JP3747949B2 - Coated tool and manufacturing method thereof - Google Patents

Coated tool and manufacturing method thereof Download PDF

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Publication number
JP3747949B2
JP3747949B2 JP09449895A JP9449895A JP3747949B2 JP 3747949 B2 JP3747949 B2 JP 3747949B2 JP 09449895 A JP09449895 A JP 09449895A JP 9449895 A JP9449895 A JP 9449895A JP 3747949 B2 JP3747949 B2 JP 3747949B2
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Prior art keywords
substrate
region
processing
film
coating film
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JP09449895A
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JPH08257809A (en
Inventor
敏夫 石井
正幸 権田
順彦 島
広志 植田
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Moldino Tool Engineering Ltd
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Hitachi Tool Engineering Ltd
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Description

【0001】
【産業上の利用分野】
本発明は耐欠損性に優れた切削用及び耐摩耗用の被覆工具に関するものである。
【0002】
【従来の技術】
一般的に、被覆工具は周期表の4a、5a、6a族の炭化物、窒化物、炭窒化物の1種または2種以上とFe、Ni、Co、Mo、Crの1種または2種以上よりなる超硬質合金の粉末を成形・焼結した後、所定の外形やブレ−カ形状に表面加工することにより基体を作製し、加工面を超音波洗浄した後に所定の硬質皮膜を化学蒸着法や、物理蒸着法により成膜することにより作製される。硬質皮膜には、耐摩耗性に優れた周期律表の4a、5a、6a金属の炭化物、窒化物、炭窒化物、酸炭化物、酸窒化物、酸炭窒化物および酸化物とAlの酸化物および酸炭化物から選ばれた単層皮膜または2種以上の多層皮膜、特にTiC、TiN、TiCN、Al23、(Ti,Al)N等を用いている。このような被覆工具は被覆膜の耐摩耗性と基体の強靱性とを兼ね備えており、広く実用に供されている。
【0003】
しかし、基体表面と被覆膜との密着強度は充分ではなく、切削時に被覆膜が基体表面から剥がれる事故が発生することがあった。このため、基体と被覆膜間の密着強度を高めるために基体表面に最初に成膜する膜の選定や成膜方法等に種々の工夫がなされてきた。例えば、特開平5−237707号では基体を構成するC、W、Co等の物質の拡散を防ぐために、最内層のTiNやTiCN層を低温処理し、膜質を微細化した後に、通常の化学蒸着法で種々の膜を成膜している。
【0004】
【発明が解決しようとする課題】
本発明者らは上記の基体と被覆膜の剥離問題に関して検討を行った。図3、図4は現在市場で用いられている被覆工具で切削時に実際に用いられる工具先端部(ランド部)を斜め研磨した後に、基体表面と被覆膜間の境界部をFE−SEMにより12,000倍で観測したものである。図3、図4から、基体と被覆膜との間には空隙あるいは基体表面が粉砕されたような領域が存在していることが明らかにわかる。つまり、皮膜の基体からの剥がれ不良はこのような欠陥がその一原因であることを見い出した。
【0005】
ここで、基体と被覆膜間に形成される欠陥層についてその形成過程を推測する。まず、基体表面に加工にともない形成された加工屑や加工変質層が残留する。従来の超音波洗浄ではこのような加工屑や加工変質層は完全には除去できず基体表面に残留する。この上に硬質の被覆膜が蒸着法などにより形成されると、この硬質被覆膜の蒸着、収縮にともない加工屑や加工変質層のある部分は被覆膜側に引っ張られ基体から剥離し空隙を形成する。他の部分の加工屑や加工変質層は被覆膜の形成により基体と剥離しないまでも基体自体との密着強度は低くなり、実際にチップとして使用時に加工に伴う圧力により剥離事故を起こすことになる。
【0006】
【課題を解決するための手段及び作用】
本発明者らは、上記知見に基づき鋭意検討した結果、上記基体と被覆膜の剥離を起こす欠陥部は従来の超音波洗浄では除去できない加工変質層にともない発生しており、この加工屑や加工変質層を低減し硬質被覆膜形成後の加工欠陥部(以下A領域という)を低減すれば前記の問題点は解消することを見い出し、本発明に想到した。
