JP3602810B2 - Temperature control method and its control device - Google Patents

Temperature control method and its control device Download PDF

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Publication number
JP3602810B2
JP3602810B2 JP2001169147A JP2001169147A JP3602810B2 JP 3602810 B2 JP3602810 B2 JP 3602810B2 JP 2001169147 A JP2001169147 A JP 2001169147A JP 2001169147 A JP2001169147 A JP 2001169147A JP 3602810 B2 JP3602810 B2 JP 3602810B2
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Prior art keywords
temperature
temperature control
level
control unit
control
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JP2002366233A (en
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憲司 泉
辰明 大西
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Nihon Spindle Manufacturing Co Ltd
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Nihon Spindle Manufacturing Co Ltd
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Description

【0001】
【発明の属する技術分野】
本発明は、室内の温度制御方法及びその制御装置の改良に関するもので、特にクリーンルーム等、精密な温度制御を必要とする室内の温度制御方法及びその制御装置に関するものである。
【0002】
【従来の技術】
クリーンルーム内の温度を一定に、かつ精密に保つために、従来は冷房専用機と再熱用電気ヒータを用いて、一度冷凍機で空気を冷やした後に電気ヒータの出力を比例制御して温度コントロールする方法が採られている。その一例の概略を図4に示す。クリーンルーム温度制御装置50は、冷凍機51に接続される冷却コイル52と、電気ヒータ53とを備える。55はクリーンルームからの空気吸い込み口、56は該吸い込み口付近に設けられる温度測定器を示す。ただし冷凍機51は常時フルロードで運転し、電気ヒータ53は比例制御して空気を加熱し、温度コントロールを行っている。Fはクリーンルームへの送気用フアンを示す。
【0003】
その他、温度制御方法としてステップサーモを用いた方法がある。その概略を図5に示す。但し温度制御装置の概略は図4と同一であり、説明を省略する。図において横軸は温度を示すもので、A点を基準温度とした温度制御範囲としてのステップ1,並びにステップ2,3,4,5を設ける。ただしaはディファレンシャル、bはステップ値とする。各ステップは例えば順次加熱(高温)、加熱(低温)、冷却(弱)、冷却(中)、冷却(強)とするようにしたもので、室内負荷に見合うように各ステップで加熱、冷却を行うようにしたものである。
【0004】
【発明が解決しようとする課題】
ところで、上記従来の第1の一度冷凍機で空気を冷やした後に電気ヒータの出力を比例制御して温度コントロールする方法においては、無駄なエネルギーを消費することになり、かつ受電容量も大きくなるため新たな設備が必要となる等の問題がある。
【0005】
またステップサーモ方式は、通常±2℃の仕様には適するも、精密な温度制御、例えば±1℃とするときは、ディファレンシャルa、ステップbの幅は狭くなるため、各装置の発停の回数が多くなり、耐久性に問題が生ずる等の欠点がある。
【0006】
本発明は、上記問題点に鑑み、ステップサーモ方式を改良し、各装置の発停の回数を押さえて精密温度制御を可能とすることができるようにしたクリーンルームの温度制御方法及びその制御装置を提供することを目的とする。
【0007】
【課題を解決するための手段】
上記目的を達成するため、本発明のクリーンルームの温度制御方法は、基準設定温度とその上限値、下限値からなる温度制御範囲としてのレベルを複数設定したステップサーモ式温度制御において、温度検出器から制御部に印加される信号の内容から、何れかのレベルの内の1つのレベルの運転・停止信号が繰り返し送られてきたことを検出した場合に、当該レベルにおいて運転が安定していると判断し、制御部の指示調節計に当該レベルの中心の値が目標とする設定温度となるように各レベルに設定した温度制御範囲を変更せしめ、変更した各レベルに設定した温度制御範囲を基準として温度制御を行うことを特徴とする。
