JP3770687B2 - Adsorption device - Google Patents

Adsorption device Download PDF

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Publication number
JP3770687B2
JP3770687B2 JP05762197A JP5762197A JP3770687B2 JP 3770687 B2 JP3770687 B2 JP 3770687B2 JP 05762197 A JP05762197 A JP 05762197A JP 5762197 A JP5762197 A JP 5762197A JP 3770687 B2 JP3770687 B2 JP 3770687B2
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Japan
Prior art keywords
suction
movable body
hole
observation
suction passage
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JP05762197A
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Japanese (ja)
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JPH10249772A (en
Inventor
彰彦 矢吹
秀雄 加藤
滋 明間
哲男 肥塚
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Fujitsu Ltd
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Fujitsu Ltd
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Description

【0001】
【発明の属する技術分野】
本発明は吸着装置に関し、例えばレーザーダイオードが実装されている部品に対して2つのフォトダイオードを同時に実装するときに使用される吸着装置に関する。
【0002】
【従来の技術】
吸着装置を使用して物品を移動したり、組み立てたり、位置決めしたりすることは公知である。本願の吸着装置は例えば光ディスク用の光学ヘッドを組み立てるのに使用される。
光学ヘッドは、光ディスクへ向かって光を照射するレーザダイオード(以下LDという)と、光ディスクで反射した光を受けて電気信号を発生するフォトダイオード(以下PDという)とを備えている。LD及びPDは小さな光学ヘッド内に正確に組付けられる必要がある。通常は最初にLDをその支持部材に実装し、実装されたLDに対して位置合わせしながらPDを実装する。PDの実装に際して、吸着装置を使用する。
【0003】
PDが1個の場合には、コレットで吸着したPDの表面の指標パターンを観察装置で認識し、該指標パターンが実装位置と一致するようにPDの位置決めを行う方法が一般的である。PDが2個の場合にも、1個目のPDと2個目のPDとを順次上記した手順で実装することができる。しかし、この場合、実装時間が2倍かかることになり、量産性の問題がある。
【0004】
【発明が解決しようとする課題】
そこで、2個のPDを同時に実装できるようにすることが望まれる。2個のPDを同時に実装するためには、一つの吸着ヘッドに2つの吸着部を設けて、2個のPDを一つの吸着ヘッドで同時に吸着し、そして実装位置へ搬送することが考えられる。このとき、2個のPDの吸着された位置関係が、2個のPDの実装位置関係と精密に対応していると、2個のPDを吸着して搬送するだけで簡単に実装することができる。
【0005】
しかし、PDを吸着ヘッドで吸着するとき、PDと吸着ヘッドとの間に隙間があると、吸着ヘッドで吸引を開始するときにPDが完全に吸着される前にPDの位置が横にずれてしまうという問題がある。PDの位置が横にずれてしまうと、2個のPDの位置関係がずれてしまい、2個のPDを実装位置で同時に位置決めすることができず、2個のPDの位置をそれぞれに検出し、位置合わせをしなければならなくなる。
【0006】
本発明の目的は、PD等の被吸着物を位置ずれなく正確に且つ吸着することのできる吸着装置を提供することである。
本発明の他の目的は、複数のPD等の被吸着物を同時に且つ位置ずれなく正確に吸着することのできる吸着装置を提供することである。
【0007】
【課題を解決するための手段】
本発明による吸着装置は、穴を有するボディと、該ボディの穴内に可動に配置され、少なくとも一つの吸着部及び観察用貫通穴を有する可動体と、該可動体を該ボディに対して支持するために該可動体と該ボディとの間に延びる少なくとも一対の平行ばねと、該ボディから該可動体を通って該少なくとも一つの吸着部へ延びる少なくとも一つの吸引通路とからなることを特徴とするものである。
【0008】
この構成において、ボディはロボット又は移動ステージ等により動かされる可動体は平行ばねによりボディに支持されており、ボディとともに動く。吸着部をPD等の被吸着物に向かって押しつけるときに、可動体はボディに対して押しつけ方向にのみコンプライアンスをもって支持されていることになる。押しつけ方向以外の方向においては、可動体は実質的にボディと一体に移動する。
【0009】
従って、PD等の被吸着物を吸着するときには、ボディをPD等の被吸着物に対して位置決めし、ボディを下降させて吸着部をPD等の被吸着物に向かって押しつける。このときに、可動体は押しつけ方向にコンプライアンスをもってボディに支持されているので、PD等の被吸着物を損傷させることはない。そして、吸着部がPD等の被吸着物に接触した状態で吸着部を真空を供給し、PD等の被吸着物を吸着する。従って、吸着に際して、PD等の被吸着物の位置が横にずれてしまうという問題はない。PD等の被吸着物を吸着したら、ボディを移動させて、PD等の被吸着物を実装位置等へ搬送する。
【0010】
上記構成とともに、下記の特徴を含むことができる。
前記少なくとも一対の平行ばねが前記ボディ及び前記可動体のそれぞれ上面側及び下面側に平行に配置された板ばねからなる。
前記少なくとも一つの吸着部が複数の吸着部からなり、前記観察用貫通穴が該複数の吸着部の間の中央に配置される。
【0011】
前記少なくとも一対の平行ばねが前記可動体の観察用貫通穴の中心を対称軸とした両側に直線上に配置された少なくとも2対のばねからなる。
