JP3736034B2 - Method and apparatus for manufacturing reticle for semiconductor manufacturing - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method of manufacturing a reticle for manufacturing a semiconductor and an apparatus therefor.
[0002]
[Prior art]
In a stepper or a photo repeater, a reticle that is a photomask is used.
On the reticle, as shown in FIG. 16, in addition to the chip pattern 100, a reticle alignment mark 102 necessary for exposing the pattern with a stepper and a mark 101 positioned on the scribe line are formed. Here, the reticle alignment mark 102 other than the chip pattern 100, the mark 101 on the scribe line, and the like formed on the reticle are called a frame.
Note that the mark 101 positioned on the scribe line includes a test pattern for measurement, a mark for measuring a transistor, a wafer alignment mark, a line width measurement mark, and the like.
[0003]
The position of the reticle alignment mark 102 is determined within the reticle. On the other hand, since the position of the scribe line changes according to the chip size and the arrangement of the chips, the position of the mark 101 on the scribe line (hereinafter, the mark on the scribe line is also simply referred to as a mark) also changes. The mark 101 on the scribe line has various patterns and sizes.
[0004]
The mark 101 on the scribe line is arranged on the reticle according to an arrangement rule corresponding to the type of mark. At this time, the order of arranging the marks 101 follows a predetermined arrangement priority order.
As the arrangement rule of the mark 101, for example, the mark 101 is arranged on the outermost periphery of the scribe line area, arranged inside the scribe line area, or arranged near the center of the scribe line area.
[0005]
The mark 101 arranged on the scribe line is composed of a plurality of cells arranged in a line, and the single mark 101 includes about 10 cells having a width of about 100 μm. The number of cells included in the mark 101 and the cell size vary depending on the type of the mark. On the scribe line, all these cells are arranged according to a predetermined arrangement rule so as not to overlap each other.
For cells that have a high priority and are placed first on the scribe line, there are many free areas on the scribe line, so an area that does not overlap with other cells can be easily found.
Conventionally, the above-described processing is performed manually using a CAD device such as a layout editor.
[0006]
[Problems to be solved by the invention]
However, it is not easy to manually find an empty area corresponding to the cell size on the scribe line by using a CAD device for the cells that have low priority and are arranged later. That is, it is necessary to search for a scribe line while comparing an empty area existing between previously arranged cells and a cell size to be arranged.
[0007]
In particular, in the vicinity of the intersection of scribe lines where cells arranged in the horizontal direction and cells arranged in the vertical direction gather, whether or not the cells can be arranged without overlapping in the vertical direction of the search direction in addition to the search direction. It must be judged and takes time.
[0008]
By the way, by arranging a plurality of cells as if they were one cell, it is possible to reduce the work of obtaining the arrangement position. However, when multiple cells are combined, the size of the cell increases, so there is a high possibility that cells placed in the vertical direction and cells placed in the horizontal direction will overlap at the intersection of the scribe lines. If it cannot be placed, the collected cells must be divided.
For example, when the above-described cell division and arrangement are performed manually using a CAD device such as a layout editor, if there are about 300 cells to be arranged on a scribe line, all the cells It takes about 2 hours to determine the position of the arrangement.
[0009]
The present invention has been made in view of the above-described prior art, and can reduce the time spent in the process of placing a mark on a scribe line in the manufacturing process of a semiconductor manufacturing reticle, and can reduce the burden on the operator. It is an object of the present invention to provide a method and an apparatus for manufacturing a reticle for manufacturing semiconductors.
[0010]
[Means for Solving the Problems]
  In order to solve the above-described problems of the prior art and achieve the above-described object, the manufacturing method of the present invention attempts to place at least data specifying a cell to be placed on a scribe line, the cell size, and the placement. The cell to be placed on the scribe line based on the cell data including the other cell prohibited area size that does not overlap the cell and the cell placement rule, and the scribe line net data indicating the placement of the scribe line. Is a method for manufacturing a reticle for semiconductor manufacturing, which searches for a free area where the data can be placed, places the cell in the searched free area, and generates cell placement data according to the placement result,
  The cell arrangement rule indicates at least one of a scribe line for starting a search, a search order of the scribe line, and a search direction when searching for a position on the scribe line where the cell is arranged,
  Expressing a net structure that forms a link from each node to a node located adjacent to each other in four directions (up, down, left, and right), and generating a node at a position where a cell has already been placed. Thus, by tracing the node based on the link, the cell data is referred to and a position where the cell can be arranged on the scribe line is searched.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
A method and apparatus for manufacturing a reticle for manufacturing a semiconductor according to an embodiment of the present invention will be described below.