【0008】
上記の本発明の温度制御方法は、従来の各基準設定温度を固定した方法とは異なり、温度検出器よりの信号から最適な温度制御範囲を自動的に判断し、各基準設定温度を変更し温度制御を行うことにより、上限値、下限値を大きくすることが可能であり、各装置の発停の回数を減らすことができる。
【0009】
第2の発明は、上記温度制御方法を実施する装置に係わり、温度制御機構と、温度調整機構とより成り、該制御機構は冷凍機に接続される冷却コイルと冷媒加熱器及び加熱器並びに送気フアンとを備え、温度調整機構は室内よりの受け入れ空気の温度検出器及び制御部とを備え、該制御部は温度検出器よりの信号を検出する指示調節計とを備え、基準設定温度とその上限値、下限値からなる温度制御範囲としてのレベルを複数設定したステップサーモ方式により上記冷却コイルと冷媒加熱器及び加熱器を選択作動し、温度検出器から制御部に印加される信号の内容から、何れかのレベルの内の1つのレベルの運転・停止信号が繰り返し送られてきたことを検出した場合に、当該レベルにおいて運転が安定していると判断し、制御部の指示調節計に当該レベルの中心の値が目標とする設定温度となるように各レベルに設定した温度制御範囲を変更せしめ、変更した各レベルに設定した温度制御範囲を基準として温度制御を行うようにしたことを特徴とする。
【0010】
上記の構成からなる本発明は、ステップサーモ方式において、冷却、加熱手段として冷却コイル、冷媒レヒートコイル並びに電気コイルを備え、上記方式の各温度制御範囲の温度制御をこれら各手段を選択して行い、循環する温度制御範囲を検出し、これを基準として温度制御を行うことにより、複数の温度制御範囲を作動させる必要はなく、各装置の発停の回数を減らすことができる。
【0011】
【発明の実施の形態】
以下、本発明のクリーンルームの温度制御装置の実施の形態を図面に基づいて説明する。
【0012】
図1乃至図3は、本発明の一実施例を示すもので、温度制御装置1は、温度制御機構2と、温度調整機構3とを備える。温度制御機構2は冷凍機5に接続される冷却コイル6と冷媒レヒートコイル7、及び電気ヒータ8とを備える。9は空気吸込み口、10は温度検出器、Fは送風ファンを示す。
【0013】
温度調整機構3は、上記温度検出器10よりの信号を受け入れる指示調節計11と、検索を行うシーケンサ12とを備える。
【0014】
次にその制御要領を図3に基づいて説明する。図は温度制御として複数の温度制御範囲(以下単にレベルという)を組み合わせたステップサーモ方式を利用とたもので、横方向に温度を示す。 まずレベル1は基準値Aを設定し、ディファレンシャル(動作すきま)を定め上限値Bとする。このレベル1は冷凍機5の運転・停止の指令を出す温度を示すもので、高い空気温度からA点に到達したとき停止(OFF)し、低い空気温度がB点に到達したとき起動(ON)する。
【0015】
次に、レベル2はC点を基準とし、ディファレンシャルを定め上限値Dとする。このレベル2は電気ヒータ8の運転・停止の指令を出す温度を示すもので、高い空気温度からC点に到達したとき起動(ON)し、低い空気温度からD点に到達したとき停止(OFF)する。
【0016】
同様にしてレベル3はE点を基準とし、ディファレンシャルを定め上限値Fとする。このレベル3は冷媒レヒートの運転・停止の指令を出す温度を示すもので、高い空気温度からE点に到達したとき起動(ON)し、低い空気温度からF点に到達したとき停止(OFF)する。
【0017】
同様にしてレベル4はG点を基準とし、ディファレンシャルを定め上限値Hとする。このレベル4は冷凍機のアンロード(冷媒の容量制御)の運転・停止の指令を出す温度を示すもので、高い空気温度からG点に到達したとき起動(ON)し、低い空気温度からH点に到達したとき停止(OFF:フルロード運転)する。
【0018】
次に、この温度調整機構の動作について説明する。まず初期状態ではレベル1の設定値になっているものとする。このとき、冷凍機5はOFF、電気ヒータ8、冷媒レヒート及び冷凍機のアンロードはONになっている。この状態で温度がB点より低い場合には、電気ヒータ8等がONになっているため、温度が上昇する。そしてB点まで温度が上昇すると、冷凍機5はONになる。それでも温度が上昇する場合は、D点まで温度が上昇し、電気ヒータ8がOFFになる。さらに、それでも温度が上昇する場合は、F点まで温度が上昇すると冷媒レヒートがOFFになり、H点まで温度が上昇すると冷凍機のアンロードがOFFになる。
【0019】
また、D点まで温度が上昇し、電気ヒータ8がOFFになった後、温度が下がってC点まで温度が下降してきた場合、再び電気ヒータ8がONとなり、温度は上昇する。これによりレベル2で温度は循環することになる。
【0020】
