JP3762111B2 - Ultrasonic transducer - Google Patents

Ultrasonic transducer Download PDF

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Publication number
JP3762111B2
JP3762111B2 JP24536298A JP24536298A JP3762111B2 JP 3762111 B2 JP3762111 B2 JP 3762111B2 JP 24536298 A JP24536298 A JP 24536298A JP 24536298 A JP24536298 A JP 24536298A JP 3762111 B2 JP3762111 B2 JP 3762111B2
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Prior art keywords
vibration
rod
protrusion
ultrasonic
vibrator
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JP2000070853A (en
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末広 今泉
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Kyocera Corp
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Kyocera Corp
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Description

【０００１】
【発明の属する技術分野】
本発明は、アルミニウム線や金線などを溶接する超音波ボンディングや超音波加工等に応用可能な超音波振動子の構造に関する。
【０００２】
【従来技術】
従来より、集積回路のワイヤボンディング等に、その作業能率の高いこと、低温でボンディングできることから、超音波振動子を用いた超音波ボンディングが広く用いられている。また、超音波振動子を用いて、加工物の孔開け、切断、表面仕上げなどの研磨を行う超音波加工も広くおこなわれている。
【０００３】
この種の超音波ボンディング等の超音波振動子の構成は、例えば、図３に示すように、超音波発振器１１からの信号により圧電体等の電歪形や磁歪形からなる振動子１２が縦振動を生じ、この振動がホーン１３を通過してボンディングヘッド１４に伝えられてヘッド１４が横振動を起こし、そのヘッド１４が作用点となり、ヘッド１４と接触する被加工物に対し、振動による摩擦熱により溶接したり、振動による加工を行うものである。
【０００４】
【発明が解決しようとする課題】
しかしながら、この種の超音波振動子においては、ホーン１３は、振動子１２で加振した振動の振幅を増加させるためのものであるが、その形状は、振動拡大率を高めるために、例えばエクスポーネンシャル形ホーンなどのように複雑な曲面を有する特定形状の略円すい台形とする必要があり、加工が非常に難しいという問題があった。
【０００５】
また、ホーンの形状から共振周波数を求めるためには非常に複雑な計算が必要であるために、ホーン形状の設計は困難であった。
【０００６】
【課題を解決するための手段】
本発明者は、従来の複雑な曲面を有するホーンに代えて単純な棒状体を用い、該棒状体の縦振動の固有振動数と共振して横振動を発生する振動突起を該棒状体の側面の、望ましくは最大振幅部に形成し、さらに、その先端に作用点を形成することにより、単純な形状で大きな振幅を有する超音波振動子となることを見いだした。
【０００７】
【課題を解決するための手段】
すなわち、本発明の超音波振動子は、棒状体の一部に振動子を取り付けて、該棒状体の長さ方向に縦振動が付勢される振動基体と、該振動基体の側面に形成され、該振動基体の縦振動と共振して曲げ振動共振が発生し、その先端が作用点となる振動突起と、該振動突起の先端に設けられ横振動して被加工物に摩擦熱を発生させ溶接する作用ヘッドとを具備したものである。
