JP3738869B2 - Vapor deposition method and vapor deposition apparatus - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a vapor deposition method and a vapor deposition apparatus, and more particularly, to an organic material vapor deposition method and a vapor deposition apparatus.
[0002]
[Prior art]
An optical recording medium, a color filter, a microlens, a thin film EL (electroluminescence), and the like are formed using a thin film made of a functional material. As the functional material, an oxide material, a metal material, a sulfide material, or a functional material is used. As a method for forming the thin film, vacuum deposition or a coating method is used.
[0003]
In particular, a coating method is widely used as a method for forming a thin film made of an organic material. However, the coating method has the following problems (1) to (3).
[0004]
(1) It is difficult to produce a thin film having a thickness of 1 μm or less.
[0005]
(2) It is difficult to control the film thickness of about 100 nm.
[0006]
(3) Since a solvent is required, the selection range of materials is narrow (insoluble materials cannot be used), and there is a problem of environmental pollution.
[0007]
As a method for solving the above problem, Japanese Patent Application Laid-Open No. 59-177365 discloses a method for vacuum-depositing an organic material. This publication discloses a vacuum deposition method in which an organic material is evaporated by supplying a liquid or vaporized organic material to one surface of an endless belt and heating the other surface of the endless belt. As a method for supplying an organic material to the surface of the endless belt, a method of applying a liquid organic material according to a melting point of the organic material and a method of vapor deposition in a gas phase are disclosed.
[0008]
[Problems to be solved by the invention]
However, the vacuum deposition method disclosed in the above publication has the following problems. First, the coating method is limited to organic materials that are dissolved by heating and become liquid. Moreover, since the organic material is supplied in the form of a film on the surface of the endless belt, it is difficult to supply a sufficient amount of the organic material. In particular, this problem becomes more prominent when a vapor deposition method is used.
[0009]
The present invention has been made to solve the above problems, and an object thereof is to provide an organic material vapor deposition method and vapor deposition apparatus excellent in productivity.
[0010]
[Means for Solving the Problems]
In the vapor deposition method of the present invention, the powder of the organic material is continuously supplied to the heating unit. Supply And a step of heating and vaporizing the powder of the organic material, and a step of depositing the vaporized organic material on a surface of a substrate. Filling the pores of the endless belt made of a porous material with the powder of the organic material, and supplying the powder to the heating unit by rotating the endless belt made of the porous material. And the step of heating and vaporizing the powder of the organic material is performed in a state where the organic material is held on the endless belt, The supplying step, the vaporizing step, and the depositing step are performed in a vacuum, thereby achieving the above object.
[0014]
The porous material may be made of foam metal.
[0015]
The step of filling the powder of the organic material may be a step of filling the hole of the endless belt with the powder of the organic material while applying ultrasonic vibration to the endless belt.
[0016]
The supply step includes The organic material powder together with the metal powder A step of supplying the organic material powder to the endless belt made of the porous material while stirring may be included. .
[0017]
The endless belt may be cooled after passing through the heating unit, and then supplied with the organic material powder again.
[0018]
The vaporized organic material is Substrate The process of depositing on the surface of Vaporize the organic material Depositing on the surface of the medium; heating and re-vaporizing the organic material deposited on the surface of the medium; and depositing the re-vaporized organic material on the surface of the substrate. May be.
[0019]
The medium is preferably a cloth made of heat resistant fibers.
[0020]
The vapor deposition apparatus of the present invention cyclically passes through the first region and the second region. Made of porous material, the organic material powder and metal powder are held in the pores of the porous material An endless belt, provided in the first region; Said Organic material powder Along with the metal powder While stirring, the Made of porous material Means for supplying powder of the organic material to an endless belt, and provided in the second region, Made of porous material Heating the endless belt Made of porous material Means for heating and vaporizing the organic material held on an endless belt, and means for holding the substrate so as to deposit the vaporized organic material on the surface of the substrate; This achieves the above object.
[0022]
The porous material may be made of foam metal.
[0023]
Above Made of porous material The first region may further include means for applying ultrasonic vibration to the endless belt.
