JP3617903B2 - Mold and manufacturing method thereof - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a mold, a manufacturing method thereof, and a molded product manufactured using the mold, and in particular, a microlens, a polarizing plate, a diffraction grating, and the like used for transmitting and receiving and relaying light. Optical elements such as wave plates, filters, optical amplifiers, optical waveguides, optical fibers, light emitting elements such as semiconductor lasers and light emitting diodes, and light receiving elements such as photodiodes (hereinafter these elements are collectively referred to as “optical elements”) .) Is fixed or mounted (hereinafter, this substrate is referred to as “optical element fixing member”) as a forming die for obtaining by press molding, a manufacturing method thereof, and the above-described forming die. The present invention relates to a molded article (optical element fixing member) manufactured using
[0002]
[Prior art]
In order to perform transmission / reception and relay of light, optical elements are optically connected to each other (hereinafter, “optical connection” is referred to as “optical connection”). It is necessary to fix or mount at a predetermined position of the member for use with high accuracy. Further, it is necessary to align the optical element fixing members on which the optical elements are fixed or mounted with high accuracy so that the predetermined optical elements fixed or mounted on the respective members are optically connected to each other. .
[0003]
For example, a silica-based single mode optical fiber used for long-distance optical communication includes a core portion having an outer diameter of about 10 μm and a cladding portion having an outer diameter of 125 μm covering the core portion. When optically connecting fibers, the connection loss due to the optical axis shift at the optical connection portion is reduced (for example, 0.1 dB or less), and the optical axis shift amount is within about ± 1 μm. Accuracy is required.
[0004]
Conventionally, the above-described optical element fixing member has been produced by molding a desired material into a predetermined shape by machining or press molding, and optical connection between optical elements on the optical element fixing member or an optical element Optical connection between the optical element fixing members after fixing or mounting the optical element is performed by active alignment using a precision stage. For example, when optical fibers are optically connected by active alignment, the light emitted from one optical fiber is incident on the other optical fiber, and the precision stage is driven over a wide range so that the amount of incident light is maximized. Align both.
[0005]
[Problems to be solved by the invention]
However, in order to optically connect the optical elements by active alignment, the precision stage must be driven over a wide range as described above, which requires a long time. Further, in order to automate, the structure of the apparatus must be complicated, and it is difficult to obtain an apparatus capable of active alignment with a desired accuracy.
[0006]
An object of the present invention is to perform optical connection between optical elements to be fixed or mounted, or optical connection between optical elements between optical element fixing members after the optical element is fixed or mounted. Mold capable of obtaining an optical element fixing member capable of being deformed by press molding and method for producing the same The law It is to provide.
[0007]
The molding die of the present invention that achieves the above object is a molding die that has a transfer molding surface of a predetermined shape and is used for press molding a molding material onto an optical element fixing member, and the transfer molding surface described above Inside, an alignment mark transfer part is provided to obtain a press-molded product having an alignment mark. The surface roughness at the alignment mark transfer portion is different from the surface roughness at the transfer molding surface around the alignment mark transfer portion. It is characterized by this.
[0008]
On the other hand, the manufacturing method of the molding die of the present invention that achieves the above object manufactures a molding die having a transfer molding surface of a predetermined shape and used for press molding a molding material to an optical element fixing member. In this case, an alignment mark transfer portion for obtaining an optical element fixing member having an alignment mark is formed in the transfer molding surface of the mold. In addition, the surface roughness of the alignment mark transfer portion is different from the surface roughness of the transfer molding surface around the alignment mark transfer portion. As described above, a mold part for the alignment mark transfer part is formed on the mold material of the mold by dry etching, and then the mold part is covered, and the surface of the release film is The release film is formed so as to be a transfer molding surface of the above, and an alignment mark transfer portion comprising the molding portion and a release film covering the surface of the molding portion is provided. This is characterized in that a mold having a release film surface as a transfer molding surface is obtained (this method is hereinafter referred to as “Method I”).
[0009]
Another method of manufacturing the mold of the present invention that achieves the above object is to provide a mold having a transfer molding surface of a predetermined shape and used for press-molding a molding material onto an optical element fixing member. In manufacturing, an alignment mark transfer portion for obtaining an optical element fixing member having an alignment mark is located in the transfer molding surface of the mold. In addition, the surface roughness of the alignment mark transfer portion is different from the surface roughness of the transfer molding surface around the alignment mark transfer portion. Thus, the alignment mark transfer portion is formed on the mold material of the mold by dry etching (hereinafter, this method is referred to as “Method II”).
[0010]
And above Obtained by the mold of the present invention The optical element fixing member is a press-molded product in which an alignment mark for determining a positional relationship with another member is integrally formed, and the surface roughness of the alignment mark and the surface roughness around the alignment mark are Different Rumo It is.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail.
First, the molding die of the present invention will be described. This molding die has a transfer molding surface having a predetermined shape as described above, and is a molding used for press molding a molding material into an optical element fixing member having a predetermined shape. It is a type.
Since the optical element fixing member can be formed of glass, resin or the like, the mold material of the above-described mold depends on the material of the optical element fixing member to be obtained, in other words, press molding temperature or press molding. It can be appropriately changed according to the pressure or the like.
[0012]
In order to obtain an optical element fixing member by press molding with a small variation in dimensional accuracy and shape accuracy with respect to temperature changes in the surrounding environment and a small thermal expansion difference from the optical element to be fixed or mounted, It is preferable that the optical element fixing member is made of glass. ₂ , B ₂ O ₃ Further, it is preferable to form the glass with glass containing ZnO as a glass component. Specific examples of such glass include the following (1) to (4).
[0013]
(1) SiO as glass component ₂ 1-30 wt%, B ₂ O ₃ 15 to 40 wt%, ZnO 40 to 60 wt% (excluding 40 wt%), MgO 0 to 15 wt%, CaO 0 to 10 wt%, SrO 0 to 10 wt%, BaO 0 to 10 wt% , PbO 0-20 wt%, Al ₂ O ₃ Of 0 to 10 wt% (excluding 0 wt%), and the total amount of ZnO, MgO, CaO, SrO, BaO and PbO is 40 to 60 wt% (excluding 40 wt%), and the glass. Glass whose total amount of components is 75 wt% or more (hereinafter, this glass is referred to as “first glass”).
[0014]
(2) GeO is added to the first glass. ₂ 0 to 10 wt% (however, SiO ₂ And GeO ₂ And the total amount is 3-30 wt%), La ₂ O ₃ 0 to 20 wt%, Y ₂ O ₃ 0-10 wt%, Gd ₂ O ₃ 0-10 wt% (however, La ₂ O ₃ , Y ₂ O ₃ And Gd ₂ O ₃ The total amount of Nb is 0-20 wt%), Nb ₂ O ₅ 0 to 10 wt%, Ta ₂ O ₅ 0-10 wt% (however, Nb ₂ O ₅ And Ta ₂ O ₅ And the total amount is 0-10 wt%), ZrO ₂ 0 to 5 wt%, TiO ₂ In which 0 to 3 wt% is contained (hereinafter, this glass is referred to as “second glass”).
[0015]
(3) For the purpose of improving the defoaming and coloring of the first glass or the second glass, As ₂ O ₃ , Sb ₂ O ₃ , SnO, SnO ₂ A glass to which one or more of these are added (hereinafter, this glass is referred to as “third glass”).
(4) In any one of the first glass to the third glass, F, Bi within a range not deteriorating the characteristics of the glass. ₂ O ₃ , Yb ₂ O ₃ , WO ₃ , Na ₂ O, K ₂ Glass added with O or the like.
[0016]
As a mold material for obtaining a glass optical element fixing member by press molding, a cemented carbide material containing tungsten carbide (WC), titanium nitride (TiN), titanium carbide (TiC) or oxidation Aluminum (Al ₂ O ₃ ) Containing cermet, silicon carbide (SiC), glassy carbon, etc. are preferable, and the cermet is TiN, TiC or Al. ₂ O ₃ Is preferably about 90 wt% or more.
[0017]
However, when trying to obtain a molding die for manufacturing a glass optical element fixing member using the above-mentioned cemented carbide material or cermet mold material, the molding die and the molding material ( In order to prevent the glass) from fusing, a predetermined surface of the mold material after processing into a desired shape (hereinafter, this mold material is referred to as “base material”) is covered with a release film, It is preferable that the surface of the release film is a transfer molding surface.
[0018]
As the above release film, those having various compositions are used depending on the material of the base material, the material of the molding material, etc., but the release film is used to prevent fusion between the molding material made of glass and the molding die. As the mold film, for example, a film containing at least one component selected from the group consisting of Pt, Au, Ir, Pd and Rh, or a film made of i-carbon can be used. When it is intended to obtain a mold for manufacturing a glass optical element fixing member using a mold material made of SiC or glassy carbon, the release film may be provided or provided. It does not have to be.
[0019]
In the molding die of the present invention, an alignment mark transfer portion for obtaining a press-molded product having an alignment mark is provided in the transfer molding surface. The shape of the transfer molding surface excluding the alignment mark transfer portion is appropriately selected according to the use of the optical element fixing member to be obtained by using the molding die. For example, one plane and the boundary portion are stepped. Two or more planes, a plane (the one plane or the two or more planes) and a shape, a plane (the one plane or the two or more planes) combined with a predetermined-shaped recess The shape may be a shape in which convex portions having a predetermined shape are combined, a shape in which a flat surface (the one flat surface or the two or more flat surfaces), a convex portion having a predetermined shape, and a concave portion having a predetermined shape are combined.