【０００８】
また、前記棒状体は、略同一断面形状であることが望ましく、前記振動突起は、前記振動基体の最大振幅部に形成されることが望ましい。
【０００９】
【発明の実施の形態】
本発明の超音波振動子の一例を図１に示した。図１は超音波振動子１の斜視図を示すものである。図１によれば、超音波振動子１は、棒状体２と、その一部に取り付けられた振動子３とからなる振動基体４とを具備する。
【００１０】
棒状体２は、鉄や鉄−ニッケル−クロム系のステンレス綱およびニッケル−クロム綱等の金属からなり、その形状は、不要な振動の抑制および設計の容易性の点で断面が略同一形状の棒状体であることが望ましく、また、断面の形状は、円形でも多角形でもよい。
【００１１】
振動子３は、電歪形であるチタン酸バリウムやチタン酸ジルコン酸鉛等の圧電体や、磁歪形であるニッケルやフェライト等の磁性体が使用できるが、小型化が可能であるとともに、高い周波数が利用可能である点で、圧電体が最も望ましい。
【００１２】
また、振動子３は、棒状体２の一部に形成されるものであり、具体的には、棒状体の端面あるいは棒状体の側面に貼り付けることもできるが、駆動面間で振動子３と機械的インピーダンスの整合をとるために、振動子３を棒状体２の端面に貼り付け、さらに振動子３を、棒状体２および棒状体２と同部材の棒状体２’で挟持した構造であることが望ましい。また、より大きな変位を得るために振動子３を複数枚重ねて形成してもよい。
【００１３】
図１によれば、振動子３は端子板５によって挟持され、また、端子板５は発振器６と接続されている。そして、振動子３が縦振動を生じる周波数の超音波信号を発振器６に印加することにより、超音波信号が端子板５を介して振動子３に伝達され、振動子３に縦振動が生じ、振動基体４が縦振動を起こす。
【００１４】
本発明によれば、振動基体４の棒状体２の側面の一部に、振動基体４の縦振動と共振する特定形状の振動突起７が形成されていることが重要である。
【００１５】
振動数ｆの振動子を有する振動基体に設けた突起が共振を起こすための突起形状は、一般に、略同一断面形状を有する片持ちはりの棒状体とその振動数ｆとの関係を示す数１および数２によって算出することができる。
【００１６】
【数１】

Figure 0003762111
【００１７】
【数２】
Figure 0003762111
【００１８】
ここで、ｆは振動突起７の共振周波数、λは振動数係数（例えば４．６９４）、ｚ4 は振動突起の高さ、Ｅは振動突起のヤング率、Ｉは断面２次モーメント、ρは振動突起の質量密度、ｘ4 は振動突起の長さ、ｙは振動突起の幅を示す。
【００１９】
本発明によれば、上記数１、２に示される振動突起７の共振周波数が、前記振動子の周波数と一致するように振動突起７の高さｚ4 、長さｘ4 、幅ｙを定めることによって、振動突起７を振動基体４に励起された縦振動と共振させることができる結果、振動突起７の先端に大きな変位量を有する曲げ振動共振を発生させることができる。
【００２０】
なお、振動突起７の共振周波数ｆは、振動突起７の材質および形状のみに依存するため、共振周波数ｆを得るためには、上記の振動突起７の形状のみを上記の条件を満足するように設計すればよい。
【００２１】
また、振動突起７の形成位置を振動基体４における縦振動の振幅が最大となる位置とすることにより、振動突起７の先端に最も大きな変位量を有する横振動を発生させることができる。
【００２２】
振動突起７は、鉄、鉄−ニッケル−クロム系のステンレス綱およびニッケル−クロム綱等の金属あるいはアルミナやジルコニア等のセラミックスからなり、使用周波数および用途に適した特性の材質を用いることが望ましい。また、振動突起７の形状は、特に略同一断面形状を有する棒状体であることが望ましく、また、その断面形状は特に限定されるものではなく、棒状体の形状は円柱でも多角柱でも円筒でもよい。
【００２３】
さらに、振動モードの対称性を高める上では、振動突起７を棒状体２に対して線対称となる位置、すなわち、棒状体２の振動突起７を形成した側面と反対側の側面にも同じ形状の振動突起７’を形成することが望ましい。
【００２４】