【0007】
すなわち本発明の被覆工具は、周期律表の4a、5a、6a族の炭化物、窒化物、炭窒化物の1種または2種以上とFe、Ni、Co、Mo、Crの1種または2種以上とよりなる超硬質合金を基体とし、前記基体表面に加工を施し、その後周期律表の4a、5a、6a族金属の炭化物、窒化物、炭窒化物、酸炭化物、酸窒化物、酸炭窒化物および酸化物とAlの酸化物および酸炭化物から選ばれた単層皮膜または2種以上の多層皮膜を被覆した被覆工具において、前記加工にともない形成された加工屑や加工変質層を低減し、加工屑や加工変質層が見られない基体表面を現出させた後に前記皮膜を被覆したものであり、基体表面と被覆膜との間の前記加工にともない形成された加工欠陥部であるA領域の割合、即ち、切断面での基体と被覆層間の境界上の欠陥層の長さの割合であるA領域/(A領域+健全領域)が30%以下であることを特徴とする被覆工具である。さらに前記基体表面と被覆膜との間の欠陥部であるA領域の割合、A領域/(A領域+健全領域)は15%以下であると好ましい。このようなA領域つまり欠陥部は空隙、加工屑又は加工変質層である。
【0008】
上記の被覆工具の製造方法としては、従来の成膜前の超音波洗浄の代わりに基体表面に加工欠陥部を低減するエッチング処理した後に被覆膜を形成するか、基体表面に加工欠陥部を低減する砥粒分散溶液中で超音波処理したり、あるいはバレル処理やショットブラスト処理した後に、被覆膜を形成することにより得ることができる。
【0009】
ここでA領域/(A領域+健全領域)つまりA領域の割合の限定理由について述べる。前記の加工屑や加工変質層つまり欠陥部であるA領域をすべて除去すれば剥離などの心配はなくなるが、工業的にはこのような加工屑や加工変質層をすべて除去することは難しい。
このA領域の割合は基体表面の加工方法及びその後のエッチング等による表面処理条件に依存する。
図7はA領域の割合と切削時の耐欠損性の関係を示したものである。A領域はFE−SEM等により観測することが出来る。このようなA領域の割合は例えば切断面での基体と被覆層間の境界上の欠陥層の長さから求めることができる。図7よりA領域の割合が30%以下になると耐欠損性が向上し、さらに15%以下になった場合にはA領域が0%のものと比べても耐欠損性は差がない事がわかる。そこで本発明においてはA領域は30%以下とし、さらに好ましくは15%以下とした。
【0010】
また本発明の被覆工具は、周期表の4a、5a、6a族の炭化物、窒化物、炭窒化物の1種または2種以上とFe、Ni、Co、Mo、Crの1種または2種以上とよりなる超硬質合金を基体とし、前記基体表面に加工を施し、その後周期律表の4a、5a、6a金属の炭化物、窒化物、炭窒化物、酸炭化物、酸窒化物、酸炭窒化物および酸化物とAlの酸化物および酸炭化物から選ばれた単層または2種以上の多層皮膜を被覆した被覆工具である。本発明の基体の表面は、WC−Co系、WC−TiCN−TaC−Co系、またはその表面に脱ベ−タ層、Co−rich層、脱バインダ−処理等を行ったものでもかまわない。本発明品における被覆方法としては、既知の成膜方法を適用することが可能である。例えば、化学蒸着法によりTiN、TiCN、TiC、TiN、Al23、TiN等を組み合わせたり、物理蒸着法によりTiN、TiCN等を組み合わせたり、あるいは、物理蒸着膜と化学蒸着膜とを組み合わせて成膜することが出来る。
【0011】
【実施例】
次に本発明による被覆超硬合金を実施例によって具体的に説明する。但し、本発明はこれら実施例の範囲に限定されるものでないことは言うまでもない。
(実施例1)
超硬質合金体の基体としてWC72%、TiC8%、(Ta、Nb)C11%、Co9%(重量%)なる組成に平均粒径2μmの粉末を配合し、所定の形状にプレスした後に、真空中、1400℃で一時間焼結した。その後、工具の先端部を所定の形状と面粗さにするために、得られた焼結体の表面をSiC砥粒を含んだラバ−により研磨した。この加工済品の表面をHF−HNO3−CH3COOH−4・HClの混合液により、25℃で5分間エッチング処理した後、洗剤等により超音波洗浄し、温風により基体を乾燥した。このようにして作製した基体の上に、化学蒸着法により、内層よりTiN、TiCN、TiC、TiN、Al23、TiNの多層皮膜を形成した。
【0012】
図2は上記の本発明品において、超音波洗浄後の皮膜を成膜する直前の基体表面をFE−SEMにより倍率4,000倍で観測したものである。本発明品の基体表面には、加工屑や加工変質層が見られず、強固な基体表面が現出していることがわかる。
図1は本発明品の基体と皮膜間の界面をFE−SEMを用いて倍率12,000倍で観測したものである。サンプルを10度傾けて、ダイヤモンド砥粒により研磨して評価面を作製した。図1からわかるように、本発明品の基体と皮膜との間には、先述の空隙や、基体表面が粉砕されたような領域が観察されず、空間的欠陥が無いことが明らかにわかる。
本発明品のチップ5本を以下の条件で切削試験した結果を図5(a)に示す。
被削材 SCM材
切削条件 100 m/min
送り 2 mm/rev
切り込み 0.5 mm/rev.