FIG. 1 is a diagram for explaining input / output data of a cell placement system 1 used in this method of manufacturing a reticle for manufacturing semiconductors.
As shown in FIG. 1, the cell arrangement system 1 inputs, for example, cell data 2 and scribe line net data 3 for each mark on the scribe line, and outputs cell arrangement data 4 indicating the cell arrangement on the scribe line. .
[0013]
Cell data 2
The cell data 2 is generated for each mark on the scribe line, and includes a cell name, a dummy cell name, a cell size, another cell prohibited area size, and a cell arrangement rule included in the mark.
Here, the cell name is the name of a cell placed on the scribe line. The dummy cell name is a name corresponding to the cell name on a one-to-one basis. Here, the dummy cell is formed on the reticle in order to prevent double exposure when the mask is repeated and exposed. The dummy cells are arranged at corresponding positions on the opposite scribe line when the cells are arranged on the outermost scribe line. Note that dummy cell names are omitted in cells that do not require dummy cells.
The cell size is the size of the cell area (rectangle), and is defined, for example, by indicating the coordinate values of the lower left and upper right corners of the area with reference to the origin of the cell.
[0014]
The other cell prohibited area size is the size of an area (rectangle) that is prohibited from overlapping with the arrangement area of other cells. The other-cell prohibited area size is defined, for example, by indicating the coordinate values of the lower left corner and the upper right edge of the area with respect to the origin of the cell, similarly to the cell size. If no other cell prohibited area is designated, the other cell prohibited area matches the cell size.
[0015]
The cell placement rule is a rule for searching for a placeable area on a scribe line when placing a cell on the scribe line, and the direction of the scribe line, the search start scribe line, and the search direction on one scribe line. Specify these three.
[0016]
FIG. 2 is a diagram for explaining an example of cells arranged on a reticle in accordance with cell data 2.
As shown in FIG. 2, the cell 10_1 defined by the cell data 2 is included in the mark 10 and has a cell name “cell01”, for example. The cell size of the cell 10_1 is, for example, “(−50, −35) − (50, 35))”, and the size of the other cell prohibited area is, for example, “(−52, −35) − (52, 35)”. ) ”. A dummy cell 12_1 corresponding to the cell 10_1 is included in the dummy mark 12 and is given a dummy cell name “cell01d”.
Further, the cell arrangement rule indicates that the direction of the scribe line is horizontal, the search start scribe line is lower and outer, and the search direction on one scribe line is right.
[0017]
Scribe line net data 3
The scribe line net data 3 is described using the position of the scribe line between chips. For example, the scribe line net data 3 indicates the chip size by the coordinates of the lower left end and the upper right end of the area with the origin of the chip (lower left end) as a reference, and on the reticle by the coordinates and arrangement indicating the position of the reference chip. The arrangement position of the chip is shown.
Here, for example, the chip size is indicated by “(0, 0, 3000, 4000)” when the lower left corner is coordinates (0, 0) and the upper right end is coordinates (3000, 4000). The chip position is, for example, “(−7500, −6000), 5 × 3” when the position of the reference chip is “(−7500, −6000)” and the arrangement is “5 × 3”. Indicated by
[0018]
Net structure of scribe line in cell placement system 1
FIG. 3 is a diagram for explaining the net structure of the scribe line in the cell arrangement system 1.
As shown in FIG. 3 and FIG. 4, the intersection point of the scribe line is a node 20, and by forming a link 22 from each node 20 to a node 20 that is located adjacent to the four directions of the top, bottom, left, and right in the figure, Represents the net structure.
Further, as shown in FIG. 5, a node 24 is generated at the position where the cell is arranged.
Furthermore, as shown in FIG. 5, the corresponding cell data 2 can be referred to from the node 20 at the intersection existing in the arranged cellize together with the node 24 generated by arranging the cell.
[0019]
Cell size and other cell prohibited area
FIG. 6 is a diagram for explaining other cell prohibited areas.
