JP3751458B2 - Ozone generator - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an ozone generator that generates ozone gas by supplying oxygen gas to a dielectric barrier discharge, and in particular, ozone capable of making a discharge gap uniform by suitably arranging a cylindrical electrode tube / dielectric tube. It relates to a generator.
[0002]
[Prior art]
FIG. 7 shows a coaxial cylinder type ozone generator disclosed in Japanese Patent Publication No. 59-48761. FIG. 7A is a side sectional view of the ozone generator, and FIG. It is sectional drawing along the A line. In the figure, 1 is a power source, 2 is a high voltage electrode made of a conductive film layer formed on the inner peripheral surface of the glass dielectric tube 4, and 3 is arranged coaxially with the glass dielectric tube 4 on which the high voltage electrode 2 is formed. This is a cylindrical ground electrode tube. A glass dielectric tube 4 has a double tube structure with the cylindrical ground electrode tube 3, thereby forming an electrode pair in which a dielectric is inserted between the cylindrical ground electrode and the high voltage electrode. Reference numeral 5 denotes a discharge gap formed between the cylindrical ground electrode tube 3 and the glass dielectric tube 4. When a high voltage is applied to the high voltage electrode 2, discharge occurs and ozone gas is generated. Reference numeral 6 denotes a spring-like spacer (see (b)) installed at the opposing portion of both electrodes to form the discharge gap 5, and reference numerals 7 and 8 denote a supply port and a discharge port for source gas containing oxygen, respectively. ing. Reference numeral 20 denotes a container for storing the above-described components, and 203 denotes a cooling space provided on the outer peripheral side of the cylindrical ground electrode tube 3. Water is supplied from the inlet 202 to the outlet 203 for cooling.
[0003]
The discharge gap 5 is formed by inserting a spring-like spacer 6 on a part of the outer periphery of the glass dielectric tube 4 into the cylindrical ground electrode tube 3, so that the cylindrical ground electrode tube 3 and the glass dielectric tube 4 are connected to each other. They are formed at intervals of about several mm.
[0004]
FIG. 8 shows an ozone generator disclosed in Japanese Patent Laid-Open No. Hei 4-214003, and is a cross-sectional view taken along the same plane as FIG. 7 (b). In this ozone generator, as shown in the figure, three rigid spacers 61, 62, and 63 are divided into three parts of 120 degrees instead of the spring-like spacer 6 in order to make the interval in the coaxial direction of the discharge gap 5 uniform. Inserting. 7 that are the same as those shown in FIG.
[0005]
FIG. 9 shows a large-scale ozone in which a plurality of electrode pairs constituted by the cylindrical ground electrode tube 3 and the glass dielectric tube 4 having the high-voltage electrode 2 formed on the inner peripheral surface are housed in one container 20 as described above. It is a generator, (a) is the sectional side view, (b) is sectional drawing in the BB line of (a). The apparatus in FIG. 9 has a butting structure (tandem structure) in which the electrode pair is inserted into one cylindrical grounded electrode tube 3 from both sides, and two electrodes arranged in the tandem. A total of four electrode pairs, ie, a total of eight electrode pairs, are formed (see (b)). The same components as those in FIG.
[0006]
Next, the operation will be described.
Oxygen gas or dry air is supplied to the discharge gap 5, and an alternating high voltage is applied between the electrodes formed by the cylindrical ground electrode tube 3 and the glass dielectric tube 4 having the high voltage electrode 2 formed on the inner peripheral surface. Thus, a dielectric barrier discharge is generated. Oxygen gas is dissociated by the discharge and ozone is generated by three-body collision between oxygen atoms and oxygen molecules. The generated ozone is taken out from the outlet 8 as ozonized gas. The generation efficiency of ozone extracted by this discharge is said to be about 20% at the maximum, and 80% of the electric power required for the discharge is lost by heating the electrodes.
[0007]
The ozone generation efficiency depends on the electrode temperature (strictly, the discharge gas temperature), and the generation efficiency increases as the electrode temperature decreases. Therefore, in order to realize an apparatus with good ozone generation efficiency, the gap length of the discharge gap 5 is made uniform and as small as possible, and the electrode is directly cooled with water or the like.
[0008]
[Problems to be solved by the invention]
Since the conventional ozone generator is configured as described above, when the gap length of the discharge gap is reduced to about 0.3 mm or less, the glass dielectric tube 4 is accurately installed on the cylindrical ground electrode tube 3. In this range, the accuracy of the gap length was deteriorated and the ozone generation performance was lowered, or the glass dielectric tube 4 was broken when inserted.