[0024]
Above Made of porous material The endless belt may further include heat insulating means on at least one of a route from the first region to the second region and a route from the second region to the first region.
[0025]
Above Made of porous material The endless belt may further include a cooling unit on at least one of a route from the first region to the second region and a route from the second region to the first region.
[0026]
The means for heating and vaporizing the organic material comprises the porous material. Means for holding the medium so as to deposit the organic material vaporized from an endless belt on the surface of the medium; means for heating the medium; heating the organic material held in the medium; May further be included.
[0027]
The medium is preferably a cloth made of heat resistant fibers.
[0028]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be described in more detail. In the following embodiments, a vapor deposition apparatus and a vapor deposition method that are suitably used for manufacturing an organic dye layer of a write-once optical disc will be described, but the present invention is not limited to the following embodiments.
[0029]
(Embodiment 1)
FIG. 1 shows a vapor deposition apparatus 100 according to Embodiment 1 of the present invention. The vapor deposition apparatus 100 includes an endless belt 30, a hopper (powder supply apparatus) 40, and a holding apparatus 50 that holds a substrate 60 in a vacuum chamber 10 that is evacuated by a vacuum pump 20. The pressure in the vacuum chamber 10 is typically about 10 ^-Five torr.
[0030]
The organic material powder is supplied from the hopper 40 to the endless belt 30 (first region), transferred while being held by the endless belt 30, and heated and vaporized by the heating device 34 (second region). The vaporized organic material 70 is deposited on the vapor deposition surface of the substrate 60 (substrate or film) held by the holding device 50. Below, each component and process are demonstrated in detail.
[0031]
The organic material powder stored in the hopper 40 is supplied to the endless belt 30 while being stirred by the stirring device 42 provided in the hopper 40. The organic material powder generally has a high compressibility and tends to agglomerate and has low fluidity. Therefore, the organic material powder may not be stably supplied to the endless belt 30 without stirring. By using the stirrer, powder of an organic material having low fluidity can be stably supplied.
[0032]
In addition, the fluidity can be further improved by mixing the metal powder together with the organic material powder. The metal powder has good heat conductivity and high heat resistance, so there is little heat loss in the process of heating and vaporizing the powder, and it does not substantially contain components that vaporize by heating. The impurities can be reused without being mixed. The mixing ratio of the organic powder and the metal powder is preferably about 1: 3 to 1:20 by weight. The mixing ratio may be appropriately set in consideration of the fluidity of the organic powder.
[0033]
Note that the stirring device 42 used in the present embodiment has blades made of an elastic material (for example, plastic). The blades of the stirring device 42 rotate in a direction opposite to the moving direction (arrow 1a) of the endless belt 30 as indicated by an arrow 2a in FIG. When the blade comes into contact with the endless belt 30, the blade presses the powder against the endless belt 30 by its elastic force. As will be described in detail later, when the endless belt 30 is made of a porous material or a material having a hole on the surface (such as a metal mesh), the above-described blades efficiently fill the holes with powder. can do.
[0034]
The endless belt 30 only needs to have a function of holding and transferring powder of an organic material. Note that a material that can withstand a temperature at which an organic material is vaporized (including evaporation and sublimation) is preferable, and a material having high thermal conductivity is preferable. Specifically, a thin metal plate is preferable, and SUS304 is particularly preferable because it is used in a vacuum. In addition to SUS304, a metal plate made of nickel or titanium can be used. Further, by using a porous material or a material having a hole on the surface (metal mesh or the like) as the material of the endless belt 30, the organic material powder is efficiently held (many powders per unit length). In addition, the powder can be efficiently heated (the contact area with the powder is increased). As the porous material, foam metal can be used.
[0035]
Further, when the endless belt 30 made of a porous material or the like is used, the powder filling efficiency can be further improved by further providing the ultrasonic vibrator 80 in the powder supply unit. The ultrasonic transducer 80 is preferably one that generates ultrasonic waves of about 10 to 100 kHz. Instead of the ultrasonic vibrator 80, an apparatus capable of applying ultrasonic waves to powder, such as an ultrasonic motor, can be widely used.
