JP3750156B2 - Manufacturing method of iron disilicide - Google Patents
Manufacturing method of iron disilicide Download PDFInfo
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- JP3750156B2 JP3750156B2 JP16567295A JP16567295A JP3750156B2 JP 3750156 B2 JP3750156 B2 JP 3750156B2 JP 16567295 A JP16567295 A JP 16567295A JP 16567295 A JP16567295 A JP 16567295A JP 3750156 B2 JP3750156 B2 JP 3750156B2
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- JRACIMOSEUMYIP-UHFFFAOYSA-N bis($l^{2}-silanylidene)iron Chemical compound [Si]=[Fe]=[Si] JRACIMOSEUMYIP-UHFFFAOYSA-N 0.000 title claims description 21
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 70
- 239000000843 powder Substances 0.000 claims description 30
- 229910052742 iron Inorganic materials 0.000 claims description 29
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 25
- 238000005551 mechanical alloying Methods 0.000 claims description 20
- 229910052710 silicon Inorganic materials 0.000 claims description 20
- 239000010703 silicon Substances 0.000 claims description 20
- 239000002994 raw material Substances 0.000 claims description 17
- 238000006467 substitution reaction Methods 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 5
- 229910021332 silicide Inorganic materials 0.000 claims description 4
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 4
- 238000005275 alloying Methods 0.000 claims description 3
- 238000005245 sintering Methods 0.000 claims description 3
- 238000002441 X-ray diffraction Methods 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 238000002844 melting Methods 0.000 description 5
- 230000008018 melting Effects 0.000 description 5
- 239000011863 silicon-based powder Substances 0.000 description 5
- 239000007789 gas Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 238000010298 pulverizing process Methods 0.000 description 4
- 238000000227 grinding Methods 0.000 description 3
- 239000011572 manganese Substances 0.000 description 3
- 238000000634 powder X-ray diffraction Methods 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000005280 amorphization Methods 0.000 description 1
- -1 amorphization Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 231100000956 nontoxicity Toxicity 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
Description
【0001】
【産業上の利用分野】
本発明は、熱電変換素子として有望な材料であるβ相二珪化鉄の製造方法に関する。
【0002】
【従来の技術】
熱電変換材料は環境汚染物質を排出せず、騒音を出さず、またメンテナンスフリーであるエネルギー源として注目されている材料である。現在、商業生産されているのは熱電冷却用素子が中心であるが、熱電発電についても徐々に市場が形成されるものと期待されている。β相二珪化鉄は耐酸化性、耐熱性に優れていること、毒性がないこと、原料が安価なこと、200〜900℃において比較的高いゼーベック係数を有することにより特に注目されている。
