JP3770687B2 - Adsorption device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a suction device, for example, a suction device used when two photodiodes are simultaneously mounted on a component on which a laser diode is mounted.
[0002]
[Prior art]
It is known to use an adsorber to move, assemble, or position an article. The suction device of the present application is used to assemble an optical head for an optical disk, for example.
The optical head includes a laser diode (hereinafter referred to as LD) that irradiates light toward the optical disc and a photodiode (hereinafter referred to as PD) that receives the light reflected by the optical disc and generates an electrical signal. LD and PD need to be assembled accurately in a small optical head. Usually, the LD is first mounted on the support member, and the PD is mounted while being aligned with the mounted LD. A suction device is used for mounting the PD.
[0003]
When the number of PDs is one, a method of recognizing the index pattern on the surface of the PD adsorbed by the collet with an observation apparatus and positioning the PD so that the index pattern matches the mounting position is common. Even when there are two PDs, the first PD and the second PD can be sequentially mounted in the above-described procedure. However, in this case, the mounting time takes twice, which causes a problem of mass productivity.
[0004]
[Problems to be solved by the invention]
Therefore, it is desired that two PDs can be mounted simultaneously. In order to mount two PDs at the same time, it is conceivable that two suction units are provided in one suction head, the two PDs are simultaneously sucked by one suction head, and are transported to the mounting position. At this time, if the positional relationship between the two PDs is precisely corresponding to the mounting positional relationship between the two PDs, the two PDs can be mounted simply by sucking and transporting them. it can.
[0005]
However, when the PD is sucked by the suction head, if there is a gap between the PD and the suction head, the position of the PD is shifted laterally before the PD is completely sucked when suction is started by the suction head. There is a problem of end. If the position of the PD shifts to the side, the positional relationship between the two PDs shifts, and the two PDs cannot be positioned at the mounting position at the same time, and the positions of the two PDs are detected respectively. , You will have to align.
[0006]
An object of the present invention is to provide an adsorption device that can adsorb an object to be adsorbed such as PD accurately and without displacement.
Another object of the present invention is to provide an adsorption device capable of adsorbing a plurality of objects to be adsorbed such as PDs simultaneously and accurately without positional deviation.
[0007]
[Means for Solving the Problems]
A suction device according to the present invention includes a body having a hole, a movable body movably disposed in the hole of the body, and having at least one suction portion and an observation through hole, and supporting the movable body with respect to the body. For this purpose, the movable body includes at least a pair of parallel springs extending between the movable body and the body, and at least one suction passage extending from the body through the movable body to the at least one suction portion. Is.
[0008]
In this configuration, the movable body that is moved by the robot, the moving stage, or the like is supported on the body by the parallel spring and moves together with the body. When the suction part is pressed toward the object to be sucked such as PD, the movable body is supported with compliance only in the pressing direction against the body. In directions other than the pressing direction, the movable body moves substantially integrally with the body.
[0009]
Therefore, when adsorbing an object to be adsorbed such as PD, the body is positioned with respect to the object to be adsorbed such as PD, the body is lowered, and the adsorbing portion is pressed against the object to be adsorbed such as PD. At this time, since the movable body is supported by the body with compliance in the pressing direction, the object to be adsorbed such as PD is not damaged. Then, a vacuum is supplied to the adsorption unit while the adsorption unit is in contact with an object to be adsorbed such as PD to adsorb the object to be adsorbed such as PD. Therefore, there is no problem that the position of the object to be adsorbed such as PD is shifted laterally during the adsorption. When the object to be adsorbed such as PD is adsorbed, the body is moved to convey the object to be adsorbed such as PD to the mounting position or the like.
[0010]
The following features can be included together with the above configuration.
The at least one pair of parallel springs includes leaf springs arranged in parallel on the upper surface side and the lower surface side of the body and the movable body, respectively.
Wherein at least be one of the suction unit from a plurality of suction portion, the observation through holes Ru is disposed centrally between the suction portion of the plurality of.
[0011]
The at least one pair of parallel springs comprises at least two pairs of springs arranged linearly on both sides with the center of the observation through-hole of the movable body as the axis of symmetry .
The at least one pair of parallel springs has two pairs of parallel springs arranged on a first straight line on both sides with the center of the observation through hole of the movable body as the axis of symmetry and the center of the observation through hole of the movable body. It consists of two pairs of parallel springs arranged on a second straight line that intersects the first straight line on both sides of the axis of symmetry .