前記少なくとも一対の平行ばねが前記可動体の観察用貫通穴の中心を対称軸とした両側に第1の直線上に配置された2対の平行ばねと前記可動体の観察用貫通穴の中心を対称軸とした両側に前記第1の直線と交差する第2の直線上に配置された2対の平行ばねとからなる。
【0012】
前記少なくとも一つの吸着部が前記可動体の観察用貫通穴の中心を対称軸とした両側に配置された2つの吸着部からなり、前記少なくとも一つの吸引通路は前記ボディから前記可動体を通って前記吸着部の一方に延びる第1の吸引通路と、前記ボディから前記可動体を通って前記吸着部の他方に延びる第2の吸引通路とからなり、該第1の吸引通路と該第2の吸引通路とは該可動体の中心に関して互いに対向し且つ該第1の直線と該第2の直線とが形成する角度の中心線上に配置される。
【0013】
前記ボディの穴の内周壁は円筒形状であり、前記可動体の外周壁は円筒形状である。
前記ボディはリング状の外周部分と、該外周部分の直径方向にブリッジ状に延びるブリッジ部分とを有し、前記ボディの穴は該ブリッジ部分に設けられる。
前記少なくとも一つの吸着部が前記可動体の観察用貫通穴の中心を対称軸とした両側に配置された2つの吸着部からなり、前記少なくとも一つの吸引通路は前記ボディから前記可動体を通って前記吸着部の一方に延びる第1の吸引通路と、前記ボディから前記可動体を通って前記吸着部の他方に延びる第2の吸引通路とからなり、該第1の吸引通路及び該第2の吸引通路は該ボディにおいては該ブリッジ部分に設けられる。
【0014】
前記可動体の観察用貫通穴は該ブリッジ部分の延びる方向に対して垂直方向に長い長円形状をしている。
さらに該可動体を該ボディに対して固定的に保持するための電磁保持手段を備える。
前記ボディを移動させるための移動手段と、前記少なくとも一つの吸着部に支持される被吸着物を前記観察用貫通穴を介して観察するための観察手段とを備える。
【0015】
【発明の実施の形態】
以下本発明を光ディスク用の光学ヘッドの実装に使用される吸着装置を例として説明する。図4は光ディスク用の光学ヘッド1を示している。光学ヘッド1は、レーザダイオード(以下LDという)2と2個のフォトダイオード(以下PDという)3、4とを含む。最初にLD2がその支持部材に固定され、2個のPD3、4はLD2に対して位置合わせしながら所定の位置に実装される。
【0016】
図1及び図2は本発明の実施例による吸着装置(吸着ヘッド)10を示している。吸着装置10は、その中心に円筒形状の穴14を有する円筒形状のボディ12と、このボディ12の穴14内に可動に配置された円筒形状の可動体16とからなる。ボディ12の穴14の内周壁と可動体16の外周壁との間には、例えば数10μmの隙間ができるようになっている。
【0017】
ボディ12はリング状の外周部分18と、この外周部分18の直径方向にブリッジ状に延びるブリッジ部分20とを有し、前記ボディの穴14はブリッジ部分20に設けられている。外周部分18とブリッジ部分20との間には、ボディ12の上面側から下面側まで貫通した円弧状の空所部分22が設けられる。さらに、ボディ12上面側及び下面側には、外周部分18とブリッジ部分20との段差として、穴14と同心円状の円形のキャビティ24が形成される。
【0018】
可動体16はその下面側に突出する2つの吸着部26、28及びその中央に位置して上面側から下面側まで貫通した観察用貫通穴30を有する。吸着部26、28は真空吸引口を有する。図2には2つのPD3、4が吸着部26、28に吸着された状態が示されており、図2には吸着部26、28に吸着された2つのPD3、4が上方から観察用貫通穴30を通して見えているところが示される。
【0019】
2つの吸着部26、28はそれぞれ第1の吸引通路32及び第2の吸引通路34に接続されている。第1の吸引通路32は、ボディ12に形成された吸引通路部分32a及び可動体16に形成された吸引通路部分32bによって形成され、よってボディ12から可動体16を通って一方の吸着部26に延びる。第2の吸引通路34は、ボディ12に形成された吸引通路部分34a及び可動体16に形成された吸引通路部分34bによって形成され、よってボディ12から可動体16を通って他方の吸着部28に延びる。
【0020】
第1の吸引通路32のボディ12に形成された吸引通路部分32aの内端部分はボディ12の上面又は下面と平行に延び、且つ可動体16に形成された吸引通路部分32bの内端部分もボディ12の上面又は下面と平行に延び、これらの内端部分は上記したボディ12の穴14の内周壁と可動体16の外周壁との間の間隙を介して対向する。
【0021】
同様に、第2の吸引通路34のボディ12に形成された吸引通路部分34aの内端部分はボディ12の上面又は下面と平行に延び、且つ可動体16に形成された吸引通路部分34bの内端部分もボディ12の上面又は下面と平行に延び、これらの内端部分は上記したボディ12の穴14の内周壁と可動体16の外周壁との間の間隙を介して対向する。
【0022】
上記したボディ12の穴14の内周壁と可動体16の外周壁との間の数10μmの隙間は、可動体16のボディ12に対する相対運動を可能とするとともに、これらの吸引通路部分の引き継ぎ部32a─32b、34a─34bにおける洩れができるだけ少なくなるように設定されている。そして、第1及び第2の吸引通路32、34はボディ12及び可動体16の内部に形成されているので、例えばこれらの吸引通路をボディ12及び可動体16に取りつけられたチューブ等で形成する場合と比べて可動体16にボディ12に対して好ましくない力を与えることがない。
【0023】
さらに、可動体16をボディ12に対して支持するために、少なくとも一対の(実施例においては4対の)平行ばね36a、36bが可動体16とボディ12との間に延びる。各対の平行ばね36a、36bはボディ12及び可動体16のそれぞれ上面側及び下面側に平行に配置された板ばねからなる。実施例においては、各ばね36a、36bはボディ12及び可動体16のそれぞれ上面及び下面にねじ38によって取りつけられる。
【0024】
従って、吸着部26、28をPD3、4に向かって押しつけるときに、可動体16はボディ12に対して押しつけ方向にのみコンプライアンスをもって支持されていることになり、押しつけ方向以外の方向においては、可動体16は実質的にボディ12と一体に移動する。実施例では、4mm/kgfで吸着部26、28をPD3、4に向かって押しつけることができる。
【0025】