図5(a)より、本発明品は切削回数が300回以上まで欠損不良を発生すること無く使用でき、長寿命であることがわかる。
【0013】
(比較例1)
本発明品と同様の条件でエッチング処理のみを省いたプロセスで基体を作製し、皮膜を形成した比較品の基体と皮膜との界面をFE−SEMで実施例1と同一条件で観測した結果を図3、4に示す。図中で黒く見える部分は基体と被覆膜の間に隙間のあいている部分つまり空隙であり、ブツブツとしている部分は加工変質層である。このような欠陥部をA領域という。
図6は本比較品の基体表面を実施例1と同様にFE−SEMで観測したものである。図2の本発明品には見られなかった加工屑と基体表面が細かく粉砕された様な加工変質層が存在することがわかる。これらの加工屑と加工変質層の上に皮膜を成膜することにより図3,4に見られるような欠陥部つまりA領域が生じるものと考えられる。
基体表面と被覆膜との間の欠陥部つまりA領域の割合はその基体と被覆膜との非接触の長さの割合から、図3が約87%、図4は約55%である。
実施例1と同一条件で本比較例5本を切削試験した結果を図5(b)に示す。いずれも、切削回数が200回以内で欠損しており、短寿命であることがわかる。
【0014】
(実施例2)
実施例1と同様に作製した焼結・ラバ−研磨済の超硬体表面を0.5μmのダイヤモンド砥粒を分散させたアルコ−ル中で15分間超音波処理した後、実施例1と同一の工程で洗浄し、皮膜を形成した。
本発明品の基体と皮膜間の界面を実施例1と同様にFE−SEMで観測した結果上記のA領域は観察されなかった。
本発明品のチップ5本を実施例1と同一の条件で切削試験した結果を図5(c)に示す。
図5(c)より、本発明品は切削回数が200回以上まで欠損不良を発生すること無く使用でき、長寿命であることがわかる。
【0015】
(実施例3)
実施例1と同様に作製した焼結・ラバ−研磨済の超硬質体表面を
HF−HNO3−CH3COOH−4HClの混合液を、水に希釈し、濃度100〜0体積%の希釈液により、25℃で5分間エッチング処理した後、実施例1と同一の工程で洗浄し、皮膜を形成した。
本発明品の基体と皮膜間の境界部を実施例1と同様にFE−SEMで観測した結果、基体と被覆膜間のA領域の割合が100%〜0%の試験片が得られた。
上記の試験片を実施例1と同一の条件で切削試験し、A領域の割合と切削回数の関係を図7に示す。
図7より、A領域の割合が30%以下では切削回数が増加し、さらに15%以下であるとA領域が全く無い場合と同等の切削回数を示す事が分かる。
【0016】
【発明の効果】
上述のように、本発明は、加工にともない形成された加工屑や加工変質層を低減した後に皮膜を被覆したものであり、基体表面と被覆膜との境界部の欠陥部すなわちA領域の割合を規定することにより、基体と皮膜との密着強度が高く、耐欠損性が高い、長寿命の被覆工具が実現出来た。
【図面の簡単な説明】
【図1】本発明に係わる被覆工具の基体と皮膜間の境界部の金属組織のFE−SEM写真を示す。
【図2】本発明に係わる基体表面の金属組織のFE−SEM写真を示す。
【図3】比較品の基体と皮膜間の境界部の金属組織のFE−SEM写真を示す。
【図4】比較品の基体と皮膜間の境界部の金属組織のFE−SEM写真を示す。
【図5】本発明の実施例1,2と比較例の切削試験結果を示す。
【図6】比較品の基体表面の金属組織のFE−SEM写真を示す。
【図7】本発明例と比較例の切削試験結果を示す。
[0001]
[Industrial application fields]
The present invention relates to a coated tool for cutting and wear having excellent fracture resistance.
