JP3761721B2 - Monochromator device, X-ray device, and monochromator position adjustment method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a monochromator device used for monochromatic X-rays. The present invention also relates to an X-ray apparatus configured using the monochromator apparatus. The present invention also relates to a position adjusting method for positioning the monochromator at a predetermined position with respect to the X-ray optical axis.
[0002]
[Prior art]
An apparatus for analyzing a sample using X-rays, that is, an X-ray apparatus has been widely known. Further, as this X-ray apparatus, a device using a monochromator is known for extracting characteristic X-rays from X-rays incident on the sample or X-rays diffracted by the sample, that is, for monochromaticizing the X-rays. . In this way, when a monochromator is installed in the X-ray apparatus, the monochromator is placed at an appropriate position with respect to the X-ray optical axis in order to extract characteristic X-rays having high intensity from the monochromator. Need to be done.
[0003]
In order to position the monochromator at an appropriate position with respect to the X-ray optical axis, that is, to position the monochromator at an appropriate position with respect to the X-ray optical axis, conventionally, so-called halving adjustment has been performed on the monochromator. It was. This half adjustment is an adjustment for placing the rotation center of the monochromator, which is the adjustment target, on the incident X-ray. Specifically, in FIG. While the meter is translated in the front-rear direction with respect to the X-ray optical axis X as indicated by an arrow AA ′, the adjustment object 52 is centered around the rotation center axis O1 at each front-rear position as indicated by an arrow F. To find the position where the X-ray intensity detected by the X-ray detector 53 is half the maximum intensity.
[0004]
[Problems to be solved by the invention]
The above half adjustment operation is an operation that must be performed in the conventional monochromator device because the monochromator and the monochromator slit are provided separately from each other. That is, in order for X-rays passing through the monochromator slit to strike the monochromator, the rotation center of the monochromator must be positioned on the X-ray optical axis as a prerequisite. However, the above half-adjustment work is a very troublesome work and requires a very long time. Therefore, the half-adjustment work has conventionally been performed to adjust the entire optical axis of the X-ray apparatus. It was a process that hindered improvement in workability in work.
[0005]
The present invention has been made in view of the above-described problems, and aims to contribute to the improvement of the X-ray optical axis adjustment work of the X-ray apparatus by making it possible to omit the half adjustment work relating to the monochromator. And
[0006]
[Means for Solving the Problems]
(1) In order to achieve the above object, a monochromator device according to the present invention is for a monochromator for monochromatic X-rays and a monochromator disposed on the upstream side of the monochromator with respect to the traveling direction of the X-rays. In a monochromator device having a slit, X-rays that have passed through the monochromator slit reach the monochromator. The monochromator slit is fixed to the monochromator at the diffraction angle of the monochromator, Monochromator Is Monochromator slip One To the body It can rotate around the axis passing through its own X-ray diffraction surface while being held It is characterized by that.
[0007]
As the monochromator, a single crystal monochromator using a single crystal of germanium, a single crystal of silicon, a multilayer monochromator, or the like can be used. The multilayer monochromator here is a monochromator formed by alternately laminating a heavy element layer 54 and a light element layer 55 a plurality of times as shown in FIG. By periodically repeating a multilayer structure of the heavy element layer 54 and the light element layer 55, specific X-rays, for example, CuKα rays can be efficiently diffracted due to the periodic structure of the multilayer film, and as a result, the emission A strong diffracted X-ray can be obtained on the side.
[0008]
For example, W (tungsten) or the like is considered as the heavy element, and examples of the light element include Si (silicon), C (carbon), B _Four C etc. can be considered. Note that a two-layer structure using two kinds of elements or a multi-layer structure using three or more kinds of elements can be considered as the laminated structure.
[0009]
Further, the number of stacked heavy element layers 54 and light element layers 55 can be about 200 in total, for example. Further, the thickness of one cycle composed of one heavy element layer 54 and one light element layer 55 can be set to about 40 to 120 mm, for example.