[0012]
The at least one suction portion includes two suction portions disposed on both sides with the center of the observation through hole of the movable body as an axis of symmetry, and the at least one suction passage passes through the movable body from the body. A first suction passage extending to one of the suction portions and a second suction passage extending from the body through the movable body to the other of the suction portions, the first suction passage and the second suction passage The suction passages are opposed to each other with respect to the center of the movable body and are arranged on the center line of the angle formed by the first straight line and the second straight line.
[0013]
The inner peripheral wall of the hole of the body has a cylindrical shape, and the outer peripheral wall of the movable body has a cylindrical shape.
The body has a ring-shaped outer peripheral portion and a bridge portion extending in a bridge shape in the diameter direction of the outer peripheral portion, and the hole of the body is provided in the bridge portion.
The at least one suction portion includes two suction portions disposed on both sides with the center of the observation through hole of the movable body as an axis of symmetry, and the at least one suction passage passes through the movable body from the body. A first suction passage extending to one of the suction portions and a second suction passage extending from the body through the movable body to the other of the suction portions, the first suction passage and the second suction passage A suction passage is provided in the bridge portion of the body.
[0014]
The observation through hole of the movable body has an oval shape that is long in the direction perpendicular to the direction in which the bridge portion extends .
Furthermore, an electromagnetic holding means for holding the movable body fixedly with respect to the body is provided.
A moving means for moving the body; and an observing means for observing the object to be adsorbed supported by the at least one adsorbing portion through the observation through hole.
[0015]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be described with reference to an adsorption device used for mounting an optical head for an optical disk. FIG. 4 shows an optical head 1 for an optical disk. The optical head 1 includes a laser diode (hereinafter referred to as LD) 2 and two photodiodes (hereinafter referred to as PD) 3 and 4. First, the LD 2 is fixed to the support member, and the two PDs 3 and 4 are mounted at predetermined positions while being aligned with the LD 2.
[0016]
1 and 2 show a suction device (suction head) 10 according to an embodiment of the present invention. The suction device 10 includes a cylindrical body 12 having a cylindrical hole 14 at the center thereof, and a cylindrical movable body 16 movably disposed in the hole 14 of the body 12. Between the inner peripheral wall of the hole 14 of the body 12 and the outer peripheral wall of the movable body 16, for example, a gap of several tens of μm is formed.
[0017]
The body 12 has a ring-shaped outer peripheral portion 18 and a bridge portion 20 extending in a bridge shape in the diameter direction of the outer peripheral portion 18, and the hole 14 of the body is provided in the bridge portion 20. Between the outer peripheral portion 18 and the bridge portion 20, an arcuate void portion 22 penetrating from the upper surface side to the lower surface side of the body 12 is provided. Further, a circular cavity 24 concentric with the hole 14 is formed as a step between the outer peripheral portion 18 and the bridge portion 20 on the upper surface side and the lower surface side of the body 12.
[0018]
The movable body 16 has two suction portions 26 and 28 projecting to the lower surface side and an observation through hole 30 that is located at the center and penetrates from the upper surface side to the lower surface side. The suction portions 26 and 28 have vacuum suction ports. FIG. 2 shows a state where two PDs 3 and 4 are adsorbed by the adsorbing parts 26 and 28, and FIG. 2 shows that two PDs 3 and 4 adsorbed by the adsorbing parts 26 and 28 penetrate from the upper side for observation. What is visible through hole 30 is shown.
[0019]
The two suction portions 26 and 28 are connected to the first suction passage 32 and the second suction passage 34, respectively. The first suction passage 32 is formed by a suction passage portion 32 a formed in the body 12 and a suction passage portion 32 b formed in the movable body 16, and thus passes from the body 12 through the movable body 16 to the one suction portion 26. Extend. The second suction passage 34 is formed by a suction passage portion 34 a formed in the body 12 and a suction passage portion 34 b formed in the movable body 16, and thus passes from the body 12 through the movable body 16 to the other suction portion 28. Extend.