[0036]
The endless belt 30 is circulated by driving devices 32a and 32b. The powder of the organic material held on the endless belt 30 is moved and heated and vaporized by the heating device 34. As the heating device 34, a known heating device such as a resistance heating device or a dielectric heating device can be used. By providing the heat insulating members 36a and 36b on both sides of the region where the endless belt 30 is heated, heat dissipation can be suppressed, so that the heating efficiency of the endless belt 30 can be increased. The heat insulating member 36a may be provided only on the powder supply side, or may be omitted depending on the length of the endless belt 30 (distance from the powder supply unit) and the capability of the heating device. As a material of the heat insulating members 36a and 36b, a material having a heat resistance of about 1000 ° C. or more and a thermal conductivity of 0.007 cal / sec · ° C. · cm or less is preferable. For example, a ceramic material such as Macor manufactured by Ishihara Pharmaceutical Co., Ltd. can be used. In the case of using a powder material that easily aggregates by heating, cooling members 38a and 38b may be further provided on both sides of the heat insulating members 36a and 36b. Of course, it is possible to omit the cooling member 38b.
[0037]
The vaporized organic material 70 is deposited on the vapor deposition surface of the substrate 60 (substrate or film) held by the holding device 50. The vaporization speed of the organic material can be controlled by the feed speed and heating power of the endless belt 30. The deposition rate can be controlled by adjusting the vaporization rate and the feed rate of the substrate 60. Furthermore, the deposition rate can also be controlled by adjusting the distance between the region where the organic material evaporates (heating region) and the vapor deposition surface of the substrate. The holding device 50 moves in the direction of the arrow 3a while rotating the substrate 60 (for example, in the direction of the arrow 4a). By rotating the substrate 60, the uniformity of the deposited film can be improved.
[0038]
FIG. 2 shows a schematic diagram of the endless belt 30. For example, as shown in FIG. 2, an organic material powder is supplied by a hopper 40 to a region (organic material region) 30 a having a width of about 30 mm at the center in the width direction of an endless belt 30 having a width of about 50 mm. As the endless belt 30 moves, the powder of the organic material is transferred to a region (heating region) 34a heated by the heating device 34 and evaporated. For example, as shown in FIG. 2, the heating region 34 a can be a region of about 30 mm in the longitudinal direction of the endless belt 30 and the entire width direction. The width of the heating region 34a is preferably wider than the width of the organic material region 30a so that the organic material powder is completely evaporated.
[0039]
Organic materials include phthalocyanine, naphthalocyanine, squarylium, colokonium, pyrylium, naphthoquinone, anthraquinone, xanthene, triphenylmethane, azulene, tetrahydrocholine, phenanthrene, triphenothiazone. And polymethine dye materials can be used.
[0040]
(Embodiment 2)
FIG. 3 shows a vapor deposition apparatus 200 according to Embodiment 2 of the present invention. The vapor deposition 200 differs from the vapor deposition apparatus 100 of Embodiment 1 in that a wheel-shaped endless belt 130 is used as the endless belt.
[0041]
The vapor deposition apparatus 200 includes a wheel-shaped endless belt 130, a hopper (powder supply apparatus) 140, and a holding apparatus 150 that holds the substrate 60 in a vacuum chamber 110 that is evacuated by a vacuum pump 120. . The organic material powder is supplied from the hopper 140 to the endless belt 130 (first region), transferred while being held on the endless belt 130, and heated and vaporized by the heating device 134 (second region). The vaporized organic material 70 is deposited on the vapor deposition surface of the substrate 60 (substrate or film) held by the holding device 150.
[0042]
In addition, since the form of the endless belt 130 is different, the arrangement of the heat insulating member 136 and the cooling member 138 is different from that of the vapor deposition apparatus 100, but these arrangements are not limited to this and may be the same as those in the first embodiment. The stirring device 142 provided in the hopper 140 may be the same as that of the first embodiment, or another known stirring device may be used. The rotation direction 11a of the wheel-shaped endless belt 130 and the rotation direction 12a of the stirring device 142 are preferably opposite to each other as in the first embodiment. Of course, the rotation direction 14a and the transfer direction 13a of the base body 60 are not limited to the illustrated example.