これらの信号は温度検出器10により温度を検出し、温度調整機構3内の指示調節計11に信号が送られる。指示調節器11は、該信号から各レベルの運転・停止を判断し、各装置に動作信号を送ると共に、シーケンサ12にも同じ信号を送る。なお、指示調節計11、シーケンサ12に換え、所謂パーソナルコンピューターを利用することも可能である。
【0021】
シーケンサ12は指示調節計11から送られてくる信号の内容から、同じ信号(何れかのレベルの内の1つのレベルの運転・停止信号)が繰り返し送られてきた場合は、何れかのレベルの内の1つのレベルにおいて運転が安定していると判断し、指示調節計11に当該レベルの中心の値が目標とする設定温度となるように各レベルに設定した温度制御範囲を変更せしめ、変更した各レベルに設定した温度制御範囲を基準として温度制御を行う。
【0022】
【発明の効果】
請求項1記載の発明によれば、温度検出器よりの信号から最適な温度制御範囲を自動的に判断し、各基準設定温度を変更し温度制御を行うことにより、室内負荷が変動した場合も自動的に判断し最適な運転状態に制御するので、各レベルの上限値、下限値の幅大きくすることができ、各装置の発停の回数を減らすことができる。また、常に目標とする設定温度が循環しているレベルの中心にあるので、精密な温度制御も可能となる。
また、請求項2記載の発明によれば、温度制御機構は冷凍機に接続される冷却コイルと冷媒レヒートコイル及び電気ヒータとを備えたことにより、温度制御は3段階以上に行うことが出来る。また温度制御はステップサーモ方式を利用し、上記冷却コイルと冷媒レヒートコイル及び電気ヒータを選択作動し、循環する温度制御範囲をシーケンサにより検出し、これを基準として温度制御を行うようにしたから、従来の固定された基準温度への移行を必要とせず。従って1個の温度制御範囲内の循環のみで済むため、従来の各種温度制御機構を作動させる必要はない。また温度制御範囲も狭くすることができる故、温度制御の精度を増すことができる。
【図面の簡単な説明】
【図1】本発明の温度制御装置の一実施例を示し、縦断説明図である。
【図2】温度温度調整機構の説明図である。
【図3】ステップサーモ方式の説明図である。
【図4】従来の温度制御装置の一実施例を示す縦断説明図である。
【図5】従来の温度制御装置の他の実施例を示す説明図である。
【符号の説明】
1 温度制御装置
2 温度制御機構
3 温度調整機構
5 冷凍機
6 冷却コイル
7 冷媒レヒートコイル
8 電気ヒータ
10 温度検出器
11 指示調節計
12 シーケンサ
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an indoor temperature control method and an improvement of a control device therefor, and more particularly to an indoor temperature control method and a control device thereof that require precise temperature control such as a clean room.
[0002]
[Prior art]
Conventionally, in order to keep the temperature in the clean room constant and precise, using a cooling only machine and an electric heater for reheating, the air was once cooled by a refrigerator and then the output of the electric heater was proportionally controlled to control the temperature. The method is adopted. FIG. 4 shows an outline of an example. The clean room temperature control device 50 includes a cooling coil 52 connected to a refrigerator 51 and an electric heater 53. Reference numeral 55 denotes an air suction port from the clean room, and 56 denotes a temperature measuring device provided near the suction port. However, the refrigerator 51 is always operated at full load, and the electric heater 53 heats air by proportional control to perform temperature control. F indicates a fan for supplying air to the clean room.