Adjacent cells are arranged such that the cell size of one cell is located outside the other cell prohibited area. . That is, the space between cells is determined by the cell size and other cell prohibited areas. For example, as shown in FIG. 6, a cell having a cell size of 25 is arranged outside the other cell prohibited area 26 of another cell.
[0020]
Hereinafter, the configuration of the cell arrangement system 1 will be described.
FIG. 7 is a configuration diagram of the cell arrangement system 1.
As illustrated in FIG. 7, the cell arrangement system 1 includes, for example, an input unit 40, a scribe line data conversion unit 41, a scribe net search unit 42, a memory 43, and an output unit 44.
The input unit 40 inputs the cell data 2 and the scribe line net data 3.
[0021]
The scribe line data conversion unit 41 converts the scribe line net data 3 into, for example, scribe net structure data indicating the scribe net structure shown in FIG. 3, and stores the data in the memory 43.
[0022]
The memory 43 stores cell data 2 and scribe line net data 3 input from the input unit 40. The memory 43 stores the scribe net structure data generated by the scribe line data conversion unit 41 and the cell arrangement data 4 for the cells arranged on the reticle by the scribe net search unit 42.
The output unit 44 outputs the cell arrangement data 4 stored in the memory 43.
[0023]
The scribe net search unit 42 searches, for example, the scribe net shown in FIG. 3 based on the cell arrangement rules included in the cell data 2 stored in the memory 43, and arranges the cells.
The scribe net search unit 42 performs search and arrangement processing as follows.
That is, the scribe lines are searched in order from the search start scribe line indicated by the cell arrangement rule.
In each scribe line, the search is performed by tracing the nodes in the search direction indicated by the cell arrangement rule.
Furthermore, while following the nodes on the scribe line in the search direction, the cell size of the cell to be arranged is compared with an empty area, and if there is an empty area where the cell can be arranged, the cell is arranged at the position, A node is created at the arrangement position on the scribe net. In addition, the coordinates of the arranged cell are added to the cell data 2.
[0024]
Search order for scribe lines
The search order of the scribe lines in the scribe net will be described using the example of the scribe lines shown in FIG.
The scribe net search unit 42 searches only the outer scribe lines when the outer scribe lines V1, V6, H1, and H4 shown in FIG.
In addition, when the scribe net search unit 42 starts the search for the inner scribe lines V2, V3, V4, V5, H2, and H3, the scribe net search unit 42 starts from the outer scribe line (for example, V2) inward. Search the scribe line in order. When the search is performed up to one inner side (for example, V5) of the outer side scribe line, finally, the scribe line (for example, V1) outside the scribe line where the search is started is searched.
[0025]
The scribe-net search unit 42 searches for the scribe lines in order from the scribe line closest to the center when starting the search for the center scribe line (horizontal and vertical). When there are scribe lines having the same distance to the center, for example, priority is given to the left side or the lower side.
[0026]
FIG. 9 is a diagram showing the relationship between the direction of the scribe line, the search start scribe line, and the search order in the case of FIG.
As shown in FIG. 9, for example, when the search is started from the left inner side (V2) for the scribe line in the vertical direction, the search is performed in the order of V2, V3, V4, V5, and V1.
[0027]
Search direction on the scribe line
The search direction on the scribe line selected as the search target in the scribe net search unit 42 will be described with reference to FIG.
As shown in FIG. 10, when the search direction is downward 52, upward 54, leftward 51, rightward 50, the position where the cell can be arranged is searched from the end to the end of the selected scribe line. When searching to the end and there is no position where the cell can be arranged, the next scribe line is selected and the same search is performed.
When the search direction is the center 53, a position where cells can be arranged in two directions from the center of the selected scribe line toward both ends is searched. When cell placement positions are found in both of the two directions, the one closer to the center 53 is set as the cell placement position. If a cell can be arranged in only one of the two directions, that position is taken as the arrangement position. If the cell placement position is not found in both directions, the next scribe line is selected and the same search is performed.
[0028]
Cell overlap inspection on scribe line
In order to prevent the cell to be arranged from overlapping the already arranged cell, the scribe net search unit 42 creates a free area on the scribe line as shown below in the scribe line search process. Whether the cell to be arranged can be arranged is checked.
[0029]
That is, the scribe net search unit 42 first determines a position where a cell is to be arranged so that one side of the cell does not overlap another cell.
