connection body is enhanced, and the handling of the IC chip that is easily broken and the handling of the low-rigidity coil are easy. Thus, it is possible to facilitate the handling of the connection body when manufacturing the information carrier, and to increase the productivity of the information carrier. In addition, according to this method, a completed information carrier can be obtained simply by adhering the cover sheet to the outer surface of the flexible IC module, so that the productivity of the information carrier can also be improved from this point. Furthermore, according to this method, since the connection body between the IC chip and the winding coil is one in which both ends of the winding coil are directly connected to the input / output terminals of the IC chip, The reliability of the connection can be improved, and the durability of the information carrier and the communication characteristics can be improved.
[0005]
[Problems to be solved by the invention]
By the way, in manufacturing the information carrier, a process of transporting the manufactured IC chip to the connection device of the winding coil, a process of chucking the transported IC chip to a predetermined position on the connection apparatus, In the process of directly connecting the winding coil to the output terminal, the process of thermocompression bonding of the IC chip and winding coil connection body to the flexible substrate, the process of thermocompression bonding the cover sheet to the outer surface of the flexible IC module, etc. Is loaded. And for thin information carriers such as non-contact type IC cards, bare chips that do not have a resin mold are used as the IC chips. Therefore, in information carriers using such bare chips, the IC chips are manufactured at the manufacturing stage. There was a problem that cracks and chips were likely to occur, and it was difficult to produce good products with good yield.
[0006]
These problems are particularly prominent when a bare chip that has been highly thinned is used as an IC chip.
[0007]
In addition, cracking or chipping of the IC chip in the process of directly connecting the winding coil to the input / output terminal can be caused by diffusion bonding of the both ends of the winding coil to the bare chip provided with a hard nickel bump as the bump on the input / output terminal. This is particularly noticeable when connecting directly by the wedge bonding method. According to an experiment, when a wire chip having a wire diameter of 25 μm and a purity of 99.99% is connected to a bare chip having a 100 μm × 100 μm input / output terminal with a thickness of 50 to 100 μm, it acts on the bare chip. The pressing force is about 40 g / mm2No crack or chipping occurred in the bare chip, but when a copper wire having a wire diameter of 60 μm was connected to the same bare chip having nickel bumps on the input / output terminals by the diffusion bonding method. The pressing force acting on the bare chip is 80 to 160 g / mm2Almost all bare chips were cracked or chipped.
[0008]
Tensile strength of bare chip and gold wire connected by wire bonding under the above conditions is about 10 g / mm2In contrast, the tensile strength between the bare chip and the copper wire diffusion-bonded under the above conditions is about 60 g / mm.2Since the connection reliability can be significantly improved, both ends of the wire constituting the winding coil can be directly connected by a diffusion bonding method or a wedge bonding method using a bare chip in which nickel bumps are provided on the input / output terminals. Development of an information carrier and its manufacturing method is strongly desired.
[0009]
In the above description, the case of manufacturing the information carrier has been described as an example. However, the same problem occurs when the flexible IC module is manufactured.
[0010]
The present invention has been made to solve such deficiencies of the prior art, and an object of the present invention is to provide a flexible IC module that is excellent in reliability without cracking or chipping in the IC chip, and the flexible IC. To provide a method for manufacturing a module at low cost and with high efficiency, to provide an information carrier excellent in reliability without cracking or chipping in an IC chip, and a method for manufacturing the information carrier at low cost and high efficiency It is to provide.
[0026]
[Means for Solving the Problems]
<Method for manufacturing flexible IC module>
  In order to solve the above-mentioned problems, the present invention relates to a method of manufacturing a flexible IC module, a step of adhering a reinforcing plate to the back surface of an IC chip cut into individual pieces, and windings on the input / output terminals of the IC chip. A flexible IC module is manufactured including a step of directly connecting both ends of the coil and a step of thermocompression bonding the connection body of the IC chip and the winding coil to the flexible substrate.
