JP3575925B2 - Transfer equipment with branch tracks - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a transfer facility having a branch track applied to, for example, a clean room for manufacturing semiconductors.
[0002]
[Prior art]
2. Description of the Related Art As demand for electronic devices has increased, semiconductor devices and wafers have been actively manufactured. The production of these semiconductor devices and wafers is performed in a clean room. In this clean room, track-type transfer equipment is mainly used to transfer these semiconductor devices and wafers to each process location.
[0003]
In recent years, in this type of clean room, in order to increase production efficiency with limited equipment and reduce manufacturing cost, there is an increasing demand for increasing the amount of transfer per unit time of the transfer equipment.
[0004]
Usually, in this type of transport equipment, the transport track is formed in a loop shape, and a plurality of transport vehicles run around the track. Here, since a large increase in the transport amount cannot be expected in a single loop, a branch track is appropriately provided in a main track (main track) so that the transport vehicle can pass.
[0005]
In a conventional transport facility, a shifter, a turntable, or the like is provided at a branch point of a track, and the track side is switched so that the traveling track of the transport vehicle is directed to the main side or the branch side.
[0006]
[Problems to be solved by the invention]
By the way, the conventional method of switching the track side has the following problem.
(1) Since the operation time is required to switch the track, the transport time becomes longer as a result, and the traffic of the subsequent bogie is restricted, so that the transport amount per unit time does not increase.
(2) If the transport vehicle enters a switching track on a shifter or a turntable before switching is completed, there is a possibility that a derailment accident or the like may occur.
(3) Since it is necessary to move the track side, the structure on the track side becomes complicated, the weight and size of the branch section increase, and especially when installing the track on the ceiling, construction is difficult in terms of load bearing capacity. is there.
(4) There is a possibility that dust is generated by the orbit switching operation, and a mechanism or the like for sucking the dust must be separately provided.
[0007]
The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a transport facility having a branch track that can cause a transport vehicle to travel to a branch side without switching the track side.
[0008]
[Means for Solving the Problems]
The transport equipment according to the first aspect of the present invention is a transport vehicle, a propulsion means for the transport vehicle, a main track for guiding the transport vehicle, a branch track branched from the main track, and a main track mounted on the transport vehicle. A track selection mechanism for selecting a track on which the transport vehicle should travel at a branch point of the branch track, and guiding the transport vehicle to the selected track, a main track side power supply line laid along the main track, and the branch on the surface not adjacent to one another with the main track side feed line at points and branch track section, wherein a branch track laying branch track-side power supply line along, the branch point, the main track side feeder line and the branch track side A feeder line for a branch point laid so as to overlap with the feeder line , wherein the carrier cart is capable of steering a plurality of substantially rectangular pickup coils that take out electric energy from the respective feeder lines in a non-contact manner; Running Comprising a wheel, a side wheel to support the horizontal load, each feed line, characterized in that it is arranged to cross the interior of said plurality of pick-up coils.
[0009]
In the case of this equipment, at least two pickup coils for the main track side feeder line and for the branch point feeder line are required for the pickup truck mounted on the transport vehicle. It is sufficient to use one of the two pickup coils. Also, depending on which pickup is used for the branch track electric wire, when the pickup coil for the main track side feed line is also used for the branch track electric wire, the branch point feed line is on the same side as the main track side feed line ( (The same position as viewed from the transport trolley). Therefore, the feeder line for the branch point, which needs to be provided at a position opposite to the main track side electric wire (another position when viewed from the transport trolley), and the electric wire for the branch track are provided separately. That is, it is difficult to integrate the branch point feeder line and the branch track electric wire.
[0010]
On the other hand, when the pickup coil for the feeder line for the branch point is also used for the electric wire for the branch track, the feeder line for the branch point should be provided on the same side as the feeder line for the branch point (the same position as viewed from the carriage). Become. Therefore, the feeder line for branch point and the electric wire for branch track can be integrally provided at the same position. That is, the feeder line for branch point and the electric wire for branch track can be provided continuously.
[0012]
Conveyance equipment of the invention of claim 2, in claim 1, at least the branch point, guide along the guide and the branch track along the main track magnetic body is provided, the track selection mechanism, the conveyance carriage And a magnet roller that is connected to the magnetic material guide and adheres to the magnetic material guide, and a turning mechanism that turns the magnet roller toward one of the guides.
[0014]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 shows an overall outline of a transport facility 1 according to an embodiment of the present invention. The transfer equipment 1 is provided in a clean room, and can freely transfer a cassette W containing semiconductor wafers or the like between cassette stockers (also referred to as stations) 5 provided for each process.
[0015]
The transport facility 1 has a main track 2 formed in a loop as a whole, and a branch track 3 provided corresponding to each cassette stocker 5. The branch track 3 branches off from the main track 2 and merges with the main track 3. These tracks 2 and 3 are for guiding the carrier 4 on which the cassette W is mounted, and are provided, for example, on the ceiling of a clean room.