【0003】
二珪化鉄は、焼結体または薄膜の熱電変換材料として用いられる。本発明は、二珪化鉄の焼結体用粉末または焼結体の製造方法に関するものである。二珪化鉄の焼結体の従来の製造方法は、鉄とシリコンなどを含む原料を高温で溶融させた後にインゴットとして凝固させ、ε相とα相の共晶物を得た後、これを微粉砕して、得られた粉末を加圧形成したものを1100℃以上で焼結させ、その後β相安定領域で長時間熱処理を行うことによってβ相とする方法である。
【0004】
しかしながら、この従来の方法は、高温で溶融すること、β相二珪化鉄を生成させるために長時間の熱処理を要することにより、エネルギー消費量が多く、生産に影響を与えている(例えば、特開昭59−56781号公報)。
【0005】
これに対して、近年メカニカルアロイング法によるβ相二珪化鉄の製法が提案されている。フランス特許明細書第8,809,896号(1988)には、遷移金属元素などとカーボンまたはシリコンとをメカニカルアロイング処理を行って、炭化物または珪化物を製造する方法が開示されている。その中で珪化鉄については、鉄とシリコンの粉末(原子比1:2)を振動ボールミルで24時間処理したものは、α、β、ε相の混合物であったと実施例に記載されている。
【0006】
特開平6−81076号公報においては、鉄とシリコンの原料粉末を粉砕混合する工程、成形する工程および焼結する工程からなるβ相二珪化鉄の製造方法が開示されている。この方法によると鉄とシリコンの粉末をボールミルで100時間粉砕したものを950℃でホットプレスした焼結体はβ、ε相の混合物であった。
【0007】
特開平6−92619号公報には、鉄とシリコンの原料粉末(モル比1:2.1〜1:3.5)をメカニカルアロイングし、次いで熱処理することによる二珪化鉄の製造方法が開示されている。この方法によると、鉄とシリコンの粉末(1:2.2〜1:3.0)を振動ボールミルで10時間処理し、これを成形したのち900℃で80〜100時間熱処理を行ったものはβ、ε相の混合物であり、ε相は2〜10%であった。
【0008】
【発明が解決しようとする課題】
メカニカルアロイング法による上記の3発明は、前記の溶融法に比較して高温溶融を必要としない点でエネルギー消費量が少ないという利点をもつものである。しかし一方では、得られた焼結体はβ相のほかにε相を含むという問題点がある。熱電変換特性に有効であるのはβ相であるから、ε相の生成をできるだけ抑制するのが好ましいのである。
本発明は、メカニカルアロイング法においてε相の生成を抑制し、さらにメカニカルアロイングに要する時間を短縮して生産効率を高めることを目的とするものである。
【0009】
【課題を解決するための手段】
本発明者らは、上記課題を解決するために鋭意検討を進めた結果、Fe:Si原子比が1:2.0を超え1:3.0以下である混合粉末を用い、原料の鉄が20%以下に消費されるまでメカニカルアロイングを行うことによりα相とε相を生成せしめた粉末を熱処理すると、実質的に殆どがβ相である二珪化鉄焼結体を得ることを見い出し、本発明を完成するに到った。
【0010】
また、本発明者らは、メカニカルアロイング法において、ディスクミルを用いることによって比較的短時間でα相とε相を生成せしめることを見い出したものである。
【0011】
すなわち、本発明は
〔1〕鉄およびシリコンを含む粉末をメカニカルアロイングし、次いで熱処理するβ相二珪化鉄の製造方法において、
(1)原料の粉末に含まれる鉄とシリコンの原子比が1:2.2を超え1:3.0以下になるように原料を調製し、
(2)原料の鉄が20%以下に消費されるまでディスクミルを用いてメカニカルアロイングを行うことによりα相およびε相珪化鉄を生成せしめ、次いで
(3)成形し、熱処理して焼結体を得る
ことを特徴とするβ相二珪化鉄焼結体の製造方法。
【0012】
〔2〕原料の鉄またはシリコンの一部分の代りに置換用金属元素が添加された原料を用いる前記項〔1〕記載のβ相二珪化鉄焼結体の製造方法。
【0014】
本発明における原料粉末である鉄、シリコンおよび置換用金属元素は工業用グレードの粉末が用いられるが、好ましくは99重量%以上の純度のもの、より好ましくは99.9重量%以上のものが用いられる。熱電変換特性は二珪化鉄に添加される金属の種類、量に依存することが周知の事実であり、従って予期せぬ不純物を避けるために粉末の純度が高い方が好ましいのである。
【0015】
原料粉末中における鉄とシリコンの仕込比率は、鉄とシリコンの原子比または(鉄+置換用金属元素)とシリコンの原子比が1:2.2をこえ1:3.0以下の範囲内である必要がある。1:2.2よりもシリコンが少ない場合は、焼成後のε相が多くなり好ましくない。1:3.0を超える場合は焼成後にシリコンの成分が存在し、そのために二珪化鉄の純度が低下することになる。
【0016】
本発明における置換用金属元素とは、鉄またはシリコンの一部分を置換することによって半導体特性を付与するものであって、p型半導体とするためにMn、Cr、V、Alなどで、n型半導体とするためにCo、Ni、Ptなどで置換することができる。置換の割合は公知の程度でよく、0.5〜10原子%が例示される。
【0017】
本発明においてメカニカルアロイングとは、物質に機械的粉砕または摩砕の力を作用させることにより、微粒化、非晶質化、固溶化、化学反応などを生成せしめることをいう。メカニカルアロイングについては、近年研究例が増大しつつあり、例えば「有機・無機物のメカノケミストリー」(久保、工業資料センター、1993年)に詳細な記載がある。