[0027]
As described above, when the reinforcing plate is bonded to the back surface of the IC chip cut into individual pieces, the bonding position of the reinforcing plate to the IC chip can be strictly regulated. For example, the IC chip to which the reinforcing plate is bonded is wound. Since the hard jig can be surely chucked to the reinforcing plate in the process of transporting to the connection device of the wire coil and the process of chucking the transported IC chip at a predetermined position on the connection device, the IC chip No stress acts on the IC chip, and the IC chip can be prevented from cracking or chipping. In addition, after the reinforcing plate is bonded to the back surface of the IC chip, both ends of the winding coil are directly connected to the input / output terminals of the IC chip, so that the IC chip is cracked or chipped by an external force acting when the winding coil is connected. Is less likely to occur, and good products can be produced with high efficiency. Furthermore, since the connection body of the IC chip and the winding coil is thermocompression bonded to the flexible substrate, the winding coil can be prevented from being disturbed or deformed, and the winding coil can be disconnected or the communication characteristics can be varied during card punching. And the yield of non-defective products can be improved.
[0028]
  In this specification, “thermocompression bonding” refers to a process of applying a compressive force to components under heating, using a hot press method using a parallel plate mold and a roller mold. There is a roll press method.
  In the present specification, “self-compression bonding” means that when a compressive force is applied to a nonwoven fabric at room temperature or under heating, each fiber constituting the nonwoven fabric is bonded and a plurality of nonwoven fabrics are overlapped. When a compressive force is applied, the superposed nonwoven fabrics are joined to each other, and the shape of the nonwoven fabric is maintained in a state where the volume is reduced from that before compression.
[0031]
<Method of manufacturing information carrier>
In order to solve the above-described problems, the present invention relates to a method for manufacturing an information carrier. A method of bonding a reinforcing plate to the back surface of an IC chip cut into individual pieces, and a winding coil at an input / output terminal of the IC chip. An information carrier is manufactured including a step of directly connecting both ends of the substrate, a step of thermocompression bonding the connection body of the IC chip and the winding coil to the flexible substrate, and a step of bonding a cover sheet to the outer surface of the flexible substrate. It was configured to do.
[0032]
As described above, when the reinforcing plate is bonded to the back surface of the IC chip cut into individual pieces, the bonding position of the reinforcing plate to the IC chip can be strictly regulated. For example, the IC chip to which the reinforcing plate is bonded is wound. Since the hard jig can be surely chucked to the reinforcing plate in the process of transporting to the connection device of the wire coil and the process of chucking the transported IC chip at a predetermined position on the connection device, the IC chip No stress acts on the IC chip, and the IC chip can be prevented from cracking or chipping. In addition, after the reinforcing plate is bonded to the back surface of the IC chip, both ends of the winding coil are directly connected to the input / output terminals of the IC chip, so that the IC chip is cracked or chipped by an external force acting when the winding coil is connected. Is less likely to occur, and good products can be produced with high efficiency. Furthermore, since the connection body of the IC chip and the winding coil is thermocompression bonded to the flexible substrate, the winding coil can be prevented from being disturbed or deformed, and the winding coil can be disconnected or the communication characteristics can be varied during card punching. And the yield of non-defective products can be improved. In addition, since the cover sheet is bonded to the outer surface of the flexible substrate, it becomes possible to perform required printing such as design printing, and various information carriers suitable for each purpose of use can be obtained.
[0033]
DETAILED DESCRIPTION OF THE INVENTION
<Configuration of flexible IC module>
An embodiment of a flexible IC module according to the present invention will be described with reference to FIGS. FIG. 1 is a cross-sectional view of main parts of a flexible IC module 1A according to the present embodiment example, and FIG. 2 is a plan view of main parts of the flexible IC module 1A according to the present embodiment example in which the second nonwoven fabric is removed.
[0034]
As is clear from these drawings, the flexible IC module 1A of this example is bonded to the IC chip 1 having the bumps 1a formed on the input / output terminals and the back surface of the IC chip 1 via the adhesive layer 2. The reinforcing plate 3, the winding coil 4 directly connected to the bump 1 a, and the flexible base 5 that holds these members 1 to 4 are configured.
