JP3701496B2 - Wafer holding member and wafer storage container provided with this wafer holding member - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a wafer pressing member that is attached to an upper lid of a wafer storage container that stores a plurality of wafers and holds an upper edge portion of the wafer, and a wafer storage container including the wafer pressing member.
[0002]
[Prior art]
A semiconductor wafer (hereinafter simply referred to as a wafer) is obtained by thinly slicing a single crystal ingot such as silicon in a direction perpendicular to the axis, but it is thin and brittle, and it is extremely resistant to contamination, so it is sufficient for its transportation. Careful consideration is necessary.
In other words, in order to transport wafers in a clean state, the wafers are stored in a wafer storage container (wafer shipping box for transport) in a wafer storage in-line basket (inner box) and covered with an upper lid. It is sealed in a state, and further, the outside of the wafer storage container is packed and cardboard packed together with a shock-absorbing material to reduce the impact, and then transported. In order to prevent the wafer from moving with respect to the wafer storage container due to vibration or the like during the transportation or storage, the upper lid includes each upper edge portion of the plurality of wafers stored in the wafer storage container. A wafer presser member (upper buffer member) is provided to hold each of them with an elastic piece.
[0003]
Hereinafter, conventional examples of this type of wafer storage container will be described with reference to two examples (Japanese Utility Model Publication No. 6-2272 and Japanese Patent Application Laid-Open No. 5-63065).
[0004]
As shown in FIG. 10, the wafer storage container described in Japanese Utility Model Publication No. 6-2272 includes an upper lid 51, a container 52, and an inner box 53, and a belt-like shape is formed around each opening periphery of the upper lid 51 and the container 52. Step portions 54 and 55 are provided so that they can be engaged and closed with each other via a packing 56. The inner box 53 has a bowl-like cross-sectional shape, and a large number of pleats 58... Are arranged symmetrically with each other in the arrangement direction of the wafer W inside the upper side walls 57, 57 corresponding to the bowl side. The wafers W... Can be individually accommodated between the adjacent pleats 58, 58 at the left and right side edges. On the other hand, an upper buffer plate 60 is detachably mounted on the lower surface of the upper lid 51, and elastically holds the upper edge of each wafer W ... to prepare for vibration during transportation.
[0005]
FIG. 11 shows the details of the upper buffer plate 60, which includes, for example, a rectangular frame 61 and a pair of descending walls 62 suspended in parallel with the upper side walls 57, 57 of the inner box 53. , 62 and a number of strip-shaped elastic pieces 63 extending inward from the lower edge of each of the elastic pieces 63. A locking piece 64 for locking the upper edge of each wafer W is provided. This locking piece 64 is composed of a pair of side walls 65 and 66 whose sections are symmetrical to each other, and as shown in FIG. A pair of side walls 65, 66 constituting the locking piece 64 are provided in an oblique direction on both sides of each elastic piece 63, and one side wall 65a of the elastic piece 63a is adjacent thereto. The elastic piece 63b is provided adjacent to the other side wall 66b and a part of the elastic piece 63b that overlaps each other when viewed from the side, and the side walls 65 and 66 are arranged so as to have a flat zigzag shape as a whole. .
[0006]
In the above configuration, when a large number of wafers W are individually inserted along the pleats 58... Of the inner box 53, the upper edge portion Wc thereof has elastic pieces 63a and 63b as shown in FIG. There is no fear of getting stuck in the gap P, and it can be accommodated between the pair of side walls 65 and 66 of each locking piece 64. On the other hand, the upper edge Wc of the wafer W supported by the upper buffer plate 60 is formed by the locking pieces 64 of the upper buffer plate 60 provided on the inner lower surface of the upper lid 51, and the left and right side edges thereof are the left and right of the inner box 53. Since the pleats 58, 58... Provided on the both side walls 57, 57 are individually supported, vibrations during transportation or handling of the wafer W can be sufficiently handled. There is no possibility of coming off from the locking piece 64 and coming into contact with other parts to generate fine powder or be damaged.
[0007]
On the other hand, as shown in FIGS. 18 and 19, the wafer storage container described in Japanese Patent Application Laid-Open No. 5-63065 includes an outer box 71, an inner box 72 accommodated in the outer box 71, and a wafer presser 73. Contains. The outer box 71 is composed of a main body 71A and an upper lid 71B, and the upper lid 71B is put on the main body 71A and joined and integrated with the main body 71A, but since the packing is interposed therebetween, the upper lid 71B is closed. In the state, the outer box 71 is kept sealed. The inner box 72 accommodates a plurality of wafers W in an orderly manner. The upper portion of the inner box 72 is open, and a plurality of ribs that are long in the vertical direction are formed inside the opposing side walls in the wafer arrangement direction. Projections are provided at an appropriate pitch, and partition grooves are formed between these ribs. Thus, the wafer is accommodated in a pair of opposing partition grooves formed on the side walls.