[0020]
On the other hand, the shape of the alignment mark transfer portion in plan view is appropriately selected according to the shape of the alignment mark to be formed on the optical element fixing member. In addition, the number of alignment mark transfer portions provided in one transfer molding surface and the formation location thereof are used for the optical element fixing member to be obtained by using the molding die, and the optical element fixing member. Depending on the shape and number of optical elements to be fixed or mounted, or the use of alignment marks on the optical element fixing member, etc., are appropriately selected.
[0021]
The alignment mark transfer part may consist of a convex part or a concave part. However, when an optical element fixing member for fixing or mounting an optical element at a high density is to be obtained, the optical element is also fixed or mounted on an alignment mark formed on the optical element fixing member. Therefore, the alignment mark is formed by a recess so that the optical element can be fixed and mounted stably and easily so as to cover part or all of the alignment mark. It is preferable. In addition, there is a case where a desired member is placed on the optical element fixing member for the purpose of more firmly fixing the optical element fixed or mounted on the optical element fixing member. If the alignment mark formed on the optical element fixing member is formed by the recess, the member can be mounted stably and easily.
[0022]
Therefore, in the case of obtaining an optical element fixing member for fixing or mounting an optical element at a high density or an optical element fixing member on which a member other than the optical element is placed, It is preferable that the alignment mark transfer portion in the mold is formed by a convex portion.
[0023]
A plurality of optical elements are usually fixed or mounted on the optical element fixing member, and in order to optically connect these optical elements on the optical element fixing member only by mechanical positioning of the optical elements, At least two-dimensional alignment is required. In addition, in a case where predetermined optical elements fixed or mounted on the respective optical element fixing members are optically connected to each other only by mechanical positioning of the optical element fixing members on which the optical elements are fixed or mounted. However, alignment in at least a two-dimensional direction is necessary.
[0024]
Therefore, the shape of the alignment mark transfer portion in plan view has two or more straight portions such as L shape, cross shape, triangular frame, rectangular frame shape, and these straight portions form a predetermined angle with each other. It is preferable that it is a shape. The alignment mark formed by the alignment mark transfer portion having the shape has two or more straight portions, and these straight portions have a shape that forms a predetermined angle with each other. An optical element fixing member in which the fixing members can be easily aligned in the two-dimensional direction can be obtained.
[0025]
If the mold has a release film, the alignment mark transfer section is formed with a mold film (formed on the base material) that is covered with the release film and becomes the alignment mark transfer section. Hereinafter, this molded part is simply referred to as “molded part”) and a release film covering the molded part, or is formed on the release film itself. Further, when the mold does not have a release film, it is formed on the mold material itself.
[0026]
The formation of the molding part on the mold material and the formation of the alignment mark transfer part on the mold material itself can also be performed by a method such as machining or etching. However, in the machining process, the linear protrusions intersect each other. Since the tip of the cutting tool does not enter the portion to be formed, the alignment mark transfer portion or the molding portion having such an intersection cannot be formed precisely. In addition, when trying to obtain a mold having a step (excluding the step between the alignment mark transfer portion and its surroundings) in the transfer molding surface, the vicinity of the step in the region on the lower stage divided by the step Since the tip of a cutting tool for machining cannot be inserted into the hole, the region in which the alignment mark transfer portion or the molding portion can be formed by machining is limited. Further, it is difficult to form a highly accurate alignment mark transfer portion or the above-described molded portion by wet etching on a mold material made of the above-mentioned carbide material, cermet, SiC, glassy carbon, or the like.
[0027]
Therefore, the molding part formed on the mold material and the alignment mark transfer part formed on the mold material itself, particularly two or more linear parts, and these linear parts have a predetermined angle with respect to each other. It is particularly preferable that the formed part or the alignment mark transfer part formed is formed by dry etching. According to dry etching, a molded portion or alignment mark transfer portion having a desired shape can be formed at a desired location with high accuracy.
[0028]
In order to obtain an optical element fixing member that can easily identify the alignment mark visually or by an image recognition device, it is preferable to make the surface roughness in the alignment mark different from the surface roughness in the periphery of the alignment mark. Also for the mold, it is preferable that the surface roughness at the alignment mark transfer portion and the surface roughness at the transfer molding surface around the alignment mark transfer portion be different. Even if transparent glass is used as the molding material, for example, if a molding die in which the maximum surface roughness in the alignment mark transfer portion and the maximum surface roughness in the transfer molding surface around the alignment mark transfer portion are different by about 200 angstroms or more is used. The optical element fixing member capable of easily identifying the alignment mark by visual observation or an image recognition device can be obtained by press molding.
[0029]
Since the molding die of the present invention described above has the alignment mark transfer portion described above, the molding die of the present invention is combined with each other, or the molding die of the present invention and the conventional molding die are combined. A set of molds necessary for press molding (including an upper mold and a lower mold, or an upper mold, a lower mold, and a body mold, including those in which the lower mold or the upper mold is a flat plate) The optical element fixing member having the alignment mark can be obtained by performing press molding of the molding material using the set of molds. At this time, the mold materials of the molds constituting the set of molds may be the same material or different. Further, each of the forming dies constituting the set of forming dies may or may not have a release film.
[0030]
The overall shape of the optical element fixing member varies depending on its application, such as a flat plate shape or a plate shape having one or more steps, so that an optical element fixing member having a desired shape can be obtained. The shape of each mold (the shape of the transfer molding surface in each mold) constituting the set of molds is appropriately selected.
[0031]
Since a predetermined alignment mark is formed on the optical element fixing member obtained by press molding using the molding die of the present invention, a plurality of optical elements are to be fixed or mounted on the optical element fixing member. By positioning the optical elements by using the alignment marks, it is possible to optically connect the optical elements only by the positioning or to optically connect the optical elements by the positioning. become. Therefore, even if optical connection with higher accuracy is performed by active alignment thereafter, the optical connection work can be performed in a short time. Similarly, even when optical elements are optically connected between optical element fixing members after the optical elements are fixed or mounted, the alignment marks formed on the respective optical element fixing members are used. By positioning these optical element fixing members, the time required for the optical connection can be shortened.
[0032]
That is, by using the above-mentioned optical element fixing member, optical connection between the optical elements to be fixed or mounted, or between the optical elements between the optical element fixing members after fixing or mounting the optical element Compared to the case where optical connection is performed only by active alignment, it is possible to perform the connection in a short time. It is also easy to automate these optical connections.
The molding die of the present invention capable of obtaining the optical element fixing member having the above-described advantages can be manufactured by, for example, the method I or method II of the present invention described below.
[0033]
As described above, the method I of the present invention has a transfer molding surface having a predetermined shape, and has an alignment mark for manufacturing a molding die used for press molding a molding material onto an optical element fixing member. The molding part for the alignment mark transfer part is formed by dry etching on the mold material of the mold so that the alignment mark transfer part for obtaining the optical element fixing member is formed in the transfer molding surface of the mold. And then forming the release film so as to cover the molding part and the surface of the release film to be the transfer molding surface. It has an alignment mark transfer part composed of a release film covering the surface of the shape part, and obtains a mold in which the surface of the release film is a transfer molding surface. is there.
[0034]
In Method I, a predetermined surface of a mold material (base material) that has been processed into a desired shape is covered with a release film, and the surface of the release film is transferred onto a transfer molding surface (the alignment mark is transferred within the transfer molding surface). When forming a mold for obtaining a glass press-molded product (optical element fixing member) by Method I, the method is used to obtain a mold that is formed by the method I. Is preferably made of a cemented carbide or cermet (as already described in the description of the mold of the present invention) as the mold material of the mold. Of course, even in this case, a mold material made of SiC or glassy carbon can be used.
[0035]
When forming the molding part for the alignment mark transfer part on the mold material by dry etching, at least a portion of the surface of the mold material where the molding part is to be formed is processed in advance to a plane, and then the plane It is preferable to provide a resist pattern of a desired shape on the top and perform dry etching using this resist pattern as a mask.
[0036]
As already described in the description of the molding die of the present invention, the shape, number, formation position, etc. of the alignment mark transfer portion in plan view are obtained using the molding die. Therefore, the shape, number, formation location, etc. of the molded part in plan view are also used for the optical element fixing member to be obtained using the molding die. It is selected as appropriate.
[0037]
Further, as already described in the description of the molding die of the present invention, the shape of the transfer molding surface other than the alignment mark transfer portion (hereinafter, this portion is referred to as “peripheral portion”) Since it is appropriately selected according to the use of the optical element fixing member to be obtained by using the molding die, the surface of the mold material at the location that is the base of the release film forming the peripheral portion is The shape is also appropriately selected according to the use of the optical element fixing member to be obtained using the molding die.
[0038]
Therefore, in obtaining the mold by the method I, before forming the release film, in addition to previously forming the molding part for the alignment mark transfer part by dry etching, A base material of a predetermined shape is also obtained in advance by processing the portion serving as the base of the part into a desired shape. The formation of the molding part by dry etching and the molding of the portion that becomes the base of the peripheral part in the mold material surface may be performed simultaneously or separately. According to the shape of the mold material surface, the portion that becomes the base of the peripheral portion may be formed by a method such as dry etching or machining, or a method using dry etching and machining in combination. it can.
[0039]
It is preferable to form the alignment mark transfer portion with as high accuracy as possible. For this purpose, it is preferable to form the molding portion for the alignment mark transfer portion with as high accuracy as possible. And in order to form the said shaping | molding part as highly accurately as possible, the dry etching conditions are suitably selected according to the material of the type | mold material. When the mold material is composed of the above-mentioned carbide material or cermet, the etching gas for dry etching is a rare gas (Ar gas or the like), a fluorocarbon-based single gas (CF ₄ Gas) and chlorine-based simple gas (Cl ₂ It is preferable to use one or more selected from the group consisting of gas and the like. In addition, when the mold material is made of SiC or glassy carbon, the above rare gas, the fluorocarbon-based single gas, or the chlorine-based single gas is used as an etching gas for dry etching. Is preferred.