[0009]
In addition, when the gap length of the discharge gap 5 is 0.3 mm or less, if oxygen gas is allowed to flow into the discharge gap 5, the pressure loss of the gas in the discharge gap 5 increases, so that the glass dielectric tube 4 is at the gas pressure. It may move in the axial direction, possibly causing a decrease in ozone generation efficiency and damage to the glass dielectric tube 4.
[0010]
The present invention has been made to solve the above-described problems. Ozone generation in which the gap length of the discharge gap can be set to the smallest possible value of 0.3 mm or less with high positional accuracy and easy operation. The object is to obtain a device.
[0011]
Another object of the present invention is to provide an ozone generator capable of preventing the glass dielectric tube from moving in the axial direction due to the pressure of the supply gas described above.
[0012]
Another object of the present invention is to provide an ozone generator that can prevent the glass dielectric tube from being damaged when a plurality of electrode pairs are installed.
[0013]
[Means for Solving the Problems]
A plurality of ozone generators according to the present invention are arranged at both ends of a cylindrical electrode tube or dielectric tube, and the radial installation positions of the cylindrical electrode tube or dielectric tube are adjusted so that the discharge gap is uniform. -A support jig is provided for fixing.
[0014]
In the ozone generator according to the present invention, the support jig includes a support hole including a long hole extending in the radial direction of the cylindrical electrode tube or the dielectric tube, and is fixed by a support bolt penetrating the support hole. It is characterized by this.
[0015]
The ozone generator according to the present invention is characterized in that a plurality of ozone generators are arranged at one end of a cylindrical electrode tube pair and provided with a fixing jig for fixing the installation position of the dielectric tube in the axial direction. is there.
[0016]
The ozone generator according to the present invention is characterized in that the fixing jig is installed only at the end of the cylindrical electrode tube pair on the downstream side of the raw material gas flow.
[0017]
The ozone generator according to the present invention comprises a plurality of cylindrical electrode tube pairs and a protective jig for protecting the end of the dielectric tube of the cylindrical electrode tube pair, and the cylindrical electrode is interposed via the protective jig. The pipe pairs are arranged so as to face each other in the axial direction.
[0018]
DETAILED DESCRIPTION OF THE INVENTION
An embodiment of the present invention will be described below.
Embodiment 1 FIG.
1A and 1B are diagrams showing an ozone generator according to Embodiment 1 of the present invention, in which FIG. 1A is a side sectional view of the apparatus, and FIG. 1B is a sectional view taken along line CC in FIG. In the figure, 1 is a power source, 2 is a high-voltage electrode (cylindrical electrode tube) made of a conductive film layer formed on the inner peripheral surface of the glass dielectric tube 4, and 3 is a glass dielectric on which the high-voltage electrode 2 is formed. This is a cylindrical ground electrode tube (cylindrical electrode tube) arranged coaxially with the tube 4. Reference numeral 4 denotes a glass dielectric tube (dielectric tube). By forming a double tube structure with the cylindrical ground electrode tube 3, an electrode pair in which a dielectric is inserted between the cylindrical ground electrode and the high voltage electrode. Form. Reference numeral 5 denotes a discharge gap formed between the cylindrical ground electrode tube 3 and the glass dielectric tube 4. The position of the glass dielectric tube 4 is adjusted and fixed by the supporting jigs 601 and the supporting bolts 602 installed at both ends of the cylindrical ground electrode tube 3 to form the discharge gap 5.
[0019]
The specific structure of the support jig 601 has a flat plate shape as shown in FIG. 1B, and extends in the radial direction of the end surfaces of the cylindrical ground electrode tube 3 and the glass dielectric tube 4 at the center. A support hole 60 made of a long hole is provided. The support jig 601 is fixed to the end surface of the cylindrical ground electrode tube 3 by a support bolt 602 that passes through the support hole 60.
[0020]
Next, the adjustment operation of the gap length of the discharge gap 5 will be described.
Since the support jig 601 includes a support hole 60 made of a long hole extending in the end face radial direction of the cylindrical ground electrode tube 3 and the glass dielectric tube 4, the cylindrical ground electrode is loosened by loosening the support bolt 602. It can be moved (finely adjusted) in the radial direction with respect to the tube 3, whereby the position of the glass dielectric tube 4 with respect to the cylindrical ground electrode tube 3 can be easily adjusted suitably.