また、平行ばね36a、36bの配置において、2対の平行ばね36a、36bは可動体16の観察用貫通穴30の両側に直線上に配置されている。そして、4対の平行ばね36a、36bの配置において、2対の平行ばね36a、36bは可動体16の観察用貫通穴30の両側に第1の直線上に配置され、他の2対の平行ばね36a、36bは可動体16の観察用貫通穴30の両側に前記第1の直線と交差する第2の直線上に配置されている。このようにして、平行ばね36a、36bは横方向にあるいは回転方向にずれることなく、押しつけ方向以外では剛性よく可動体16を支持する。
【0026】
そして、第1の吸引通路32及び第2の吸引通路34は可動体16の中心に関して互いに対向し且つ前記第1の直線と前記第2の直線とが形成する角度の中心線上に配置される。これによって、吸引力が平行ばね36a、36bにもたらす曲げモーメントをほぼ0にすることができる。実施例においては、前記第1の直線及び前記第2の直線はボディのブリッジ部分20に交差するように配置され、第1の吸引通路32及び第2の吸引通路34とブリッジ部分20の中心線に沿って配置される。また、可動体16の観察用貫通穴30はブリッジ部分20に対して垂直方向に長い長円形状をしている。
【0027】
図3は、ボディ12を移動させるための移動手段40と、吸着部26、28に支持されるPD3、4を観察用貫通穴30を介して観察するための観察手段42とを備えた吸着装置全体を示す図である。実施例においては、移動手段40は多軸ステージからなり、観察手段42はCCDカメラからからなる。観察手段42はZ軸ステージ43に取りつけられている。さらに、第1の吸引通路32及び第2の吸引通路34はそれぞれ電磁弁44、46を介してバキュームポンプ48に接続されるようになっている。ホストコンピュータ50が移動手段40及びZ軸ステージ43を制御し、且つ観察手段42は画像処理装置52を介してホストコンピュータ50に接続される。
【0028】
図5は本発明による吸着装置10の変形例を示す図である。この吸着装置10は図1及び図2に示される吸着装置10と基本的に類似した構成を有し、同じ部材は同じ参照番号で示されている。図5においては、吸着装置10はさらに可動体16をボディ12に対して固定的に保持するための電磁保持手段60を備えている。電磁保持手段60はアーム60aに取りつけられた電磁ソレノイド60bからなる。アーム60aはボディ12に固定され、電磁ソレノイド60bは可動体16に近接した位置に配置される。
【0029】
以下上記実施例の作動について図6から図11を参照して説明する。吸着装置10は電磁保持手段60を備えたものとする。図6に示されるように、観察手段42が可動体16の観察用貫通穴30を介してPD3を観察できるように、1枚目のPD3を一方の吸着部26の下の観察手段42の視野内に搬送し、観察手段42をPD3の表面に焦点を合わせ、PD3の表面と可動体16の吸着部26の先端との間の距離を測定する。
【0030】
それから、PD3の表面の指標パターンを位置認識し、吸着装置のX、Y位置、Z軸回りのθ姿勢を決定し、多軸ステージからなる移動手段40を駆動して吸着装置10をPD3に対して位置決めする。そこで、焦点位置誤差(例えば±μm)を吸収し、且つ5gfの接触力で吸着部26をPD3に押しつけるため、PD3の表面と可動体16の吸着部26の先端との間の前記測定距離よりも20μmだけ多く吸着装置10をPD3の表面に向かって下降させる。
【0031】
このときに、可動体16はばね36a、36bにより押しつけ方向にコンプライアンスをもってボディ12に支持されているので、PD3を損傷させることはない。そして、図7に示されるように、吸着部26がPD3に接触したら、吸着部26に真空を供給し、PD3を吸着する。従って、吸着に際して、PD3の位置が横にずれてしまうという問題はない。
【0032】
それから、図8及び図9に示されるように、吸着装置10を上昇させた後で、同様の手順でもう一つの吸着部28を2枚目のPD4に押しつけ、2枚目のPD4を吸着する。この場合にも2枚目のPD4の表面の指標パターンを位置認識する。そして、2枚目のPD4が既に吸着している1枚目のPD3に対して規定の位置関係になるように移動手段40を駆動して吸着装置10をPD4に対して位置決めする。
【0033】
図10に示されるように、PD3、4を吸着した吸着装置10をPD3、4の実装位置へ搬送する。吸着装置10が実装位置へ搬送されたら(あるいは吸着装置10が実装位置へ搬送される前)、PD3、4が吸着されている状態で電磁保持手段60を作動させ、可動体16を電磁ソレノイド60bに吸引し、それによって可動体16をボディ12に対して一体化する。それから図11に示されるように、観察手段42(又はそれと等々の観察装置)によって可動体16の観察用貫通穴30を介してPD3を観察しながら、PD3、4を光学ヘッド1の支持部材上に位置決めし、PD3、4を光学ヘッド1の支持部材上に接着等の固定処理を行った後で、吸着部26、28への真空の供給を停止し、吸着を解除する。
【0034】
【発明の効果】
以上説明したように、本発明によれば、PD等の被吸着物を位置ずれなく、特に複数のPD等の被吸着物を同時に且つ位置ずれなく、正確に且つ吸着することのできる吸着装置を得ることができる。
【図面の簡単な説明】
【図1】本発明の実施例による吸着装置を示す平面図である。
【図2】図1の吸着装置の断面図である。
【図3】図1及び図2の吸着装置の全体構成を示す図である。
【図4】被吸着装置の一例である光学ヘッドを示す斜視図である。
【図5】図2に類似した吸着装置の変形例を示す断面図である。
【図6】吸着装置の作動の第1段階である押しつけ工程を示す斜視図である。
【図7】吸着装置の作動の次の段階である吸着工程を示す斜視図である。
【図8】吸着装置の作動の次の段階である押しつけ工程を示す斜視図である。
【図9】吸着装置の作動の次の段階である吸着工程を示す斜視図である。
【図10】吸着装置の作動の次の段階である可動体固定工程を示す斜視図である。
【図11】吸着装置の作動の次の段階である実装工程を示す斜視図である。
【符号の説明】
1…光学ヘッド
2…レーザダイオード
3、4…フォトダイオード
10…吸着装置
12…ボディ
14…穴
16…可動体
18…リング状の外周部分
20…ブリッジ部分
26、28…吸着部
30…観察用貫通穴
32、34…吸引通路
36a、36b…ばね
60…電磁保持手段
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a suction device, for example, a suction device used when two photodiodes are simultaneously mounted on a component on which a laser diode is mounted.