[0008]
Here, details of the configuration of the wafer holder 73 will be described with reference to FIGS. 12 is a front sectional view of the wafer retainer 73, FIG. 13 is a right side view of FIG. 12, FIG. 14 is a bottom view of FIG. 12, FIG. 15 is an enlarged detail view of the XV portion of FIG. XVI-XVI sectional view, FIG. 17 is a sectional view taken along line XVII-XVII in FIG.
The wafer retainer 73 is integrally formed of a thermoplastic elastomer (polyester) or the like having a large friction coefficient, and has a rectangular frame 75. The lower surface of the frame 75 has a side surface that faces inward. A plurality of elastic pieces 76... Bent in a letter shape are arranged in high density in two rows on the left and right in the arrangement direction of the wafer W (the vertical direction in FIG. 12). Further, an orientation flat presser 77 that is long in the arrangement direction of the wafers W is provided at the center of the row of the pair of left and right elastic pieces 76. This orientation flat presser 77 is for holding the orientation flat (orientation flat) Wa of the wafer W.
[0009]
On the lower surface of the free end (contact portion with the wafer W) of the elastic piece 76..., A comb facing the arrangement direction of wafers W (left and right direction in FIG. 15) as shown in FIGS. Toothed locking pieces 78a ..., 78b ... and locking pieces 79a ..., 79b are provided so as to expand downward (upward in FIG. 17). That is, each of the elastic pieces 76A shown in FIG. 15 is formed with three locking pieces 78a..., 78b, and each of the elastic pieces 76B and 76C adjacent to the elastic piece 76A has four locking pieces. Pieces 79a... 79b are formed. As shown in FIG. 15, one locking piece 78a of the elastic piece 76A, the locking piece 79b of the elastic piece 76B, and the other locking piece 78b of the elastic piece 76A are elastic. The engaging pieces 79a of the piece 76C mesh with each other, and as shown in FIG. 17, these engaging pieces 78a ... and 79b ... and engaging pieces 78b ... and 79a ... And overlap each other in side view.
[0010]
As shown in FIG. 17, in each elastic piece 76, the opposing surfaces of the locking pieces 78a... And the locking pieces 78b and the locking pieces 79a. These locking pieces 78a ... and the locking pieces 78b and between the locking pieces 79a ... and the locking pieces 79b ... are directed downward (upward in FIG. 17). Grooves (grooves into which the wafer W is to be fitted) 82... Are formed.
[0011]
As shown in FIG. 18, an inner box 72 that accommodates a plurality of wafers W arranged in the direction perpendicular to the drawing sheet is accommodated in a main body 71A of the outer box 71, and thereafter an upper lid 71B is shown in FIG. As shown, when the cover 71B is placed and fixed on the main body 71A, the wafer presser 73 attached to the upper lid 71B presses the upper edge of the wafer W ... to elastically hold the wafer W .... . That is, the pair of left and right elastic pieces 76, 76 of the wafer holder 73 abuts on the upper edge portion of the wafer W and presses the wafer W downward by its elastic force to elastically support the wafer W. At this time, the wafer W has an upper edge between the locking pieces 78a..., 78b... And the locking pieces 79a. Although fitted in and supported by the grooves 82, 82, as described above, the locking pieces 78a ... and the locking pieces 79b ... and the locking pieces 78b ... and the locking pieces 79a ... Are overlapped with each other in a side view, and this overlapping portion forms a crest at the center between the adjacent wafers W and W, so that the wafer W has a gap between the elastic pieces 76 and 76. When the upper lid 71B is closed, the wafer W, for example, at the position indicated by the chain line in FIG. 17, is automatically positioned at the center of the groove 82 along the locking pieces 78a. As a result, all the wafers W are fitted into the grooves 82 of the elastic pieces 76 and held at their upper edges, and are not sandwiched between the elastic pieces 76. Will not be damaged.
[0012]
[Problems to be solved by the invention]
However, in the conventional example described in the above Japanese Utility Model Publication No. 6-2272, the locking piece is composed of a pair of side walls having an M-shape, so that the shape of the side walls becomes complicated and the cost increases. In the conventional example described in JP-A-5-63065, the engaging pieces are comb-shaped and meshed with each other, so that the structure becomes complicated and the manufacturing cost increases.