[0035]
As the IC chip 1, an arbitrary IC chip mounted on a non-contact type IC card can be used. However, when the IC chip 1 is applied to a thin information carrier such as a non-contact type IC card, the total thickness is reduced. It is desirable to use a bare IC chip thinned to 300 μm or less, preferably 200 μm or less. In particular, when applied to a thin information carrier, the IC chip 1 may be a bare IC chip thinned to a total thickness of about 50 μm to 150 μm. As the bump 1a, a nickel bump, a gold bump, a solder bump or the like can be formed, but a copper wire constituting the winding coil 4 can be bonded by a diffusion bonding method or a wedge bonding method, and an input / output terminal can be formed. It is particularly preferable to use nickel bumps because the bonding position of the conductive wire to (bump 1a) can be strictly regulated. In the case where a nickel bump is formed as the bump 1a, an oxide layer is prevented from being formed on the surface of the nickel bump, and the surface of the nickel bump 1a is easily and reliably connected to make the connection of the winding coil 4 easy. It is desirable to form a plating layer such as flash plating.
[0036]
The reinforcing plate 3 can be made of any material as long as it has the required strength and rigidity, but it can be implemented at a low cost and will not crack or chip even when subjected to external force. A plastic plate or a metal plate is particularly suitable. The planar size of the reinforcing plate 3 is determined, for example, in a process of transporting the manufactured IC chip 1 to the connection device of the winding coil 4 or a process of chucking the transported IC chip 1 at a predetermined position on the connection device. In order to ensure that the hard jig is chucked to the reinforcing plate 3, it is desirable to make it equal to or larger than the planar size of the IC chip 1. In addition, the thickness of the reinforcing plate 3 is preferably equal to or greater than the thickness of the IC chip 1 in order to impart practically sufficient strength to the IC chip 1.
[0037]
As the adhesive constituting the adhesive layer 2, any known adhesive having a required adhesive strength can be used, but the curing time is short and the IC chip 1 is loaded with a high temperature. It is particularly desirable to use one that does not cure. Examples of this type of adhesive include room temperature curable adhesives and hot melt adhesives.
[0038]
The winding coil 4 receives power supply from the reader / writer (not shown) to the IC chip 1 in a non-contact manner, and transmits data to / from the reader / writer (not shown) in a non-contact manner. Is formed by turning a coated copper wire having a diameter of 20 μm to 200 μm several times to several tens of times according to the characteristics of the IC chip 1. The winding shape of the winding coil 4 can be any shape as long as the required communication distance can be obtained. However, it is possible to prevent or suppress the generation of the stray capacitance generated between the wires. In order to improve the communication characteristics, as shown in FIG. 2, it is desirable to use an interval winding having a space between lines. In the example of FIG. 2, a certain space is provided between all the lines. However, in order to adjust the capacitance value of the resonance circuit including the winding coil 4, a part of the winding coil 4 is tightly wound. You can also.
[0039]
As the coated copper wire constituting the winding coil 4, in addition to the copper wire coated with an insulating layer directly, in order to further improve the connectivity with the bump 1a, the copper wire is joined with gold or the like. It is also possible to use a metal layer coated with an insulating layer around the bonding metal layer.
[0040]
As a direct connection method between the IC chip 1 and the coil 4, diffusion bonding, wedge bonding, welding, soldering, or the like can be applied. It is particularly preferable to use a diffusion bonding method because inclusions are not generated.
[0041]
As shown in FIG. 1, the flexible substrate 5 is composed of a first nonwoven fabric 5a and a second nonwoven fabric 5b, and these two nonwoven fabrics 5a and 5b are sandwiched between the members 1, 3, and 4, respectively. , Integrated by thermocompression bonding. As the first nonwoven fabric 5a and the second nonwoven fabric 5b, a material having self-compression bonding is used in order to easily and reliably hold the IC chip 1, the reinforcing plate 3, and the winding coil 4. As the non-woven fabric having self-bonding property, any known one can be used, but the self-bonding property is particularly high, the heat shrinkage is small, and it is porous and impregnated with resin after being subjected to heat and pressure. Non-woven fabric made of a fiber containing a crystalline resin and an amorphous copolymer polyester, for example, a nonwoven fabric made of a composite fiber of a crystalline resin and an amorphous copolymer polyester, or a crystalline resin fiber and a non-woven fabric. It is particularly desirable to use one made of a mixture of crystalline copolyester fibers.