[0010]
In the first place, the half adjustment for the monochromator is performed by placing the monochromator at a predetermined position on the X-ray optical axis to facilitate the work of arranging the monochromator slit on the upstream side of the monochromator. Because. On the other hand, as in the present invention, if the monochromator and the monochromator slit are previously provided integrally with each other in such a positional relationship that the X-rays that have passed through the monochromator slit reach the monochromator, By simply placing the monochromator at a predetermined position on the X-ray optical axis, X-rays can be automatically incident on the monochromator at a constant incident angle through the monochromator slit. There is no need to do it. For this reason, the optical axis adjustment of the monochromator and the X-ray apparatus using the same can be performed easily and in a short time.
[0011]
(2) In the monochromator device configured as described above, it is desirable that the monochromator is rotatable about a rotation center axis intersecting with the X-ray optical axis. In this way, even when the relative position between the monochromator and the monolithic unit comprising the monochromator slit and the X-ray source changes, the monolithic unit can be easily positioned at a position where X-rays from the X-ray source can be taken.
[0012]
(3) In the monochromator device configured as described above, the monochromator slit is preferably attached to the monochromator so as to guide X-rays to a fixed position on or near the rotation center axis of the monochromator. In this way, if X-rays are always guided to the rotation center of the monochromator, diffracted X-rays with high intensity can be stably obtained from the monochromator.
[0013]
(4) In the monochromator device having the above configuration, the length of the monochromator in the X-ray traveling direction is L, the incident angle of the X-ray to the monochromator is θ, and the slit width of the monochromator slit is W. When
W ≒ L × sinθ
Can be set to With this dimension setting, X-rays passing through the monochromator slit can be reliably guided to the monochromator.
[0014]
(5) Next, an X-ray apparatus according to the present invention includes an X-ray source for generating X-rays, a monochromator for monochromaticizing X-rays generated from the X-ray source, and the monochrome with respect to the traveling direction of the X-rays. X having a monochromator slit disposed on the upstream side of the meter, and a goniometer disposed on the downstream side of the monochromator with respect to the traveling direction of the X-ray to measure the angle of the sample and the X-ray detector. In the line device, X-rays that have passed through the monochromator slit reach the monochromator. The monochromator slit is fixed to the monochromator at the diffraction angle of the monochromator, Monochromator Is Monochromator slip One To the body Rotates around the axis passing through its own X-ray diffraction surface while holding It is characterized by that.
[0015]
If the monochromator and the monochromator slit are previously provided integrally with each other in such a positional relationship that the X-ray that has passed through the monochromator slit reaches the monochromator as in this X-ray apparatus, the monochromator X-rays can be automatically incident on the monochromator at a fixed incident angle through the monochromator slit by simply placing the lens at a predetermined position on the X-ray optical axis. There is no. For this reason, the optical axis adjustment of this X-ray apparatus can be performed easily and in a short time.
[0016]
(6) In the X-ray apparatus having the above-described configuration, it is desirable that the monochromator is rotatable around a rotation center axis intersecting with the X-ray optical axis. In this way, even when the relative position between the monochromator and the monolithic unit comprising the monochromator slit and the X-ray source changes, the monolithic unit can be easily positioned at a position where X-rays from the X-ray source can be taken.
[0017]
(7) In the X-ray apparatus having the above configuration, the monochromator slit is preferably attached to the monochromator so as to guide the X-ray to a fixed position on or near the rotation center axis of the monochromator. In this way, if X-rays are always guided to the rotation center of the monochromator, diffracted X-rays with high intensity can be stably obtained from the monochromator. As a result, highly reliable X-ray measurement can be performed.
[0018]
(8) In the X-ray apparatus having the above configuration, the length of the monochromator in the X-ray traveling direction is L, the incident angle of the X-ray to the monochromator is θ, and the slit width of the monochromator slit is W. When
W ≒ L × sinθ
Can be set to With this dimension setting, the X-rays passing through the monochromator slit can be reliably guided to the monochromator, and therefore the workability of adjusting the optical axis of the X-ray apparatus can be improved.