[0003]
In addition, there is a method using step thermo as a temperature control method. The outline is shown in FIG. However, the outline of the temperature control device is the same as that of FIG. 4, and the description is omitted. In the figure, the horizontal axis represents the temperature, and Steps 1, 2, 3, 4, and 5 are provided as a temperature control range using the point A as a reference temperature. Here, a is a differential, and b is a step value. Each step is, for example, sequentially heating (high temperature), heating (low temperature), cooling (weak), cooling (medium), and cooling (strong). In each step, heating and cooling are performed in accordance with the indoor load. It is something to do.
[0004]
[Problems to be solved by the invention]
By the way, in the above-mentioned first method of controlling the temperature by proportionally controlling the output of the electric heater after cooling the air with the first refrigerator, wasteful energy is consumed and the power receiving capacity is increased. There are problems such as the need for new equipment.
[0005]
Although the step thermo system is usually suitable for the specification of ± 2 ° C., when the temperature is precisely controlled, for example, when the temperature is ± 1 ° C., the width of the differential a and the step b becomes narrow. Disadvantages such as increased durability.
[0006]
The present invention has been made in view of the above-described problems, and has been developed by improving a step thermo system to enable a precise temperature control by suppressing the number of start and stop of each device, and a control method and a control device for the clean room. The purpose is to provide.
[0007]
[Means for Solving the Problems]
In order to achieve the above object, the clean room temperature control method of the present invention is a step thermo-type temperature control in which a plurality of levels are set as a temperature control range including a reference set temperature and an upper limit value and a lower limit value. When it is detected from the content of the signal applied to the control unit that the operation / stop signal of one of the levels is repeatedly transmitted, it is determined that the operation is stable at the level. Then, the indicating controller of the control unit changes the temperature control range set for each level so that the value at the center of the level becomes the target set temperature , based on the changed temperature control range set for each level. It is characterized by performing temperature control.
[0008]
The above-described temperature control method of the present invention is different from a conventional method in which each reference set temperature is fixed, and automatically determines an optimum temperature control range from a signal from a temperature detector, and changes each reference set temperature. By performing the temperature control, the upper limit value and the lower limit value can be increased, and the number of start / stop of each device can be reduced.
[0009]
A second aspect of the present invention relates to an apparatus for performing the above temperature control method, comprising a temperature control mechanism and a temperature adjustment mechanism, wherein the control mechanism includes a cooling coil connected to a refrigerator, a refrigerant heater, a heater, and a feeder. The temperature adjustment mechanism includes a temperature detector and a control unit for receiving air from the room, the control unit includes an indicating controller that detects a signal from the temperature detector, and a reference set temperature and The cooling coil, the refrigerant heater, and the heater are selectively operated by a step thermo method in which a plurality of levels as a temperature control range including an upper limit value and a lower limit value are set , and contents of a signal applied from the temperature detector to the control unit. From the above, when it is detected that the operation / stop signal of one of the levels is repeatedly transmitted, it is determined that the operation is stable at the level, and the instruction adjustment of the control unit is performed. The value of the center of the level allowed changing the temperature control range set for each level so that the set temperature as a target, and to control the temperature based on the temperature control range set to each level was changed to It is characterized.
[0010]
The present invention having the above-described structure, in a step thermo system, includes a cooling coil, a refrigerant reheat coil, and an electric coil as cooling and heating means, and performs temperature control of each temperature control range of the above-described method by selecting these means, By detecting the circulating temperature control range and performing temperature control based on the detected temperature control range, it is not necessary to operate a plurality of temperature control ranges, and the number of start and stop of each device can be reduced.
[0011]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, an embodiment of a temperature control device for a clean room according to the present invention will be described with reference to the drawings.
[0012]
1 to 3 show one embodiment of the present invention. A temperature control device 1 includes a temperature control mechanism 2 and a temperature adjustment mechanism 3. The temperature control mechanism 2 includes a cooling coil 6 connected to the refrigerator 5, a refrigerant reheat coil 7, and an electric heater 8. 9 denotes an air inlet, 10 denotes a temperature detector, and F denotes a blower fan.
[0013]
The temperature adjusting mechanism 3 includes an indicating controller 11 that receives a signal from the temperature detector 10 and a sequencer 12 that performs a search.