[0040]
As the mold release film that is formed on the base material so as to cover the molding part formed by the dry etching described above and whose surface becomes the transfer molding surface, the description of the molding die of the present invention is given. As described above, materials having various compositions are used according to the material of the base material, the material of the molding material, and the like. The release film for preventing fusion between the mold and the molding material made of glass contains, for example, at least one component selected from the group consisting of Pt, Au, Ir, Pd and Rh. Or a film made of i-carbon can be used. These release films can be formed by a method such as sputtering, ion plating, or CVD.
[0041]
In order to obtain an optical element fixing member that can easily identify the alignment mark visually or by an image recognition device, as described above in the description of the molding die of the present invention, the surface in the alignment mark transfer portion Although it is preferable to make the roughness different from the surface roughness on the transfer molding surface around the alignment mark transfer portion, in the mold manufactured by Method I, the surface of the release film is transferred as described above. It is a molding surface. The surface roughness of the release film varies depending on the film formation conditions of the release film, the surface roughness on the surface of the mold material underlying the release film, the film thickness of the release film, and the like.
[0042]
Therefore, in the case where a mold having different surface roughness at the alignment mark transfer portion and the surface roughness at the transfer molding surface around the alignment mark transfer portion (the peripheral portion) is to be obtained by Method I, a release film is used. The film forming conditions, the surface roughness on the surface of the mold material underlying the release film, the film thickness of the release film, etc. are appropriately selected. However, it is practically preferable that the thickness of the release film is at least approximately 0.03 μm or more.
[0043]
In the method I of the present invention described above, since the molding part for the alignment mark transfer part is formed by dry etching, even when the mold material is composed of a carbide material, cermet, silicon carbide (SiC), glassy carbon, etc. As already described in the description of the molding die of the present invention, a molding part (molding part for the alignment mark transfer part) that is more precise and accurate than machining or wet etching is formed at a desired location. be able to. In the molding die manufactured by the method I, the surface of the release film formed so as to cover the molding part is a transfer molding surface, so that the optical element having a highly accurate alignment mark A mold capable of obtaining a fixing member is obtained.
[0044]
Next, the method II of the present invention will be described.
As described above, the method II of the present invention has a transfer molding surface having a predetermined shape, and has an alignment mark for manufacturing a molding die used for press molding a molding material onto an optical element fixing member. The alignment mark transfer portion is formed on the mold material of the mold by dry etching so that the alignment mark transfer portion for obtaining the optical element fixing member is positioned within the transfer molding surface of the mold. It is characterized by this.
[0045]
Method II is a method for obtaining an intended mold by forming an alignment mark transfer portion on the mold material itself. Therefore, a mold for obtaining a glass press-molded product (optical element fixing member) by Method II is provided. In the case of manufacturing, it is preferable to use a material made of SiC or glassy carbon as the mold material of the mold. Of course, a mold material made of the above-mentioned carbide material or cermet can also be used.
[0046]
The formation of the alignment mark transfer portion on the mold material itself by dry etching is performed by processing at least a portion of the surface of the mold material where the alignment mark transfer portion is to be formed into a flat surface, and then forming a resist having a desired shape on the flat surface. It can be performed by providing a pattern and performing dry etching using this resist pattern as a mask.
[0047]
As described above, the alignment mark transfer portion may be formed so that the alignment mark transfer portion is positioned within the transfer molding surface of the mold, and has already been described in the description of the mold of the present invention. As described above, the shape, number, formation location of the alignment mark transfer portion, the shape of the transfer molding surface other than the alignment mark transfer portion, and the like of the optical element fixing member to be obtained using the forming die are as follows. It is appropriately selected according to the use and the like.
[0048]
Therefore, the formation of the alignment mark transfer portion by dry etching and the formation of the transfer molding surface other than the alignment mark transfer portion may be performed simultaneously or separately. Formation of the transfer molding surface other than the alignment mark transfer portion can be performed by a method such as dry etching or machining, or a method using dry etching and machining in combination, depending on the shape.
The alignment mark transfer portion is preferably formed with as high accuracy as possible. For this purpose, the etching conditions are appropriately selected according to the material of the mold material.
[0049]
In order to obtain an optical element fixing member that can easily identify the alignment mark visually or by an image recognition device, as described above in the description of the molding die of the present invention, the surface in the alignment mark transfer portion Since it is preferable to make the roughness different from the surface roughness on the transfer molding surface around the alignment mark transfer portion, the dry etching conditions and the mold for forming the alignment mark transfer portion are obtained so that such a mold can be obtained. The surface roughness of at least the portion of the mold material surface where the alignment mark transfer portion is to be formed is adjusted in advance in consideration of the material, the formation method of the transfer molding surface other than the alignment mark transfer portion, and the like. It is preferable.
[0050]
In the method II of the present invention described above, the alignment mark is formed by dry etching. Therefore, even when the mold material is made of carbide material, cermet, silicon carbide (SiC), glassy carbon, etc., As already described in the description, the alignment mark can be formed at a desired location with higher precision and higher precision than machining or wet etching. Therefore, a mold capable of obtaining an optical element fixing member having a highly accurate alignment mark is obtained.
[0051]
Next, the present invention Obtained by mold The optical element fixing member will be described.
Of the present invention Obtained by mold As described above, the optical element fixing member is a press-molded product in which an alignment mark for determining the positional relationship with other members is integrally formed. The surface roughness of the alignment mark and the periphery of the alignment mark The surface roughness is different Rumo It is.
[0052]
The shape of the alignment mark in a plan view can be appropriately selected according to its use or the like, and the number of the alignment marks and the place where the alignment mark is formed can be used for the optical element fixing member or the optical element fixing member. Depending on the shape and number of optical elements to be fixed or mounted, or the use of alignment marks in the optical element fixing member, etc., are appropriately selected. In addition, the alignment mark may be formed of a convex portion or a concave portion, but as already described in the description of the molding die of the present invention, the optical element is fixed or mounted at a high density. In order to obtain an optical element fixing member for mounting an optical element, or an optical element fixing member on which a member other than the optical element is placed, an alignment mark including a concave portion is preferable.
[0053]
In the plan view of the alignment mark, optical connection between optical elements to be fixed or mounted, or optical connection between optical elements between the optical element fixing members after fixing or mounting the optical elements is performed. The shape preferably has two or more straight portions such as an L shape, a cross shape, a triangular frame, and a rectangular frame shape, and these straight portions form a predetermined angle with each other.
[0054]
The value of the surface roughness of the alignment mark is not particularly limited. However, in order to easily identify the alignment mark visually or by an image recognition device, the surface maximum roughness of the alignment mark and the surface maximum around the alignment mark are determined. It is preferable to make the roughness different by approximately 200 angstroms or more.
[0055]
Of the present invention having the above alignment mark Obtained by mold The optical element fixing member is made of an inorganic material or an organic material that can be press-molded, such as glass and resin. In order to obtain an optical element fixing member that has small variations in dimensional accuracy and shape accuracy with respect to temperature changes in the surrounding environment and that has a small difference in thermal expansion from the optical element to be fixed or mounted, the molding of the present invention is performed. As already described in the description of the mold, the optical element fixing member is preferably formed of glass. In addition, the present invention Obtained by mold When the optical element fixing member is a transparent body, the alignment mark formed on the optical element fixing member can be identified from various directions. For example, the following advantages (A) to (B) can be obtained.
[0056]
(A) Covering the alignment mark while identifying the alignment mark from the side surface and back surface of the optical element fixing member (meaning the surface opposite to the surface on which the optical element is to be fixed or mounted; the same applies hereinafter). Thus, it becomes possible to fix or mount the opaque optical element, in other words, to use the alignment mark as a part of the region for fixing or mounting the opaque optical element. It becomes easy to fix or mount to the density.
[0057]
(B) Since the optical element and the member for fixing the optical element more firmly are fixed or mounted on the optical element fixing member, the alignment mark can be identified from the side surface or the rear surface. Even if the element or the above-mentioned member is an opaque body, desired optical elements can be connected between the optical element fixing member and another optical element fixing member (after the optical element is fixed or mounted). When optically connecting the optical elements, alignment marks formed on each optical element fixing member can be used.
[0058]
Of the present invention described above. Obtained by mold Since the optical element fixing member has the above-described alignment mark, when a plurality of optical elements are to be fixed or mounted on the optical element fixing member, the positioning of these optical elements is determined by the alignment mark. By using this, it becomes possible to optically connect the optical elements only by the positioning, or to optically connect the optical elements by the positioning. Therefore, even if optical connection with higher accuracy is performed by active alignment thereafter, the optical connection operation can be performed in a short time. Similarly, even when optical elements are optically connected between optical element fixing members after the optical elements are fixed or mounted, the alignment marks formed on the respective optical element fixing members are used. By positioning these optical element fixing members, the time required for the optical connection can be shortened.
[0059]
That is, the present invention Obtained by mold By using the optical element fixing member, optical connection between the optical elements to be fixed or mounted, or optical connection between the optical elements between the optical element fixing members after fixing or mounting the optical element, These optical connections can be made in a shorter time compared to the case where only the active alignment is used. It is also easy to automate these optical connections. Furthermore, the present invention Obtained by mold Since the optical element fixing member can be obtained by press molding, which will be described later, it can be manufactured in large quantities and at low cost.
[0060]
In the present invention, Obtained by mold The overall shape of the optical element fixing member can be appropriately selected depending on the application and the like, such as a flat plate shape or a plate shape having one or a plurality of steps (excluding steps between the alignment mark and its surroundings).