【0018】
従来より、メカニカルアロイングを行う装置としては、回転ボールミル、振動ボールミル、遊星ボールミルなどが知られている。なかでも本発明のメカニカルアロイングに用いられる装置としては、衝撃力の大きなディスクミルを用いる。ディスクミルは従来分析用試料を得るための粉砕装置として使用されてきていた。本発明者らは、これを物質合成のために使用することを提案するものである。通常、ディスクミルはベッセル、リング、ストーンの3種の組合せから構成され、ベッセルの容積として、50cc、100ccなどがある。材質は、タングステンカーバイド、ステンレス、アルミナ、ジルコニアなどがある。
【0019】
ディスクミルに仕込む粉体の量は、必ずしも規定されないが、ベッセル容積の30体積%前後が好ましい。メカニカルアロイングを行う時間は仕込んだ鉄が殆ど消費されるまでの時間であり、原料の種類にも依存するが、例えば20〜60分間が例示される。本発明において鉄が殆ど消費されるまでとは、粉末X線回折(線源:CuKα)により鉄の回折線(2θ=44.7)について粉砕前と後を比較し、20%以下になるまでを意味する。
【0020】
鉄とシリコンとをメカニカルアロイングする場合、生成するε相の回折線(2θ=45.2)と上記の鉄の回折線が近いため、鉄が減少し、ε相が増加するとついには鉄の回折線はε相の回折線の肩部となり、回折強度を正確に読み取れなくなる。従って、便宜上20%以下という基準をおいたものである。
【0021】
メカニカルアロイングにおける雰囲気ガス圧力については、特に限定はない。
またガス成分についても、特に限定はされず、不活性ガス、酸素、窒素或いはその混合ガスなどが例示される。
【0022】
本発明の方法は、メカニカルアロイングすることにより、α相とε相の生成した粉末を熱処理することに特徴がある。従って、メカニカルアロイング後の粉末においてα相(2θ=17.3)とε相(2θ=45.2)の粉末X線回折線が存在する必要がある。
【0023】
本発明において熱処理とは、β相二珪化鉄の分解温度以下において一定時間保持することをいう。置換用金属元素によって異なるが、例えば、850〜950℃の温度範囲が挙げられる。この熱処理には、冷間プレスしたものの焼成、ホットプレス、熱間静水圧プレスなどが含まれる。
【0024】
熱処理の雰囲気は真空下が好ましく、不活性ガス、窒素、酸素或いはその混合ガスなども用いられる。
【0025】
【実施例】
以下に実施例によって本発明をさらに詳細に例示するが、本発明はこれらの実施例に限定されるものではない。
また、以下の実施例において、熱処理された形成体または粉末のX線回折によるε相の存在割合は、β相(2θ=29.1)の回折強度を100としたときのε相(2θ=45.2)の回折強度の割合を百分率表示したものである。
【0026】
実施例1
鉄粉末(高純度化学(株)製、純度99.9%、粒径300メッシュ以下)16.23gとシリコン粉末(レアメタリック社製、純度99.99%、粒径150メッシュ以下)18.77gをディスクミル(Herzog社製、ベッセル100cc、タングステンカーバイド製)に仕込み(Fe:Si=1:2.3)、窒素置換後に、15分間ずつ3回メカニカルアロイング処理をした。得られた粉末の粉末X線回折から、鉄の残留は20%以下で、α相とε相が検出された。得られた粉末4.00gを冷間プレス機にて直径13mm、高さ12mmに成形し(プレス圧3.4t/cm2 )、真空下(2×10-4mmHg)、900℃で4時間熱処理を行った。得られた成形体のX線回析からβ相であり、ε相は検出されなかった。
【0027】
実施例2
実施例1において、鉄粉末14.78g,マンガン粉末(フルウチ化学(株)製、純度99.9%、粒径300メッシュ以下)1.44g、シリコン粉末18.78gを仕込んだこと(Fe:Mn:Si=0.94:0.06:2.3)、および冷間プレス圧1.0t/cm2 としたこと以外は実施例1と同様にして焼結体を得た。焼結体中のε相は1%であった。
【0028】
実施例3
実施例2において仕込粉末組成をFe:Mn:Si=0.97:0.03:2.3にしたこと以外は実施例2と同様にして焼結体を得た。焼結体中のε相は1%であった。
【0029】
実施例4
実施例2と同様にして、メカニカルアロイングして得られた粉末8.00gをホットプレス機にて直径20mm、高さ9mmに成形した(900℃、1時間、圧力1.0t/cm2 、雰囲気アルゴン)。得られた成形体のX線回折からβ相であり、ε相は検出されなかった。
【0030】
実施例5
実施例1において、鉄粉末15.73g、コバルト粉末(フルウチ化学(株)製、純度99.9%、粒径300メッシュ以下)0.51g、シリコン粉末18.76gを仕込んだこと(Fe:Co:Si=0.94:0.06:2.3)、および冷間プレス圧1.0t/cm2 としたこと以外は実施例1と同様にして焼結体を得た。焼結体中のε相は1%であった。
【0034】
比較例1
実施例1においてメカニカルアロイング処理を15分と5分の2回行ったこと以外は実施例1と同様にしてメカニカルアロイング処理された粉末を得た。得られた粉末のX線回析から鉄の残留は53%で、α相が検出された。この粉末1.5gを石英容器に入れ、真空下(2×10-4mmHg)に900℃、4時間焼成した。得られた粉末のX線回析からβ相のほかにε相が29%存在していた。
【0035】
比較例2