[0019]
(9) In the X-ray apparatus having the above-described configuration, the goniometer has the following configuration, that is, a θ-rotation table that supports the sample and can rotate around the sample axis, and an upstream side of the θ-rotation table in the X-ray traveling direction. An incident slit disposed in the X-ray, a light receiving slit disposed downstream of the θ turntable in the X-ray traveling direction, an X-ray detector that detects X-rays that have passed through the light receiving slit, and a light receiving slit And a 2θ rotating table that supports the X-ray detector and can rotate independently of the θ rotating table around the sample axis.
[0020]
(10) Next, a monochromator position adjusting method according to the present invention includes: From the X-ray source to the X-ray detector In a position adjustment method for positioning to a predetermined position with respect to an X-ray optical axis , X A monochromator slit is provided integrally with the monochromator on the upstream side of the monochromator with respect to the line traveling direction. The monochromator slit is integrally fixed to the monochromator at a diffraction angle of the monochromator, Crosses the X-ray optical axis And passes through the X-ray diffraction surface of the monochromator The monochromator is positioned by rotating the monochromator about an axis.
[0021]
If this position adjustment method is used, the monochromator and the monochromator slit are previously provided integrally with each other in such a positional relationship that the X-rays that have passed through the monochromator slit reach the monochromator. X-rays can be automatically incident on the monochromator at a constant incident angle through the monochromator slit simply by being placed at a predetermined position on the line optical axis. For this reason, it is not necessary to perform the half adjustment for the monochromator. Therefore, the optical axis of the monochromator and the X-ray apparatus using the monochromator can be adjusted easily and in a short time.
[0022]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 shows an embodiment of a monochromator device according to the present invention. The monochromator device 1 includes a monochromator 2, a monochromator slit 3, and a frame 4 connecting them. The monochromator 2 and the monochromator slit 3 are integrated by the frame 4, that is, the relative positional relationship between them is fixed. The monochromator 2 can be composed of a single crystal such as germanium or silicon, or a multilayer stack of heavy and light element layers as shown in FIG.
[0023]
The monochromator device 1 is rotatable as indicated by an arrow B about a rotation center axis O1 that passes through the X-ray diffraction surface 2a of the monochromator 2 and extends in the direction perpendicular to the paper surface. During this rotation, both the monochromator 2 and the monochromator slit 3 rotate around the axis O1 while maintaining a certain relative positional relationship with each other.
[0024]
The slit width W of the slit 3 is emitted from the X-ray source F. Diffracted by monochromator 2 The position is set so that the optical axis X of the X-ray passes through the rotation center axis O1. Specifically, the length of the monochromator 2 in the X-ray traveling direction is L, and the monochromator 2 Diffract at When the incident angle of X-ray is θ,
W ≒ L × sinθ
W can be set as the slit width of the slit 3.
[0025]
For example, assuming that L = 40 mm and θ = 1.186 °,
W = 40 × 0.0207 = 0.828 ≒ 0.9mm
Set as follows. In actual use, the slit width W is set so as to be within an allowable range of about 1.2 times 0.9 mm.
[0026]
When the monochromator 2 and the monochromator slit 3 are separate from each other as in the conventional monochromator device, first, the monochromator 2 is adjusted in half to rotate the monochromator 2. Position so that the center is placed on the X-ray optical axis X, and then X-rays emitted from the X-ray source F pass through the monochromator slit 3 and reach the diffraction surface 2a of the monochromator 2 An operation of positioning the slit 3 has been performed. This conventional optical axis adjustment work, particularly the half-adjustment work, is very troublesome and time consuming.
[0027]
On the other hand, according to the monochromator device of the present embodiment shown in FIG. 1, the X-rays that have passed through the slit 3 reach a certain position on or near the axis of the rotation center axis O1 of the monochromator 2. Since the relative positional relationship between the slit 3 and the monochromator 2 is fixed in a fixed relationship in advance by the frame 4, the position of the slit 3 can be changed as long as the monochromator 2 is placed at a predetermined position on the X-ray optical axis X. It is automatically positioned at an appropriate position with respect to the monochromator 2, so that it is not necessary to perform a half adjustment with respect to the monochromator 2.