[0002]
[Prior art]
Generally, the coating tool of the Periodic Table 4a, 5a, 6a group carbides, nitrides, one or more carbonitrides and Fe, Ni, Co, Mo, one or more of Cr After forming and sintering the powder of ultra-hard alloy, the substrate is fabricated by surface processing into a predetermined external shape and breaker shape, and the processed surface is ultrasonically cleaned and then the predetermined hard coating is applied by chemical vapor deposition Alternatively, it is produced by forming a film by physical vapor deposition. The hard film, 4a excellent periodic table in wear resistance, 5a, carbides 6a group metal, nitride, carbon nitride, oxycarbide, oxynitride, oxycarbonitride and oxides and Al oxides in the A single-layer film or two or more kinds of multi-layer films selected from the above and oxycarbides, particularly TiC, TiN, TiCN, Al 2 O 3 , (Ti, Al) N, etc. are used. Such a coated tool has both the wear resistance of the coating film and the toughness of the substrate, and is widely put into practical use.
[0003]
However, the adhesion strength between the substrate surface and the coating film is not sufficient, and an accident may occur in which the coating film peels off from the substrate surface during cutting. For this reason, in order to increase the adhesion strength between the substrate and the coating film, various ideas have been made on the selection of a film to be first formed on the surface of the substrate, the film forming method, and the like. For example, in Japanese Patent Laid-Open No. 5-237707, in order to prevent the diffusion of substances such as C, W, and Co constituting the substrate, the innermost TiN or TiCN layer is processed at a low temperature, and the film quality is reduced, followed by normal chemical vapor deposition. Various films are formed by the method.
[0004]
[Problems to be solved by the invention]
The present inventors have studied the above-described problem of peeling between the substrate and the coating film. FIGS. 3 and 4 show the boundary portion between the substrate surface and the coating film by FE-SEM after obliquely polishing the tip (land portion) of the tool actually used at the time of cutting with the coated tool currently used in the market. Observed at 12,000 times. From FIG. 3 and FIG. 4, it can be clearly seen that there are voids or regions where the surface of the substrate is crushed between the substrate and the coating film. That is, it has been found that such a defect is a cause of the poor peeling of the film from the substrate.
[0005]
Here, the formation process of the defect layer formed between the substrate and the coating film is estimated. First, the processing waste and the work-affected layer formed by processing remain on the substrate surface. In conventional ultrasonic cleaning, such processing waste and a work-affected layer cannot be completely removed and remain on the substrate surface. When a hard coating film is formed on this by vapor deposition or the like, parts with processing debris and a work-affected layer are pulled away from the substrate due to the deposition and shrinkage of the hard coating film. A void is formed. Even if the processing waste and other work-affected layers in other parts are not peeled off from the substrate due to the formation of the coating film, the adhesion strength with the substrate itself will be low, and a peeling accident may occur due to pressure during processing when actually used as a chip. Become.
[0006]
[Means and Actions for Solving the Problems]
As a result of intensive studies based on the above findings, the present inventors have found that defective portions that cause separation of the substrate and the coating film have occurred due to a work-affected layer that cannot be removed by conventional ultrasonic cleaning. The inventors have found that the above-mentioned problems can be solved by reducing the work-affected layer and reducing the processing defect portion (hereinafter referred to as “A region”) after the hard coating film is formed.