[0061]
Of the present invention having the advantages described above. Obtained by mold The optical element fixing member is a molding die exemplified as one of the preferred molding die of the present invention described above, that is, the surface roughness on the alignment mark transfer portion and the surface on the transfer molding surface around the alignment mark transfer portion. A combination of a mold having a different roughness and another mold (the mold of the present invention or the conventional mold) and a set of molds (consisting of an upper mold and a lower mold, or an upper mold and a lower mold) And a body mold, etc., including those in which the lower mold or the upper mold is a flat plate), and can be manufactured by press molding using the set of molds.
[0062]
In press molding, it is preferable to use a molding material (preform) in which the shape in plan view is approximated to the shape in plan view of the optical element fixing member. As the molding material, a material made of a desired inorganic material or organic material capable of press molding, such as glass and resin, is used. As described above, in order to obtain an optical element fixing member that has small variations in dimensional accuracy and shape accuracy with respect to temperature changes in the surrounding environment and that has a small difference in thermal expansion from the optical element to be fixed or mounted. Glass is preferably used as the molding material. Examples of the glass from which a press-molded product can be obtained and from which the optical element fixing member having the above characteristics can be obtained include those exemplified in the description of the molding die of the present invention.
[0063]
【Example】
Embodiments of the present invention will be described below with reference to the drawings.
Example 1
(1) Production of first mold by method I
First, a mold material made of a carbide material containing WC was prepared. The mold material has a flat plate shape having a length of 20.0 mm, a width of 10.0 mm, a thickness of 2.0 mm, and a maximum surface roughness of 100 angstroms. Next, a positive photoresist (AZ1350 manufactured by Hoechst Co.) is applied to one side of the mold material by spin coating, and a film thickness of 2. on the one side of the mold material 1 is applied as shown in FIG. A resist film 2 having a thickness of 0 μm was formed.
[0064]
Next, a photomask having a predetermined shape on the resist film 2, that is, a cross-shaped light shield made of a Cr film having a line width of 3.0 μm at the four corners of an ultraviolet transmissive substrate having a rectangular shape in plan view of 20 × 10 mm. A photomask provided with a portion (total length: 10 μm, total width: 10 μm) was brought into close contact so that the light shielding portion was positioned on the resist film 2 side. Then, the resist film 2 is irradiated with ultraviolet rays from the photomask side (the irradiation amount is 25 mW / cm). ² The resist film 2 was exposed to light, and the exposed resist film 2 was developed by immersing it in a predetermined developer (AZ Developer solution manufactured by Hoechst) for 90 seconds.
[0065]
The exposed portion of the resist film 2 was dissolved and removed by the above development, and as shown in FIG. 1B, the unexposed portion (the light shielding portion formed on the photomask blocked the ultraviolet rays). A cross-shaped resist pattern 3 composed of a portion is formed at each of the four corners of one side of the mold material 1. Each of the resist patterns 3 in a plan view has a cross shape with a total length of 10 μm, a total width of 10 μm, and a line width of 3.0 μm, and the film thickness is 2.0 μm.
[0066]
After each resist pattern 3 was post-baked at 120 ° C. for 60 minutes, one side of the mold material 1 was dry-etched for 1 minute using these resist patterns 3 as a mask. This dry etching is performed using an inductive discharge type reactive etching apparatus, and the etching gas is Cl. ₂ Gas was used. Etching conditions are coil bias 600 W, substrate bias 300 W, etching gas (Cl ₂ Gas) The flow rate was 20.0 sccm, and the pressure was 5.0 mTorr.
[0067]
By dry etching under the above conditions, each resist pattern 3 was etched at an etching rate of 0.14 μm / min, and the film thickness was reduced to 1.86 μm (hereinafter, the resist pattern 3 after dry etching is referred to as “resist pattern”). 4 ”(see FIG. 1C). Further, the surface of the mold material 1 on the side where the resist pattern 3 was provided was etched at an etching rate of 0.03 μm / min except for the portion protected by the resist pattern 3 (resist pattern 4). As a result, as shown in FIG. 1 (c), each of the four corners on one side of the mold material 1 after dry etching (hereinafter referred to as "base material 5") has a shape in plan view. Is a cross-shaped projection 6 having a total length of 10 μm, a total width of 10 μm, and a line width of 3.0 μm and a height of 0.03 μm. These convex portions 6 are used as molding portions for an alignment mark transfer portion, which will be described later, and are hereinafter referred to as “alignment mark transfer portion molding portion 6”.
[0068]
Thereafter, the resist pattern 4 was stripped using a predetermined stripping solution to obtain a target first mold base material 5. As shown in FIGS. 2 (a) and 2 (b), molding parts 6 for alignment mark transfer parts are formed at the four corners of one side of the base material 5, and the upper surface (see FIG. (The same applies to the following examples.) The maximum surface roughness in 6a is 100 Å. Further, the surface 5a of the base material 5 on the side where these molded parts 6 are formed (excluding the place where the molded part 6 is formed) is substantially flat, and the maximum surface roughness of the surface 5a is 1000. Angstrom.
[0069]
Next, on the entire outer surface of the base material 5 on the side where the molding portion 6 for the alignment mark transfer portion is formed, a film thickness of 1500 angstroms (including Au, Pt, Pd, and Rh) using an RF sputtering apparatus ( A release film having a film thickness on the surface 5a of the base material 5 or the upper surface 6a of the molding portion 6 was formed. At this time, sputtering was performed with an atmospheric gas (Ar gas) flow rate of 20.0 sccm, an atmospheric pressure of 1.0 Pa, and an RF bias of 300 W.
[0070]
By forming the film up to the above release film, the intended first mold was obtained. As shown in FIGS. 3A and 3B, the first mold 10 includes the above-described base material 5 and the side on which the base material 5 is formed with the molding portion 6 for the alignment mark transfer portion. The release film 7 is formed on the entire outer surface of the first mold 10. In the first mold 10, the surface of the release film 7 serves as a transfer molding surface 10 a. And in this transfer molding surface 10a, four alignment mark transfers constituted by the molding part 6 for the alignment mark transfer part and the part of the release film 7 covering the outer surface of the molding part 6 Part 8 is formed.
[0071]
The top surface roughness of each alignment mark transfer portion 8 (upper surface in FIG. 3B; the same applies to the following embodiments) 8a is 100 angstroms. Further, a portion (peripheral portion) of the transfer molding surface 10a excluding the portion where the alignment mark transfer portion 8 is formed is substantially flat, and the maximum surface roughness of the portion (peripheral portion) is 1000 angstroms. is there.
[0072]
(2) Production of second mold
First, as a base material for the second mold, a flat plate made of a carbide material containing WC and having a length of 20 mm, a width of 10 mm, a thickness of 2.0 mm, and a maximum surface roughness of 100 angstroms was prepared. Next, a release film having a thickness of 1500 angstroms made of Au, Pt, Pd and Rh was formed on one surface of the base material by sputtering under the same conditions as those for obtaining the first mold. By forming this release film, a target second mold was obtained.
In the second mold, the surface of the release film provided on one side of the base material functions as a transfer molding surface.
By combining the first mold described above and the second mold described above, a side-free mold composed of these two molds can be obtained.
[0073]
(3) Production of third mold
After cutting and polishing a block made of a cemented carbide containing WC into a cylindrical body of a predetermined size to obtain a base material, the first mold is placed on the inner surface of the base material. A release film having a thickness of 1500 angstroms made of Au, Pt, Pd, and Rh was formed by sputtering under the same conditions as in the case of obtaining the desired third mold. The third mold has an internal dimension that allows the first mold and the second mold to be inserted under a predetermined clearance. In this mold, The surface of the release film provided on the inner surface functions as a transfer molding surface.
By combining the first mold and the second mold described above with the third mold described above, an upper mold (first mold or second mold), a lower mold (second mold) A set of molds composed of three molds, that is, a mold or a first mold) and a body mold (third mold) can be obtained.
[0074]
(4) Press molding
First, a set of molding dies is constituted by the first molding die produced in (1) and the second molding die produced in (2), and the transfer molding surface of the first molding die is the bottom surface. The second mold was fixed to the lower mold holder of the press molding machine so that the transfer molding surface was the upper surface. Then, a preform made of 20.0 × 10.0 × 2.0 mm blue glass is placed on the lower mold (second mold), and the upper mold (first mold) temperature is 660 ° C. in vacuum. Lower mold (second mold) temperature 630 ° C, press pressure 170kg / cm ² Then, press molding was performed under the condition of a press time of 120 seconds to obtain a plate-shaped optical element fixing member having a rectangular shape of 20.5 × 10.3 mm in plan view.
[0075]
As shown in FIG. 4, each of the four corners on one side of the optical element fixing member 15 has a cross shape of 10 μm in total length, 10 μm in overall width, and 3.0 μm in line width, and a depth of 0.03 μm. The alignment mark 16 is formed of a concave portion, and the maximum surface roughness of the bottom surface 16a of each alignment mark 16 is 80 angstroms. Further, the surface (excluding the alignment mark 16) 15a of the optical element fixing member 15 on the side where these alignment marks 16 are formed is substantially flat, and the maximum surface roughness of the surface 15a is as follows. 800 angstroms.
Since the maximum surface roughness on the bottom surface 16a of each alignment mark 16 and the maximum surface roughness on the periphery of these alignment marks 16 are different, the alignment mark 16 can be easily visually recognized.
[0076]
In addition, a set of molds is constituted by the first mold produced in (1), the second mold produced in (2), and the third mold produced in (3) above. The first mold is placed on the upper mold holder of the press molding machine with its transfer molding surface being the lower surface, and the second mold is placed on the press molding machine with its transfer molding surface being the upper surface. When press molding was performed in the same manner as described above except that each was fixed to the lower mold holder and the third mold was used as the body mold, the same light as the optical element fixing member 15 shown in FIG. An element fixing member could be obtained.