[0042]
Hereinafter, a direct connection method between the IC chip 1 and the winding coil 4 will be described with reference to FIGS. 3 is a cross-sectional view showing the state of the wedge bonding method and its connecting portion, FIG. 4 is a cross-sectional view showing the state of the soldering method and its connecting portion, and FIG. 5 is a state of use of the joining device applied to the diffusion welding method. It is a block diagram.
[0043]
When the IC chip 1 and the winding coil 4 are joined by the wedge bonding method, as shown in FIG. 3A, gold bumps or nickel bumps 1a are previously formed on the input / output terminals 1b as the IC chip 1. Things are used. When the nickel bump is formed, the cost of the IC chip 1 can be reduced as compared with the case where the gold bump is formed. When the IC chip 1 on which the gold bump or the nickel bump 1a is formed is used, the wire for the winding coil 4 may be one that does not have the bonding metal layer 4c. Therefore, it is particularly preferable to use a material in which the core 4a is covered with a bonding metal layer 4c such as gold. In any case, as the wire material for the winding coil 4, as shown in FIG. 3A, a wire material having a wire diameter smaller than the width of the gold bump or nickel bump 1a is used. As shown in the figure, the wedge bonding of the gold bump or nickel bump 1a and the winding coil 4 is performed by superimposing the end of the winding coil 4 on the gold bump or nickel bump 1a and bonding tool from the winding coil 4 side. 101 is pressed and ultrasonic waves are applied, and the bump 1a and the core wire 4a of the winding coil 4 are melted by the energy. Thereby, as shown in FIG. 5B, the input / output terminal 1b of the IC chip 1 and the winding coil 4 are directly connected. The insulating coating provided on the winding coil 4 evaporates due to heat applied to the connecting portion and is automatically removed from the winding coil 4, so that it is peeled off in advance prior to connection to the bump 1 a. There is no need.
[0044]
When soldering the IC chip 1 and the winding coil 4, as shown in FIG. 4A, an IC chip 1 having solder bumps 1a formed on the input / output terminals 1b is used. In this case, the winding coil 4 may be one that does not have the bonding metal layer 4c. However, in order to improve the wettability with respect to the solder and make the soldering easy and reliable, the winding coil 4 is provided around the core wire 4a. It is particularly preferable to use one coated with a bonding metal layer 4c such as gold. As shown in the figure, the solder bump 1a and the winding coil 4 are soldered such that the end of the winding coil 4 is overlapped with the solder bump 1a and the bonding tool 102 heated to a predetermined temperature from the winding coil 4 side is used. The insulating layer (not shown) is carbonized by the pressing, and the solder bump 1a is dissolved. As a result, as shown in FIG. 4B, the input / output terminal 1b of the IC chip 1 and the winding coil 4 are soldered via the solder 1c. In place of the configuration in which the solder bump 1a is formed on the input / output terminal 1b of the IC chip 1, a winding coil 4 having a core layer 4a covered with a solder layer is used and soldered in the same manner as described above. It is also possible to do. Furthermore, a solder bump 1a formed on the input / output terminal 1b of the IC chip 1 and a winding coil 4 having a solder layer coated around the core wire 4a can be used.
[0045]
When the IC chip 1 and the winding coil 4 are diffusion bonded or welded, an IC chip in which gold bumps or nickel bumps are formed on the input / output terminals is used. As shown in FIG. 5, the bonding apparatus includes a heating head 112 having two electrodes 111a and 111b arranged in parallel with a small gap d, and a ribbon winding reel 113a attached to the heating head 112. 113b, a ribbon-like resistance heating element 114 wound around these ribbon winding reels 113a and 113b, and a part of which is wired so as to be in contact with the tips of the electrodes 111a and 111b, and a driving reel 113a. And a motor 115 for driving, and by supplying current between the two electrodes 111a and 111b, a ribbon-like resistance heating element 114 disposed between the two electrodes generates local resistance heat generation. Can be used. The ribbon-like resistance heating element 114 has a high specific resistance and low thermal conductivity, so that a high temperature can be locally generated and is excellent in strength. Most preferred is a molybdenum ribbon made of molybdenum.