Further, in each of the above conventional examples, the locking piece provided only at the tip of the elastic piece serves not only as a guide for mounting the wafer in the groove, but also as a role for forming the groove. In order to securely hold the upper edge of the wafer, the direction of the groove must be accurately formed over the entire length of the locking piece, and it is highly accurate as a mold for producing a wafer pressing member. It is necessary to use an expensive one, resulting in a further increase in manufacturing cost.
[0013]
Accordingly, the present applicant has proposed a wafer holding member for a new wafer storage container (see Japanese Patent Application No. 8-311046) as a means for solving the above problem. The wafer storage container will be described with reference to FIGS.
20A and 20B are a front view and a side view of the wafer storage container, respectively. FIG. 21 is a view showing the locking structure of the wafer storage container shown in FIG. 20, and shows a state where both the first and second hook members 19, 20 are locked to the upper lid 24. 22 is a front view of the wafer pressing member shown in FIG. 21, FIG. 23 is a bottom view of FIG. 22, FIG. 24 is a view taken along the line XXIV-XXIV in FIG. 23, and FIG. FIG. 26 is a diagram for explaining the process until the upper edge portion of the wafer is held in the locking groove.
[0014]
First, as shown in FIGS. 20 and 21, the upper lid 24 having a substantially rectangular shape in plan view is locked to the outer box body 25 by a pair of locking mechanisms A and A described later at positions facing each other. It is like that. The upper lid 24 and the outer box main body 25 constitute a wafer storage container that stores a plurality of wafers W in an orderly manner.
[0015]
The plurality of wafers W are orderly accommodated in an inner box (basket) 33 called a partition provided in the outer box body 25. The upper part of the inner box 33 is opened, and a plurality of longitudinally long ribs 34 protrudes at an appropriate pitch in the arrangement direction of wafers W (direction perpendicular to the drawing in FIG. 21) inside a pair of opposing side walls. A plurality of partition grooves are formed between the ribs 34. Each wafer W is fitted in a pair of opposing partition grooves formed on the side wall and arranged in an orderly manner. In the state where the upper lid 24 is in close contact with the outer box main body 25, the lower surface of the top plate portion 24c of the upper lid 24 is in contact with the upper edge portions of the wafers W arranged in order. A wafer pressing member (upper buffer member) 35 having a plurality of elastic pieces (wafer pressing pieces) 36 is mounted. Thereby, the wafer W is stably held and does not move even when the wafer storage container is transported.
[0016]
Furthermore, as shown in FIG. 21, a protruding portion (flange portion) 24e having an inner wall 24b and an outer wall 24a constituting the inner and outer double walls is formed at the lower end opening peripheral portion of the upper lid 24. In addition, an inner wall 25b and an outer wall 25a that also form an inner and outer double wall are formed at the opening peripheral edge of the upper end of the outer box body 25. Reference numeral 25 c indicates a large-diameter side wall surrounding the upper portion of the outer box body 25.
As shown in the drawing, in the state where the upper lid 24 is put on and locked to the upper end opening of the outer box body 25, the outer walls 24a and 25a of the upper lid 24 and the outer box body 25 are fitted to each other. In addition, the upper lid 24 and the inner side walls 24a, 25a of the outer box body 25 are also fitted to each other. An annular space surrounded by the inner and outer walls 25 b and 25 a of the outer box body 25 is a seal member mounting groove 28 for mounting a seal member (for example, an O-ring) 26. On the other hand, on the lower surface of the protrusion 24e of the upper lid 24, a protrusion 27 having an inverted cross-sectional shape that presses against the seal member 26 is formed in an annular shape. The lower end of the protrusion 27 is pressed against the sealing member 26 by line contact, and the sealing action with the sealing member 26 prevents the outside air from entering the wafer storage container from the joint between the upper lid 24 and the outer box body 25. Yes.
[0017]
The locking mechanism A will be briefly described with reference to FIG. 21. Brackets 31 are integrally provided on opposite side walls of the outer box body 25, and a pin member 32 is provided on each bracket 31. The lower end portion of the first hook member 19 is provided so as to be freely rotatable (see the arrow B direction). The first hook member 19 is substantially concave in a side view (shown in FIG. 20B), and the lower end of the second hook member 20 is rotated via a pin member 30 in the upper recess. It is supported freely (see arrow C direction).
An air circulation hole 40 is formed in the side wall 24d of the upper lid 24. The air circulation hole 40 is sealed by the side wall 24d being pressed by the second hook member 20 in the state of FIG.
[0018]
Both sides of the upper end of the first hook member 19 are protrusions 24f and 24g that can be engaged with the upper surface of the protrusion (flange) 24e of the upper lid 24 (see FIG. 20B). On the other hand, the second hook member 20 is bent substantially in a “<” shape and can be locked to the top plate portion 24 c of the upper lid 24 at its upper end.