[0077]
Example 2
(1) Production of first mold by method I
First, a mold material made of a carbide material containing WC was prepared. This mold material has a flat plate shape having a length of 30.0 mm, a width of 20.0 mm, a thickness of 1.0 mm, and a maximum surface roughness of 100 angstroms. Next, in exactly the same manner as in Example 1 (1), each of the four corners of one side of the mold material has a cross-sectional shape having a total length of 10 μm, a total width of 10 μm, and a line width of 3.0 μm. A resist pattern having a thickness of 2.0 μm was formed.
[0078]
After each resist pattern 3 was post-baked at 120 ° C. for 60 minutes, one side of the mold material was dry-etched for 10 minutes using these resist patterns 3 as a mask. This dry etching is performed using an inductive discharge type reactive etching apparatus, and Ar gas and CF are used as etching gases. ₄ Gas was used. Etching conditions are coil bias 600 W, substrate bias 600 W, Ar gas flow rate 20.0 sccm, CF ₄ The gas flow rate was 10.0 sccm, and the pressure was 5.0 mTorr.
[0079]
By dry etching under the above conditions, each resist pattern was etched at an etching rate of 0.08 μm / min, and the film thickness was reduced to 1.2 μm. Further, the surface of the mold material on the side where the resist pattern was provided was etched at an etching rate of 0.03 μm / min except for the portion protected by the resist pattern. As a result, the shape in plan view has a total length of 10 μm, a total width of 10 μm, and a line width of 3.0 μm at each of the four corners of one side of the mold material after dry etching (hereinafter referred to as “base material”). And a convex part having a height of 0.3 μm was formed. Since these convex portions are used as molding portions for the alignment mark transfer portion, they are hereinafter referred to as “molding portions for the alignment mark transfer portion”.
[0080]
Thereafter, the resist pattern was peeled off using a predetermined stripping solution to obtain a target first mold base material.
Next, from the Au, Pt, Pd and Rh in the same manner as in Example 1 (1), the entire outer surface of the base material on which the molding part for the alignment mark transfer part is formed is formed. A release film having a thickness of 1500 angstroms was formed.
[0081]
By forming the film up to the above release film, the intended first mold was obtained. The first mold includes the above-described base material and the above-described release film formed on the entire outer surface of the base material on the side where the molding part for the alignment mark transfer part is formed. In the first mold, the surface of the release film is a transfer molding surface. And, in this transfer molding surface, four alignment mark transfer parts are formed which are constituted by the molding part for the alignment mark transfer part and the part of the release film that covers the outer surface of the molding part. Has been.
[0082]
The maximum surface roughness on the upper surface of each alignment mark transfer portion is 100 angstroms. Further, the portion (peripheral portion) of the transfer molding surface excluding the formation position of the alignment mark transfer portion is substantially flat, and the maximum surface roughness in the portion is 300 angstroms.
[0083]
(2) Production of second mold
Implementation was performed except that a base material for the second mold was made of a carbide material containing WC and was 30 mm long, 20 mm wide, 1.0 mm thick and having a maximum surface roughness of 100 angstroms. A second mold was obtained in exactly the same manner as in Example 1 (2). Also in the second mold, the surface of the release film provided on one surface of the base material functions as a transfer molding surface.
By combining the first mold described above and the second mold described above, a side-free mold composed of these two molds can be obtained.
[0084]
(3) Production of third mold
A third mold was obtained in the same manner as in Example 1 (3). Also in the third mold, the surface of the release film provided on the inner surface of the base material functions as a transfer molding surface.
By combining the first mold and the second mold described above with the third mold described above, an upper mold (first mold or second mold), a lower mold (second mold) A set of molds including three molds, that is, a mold or a first mold) and a body mold (third mold) can be obtained.
[0085]
(4) Press molding
Implemented except that the first mold and the second mold constitute a set of molds and a 20.0 × 10.0 × 3.0 mm non-alkali glass plate is used as the molding material. Press molding was performed in exactly the same manner as in Example 1 (4) to obtain an optical element fixing member having a rectangular shape in plan view of 20.0 × 10.0 mm.
[0086]
In each of the four corners on one side of the optical element fixing member, alignment marks are formed which are concave portions having a cross-sectional shape of a total length of 10 μm, a total width of 10 μm, and a line width of 3.0 μm and a depth of 0.3 μm. The maximum surface roughness of the bottom surface of each alignment mark is 80 angstroms. The surface of the optical element fixing member on which the alignment marks are formed (excluding the alignment mark) is substantially flat, and the maximum surface roughness on the surface is 800 angstroms.
Since the maximum surface roughness on the bottom surface of each alignment mark is different from the maximum surface roughness on the periphery of these alignment marks, the alignment marks can be easily recognized.
[0087]
The first mold, the second mold, and the third mold constitute a set of molds, the first mold is used as the upper mold, and the second mold is the lower mold. When the press molding was performed in the same manner as described above except that the third mold was used as the body mold, an optical element fixing member having the alignment mark as described above could be obtained.
[0088]
Example 3
(1) Production of first mold by method II
First, a mold material made of glassy carbon was prepared. This mold material has a flat plate shape having a length of 20.0 mm, a width of 10.0 mm, a thickness of 3.0 mm, and a maximum surface roughness of 200 angstroms. Next, a negative type electron beam resist (ZEP7000 manufactured by Nippon Zeon Co., Ltd.) was applied to one side of the mold material by a spin coating method to form a resin layer having a film thickness of 1.5 μm on one side of the mold material.
[0089]
Next, an electron beam (irradiation amount is 55 μC / cm ² ), A regular triangle with a side length of 50 μm (line width of each side is 5.0 μm) is drawn at each of the four corners of the resin layer in plan view, and the resin layer after the electron beam drawing is subjected to predetermined development. It developed by immersing for 90 second in a liquid (ZEP500 by Nippon Zeon Co., Ltd.).
[0090]
By the above development, a portion of the resin layer that was not drawn with the electron beam was dissolved and removed, and a resist pattern composed of the portion that was drawn with the electron beam was formed at each of the four corners of the mold material. Each of the resist patterns in a plan view has a regular triangular frame shape with a side length of 50 μm and a line width of 5.0 μm, and a film thickness of 1.5 μm.
[0091]
After each resist pattern was post-baked at 200 ° C. for 30 minutes, one side of the mold material was dry-etched for 10 minutes using these resist patterns as a mask. This dry etching was performed using an induction discharge type reactive etching apparatus, and Ar gas was used as an etching gas. Etching conditions were a coil bias of 600 W, a substrate bias of 300 W, an etching gas (Ar gas) flow rate of 20.0 sccm, and a pressure of 5.0 mTorr.
[0092]
By dry etching under the above conditions, each resist pattern was etched at an etching rate of 0.11 μm / min, and the film thickness was reduced to 0.4 μm. Further, the surface of the mold material on the side where the resist pattern was provided was etched at an etching rate of 0.09 μm / min except for the portion protected by the resist pattern. As a result, each of the four corners on one side of the mold material after dry etching has a regular triangular frame shape with a side of 50 μm on one side and a line width of 5.0 μm and a height of 0.9 μm. An alignment mark transfer portion is formed.
[0093]
Thereafter, the resin layer was peeled off using a predetermined stripping solution to obtain the intended first mold. The first mold is made of flat glassy carbon having a rectangular shape of 20.0 × 10.0 mm in plan view, and the entire outer surface on the side where the alignment mark transfer portion is formed is It is a transfer molding surface.
[0094]
The maximum surface roughness on the upper surface of each alignment mark transfer portion is 200 angstroms. Further, the portion (peripheral portion) of the transfer molding surface excluding the portion where the alignment mark transfer portion is formed is substantially flat, and the maximum surface roughness of the portion is 500 angstroms.
[0095]
(2) Production of second mold
A glassy carbon block was cut and polished into a flat plate having a length of 20 mm, a width of 10 mm, a thickness of 3.0 mm, and a maximum surface roughness of 200 angstroms to obtain a target second mold. In the second mold, one main surface functions as a transfer molding surface.
By combining the first mold described above and the second mold described above, a side-free mold composed of these two molds can be obtained.
[0096]
(3) Production of third mold
A block made of glassy carbon was cut and polished into a cylindrical body of a predetermined size to obtain a target third mold. The third mold has an internal dimension that allows the first mold and the second mold to be inserted under a predetermined clearance. In this mold, the inner surface is transferred. Functions as a molding surface.
By combining the first mold and the second mold described above with the third mold described above, an upper mold (first mold or second mold), a lower mold (second mold) A set of molds composed of three molds, that is, a mold or a first mold) and a body mold (third mold) can be obtained.
[0097]
(4) Press molding
Example 1 except that the first mold and the second mold constitute a set of molds and 15.0 × 10.0 × 3.0 mm blue glass is used as a preform. Press molding was performed in exactly the same manner as in (4) to obtain a plate-shaped optical element fixing member having a rectangular shape of 15.0 × 10.0 mm in plan view.
[0098]
In each of the four corners on one side of the optical element fixing member, alignment marks are formed which are concave portions having a regular triangular frame shape with a side of 50 μm and a line width of 5.0 μm and a depth of 0.9 μm. The maximum surface roughness of the bottom surface of each alignment mark is 180 angstroms. The surface of the optical element fixing member on the side where the periphery of these alignment marks is formed (excluding the alignment mark) is substantially flat, and the maximum surface roughness on the surface is 450 angstroms. is there.
Since the maximum surface roughness on the bottom surface of each alignment mark is different from the maximum surface roughness on the periphery of these alignment marks, the alignment marks can be easily recognized.