[0007]
That is, the coated tool of the present invention includes one or more of 4a, 5a, and 6a group carbides, nitrides, and carbonitrides of the periodic table and one or two of Fe, Ni, Co, Mo, and Cr. The super hard alloy having the above structure is used as a base, the surface of the base is processed, and then the carbides, nitrides, carbonitrides, oxycarbides, oxynitrides, oxycarbons of the 4a, 5a, and 6a metals in the periodic table In a coated tool coated with a single layer coating selected from nitrides and oxides, Al oxides and oxycarbides, or with two or more types of multilayer coatings, it reduces the machining debris and the work-affected layer formed during the processing. The film is coated with the film after the surface of the substrate on which the processing waste and the work-affected layer are not seen, and is a processing defect formed by the processing between the surface of the substrate and the coating film. the ratio of the area a, i.e., coating the substrate with the cut surface A region / the length ratio of the defect layer on the boundary between the (A region + healthy region) is a coated tool, wherein 30% or less. Furthermore, it is preferable that the ratio of the A region, which is a defect portion between the substrate surface and the coating film, A region / (A region + healthy region) is 15% or less. Such A area | region, ie, a defect part, is a space | gap, a process waste, or a process-affected layer.
[0008]
As a manufacturing method of the coated tool, instead of the conventional film formation prior to ultrasonic cleaning, or to form a coating film after the etching process to reduce the processing defect on the substrate surface, working on the substrate surface defect can be a or the sonication abrasive dispersion solution to reduce, or after the barrel treatment or shot blasting, obtained by forming a coating film.
[0009]
Here, the reason for limiting the ratio of area A / (area A + healthy area), that is, area A will be described. If all the above-mentioned processing waste and work-affected layer, that is, the A region which is a defective portion is removed, there is no concern about peeling, but industrially it is difficult to remove all such work waste and work-affected layer.
The proportion of the A region depends on the processing method of the substrate surface and the surface treatment conditions such as subsequent etching.
FIG. 7 shows the relationship between the ratio of the A region and the fracture resistance at the time of cutting. The A region can be observed by FE-SEM or the like. Such a ratio of the A region can be obtained, for example, from the length of the defect layer on the boundary between the substrate and the coating layer at the cut surface. As shown in FIG. 7, when the ratio of the A region is 30% or less, the fracture resistance is improved. When the ratio is 15% or less, the fracture resistance is not different from that of the A region of 0%. Recognize. Therefore, in the present invention, the A region is 30% or less, more preferably 15% or less.
[0010]
The coated tool of the present invention, the Periodic Table of the 4a, 5a, 6a group carbides, nitrides, one or more of Fe carbonitride, Ni, Co, Mo, one or two of Cr and become more super-hard alloy substrate and more, giving the process to the substrate surface, then the periodic table of the 4a, 5a, 6a group metal carbides, nitrides, carbonitrides, oxycarbides, oxynitrides, oxycarbonitride A coated tool coated with a single layer or two or more types of multilayer coatings selected from nitrides and oxides, Al oxides and oxycarbides. The surface of the substrate of the present invention may be WC-Co-based, WC-TiCN-TaC-Co-based, or a surface obtained by performing a debatter layer, a Co-rich layer, a binder removal treatment, or the like on the surface. As a coating method in the present invention product, a known film forming method can be applied. For example, TiN, TiCN, TiC, TiN, Al 2 O 3 , TiN, etc. are combined by chemical vapor deposition, TiN, TiCN, etc. are combined by physical vapor deposition, or physical vapor deposition and chemical vapor deposition are combined. A film can be formed.
[0011]
【Example】
Next, concrete examples of the coated cemented carbide according to the present invention will be described. However, it goes without saying that the present invention is not limited to the scope of these examples.
Example 1
A super hard alloy substrate, WC 72%, TiC 8%, (Ta, Nb) C 11%, Co 9% (weight%) powder with an average particle size of 2 μm was blended and pressed into a predetermined shape, then in vacuum Sintered at 1400 ° C. for 1 hour. Thereafter, in order to make the tip of the tool have a predetermined shape and surface roughness, the surface of the obtained sintered body was polished with a rubber containing SiC abrasive grains. The surface of this processed product was etched with a mixed solution of HF—HNO 3 —CH 3 COOH-4 · HCl at 25 ° C. for 5 minutes, then ultrasonically cleaned with a detergent or the like, and the substrate was dried with warm air. A multilayer coating of TiN, TiCN, TiC, TiN, Al 2 O 3 , and TiN was formed from the inner layer on the thus prepared substrate by chemical vapor deposition.