粉末(高純度化学(株)製、純度99.9%、粒径300メッシュ以下)16.58gとシリコン粉末(レアメタリック社製、純度99.99%、粒径150メッシュ以下)19.42gを回転ボールミル(ステンレス製ミル直径120mm、長さ120mm、ステンレスボール直径9.5mm)に仕込み(Fe:Si=1:2.33)、窒素置換後に95rpmで200時間メカニカルアロイング処理した。得られた粉末のX線回析から鉄の残留は53%で、α相は検出されなかった。この粉末を冷間プレス機にて直径13mm、高さ13mmに成形し(プレス圧1.0t/cm2 )、真空下(2×10-4mmHg)、4時間熱処理した。得られた成形体のX線回析からβ相のほかにε相が35%存在していた。
【0036】
【発明の効果】
本発明方法によれば、高温溶融を要せず、また熱処理も比較的低温でよく、また短時間でよいために生産効率が著しく向上する。また、得られた二珪化鉄はε相がきわめて少なく、殆どβ相単相とみなされるため、熱電特性材料として好適なものである。[0001]
[Industrial application fields]
The present invention relates to a method for producing β-phase iron disilicide, which is a promising material as a thermoelectric conversion element.
[0002]
[Prior art]
Thermoelectric conversion materials are attracting attention as energy sources that do not emit environmental pollutants, do not emit noise, and are maintenance-free. Currently, thermoelectric cooling elements are mainly produced commercially, but the market for thermoelectric power generation is expected to be gradually formed. β-phase iron disilicide is particularly noted for its excellent oxidation resistance and heat resistance, no toxicity, low cost raw materials, and a relatively high Seebeck coefficient at 200 to 900 ° C.
[0003]
Iron disilicide is used as a thermoelectric conversion material of a sintered body or a thin film. The present invention relates to a powder for sintered iron disilicide or a method for producing a sintered body. A conventional method for manufacturing a sintered body of iron disilicide includes melting a raw material containing iron and silicon at a high temperature and solidifying it as an ingot to obtain an eutectic of an ε phase and an α phase. In this method, the powder obtained by pulverization and pressure forming is sintered at 1100 ° C. or higher, and then subjected to heat treatment for a long time in a β-phase stable region to form a β phase.
[0004]
However, this conventional method has a high energy consumption due to melting at high temperature and requiring a long heat treatment to produce β-phase iron disilicide (for example, special effects). (Kaisho 5-56781).
[0005]
On the other hand, in recent years, a method for producing β-phase iron disilicide by a mechanical alloying method has been proposed. French Patent Specification No. 8,809,896 (1988) discloses a method for producing carbide or silicide by mechanically alloying a transition metal element or the like with carbon or silicon. Among them, as for iron silicide, it is described in the Examples that a powder of iron and silicon (atomic ratio 1: 2) treated with a vibration ball mill for 24 hours was a mixture of α, β and ε phases.