Next, the scribe net search unit 42, with respect to a scribe line in the same forward direction as the search direction, for each node that is within the cell size of the temporarily placed cell and for each adjacent node outside the cell size, With reference to the cell data 2, it is checked whether the cell size and the other cell prohibited area overlap between the temporarily arranged cell and the already arranged cell.
Next, the scribe net search unit 42 is a node within the cell size of the arranged cell with respect to the scribe line positioned perpendicular to the search direction, and a node that is adjacent outside the cell size and links in the vertical direction. With reference to the cell data 2 for each of the above, it is checked whether the cell size and the other cell prohibited area overlap between the temporarily arranged cell and the already arranged cell.
[0030]
The process of searching the next cell arrangement position on the scribe line when the cell to be arranged (cell size) and the empty area are inspected and it is determined that the cell to be arranged overlaps with another cell. 11A, 11B, and 11C will be used for explanation.
In FIGS. 11A, 11B, and 11C, the search direction is the right direction in the figure.
First, in the example shown in FIG. 11A, the cells 60 and 62 are already arranged, and the cell 61 is the cell to be arranged.
In this case, first, as shown on the left side of FIG. 11A, the cell 61 is temporarily arranged on the right side of the cell 60, and the cell size of the cell 61 is compared with the free area between the cell 60 and the cell 62. Then, it is checked whether or not the cell 61 and the cells 60 and 62 overlap when the cell 61 is arranged in the empty area. In this case, since the cell 61 and the cells 60 and 62 overlap, next, as shown on the right side of FIG. 11A, the cell 61 is temporarily placed on the right side of the cell 62, and similarly whether or not they overlap. inspect. In this case, since the cell 61 and the cell 62 do not overlap, the cell 61 is arranged at the position.
[0031]
In the example shown in FIG. 11B, the cells 63 and 64 are already arranged, and the cell 65 is a cell to be arranged while searching in the right direction.
In this case, first, as shown in the left side of FIG. 11B, the cell 65 is temporarily arranged on the right side of the cell 63, and the empty area between the cell 63 and the cell 64 is compared with the cell size of the cell 65. Then, when the cell 65 is arranged in the empty area, it is checked whether or not the cell 65 and the cells 63 and 64 overlap. In this case, since the cell 65 overlaps the cell 64, next, as shown on the right side of FIG. 11B, the cell 65 is arranged in the empty area on the right side of the cell 64, and it is checked whether or not it overlaps. In this case, since the cells do not overlap, the cell 65 is arranged at the position.
[0032]
Further, in the example shown in FIG. 11C, the cells 66, 67, and 68 are already arranged, and the cell 69 is a cell to be arranged while searching in the right direction.
In this case, first, as shown on the left side of FIG. 11C, a cell 69 is temporarily placed on the right side of the cell 68, and the empty area between the cell 67 and the cell 68 is compared with the cell size of the cell 69. Then, when the cell 69 is arranged in the empty area, it is checked whether or not the cell 69 and the cells 66 and 67 overlap. In this case, since the cell 67 overlaps with the cell 69, next, as shown on the right side of FIG. 11C, the cell 69 is arranged in the empty area on the right side of the cell 67 and it is inspected whether or not it overlaps. In this case, since the cells do not overlap, the cell 69 is arranged at the position.
[0033]
Next, FIG. 12 shows an example in which the search is performed five times in the right direction and the node is traced while checking the cell size and the empty area of the cell to be arranged in the horizontal direction on the scribe line.
In FIG. 12, cells 75, 76, 77, 78, and 79 are cells that are already arranged on the scribe line, and a cell 80 is a cell that is going to be arranged on the scribe line 81 in the horizontal direction.
In this case, first, the cell 80 is temporarily arranged at the position A of the scribe line 81 from the left side in FIG. In this case, it is determined that the right end of the cell 80 overlaps the cell 75. Next, the cell 80 is temporarily arranged at the position B of the scribe line 81. Even in this case, it is determined that the right end of the cell 80 overlaps the cell 76. Next, the cell 80 is temporarily arranged at the position C of the scribe line 81. Even in this case, it is determined that the upper end of the cell 80 overlaps the cell 77. Next, the cell 80 is temporarily arranged at the position D of the scribe line 81. Even in this case, it is determined that the right end of the cell 80 overlaps the cell 78. Then, the cell 80 is temporarily arranged at the position E of the scribe line 81. In this case, it is determined that there is no cell overlapping with the cell 80, and the cell 80 is finally arranged at the position E.
