JP3726405B2 - Glass substrate smoothing apparatus and substrate manufacturing method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a glass substrate smoothing apparatus and a substrate manufacturing method for polishing and flattening swells and protrusions caused by foreign matter on a glass substrate having a coating film such as a color filter substrate.
[0002]
[Prior art]
In general, as a device for polishing the undulation of a glass substrate having a coating film such as a color filter substrate and projections due to foreign matter, it is composed of a stage for adsorbing and fixing the glass substrate and a polisher that polishes while pressing with flexibility, An apparatus that polishes the entire glass substrate by rotating one or both of the polisher and the glass substrate using an abrasive such as alumina, and an apparatus that directly polishes only the projections using an abrasive tape are known. It has been.
[0003]
[Problems to be solved by the invention]
However, since the apparatus for polishing the entire glass substrate is a system that uniformly polishes the entire glass substrate, if there is a large protrusion on a part of the glass substrate, the part having the protrusion cannot be sufficiently polished. In addition, if the protrusions of the glass substrate are sufficiently polished, portions other than the protrusions may be polished more than necessary, resulting in secondary defects. On the other hand, in an apparatus that polishes directly on the protrusions using the polishing tape, the protrusions are inspected in advance, and the detected parts detected by the inspection are locally polished, and the process is proportional to the number of protrusions detected. There was a drawback that ability changed.
[0004]
[Means for Solving the Problems]
A glass substrate smoothing apparatus and a substrate manufacturing method according to the present invention include a polishing means for polishing a glass substrate surface, a flexible stage for supporting the glass substrate, and a glass substrate pushed up locally from below through the flexible stage. Since it has a push-up means, and the glass substrate on the flexible stage is made by locally lifting and polishing necessary portions in the glass substrate such as protrusions and coating unevenness from the lower side, The polishing level can be changed, and the polishing can be sufficiently smoothed in a fixed processing time.
[0005]
DETAILED DESCRIPTION OF THE INVENTION
According to a first aspect of the present invention, there is provided a flexible stage for supporting a glass substrate to be polished, an inspection machine for specifying a position of a projection or uneven coating portion to be polished on the glass substrate, and the flexible stage. A push-up means that pushes up the flexible stage locally from below and pushes up the projection or uneven coating portion of the glass substrate locally, and the glass substrate pushed up by the push-up means through the flexible stage should be polished Since it is a device having a polishing means for polishing the protrusion or uneven coating portion, by pushing up the protrusion or uneven coating portion of the glass substrate locally from below on the glass substrate which is a work on the flexible stage, The processing level can be partially increased, and smoothing can be sufficiently performed in a certain processing time.
According to a second aspect of the present invention, the glass substrate is polished by supporting the glass substrate on the flexible stage and locally pushing up the flexible stage from below the flexible stage. Glass that is a workpiece on a flexible stage, comprising a polishing step of pushing up the power protrusion or uneven coating portion and polishing the raised protrusion or uneven coating portion with a polishing means. By pushing up the protrusions or uneven coating portions of the glass substrate locally from below the substrate, it is possible to partially increase the processing level, and the substrate can be sufficiently smoothed in a certain processing time.
[0006]
According to a third aspect of the present invention, in the second aspect of the invention, the polishing means is moved, and the polishing means is opposed to a push-up means that pushes up the flexible stage to polish the protrusions or uneven coating portions. Because the glass substrate that is the work on the flexible stage is pressed against the glass substrate, the polishing head (polishing means) is pressed and rotated to polish and smooth the entire glass substrate. The position of the projection or uneven coating portion to be polished is specified with an XY coordinate by an inspection machine or the like, and the polishing head for polishing the entire surface pushes only the coordinate position by partially pushing up the glass substrate from below only at the coordinate position. The pressure is increased to increase the polishing level only on the surface of the glass substrate at the coordinate position, thereby improving the overall smoothness.
[0007]
The invention according to claim 4 is that, in the invention according to claim 3, the pressing rotation operation of the polishing means and the push-up operation of the push-up head of the push-up means are synchronized to polish the projection or the uneven application portion . An abrasive is supplied to the glass substrate which is a workpiece on the flexible stage, and the polishing head is pressed and rotated to polish and smooth the entire glass substrate. Accordingly, the position of the projection or uneven coating portion to be polished is specified by an XY coordinate by an inspection machine or the like, and the polishing head for polishing the entire surface pushes up the glass substrate locally only from the coordinate position, thereby only the coordinate position. The pressing force is increased to increase the polishing level only on the glass substrate surface at the coordinate position, thereby increasing the overall smoothness.