[0046]
At the time of diffusion bonding or welding, as shown in FIG. 5, the end of the winding coil 4 is directly superimposed on the bump 1a formed on the input / output terminal of the IC chip 1, and the heating head is connected to the winding coil 4 side. 112 is pressed. Then, pulse power is supplied to the electrodes 111a and 111b to sublimate the insulating layer using the resistance heat generated by the ribbon-like resistance heating element 114, and the bump 1a and the winding coil 4 are joined. The motor 115 drives the driving reel 113a as necessary, and causes the ribbon-like resistance heating element 114 that is always clean to contact the welding head 112. If a brush 116 for removing carbide is attached to the ribbon-like resistance heating element 114, the ribbon-like resistance heating element 114 can be used repeatedly, and the running cost can be reduced.
[0047]
5 can be used as a heat source for soldering instead of the bonding tool 102 shown in FIG.
[0048]
In the flexible IC module 1A of this example, since the reinforcing plate 3 is bonded to the back surface of the IC chip 1, even if an external force is applied to the IC chip 1 in the manufacturing stage of the flexible IC module, the IC chip 1 is cracked or chipped. It is difficult to improve the yield of non-defective products. In addition, even if a large external force is applied to the IC chip 1 when the winding coil 4 is joined, the IC chip 1 is not easily destroyed. Therefore, the input / output terminals of the IC chip 1 are soft but hard instead of expensive gold bumps. However, inexpensive nickel bumps can be provided, and the cost of the flexible IC module can be reduced. Further, if the nickel bumps 1a are provided on the input / output terminals of the IC chip 1, the copper wire constituting the winding coil 4 can be diffusion bonded, so that the bonding position of the winding coil 4 with respect to the nickel bump 1a and thus the input / output terminals. Can be strictly regulated, the connection between the IC chip 1 and the winding coil 4 can be further stabilized, and the communication characteristics of the flexible IC module can be stabilized. In addition, since the IC chip 1, the reinforcing plate 3, and the winding coil 4 are held on the flexible substrate 5, it is highly flexible and can be used as a component of a flat information carrier, as well as a curved portion and repeated deformation. It can also be applied as an information carrier attached to the receiving part.
[0049]
In the above embodiment, the IC chip 1, the reinforcing plate 3, and the winding coil 4 are sandwiched between the two nonwoven fabrics 5a and 5b. These members 1, 3, and 4 can also be held by thermocompression bonding.
[0050]
Moreover, in the said embodiment, although the flexible base | substrate 5 was comprised with the nonwoven fabric 5a, 5b, it can replace with this structure and can also form the flexible base | substrate 5 with the hot-melt-adhesive shape | molded by the sheet form. . In this case, since the cover sheet can be bonded using the hot melt adhesive, the production of the information carrier having the cover sheet can be facilitated.
[0051]
<Method for manufacturing flexible IC module>
Hereinafter, the manufacturing method of the flexible IC module 1A according to the present invention will be described based on FIG. 6 with reference to FIGS. FIG. 6 is a flowchart showing a method of manufacturing the flexible IC module 1A according to the embodiment.
[0052]
In step S1, bumps 1a are formed on the completed wafer. In step S2, the finished wafer on which the bump 1a is formed is thinned, and the total thickness of the finished wafer is adjusted to a required value. In step S3, the completed wafer is diced to cut out individual pieces of the required IC chip 1. In step S4, the reinforcing plate 3 is attached to the back surface of the cut-out IC chip 1 via the adhesive layer 2. As a result, the IC chip 1 having the reinforcing plate 3 attached to the back surface is obtained.
[0053]
In parallel with the above steps, in step S5, a coated copper wire is wound to produce a winding coil 4 having a required shape. In step S6, both ends of the wound coil 4 are bonded to bumps 1a formed on the input / output terminals of the IC chip 1. In step S7, the bonded assembly of the IC chip 1 and the winding coil 4 is sandwiched between the first nonwoven fabric 5a and the second nonwoven fabric 5b, and these members are thermocompression bonded. In step S8, the produced thermocompression bonded body is cut to obtain a flexible IC module having a required shape, and the appearance and communication characteristics of the obtained flexible IC module are inspected. Thereby, the required flexible IC module 1A is manufactured.