[0021]
In order to further facilitate the above adjustment operation, a gap length adjusting jig as shown in FIG. 2 may be used. This jig for adjusting the gap length is composed of a straight pipe whose outer circumference is equal to the inner circumference of the cylindrical ground electrode tube 3 and whose tube thickness is a desired gap length, and the tip is inserted into the cylindrical ground electrode tube 3. The concave portion 10 is formed in the axial direction so as not to hit the support jig 601 when it is done.
[0022]
An adjustment operation using the gap length adjusting jig will be described.
A gap length adjusting jig is inserted into the cylindrical ground electrode pipe 3, and a glass dielectric tube 4 is inserted into the gap length adjusting jig. As a result, the concentricity of the cylindrical ground electrode tube 3 and the glass dielectric tube 4 can be easily adjusted, and the facing distance between the two tubes becomes a desired gap length. If the glass dielectric tube 4 is fixed by the support jig 601 and this operation is performed at both ends, then the gap length adjusting jig is extracted, and the gap length adjusting operation is completed.
[0023]
As described above, according to the first embodiment, since the discharge gap 5 is formed by the support jig 601 capable of adjusting the gap length, the discharge gap 5 has an extremely small gap length of 0.3 mm or less. Can be uniformly and accurately coaxially arranged, whereby an ozone generator with high concentration and high generation efficiency can be obtained. In addition, even when the installation position is displaced, it can be easily adjusted, and damage due to mechanical distortion of the glass dielectric tube 4 can be suppressed as compared with the conventional spacer.
[0024]
Embodiment 2. FIG.
3A and 3B are views showing an ozone generator according to Embodiment 2 of the present invention, in which FIG. 3A is a side sectional view of the device, and FIG. 3B is a sectional view taken along line DD in FIG. In the second embodiment, in addition to the components of the first embodiment, a crank-shaped position fixing jig for fixing the axial position of the glass dielectric tube 4 is provided on the end surface of the cylindrical ground electrode tube 3. It is. In the figure, reference numeral 603 denotes a crank-shaped position fixing jig (fixing jig) for fixing the axial position of the glass dielectric tube 4 described above. The same components as those in FIG. 1 are denoted by the same reference numerals, and the description thereof is omitted.
[0025]
The crank-shaped position fixing jig 603 is fixed to the end of the cylindrical ground electrode tube 3 together with the support jig 601 according to the first embodiment (see (b)), and the end is a glass dielectric tube. 4 supports the downstream end of the raw material gas flow. This prevents the glass dielectric tube 4 from moving inside the cylindrical ground electrode tube due to the pressure of the supply gas.
[0026]
As described above, in the second embodiment, the position of the glass dielectric tube can be prevented from moving downstream of the raw material gas flow by the crank-shaped position fixing jig, and abnormal discharge due to this can be suppressed. . In addition, since the glass dielectric tube is firmly fixed, the pressure of the supply gas can be increased and the high pressure ozone gas can be taken out.
[0027]
FIG. 4 shows a modification of the ozone generator according to the second embodiment, in which the inflow direction of the supply gas is reversed from the above. In the figure, reference numeral 603a denotes a fixing jig (fixing jig), which is not a crank shape but a cylindrical pan shape. Reference numeral 603p denotes a plurality of gas through holes provided in the fixing jig 603a, and is a through hole for the generated ozone gas. As a result, the movement of the glass dielectric tube 4 due to the pressure of the supply gas can be prevented as described above.
[0028]
The fixing jigs 603 and 603a up to the above are rigid ones, but use two Teflon strips or string-like ones and cross them diagonally at the end of the cylindrical ground electrode tube 3 and tighten them. Also good.
[0029]
Embodiment 3 FIG.
FIG. 5 is a side sectional view showing an ozone generator according to Embodiment 3 of the present invention. The ozone generator according to Embodiment 3 constitutes a large ozone generator that can generate a large volume of ozone gas by using a plurality of electrode pairs composed of a cylindrical ground electrode tube 3 and a glass dielectric tube 4. ing. In the figure, 6 is a spring-like spacer for forming a discharge gap 5 that has been conventionally used, 7a is a raw material gas supply port provided at the center of the apparatus, and 8a and 8b are ozone gas exhausts provided at both ends of the apparatus. An outlet 20 is a container for storing a plurality of electrode pairs. Other constituent elements that are the same as those in the first or second embodiment are denoted by the same reference numerals, and the description thereof is omitted.