[0002]
[Prior art]
It is known to use an adsorber to move, assemble, or position an article. The suction device of the present application is used to assemble an optical head for an optical disk, for example.
The optical head includes a laser diode (hereinafter referred to as LD) that irradiates light toward the optical disc and a photodiode (hereinafter referred to as PD) that receives the light reflected by the optical disc and generates an electrical signal. LD and PD need to be assembled accurately in a small optical head. Usually, the LD is first mounted on the support member, and the PD is mounted while being aligned with the mounted LD. A suction device is used for mounting the PD.
[0003]
When the number of PDs is one, a method of recognizing the index pattern on the surface of the PD adsorbed by the collet with an observation apparatus and positioning the PD so that the index pattern matches the mounting position is common. Even when there are two PDs, the first PD and the second PD can be sequentially mounted in the above-described procedure. However, in this case, the mounting time takes twice, which causes a problem of mass productivity.
[0004]
[Problems to be solved by the invention]
Therefore, it is desired that two PDs can be mounted simultaneously. In order to mount two PDs at the same time, it is conceivable that two suction units are provided in one suction head, the two PDs are simultaneously sucked by one suction head, and are transported to the mounting position. At this time, if the positional relationship between the two PDs is precisely corresponding to the mounting positional relationship between the two PDs, the two PDs can be mounted simply by sucking and transporting them. it can.
[0005]
However, when the PD is sucked by the suction head, if there is a gap between the PD and the suction head, the position of the PD is shifted laterally before the PD is completely sucked when suction is started by the suction head. There is a problem of end. If the position of the PD shifts to the side, the positional relationship between the two PDs shifts, and the two PDs cannot be positioned at the mounting position at the same time, and the positions of the two PDs are detected respectively. , You will have to align.
[0006]
An object of the present invention is to provide an adsorption device that can adsorb an object to be adsorbed such as PD accurately and without displacement.
Another object of the present invention is to provide an adsorption device capable of adsorbing a plurality of objects to be adsorbed such as PDs simultaneously and accurately without positional deviation.
[0007]
[Means for Solving the Problems]
A suction device according to the present invention includes a body having a hole, a movable body movably disposed in the hole of the body, and having at least one suction portion and an observation through hole, and supporting the movable body with respect to the body. For this purpose, the movable body includes at least a pair of parallel springs extending between the movable body and the body, and at least one suction passage extending from the body through the movable body to the at least one suction portion. Is.
[0008]
In this configuration, the movable body that is moved by the robot, the moving stage, or the like is supported on the body by the parallel spring and moves together with the body. When the suction part is pressed toward the object to be sucked such as PD, the movable body is supported with compliance only in the pressing direction against the body. In directions other than the pressing direction, the movable body moves substantially integrally with the body.
[0009]
Therefore, when adsorbing an object to be adsorbed such as PD, the body is positioned with respect to the object to be adsorbed such as PD, the body is lowered, and the adsorbing portion is pressed against the object to be adsorbed such as PD. At this time, since the movable body is supported by the body with compliance in the pressing direction, the object to be adsorbed such as PD is not damaged. Then, a vacuum is supplied to the adsorption unit while the adsorption unit is in contact with an object to be adsorbed such as PD to adsorb the object to be adsorbed such as PD. Therefore, there is no problem that the position of the object to be adsorbed such as PD is shifted laterally during the adsorption. When the object to be adsorbed such as PD is adsorbed, the body is moved to convey the object to be adsorbed such as PD to the mounting position or the like.
[0010]
The following features can be included together with the above configuration.
The at least one pair of parallel springs includes leaf springs arranged in parallel on the upper surface side and the lower surface side of the body and the movable body, respectively.
Wherein at least be one of the suction unit from a plurality of suction portion, the observation through holes Ru is disposed centrally between the suction portion of the plurality of.
[0011]
The at least one pair of parallel springs comprises at least two pairs of springs arranged linearly on both sides with the center of the observation through-hole of the movable body as the axis of symmetry .