[0043]
In the vapor deposition apparatus 200, since the position where the organic material is heated and vaporized is higher than the position where the powder of the organic material is supplied, in particular, as the material of the wheel-shaped endless belt 130, a porous material, It is preferable to use a material having pores on the surface. When a material having a flat surface is used, it may be difficult to stably hold and transfer the organic material powder as indicated by 130a in FIG.
[0044]
An example of the endless belt 130 is shown in FIG. 4A is a sectional view of the endless belt 130, and FIG. 4B is a top view thereof. The endless belt 130 is, for example, a belt made of SUS304 (thickness: about 1 mm) having an outer diameter of about 100 mm and an inner diameter of about 98 mm, and has a large number of holes 130b having a depth of about 0.5 mm and a diameter of about 3 mm. Of course, the shape of the hole is not limited to a circle, and may not be regularly arranged. A material having a flat surface and a material having a through hole can be bonded together to form a belt having holes on the surface. The material for the endless belt is preferably a material excellent in heat resistance and thermal conductivity, as in the first embodiment.
[0045]
(Embodiment 3)
FIG. 5 shows a vapor deposition apparatus 300 according to Embodiment 3 of the present invention. The vapor deposition apparatus 300 includes a mechanism that continuously conveys the glass cloth 330 between the endless belt 230 and the base body 60, and a heating device 234 that heats the glass cloth 330 and vaporizes the organic material. This is different from the vapor deposition apparatus 200 according to the second embodiment. The organic material vaporized from the endless belt 230 is deposited on the glass cloth 330 (first vapor deposition process). Thereafter, the organic material deposited on the glass cloth 330 is heated and vaporized again, and is deposited on the substrate 60 (second deposition process). The vapor deposition apparatus 300 is characterized by performing vapor deposition in two stages.
[0046]
The vapor deposition apparatus 300 vaporizes organic material powder in the vacuum chamber 210 exhausted by the vacuum pump 220 and deposits the organic material on the surface of the glass cloth 330, and on the surface of the glass cloth 330. The deposited organic material is vaporized, and a second vapor deposition unit that vapor-deposits the organic material on the surface of the substrate 60 is provided.
[0047]
The first vapor deposition section includes a wheel-shaped endless belt 230, a heating device 234, a heat insulating member 236, a cooling member 235, a hopper (powder supply device) 240, and a stirring device 242. Since these components have the same functions as the corresponding components of the vapor deposition apparatus 200 according to Embodiment 2, detailed description thereof is omitted. When the blade-shaped stirring device 42 of the first embodiment is used as the stirring device 242, the blade rotation direction 23a is preferably opposite to the wheel-shaped endless belt rotation direction 22a.
[0048]
The organic material powder is supplied from the hopper 240 to the endless belt 230 (first region), transferred while being held by the endless belt 230, and heated and vaporized by the heating device 234 (second region). The vaporized organic material 70 is deposited on the surface of the glass cloth 330.
[0049]
The glass cloth 330 is configured to form a closed curved surface (being endless), and is circulated in the direction of the arrow 21 a by the rotating transport roller 233 and the cooling roller 238. Thereafter, the glass cloth 330 holding the organic material is heated by the heating device 334, and the organic material held on the surface of the glass cloth 330 is vaporized.
[0050]
Since the glass cloth 330 has a large surface area, the vaporized organic material is dispersed and deposited over a wide range. Therefore, since the amount of organic material present in an aggregated state so as to cause splash is small, splash is rarely generated in the process of vaporizing again from the glass fiber. Various materials can be used in place of the glass cloth 330. A cloth made of heat-resistant fibers such as glass fibers has a large surface area, and can disperse and hold an organic material. Therefore, the effect of suppressing the occurrence of splash is high, which is preferable. Moreover, you may use porous materials, such as a metal plate and foam metal, such as SUS304, similarly to an endless belt. In the case of using a material having high thermal conductivity, the heating efficiency can be improved by insulating the periphery of the heating unit as necessary.
[0051]
【Example】
Examples of the present invention will be described below.