振動突起７の先端には、前述したとおり振動基体４および振動突起７の振動により大きな変位の横振動が発生しており、この横振動を利用して振動突起７の先端に作用ヘッド８を形成する。作用ヘッド８は、横振動により摩擦熱を発生させて、例えば、金線等の金属と半導体チップとを溶接するいわゆるワイヤボンディングにおけるボンディングヘッドとして用いることができる。この振動突起７の先端の作用ヘッド８は、その用途に応じて先端形状を利用しやすい形状に加工することもできるが、振動突起７の先端に材質の異なる作用ヘッド８を取り付けることもできる。
【００２５】
作用ヘッド８の材質は、その利用法によって異なり、例えば、上記ボンディングヘッドとして利用する場合には、熱伝導がよく、耐熱性がありかつ溶接する物質と反応を起こさない材料によって形成することが望ましい。
【００２６】
また、図１によれば、振動基体４の縦振動の振幅がゼロとなる位置に固定具９を取り付けることも可能である。
【００２７】
なお、図１では、振動基体４と振動突起７とを別体として形成し、それらを貼り合わせることにより超音波振動子１を形成しているが、本発明によれば、これに限られるものではなく、研削加工等により振動基体４と振動突起７とを一体物として形成してもよい。
【００２８】
【実施例】
図２に示すように、長さ（ｘ1 ）４３ｍｍ×幅（ｙ）３ｍｍ×高さ（ｚ1 ）３ｍｍの鉄（質量８×１０-10 ｋｇｆ・ｓ2 ／ｍｍ4 、ヤング率２１０００ｋｇｆ／ｍｍ2 、ポアソン比０．２９）からなる棒状体２の一方の端面に、長さ（ｘ2 ）２ｍｍ×幅（ｙ）３ｍｍ×高さ（ｚ1 ）３ｍｍのＰＺＴからなる圧電体を端子板を介して貼り付け、さらに端子板を介して、棒状体２と同じ材質からなる長さ（ｘ3 ）５ｍｍ×幅（ｙ）３ｍｍ×高さ（ｚ1 ）３ｍｍの棒状体２’を貼り付けた。また、棒状体２の圧電体貼り付け面から長さ方向に１６ｍｍの位置に、棒状体２と同じ材質からなる長さ（ｘ4 ）２ｍｍ×幅（ｙ）３ｍｍ×高さ（ｚ4 ）１１ｍｍの振動突起を貼り付けた図３の超音波振動子を作製した。
【００２９】
得られた超音波振動子について、端子板を介して７３ｋＨｚの超音波信号を圧電体に印加し、超音波振動子を最大振幅１０μｍの縦振動を発生させたところ、作用点における振幅拡大比は８．５倍となった。
【００３０】
【発明の効果】
以上詳述したとおり、本発明によれば、極めて簡単な形状でかつ従来と同等の振幅増幅性能を有する超音波振動子を容易に作製できるものである。また、本発明の超音波振動子は、比較的簡単に設計することも可能であるため、超音波信号の周波数および振動子の作用点での共振周波数を自由に選択することが可能である。
【図面の簡単な説明】
【図１】本発明の超音波振動子の一実施例を示す斜視図である。
【図２】本発明の超音波振動子の形状を説明するための図である。
【図３】従来の超音波振動子の一例を示す側面図である。
【符号の説明】
１ 超音波振動子
２、２’ 棒状体
３ 振動子
４ 振動基体
５ 端子板
６ 発振器
７、７’ 振動突起
８ 作用ヘッド
９ 固定具[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a structure of an ultrasonic vibrator that can be applied to ultrasonic bonding or ultrasonic processing for welding an aluminum wire, a gold wire, or the like.
[0002]
[Prior art]
Conventionally, ultrasonic bonding using an ultrasonic vibrator has been widely used for wire bonding of integrated circuits because of its high work efficiency and bonding at low temperatures. In addition, ultrasonic processing that performs polishing such as drilling, cutting, and surface finishing of a workpiece using an ultrasonic vibrator is also widely performed.