The at least one pair of parallel springs has two pairs of parallel springs arranged on a first straight line on both sides with the center of the observation through hole of the movable body as the axis of symmetry and the center of the observation through hole of the movable body. It consists of two pairs of parallel springs arranged on a second straight line that intersects the first straight line on both sides of the axis of symmetry .
[0012]
The at least one suction portion includes two suction portions disposed on both sides with the center of the observation through hole of the movable body as an axis of symmetry, and the at least one suction passage passes through the movable body from the body. A first suction passage extending to one of the suction portions and a second suction passage extending from the body through the movable body to the other of the suction portions, the first suction passage and the second suction passage The suction passages are opposed to each other with respect to the center of the movable body and are arranged on the center line of the angle formed by the first straight line and the second straight line.
[0013]
The inner peripheral wall of the hole of the body has a cylindrical shape, and the outer peripheral wall of the movable body has a cylindrical shape.
The body has a ring-shaped outer peripheral portion and a bridge portion extending in a bridge shape in the diameter direction of the outer peripheral portion, and the hole of the body is provided in the bridge portion.
The at least one suction portion includes two suction portions disposed on both sides with the center of the observation through hole of the movable body as an axis of symmetry, and the at least one suction passage passes through the movable body from the body. A first suction passage extending to one of the suction portions and a second suction passage extending from the body through the movable body to the other of the suction portions, the first suction passage and the second suction passage A suction passage is provided in the bridge portion of the body.
[0014]
The observation through hole of the movable body has an oval shape that is long in the direction perpendicular to the direction in which the bridge portion extends .
Furthermore, an electromagnetic holding means for holding the movable body fixedly with respect to the body is provided.
A moving means for moving the body; and an observing means for observing the object to be adsorbed supported by the at least one adsorbing portion through the observation through hole.
[0015]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be described with reference to an adsorption device used for mounting an optical head for an optical disk. FIG. 4 shows an optical head 1 for an optical disk. The optical head 1 includes a laser diode (hereinafter referred to as LD) 2 and two photodiodes (hereinafter referred to as PD) 3 and 4. First, the LD 2 is fixed to the support member, and the two PDs 3 and 4 are mounted at predetermined positions while being aligned with the LD 2.
[0016]
1 and 2 show a suction device (suction head) 10 according to an embodiment of the present invention. The suction device 10 includes a cylindrical body 12 having a cylindrical hole 14 at the center thereof, and a cylindrical movable body 16 movably disposed in the hole 14 of the body 12. Between the inner peripheral wall of the hole 14 of the body 12 and the outer peripheral wall of the movable body 16, for example, a gap of several tens of μm is formed.
[0017]
The body 12 has a ring-shaped outer peripheral portion 18 and a bridge portion 20 extending in a bridge shape in the diameter direction of the outer peripheral portion 18, and the hole 14 of the body is provided in the bridge portion 20. Between the outer peripheral portion 18 and the bridge portion 20, an arcuate void portion 22 penetrating from the upper surface side to the lower surface side of the body 12 is provided. Further, a circular cavity 24 concentric with the hole 14 is formed as a step between the outer peripheral portion 18 and the bridge portion 20 on the upper surface side and the lower surface side of the body 12.
[0018]
The movable body 16 has two suction portions 26 and 28 projecting to the lower surface side and an observation through hole 30 that is located at the center and penetrates from the upper surface side to the lower surface side. The suction portions 26 and 28 have vacuum suction ports. FIG. 2 shows a state where two PDs 3 and 4 are adsorbed by the adsorbing parts 26 and 28, and FIG. 2 shows that two PDs 3 and 4 adsorbed by the adsorbing parts 26 and 28 penetrate from the upper side for observation. What is visible through hole 30 is shown.
[0019]
The two suction portions 26 and 28 are connected to the first suction passage 32 and the second suction passage 34, respectively. The first suction passage 32 is formed by a suction passage portion 32 a formed in the body 12 and a suction passage portion 32 b formed in the movable body 16, and thus passes from the body 12 through the movable body 16 to the one suction portion 26. Extend. The second suction passage 34 is formed by a suction passage portion 34 a formed in the body 12 and a suction passage portion 34 b formed in the movable body 16, and thus passes from the body 12 through the movable body 16 to the other suction portion 28. Extend.
[0020]
The inner end portion of the suction passage portion 32a formed in the body 12 of the first suction passage 32 extends in parallel with the upper surface or the lower surface of the body 12, and the inner end portion of the suction passage portion 32b formed in the movable body 16 is also the same. The inner end portions of the body 12 extend in parallel with the upper surface or the lower surface of the body 12, and face each other through a gap between the inner peripheral wall of the hole 14 of the body 12 and the outer peripheral wall of the movable body 16.
[0021]
Similarly, the inner end portion of the suction passage portion 34 a formed in the body 12 of the second suction passage 34 extends in parallel with the upper surface or the lower surface of the body 12, and the inner end portion of the suction passage portion 34 b formed in the movable body 16. The end portions also extend in parallel with the upper surface or the lower surface of the body 12, and these inner end portions oppose each other via a gap between the inner peripheral wall of the hole 14 of the body 12 and the outer peripheral wall of the movable body 16.
[0022]
The gap of several tens of μm between the inner peripheral wall of the hole 14 of the body 12 and the outer peripheral wall of the movable body 16 enables relative movement of the movable body 16 with respect to the body 12, and takes over portions of these suction passage portions. 32a-32b and 34a-34b are set so as to minimize leakage. Since the first and second suction passages 32 and 34 are formed inside the body 12 and the movable body 16, for example, these suction passages are formed by tubes or the like attached to the body 12 and the movable body 16. Compared to the case, an undesirable force is not applied to the body 12 on the movable body 16.