[0054]
According to the manufacturing method of this example, the reinforcing plate 3 is bonded to the back surface of the IC chip 1 cut into individual pieces. Therefore, the bonding position of the reinforcing plate 3 with respect to the IC chip 1 can be strictly regulated, and the conveyance, etc. Thus, the chucking jig can be surely chucked on the reinforcing plate 3, so that no stress is applied to the IC chip, and cracking and chipping of the IC chip can be prevented. In addition, after the reinforcing plate is bonded to the back surface of the IC chip, both ends of the winding coil are directly connected to the input / output terminals of the IC chip, so that the IC chip is cracked or chipped by an external force acting when the winding coil is connected. Is less likely to occur, and good products can be produced with high efficiency. Furthermore, since the connection body of the IC chip and the winding coil is thermocompression bonded to the flexible substrate, the winding coil can be prevented from being disturbed or deformed, and the winding coil can be disconnected or the communication characteristics can be varied during card punching. And the yield of non-defective products can be improved.
[0055]
<Configuration of information carrier>
Hereinafter, the configuration of the information carrier according to the embodiment will be described with reference to FIG. FIG. 7 is a cross-sectional view of a main part of the information carrier 11A according to the embodiment.
[0056]
As shown in FIG. 7, the information carrier 11 </ b> A of this example is formed by bonding a cover sheet 12 via an adhesive layer 11 to both front and back surfaces of the flexible IC module 1 </ b> A shown in FIGS. 1 and 2. Since the other parts are the same as those in FIG. 1 described above, the same reference numerals are displayed in the equivalent parts and the description thereof is omitted.
[0057]
As the adhesive constituting the adhesive layer 11, any adhesive belonging to the publicly known one can be used as long as it has a required adhesive strength and has a required elasticity after curing. It is particularly desirable to use a material that is short and has a small curing strain and does not warp. Examples of this type of adhesive include hot melt adhesives.
[0058]
As a sheet material constituting the cover sheet 12, any material can be used as long as it has good printability, has required wear resistance, and has good adhesiveness with the adhesive constituting the adhesive layer 11. Any sheet material can be used, but it is particularly desirable to use a non-chlorine plastic sheet such as polypropylene or paper, for example, because it does not easily generate harmful substances during incineration and is friendly to the global environment.
[0059]
The information carrier 11A of this example can be produced simply by adhering the cover sheet 12 via the adhesive layer 11 to the front and back surfaces of the flexible IC module 1A produced in advance, so that the required information carrier can be easily produced. it can. In addition, since the flexible IC module 1A is used, it has the same effect as described in the section <Configuration of flexible IC module>.
[0060]
<Method of manufacturing information carrier>
Hereinafter, the manufacturing method of the information carrier based on this invention is demonstrated based on FIG. 8, referring FIG. FIG. 8 is a flowchart showing a method for manufacturing an information carrier according to the embodiment.
[0061]
Each process from the procedure S1 to the procedure S7 is the same as the manufacturing method of the flexible IC module shown in FIG. 6, and the information carrier is manufactured by using the thermocompression body obtained in the procedure S7.
[0062]
That is, in step S9, the cover sheet 12 is laminated on the surface of the thermocompression bonded body via the adhesive layer 11. In step S10, the thermocompression bonded body on which the cover sheet 12 is laminated is punched to produce an information carrier 11A having a required shape. Finally, the appearance and communication characteristics of the obtained information carrier 11A are inspected. Thus, the required information carrier 11A is manufactured.
[0063]
In the information carrier manufacturing method of the present example, the required information carrier 11A is manufactured using the flexible IC module 1A manufactured in advance, so that the required information carrier 1A can be manufactured with high efficiency. In addition, since the flexible IC module 1A is used, it has the same effect as described in the section <Configuration of flexible IC module>.