[0020]
The inner end portion of the suction passage portion 32a formed in the body 12 of the first suction passage 32 extends in parallel with the upper surface or the lower surface of the body 12, and the inner end portion of the suction passage portion 32b formed in the movable body 16 is also the same. The inner end portions of the body 12 extend in parallel with the upper surface or the lower surface of the body 12, and face each other through a gap between the inner peripheral wall of the hole 14 of the body 12 and the outer peripheral wall of the movable body 16.
[0021]
Similarly, the inner end portion of the suction passage portion 34 a formed in the body 12 of the second suction passage 34 extends in parallel with the upper surface or the lower surface of the body 12, and the inner end portion of the suction passage portion 34 b formed in the movable body 16. The end portions also extend in parallel with the upper surface or the lower surface of the body 12, and these inner end portions oppose each other via a gap between the inner peripheral wall of the hole 14 of the body 12 and the outer peripheral wall of the movable body 16.
[0022]
The gap of several tens of μm between the inner peripheral wall of the hole 14 of the body 12 and the outer peripheral wall of the movable body 16 enables relative movement of the movable body 16 with respect to the body 12, and takes over portions of these suction passage portions. 32a-32b and 34a-34b are set so as to minimize leakage. Since the first and second suction passages 32 and 34 are formed inside the body 12 and the movable body 16, for example, these suction passages are formed by tubes or the like attached to the body 12 and the movable body 16. Compared to the case, an undesirable force is not applied to the body 12 on the movable body 16.
[0023]
Further, in order to support the movable body 16 with respect to the body 12, at least a pair (four pairs in the embodiment) of parallel springs 36 a and 36 b extend between the movable body 16 and the body 12. Each pair of parallel springs 36a and 36b is formed of a leaf spring disposed in parallel on the upper surface side and the lower surface side of the body 12 and the movable body 16, respectively. In the embodiment, the springs 36 a and 36 b are attached to the upper surface and the lower surface of the body 12 and the movable body 16 by screws 38, respectively.
[0024]
Accordingly, when the suction portions 26 and 28 are pressed toward the PDs 3 and 4, the movable body 16 is supported with compliance only in the pressing direction with respect to the body 12, and is movable in directions other than the pressing direction. The body 16 moves substantially with the body 12. In the embodiment, the suction portions 26 and 28 can be pressed toward the PDs 3 and 4 at 4 mm / kgf.
[0025]
In the arrangement of the parallel springs 36 a and 36 b, the two pairs of parallel springs 36 a and 36 b are arranged linearly on both sides of the observation through hole 30 of the movable body 16. In the arrangement of the four pairs of parallel springs 36a and 36b, the two pairs of parallel springs 36a and 36b are arranged on the first straight line on both sides of the observation through hole 30 of the movable body 16, and the other two pairs of parallel springs 36a and 36b are arranged. The springs 36 a and 36 b are arranged on both sides of the observation through hole 30 of the movable body 16 on a second straight line that intersects the first straight line. In this way, the parallel springs 36a and 36b support the movable body 16 with high rigidity except in the pressing direction without being displaced laterally or rotationally.
[0026]
The first suction passage 32 and the second suction passage 34 are arranged opposite to each other with respect to the center of the movable body 16 and on the center line of the angle formed by the first straight line and the second straight line. As a result, the bending moment brought about by the attractive force on the parallel springs 36a and 36b can be made substantially zero. In the embodiment, the first straight line and the second straight line are arranged to intersect the bridge portion 20 of the body, and the first suction passage 32 and the second suction passage 34 and the center line of the bridge portion 20 are arranged. It is arranged along. Further, the observation through hole 30 of the movable body 16 has an oval shape that is long in a direction perpendicular to the bridge portion 20.
[0027]
FIG. 3 shows a suction device including a moving means 40 for moving the body 12 and an observation means 42 for observing the PDs 3 and 4 supported by the suction portions 26 and 28 through the observation through hole 30. It is a figure which shows the whole. In the embodiment, the moving means 40 is composed of a multi-axis stage, and the observation means 42 is composed of a CCD camera. The observation means 42 is attached to the Z axis stage 43. Further, the first suction passage 32 and the second suction passage 34 are connected to a vacuum pump 48 via electromagnetic valves 44 and 46, respectively. The host computer 50 controls the moving means 40 and the Z-axis stage 43, and the observation means 42 is connected to the host computer 50 via the image processing device 52.