[0028]
Further, when the relative position between the monochromator 2 and the X-ray source F changes as indicated by reference signs F1 and F2, the monochromator 2 is moved to the central axis O1 corresponding to the change in the position of the X-ray source F. The slit 3 can be placed at an appropriate position by simply rotating it as indicated by the arrow B as the center.
[0029]
FIG. 7 shows an embodiment of the X-ray apparatus according to the present invention. This X-ray apparatus includes an X-ray source F that emits X-rays, a monochromator apparatus 1 having the structure shown in FIG. 1, and a goniometer 6. The goniometer 6 includes an incident slit support portion 8 that supports the incident slit 7, a θ rotation base 9 that supports the sample S, and a 2θ rotation base 13 that supports the light receiving slit 11 and the X-ray detector 12. The
[0030]
When X-ray measurement is performed on the sample S, the θ-rotation table 9 that supports the sample S is intermittently or continuously rotated around the sample axis O2 at a predetermined angular velocity, so-called θ rotation, and at the same time, the 2θ-rotation table. 13 is rotated around the sample axis O2 in the same direction as that at an angular velocity twice that of θ rotation, that is, so-called 2θ rotation. The sample axis O2 is an axis that passes through the surface of the sample S, crosses the X-ray optical axis X, and extends in a direction perpendicular to the paper surface.
[0031]
As described above, while the sample S rotates θ and the X-ray detector 12 rotates 2θ, X-rays radiated from the X-ray source F are laterally (ie, parallel to the paper surface) by the slit 3 in the monochromator device 1. In a state where divergence is restricted, the light is incident on the monochromator 2 to be monochromatic. That is, X-rays having a specific wavelength are selected by X-ray diffraction by the monochromator 2.
[0032]
The X-rays thus selected enter the sample S in a state where divergence is restricted by the entrance slit 7. When the Bragg diffraction condition is satisfied between the X-ray and the crystal lattice plane of the sample S, the X-ray is diffracted by the sample S, and the X-ray that passes through the light receiving slit 11 among the diffracted X-rays. The X-ray intensity is calculated based on the detection result detected by the detector 12. As described above, the X-ray diffraction angle 2θ and the intensity value of the diffraction X-ray are obtained for the sample S.
[0033]
In the X-ray measurement described above, various X-ray optical elements such as the X-ray source F, the monochromator device 1, the entrance slit 7, the sample S, the light receiving slit 11, and the X-ray detector 12 constituting the X-ray apparatus are arranged on the X-ray optical axis. It must be done under the condition of being exactly on X. The position adjustment work for setting various X-ray optical systems in such a state is generally called optical axis adjustment of the X-ray apparatus. Hereinafter, the optical axis adjustment work will be described.
[0034]
First, in the state shown in FIG. 2, a position adjustment operation for determining a general positional relationship between the position where the monochromator device 1 is mounted and the goniometer 6 is performed. That is, first, the X-ray optical axis X from the X-ray source F to the X-ray detector 12 is set to be substantially linear. Then, the adjustment first slit 14 is mounted at the position where the monochromator device 1 is mounted, and the adjustment center slit 16 is mounted at the position where the sample S is mounted.
[0035]
The slit width of the adjustment first slit 14 is, for example, 0.05 mm. The slit width of the adjustment center slit is set to 0.05 mm, for example. In order to ensure the safety of the operator, an X-ray absorbing plate (not shown) is mounted at a position as close as possible to the X-ray source F. This X-ray absorbing plate is provided to reduce the intensity of X-rays generated from the X-ray source F to such an intensity that is necessary for adjusting the optical axis and does not adversely affect the human body as much as possible. This X-ray absorption plate is configured by, for example, arranging three copper plates having a thickness of 0.3 mm and three copper plates having a thickness of 0.1 mm.