[0030]
The structure in which the source gas is supplied from the center of the apparatus and the ozone gas generated from both ends of the apparatus is discharged can supply a large volume of ozone gas, but is supplied when the gap length of the discharge gap 5 is 0.3 mm or less. The apparatus structure for preventing the movement of the glass dielectric tube due to the pressure loss of the raw material gas is complicated and has not been adopted because the cost is increased. Therefore, in the third embodiment, the fixing jig (fixing jig) 603 described in the second embodiment is simply installed so as to fix only the end portion of the glass dielectric tube 4 on the downstream side of the raw material gas flow. Using an electrode pair with a structure, and having a tandem structure in which the electrode pairs are arranged to face each other, an ozone generator that supplies raw material gas from the center of the apparatus and discharges ozone gas generated from both ends of the apparatus is configured. .
[0031]
As described above, according to the third embodiment, by using an electrode pair having a simple structure in which the fixing jig 603 is provided only at the downstream end of the raw material gas flow of the glass dielectric tube 4, An effect is obtained in which a large-sized ozone generator capable of supplying raw material gas from the central part of the apparatus and taking out ozone gas generated from both ends of the apparatus can be obtained.
[0032]
Embodiment 4 FIG.
The ozone generator according to the fourth embodiment is a large ozone generator having a tandem structure similar to that of the third embodiment and having a plurality of electrode pairs housed in the container 20. A conventional mechanism for supplying ozone gas from one end of the apparatus and discharging the generated ozone gas from the other end is adopted.
[0033]
6 is a side sectional view of an ozone generator according to Embodiment 4 of the present invention. In the figure, reference numeral 7 denotes a source gas supply port, 8 denotes a generated ozone gas discharge port, and 9 denotes a protective device that is disposed at a portion where each electrode pair is abutted and is mounted so as to cover the end of the glass dielectric tube 4. It is a material (protective jig). Furthermore, the downstream end portion of the raw material gas flow of the glass dielectric tube 4 of the electrode pair is fixed by a fixing jig (fixing jig) 603.
[0034]
Since the position of the electrode pair is fixed by combining the protector material 9 and the fixing jig 603, the movement of the glass dielectric tube 4 to the downstream side of the raw material gas flow due to the raw material gas pressure can be prevented. . Further, it is possible to prevent breakage due to contact of the end portions of the glass dielectric tube 4 abutted when the glass dielectric tube 4 is inserted into the cylindrical ground electrode tube 3.
[0035]
As described above, in the fourth embodiment, the raw material gas pressure can be obtained only by using an electrode pair having a simple structure in which the protective device 9 and the fixing jig 603 are combined with the conventional large tandem ozone generator. Generation of large-scale ozone that can prevent the glass dielectric tube 4 from moving downstream of the raw material gas flow due to gas and the glass dielectric tube 4 from being damaged when the glass dielectric tube 4 is inserted into the cylindrical ground electrode tube 3 Since an apparatus can be obtained, the effect that it is advantageous in cost is acquired.
[0036]
【The invention's effect】
As described above, according to the present invention, a plurality of cylindrical electrode tubes or dielectric tubes are disposed at both ends of the cylindrical electrode tube or dielectric tube, and the radial positions of the cylindrical electrode tube or dielectric tube are set so that the discharge gap is uniform. A support jig that adjusts and secures the air gap, so that even with a very small gap length of 0.3 mm or less, the coaxial arrangement can be arranged uniformly and accurately, which enables high concentration and high generation efficiency. An ozone generator can be obtained. In addition, even when the installation position is displaced, it can be easily adjusted, and the dielectric tube can be prevented from being damaged due to mechanical distortion.
[0037]
According to the present invention, the support jig includes the support hole made of the elongated hole extending in the radial direction of the cylindrical electrode tube or the dielectric tube, and is fixed by the support bolt penetrating the support hole. Even with a very small gap length of 0.3 mm or less, the coaxial arrangement can be made uniformly and accurately, and thus an ozone generator with high concentration and high generation efficiency can be obtained. In addition, even when the installation position is displaced, it can be easily adjusted, and the dielectric tube can be prevented from being damaged due to mechanical distortion.
[0038]
According to the present invention, a plurality of pieces are arranged at one end of the cylindrical electrode tube pair, and the fixing jig for fixing the installation position of the dielectric tube in the axial direction is provided. The movement of the position of the body tube can be prevented, and abnormal discharge due to this can be suppressed. Moreover, since the fixing of the installation position in the axial direction of the dielectric tube is strengthened, a high-pressure raw material gas can be supplied, so that there is an effect that a high-pressure ozone gas can be generated.