[0003]
For example, as shown in FIG. 3, this type of ultrasonic transducer such as ultrasonic bonding has a configuration in which a transducer 12 having an electrostrictive or magnetostrictive shape such as a piezoelectric body is vertically driven by a signal from an ultrasonic oscillator 11. Vibration is generated, and this vibration passes through the horn 13 and is transmitted to the bonding head 14, causing the head 14 to laterally vibrate. The head 14 acts as a point of action, and friction caused by vibration against the workpiece contacting the head 14. Welding by heat or processing by vibration.
[0004]
[Problems to be solved by the invention]
However, in this type of ultrasonic transducer, the horn 13 is used to increase the amplitude of the vibration excited by the transducer 12, but the shape of the horn 13 is, for example, an export in order to increase the vibration expansion rate. There is a problem that it is necessary to form a substantially conical trapezoidal shape having a complicated curved surface such as a numerical horn, which is very difficult to process.
[0005]
In addition, in order to obtain the resonance frequency from the shape of the horn, a very complicated calculation is required, so that the design of the horn shape has been difficult.
[0006]
[Means for Solving the Problems]
The present inventor uses a simple rod-like body in place of a conventional horn having a complicated curved surface, and has a vibration projection that resonates with the natural frequency of the longitudinal vibration of the rod-like body to generate a lateral vibration. It was found that an ultrasonic transducer having a simple shape and a large amplitude can be obtained by forming it at the maximum amplitude portion, and further by forming an action point at its tip.
[0007]
[Means for Solving the Problems]
That is, the ultrasonic transducer of the present invention, by attaching a vibrator to the part of the rod-shaped body, a vibration substrate which longitudinal vibration Ru biased in the longitudinal direction of the rod-shaped body, it is formed on the side surfaces of the vibrating body Resonant with the longitudinal vibration of the vibration base , bending vibration resonance occurs , and the vibration projections whose tip acts as a point of action, and the vibration projection provided at the tip of the vibration projection to generate frictional heat on the workpiece And an action head to be welded.
[0008]
Moreover, it is desirable that the rod-shaped bodies have substantially the same cross-sectional shape, and it is desirable that the vibration protrusion is formed at the maximum amplitude portion of the vibration base.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
An example of the ultrasonic transducer of the present invention is shown in FIG. FIG. 1 is a perspective view of the ultrasonic transducer 1. According to FIG. 1, the ultrasonic vibrator 1 includes a vibration base 4 including a rod-like body 2 and a vibrator 3 attached to a part thereof.
[0010]
The rod-shaped body 2 is made of metal such as iron, iron-nickel-chromium stainless steel, and nickel-chromium, and the shape thereof is substantially the same in terms of suppression of unnecessary vibration and ease of design. A rod-like body is desirable, and the cross-sectional shape may be circular or polygonal.
[0011]
The vibrator 3 can be made of an electrostrictive piezoelectric material such as barium titanate or lead zirconate titanate, or a magnetostrictive magnetic material such as nickel or ferrite, but can be reduced in size and high. A piezoelectric body is most desirable in that the frequency is available.
[0012]
In addition, the vibrator 3 is formed on a part of the rod-like body 2 and, specifically, can be attached to the end face of the rod-like body or the side surface of the rod-like body, but the vibrator 3 between the drive surfaces. In order to match the mechanical impedance, the vibrator 3 is attached to the end face of the rod-like body 2, and the vibrator 3 is sandwiched between the rod-like body 2 and the rod-like body 2 'that is the same member as the rod-like body 2. It is desirable to be. Further, in order to obtain a larger displacement, a plurality of vibrators 3 may be formed to overlap each other.
[0013]
According to FIG. 1, the vibrator 3 is held by a terminal plate 5, and the terminal plate 5 is connected to an oscillator 6. Then, by applying an ultrasonic signal having a frequency at which the vibrator 3 generates longitudinal vibration to the oscillator 6, the ultrasonic signal is transmitted to the vibrator 3 through the terminal plate 5, and longitudinal vibration occurs in the vibrator 3. The vibration base 4 causes longitudinal vibration.