[0006]
Japanese Patent Laid-Open No. 6-81076 discloses a method for producing β-phase iron disilicide comprising a step of grinding and mixing iron and silicon raw material powder, a step of forming, and a step of sintering. According to this method, a sintered body obtained by hot pressing at 950 ° C. after pulverizing iron and silicon powder for 100 hours with a ball mill was a mixture of β and ε phases.
[0007]
JP-A-6-92619 discloses a method for producing iron disilicide by mechanically alloying iron and silicon raw material powder (molar ratio 1: 2.1 to 1: 3.5) and then heat-treating. Has been. According to this method, a powder of iron and silicon (1: 2.2 to 1: 3.0) was treated with a vibration ball mill for 10 hours, then molded and then heat treated at 900 ° C. for 80 to 100 hours. It was a mixture of β and ε phases, and the ε phase was 2 to 10%.
[0008]
[Problems to be solved by the invention]
The above three inventions based on the mechanical alloying method have the advantage that the amount of energy consumption is small in that the high temperature melting is not required as compared with the above melting method. On the other hand, however, there is a problem that the obtained sintered body contains an ε phase in addition to the β phase. Since the β phase is effective for the thermoelectric conversion characteristics, it is preferable to suppress the generation of the ε phase as much as possible.
An object of the present invention is to suppress the generation of the ε phase in the mechanical alloying method, and further to shorten the time required for the mechanical alloying to increase the production efficiency.
[0009]
[Means for Solving the Problems]
As a result of intensive studies to solve the above problems, the present inventors have used a mixed powder having an Fe: Si atomic ratio of more than 1: 2.0 and not more than 1: 3.0, and the raw material iron is reduced. It has been found that when a powder in which an α phase and an ε phase are generated by performing mechanical alloying until it is consumed to 20% or less is heat-treated, an iron disilicide sintered body substantially having a β phase is obtained. The present invention has been completed.
[0010]
Further, the present inventors have found that in a mechanical alloying method, in which we found that allowed to produce a relatively short period of time α phase and ε phase by the use of a de Isukumiru.
[0011]
That is, the present invention provides [1] a method for producing β-phase iron disilicide in which iron and silicon-containing powder are mechanically alloyed and then heat treated.
(1) The raw material is prepared so that the atomic ratio of iron and silicon contained in the raw material powder is more than 1: 2.2 and 1: 3.0 or less,
(2) Forming α-phase and ε-phase iron silicide by mechanical alloying using a disk mill until the raw material iron is consumed to 20% or less, then (3) forming, heat-treating and sintering A method for producing a β-phase iron disilicide sintered body , characterized in that a body is obtained .
[0012]
[2] The method for producing a β-phase iron disilicide sintered body according to the above item [1], wherein a raw material to which a substitution metal element is added instead of a part of the raw iron or silicon is used.
[0014]
The iron, silicon, and substitutional metal elements that are the raw material powders in the present invention are industrial grade powders, preferably those having a purity of 99% by weight or more, more preferably those having a purity of 99.9% by weight or more. It is done. It is a well-known fact that the thermoelectric conversion characteristics depend on the type and amount of metal added to the iron disilicide, and therefore it is preferable that the purity of the powder is high in order to avoid unexpected impurities.
[0015]
The feed ratio of iron and silicon in the raw material powder is such that the atomic ratio of iron to silicon or the atomic ratio of (iron + substitution metal element) to silicon exceeds 1: 2.2 and is within a range of 1: 3.0 or less. There must be. When the amount of silicon is less than 1: 2.2, the ε-phase after firing increases, which is not preferable. When it exceeds 1: 3.0, a component of silicon is present after firing, so that the purity of iron disilicide decreases.
[0016]
The metal element for substitution in the present invention is to give semiconductor characteristics by substituting a part of iron or silicon, and is made of Mn, Cr, V, Al, etc. to make a p-type semiconductor, and an n-type semiconductor. Therefore, it can be substituted with Co, Ni, Pt or the like. The ratio of substitution may be a known level, and is exemplified by 0.5 to 10 atomic%.