[0039]
According to the present invention, since the fixing jig is installed only on the end surface of the cylindrical electrode tube pair on the downstream side of the raw material gas flow, the position of the dielectric tube to the downstream side of the raw material gas flow can be prevented. It is possible to suppress the abnormal discharge due to.
[0040]
According to the present invention, a plurality of cylindrical electrode tube pairs and a protective jig for protecting the end portion of the dielectric tube of the cylindrical electrode pair are provided. Since they are arranged so as to face each other in the axial direction, the dielectric tube is prevented from moving downstream of the raw material gas flow due to the pressure of the raw material gas or being damaged when the dielectric tube is inserted into the cylindrical electrode tube. The large ozone generator which can be obtained can be obtained, and since the structure is simple, it is advantageous in terms of cost.
[Brief description of the drawings]
FIG. 1 is a diagram showing an ozone generator according to Embodiment 1 of the present invention, in which (a) is a side sectional view of the device, and (b) is a sectional view taken along line CC in (a). .
FIG. 2 is a perspective view showing a gap length adjusting jig provided to further facilitate the discharge gap adjustment operation.
FIGS. 3A and 3B are diagrams showing an ozone generator according to Embodiment 2 of the present invention, in which FIG. 3A is a side sectional view of the device, and FIG. 3B is a sectional view taken along line DD in FIG. .
FIG. 4 is a side sectional view showing a modification of the ozone generator according to the second embodiment.
FIG. 5 is a side sectional view showing an ozone generator according to Embodiment 3 of the present invention.
FIG. 6 is a side sectional view of an ozone generator according to Embodiment 4 of the present invention.
7A and 7B are diagrams showing a conventional ozone generator, where FIG. 7A is a side sectional view of the ozone generator, and FIG. 7B is a sectional view taken along line AA in FIG.
FIG. 8 is a view showing a conventional ozone generator, and is a cross-sectional view taken along the same plane as FIG. 7 (b).
FIG. 9 is a conventional large ozone generator using a plurality of electrode pairs, (a) is a side sectional view thereof, and (b) is a sectional view taken along line BB of (a).
[Explanation of symbols]
2 High-voltage electrode (cylindrical electrode tube), 3 Cylindrical ground electrode tube (cylindrical electrode tube), 4 Glass dielectric tube (dielectric tube), 5 Discharge gap, 9 Protective material (protective jig), 60 Support hole, 601 Support jig, 602 Support bolt, 603 Crank-shaped position fixing jig (fixing jig), 603a Cylindrical pan-shaped position fixing jig (fixing jig).

Claims (5)

A cylindrical electrode tube pair that is coaxially disposed and forms a double tube structure, and a dielectric that is disposed on the same axis as the cylindrical electrode tube pair and that is interposed in a gap facing each cylindrical electrode tube. A body tube and a discharge gap formed by a gap between each cylindrical electrode tube of the cylindrical electrode tube pair via the dielectric tube, and a source gas flows into the cylindrical electrode tube pair, In an ozone generator that generates ozone gas by applying a high voltage to the discharge gap,
A plurality of support jigs arranged at both ends of the cylindrical electrode tube or dielectric tube to adjust and fix the radial installation position of the cylindrical electrode tube or dielectric tube so that the discharge gap is uniform. An ozone generator characterized by comprising: The support jig
Provided with a support hole consisting of a long hole extending in the radial direction of a cylindrical electrode tube or dielectric tube,
2. The ozone generator according to claim 1, wherein the ozone generator is fixed by a supporting bolt penetrating the supporting hole. A cylindrical electrode tube pair that is coaxially disposed and forms a double tube structure, and a dielectric that is disposed on the same axis as the cylindrical electrode tube pair and that is interposed in a gap facing each cylindrical electrode tube. A body tube and a discharge gap formed by a gap between each cylindrical electrode tube of the cylindrical electrode tube pair via the dielectric tube, and a source gas flows into the cylindrical electrode tube pair, In an ozone generator that generates ozone gas by applying a high voltage to the discharge gap,
An ozone generator comprising a plurality of fixing jigs arranged at one end of the pair of cylindrical electrode tubes and configured to fix an installation position in the axial direction of the dielectric tube. The fixture is
4. The ozone generator according to claim 3, wherein the ozone generator is installed only at the end of the cylindrical electrode tube pair on the downstream side of the raw material gas flow. A plurality of cylindrical electrode tube pairs;
A protective jig for protecting the end of the dielectric tube of the cylindrical electrode tube pair,
The ozone generator according to claim 4, wherein the cylindrical electrode tube pair is disposed so as to face each other in the axial direction through the protective jig.

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