[0099]
The first mold, the second mold, and the third mold constitute a set of molds, the first mold is used as the upper mold, and the second mold is the lower mold. When the press molding was performed in the same manner as described above except that the third mold was used as the body mold, an optical element fixing member having the alignment mark as described above could be obtained.
[0100]
Example 4
(1) Production of first mold by method I
First, a mold material made of a cemented carbide material having the same composition as the cemented carbide material used in Example 1 was prepared. This mold material has a flat plate shape of 20.0 mm in length, 10.0 mm in width, and 2.0 mm in thickness. Next, one edge portion in the longitudinal direction on one side of the mold material was cut and removed over a predetermined width and thickness to form a plane (hereinafter, the polished surface after polishing the plane will be described later). "First transfer portion forming plane"). Further, both edge portions of the mold material in the short side direction on the one surface (excluding the plane serving as the first transfer portion forming plane) are respectively cut and removed over a predetermined width and thickness. (Hereinafter referred to as “second transfer portion forming plane”), and these planes are first cut and processed. Polishing was performed so that the maximum roughness of the surface was 100 angstroms along with the flat surface. The first transfer portion forming plane and the second transfer portion forming plane are substantially located on one plane.
[0101]
Next, the number of forming portions for alignment mark transfer portions is set to 2, and the forming positions of these forming portions are two corners on the first transfer portion forming plane (the corners are the two transfer portions described above). (It is located at one end in the longitudinal direction of the mold material after being formed up to the forming plane.) Except for being in the vicinity of each, the mold material is exactly the same as in Example 1 (1). (After the formation of the two transfer portion forming planes) was dry-etched to form a molding portion for the alignment mark transfer portion in the mold material.
[0102]
Next, in the mold material, a portion (hereinafter, referred to as a planar view) surrounded by a first transfer portion forming plane (after forming up to the molding portion) and a second transfer portion forming plane This portion was referred to as “V-groove convex portion forming region”), and two convex portions having a perpendicular cross-sectional shape in the short direction of an isosceles triangle were formed in the V-groove convex portion forming region.
[0103]
The convex portion has a predetermined positional relationship with the molding portion for the alignment mark transfer portion, and one end portion in the longitudinal direction reaches one end portion in the longitudinal direction of the mold material. Is formed. Further, these convex portions have a depth for fixing the optical fiber to the optical element fixing member when the optical element fixing member is obtained by using the finally obtained first mold. It is designed to form two 120-μm V-grooves (meaning grooves whose vertical cross-sectional shape in the short direction is V-shaped. The same shall apply hereinafter) (hereinafter these convex portions are referred to as “V-grooves”). It is called “convex part”.) The periphery of these two V-groove convex portions is a flat surface, and the flat surface is located on substantially the same plane as the first transfer portion forming plane and the second transfer portion forming plane. .
[0104]
By forming the molding part for the alignment mark transfer part and the convex part for the V-groove in the mold material, a target base material for the first molding die was obtained.
Thereafter, Au, Pt are formed in the same manner as in Example 1 (1) on the entire outer surface of the base material on which the molding portion for the alignment mark transfer portion and the convex portion for the V groove are formed. , Pd, and Rh to form a release film having a thickness of 1500 angstroms to obtain a first mold of interest.
[0105]
The first mold thus obtained is formed on the entire outer surface of the base material and the base material on which the molding part for the alignment mark transfer part and the convex part for the V groove are formed. In the first mold, the surface of the release film is a transfer molding surface. Then, in this transfer molding surface, (1) two alignment mark transfers constituted by a molding part for the alignment mark transfer part and a part of the release film that covers the outer surface of the molding part. And (2) two V-groove transfer portions constituted by the V-groove convex portion and the portion of the release film that covers the outer surface of the V-groove convex portion. Yes.
[0106]
The maximum surface roughness on the upper surface of each alignment mark transfer portion is 100 angstroms. Further, the portion of the transfer molding surface excluding the formation positions of the alignment mark transfer portion and the V-groove transfer portion is substantially flat, and the maximum surface roughness on the transfer molding surface around the alignment mark transfer portion. It is 1000 angstroms.
[0107]
(2) Production of second mold
A second mold was obtained in exactly the same manner as in Example 1 (2).
By combining the first mold described above and the second mold described above, a side-free mold composed of these two molds can be obtained.
[0108]
(3) Production of third mold
A third mold was obtained in the same manner as in Example 1 (3). Also in the third mold, the surface of the release film provided on the inner surface of the base material functions as a transfer molding surface.
By combining the first mold and the second mold described above with the third mold described above, an upper mold (first mold or second mold), a lower mold (second mold) A set of molds composed of three molds, that is, a mold or a first mold) and a body mold (third mold) can be obtained.
[0109]
(4) Press molding
Except that one set of molds is constituted by the first mold and the second mold, press molding is performed in exactly the same manner as in Example 1 (4), and the shape in plan view is rectangular. An optical element fixing member was obtained.
[0110]
As shown in FIG. 5, alignment marks 21a and 21b are formed on one side of the optical element fixing member 20 in the vicinity of two corners at one end in the longitudinal direction. The marks 21a and 21b are formed of concave portions formed by alignment mark transfer portions formed on the first mold. Further, two V-grooves 22a and 22b are formed on the one surface of the optical element fixing member 20 by the V-groove transfer portion formed in the first mold. These V grooves 22 a and 22 b are for fixing the optical fiber to the optical element fixing member 20. The surface of the optical element fixing member 20 on the side where the alignment marks 21a and 21b and the V-grooves 22a and 22b are formed, except for the positions where the alignment marks 21a and 21b and the V-grooves 22a and 22b are formed. It is substantially flat.
[0111]
The alignment mark 21a and the V-groove 22a include a predetermined optical element 23 (photodiode, laser diode, etc .; see FIG. 5) having the alignment mark 23a, which is formed on the optical element 23. And the alignment mark 21 a formed on the optical element fixing member 20, and when the optical fiber is fixed to the V groove 22 a when the optical fiber is fixed to the optical element fixing member 20. The optical fiber is optically connected to the optical fiber.
[0112]
The alignment mark 21b and the V-groove 22b are formed by aligning the predetermined optical element 24 (photodiode, laser diode, etc .; see FIG. 5) having the alignment mark 24a in the optical element 24. When the optical element 24 is fixed to the optical element fixing member 20 using the mark 24a and the alignment mark 21b formed on the optical element fixing member 20, and the optical fiber is fixed to the V groove 22b, the optical element 24 is used. And the optical fiber are optically connected.
[0113]
Since the maximum surface roughness of the bottom surfaces of the alignment marks 21a and 21b is 80 angstroms and the maximum surface roughness of the periphery of the alignment marks 21a and 21b is 800 angstroms, the alignment marks 21a and 21b described above are used. Was easily visible.
[0114]
The first mold, the second mold, and the third mold constitute a set of molds, the first mold is used as the upper mold, and the second mold is the lower mold. When the press molding was performed in the same manner as described above except that the third mold was used as the body mold, an optical element fixing member having the alignment mark as described above could be obtained.
[0115]
Example 5
(1) Production of first mold by method I
First, a mold material made of SiC was prepared. This mold material has a disk shape with a diameter of 50.0 mm and a thickness of 3.0 mm. Next, after setting a V-groove convex portion forming region at a predetermined location on one side of the mold material, and cutting and removing a portion other than the V-groove convex portion forming region over a predetermined thickness, This flat surface was polished so that the maximum surface roughness was 100 angstroms (hereinafter, the polished surface is referred to as a “transfer portion forming flat surface”). In addition, the magnitude | size of said convex part formation area for V-grooves is the same magnitude | size as the convex part formation area for V-grooves in Example 4 (1).
[0116]
Next, a negative type electron beam resist (ZEP7000 manufactured by Nippon Zeon Co., Ltd.) was applied to the transfer portion forming plane by a spin coating method to form a resin layer having a film thickness of 1.5 μm on one side of the mold material. . And an electron beam (irradiation amount is 55 μC / cm ² ) Draws a cross of a predetermined size at predetermined positions (two places in total) on the resin layer, and immerses the resin layer after electron beam drawing in a predetermined developer (ZEP500 manufactured by Nippon Zeon Co., Ltd.) for 90 seconds. And developed.
[0117]
By the above development, portions of the resin layer that were not drawn with the electron beam were dissolved and removed, and resist patterns composed of the portions that were drawn with the electron beam were formed at two predetermined locations. The shape of each resist pattern in plan view is a cross shape having a total length of 10 μm, a total width of 10 μm, and a line width of 3.0 μm, and its film thickness is 1.5 μm.
[0118]
After each resist pattern was post-baked at 200 ° C. for 30 minutes, one side of the mold material was dry-etched for 10 minutes using these resist patterns as a mask. This dry etching is performed using an inductive discharge type reactive etching apparatus, and the etching gas is CF. ₄ Gas was used. Etching conditions are coil bias 300 W, substrate bias 300 W, etching gas (CF ₄ Gas) The flow rate was 30.0 sccm, and the pressure was 10.0 mTorr.
[0119]
By dry etching under the above conditions, each resist pattern was etched at an etching rate of 0.07 μm / min. Further, the surface of the mold material on the side where the resist pattern was provided was etched at an etching rate of 0.07 μm / min except for the portion protected by the resist pattern. As a result, at predetermined positions (a total of two positions) on one side of the mold material after dry etching, the shape in plan view is a cross shape with a total length of 10 μm, a total width of 10 μm, and a line width of 3.0 μm, and the height is 0. Molded portions for the alignment mark transfer portion each having a .7 μm convex portion were formed.