[0036]
In FIG. 2, the X-ray detection is performed by rotating the entire goniometer 6 by an appropriate angle as indicated by an arrow C around the rotation center axis of the first slit for adjustment 14, that is, the rotation center axis O1 of the monochromator device 1. The relative positional relationship between the goniometer 6 and the adjustment first slit 14 is adjusted so that the intensity of the X-ray received by the device 12 becomes the maximum intensity. As a result, the approximate positional relationship between the monochromator device 1 (see FIG. 7) and the goniometer 6 is determined.
[0037]
Next, in the state shown in FIG. 3, a position adjustment operation for matching the goniometer 6 with the diffraction angle of the monochromator 2 in the monochromator device 1 is performed. That is, first, the adjustment first slit 14 (see FIG. 2) is removed, and the monochromator device 1 is mounted instead. Further, the adjustment center slit 16 is removed. Further, the entire goniometer 6 is adjusted to the diffraction angle 2θ ′ of the monochromator 2 around the rotation center axis O1 of the monochromator.
[0038]
Further, the X-ray detector 12 is brought as close to the X-ray source F as possible so that the X-ray detector 12 can capture as many X-rays as possible. Of course, the X-ray detector 12 needs to be brought closer to the X-ray source F as described above if a sufficient amount of X-rays can be captured even when the X-ray detector 12 is placed at the normal position shown in FIG. There is no. Similarly to the case of FIG. 2, an X-ray absorption plate (not shown) is disposed at a position close to the X-ray source F in order to ensure the safety of the operator.
[0039]
In the above state, the monochromator device 1, that is, both the monochromator 2 and the monochromator slit 3 are rotated by an appropriate angle as indicated by an arrow D around the rotation center axis O1, and the X-ray detector 12 Adjustment is made so that the intensity of the X-ray to be captured becomes the maximum intensity. Thereby, the relative positional relationship between the goniometer 6 and the monochromator device 1 is determined.
[0040]
According to the X-ray apparatus of this embodiment, since the monochromator 2 and the monochromator slit 3 are fixed in advance in a predetermined positional relationship, the monochromator 2 is placed at a predetermined position on the X-ray optical axis X. When placed, the positional relationship between the monochromator 2 and the slit 3 is already as desired, and therefore it is not necessary to perform an operation for adjusting the positional relationship between them.
[0041]
In the conventional X-ray apparatus in which the monochromator 2 and the monochromator slit 3 are provided separately, ie, separately, prior to adjusting the positional relationship between the monochromator 2 and the monochromator slit 3, That is, the half adjustment has to be performed on the monochromator 2 between the process of FIG. 2 and the process of FIG. On the other hand, in this embodiment, it is not necessary to perform such a half adjustment, and as a result, the operations from FIG. 2 to FIG. 3 can be performed very easily and in a very short time. Became.
[0042]
Next, in the state shown in FIG. 4, the relative positional relationship between the goniometer 6 and the monochromator device 1 is adjusted more finely than in the case of FIG. That is, first, the adjustment center slit 16 is mounted again at the position where the sample S is mounted. However, the slit width at this time is 0.5 mm.
[0043]
Then, the entire goniometer 6 is rotationally moved by an appropriate angle as indicated by an arrow C around the rotation center axis O1 of the monochromator 2 so that the X-ray intensity received by the X-ray detector 12 becomes the maximum intensity. The relative positional relationship between the goniometer 6 and the monochromator device 1 is adjusted. That is, the goniometer 6 is brought to the position of the diffracted X-ray beam from the monochromator 2. Thereby, the relative positional relationship between the monochromator device 1 and the goniometer 6 can be determined more accurately.
[0044]
Next, in the state shown in FIG. 5, an adjustment operation for accurately aligning the position of the entrance slit 7 with the X-ray beam is performed. That is, first, the X-ray detector 12 is returned to the normal position from the state shown in FIG. Then, the entrance slit 7 is mounted at a predetermined mounting position of the entrance slit support 8. At this time, the slit width of the entrance slit 7 is, for example, 0.5 mm.