[0017]
In the present invention, mechanical alloying refers to generating fine particles, amorphization, solid solution, chemical reaction, etc. by applying mechanical pulverization or grinding force to a substance. As for mechanical alloying, research examples are increasing in recent years, and there are detailed descriptions in, for example, “Organic / Inorganic Mechanochemistry” (Kubo, Industrial Data Center, 1993).
[0018]
Conventionally, rotary ball mills, vibration ball mills, planetary ball mills, and the like are known as devices for performing mechanical alloying. Among them a device used in the mechanical alloying of the present invention uses a large de Isukumiru impact force. Conventionally, a disk mill has been used as a grinding device for obtaining a sample for analysis. We propose to use this for material synthesis. Usually, the disc mill is composed of three combinations of vessel, ring, and stone, and there are 50 cc, 100 cc, etc. as the volume of the vessel. Materials include tungsten carbide, stainless steel, alumina, zirconia and the like.
[0019]
The amount of powder charged into the disk mill is not necessarily specified, but is preferably around 30% by volume of the vessel volume. The time for performing mechanical alloying is the time until most of the charged iron is consumed, and depending on the type of raw material, for example, 20 to 60 minutes is exemplified. In the present invention, until iron is almost consumed, the iron diffraction line (2θ = 44.7) is compared with before and after pulverization by powder X-ray diffraction (source: CuKα) until it becomes 20% or less. Means.
[0020]
When iron and silicon are mechanically alloyed, the ε-phase diffraction line (2θ = 45.2) and the above-mentioned iron diffraction line are close to each other, so the iron decreases and the ε-phase increases. The diffraction line becomes the shoulder of the diffraction line of the ε phase, and the diffraction intensity cannot be read accurately. Therefore, for the sake of convenience, the standard of 20% or less is set.
[0021]
There is no particular limitation on the atmospheric gas pressure in mechanical alloying.
The gas component is not particularly limited, and examples thereof include an inert gas, oxygen, nitrogen, or a mixed gas thereof.
[0022]
The method of the present invention is characterized in that a powder in which an α phase and an ε phase are generated is heat treated by mechanical alloying. Therefore, it is necessary that powder X-ray diffraction lines of α phase (2θ = 17.3) and ε phase (2θ = 45.2) exist in the powder after mechanical alloying.
[0023]
In the present invention, the heat treatment refers to holding for a certain period of time below the decomposition temperature of β-phase iron disilicide. Although it changes with metal elements for substitution, the temperature range of 850-950 degreeC is mentioned, for example. This heat treatment includes a cold-pressed product, a hot press, a hot isostatic press, and the like.
[0024]
The atmosphere of the heat treatment is preferably under vacuum, and an inert gas, nitrogen, oxygen, or a mixed gas thereof is also used.
[0025]
【Example】
The present invention will be illustrated in more detail by the following examples, but the present invention is not limited to these examples.
Further, in the following examples, the existence ratio of the ε phase by X-ray diffraction of the heat-treated formed body or powder is the ε phase (2θ = 2θ = 2) = the diffraction intensity of the β phase (2θ = 29.1) is 100. The ratio of the diffraction intensity of 45.2) is expressed as a percentage.
[0026]
Example 1
16.23 g of iron powder (manufactured by High Purity Chemical Co., Ltd., purity 99.9%, particle size of 300 mesh or less) and silicon powder (made by Rare Metallic, purity 99.99%, particle size of 150 mesh or less) 18.77 g Was loaded into a disk mill (Herzog, Vessel 100 cc, tungsten carbide) (Fe: Si = 1: 2.3), and after nitrogen substitution, it was subjected to mechanical alloying three times for 15 minutes. From the powder X-ray diffraction of the obtained powder, the iron residue was 20% or less, and an α phase and an ε phase were detected. 4.00 g of the obtained powder was formed into a diameter of 13 mm and a height of 12 mm with a cold press (press pressure 3.4 t / cm 2 ), and under vacuum (2 × 10 −4 mmHg) at 900 ° C. for 4 hours. Heat treatment was performed. From the X-ray diffraction of the obtained molded product, it was β phase, and ε phase was not detected.