[0014]
Next, the control procedure will be described with reference to FIG. The figure uses a step thermo system in which a plurality of temperature control ranges (hereinafter, simply referred to as levels) are combined as the temperature control, and the temperature is shown in the horizontal direction. First, for level 1, a reference value A is set, and a differential (operational clearance) is determined and set to an upper limit value B. The level 1 indicates a temperature at which a command to start / stop the refrigerator 5 is issued. The level 1 is stopped (OFF) when the air temperature reaches point A from a high air temperature, and started (ON) when the low air temperature reaches point B. ).
[0015]
Next, at level 2, the differential is determined and the upper limit D is set with reference to the point C. Level 2 indicates a temperature at which a command to start or stop the operation of the electric heater 8 is issued. The level is activated (ON) when the air temperature reaches point C from a high air temperature, and stopped (OFF) when the air temperature reaches point D from a low air temperature. ).
[0016]
Similarly, for level 3, the differential is determined with reference to the point E, and the upper limit F is set. This level 3 indicates a temperature at which a command to start / stop the operation of the refrigerant reheat is issued. The level 3 is activated (ON) when the air temperature reaches point E, and stopped when the air temperature reaches point F from a low air temperature (OFF). I do.
[0017]
Similarly, the level 4 is set with the reference point G as the reference, and the differential is determined and the upper limit H is set. This level 4 indicates the temperature at which a command to start / stop the unloading (control of the refrigerant capacity) of the refrigerator is issued. Stops when the point is reached (OFF: full load operation).
[0018]
Next, the operation of the temperature adjusting mechanism will be described. First, it is assumed that the level 1 is set in the initial state. At this time, the refrigerator 5 is OFF, and the electric heater 8, the refrigerant reheat, and the unloading of the refrigerator are ON. If the temperature is lower than the point B in this state, the temperature rises because the electric heater 8 and the like are turned on. When the temperature rises to the point B, the refrigerator 5 is turned on . If the temperature still rises, the temperature rises to point D and the electric heater 8 is turned off . Furthermore, if the temperature still rises, the refrigerant reheat is turned off when the temperature rises to the point F, and the unloading of the refrigerator is turned off when the temperature rises to the point H.
[0019]
The temperature rises to a point D, after the electric heater 8 is turned OFF, if the temperature is the temperature point C has been lowered down, the electric heater 8 is turned ON again, the temperature rises. This causes the temperature to circulate at level two.
[0020]
The temperature of these signals is detected by a temperature detector 10, and the signals are sent to an indicating controller 11 in the temperature adjusting mechanism 3. The instruction controller 11 determines the operation / stop of each level from the signal, sends an operation signal to each device, and sends the same signal to the sequencer 12. It should be noted that a so-called personal computer can be used instead of the indicating controller 11 and the sequencer 12.
[0021]
Based on the content of the signal sent from the indicating controller 11, the sequencer 12, when the same signal (one of the operation start / stop signals of any one of the levels ) is repeatedly sent, sends the signal of any level . It is determined that the operation is stable at one of the levels, and the indicating controller 11 changes the temperature control ranges set at the respective levels so that the center value of the level becomes the target set temperature. The temperature control is performed based on the temperature control ranges set for the respective levels.
[0022]
【The invention's effect】
According to the first aspect of the present invention , an optimum temperature control range is automatically determined from a signal from the temperature detector, and each reference set temperature is changed to perform temperature control. is automatically determined and controlled to optimum operating conditions, the upper limit for each level, it is possible to increase the width of the lower limit, it is possible to reduce the number of start-stop of each device. Also, since the target set temperature is always at the center of the circulating level, precise temperature control is also possible.
According to the second aspect of the present invention, since the temperature control mechanism includes the cooling coil connected to the refrigerator, the refrigerant reheat coil, and the electric heater, the temperature control can be performed in three or more stages. In addition, the temperature control uses a step thermo method, the cooling coil, the refrigerant reheat coil, and the electric heater are selectively operated to detect a circulating temperature control range by a sequencer, and the temperature is controlled based on the detected temperature control range. No need to transition to a fixed reference temperature. Accordingly, since only circulation within one temperature control range is required, there is no need to operate various conventional temperature control mechanisms. Further, since the temperature control range can be narrowed, the accuracy of the temperature control can be increased.