[0045]
Thereafter, with the entrance slit 7, the adjustment center slit 16 and the X-ray detector 12 fixed on a straight line, the entrance slit support 8, the θ turntable 9 and the 2θ turntable 13 are moved to the arrow E around the sample axis O2. As shown by, the X-ray intensity detected by the X-ray detector 12 is adjusted so as to become the maximum intensity by integrally rotating and moving by an appropriate angle. After this adjustment is completed, the θ rotation angle of the θ turntable 9 and the 2θ rotation angle of the 2θ turntable 13 in the goniometer 6 are each set to 0 ° (zero degrees). Thereby, the zero degree adjustment of the goniometer 6 is completed.
[0046]
Next, in the state shown in FIG. 6, adjustment work for aligning the X-ray detector 12 with the X-ray beam is performed. That is, first, the light receiving slit 11 is mounted at a predetermined position on the 2θ turntable 13. In this case, the slit width of the light receiving slit 11 is, for example, 0.1 mm. Thereafter, with the incident slit 7 and the adjustment center slit 16 fixed, the light receiving slit 11 and the X-ray detector 12 are integrally rotated about the sample axis O2 by an appropriate angle so that the X-ray intensity becomes the maximum intensity. Find the angular position. Then, the position is set to 2θ = 0 °.
[0047]
Thus, the optical axis adjustment related to the X-ray apparatus is completed. Thereafter, the adjustment center slit 16 is removed from the θ turntable 9 and a sample S is attached instead of the center slit 16 to complete preparation for X-ray measurement. Subsequent X-ray measurements are as already described in connection with FIG.
[0048]
In the optical axis adjustment work of the X-ray apparatus described above, since the monochromator 2 and the monochromator slit 3 are integrally formed by the frame 4 as shown in FIG. 1, the conventional process shown in FIG. And the half adjustment for the monochromator 2 that had to be performed between the steps shown in FIG. 3 can be omitted. As a result, the optical axis adjustment operation can be performed remarkably easily and quickly.
[0049]
The present invention has been described with reference to the preferred embodiments. However, the present invention is not limited to the embodiments, and various modifications can be made within the scope of the invention described in the claims.
For example, in the embodiment shown in FIG. 7, the monochrome detector according to the present invention is used for a so-called θ-2θ rotating goniometer in which the X-ray detector 12 is rotated in the same direction at an angular velocity twice that of the sample S. A meter device was applied. However, the monochromator device of the present invention is a goniometer having another structure, for example, the X-ray source F and the X-ray detector 12 are rotated in the opposite directions at the same angular velocity while the sample S is held in a fixed state. The present invention can also be applied to a so-called θ-θ rotating goniometer.
[0050]
【The invention's effect】
According to the monochromator device, the X-ray device, and the monochromator position adjusting method according to the present invention, the X-ray that has passed through the monochromator slit in advance through the monochromator and the monochromator slit is allowed to reach the monochromator. Since the monochromators are provided integrally with each other with a certain positional relationship, the X-rays can be automatically incident on the monochromator at a fixed incident angle through the monochromator slit simply by placing the monochromator at a predetermined position on the X-ray optical axis. Therefore, it is not necessary to perform the half adjustment for the monochromator. Therefore, the optical axis adjustment of the monochromator and the X-ray apparatus using the same can be performed easily and in a short time.
[Brief description of the drawings]
FIG. 1 is a plan view showing an embodiment of a monochromator device according to the present invention.
FIG. 2 is a plan view showing one step of X-ray optical axis adjustment work related to the X-ray apparatus.
FIG. 3 is a plan view showing another step of X-ray optical axis adjustment work related to the X-ray apparatus.
FIG. 4 is a plan view showing still another step of the X-ray optical axis adjustment work related to the X-ray apparatus.
FIG. 5 is a plan view showing still another process of the X-ray optical axis adjustment work related to the X-ray apparatus.
FIG. 6 is a plan view showing still another process of the X-ray optical axis adjustment work related to the X-ray apparatus.
FIG. 7 is a plan view showing an embodiment of an X-ray apparatus according to the present invention.
FIG. 8 is a diagram for explaining half adjustment.