[0120]
Thereafter, the V-groove convex portion forming region is ground in the same manner as in Example 4 (1) to form two V-groove convex portions, thereby forming the intended first molding die. I got the base material. Then, Au, Pt, Pd and the like in Example 4 (1) are formed on one side of the base material (the surface on which the molding part for the alignment mark transfer part and the convex part for the V groove are formed). A release film having a film thickness of 1500 angstroms made of Rh was formed to obtain a first mold of interest.
[0121]
The first molding die thus obtained is similar to the first molding die obtained in Example 4 (1), and the base material, the molding portion for the alignment mark transfer portion and the V groove in this base material. And the release film formed on the entire outer surface on the side where the convex portions are formed. In the first mold, the surface of the release film is a transfer molding surface. It has become. And in this transfer molding surface, (1) Two alignment mark transfer parts constituted by a molding part for the alignment mark transfer part and a part of the release film covering the outer surface of the molding part And (2) Two V-groove transfer portions constituted by the V-groove convex portion and a portion of the release film covering the outer surface of the V-groove convex portion are formed.
[0122]
Each alignment mark transfer portion and each V-groove transfer portion are formed in exactly the same positional relationship as in the first mold obtained in Example 4 (1), and the surface on the upper surface of each alignment mark transfer portion The maximum roughness is 100 angstroms. Further, the portion of the transfer molding surface excluding the formation positions of the alignment mark transfer portion and the V-groove transfer portion is substantially flat, and the maximum surface roughness on the transfer molding surface around the alignment mark transfer portion. It is 1000 angstroms.
[0123]
(2) Production of second mold
Except for using a disk-shaped material made of SiC having a diameter of 50.0 mm, a thickness of 3.0 mm, and a maximum surface roughness of 100 angstroms as the base material for the second mold, the same as in Example 4 (2). In the same manner, a second mold was obtained.
By combining the first mold described above and the second mold described above, a side-free mold composed of these two molds can be obtained.
[0124]
(3) Production of third mold
A third mold was obtained in the same manner as in Example 1 (3) except that a block made of SiC was used. Also in the third mold, the surface of the release film provided on the inner surface of the base material functions as a transfer molding surface.
By combining the first mold and the second mold described above with the third mold described above, an upper mold (first mold or second mold), a lower mold (second mold) A set of molds composed of three molds, that is, a mold or a first mold) and a body mold (third mold) can be obtained.
[0125]
(4) Press molding
Except that the first mold and the second mold constitute a set of molds, press molding is performed in exactly the same manner as in Example 4 (4), and in Example 4 (4) An optical element fixing member having the same shape and size as the obtained optical element fixing member was obtained. In the press molding, the preform was arranged so as to obtain an optical element fixing member having a target shape.
[0126]
In the optical element fixing member thus obtained, the maximum surface roughness on the bottom surface of each alignment mark is 80 angstroms, and the maximum surface roughness on the periphery of the alignment mark is 800 angstroms. The alignment mark was easily visible.
[0127]
The first mold, the second mold, and the third mold constitute a set of molds, the first mold is used as the upper mold, and the second mold is the lower mold. When the press molding was performed in the same manner as described above except that the third mold was used as the body mold, an optical element fixing member having the alignment mark as described above could be obtained.
[0128]
Example 6
(1) Production of first mold by method I
First, a mold was obtained in exactly the same manner as in Example 2 (1) except that the shape and position of the alignment mark transfer portion in plan view were changed. In this mold, a total of eight alignment mark transfer portions having a L shape with a total length of 10 μm, a total width of 10 μm, and a line width of 3.0 μm are formed. Four of these eight alignment mark transfer portions are formed so as to overlap any one of the four corners of the first rectangle having a predetermined size, and the four alignment mark transfer portions. The portion forms a first alignment mark transfer portion group. The remaining four alignment mark transfer portions are the same size as the first rectangle, and the second rectangle 4 is aligned in the width direction of the mold at a predetermined interval from the first rectangle. The four alignment mark transfer portions form a second alignment mark transfer portion group. The four alignment mark transfer portions form a second alignment mark transfer portion group.
[0129]
The maximum surface roughness on the upper surface of each alignment mark transfer portion constituting the first alignment mark transfer portion group and the second alignment mark transfer portion group is 100 Å. In addition, the portion (peripheral portion) of the transfer molding surface in the above-described mold excluding the formation positions of the alignment mark transfer portions is substantially flat, and the surface maximum at the portion (peripheral portion) is maximum. The roughness is 1000 angstroms. Since this mold is integrated with a mold described below to form a first mold, it is hereinafter referred to as a “first-a mold”.
[0130]
A plate-shaped object made of a cemented carbide material having the same composition as the mold material of the mold 1a and having a rectangular shape in plan view is used as the mold material, and both edges in the short direction on one side of the mold material After the portions were cut and removed over a predetermined width and thickness to form planes (two in total), these planes were polished so that the maximum surface roughness was 100 angstroms (hereinafter, after polishing) These surfaces are collectively referred to as a “transfer portion forming plane”).
[0131]
Next, in Example 1 (1), the number of molding parts for the alignment mark transfer part is set to 2 and the formation position of these molding parts is set to a predetermined position on the transfer part forming plane. The mold material (after being formed up to the transfer portion forming plane) was dry-etched in exactly the same manner as above to form a molding portion for the alignment mark transfer portion in the mold material.
[0132]
Next, a portion of the mold material that is sandwiched between the two transfer portion forming planes in plan view is ground in the same manner as in Example 4 (1), and a V-groove convex portion is formed on the portion. Two bases were formed, thereby obtaining a base material for a target mold (hereinafter referred to as “the mold for 1b”). The V-groove convex portion has a predetermined positional relationship with the molding portion for the alignment mark transfer portion formed on the base material and from one end portion in the longitudinal direction of the base material. It is formed so as to reach the other end. Further, these V-groove protrusions are used to fix the optical fiber to the optical element fixing member when the optical element fixing member is obtained by using the finally obtained first mold. Are designed to form two V-grooves with a depth of 120 μm.
[0133]
Next, the entire outer surface of the base material on which the forming portion for the alignment mark transfer portion and the convex portion for the V groove are formed is made of Au, Pt, in the same manner as in Example 1 (1). A release film having a thickness of 1500 angstroms made of Pd and Rh was formed to obtain a target mold 1b. An alignment mark transfer portion and a V-groove transfer portion are formed in the transfer molding surface of the mold 1b, and the maximum surface roughness on the upper surface of each alignment mark transfer portion is 100 Å. Further, of the transfer molding surface in the mold 1b, the portions excluding the formation positions of the alignment mark transfer portion and the V groove transfer portion are substantially flat, and the periphery of the alignment mark transfer portion. The maximum surface roughness of the transfer molding surface is 1000 angstroms.
[0134]
Thereafter, the above-described 1a molding die and the above-described 1b molding die are integrated by the fixing frame so that the transfer molding surfaces formed in the respective molding die are directed in the same direction. A first mold was obtained. In the first mold, the transfer molding surface (excluding the alignment mark transfer portion) in the 1a molding die is the transfer molding surface (however, the alignment mark transfer portion and the V) in the 1b molding die. The alignment mark transfer portion that protrudes more than the groove transfer portion and is formed on the 1b mold is located on one end side in the longitudinal direction of the first mold. Yes. The first mold has a rectangular shape in plan view.
[0135]
(2) Production of second mold
In Example 1 (2), a flat plate made of a cemented carbide material containing WC and having a rectangular shape with a predetermined size in plan view is used as a base material for the second mold. A second mold was obtained in exactly the same manner.
By combining the first mold described above and the second mold described above, a side-free mold composed of these two molds can be obtained.
[0136]
(3) Production of third mold
A third mold was obtained in the same manner as in Example 1 (3). Also in the third mold, the surface of the release film provided on the inner surface of the base material functions as a transfer molding surface.
By combining the first mold and the second mold described above with the third mold described above, an upper mold (first mold or second mold), a lower mold (second mold) A set of molds composed of three molds, that is, a mold or a first mold) and a body mold (third mold) can be obtained.
[0137]
(4) Press molding
A non-alkali glass plate whose shape in plan view is a rectangle having a predetermined size is used as a preform except that the first mold and the second mold constitute a set of molds. Were press-molded in exactly the same manner as in Example 1 (4) to obtain an optical element fixing member having a rectangular shape in plan view.
[0138]
As shown in FIG. 6, the optical element fixing member 30 includes a pedestal portion 31 formed by a 1a molding die and an optical fiber engaging portion 32 formed by a 1b molding die. ing. The pedestal 31 is one step lower than the optical fiber engaging portion. Four alignment marks 33a, 33b, and 33c each including a concave portion formed by the first alignment mark transfer portion group formed on the 1a molding die are provided at substantially the center in plan view on the upper surface of the pedestal portion 31. , 33d and four alignment marks 34a, 34b, 34c, 34d made of a recess formed by the second alignment mark transfer portion group formed in the mold 1a, and these alignment marks are formed. The periphery of the mark is substantially flat.
[0139]
On the other hand, the optical fiber engaging portion 32 is formed in two V grooves 34a and 34b formed by the V groove transfer portion formed in the 1b molding die and in the 1b molding die. Two alignment marks 35a and 35b formed by the alignment mark transfer portion and formed of concave portions are formed. The V grooves 34a and 34b are for fixing optical fibers, and the depth of each V groove 34a and 34b is 120 μm. The alignment marks 35 a and 35 b are formed at one end in the longitudinal direction of the optical element fixing member 30. The surface of the optical fiber engaging portion 32 on the side where the V grooves 34a and 34b and the alignment marks 35a and 35b are formed is substantially flat except for the V grooves 34a and 34b and the alignment marks 35a and 35b. It has become.