[0012]
FIG. 2 shows the surface of the substrate immediately before the formation of the film after ultrasonic cleaning in the product of the present invention, which was observed by a FE-SEM at a magnification of 4,000. It can be seen that there is no processing waste or work-affected layer on the surface of the substrate of the present invention, and a strong substrate surface appears.
FIG. 1 is an observation of the interface between the substrate and the film of the product of the present invention at a magnification of 12,000 using an FE-SEM. The sample was tilted 10 degrees and polished with diamond abrasive grains to prepare an evaluation surface. As can be seen from FIG. 1, it is clearly understood that there is no spatial defect between the substrate of the present invention and the film, and the above-mentioned voids and regions where the substrate surface is crushed are not observed.
FIG. 5A shows the result of cutting test of five chips of the present invention under the following conditions.
Work material SCM material cutting condition 100 m / min
Feed 2 mm / rev
Cutting 0.5 mm / rev.
From FIG. 5 (a), it can be seen that the product of the present invention can be used without causing defect defects up to 300 times or more of cutting, and has a long life.
[0013]
(Comparative Example 1)
The substrate was produced by a process in which only the etching process was omitted under the same conditions as the product of the present invention, and the interface between the substrate and the film of the comparative product on which the film was formed was observed with FE-SEM under the same conditions as in Example 1. Shown in FIGS. In the figure, the portion that appears black is a portion where there is a gap between the substrate and the coating film, that is, a void, and the portion that is lumpy is a work-affected layer. Such a defective portion is referred to as an A region.
FIG. 6 shows the surface of the substrate of this comparative product observed by FE-SEM as in Example 1. It can be seen that there is a work-affected layer that is not seen in the product of the present invention in FIG. 2 and that the surface of the substrate is finely crushed. It is considered that a defective portion, that is, an A region as shown in FIGS. 3 and 4 is generated by forming a film on the processing waste and the work-affected layer.
The ratio of the defect portion, that is, the A region between the substrate surface and the coating film is about 87% in FIG. 3 and about 55% in FIG. 4 from the ratio of the non-contact length between the substrate and the coating film. .
FIG. 5B shows the result of a cutting test of five comparative examples under the same conditions as in Example 1. In both cases, it is found that the number of cuts is missing within 200 times, and the life is short.
[0014]
(Example 2)
Sintered and rubber-polished superhard surfaces produced in the same manner as in Example 1 were subjected to ultrasonic treatment for 15 minutes in an alcohol in which 0.5 μm diamond abrasive grains were dispersed, and then the same as in Example 1. The film was washed to form a film.
As a result of observing the interface between the substrate and the film of the product of the present invention by FE-SEM in the same manner as in Example 1, the above-mentioned region A was not observed.
FIG. 5C shows the result of a cutting test of five chips of the present invention under the same conditions as in Example 1.
From FIG. 5 (c), it can be seen that the product of the present invention can be used without causing defect defects up to 200 times or more of cutting, and has a long life.
[0015]
Example 3
The surface of the sintered / rubber-polished superhard body produced in the same manner as in Example 1 was diluted with HF—HNO 3 —CH 3 COOH-4HCl in water, and diluted to a concentration of 100 to 0% by volume. Then, after etching at 25 ° C. for 5 minutes, the film was washed in the same process as in Example 1 to form a film.
As a result of observing the boundary between the substrate and the film of the present invention by FE-SEM in the same manner as in Example 1, a test piece having a ratio of the A region between the substrate and the coating film of 100% to 0% was obtained. .
The above test piece was subjected to a cutting test under the same conditions as in Example 1, and the relationship between the ratio of area A and the number of cuttings is shown in FIG.
From FIG. 7, it can be seen that the number of cuttings increases when the ratio of the A region is 30% or less, and that the number of cuttings is the same as when there is no A region when the ratio is 15% or less.