[0016]
FIG. 2 shows the relationship between the portion where the branch track 3 is provided and the carrier 4 in detail. Each of the tracks 2 and 3 is made of aluminum and is formed in a rectangular cross section having a bottom wall 6a, left and right side walls 6b and 6c, and an upper wall 6d. It has a slit 6e along the direction.
[0017]
On the main track 2, a main track side power supply line 12 for non-contact power supply to the carrier 4 is laid along an outer side wall (opposite to the branch track 3) 6 b. A branch track side feeder line 13 is provided on the branch track 3 along the outer side wall (opposite side of the main track 2) 6c for feeding power to the carrier 4 in a non-contact manner. The branch track-side power supply line 13 extends to a branch point (also a junction) P, and is continuous with the branch point power supply line 13a at that portion. The branch point power supply line 13a is for covering a transition range between the main track side power supply line 12 and the branch track side power supply line 13. These power supply lines 12 and 13 are connected to a high-frequency power supply.
[0018]
On the other hand, the transport vehicle 4 is a self-propelled type and has a vehicle body 21 equipped with a rotary motor as a propulsion means. The vehicle body 21 travels in a state of being accommodated in the internal space of the tracks 2 and 3, and a column 27 provided on the upper portion thereof extends upward from the slit 6 e of the tracks 2 and 3. At the upper end, a loading platform 28 on which the cassette W is placed is provided.
[0019]
The vehicle body 21 is provided with a pickup coil 22 for taking out (receiving) electric energy from the main track side power supply line 12 in a non-contact manner on the right side in the traveling direction, and a branch track side power supply line 13 and a branch point supply line on the left side. A pickup coil 23 for extracting (receiving) electric energy from the electric wire 13a in a non-contact manner is provided. In addition, four traveling wheels 24 that travel on the bottom walls 6a of the tracks 2 and 3 are provided below the vehicle body 21. These traveling wheels 24 support the vertical load of the transport trolley 4, and are configured to be steerable by a steering mechanism 30 as a track selection mechanism described later. In addition, a part or all of the traveling wheels 24 are connected to a rotary motor for driving to be driving wheels. Side wheels 25 projecting in the left-right direction are provided on the front, rear, left and right of the vehicle body 21. These side wheels 25 roll on the side walls 6b and 6c of the tracks 2 and 3, and support a horizontal load (lateral load) applied to the transport vehicle 4. It should be noted that even when the driving wheels other than the traveling wheels 24 are the driving wheels, the steering method as shown in the figure can be adopted.
[0020]
In addition, the transport vehicle 4 is equipped with a travel control device (not shown), a control signal receiving device 26, a communication device 29 with a station, a collision prevention sensor (not shown), and the like.
[0021]
FIG. 3 is a bottom view of the carrier 4. An axle 38 of the traveling wheel 24 is rotatably supported in a left and right direction at a rotation fulcrum 37, and a steering mechanism 30 is provided as a mechanism for changing the direction of the axle 38. The steering mechanism 30 in this case includes a steering motor 31, a gear 32 fixed to a rotating shaft thereof, a rotating plate 33 with a gear meshing with the gear 32, and connecting the rotating plate 33 and the axle 38 to each other. And a link 34 that changes the direction of the axle 38 by the rotation of 33.
[0022]
When the transport vehicle 4 travels, a track on which the transport vehicle 4 should travel is selected immediately before the branch point P between the main track 2 and the branch track 3. By steering the traveling wheels 24 toward the selected track, the carrier 4 can be guided to the main track 2 or the branch track 3.
[0023]
For example, in the case shown in FIG. 4, the transport trolley 4 is receiving power from the main track side power supply line 12 on the left side, and when it reaches the branch point P, the steering mechanism of the traveling wheels 24 is turned to the right and the branch track 3 is started. Start entering. At this time, the pickup coil that has been receiving power comes off from the main track side feeder line 12, but the opposite pick-up coil can receive power from the branch point feeder line 13a, so that it is possible to continue running as it is. . In other words, at the branch point P, the transport vehicle 4 travels at least once by selecting a power supply line (a power supply line 13a for branch point) on the side to which the transport vehicle 4 branches. Once in the branch track, power can be received from the continuous branch track side feeder line 13 as it is.
[0024]
In this case, the branch track-side power supply line 13 may be provided on the opposite side (the same side as the main track-side power supply line 12 when viewed from the transport trolley 4), separated from the branch point power supply line 13a. In that case, the pickup coil is immediately switched to the same side as the main track 2 when entering the branch track 3.
[0025]
As described above, since the steering mechanism 30 for selecting the track is provided on the side of the carriage 4, there is no need to provide a switching mechanism on the track side, and the conventional problems can be solved.
[0026]
Next, another embodiment of the present invention will be described with reference to FIG.