[0034]
Cell placement on the outermost scribe line
The scribe net search unit 42 arranges cells on the outermost scribe line by the following algorithm.
That is, when the scribe net search unit 42 arranges a cell on the outermost scribe line, the scribe net search unit 42 sets a dummy cell having the same cell size as the cell to be arranged on the scribe line located on the opposite side to the scribe line on which the cell is arranged. Also check for placement.
The scribe net search unit 42 arranges the position cell and the dummy cell when the cell and the dummy cell can be arranged in each scribe line. On the other hand, if one or both of the cells and the dummy cells cannot be arranged at the position, the search is continued in the search direction in order to find the next empty area.
[0035]
The scribe net search unit 42 arranges cells on a scribe line in the above-described algorithm. Then, the cell arrangement data 4 when all the cells are finally arranged is output from the output unit 44 shown in FIG.
The cell arrangement data 4 includes the cell name and the position (coordinate) where the cell is arranged, and when the dummy cell is arranged, the dummy cell name and the position where the dummy cell is arranged.
Further, the scribe net search unit 42 outputs a message including the cell name that could not be arranged when the area where the cell can be arranged cannot be found even after searching the entire range of the scribe net according to the cell arrangement rule.
[0036]
Hereinafter, processing in the cell arrangement system 1 shown in FIGS. 1 and 7 will be described with reference to a flowchart shown in FIG.
Here, as shown in FIG. 14, the cell data 2 includes cell names, dummy cell names, cell sizes, other cell prohibited areas, and cell arrangement rules for marks A to K. Here, the priority of the cell arrangement is specified so as to decrease from the mark A to the K.
Note that the cell data 2 may not be included in the cell data 2 but may be created for each mark.
On the other hand, the scribe line net data 3 indicates a scribe line having a net structure as shown in FIG. Specifically, the scribe line net data 3 indicates, for example, a chip size (0, 0, 3000, 4000) and a chip position ((−7500, −6000), 5 × 3).
[0037]
First, the cell arrangement system 1 inputs cell data 2 (S 1) and stores the cell data 2 in the memory 43.
Next, the cell arrangement system 1 inputs the scribe line net data 3 (S2), and stores the scribe line net data 3 in the memory 43.
[0038]
Next, the scribe line data conversion unit 41 converts the scribe line net data 3 stored in the memory 43 into scribe net structure data indicating the scribe net structure shown in FIG. 3, and stores this in the memory 43.
[0039]
Next, the scribe net search unit 42 uses the cell data 2 and the scribe net structure data stored in the memory 43 according to the scribe line search order, the search direction on the scribe line, and the cell overlap inspection algorithm. A cell is arranged on the line, and data relating to the cell arrangement is added to the cell arrangement data (S4). Then, the cell arrangement data 4 when the arrangement of all the cells of the marks A to K is completed is output via the output unit 44 shown in FIG. 7 (S5).
At this time, the cell arrangement data 4 indicates that the marks A to K are arranged on the scribe line as shown in FIG.
[0040]
In the cell arrangement system 1 described above, if the cell data 2 is stored in the memory 43 as a library, the arrangement positions of the cells on the scribe lines are automatically determined even for scribe lines of various chip sizes. Can do. For example, if calculation is performed by a computer using a cell arrangement position calculation program, the arrangement positions of all cells can be obtained in a few seconds.
[0041]
As described above, according to the method and apparatus for manufacturing a reticle for semiconductor manufacturing according to the present embodiment, it is possible to shorten the time spent for placing a mark on a scribe line in the manufacturing process of a reticle for semiconductor manufacturing. Can do.
In addition, the cell placement process can be automatically performed in the cell placement system 1, and the burden on the operator can be reduced.
[0042]
The present invention is not limited to the embodiment described above.
For example, the scribe line for starting the search, the search order of the scribe lines, and the search direction are not limited to the above-described example, and are arbitrary.
Further, when the cells are arranged on the outermost scribe line, the dummy cells may not be arranged.