Reference numeral 37 denotes a push-up projection provided on the upper lid 24. The push-up protrusion 37 is integrally provided so as to protrude laterally at a position overlapping the second hook member 20 on the side wall 24d of the upper lid 24. The second hook member 20 is formed with a recessed portion 20a into which the push-up protrusion 37 enters while being locked to the top plate portion 24c.
[0019]
Furthermore, as shown in FIGS. 22 to 26, the wafer pressing member 35 detachably mounted on the lower surface of the upper lid 24 is a strip which is suspended downward from both sides of the main body 35a and spreads in a substantially “<” shape. A plurality of elastic pieces 36 are provided. On one side of the wafer pressing member 35 (for example, the left side in FIGS. 22 and 23), the number of elastic pieces 36 is equal to the number of wafers W to be accommodated. Since it is provided on both sides, the total number of elastic pieces 36 is equal to twice the maximum number of wafers accommodated. When the upper lid 24 is locked to the outer box body (container body) 25, each elastic piece 36 receives a force from each wafer W, and the angle θ (see FIG. 22) formed by the elastic pieces 36 on both sides is It is almost 90 °. The wafer pressing member 35 is integrally formed of a resin having a large friction coefficient, such as a thermoplastic elastomer (polyester).
[0020]
In particular, as shown in FIGS. 25 and 26, inclined surfaces 48a and 48b that are inclined inward to guide the upper edge of the wafer W are provided at both ends in the width direction of the lower surface of the tip of each elastic piece 36, respectively. A pair of guide pieces 41a and 41b are provided alternately in the length direction of the elastic piece 36, and a part of the adjacent guide pieces 41b and 41a of the adjacent elastic pieces 36 overlaps the width direction of the elastic pieces. . In this example, the overlap amount (overlap amount) H (see FIG. 25) is equal to the gap amount between the elastic pieces 36. The lower surfaces of the guide pieces 41a and 41b on both sides in the width direction are flat portions 43 and 44, respectively.
[0021]
A pair of locking pieces 42a and 42b each having inclined surfaces 49a and 49b inclined inward to press the upper edge of the wafer W are provided on the lower surface of the elastic piece 36 on the base side of the guide pieces 41a and 41b. ing. A wafer mounting groove (locking groove) 47 is formed between the pair of locking pieces 42a and 42b. In addition, the lower surfaces on both sides in the width direction of the locking pieces 42a and 42b are flat portions 45 and 46, and the inclination angles of the inclined surfaces 49a and 49b are larger than those of the inclined surfaces 48a and 48b.
[0022]
In the wafer storage container configured as described above, when the inner case 33 containing a plurality of wafers W is mounted in the outer case body 25, the upper case 24 is covered with the outer case body 25 as shown in FIG. As shown, the upper edge of the wafer W (indicated by a two-dot chain line) abuts against one of the inclined surfaces 48a, 48b of the corresponding pair of guide pieces 41a, 41b. Since a part of the adjacent guide pieces 41b, 41a of the adjacent elastic piece 36 overlaps the width direction of the elastic piece 36, there is no possibility that the upper edge portion of the wafer W is inserted between the adjacent elastic pieces 36. . In this state, since the force exerted on the elastic piece 36 from the wafer W is small, the elastic piece 36 is not greatly deformed, and the angle θ (see FIG. 22) formed by the elastic pieces 36 on both sides is smaller than 90 °. ing. The first hook member 19 is rotated to the storage container side, and the protrusion 24f (24g) engages with the protrusion 24e of the upper lid 24 and presses downward, so that the upper lid 24 is sealed to the outer box body 25. To do.
At this time, the upper lid 24 is slightly lowered, and the upper edge portion of the wafer W (shown by a solid line) is guided by the guide pieces 41a and 41b, and comes into contact with the locking groove 47 between the pair of locking pieces 42a and 42b. Being held. In this state, the elastic piece 36 is greatly deformed, and the angle θ (see FIG. 22) formed by the elastic pieces 36 on both sides is approximately 90 °.
And the 2nd hook member 20 is latched by the top-plate part 24c of the upper cover 24 (state of FIG. 21).
[0023]
As described above, a pair of guide pieces 41a and 41b are provided alternately at the tip of each elastic piece 36, and a pair of locking pieces 42a and 42b are provided behind the guide pieces 41a and 41b to form a locking groove 47. By forming, a simple configuration can be achieved. When the upper lid 24 is lowered and attached to the outer box body 25, first, the upper edge portion of the wafer W enters between the pair of guide pieces 41a and 41b of each elastic piece 36, and the inclined surfaces 48a thereof. , 48b, the wafer W is guided so as to move in the middle between the pair of guide pieces 41a, 41b, so that the wafer W smoothly enters the holding groove 47 and is held.