In this transport facility, a guide rail 47 made of a magnetic material along the main track 2 and a guide rail 48 made of a magnetic material along the branch track 3 are provided at least near the branch point P. Each guide rail 48 is made of a strip steel plate or the like, and is provided along the outer side walls 6b and 6c. A guide roller mechanism 41 is provided at the front end of the transport vehicle 40 as a track selection mechanism. The guide roller mechanism 41 includes a magnet roller 42 that is attracted to guide rails 47 and 48, and an arm that holds the magnet roller 42 at the distal end and is connected to a shaft 44 provided on the carrier 40 so as to be swingable in the left-right direction. 43, and a driving means (not shown) for turning the arm 43 to one of the guide rails 47, 48.
[0027]
In the case of this equipment, when the guide magnet roller 42 is turned right immediately before the branch point P, when the branch point P is entered, the carrier 40 travels along the right wall by the force of the magnet. Enters the branch orbit 3.
[0028]
It is to be noted that, without using the magnet roller 42 and the guide rails 47 and 48 made of a magnetic material, guides are provided on the tracks 2 and 3 respectively, and a guide member that follows the guides on the carriage 40 and one of the guide members is provided. The same effect can be obtained by providing a turning mechanism for turning the guide.
[0029]
In addition, since the operation at the junction (a branch point when viewed from the opposite side) is different from that of the branch, there is no need to select the trajectory. However, when the traveling direction of the transport vehicle is not limited, it is desirable that the confluence point has the same configuration.
In addition, the method of applying the propulsive force to the bogie is not limited to the method of driving all or a part of the traveling wheels to function as the propulsion means as in the embodiment, and the traveling wheels are merely load supporting means. A linear induction motor that has a primary side of a linear motor on the bogie side, separate from the running wheels, and that obtains propulsion between the track side and a secondary side conductor made of, for example, an aluminum conductor. It is needless to say that a linear DC motor for obtaining a propulsive force between permanent magnets arranged alternately with NS poles on the orbit side may be provided as the propulsion means.
[0030]
【The invention's effect】
As described above, according to the first aspect of the present invention, since the track selection mechanism is mounted on the carrier, there is no need to perform switching on the track side. Therefore, the following effects are obtained.
(1) No time is required for track switching, and the transport amount per unit time is greatly increased.
(2) Since there is no switching track (for example, a track on a shifter or a turntable) and the track is continuous, there is no possibility that the transport vehicle will derail at the branch.
(3) Since it is not necessary to move the track side, the track structure is simple and light, and the cost can be reduced. In addition, since the load is reduced, the ceiling work can be performed easily, and special consideration for the withstand load is not required.
(4) Since the orbital side does not move, there is little dust generation, and it can respond to a high degree of air purification demand.
(5) Since only the scanning mechanism is provided on the traveling wheels, the structure is simple and the operation is easy.
[0031]
According to the second aspect of the present invention, since the guide member is formed as a magnet roll and is attracted to the guide rail made of a magnetic material, the structure is simple and reliable guidance can be performed.
[Brief description of the drawings]
FIG. 1 is a perspective view showing an overall outline of a transport facility according to an embodiment of the present invention.
FIG. 2 is a detailed perspective view showing an essential part of the embodiment of the present invention.
FIG. 3 is a bottom view of the transport vehicle shown in FIG. 2;
FIG. 4 is a plan view showing a relationship between the carrier and a track.
5A and 5B are diagrams illustrating a partial configuration of another embodiment of the present invention, in which FIG. 5A is a plan view illustrating a relationship between a transport vehicle and a track, and FIG. 5B is a plan view illustrating a schematic configuration of the transport vehicle. is there.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Conveying equipment 2 Main track 3 Branch track 4 Carriage 12 Main track side feeder line 13 Branch track side feeder line 13a Branch feeder line 22, 23 Pickup coil 24 Running wheel 30 Steering mechanism (track selection means)
40 transport cart 41 guide roller mechanism (track selection means)
42 magnet roller (guide member)
43 arm (turning mechanism)
P branch point

Claims (2)

A transport trolley,
Propulsion means for this transport trolley,
A main orbit for guiding the carrier and a branch orbit branched from the main orbit, and a track mounted on the carrier and to which the carrier should travel at a branch point of the main and branch orbits; A track selection mechanism that guides the transport trolley to
A main track side feeder laid along the main track, and a branch track side feeder laid along the branch track on surfaces not adjacent to the main track side feeder at the branch point and the branch track section. An electric wire, and a branch point feeder line laid at the branch point so as to overlap the main track side feeder line and the branch track side feeder line ,
The transport vehicle has a plurality of substantially rectangular pickup coils that take out electric energy from the power supply lines in a non-contact manner, a steerable traveling wheel, and side wheels that support a horizontal load,
A transfer facility having a branch track, wherein each of the power supply lines is arranged inside a cross section of the plurality of pickup coils . At least at the branch point, a guide along the main track and a guide of a magnetic material along the branch track are provided,
The said track selection mechanism is connected with the said conveyance vehicle , and comprises a magnet roller which attracts | sucks to the said magnetic body guide , and turns, and turns the said magnet roller to any one guide, The characterized by the above-mentioned. Transport equipment equipped with the branch track described in 1.

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