[0043]
【The invention's effect】
As described above, according to the method and apparatus for manufacturing a reticle for semiconductor manufacturing according to the present invention, the time spent for arranging cells (marks) on a scribe line in the manufacturing process of a reticle for semiconductor manufacturing is shortened. And the burden on the operator can be reduced.
[Brief description of the drawings]
FIG. 1 is a diagram for explaining input / output data of a cell arrangement system used in a method for manufacturing a reticle for manufacturing semiconductors according to the present invention.
FIG. 2 is a diagram for explaining an example of cells arranged on a reticle according to cell data;
FIG. 3 is a diagram for explaining a net structure of scribe lines in the cell arrangement system;
FIG. 4 is a diagram for explaining a link between nodes in a net structure of a scribe line.
FIG. 5 is a diagram for explaining a node generated at a position where a cell is arranged;
FIG. 6 is a diagram for explaining a relationship between a cell size and another cell prohibited area;
FIG. 7 is a configuration diagram of a cell arrangement system.
FIG. 8 is a diagram for explaining a search order of scribe lines in a scribe net;
9 is a diagram showing the relationship between the direction of the scribe line, the search start scribe line, and the search order in the case of FIG. 8;
FIG. 10 is a diagram for explaining a search direction on a scribe line selected as a search target in a scribe net search unit;
FIG. 11 is a diagram for explaining a cell arrangement position search procedure in a scribe net search unit;
FIG. 12 is a diagram for explaining a procedure for searching for a cell arrangement position in a scribe net search unit;
FIG. 13 is a flowchart of processing in the cell arrangement system.
FIG. 14 is an example of cell data.
FIG. 15 is a diagram showing an arrangement pattern when marks are arranged according to the cell data shown in FIG. 14;
FIG. 16 is a diagram for explaining a chip pattern formed on a reticle, a reticle alignment mark, and a mark positioned on a scribe line;
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Cell arrangement | positioning system, 2 ... Cell data, 3 ... Scribing line net data, 4 ... Cell arrangement | positioning data, 10 ... Mark, 10_1-10_n ... Cell, 12 ... Dummy mark, 12_1-12_n ... Dummy cell, 20, 22 ... Node, 40 ... Input unit, 41 ... Scribe line data conversion unit, 42 ... Scribe net search unit, 43 ... Memory, 44 ... Output unit

Claims (2)

Cell data including at least data specifying a cell to be arranged on the scribe line, cell size, other cell prohibited area size not overlapping with the cell adjacent to the cell to be arranged, and cell arrangement rule, and the scribe line Based on the scribe line net data indicating the arrangement of the cell, a search is made for an empty area on the scribe line where the cell to be arranged can be arranged, the cell is arranged in the searched empty area, and the arrangement result A method of manufacturing a reticle for semiconductor manufacturing that generates cell arrangement data according to
The cell arrangement rule indicates at least one of a scribe line for starting a search, a search order of the scribe line, and a search direction when searching for a position on the scribe line where the cell is arranged,
Using the intersection of the scribe lines as a node, a net structure that forms a link from each node to a node that is adjacent in four directions (up, down, left, and right) is represented, and a node is generated at a position where a cell has already been placed. Accordingly, a method for manufacturing a reticle for manufacturing a semiconductor that searches for a position where a cell can be arranged on a scribe line by referring to the cell data by tracing the node based on the link. At least data specifying a cell to be placed on a scribe line, other cell prohibited area size that does not overlap with a cell adjacent to the cell to be placed, a cell size, and a position on the scribe line where the cell is placed are searched. The cell data including the cell arrangement rule indicating at least one of the scribe line to start the search, the search order of the scribe lines, and the search direction, and the scribe line net data indicating the arrangement of the scribe lines are input. A node structure is defined as an intersection between the input means and the scribe line, and a net structure is formed from each node to a node located adjacent to the four directions of up, down, left and right, and a node generated at a position where a cell is already arranged. By traversing the node based on the link By referring to the cell data, a means for searching for a position where the cell can be arranged on the scribe line,
Based on the input cell data and scribe line net data, a search is made for a free area where a cell to be placed can be placed on a scribe line, and the cell placement is performed in the searched free area. Means,
An apparatus for manufacturing a reticle for semiconductor manufacturing, comprising cell arrangement data generating means for generating cell arrangement data according to the arrangement result.

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