[0024]
In this way, the guide pieces 41a, 41b and the locking pieces 42a, 42b having simple shapes are respectively assigned to the functions of guiding and holding, so that the direction and width of the locking groove 47 are required with high accuracy. Even if the lengths of the stopper pieces 42a and 42b are short, the upper edge portion of the wafer W can be first guided by the guide pieces 41a and 41b and put into the locking groove 47. The wafer pressing member 35 is integrally formed by a mold, and the lengths of the locking pieces 42a and 42b that require high accuracy may be short. Therefore, the manufacturing cost is low.
[0025]
By the way, in the wafer storage container described in the above Japanese Patent Application No. 8-311046, since the adjacent guide pieces 41a and 41b overlap each other, the inclined wafer W simultaneously contacts the guide pieces 41a and 41b. As a result, the wafer W may be caught without being smoothly guided, and the wafer W may be damaged.
The present invention has been made in view of the above circumstances, and its object is to hold the upper edge of the wafer smoothly and surely, and to hold the wafer holding member with a simple structure and low manufacturing cost. And it is providing the wafer storage container provided with this wafer holding member.
[0026]
[Means for Solving the Problems]
Claim 1 of the present invention is attached to the inside of the upper lid of the wafer storage container, and holds the wafer by pressing each upper edge of each of the plurality of wafers stored in the wafer storage container with an elastic piece. In the holding member, in order to form an engaging groove into which the upper edge of the wafer enters when the upper cover is closed, the elastic member has an inclined surface that is inclined inward and faces each other. A pair of locking pieces is provided, and an inclination for guiding the upper edge portion of the wafer to the locking groove in the process of closing the upper lid on the tip side of the locking pieces of the elastic piece. One guide piece having a surface is provided adjacent to one of the pair of engaging pieces facing each other, and the tip of the guide piece is formed in a convex curved surface.
According to the first aspect of the present invention, when the wafer is guided to the locking groove formed by the pair of locking pieces, the wafer is guided by the inclined surface of the guide piece provided adjacent to the one locking piece. To the inclined surface of the locking piece. Thereby, unlike the conventional case, a situation in which the wafer does not come into contact with the guide pieces of the adjacent elastic pieces at the same time and is not guided smoothly is prevented. In addition, the wafer is less likely to be damaged by smoothly guiding the wafer in a predetermined direction by the tip of the guide piece formed on the convex curved surface.
[0027]
According to a second aspect of the present invention, a pair of elastic pieces for locking the upper end portion of one wafer in the locking groove are provided apart from each other, and the guide pieces provided on these elastic pieces are provided with the locking pieces. Each of the wafers is provided on both sides of the wafer.
In this claim 2, since one guide piece provided on each of the pair of elastic pieces is located on both sides of the wafer, by guiding the wafer with these guide pieces, The wafer can be transferred to the inclined surface of the locking piece and smoothly guided to the locking groove.
[0028]
According to a third aspect of the present invention, a pair of elastic pieces for locking the upper end portion of one wafer in the locking groove are provided apart from each other, and the guide pieces provided on these elastic pieces are provided with the locking pieces. Each wafer is provided on one side of the wafer.
In the third aspect, since one guide piece provided on each of the pair of elastic pieces is located on one side of the wafer, the wafer is guided by guiding the wafer with these guide pieces. It can be delivered to the inclined surface of the locking piece and smoothly guided to the locking groove.
[0029]
According to a fourth aspect of the present invention, the wafer pressing member according to the first, second, or third aspect is attached to the inside of the upper lid.
According to the fourth aspect of the present invention, the wafer is surely pressed by the wafer pressing member having the above structure, so that the wafer can be handled smoothly without being shaken during transportation.
[0030]
DETAILED DESCRIPTION OF THE INVENTION
Next, an embodiment of the present invention will be described with reference to the drawings.
1 is a perspective view showing the appearance of a wafer storage container according to an embodiment of the present invention, FIG. 2 is an exploded perspective view showing the configuration of the wafer storage container of FIG. 1, and FIG. 3 is a wafer holder showing an embodiment of the present invention. 4 is a bottom view of FIG. 3, FIG. 5 is a view taken along the line V-V in FIG. 4, FIG. 6 is a front view showing the outer box body, FIG. 7 is a plan view of FIG. FIG. 9 is a left side view of FIG. 6, and FIG. 9 is a bottom view of a wafer pressing member showing another embodiment of the present invention.