[0016]
【The invention's effect】
As described above, in the present invention , a coating film is coated after reducing the processing waste and the work-affected layer formed by processing, and the defect portion at the boundary portion between the substrate surface and the coating film, that is, the A region. By defining the ratio, a long-life coated tool with high adhesion strength between the substrate and the film and high fracture resistance could be realized.
[Brief description of the drawings]
FIG. 1 shows an FE-SEM photograph of a metal structure at a boundary portion between a substrate and a coating of a coated tool according to the present invention.
FIG. 2 shows an FE-SEM photograph of the metal structure on the substrate surface according to the present invention.
FIG. 3 shows an FE-SEM photograph of a metallographic structure at a boundary between a comparative substrate and a film.
FIG. 4 shows an FE-SEM photograph of the metal structure at the boundary between the substrate of the comparative product and the film.
FIG. 5 shows cutting test results of Examples 1 and 2 of the present invention and a comparative example.
FIG. 6 shows an FE-SEM photograph of the metallographic structure of the surface of a comparative substrate.
FIG. 7 shows the cutting test results of the inventive example and the comparative example.

Claims (4)

周期律表の4a、5a、6a族の炭化物、窒化物、炭窒化物の1種または2種以上とFe、Ni、Co、Mo、Crの1種または2種以上とよりなる超硬質合金を基体とし、前記基体表面に加工を施し、その後周期律表の4a、5a、6a族金属の炭化物、窒化物、炭窒化物、酸炭化物、酸窒化物、酸炭窒化物および酸化物とAlの酸化物および酸炭化物から選ばれた単層皮膜または2種以上の多層皮膜を被覆した被覆工具において、前記加工にともない形成された加工屑や加工変質層を低減し、加工屑や加工変質層が見られない基体表面を現出させた後に前記皮膜を被覆したものであり、基体表面と被覆膜との間の前記加工にともない形成された加工欠陥部であるA領域の割合、即ち、切断面での基体と被覆層間の境界上の欠陥層の長さの割合であるA領域/(A領域+健全領域)が30%以下であることを特徴とする被覆工具。A super-hard alloy comprising one or more of carbides, nitrides, carbonitrides of groups 4a, 5a, and 6a of the periodic table and one or more of Fe, Ni, Co, Mo, and Cr. The substrate surface is processed, and then the surface of the substrate is processed, and then the carbides, nitrides, carbonitrides, oxycarbides, oxynitrides, oxycarbonitrides and oxides of the group 4a, 5a, and 6a metals of the periodic table In a coated tool coated with a single layer film or two or more types of multilayer films selected from oxides and oxycarbides, the processing waste and work-affected layer formed by the processing are reduced, and the work waste and work-affected layer are reduced. The ratio of the area A which is the processing defect portion formed by the processing between the base surface and the coating film, ie, the cutting , which is coated with the coating after the surface of the base that is not seen is revealed. Of the defect layer on the boundary between the substrate and the coating layer Coated tool, which is a coupling region A / (A region + healthy regions) is 30% or less. 前記基体表面と前記被覆膜の間のA領域の割合、A領域/(A領域+健全領域)が15%以下であることを特徴とする請求項1に記載の被覆工具。  The ratio of A area | region between the said base | substrate surface and the said coating film, A area / (A area + healthy area | region) is 15% or less, The coating tool of Claim 1 characterized by the above-mentioned. 基体表面に加工欠陥部を低減するエッチング処理をした後に、被覆膜を形成したことを特徴とする請求項1または2に記載の被覆工具の製造方法。  The method for manufacturing a coated tool according to claim 1 or 2, wherein a coating film is formed after performing an etching process to reduce a processing defect portion on the surface of the substrate. 基体表面に加工欠陥部を低減する砥粒分散溶液中での超音波処理をした後に、被覆膜を形成したことを特徴とする請求項1または2に記載の被覆工具の製造方法。  The method for producing a coated tool according to claim 1 or 2, wherein a coating film is formed on the surface of the substrate after ultrasonic treatment in an abrasive dispersion solution for reducing processing defects.
JP09449895A 1995-03-28 1995-03-28 Coated tool and manufacturing method thereof Expired - Fee Related JP3747949B2 (en)

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JP2005271193A (en) * 2004-02-23 2005-10-06 Hitachi Tool Engineering Ltd Surface-coated cemented carbide cutting tool
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