[0028]
FIG. 5 is a view showing a modification of the adsorption device 10 according to the present invention. The adsorbing device 10 has a configuration basically similar to that of the adsorbing device 10 shown in FIGS. 1 and 2, and the same members are denoted by the same reference numerals. In FIG. 5, the suction device 10 further includes electromagnetic holding means 60 for holding the movable body 16 fixedly with respect to the body 12. The electromagnetic holding means 60 comprises an electromagnetic solenoid 60b attached to the arm 60a. The arm 60 a is fixed to the body 12, and the electromagnetic solenoid 60 b is disposed at a position close to the movable body 16.
[0029]
The operation of the above embodiment will be described below with reference to FIGS. It is assumed that the suction device 10 includes an electromagnetic holding unit 60. As shown in FIG. 6, the field of view of the observation means 42 under one of the suction portions 26 is adjusted so that the observation means 42 can observe the PD 3 through the observation through hole 30 of the movable body 16. The observation means 42 is focused on the surface of the PD 3, and the distance between the surface of the PD 3 and the tip of the suction portion 26 of the movable body 16 is measured.
[0030]
Then, the position of the indicator pattern on the surface of the PD 3 is recognized, the X and Y positions of the suction device and the θ posture around the Z axis are determined, and the suction device 10 is moved relative to the PD 3 by driving the moving means 40 comprising a multi-axis stage. Position. Therefore, in order to absorb the focal position error (for example, ± μm) and press the suction portion 26 against the PD 3 with a contact force of 5 gf, from the measurement distance between the surface of the PD 3 and the tip of the suction portion 26 of the movable body 16. Also, the adsorption device 10 is lowered by 20 μm toward the surface of the PD 3.
[0031]
At this time, since the movable body 16 is supported by the body 12 with compliance in the pressing direction by the springs 36a and 36b, the PD 3 is not damaged. Then, as shown in FIG. 7, when the suction unit 26 comes into contact with the PD 3, a vacuum is supplied to the suction unit 26 to suck the PD 3. Therefore, there is no problem that the position of the PD 3 is shifted laterally during the suction.
[0032]
Then, as shown in FIG. 8 and FIG. 9, after raising the suction device 10, another suction part 28 is pressed against the second PD 4 by the same procedure to suck the second PD 4. . Also in this case, the position of the indicator pattern on the surface of the second PD 4 is recognized. Then, the moving unit 40 is driven so that the suction device 10 is positioned with respect to the PD 4 so that the second PD 4 is in a prescribed positional relationship with respect to the first PD 3 that has already been sucked.
[0033]
As shown in FIG. 10, the suction device 10 that sucks the PDs 3 and 4 is conveyed to the mounting position of the PDs 3 and 4. When the suction device 10 is transported to the mounting position (or before the suction device 10 is transported to the mounting position), the electromagnetic holding means 60 is operated in a state where the PDs 3 and 4 are attracted, and the movable body 16 is moved to the electromagnetic solenoid 60b. So that the movable body 16 is integrated with the body 12. Then, as shown in FIG. 11, the PD 3 and 4 are placed on the support member of the optical head 1 while observing the PD 3 through the observation through hole 30 of the movable body 16 by the observation means 42 (or an observation device or the like). After the PDs 3 and 4 are fixed on the support member of the optical head 1, the supply of vacuum to the suction units 26 and 28 is stopped, and the suction is released.
[0034]
【The invention's effect】
As described above, according to the present invention, there is provided an adsorption device capable of accurately adsorbing objects to be adsorbed such as PDs, and in particular, adsorbing objects such as a plurality of PDs simultaneously and without positional deviation. Obtainable.
[Brief description of the drawings]
FIG. 1 is a plan view showing a suction device according to an embodiment of the present invention.
FIG. 2 is a cross-sectional view of the adsorption device of FIG.
FIG. 3 is a diagram showing an overall configuration of the adsorption device of FIGS. 1 and 2;
FIG. 4 is a perspective view showing an optical head which is an example of a suction target device.
FIG. 5 is a cross-sectional view showing a modification of the suction device similar to FIG.
FIG. 6 is a perspective view showing a pressing process which is the first stage of the operation of the adsorption device.
FIG. 7 is a perspective view showing an adsorption process which is the next stage of the operation of the adsorption device.
FIG. 8 is a perspective view showing a pressing process which is the next stage of the operation of the adsorption device.