[0031]
As shown in FIGS. 1 and 2, the wafer storage container of the present embodiment includes an outer box 1 and an inner box 2 stored in the outer box 1, and the outer box 1 is composed of an outer box body. 3 and an upper lid 4 that can be opened and closed with respect to the outer box body 3. The outer box body 3 is provided with a seal groove 5 having a U-shaped cross section over the entire circumference of the opening having a substantially rectangular cross section in plan view, and a packing 6 as a seal member is fitted into the seal groove 5. ing. The outer box body 3 is self-supporting with four vertical leg portions 3a provided at the corners of the four corners, and a main body recess portion 3b is provided between a pair of opposed outer leg portions 3a and 3a. The hook lever member 7 is detachably attached to the upper portion of the side wall forming the recess 3b, and the transfer recesses 3c and 3d (see FIGS. 6 and 8) used for carrying the wafer storage container are mounted on the other opposing outer surfaces. ) Is provided.
[0032]
A wafer pressing member 8 having a plurality of wafer mounting grooves (locking grooves) 8a is detachably attached to the inner side of the upper lid 4, while a plurality of wafers W are ordered in the inner box 2. In order to store in a state, a plurality of storage grooves 2a facing the wafer mounting groove 8a are provided.
The hook / lever member 7 includes a hook portion 9 having a pair of engaging recesses 11 and a lever portion 10 having a finger hook portion 15 that are separably connected. The lever portion 10 is rotatably supported by the outer box body 3, while the engagement protrusion 17 formed on the upper lid 4 enters the engagement recess 11 of the hook portion 9, thereby The outer box body 3 and the upper lid 4 are configured to be locked via the lever member 7.
[0033]
As shown in FIGS. 3 to 5, the wafer pressing member 8 is provided with a plurality of pairs of elastic pieces 8c extending downward from both sides of the main body 8b and spreading in a substantially "<" shape. . On one side of the wafer pressing member 8, the number of elastic pieces 8c is equal to the number of wafers W to be accommodated, and the elastic pieces 8c are provided on both sides of the main body 8b of the wafer holding member 8, and the wafer Since the two upper end portions of W are respectively held, the total number of elastic pieces 8c is set to twice the maximum accommodation number of wafers W. The wafer pressing member 8 is integrally formed of a resin having a large friction coefficient, for example, a thermoplastic elastomer (polyester).
[0034]
A pair of locking pieces 8f and 8g each having inclined surfaces 8d and 8e inclined inward to press the upper edge portion of the wafer W are provided at both ends in the width direction of the lower surface of the tip end portion of each elastic piece 8c. It has been. The wafer mounting groove (locking groove) 8a is formed between the pair of locking pieces 8f and 8g. In addition, the lower surfaces on both sides in the width direction of the locking pieces 8f and 8g connected to the inclined surfaces 8d and 8e are convex curved surfaces 8h and 8i having arcuate surfaces.
[0035]
One guide piece 8k having an inclined surface 8j for guiding the upper edge portion of the wafer w to the engagement groove 8a is provided on the distal end side of the engagement piece 8f, 8g of the elastic piece 8c. Of the pair of locking pieces 8f, 8g facing each other, they are provided adjacent to one locking piece 8f, 8g. That is, in FIG. 4, in the left elastic piece 8c, a guide piece 8k is provided on the tip side of the locking piece 8f along with the locking piece 8f, and in the right elastic piece 8c, A guide piece 8k is provided on the front end side of the locking piece 8g alongside the locking piece 8g.
[0036]
Moreover, the front end surface (lower surface) of each guide piece 8k connected to these inclined surfaces 8j is an arcuate convex curved surface 8m. Further, the guide piece 8k is formed so as to protrude toward the adjacent elastic piece 8c. Furthermore, the inclination angle of the inclined surfaces 8d and 8e is larger than that of the inclined surface 8j.
[0037]
As shown in FIGS. 6 to 8, the outer box body 3 is formed with the conveying recesses 3 c and 3 d on the outer surface and a hanging wall 3 e depending on the upper edge portion. Yes. As shown in FIG. 8, the hanging wall 3e is formed by notching a portion 3f to which the hook lever portion 7 is attached.
[0038]
Further, gaps between the hanging wall 3e and the transport recesses 3c and 3d are finger catching portions 3g and 3h during transport. The finger hooking portion 3h is formed deeper than the finger hooking portion 3g, so that the front / back discrimination of the wafer W in the inner box 2 accommodated in the inner box 2 can be determined based on the difference in the finger hooking when carrying it. It can be used as a guideline.