[0023]
Further, in order to support the movable body 16 with respect to the body 12, at least a pair (four pairs in the embodiment) of parallel springs 36 a and 36 b extend between the movable body 16 and the body 12. Each pair of parallel springs 36a and 36b is formed of a leaf spring disposed in parallel on the upper surface side and the lower surface side of the body 12 and the movable body 16, respectively. In the embodiment, the springs 36 a and 36 b are attached to the upper surface and the lower surface of the body 12 and the movable body 16 by screws 38, respectively.
[0024]
Accordingly, when the suction portions 26 and 28 are pressed toward the PDs 3 and 4, the movable body 16 is supported with compliance only in the pressing direction with respect to the body 12, and is movable in directions other than the pressing direction. The body 16 moves substantially with the body 12. In the embodiment, the suction portions 26 and 28 can be pressed toward the PDs 3 and 4 at 4 mm / kgf.
[0025]
In the arrangement of the parallel springs 36 a and 36 b, the two pairs of parallel springs 36 a and 36 b are arranged linearly on both sides of the observation through hole 30 of the movable body 16. In the arrangement of the four pairs of parallel springs 36a and 36b, the two pairs of parallel springs 36a and 36b are arranged on the first straight line on both sides of the observation through hole 30 of the movable body 16, and the other two pairs of parallel springs 36a and 36b are arranged. The springs 36 a and 36 b are arranged on both sides of the observation through hole 30 of the movable body 16 on a second straight line that intersects the first straight line. In this way, the parallel springs 36a and 36b support the movable body 16 with high rigidity except in the pressing direction without being displaced laterally or rotationally.
[0026]
The first suction passage 32 and the second suction passage 34 are arranged opposite to each other with respect to the center of the movable body 16 and on the center line of the angle formed by the first straight line and the second straight line. As a result, the bending moment brought about by the attractive force on the parallel springs 36a and 36b can be made substantially zero. In the embodiment, the first straight line and the second straight line are arranged to intersect the bridge portion 20 of the body, and the first suction passage 32 and the second suction passage 34 and the center line of the bridge portion 20 are arranged. It is arranged along. Further, the observation through hole 30 of the movable body 16 has an oval shape that is long in a direction perpendicular to the bridge portion 20.
[0027]
FIG. 3 shows a suction device including a moving means 40 for moving the body 12 and an observation means 42 for observing the PDs 3 and 4 supported by the suction portions 26 and 28 through the observation through hole 30. It is a figure which shows the whole. In the embodiment, the moving means 40 is composed of a multi-axis stage, and the observation means 42 is composed of a CCD camera. The observation means 42 is attached to the Z axis stage 43. Further, the first suction passage 32 and the second suction passage 34 are connected to a vacuum pump 48 via electromagnetic valves 44 and 46, respectively. The host computer 50 controls the moving means 40 and the Z-axis stage 43, and the observation means 42 is connected to the host computer 50 via the image processing device 52.
[0028]
FIG. 5 is a view showing a modification of the adsorption device 10 according to the present invention. The adsorbing device 10 has a configuration basically similar to that of the adsorbing device 10 shown in FIGS. 1 and 2, and the same members are denoted by the same reference numerals. In FIG. 5, the suction device 10 further includes electromagnetic holding means 60 for holding the movable body 16 fixedly with respect to the body 12. The electromagnetic holding means 60 comprises an electromagnetic solenoid 60b attached to the arm 60a. The arm 60 a is fixed to the body 12, and the electromagnetic solenoid 60 b is disposed at a position close to the movable body 16.
[0029]
The operation of the above embodiment will be described below with reference to FIGS. It is assumed that the suction device 10 includes an electromagnetic holding unit 60. As shown in FIG. 6, the field of view of the observation means 42 under one of the suction portions 26 is adjusted so that the observation means 42 can observe the PD 3 through the observation through hole 30 of the movable body 16. The observation means 42 is focused on the surface of the PD 3, and the distance between the surface of the PD 3 and the tip of the suction portion 26 of the movable body 16 is measured.
[0030]
Then, the position of the indicator pattern on the surface of the PD 3 is recognized, the X and Y positions of the suction device and the θ posture around the Z axis are determined, and the suction device 10 is moved relative to the PD 3 by driving the moving means 40 comprising a multi-axis stage. Position. Therefore, in order to absorb the focal position error (for example, ± μm) and press the suction portion 26 against the PD 3 with a contact force of 5 gf, from the measurement distance between the surface of the PD 3 and the tip of the suction portion 26 of the movable body 16. Also, the adsorption device 10 is lowered by 20 μm toward the surface of the PD 3.
[0031]
At this time, since the movable body 16 is supported by the body 12 with compliance in the pressing direction by the springs 36a and 36b, the PD 3 is not damaged. Then, as shown in FIG. 7, when the suction unit 26 comes into contact with the PD 3, a vacuum is supplied to the suction unit 26 to suck the PD 3. Therefore, there is no problem that the position of the PD 3 is shifted laterally during the suction.
[0032]
Then, as shown in FIG. 8 and FIG. 9, after raising the suction device 10, another suction part 28 is pressed against the second PD 4 by the same procedure to suck the second PD 4. . Also in this case, the position of the indicator pattern on the surface of the second PD 4 is recognized. Then, the moving unit 40 is driven so that the suction device 10 is positioned with respect to the PD 4 so that the second PD 4 is in a prescribed positional relationship with respect to the first PD 3 that has already been sucked.