Example 1
In this example, a thin film of copper phthalocyanine is prepared using the thin film manufacturing apparatus 100 of the first embodiment. Copper phthalocyanine is suitably used in the examples of the present invention as a material for the dye layer of a write-once optical disc. Copper phthalocyanine is one of the materials that are difficult to form by a conventional coating method because it is hardly soluble in an organic solvent.
[0052]
In this example, copper phthalocyanine powder having a particle size of about 10 to 20 μm was used as the organic material powder. In addition, as a material of the endless belt 30, a thickness of about 0.2 mm ^t SUS304 having a width of about 50 mm was used. The rotation speed of the stirring device 42 in the hopper 40 was set to about 3 rpm.
[0053]
When the feed rate of the endless belt 30 is about 20 mm / min and the heating power of the heating device 34 is 100 W, a thin film of copper phthalocyanine is stably formed at a deposition rate (evaporation rate) of about 3.0 to 4.0 nm / sec. It was possible to form continuously.
[0054]
Further, when the feed rate of the endless belt 30 is about 40 mm / min and the heating power of the heating device 34 is 150 W, the copper phthalocyanine thin film is stably and continuously deposited at a deposition rate of about 5.0 to 6.2 nm / sec. Could be formed.
[0055]
Thus, according to this example, a thin film of copper phthalocyanine can be formed continuously and stably. Further, the deposition rate can be controlled by adjusting the belt feed rate and heating power.
[0056]
(Example 2)
Also in this example, similarly to Example 1, a thin film of copper phthalocyanine is produced using the thin film manufacturing apparatus 100 of Embodiment 1. In this embodiment, the material of the endless belt 30 is foam metal (manufactured by Sumitomo Electric Co., Ni Celmet, thickness 1.6 mm). ^t 7 mesh holes). Other conditions were the same as in Example 1.
[0057]
Deposition of about 5.0 to 5.9 nm / sec when the rotational speed of the stirring device 42 in the hopper 40 is about 3 rpm, the feed speed of the endless belt 30 is about 20 mm / min, and the heating power of the heating device 34 is 100 W. A thin film of copper phthalocyanine could be formed stably and continuously at a high speed. Compared with Example 1 (about 3.0-4.0 nm / sec), it turns out that the vapor deposition rate improved by using a foam metal.
[0058]
Further, when the rotation speed of the stirring device 42 in the hopper 40 is about 3 rpm, the feed speed of the endless belt 30 is about 40 mm / min, and the heating power of the heating device 34 is 150 W, about 7.0 to 7.6 nm / sec. A thin film of copper phthalocyanine could be stably and continuously formed at a deposition rate of 5 nm. Compared with Example 1 (about 5.0-6.2 nm / sec), it turns out that the vapor deposition rate improved by using a foam metal.
[0059]
Further, the same experiment was performed while applying the ultrasonic wave of about 50 kHz using the ultrasonic vibrator 80 while supplying the powder with the hopper 40. When the feed rate of the endless belt 30 is about 20 mm / min and the heating power of the heating device 34 is 100 W, a thin film of copper phthalocyanine is stably and continuously formed at a deposition rate of about 5.0 to 5.6 nm / sec. We were able to. Further, when the feed rate of the endless belt 30 is about 40 mm / min and the heating power of the heating device 34 is 150 W, the copper phthalocyanine thin film can be stably and continuously deposited at a deposition rate of about 8.0 to 8.4 nm / sec. Could be formed. Thus, by applying ultrasonic waves while supplying powder to the porous material, the powder can be supplied uniformly, so that the deposition rate (vaporization rate) can be further stabilized.
[0060]
Example 3
Also in this example, similarly to Example 1, a thin film of copper phthalocyanine is produced using the thin film manufacturing apparatus 100 of Embodiment 1. In this example, a test was performed by putting a mixture of copper phthalocyanine having a particle size of about 1 to 10 μm and 100 to 200 mesh copper powder in a weight ratio of about 1:15 into the hopper 40. It was. The material of the endless belt is about 0.2 mm thick as in Example 1. ^t SUS304 having a width of about 50 mm was used, and the rotation speed of the stirring device 42 was set to about 3 rpm.