FIG. 9 is a diagram schematically illustrating an example of a monochromator.
[Explanation of symbols]
1 Monochromator device
2 Monochromator
2a X-ray diffraction surface of monochromator
3 Slit for monochromator
4 frames
6 Goniometer
7 Incident slit
8 Incident slit support
9 θ turntable
11 Light receiving slit
12 X-ray detector
13 2θ turntable
14 First slit for adjustment
16 Center slit for adjustment
L Monochromator length
O1 Monochromator rotation center axis
O2 sample axis
S sample
W Slit width
X X-ray optical axis

Claims (10)

In a monochromator device having a monochromator for monochromatic X-rays and a monochromator slit disposed on the upstream side of the monochromator with respect to the traveling direction of the X-rays,
The monochromator slit is fixed to the monochromator at the diffraction angle of the monochromator so that X-rays that have passed through the monochromator slit reach the monochromator.
The monochromator is a monochromator and wherein the <br/> can be rotated about an axis passing through its X-ray diffraction plane while holding one body the slit preparative said monochromator. 2. The monochromator device according to claim 1, wherein the monochromator is rotatable about a rotation center axis intersecting with an optical axis of an X-ray incident on the monochromator and diffracted .   3. The monochromator device according to claim 2, wherein the monochromator slit guides X-rays to a fixed position on or near the rotation center axis of the monochromator. In claims 1 one claims 3 Neu Zureka, the length of the X-ray traveling direction of the monochromator L, and the incident angle to the monochromator of X-rays diffracted at the monochromator theta, and the When the slit width of the monochromator slit is W,
W ≒ L × sinθ
A monochromator device characterized by that. An X-ray source generating X-rays;
A monochromator for monochromatic X-rays generated from the X-ray source;
A monochromator slit disposed upstream of the monochromator with respect to the X-ray traveling direction;
An X-ray apparatus having a sample and a goniometer for measuring an angle of an X-ray detector disposed on the downstream side of the monochromator with respect to a traveling direction of the X-ray,
The monochromator slit is fixed to the monochromator at the diffraction angle of the monochromator so that X-rays that have passed through the monochromator slit reach the monochromator.
The monochromator is X-ray apparatus according to claim <br/> rotating about an axis passing through its X-ray diffraction plane while holding the slit preparative the monochromator to a body. 6. The X-ray apparatus according to claim 5, wherein the monochromator is rotatable about a rotation center axis intersecting with an optical axis of an X-ray incident on the monochromator and diffracted .   7. The X-ray apparatus according to claim 6, wherein the monochromator slit guides X-rays to a fixed position on or near the rotation center axis of the monochromator. In claims 5 one claims 7 Neu Zureka, the length of the X-ray traveling direction of the monochromator L, and the incident angle to the monochromator of X-rays diffracted at the monochromator theta, and the When the slit width of the monochromator slit is W,
W ≒ L × sinθ
An X-ray apparatus characterized by that. In Zureka one claims 8 Neu claim 5,
The goniometer is
A θ turntable that supports the sample and can rotate about the sample axis; and
An incident slit disposed on the upstream side of the θ turntable with respect to the X-ray traveling direction;
A light receiving slit disposed on the downstream side of the θ turntable in the X-ray traveling direction;
An X-ray detector that detects X-rays that have passed through the light-receiving slit, and a 2θ-rotation table that supports the light-receiving slit and the X-ray detector and that can rotate independently of the θ-rotation table about the sample axis. A featured X-ray apparatus. In a position adjustment method for positioning a monochromator at a predetermined position with respect to an X-ray optical axis from an X-ray source to an X-ray detector ,
A monochromator slit is provided integrally with the monochromator on the upstream side of the monochromator in the X-ray traveling direction,
The monochromator slit is integrally fixed to the monochromator at the diffraction angle of the monochromator,
The method for adjusting position of the monochromator, characterized by positioning the monochromator by rotating the monochromator about an axis passing through the X-ray diffraction plane of the monochromator with intersects with the X-ray optical axis.

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