[0033]
As shown in FIG. 10, the suction device 10 that sucks the PDs 3 and 4 is conveyed to the mounting position of the PDs 3 and 4. When the suction device 10 is transported to the mounting position (or before the suction device 10 is transported to the mounting position), the electromagnetic holding means 60 is operated in a state where the PDs 3 and 4 are attracted, and the movable body 16 is moved to the electromagnetic solenoid 60b. So that the movable body 16 is integrated with the body 12. Then, as shown in FIG. 11, the PD 3 and 4 are placed on the support member of the optical head 1 while observing the PD 3 through the observation through hole 30 of the movable body 16 by the observation means 42 (or an observation device or the like). After the PDs 3 and 4 are fixed on the support member of the optical head 1, the supply of vacuum to the suction units 26 and 28 is stopped, and the suction is released.
[0034]
【The invention's effect】
As described above, according to the present invention, there is provided an adsorption device capable of accurately adsorbing objects to be adsorbed such as PDs, and in particular, adsorbing objects such as a plurality of PDs simultaneously and without positional deviation. Obtainable.
[Brief description of the drawings]
FIG. 1 is a plan view showing a suction device according to an embodiment of the present invention.
FIG. 2 is a cross-sectional view of the adsorption device of FIG.
FIG. 3 is a diagram showing an overall configuration of the adsorption device of FIGS. 1 and 2;
FIG. 4 is a perspective view showing an optical head which is an example of a suction target device.
FIG. 5 is a cross-sectional view showing a modification of the suction device similar to FIG.
FIG. 6 is a perspective view showing a pressing process which is the first stage of the operation of the adsorption device.
FIG. 7 is a perspective view showing an adsorption process which is the next stage of the operation of the adsorption device.
FIG. 8 is a perspective view showing a pressing process which is the next stage of the operation of the adsorption device.
FIG. 9 is a perspective view showing an adsorption process which is the next stage of the operation of the adsorption device.
FIG. 10 is a perspective view showing a movable body fixing step that is the next stage of the operation of the suction device.
FIG. 11 is a perspective view showing a mounting process which is the next stage of the operation of the suction device.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Optical head 2 ... Laser diode 3, 4 ... Photodiode 10 ... Adsorption apparatus 12 ... Body 14 ... Hole 16 ... Movable body 18 ... Ring-shaped outer peripheral part 20 ... Bridge part 26, 28 ... Adsorption part 30 ... Through for observation Holes 32, 34 ... suction passages 36a, 36b ... springs 60 ... electromagnetic holding means

Claims (14)

穴を有するボディと、該ボディの穴内に可動に配置され、少なくとも一つの吸着部及び観察用貫通穴を有する可動体と、該可動体を該ボディに対して支持するために該可動体と該ボディとの間に延びる少なくとも一対の平行ばねと、該ボディから該可動体を通って該少なくとも一つの吸着部へ延びる少なくとも一つの吸引通路とからなることを特徴とする吸着装置。  A body having a hole, a movable body movably disposed in the hole of the body, and having at least one suction portion and an observation through hole; and the movable body and the movable body for supporting the movable body with respect to the body An adsorption apparatus comprising: at least a pair of parallel springs extending between the body and at least one suction passage extending from the body through the movable body to the at least one adsorption portion. 前記少なくとも一対の平行ばねは前記ボディ及び前記可動体のそれぞれ上面側及び下面側に平行に配置された板ばねからなることを特徴とする請求項1に記載の吸着装置。  2. The suction device according to claim 1, wherein the at least one pair of parallel springs includes leaf springs arranged in parallel on the upper surface side and the lower surface side of the body and the movable body, respectively. 前記少なくとも一つの吸着部が複数の吸着部からなり、前記観察用貫通穴が該複数の吸着部の間の中央に配置されることを特徴とする請求項1に記載の吸着装置。  2. The suction device according to claim 1, wherein the at least one suction portion includes a plurality of suction portions, and the observation through hole is disposed at a center between the plurality of suction portions. 前記少なくとも一対の平行ばねが前記可動体の観察用貫通穴の中心を対称軸とした両側に直線上に配置された少なくとも2対のばねからなることを特徴とする請求項3に記載の吸着装置。4. The suction device according to claim 3, wherein the at least one pair of parallel springs includes at least two pairs of springs arranged in a straight line on both sides with the center of the observation through hole of the movable body as an axis of symmetry. . 前記少なくとも一対の平行ばねが前記可動体の観察用貫通穴の中心を対称軸とした両側に第1の直線上に配置された2対の平行ばねと前記可動体の観察用貫通穴の中心を対称軸とした両側に前記第1の直線と交差する第2の直線上に配置された2対の平行ばねとからなることを特徴とする請求項4に記載の吸着装置。The at least one pair of parallel springs has two pairs of parallel springs arranged on a first straight line on both sides with the center of the observation through hole of the movable body as the axis of symmetry and the center of the observation through hole of the movable body. The adsorption device according to claim 4, comprising two pairs of parallel springs arranged on a second straight line intersecting the first straight line on both sides of the axis of symmetry . 前記少なくとも一つの吸着部が前記可動体の観察用貫通穴の中心を対称軸とした両側に配置された2つの吸着部からなり、前記少なくとも一つの吸引通路は前記ボディから前記可動体を通って前記吸着部の一方に延びる第1の吸引通路と、前記ボディから前記可動体を通って前記吸着部の他方に延びる第2の吸引通路とからなり、該第1の吸引通路と該第2の吸引通路とは該可動体の中心に関して互いに対向し且つ該第1の直線と該第2の直線とが形成する角度の中心線上に配置されることを特徴とする請求項5に記載の吸着装置。