[0014]
According to the present invention, it is important that the vibration protrusion 7 having a specific shape that resonates with the longitudinal vibration of the vibration base 4 is formed on a part of the side surface of the rod-shaped body 2 of the vibration base 4.
[0015]
The protrusion shape for causing the protrusion provided on the vibration base having the vibrator having the frequency f to resonate is generally a number 1 indicating the relationship between the cantilever rod-like body having substantially the same cross-sectional shape and the frequency f. And can be calculated by Equation 2.
[0016]
[Expression 1]
Figure 0003762111
[0017]
[Expression 2]
Figure 0003762111
[0018]
Here, f is the resonance frequency of the vibration protrusion 7, λ is a frequency coefficient (eg, 4.694), z 4 is the height of the vibration protrusion, E is the Young's modulus of the vibration protrusion, I is the second moment of section, and ρ is The mass density of the vibration protrusion, x 4 is the length of the vibration protrusion, and y is the width of the vibration protrusion.
[0019]
According to the present invention, the height z 4 , the length x 4 , and the width y of the vibration protrusion 7 are determined so that the resonance frequency of the vibration protrusion 7 expressed by the above formulas 1 and 2 matches the frequency of the vibrator. As a result, the vibration protrusion 7 can resonate with the longitudinal vibration excited by the vibration base 4, and as a result, bending vibration resonance having a large displacement amount can be generated at the tip of the vibration protrusion 7.
[0020]
Since the resonance frequency f of the vibration protrusion 7 depends only on the material and shape of the vibration protrusion 7, only the shape of the vibration protrusion 7 satisfies the above conditions in order to obtain the resonance frequency f. Just design.
[0021]
Further, by setting the position of the vibration protrusion 7 to a position where the amplitude of the longitudinal vibration in the vibration base 4 is maximized, it is possible to generate a lateral vibration having the largest displacement at the tip of the vibration protrusion 7.
[0022]
The vibration protrusion 7 is made of metal such as iron, iron-nickel-chromium stainless steel, nickel-chrome steel, or ceramics such as alumina or zirconia, and it is desirable to use a material having characteristics suitable for the operating frequency and application. The shape of the vibration projection 7 is preferably a rod-like body having substantially the same cross-sectional shape, and the cross-sectional shape is not particularly limited. The shape of the rod-like body may be a cylinder, a polygonal column, or a cylinder. Good.
[0023]
Furthermore, in order to increase the symmetry of the vibration mode, the same shape is provided at the position where the vibration protrusion 7 is line-symmetrical with respect to the rod-shaped body 2, that is, the side surface opposite to the side surface on which the vibration protrusion 7 of the rod-shaped body 2 is formed. It is desirable to form the vibration protrusion 7 ′.
[0024]
As described above, a large amount of lateral vibration is generated at the tip of the vibration protrusion 7 due to the vibration of the vibration base 4 and the vibration protrusion 7, and the working head 8 is formed at the tip of the vibration protrusion 7 using this lateral vibration. To do. The working head 8 can be used as a bonding head in so-called wire bonding in which frictional heat is generated by lateral vibration and, for example, a metal such as a gold wire and a semiconductor chip are welded. The working head 8 at the tip of the vibration projection 7 can be processed into a shape that allows easy use of the tip shape according to the application, but a working head 8 made of a different material can be attached to the tip of the vibration projection 7.
[0025]
The material of the working head 8 differs depending on the method of use. For example, when the working head 8 is used as the above-described bonding head, it is desirable that the working head 8 be formed of a material that has good heat conduction, heat resistance, and does not react with the material to be welded. .
[0026]
Moreover, according to FIG. 1, it is also possible to attach the fixture 9 in the position where the amplitude of the longitudinal vibration of the vibration base 4 becomes zero.
[0027]
In FIG. 1, the vibration base 4 and the vibration protrusion 7 are formed as separate bodies, and the ultrasonic vibrator 1 is formed by bonding them together. However, according to the present invention, the invention is limited to this. Instead, the vibration base 4 and the vibration projections 7 may be formed as a single body by grinding or the like.