[0008]
【Example】
Hereinafter, an embodiment of the glass substrate smoothing apparatus of the present invention will be described with reference to FIG. In FIG. 1, a flexible polishing head 3 as a polishing means 2 for polishing the surface of a glass substrate 1 which is a work such as a color filter substrate or a glass substrate has a pulse motor 4 for each of the X axis and Y axis. The LM guide 5 can control the position vertically and horizontally. The polishing head 3 is rotated by a motor 6 and is moved in the Z-axis direction by a pneumatic cylinder 7, and the pressure for pressing the polishing head 3 against the glass substrate 1 is changed by the pressure. The polishing level can be selected by adjusting the pressure, the rotation speed, and the discharge amount from the supply unit 8a that supplies the abrasive 8 in which abrasive grains are dissolved in water. On the other hand, the flexible stage 9 made of flexible rubber has a thin groove cut on its surface, and supports and fixes the glass substrate 1 by evacuation. A push-up means 10 is provided below the flexible stage 9 to push up the flexible stage 9 locally. The push-up means 10 can be vertically and horizontally controlled by a pulse motor 11 and an LM guide 12 in each of the X axis and the Y axis. In the Z-axis direction, the push motor 15 rotates through the screw mechanism 14 through the screw mechanism 14. And the flexible stage 9 is locally lifted.
[0009]
With the above configuration, the glass substrate 1 is vacuum-sucked by the flexible stage 9, and the polishing head 3 rotates while pressing the pneumatic cylinder 7 while controlling the XY coordinate position over the entire surface of the glass substrate 1 to supply the polishing agent 8. And polish.
[0010]
On the other hand, as shown in FIG. 2, when the glass substrate 1 is pushed up from below the flexible stage 9 by the push-up head 15, the glass substrate 1 protrudes locally, and the polishing pressure increases accordingly, and the amount of the abrasive 8 increases. . That is, when there are protrusions or coating unevenness in the glass substrate 1, the position is specified by an XY coordinate by an inspection machine or the like, the head 15 is aligned with the position, and the glass substrate 1 is locally pushed up from below. The polishing head 3 for polishing the entire surface has a strong pressing force only at the coordinate position, and increases the polishing level only on the surface of the glass substrate 1 at the coordinate position, thereby improving the overall smoothness. Further, since the push-up means 10 can select an arbitrary position with respect to the XY coordinates, the push-up means 10 is matched to the same position as the XY coordinate position of the polishing head 3 and the push-up head 15 is pushed up when there are a plurality of protrusions. As a result, the polishing level is raised only at the locations where the protrusions are provided, and the overall smoothness is increased. Further, when the glass substrate 1 has various plate thicknesses and the materials to be polished and smoothed are different, the push-up amount of the push-up head 15 can be arbitrarily controlled by the pulse motor 13 and the screw mechanism 14, and an optimum polishing amount is set. It can be done.
[0011]
【The invention's effect】
As described above, according to the glass substrate smoothing apparatus and the substrate manufacturing method of the present invention, the coordinate position of the place where the glass substrate is to be polished strongly, such as the size or protrusion to be polished, is specified in advance and adjusted accordingly. The thrusting means and the polishing means of the polishing head can be controlled, and the thrusting amount of the thrusting head can be controlled arbitrarily with a pulse motor and screw mechanism, and it is possible to polish efficiently with the optimum polishing amount and to increase the smoothness of the glass substrate There is.
[Brief description of the drawings]
FIG. 1 is a block diagram showing an embodiment of a glass substrate smoothing apparatus of the present invention. FIG. 2 is an enlarged side view of a polished portion of the embodiment.
DESCRIPTION OF SYMBOLS 1 Glass substrate 2 Polishing means 3 Polishing head 4,11,13 Pulse motor 5,12 LM guide 7 Pneumatic cylinder 8 Abrasive agent 9 Flexible stage 10 Pushing means 15 Pushing head

Claims (4)

A flexible stage that supports the glass substrate to be polished, an inspection machine that identifies the position of the protrusion or uneven coating portion of the glass substrate to be polished, and the flexible stage is pushed up locally from below the flexible stage to make glass A pushing-up means for locally pushing up the protrusion or uneven coating portion of the substrate to be polished; and a polishing means for polishing the protrusion or uneven coating portion of the glass substrate that is pushed up by the pushing-up means through the flexible stage. A glass substrate smoothing apparatus comprising:   A glass substrate is supported on the flexible stage, and the projection to be polished or the uneven coating portion of the glass substrate is locally pushed up and pushed up by locally pushing up the flexible stage from below the flexible stage. A method for manufacturing a substrate, comprising: a polishing step of polishing the protrusion or the uneven coating portion by a polishing means.   3. The method of manufacturing a substrate according to claim 2, wherein the polishing means is moved, and the protrusion or the uneven coating portion is polished by making the polishing means face the pushing-up means that pushes up the flexible stage.   4. The method for manufacturing a substrate according to claim 3, wherein the projection or the uneven coating portion is polished by synchronizing the pressing rotation operation of the polishing means and the pushing-up operation of the pushing-up head of the pushing-up means.

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