[0027]
Example 2
In Example 1, iron powder 14.78 g, manganese powder (manufactured by Furuuchi Chemical Co., Ltd., purity 99.9%, particle size 300 mesh or less) 1.44 g, silicon powder 18.78 g were charged (Fe: Mn : Si = 0.94: 0.06: 2.3), and a sintered compact was obtained in the same manner as in Example 1 except that the cold pressing pressure was 1.0 t / cm 2 . The ε phase in the sintered body was 1%.
[0028]
Example 3
A sintered body was obtained in the same manner as in Example 2 except that the charged powder composition in Example 2 was changed to Fe: Mn: Si = 0.97: 0.03: 2.3. The ε phase in the sintered body was 1%.
[0029]
Example 4
In the same manner as in Example 2, 8.00 g of powder obtained by mechanical alloying was formed into a diameter of 20 mm and a height of 9 mm with a hot press machine (900 ° C., 1 hour, pressure 1.0 t / cm 2 , Atmosphere argon). From the X-ray diffraction of the obtained molded product, it was β phase, and ε phase was not detected.
[0030]
Example 5
In Example 1, 15.73 g of iron powder, 0.51 g of cobalt powder (manufactured by Furuuchi Chemical Co., Ltd., purity 99.9%, particle size of 300 mesh or less), and 18.76 g of silicon powder were charged (Fe: Co : Si = 0.94: 0.06: 2.3), and a sintered compact was obtained in the same manner as in Example 1 except that the cold pressing pressure was 1.0 t / cm 2 . The ε phase in the sintered body was 1% .
[ 0034]
Comparative Example 1
In Example 1, mechanically alloyed powder was obtained in the same manner as in Example 1 except that mechanical alloying was performed twice for 15 minutes and 5 minutes. From the X-ray diffraction of the obtained powder, the iron residue was 53%, and the α phase was detected. 1.5 g of this powder was put in a quartz container and baked under vacuum (2 × 10 −4 mmHg) at 900 ° C. for 4 hours. From the X-ray diffraction of the obtained powder, 29% of ε phase was present in addition to β phase.
[0035]
Comparative Example 2
16.58 g of powder (made by High Purity Chemical Co., Ltd., purity 99.9%, particle size 300 mesh or less) and 19.42 g of silicon powder (made by Rare Metallic, purity 99.99%, particle size 150 mesh or less) A rotating ball mill (stainless steel mill diameter: 120 mm, length: 120 mm, stainless steel ball diameter: 9.5 mm) was charged (Fe: Si = 1: 2.33), and after nitrogen substitution, mechanical alloying was performed at 95 rpm for 200 hours. From the X-ray diffraction of the obtained powder, the iron residue was 53%, and no α phase was detected. This powder was formed into a diameter of 13 mm and a height of 13 mm with a cold press (pressing pressure: 1.0 t / cm 2 ) and heat-treated for 4 hours under vacuum (2 × 10 −4 mmHg). From the X-ray diffraction of the obtained molded body, 35% of ε phase was present in addition to β phase.
[0036]
【The invention's effect】
According to the method of the present invention, high-temperature melting is not required, heat treatment may be performed at a relatively low temperature, and a short time is required, so that production efficiency is remarkably improved. Further, the obtained iron disilicide has a very small ε phase and is almost regarded as a β phase single phase, and therefore is suitable as a thermoelectric property material.
Claims (2)
(1)原料の粉末に含まれる鉄とシリコンの原子比が1:2.2を超え1:3.0以下になるように原料を調製し、
(2)原料の鉄が20%以下に消費されるまでディスクミルを用いてメカニカルアロイングを行うことによりα相およびε相珪化鉄を生成せしめ、次いで
(3)成形し、熱処理して焼結体を得る
ことを特徴とするβ相二珪化鉄焼結体の製造方法。In the method for producing β-phase iron disilicide, mechanically alloying a powder containing iron and silicon and then heat-treating,
(1) The raw material is prepared so that the atomic ratio of iron and silicon contained in the raw material powder is more than 1: 2.2 and 1: 3.0 or less,
(2) Forming α-phase and ε-phase iron silicide by mechanical alloying using a disk mill until the raw material iron is consumed to 20% or less, then (3) forming, heat-treating and sintering A method for producing a β-phase iron disilicide sintered body , characterized in that a body is obtained .
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