[0061]
When the feed rate of the endless belt 30 is about 60 mm / min and the heating power of the heating device 34 is 100 W, a thin film of copper phthalocyanine is stably and continuously formed at a deposition rate of about 6.5 to 7.0 nm / sec. We were able to. Further, when the feed speed of the endless belt 30 is about 120 mm / min and the heating power of the heating device 34 is 150 W, the copper phthalocyanine thin film can be stably and continuously deposited at a deposition rate of about 9.0 to 9.5 nm / sec. Could be formed.
[0062]
As is clear from the comparison with Example 1, by mixing the metal powder and the organic material powder, the deposition rate per unit belt feed speed is reduced, but the uniformity of the obtained film is as follows. It was superior to the film obtained in Example 1 (less splash). This is probably because the organic material powder was uniformly and efficiently heated by mixing the organic material powder with the metal powder.
[0063]
(Example 4)
In this example, a thin film of copper phthalocyanine is prepared using the thin film manufacturing apparatus 200 of the second embodiment. A copper phthalocyanine powder having a particle size of about 10 to 20 μm was used as the organic material powder. The endless belt 130 shown in FIG. 4 was used. The rotation speed of the stirring device 142 (using the same one as in Example 1) in the hopper 140 was set to about 3 rpm.
[0064]
When the rotational speed of the endless belt 130 is about 0.17 rpm and the heating power of the heating device 134 is 100 W, the copper phthalocyanine thin film can be stably and continuously deposited at a deposition rate of about 3.0 to 3.9 nm / sec. Could be formed. Further, when the rotation speed of the endless belt 130 is about 0.25 rpm and the heating power of the heating device 134 is 150 W, a thin film of copper phthalocyanine can be stably and continuously deposited at a deposition rate of about 6.0 to 7.0 nm / sec. Could be formed.
[0065]
Thus, according to this example, a thin film of copper phthalocyanine can be formed continuously and stably. Further, the deposition rate can be controlled by adjusting the rotational speed and heating power of the wheel-shaped endless belt.
[0066]
(Example 5)
In this example, a thin film of copper phthalocyanine is prepared using the thin film manufacturing apparatus 300 of the third embodiment. A copper phthalocyanine powder having a particle size of about 10 to 20 μm was used as the organic material powder. Further, the endless belt 230 shown in FIG. 4 was used. The rotation speed of the stirring device 242 in the hopper 240 (the same as that used in Example 1) was set to about 3 rpm. That is, the configuration of the first vapor deposition section is the same as the corresponding configuration in the fourth embodiment. A configuration in which the distance between the region where the organic material is vaporized and the glass cloth 330 is adjusted, and copper phthalocyanine can be stably and continuously supplied from the first vapor deposition section to the glass cloth 330 at a deposition rate of about 50 nm / sec. did. As the glass cloth 330, a glass cloth made of 150 denier glass fiber (40 mm wide, about 80 warp yarns, about 30 weft yarns per 30 mm in the longitudinal direction, thickness: about 0.1 mm, glass fiber tensile strength: about 100 kg) ) Was used.
[0067]
When the heating power of the heating device 334 is 150 W and the glass cloth 330 is conveyed at a conveyance speed of about 400 mm / min in contact with a heating source at about 300 ° C., a deposition rate of about 8.0 to 9.0 nm / sec is obtained. Obtained. In the formed thin film of copper phthalocyanine, almost no splash was observed, and a very uniform film was obtained.
[0068]
【The invention's effect】
As described above, according to the present invention, it is possible to provide a vapor deposition method and a vapor deposition apparatus excellent in productivity while solving the problems of the conventional coating method. The vapor deposition method and vapor deposition apparatus according to the present invention can manufacture a thin film having a thickness of 1 μm or less, such as a dye layer of a write-once optical disc, with high accuracy. Furthermore, since the organic material is supplied as a powder, the productivity of the vapor deposition method according to the present invention is higher than that of the conventional method. Moreover, the occurrence of splash can be reduced by performing two-stage vapor deposition.
[Brief description of the drawings]
FIG. 1 is a schematic view showing a vapor deposition apparatus 100 according to Embodiment 1. FIG.