[0028]
【Example】
As shown in FIG. 2, iron having a length (x 1 ) 43 mm × width (y) 3 mm × height (z 1 ) 3 mm (mass 8 × 10 −10 kgf · s 2 / mm 4 , Young's modulus 21000 kgf / mm 2 , a piezoelectric body made of PZT of length (x 2 ) 2 mm × width (y) 3 mm × height (z 1 ) 3 mm is attached to one end face of the rod-like body 2 made of Poisson's ratio 0.29). Further, a rod-shaped body 2 ′ of length (x 3 ) 5 mm × width (y) 3 mm × height (z 1 ) 3 mm made of the same material as the rod-shaped body 2 was pasted via a terminal plate. . Further, the length (x 4 ) 2 mm × width (y) 3 mm × height (z 4 ) 11 mm made of the same material as the rod-like body 2 at a position of 16 mm in the length direction from the piezoelectric body attaching surface of the rod-like body 2. The ultrasonic vibrator of FIG. 3 with the vibration protrusions attached was prepared.
[0029]
With respect to the obtained ultrasonic vibrator, an ultrasonic signal of 73 kHz was applied to the piezoelectric body via the terminal plate, and the ultrasonic vibrator generated longitudinal vibration with a maximum amplitude of 10 μm. It was 8.5 times.
[0030]
【The invention's effect】
As described above in detail, according to the present invention, it is possible to easily produce an ultrasonic transducer having an extremely simple shape and an amplitude amplification performance equivalent to that of a conventional one. Further, since the ultrasonic transducer of the present invention can be designed relatively easily, the frequency of the ultrasonic signal and the resonance frequency at the point of action of the transducer can be freely selected.
[Brief description of the drawings]
FIG. 1 is a perspective view showing an embodiment of an ultrasonic transducer of the present invention.
FIG. 2 is a view for explaining the shape of an ultrasonic transducer of the present invention.
FIG. 3 is a side view showing an example of a conventional ultrasonic transducer.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Ultrasonic vibrator 2, 2 'Rod-like body 3 Vibrator 4 Vibrating base body 5 Terminal board 6 Oscillator 7, 7' Vibrating protrusion 8 Action head 9 Fixing tool

Claims (3)

棒状体の一部に振動子を取り付けて、該棒状体の長さ方向に縦振動が付勢される振動基体と、該振動基体の側面に形成され、該振動基体の縦振動と共振して曲げ振動共振が発生し、その先端が作用点となる振動突起と、該振動突起の先端に設けられ横振動して被加工物に摩擦熱を発生させ溶接する作用ヘッドとを具備した超音波振動子。Attach the vibrator part of the rod-shaped body, a vibration substrate that will be energized longitudinal vibration in the longitudinal direction of the rod-shaped body, is formed on the side surface of the vibration substrate, and resonates with the longitudinal vibration of the vibrating body Ultrasonic vibration comprising a vibration projection having a bending vibration resonance and its tip serving as a point of action, and a working head that is provided at the tip of the vibration projection and transversely vibrates to generate frictional heat on the workpiece and weld it Child. 前記棒状体が、略同一断面形状であることを特徴とする請求項１記載の超音波振動子。The ultrasonic transducer according to claim 1, wherein the rod-shaped bodies have substantially the same cross-sectional shape. 前記振動突起が、前記振動基体の最大振幅部に形成されてなることを特徴とする請求項１記載の超音波振動子。The ultrasonic transducer according to claim 1, wherein the vibration protrusion is formed on a maximum amplitude portion of the vibration base.
JP24536298A 1998-08-31 1998-08-31 Ultrasonic transducer Expired - Fee Related JP3762111B2 (en)

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US3752380A (en) * 1972-03-13 1973-08-14 Branson Instr Vibratory welding apparatus
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