The upper transfer concave portion 3d has a step portion 3i formed in the middle thereof, and the step portion 3i can be used as a guide for visually distinguishing the front and back of the wafer W in the inner box 2.
[0039]
In the wafer storage container configured as described above, the inner box 2 in a state in which a plurality of wafers W are stored in the storage groove 2a is mounted in the outer box body 3 in the same manner as in the past, and this outer box body 3 Cover the top lid 4 on top.
In this case, when the upper lid 4 is placed on the outer box body 3, the upper end portion of the wafer W comes into contact with the inclined surfaces 8j of the guide pieces 8k of the corresponding pair of elastic pieces 8c and moves along these inclined surfaces 8j. Then, each pair of the locking pieces 8f and 8g is smoothly transferred to the inclined surfaces 8d and 8e, and is reliably guided and held in the locking groove 8a between the locking pieces 8f and 8g. .
[0040]
When the upper lid 4 is firmly attached to the outer box body 3 and the inside is sealed, the elastic piece 8c is deformed, and the elastic force causes the wafer W mounted in the locking groove 8a to move downward. It is pressed and securely held between the storage groove 2a of the inner box 2.
[0041]
Further, the guide pieces 8k and the locking pieces 8f, 8g are formed with convex curved surfaces 8m, 8h, 8i at their front end surfaces (lower end surfaces), and therefore the wafer W is formed on these convex curved surfaces 8m, 8h, 8i. , The contact with the wafer W is soft and the wafer W is not damaged, and the wafer W is easily guided from the convex curved surfaces 8m, 8h, 8i to the inclined surfaces 8j, 8d, 8e.
[0042]
In the present embodiment, as shown in FIG. 4, in the left elastic piece 8c, the guide piece 8k is provided in front of the locking piece 8f alongside the locking piece 8f, and In the elastic piece 8c on the right side, the guide pieces 8k and 8k that are paired with the guide pieces 8k and 8k that are provided on the tip side of the lock piece 8g are arranged side by side with the lock piece 8g. However, the present invention is not limited to this and may be arranged as shown in FIG.
[0043]
That is, in both the left and right elastic pieces 8c, guide pieces 8k are provided on the front side of the lock pieces 8f along with the lock pieces 8f, and the pair of guide pieces 8k and 8k are the wafers to be guided. You may arrange | position so that it may be located in the one side of W.
[0044]
In addition, when the inner box 2 containing a plurality of wafers W is mounted in the outer box body 3 and the upper lid 4 is put on the outer box body 3, the outer box body 3 (inner box 2). Are inclined so that the inner wafers W are aligned (the wafer surface is inclined at a predetermined angle with respect to the vertical surface) so that the upper edges of the wafers W are aligned in one direction. It becomes easy to smoothly engage the upper edge of W with the guide piece 8k and the locking pieces 8f, 8g of the elastic piece 8c.
[0045]
【The invention's effect】
Claim 1 of the present invention is attached to the inside of the upper lid of the wafer storage container, and holds the wafer by pressing each upper edge of each of the plurality of wafers stored in the wafer storage container with an elastic piece. In the holding member, in order to form an engaging groove into which the upper edge of the wafer enters when the upper cover is closed, the elastic member has an inclined surface that is inclined inward and faces each other. A pair of locking pieces is provided, and an inclination for guiding the upper edge portion of the wafer to the locking groove in the process of closing the upper lid on the tip side of the locking pieces of the elastic piece. One guide piece having a surface is provided adjacent to one of the pair of engaging pieces facing each other, and the leading end of the guide piece is formed in a convex curved surface. , A pair of locking pieces When guiding the wafer into the locking groove constituted by this, the wafer is guided by the inclined surface of the guide piece provided adjacent to one locking piece and guided to the inclined surface of the locking piece. As described above, a situation in which the wafer does not smoothly guide due to simultaneous contact with the guide pieces of the adjacent elastic pieces is not caused. In addition, the wafer is less likely to be damaged by smoothly guiding the wafer in a predetermined direction by the tip of the guide piece formed on the convex curved surface.
Therefore, it is possible to hold the wafer smoothly and surely by pressing the upper edge of the wafer, and to achieve an excellent effect that the configuration is simple and the manufacturing cost is low.
[0046]
According to a second aspect of the present invention, a pair of elastic pieces for locking the upper end portion of one wafer in the locking groove are provided apart from each other, and the guide pieces provided on these elastic pieces are provided with the locking pieces. Since the wafer is guided by these guide pieces, the wafer is transferred to the inclined surface of the locking piece, and is placed in the locking groove. It can be guided smoothly.