FIG. 2 is a schematic diagram of an endless belt 30 used in the first embodiment.
FIG. 3 is a schematic view showing a vapor deposition apparatus 200 according to Embodiment 2. FIG.
4 is a schematic view of an endless belt 130 used in Embodiment 2. FIG. (A) is sectional drawing, (b) is a top view.
5 is a schematic diagram showing a vapor deposition apparatus 300 according to Embodiment 3. FIG.
[Explanation of symbols]
10, 110 Vacuum chamber
20, 120 Vacuum pump
30, 130, 230 Endless belt
32a, 32b drive device
34, 134 Heating device
36a, 36b, 136 heat insulation member
38a, 38b, 138 Cooling member
40, 140 hopper (powder supply device)
42, 142, 242 stirring device
50, 150 Substrate holding device
60 substrate
70 Vaporized organic materials
80 Ultrasonic vibrator
100, 200, 300 Vapor deposition equipment

Claims (14)

A supply step of continuously supplying organic material powder to the heating unit;
Heating and vaporizing the powder of the organic material;
Depositing the vaporized organic material on a surface of a substrate;
In the supplying step, the powder of the organic material is filled in the holes of the endless belt made of a porous material, and the powder is supplied to the heating unit by rotating the endless belt made of the porous material. Including the steps of:
The step of heating and vaporizing the powder of the organic material is performed in a state where the organic material is held on the endless belt,
The vapor deposition method in which the supplying step, the vaporizing step, and the deposition step are performed in a vacuum. The vapor deposition method according to claim 1 , wherein the porous material is made of foam metal. The step of filling the powder of the organic material is a step of filling the pores of the endless belt made of the porous material with the powder of the organic material while applying ultrasonic vibration to the endless belt made of the porous material. The vapor deposition method according to claim 1 or 2 . The said supply process includes the process of supplying the powder of this organic material to the endless belt which consists of said porous material, stirring the powder of said organic material with metal powder. The vapor deposition method of description. The vapor deposition method according to claim 1 , wherein the endless belt is cooled after passing through the heating unit, and then the organic material powder is supplied again. Depositing said vaporized the organic material to the surface of the substrate,
Vaporizing the organic material and depositing it on the surface of the medium;
Heating and revaporizing the organic material deposited on the surface of the medium;
Depositing the re-vaporized organic material on the surface of the substrate;
The vapor deposition method in any one of Claim 1 to 4 which contains these. The vapor deposition method according to claim 6 , wherein the substrate is a cloth made of heat resistant fiber. An endless belt made of a porous material that cyclically passes through the first region and the second region, and holding the organic material powder and the metal powder in the pores of the porous material ;
Provided to the first region, while the powder of the organic material was stirred with the metal powder, and means for supplying the powder of the organic material in an endless belt made of the porous material,
Provided to the second region, and means for heating the endless belt made of the porous material, is vaporized by heating the organic material held in the endless belt made of the porous material,
Means for holding the substrate to deposit the vaporized organic material on a surface of the substrate;
The vapor deposition apparatus which has in a vacuum chamber. The vapor deposition apparatus according to claim 8 , wherein the porous material is made of foam metal. The vapor deposition apparatus according to claim 8 or 9 , further comprising means for applying ultrasonic vibration to the endless belt made of the porous material in the first region. The porous claim endless belt made of a material further comprises a heat insulating means on at least one of said first region extending to said second region from the path and the second from said region reaches the first region route 8 To 10. The vapor deposition apparatus according to any one of 10 to 10 . The porous claim endless belt made of a material further comprises at least one cooling unit of the first region extending to said second region from the path and the second from said region reaches the first region route 8 The vapor deposition apparatus in any one of 11 . Means for heating and vaporizing the organic material;
Means for holding the medium so that the organic material vaporized from the endless belt made of the porous material is deposited on the surface of the medium;
Means for heating the medium and heating and vaporizing the organic material held in the medium;
The vapor deposition apparatus according to claim 8 , further comprising: The vapor deposition apparatus according to claim 13 , wherein the medium is a cloth made of heat resistant fiber.

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