[Brief description of the drawings]
FIG. 1 is a longitudinal sectional view showing one embodiment of a temperature control device of the present invention.
FIG. 2 is an explanatory diagram of a temperature-temperature adjusting mechanism.
FIG. 3 is an explanatory diagram of a step thermo system.
FIG. 4 is a vertical sectional view showing one embodiment of a conventional temperature control device.
FIG. 5 is an explanatory view showing another embodiment of the conventional temperature control device.
[Explanation of symbols]
REFERENCE SIGNS LIST 1 temperature control device 2 temperature control mechanism 3 temperature adjustment mechanism 5 refrigerator 6 cooling coil 7 refrigerant reheat coil 8 electric heater 10 temperature detector 11 indicating controller 12 sequencer

Claims (2)

基準設定温度とその上限値、下限値からなる温度制御範囲としてのレベルを複数設定したステップサーモ式温度制御において、温度検出器から制御部に印加される信号の内容から、何れかのレベルの内の1つのレベルの運転・停止信号が繰り返し送られてきたことを検出した場合に、当該レベルにおいて運転が安定していると判断し、制御部の指示調節計に当該レベルの中心の値が目標とする設定温度となるように各レベルに設定した温度制御範囲を変更せしめ、変更した各レベルに設定した温度制御範囲を基準として温度制御を行うことを特徴とする温度制御方法。In step thermo-type temperature control in which a plurality of levels as a temperature control range including a reference set temperature and its upper limit and lower limit are set , one of the levels is determined from the content of a signal applied from the temperature detector to the control unit . When it is detected that the operation / stop signal of one level has been repeatedly transmitted, it is determined that the operation is stable at the level, and the value of the center of the level is set to the target controller of the control unit. A temperature control method comprising: changing a temperature control range set for each level so that a set temperature is obtained, and performing temperature control based on the changed temperature control range set for each level . 温度制御機構と、温度調整機構とより成り、該制御機構は冷凍機に接続される冷却コイルと冷媒加熱器及び加熱器並びに送気フアンとを備え、温度調整機構は室内よりの受け入れ空気の温度検出器及び制御部とを備え、該制御部は温度検出器よりの信号を検出する指示調節計とを備え、基準設定温度とその上限値、下限値からなる温度制御範囲としてのレベルを複数設定したステップサーモ方式により上記冷却コイルと冷媒加熱器及び加熱器を選択作動し、温度検出器から制御部に印加される信号の内容から、何れかのレベルの内の1つのレベルの運転・停止信号が繰り返し送られてきたことを検出した場合に、当該レベルにおいて運転が安定していると判断し、制御部の指示調節計に当該レベルの中心の値が目標とする設定温度となるように各レベルに設定した温度制御範囲を変更せしめ、変更した各レベルに設定した温度制御範囲を基準として温度制御を行うようにしたことを特徴とする温度制御装置。The control mechanism comprises a temperature control mechanism and a temperature adjustment mechanism, the control mechanism including a cooling coil connected to the refrigerator, a refrigerant heater and a heater, and an air supply fan, and the temperature adjustment mechanism controls the temperature of the incoming air from the room. The control unit includes a detector and a control unit, and the control unit includes an indicating controller that detects a signal from the temperature detector, and sets a plurality of levels as a temperature control range including a reference set temperature and an upper limit value and a lower limit value. The cooling coil, the refrigerant heater and the heater are selectively operated by the step thermo system described above, and the operation / stop signal of one of the levels is determined from the content of the signal applied from the temperature detector to the control unit. Is detected, it is determined that the operation is stable at the level, and the controller at the control unit indicates that the center value of the level becomes the target set temperature. Allowed changing the temperature control range set for each level, the temperature control device being characterized in that to perform the temperature control based on the temperature control range that is set for each level change.
JP2001169147A 2001-06-05 2001-06-05 Temperature control method and its control device Expired - Fee Related JP3602810B2 (en)

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