[0065]
【The invention's effect】
  In the manufacturing method of the flexible IC module of the present invention, the reinforcing plate is bonded to the back surface of the IC chip cut out into individual pieces, so that the bonding position of the reinforcing plate to the IC chip can be strictly regulated. In the process of transporting the bonded IC chip to the connection device of the winding coil and the process of chucking the transported IC chip to a predetermined position on the connection device, the hard jig is surely chucked on the reinforcing plate. Therefore, stress does not act on the IC chip, and cracking and chipping of the IC chip can be prevented. In addition, after the reinforcing plate is bonded to the back surface of the IC chip, both ends of the winding coil are directly connected to the input / output terminals of the IC chip, so that the IC chip is cracked or chipped by an external force acting when the winding coil is connected. Is less likely to occur, and good products can be produced with high efficiency. Furthermore, since the connection between the IC chip and the winding coil is thermocompression bonded to the flexible substrate, the winding coil can be prevented from being disturbed or deformed, and the winding coil can be disconnected or the communication characteristics can be varied when the card is punched. Can be suppressed, and the yield of non-defective products can be improved.
[0067]
In the information carrier manufacturing method of the present invention, the reinforcing plate is bonded to the back surface of the IC chip cut into individual pieces, so that the bonding position of the reinforcing plate to the IC chip can be strictly regulated. The hard jig is surely chucked to the reinforcing plate in the process of transporting the IC chip to the connection device of the winding coil and the process of chucking the transported IC chip to a predetermined position on the connection device. Thus, cracks and chipping of the IC chip can be prevented. In addition, after the reinforcing plate is bonded to the back surface of the IC chip, both ends of the winding coil are directly connected to the input / output terminals of the IC chip. Is less likely to occur, and good products can be produced with high efficiency. Furthermore, since the connection body of the IC chip and the winding coil is thermocompression bonded to the flexible substrate, the winding coil can be prevented from being disturbed or deformed, and the winding coil can be disconnected or the communication characteristics can vary when the card is punched. And the yield of non-defective products can be improved. In addition, since the cover sheet is bonded to the outer surface of the flexible substrate, it becomes possible to perform required printing such as design printing, and various information carriers suitable for each purpose of use can be obtained.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view of a main part of a flexible IC module 1A according to an embodiment.
FIG. 2 is a plan view of a main part of a flexible IC module 1A according to an embodiment in which a second nonwoven fabric is removed.
FIG. 3 is a cross-sectional view showing a wedge bonding method and a state of a connecting portion thereof.
FIG. 4 is a cross-sectional view showing a soldering method and a state of a connecting portion thereof.
FIG. 5 is a configuration diagram of a use state of a joining device applied to a diffusion welding method.
FIG. 6 is a flowchart showing a manufacturing method of the flexible IC module 1A according to the embodiment.
7 is a cross-sectional view of a main part of an information carrier 11A according to an example embodiment. FIG.
FIG. 8 is a flowchart showing a method for manufacturing an information carrier according to an embodiment.
[Explanation of symbols]
1A Flexible IC module
1 IC chip
1a Bump
2 Adhesive layer
3 Reinforcing plate
4 Coils
5 Flexible substrate
5a First nonwoven fabric
5b Second non-woven fabric
11A Information carrier
11 Adhesive layer
12 Cover sheet

Claims (2)

個片に切り出されたICチップの裏面に補強板を接着する工程と、当該ICチップの入出力端子に巻線コイルの両端部を直接接続する工程と、これらICチップと巻線コイルの接続体をフレキシブル基体に熱圧着する工程とを含むことを特徴とするフレキシブルICモジュールの製造方法。A step of bonding a reinforcing plate to the back surface of the IC chip cut into individual pieces, a step of directly connecting both ends of the winding coil to the input / output terminals of the IC chip, and a connection body of these IC chip and winding coil And a step of thermocompression bonding the substrate to a flexible substrate. 個片に切り出されたICチップの裏面に補強板を接着する工程と、当該ICチップの入出力端子に巻線コイルの両端部を直接接続する工程と、これらICチップと巻線コイルの接続体をフレキシブル基体に熱圧着する工程と、前記フレキシブル基体の外面にカバーシートを接着する工程とを含むことを特徴とする情報担体の製造方法。A step of bonding a reinforcing plate to the back surface of the IC chip cut into individual pieces, a step of directly connecting both ends of the winding coil to the input / output terminals of the IC chip, and a connection body of these IC chip and winding coil A method for manufacturing an information carrier, comprising: a step of thermocompression bonding to a flexible substrate; and a step of bonding a cover sheet to an outer surface of the flexible substrate.
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