The at least one suction portion includes two suction portions disposed on both sides with the center of the observation through hole of the movable body as an axis of symmetry, and the at least one suction passage passes through the movable body from the body. A first suction passage extending to one of the suction portions and a second suction passage extending from the body through the movable body to the other of the suction portions, the first suction passage and the second suction passage 6. The suction device according to claim 5, wherein the suction passage is disposed opposite to each other with respect to the center of the movable body and on a center line of an angle formed by the first straight line and the second straight line. . 前記ボディの穴の内周壁は円筒形状であり、前記可動体の外周壁は円筒形状であることを特徴とする請求項1に記載の吸着装置。  The suction device according to claim 1, wherein an inner peripheral wall of the hole of the body has a cylindrical shape, and an outer peripheral wall of the movable body has a cylindrical shape. 前記ボディはリング状の外周部分と、該外周部分の直径方向にブリッジ状に延びるブリッジ部分とを有し、前記ボディの穴は該ブリッジ部分に設けられることを特徴とする請求項1に記載の吸着装置。  The said body has a ring-shaped outer peripheral part and a bridge part extended in bridge shape in the diameter direction of this outer peripheral part, The hole of the said body is provided in this bridge part. Adsorption device. 前記少なくとも一つの吸着部が前記可動体の観察用貫通穴の中心を対称軸とした両側に配置された2つの吸着部からなり、前記少なくとも一つの吸引通路は前記ボディから前記可動体を通って前記吸着部の一方に延びる第1の吸引通路と、前記ボディから前記可動体を通って前記吸着部の他方に延びる第2の吸引通路とからなり、該第1の吸引通路及び該第2の吸引通路は該ボディにおいては該ブリッジ部分に設けられることを特徴とする請求項8に記載の吸着装置。The at least one suction portion includes two suction portions disposed on both sides with the center of the observation through hole of the movable body as an axis of symmetry, and the at least one suction passage passes through the movable body from the body. A first suction passage extending to one of the suction portions and a second suction passage extending from the body through the movable body to the other of the suction portions, the first suction passage and the second suction passage The suction device according to claim 8, wherein a suction passage is provided in the bridge portion of the body. 前記可動体の観察用貫通穴は該ブリッジ部分の延びる方向に対して垂直方向に長い長円形状をしていることを特徴とする請求項9に記載の吸着装置。The suction device according to claim 9, wherein the observation through hole of the movable body has an elliptical shape that is long in a direction perpendicular to a direction in which the bridge portion extends . さらに該可動体を該ボディに対して固定的に保持するための電磁保持手段を備えることを特徴とする請求項1に記載の吸着装置。  The adsorption device according to claim 1, further comprising electromagnetic holding means for holding the movable body fixedly with respect to the body. 前記ボディを移動させるための移動手段と、前記少なくとも一つの吸着部に支持される被吸着物を前記観察用貫通穴を介して観察するための観察手段とを備えることを特徴とする請求項1に記載の吸着装置。  The moving means for moving the body, and observation means for observing the object to be adsorbed supported by the at least one adsorption portion through the observation through hole. The adsorption device according to 1. 穴を有するボディと、該ボディの穴内に可動に配置され、少なくとも一つの吸着部及び観察用貫通穴を有する可動体と、該可動体を該ボディに対して支持するために該可動体と該ボディとの間に延びる少なくとも一対のばねと、該ボディから該可動体を通って該少なくとも一つの吸着部へ延びる少なくとも一つの吸引通路とからなり、該少なくとも一対のばねは前記可動体の観察用貫通穴の中心を対称軸とした両側に直線上に配置された少なくとも2つのばねからなることを特徴とする吸着装置。A body having a hole, a movable body movably disposed in the hole of the body, and having at least one suction portion and an observation through hole; and the movable body and the movable body for supporting the movable body with respect to the body At least one pair of springs extending between the body and at least one suction passage extending from the body through the movable body to the at least one suction portion, the at least one pair of springs being used for observing the movable body An adsorption device comprising at least two springs arranged in a straight line on both sides with the center of the through hole as the axis of symmetry . 前記少なくとも一対のばねが前記可動体の観察用貫通穴の中心を対称軸とした両側に第1の直線上に配置された2つの平行ばねと前記可動体の観察用貫通穴の中心を対称軸とした両側に前記第1の直線と交差する第2の直線上に配置された2つのばねとからなることを特徴とする請求項13に記載の吸着装置。Wherein at least a pair of springs symmetry axis the center of the observation through holes of the first disposed on a straight line with two parallel spring the movable body on both sides of the center was symmetry axis of the observation through-hole of the movable body consisting of the second straight line to arranged two springs intersecting the first straight line on either side adsorption device of claim 13, wherein.
JP05762197A 1997-03-12 1997-03-12 Adsorption device Expired - Fee Related JP3770687B2 (en)

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JP05762197A Expired - Fee Related JP3770687B2 (en) 1997-03-12 1997-03-12 Adsorption device

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002205293A (en) * 2001-01-09 2002-07-23 Murata Mfg Co Ltd Suction nozzle and work carrying device using the same
JP6160174B2 (en) * 2013-03-29 2017-07-12 富士通株式会社 Article mounting device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5672690U (en) * 1979-11-08 1981-06-15
JPS61252094A (en) * 1985-05-02 1986-11-10 株式会社日立製作所 Machine hand
JPH0669654B2 (en) * 1987-02-05 1994-09-07 関東自動車工業株式会社 Parts mounting method
JPH02104928U (en) * 1989-02-09 1990-08-21
JPH0577185A (en) * 1991-09-18 1993-03-30 Seiko Epson Corp Suction head
JPH0572386U (en) * 1992-02-12 1993-10-05 株式会社アドバンテスト IC carrier

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