[0047]
According to a third aspect of the present invention, a pair of elastic pieces for locking the upper end portion of one wafer in the locking groove are provided apart from each other, and the guide pieces provided on these elastic pieces are provided with the locking pieces. Since each wafer is provided on one side of the wafer, the wafer is transferred to the inclined surface of the locking piece and smoothly guided to the locking groove by guiding the wafer with these guide pieces. Can do.
[0048]
According to a fourth aspect of the present invention, since the wafer pressing member according to the first, second or third aspect is attached to the inside of the upper lid, the wafer can be transported by securely pressing the wafer with the wafer pressing member having the above configuration. The wafer can be handled smoothly without shaking the wafer from time to time.
[Brief description of the drawings]
FIG. 1 is a perspective view showing an appearance of a wafer storage container according to an embodiment of the present invention.
2 is an exploded perspective view showing a configuration of the wafer storage container in FIG. 1; FIG.
FIG. 3 is a front view of a wafer pressing member showing an embodiment of the present invention.
4 is a bottom view of FIG. 3. FIG.
FIG. 5 is a view taken along the line VV in FIG. 4;
FIG. 6 is a front view showing the outer box body.
7 is a plan view of FIG. 6. FIG.
FIG. 8 is a left side view of FIG.
FIG. 9 is a bottom view of a wafer pressing member showing another embodiment of the present invention.
FIG. 10 is an exploded perspective view for explaining the structure of a conventional wafer storage container having an upper buffer plate.
11A and 11B are diagrams related to the upper buffer plate of FIG. 10, wherein FIG. 11A is a plan view, FIG. 11B is a partially enlarged plan view thereof, and FIG. It is XII-XII sectional view taken on the line.
FIG. 12 is a front sectional view of another conventional wafer presser.
13 is a side view of the wafer presser of FIG. 12. FIG.
14 is a bottom view of the wafer retainer of FIG. 12. FIG.
15 is an enlarged detail view of a part XV in FIG. 14;
16 is a cross-sectional view taken along line XVI-XVI in FIG.
17 is a cross-sectional view taken along line XVII-XVII in FIG.
FIG. 18 is a front sectional view of the wafer container before mounting the upper lid on the container body for explaining the operation of the wafer holder.
FIG. 19 is a front sectional view of the wafer storage container after the upper lid is mounted on the storage container main body for explaining the operation of the wafer presser.
20A and 20B are a front view and a side view, respectively, of a wafer storage container proposed by the present applicant.
FIG. 21 is a view showing a locking structure of the wafer storage container shown in FIG. 20, showing a state in which both the first and second hook members are locked to the upper lid.
FIG. 22 is a front view of the wafer pressing member.
FIG. 23 is a bottom view of FIG. 22;
24 is a view taken along the line XXIV-XXIV in FIG. 23. FIG.
25 is an enlarged view of a main part (tip portion of an elastic piece) in FIG. 23. FIG.
FIG. 26 is an explanatory diagram showing a process of mounting a wafer in a groove.
[Explanation of symbols]
W wafer
3 Outer box body
4 Top cover
8 Wafer holding member
8a Wafer mounting groove (locking groove)
8c elastic piece
8d, 8e inclined surface
8f, 8g Locking piece
8j inclined surface
8k guide piece
8m Convex curved surface

Claims (4)

In the wafer pressing member that is attached to the inside of the upper lid of the wafer storage container and holds the wafer by pressing each upper edge of the plurality of wafers stored in the wafer storage container with an elastic piece,
A pair of latches each having an inwardly inclined surface and facing each other in order to form a latching groove into which the upper edge of the wafer enters when the upper lid is closed at the tip of the elastic piece A piece is provided,
One guide piece having an inclined surface for guiding the upper edge portion of the wafer to the engaging groove in the process of closing the upper lid, on the tip side of the engaging piece of the elastic piece, A wafer pressing member provided adjacent to one locking piece of a pair of opposing locking pieces, and having a leading end portion of the guide piece formed in a convex curved surface. A pair of elastic pieces for locking the upper end of one wafer in the locking groove are provided apart from each other, and the guide pieces provided on these elastic pieces are arranged on both sides of the locked wafer. The wafer pressing member according to claim 1, wherein the wafer pressing member is provided at a position. A pair of elastic pieces for locking the upper end of one wafer in the locking groove are provided apart from each other, and the guide pieces provided on these elastic pieces are located on one side of the locked wafer. The wafer pressing member according to claim 1, wherein the wafer pressing member is provided. 4. A wafer storage container, wherein the wafer pressing member according to claim 1, is attached to the inside of the upper lid.

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