FIG. 9 is a perspective view showing an adsorption process which is the next stage of the operation of the adsorption device.
FIG. 10 is a perspective view showing a movable body fixing step that is the next stage of the operation of the suction device.
FIG. 11 is a perspective view showing a mounting process which is the next stage of the operation of the suction device.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Optical head 2 ... Laser diode 3, 4 ... Photodiode 10 ... Adsorption apparatus 12 ... Body 14 ... Hole 16 ... Movable body 18 ... Ring-shaped outer peripheral part 20 ... Bridge part 26, 28 ... Adsorption part 30 ... Through for observation Holes 32, 34 ... suction passages 36a, 36b ... springs 60 ... electromagnetic holding means

Claims (14)

  A body having a hole, a movable body movably disposed in the hole of the body, and having at least one suction portion and an observation through hole; and the movable body and the movable body for supporting the movable body with respect to the body An adsorption apparatus comprising: at least a pair of parallel springs extending between the body and at least one suction passage extending from the body through the movable body to the at least one adsorption portion.   2. The suction device according to claim 1, wherein the at least one pair of parallel springs includes leaf springs arranged in parallel on the upper surface side and the lower surface side of the body and the movable body, respectively.   2. The suction device according to claim 1, wherein the at least one suction portion includes a plurality of suction portions, and the observation through hole is disposed at a center between the plurality of suction portions. 4. The suction device according to claim 3, wherein the at least one pair of parallel springs includes at least two pairs of springs arranged in a straight line on both sides with the center of the observation through hole of the movable body as an axis of symmetry. . The at least one pair of parallel springs has two pairs of parallel springs arranged on a first straight line on both sides with the center of the observation through hole of the movable body as the axis of symmetry and the center of the observation through hole of the movable body. The adsorption device according to claim 4, comprising two pairs of parallel springs arranged on a second straight line intersecting the first straight line on both sides of the axis of symmetry . The at least one suction portion includes two suction portions disposed on both sides with the center of the observation through hole of the movable body as an axis of symmetry, and the at least one suction passage passes through the movable body from the body. A first suction passage extending to one of the suction portions and a second suction passage extending from the body through the movable body to the other of the suction portions, the first suction passage and the second suction passage 6. The suction device according to claim 5, wherein the suction passage is disposed opposite to each other with respect to the center of the movable body and on a center line of an angle formed by the first straight line and the second straight line. .   The suction device according to claim 1, wherein an inner peripheral wall of the hole of the body has a cylindrical shape, and an outer peripheral wall of the movable body has a cylindrical shape.   The said body has a ring-shaped outer peripheral part and a bridge part extended in bridge shape in the diameter direction of this outer peripheral part, The hole of the said body is provided in this bridge part. Adsorption device. The at least one suction portion includes two suction portions disposed on both sides with the center of the observation through hole of the movable body as an axis of symmetry, and the at least one suction passage passes through the movable body from the body. A first suction passage extending to one of the suction portions and a second suction passage extending from the body through the movable body to the other of the suction portions, the first suction passage and the second suction passage The suction device according to claim 8, wherein a suction passage is provided in the bridge portion of the body. The suction device according to claim 9, wherein the observation through hole of the movable body has an elliptical shape that is long in a direction perpendicular to a direction in which the bridge portion extends .   The adsorption device according to claim 1, further comprising electromagnetic holding means for holding the movable body fixedly with respect to the body.   The moving means for moving the body, and observation means for observing the object to be adsorbed supported by the at least one adsorption portion through the observation through hole. The adsorption device according to 1. A body having a hole, a movable body movably disposed in the hole of the body, and having at least one suction portion and an observation through hole; and the movable body and the movable body for supporting the movable body with respect to the body At least one pair of springs extending between the body and at least one suction passage extending from the body through the movable body to the at least one suction portion, the at least one pair of springs being used for observing the movable body An adsorption device comprising at least two springs arranged in a straight line on both sides with the center of the through hole as the axis of symmetry . Wherein at least a pair of springs symmetry axis the center of the observation through holes of the first disposed on a straight line with two parallel spring the movable body on both sides of the center was symmetry axis of the observation through-hole of the movable body consisting of the second straight line to arranged two springs intersecting the first straight line on either side adsorption device of claim 13, wherein.

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