[0140]
The alignment marks 33a, 33b, 33c, and 33d (hereinafter, these alignment marks may be referred to as “first alignment mark group”) and the V-groove 34a have a rectangular shape in a plan view. The optical element 36 (photodiode, laser diode, etc .; see FIG. 6) is positioned using the first alignment mark group to fix the optical element 36 on the optical element fixing member 30, and When the optical fiber is fixed to the V groove 34a, the optical element 36 and the optical fiber are optically connected.
[0141]
The alignment marks 34a, 34b, 34c, 34d (hereinafter, these alignment marks may be referred to as “second alignment mark group”) and the V-groove 34b have a predetermined size in plan view. The optical element 37 (photodiode, laser diode, etc .; see FIG. 6) is positioned by using the second alignment mark group to fix the optical element 36 on the optical element fixing member 30. In addition, when the optical fiber is fixed to the V groove 34b, the optical element 37 and the optical fiber are optically connected.
[0142]
Each alignment mark 33a, 33b, 33c, 33d constituting the first alignment mark group has a maximum surface roughness on the bottom surface of 80 angstroms, and each alignment mark 34a constituting the second alignment mark group. , 34b, 34c, and 34d have a maximum surface roughness of 80 angstroms, and the maximum surface roughness of the peripheral portions of these alignment marks (the surface of the pedestal 31) is 800 angstroms. The alignment marks 33a, 33b, 33c, 33d, 34a, 34b, 34c, and 34d were easily visible. Similarly, the maximum surface roughness at the bottom surface of the alignment marks 35a and 35b is 80 angstroms, and the maximum surface roughness at the periphery of these alignment marks (the surface of the optical fiber engaging portion 32) is 800 angstroms. Therefore, these alignment marks 35a and 35b were also easily visible.
[0143]
The first mold, the second mold, and the third mold constitute a set of molds, the first mold is used as the upper mold, and the second mold is the lower mold. When the press molding was performed in the same manner as described above except that the third mold was used as the body mold, an optical element fixing member having the alignment mark as described above could be obtained.
[0144]
Example 7
(1) Production of first mold by method II
First, a flat plate made of glassy carbon having a length of 20.0 mm, a width of 10.0 mm, a thickness of 3.0 mm, and a maximum surface roughness of 200 angstroms was used as a mold material, and Example 4 (1 The first transfer portion forming plane and the second transfer portion forming plane were formed in exactly the same manner as in (1).
[0145]
Next, the number of alignment mark transfer portions is set to 2, and the shape in plan view is a cross shape, and the alignment mark transfer portions are formed at two corners on the first transfer portion forming plane. (These corners are located at one end in the longitudinal direction of the mold material after the formation of the two transfer part forming planes.) Example 3 (except for the vicinity of each) In the same manner as in 1), the mold material (after the formation of the two transfer portion forming planes) was dry etched to form an alignment mark transfer portion in the mold material.
[0146]
Further, the second transfer portion forming plane is ground in the same manner as in the embodiment 4 (1), and the V groove transfer portion having the isosceles triangle-shaped vertical cross-sectional shape in the short direction is formed into 2 pieces. A line was formed.
By forming the alignment mark transfer part and the V-groove transfer part, the intended first mold was obtained.
[0147]
The first mold is made of flat glassy carbon having a rectangular shape of 20.0 × 10.0 mm in plan view, and the alignment mark transfer portion and the V groove transfer portion are formed. The entire outer surface on the side is a transfer molding surface. The V-groove transfer portion has a predetermined positional relationship with the alignment mark transfer portion, and one end in the longitudinal direction is at one end in the longitudinal direction of the first mold. It is formed to reach. In addition, these V-groove transfer portions have two V-grooves having a depth of 120 μm for fixing the optical fiber to the optical element fixing member when the optical element fixing member is obtained using a mold. Designed to be formed.
[0148]
The maximum surface roughness on the upper surface of each alignment mark transfer portion is 100 angstroms. Further, the portion of the transfer molding surface excluding the formation positions of the alignment mark transfer portion and the V-groove transfer portion is substantially flat, and the maximum surface roughness on the transfer molding surface around the alignment mark transfer portion. It is 1000 angstroms.
[0149]
(2) Production of second mold
A second mold was obtained in the same manner as in Example 3 (2).
By combining the first mold described above and the second mold described above, a side-free mold composed of these two molds can be obtained.
[0150]
(3) Production of third mold
A third mold was obtained in the same manner as in Example 3 (3). In the third mold, the inner surface functions as a transfer molding surface.
By combining the first mold and the second mold described above with the third mold described above, an upper mold (first mold or second mold), a lower mold (second mold) A set of molds composed of three molds, that is, a mold or a first mold) and a body mold (third mold) can be obtained.
[0151]
(4) Press molding
Except that a set of molds is constituted by the first mold and the second mold, press molding is performed in the same manner as in Example 3 (4), and obtained in Example 4 (4). An optical element fixing member having substantially the same shape as the optical element fixing member was obtained.
In the optical element fixing member thus obtained, the maximum surface roughness at the bottom surface of each alignment mark is 80 angstroms, and the maximum surface roughness around these alignment marks is 800 angstroms. Each alignment mark of was easily visible.
[0152]
The first mold, the second mold, and the third mold constitute a set of molds, the first mold is used as the upper mold, and the second mold is the lower mold. When the press molding was performed in the same manner as described above except that the third mold was used as the body mold, an optical element fixing member having the alignment mark as described above could be obtained.
[0153]
【The invention's effect】
As described above, when the molding die of the present invention is used, an optical element fixing member having an alignment mark at a desired location can be obtained by press molding.
Therefore, according to the present invention, the optical connection between the optical elements to be fixed or mounted, or the optical connection between the optical elements between the optical element fixing members after the optical element is fixed or mounted is performed in a short time. It is possible to provide a large number of optical element fixing members that can be manufactured at low cost.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view schematically showing a process of forming a molding part for an alignment mark transfer part on a mold material for a first molding die in Example 1, and FIG. 1 (a) is a dry etching process. FIG. 1B is a cross-sectional view showing an outline of a mold material after forming a resist film as a resist pattern material, FIG. 1B is a cross-sectional view showing an outline of the mold material after forming a resist pattern, FIG. ) Is a cross-sectional view showing an outline of a mold material after forming a molding part for an alignment mark transfer part.
FIG. 2A is a schematic view of the base material for the first mold produced in Example 1 as viewed from the side on which the base material for the alignment mark transfer portion is formed on the base material. FIG. 2B is a cross-sectional view showing an outline of the base material.
FIG. 3A is a plan view schematically showing the first mold produced in Example 1 as viewed from the side where the alignment mark transfer portion is formed in the first mold. FIG. 2B is a cross-sectional view schematically showing the first mold.
4 is a plan view schematically showing the optical element fixing member produced in Example 1 when viewed from the side on which the alignment mark is formed in the optical element fixing member. FIG.
FIG. 5 is a plan view schematically showing the optical element fixing member produced in Example 4 when viewed from the side on which the alignment mark is formed in the optical element fixing member.
6 is a perspective view showing an outline of an optical element fixing member produced in Example 6. FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Mold material, 5 ... Base material, 6 ... Molding part for alignment mark transcription | transfer part, 7 ... Release film, 8 ... Alignment mark transcription | transfer part, 10a ... Transfer molding surface, 10 ... 1st molding die, 15, 20, 30 ... members for fixing optical elements 16, 21, 21a, 21b, 33a, 33b, 33c, 33d, 34a, 34b, 34c, 34d, 35a, 35b ... alignment marks.

Claims (7)

In a mold having a transfer molding surface of a predetermined shape and used for press-molding a molding material to an optical element fixing member,
An alignment mark transfer part for obtaining a press-formed product having an alignment mark is provided in the transfer molding surface ,
A molding die characterized in that a surface roughness at an alignment mark transfer portion and a surface roughness at a transfer molding surface around the alignment mark transfer portion are different . It consists of a base material and a release film formed on the surface of the base material, and the base material is (1) a carbide material containing WC, or (2) TiN, TiC or Al ₂ O The mold according to claim 1, comprising a cermet containing ₃ , wherein the surface of the release film is a transfer molding surface. 3. A molding part for the alignment mark transfer part is formed on the base material itself, and the alignment mark transfer part is formed by the molding part and a release film covering the surface of the molding part. The mold described in 1. The shaping | molding die of Claim 1 which consists of SiC or glassy carbon. The molding die according to any one of claims 1 to 4, wherein the alignment mark transfer portion is a convex portion. In manufacturing a molding die having a transfer molding surface of a predetermined shape and used for press molding a molding material to a member for fixing an optical element,
An alignment mark transfer portion for obtaining an optical element fixing member having an alignment mark is formed in the transfer molding surface of the mold, and the surface roughness in the alignment mark transfer portion is transferred around the alignment mark transfer portion. Different from the surface roughness on the molding surface , a molding part for the alignment mark transfer part is formed by dry etching on the mold material of the mold, and then the molding part is covered, and Alignment mark transfer comprising the mold part and the release film covering the surface of the mold part, forming the mold film so that the surface of the mold film becomes the transfer molding surface. A mold manufacturing method, characterized in that a mold having a portion and a surface of the release film as a transfer molding surface is obtained. In manufacturing a molding die having a transfer molding surface of a predetermined shape and used for press molding a molding material to a member for fixing an optical element,
An alignment mark transfer portion for obtaining an optical element fixing member having an alignment mark is located in the transfer molding surface of the mold, and the surface roughness at the alignment mark transfer portion is transfer molding around the alignment mark transfer portion. A method for manufacturing a molding die, wherein the alignment mark transfer portion is formed by dry etching on a molding material of the molding die so as to have a surface roughness different from that of the surface .

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