JP3567185B2 - Sample analyzer - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention provides a sample for irradiating a sample, for example, a metal material or a nonmetal material, or a material to be inspected such as a structure, and analyzing a sample component or the like by detecting a signal X-ray from the sample. It relates to an analyzer.
[0002]
[Prior art]
An example of this type of sample analyzer is a fluorescent X-ray device. This X-ray fluorescence apparatus irradiates a sample with X-rays generated from an X-ray gun (X-ray source), and detects X-ray fluorescence emitted from the sample by the irradiation with an X-ray detector. By measuring the wavelength of the fluorescent X-ray, the elements constituting the sample can be known. In such an apparatus, as shown in FIG. 6, the X-ray detector is installed in an inclined direction having a certain angle with respect to the X-ray irradiation axis, and the X-ray gun 2 and the X-ray detector 4 are They are located away from each other.
[0003]
On the other hand, in the above-mentioned fluorescent X-ray apparatus, X-ray photoelectron spectroscopy apparatus, etc., since it is necessary to irradiate X-rays from an X-ray gun to a minute part of a sample, research on converting X-rays into a beam with a small diameter has been conducted. New "X-ray beam converging devices" (Japanese Patent Application Laid-Open No. 62-299241) and "X-ray concentrating devices" (Japanese Patent Application Laid-Open No. 2-21992) have been proposed. This new "X-ray beam converging device" has a structure in which a large number of small-diameter pipes are formed such that one collecting surface is large and the other collecting surface is small, and the center extension line of each pipe from the other collecting surface is one point. Are converged to form a truncated cone, the one collecting surface being an X-ray incident surface, and the other collecting surface being an X-ray emitting surface. According to this X-ray beam converging device, a finer X-ray beam can be obtained with high power. Further, in the "X-ray concentration apparatus", the extension of the center line of each tube outward from one end of the tube intersects at one point, and the extension of the center line at the other end of each tube outward from the end of the tube is as described above. A number of tubes are interconnected so as to be associated with one point different from one point, the X-ray source is located at the meeting point of each tube center line extension at one end of this tube group, and each tube center line at the other end is connected. The irradiation point of the sample is positioned at the extension meeting point. Further, there has been proposed a coaxial ion beam analyzer that irradiates a sample with an ion beam and detects ions reflected from the sample with a detector arranged around an irradiation axis.
[0004]
[Problems to be solved by the invention]
As described above, when analyzing and analyzing various materials using X-rays, it is necessary to converge the X-rays to a minute point, or to obtain a secondary X-ray from the sample, that is, a signal corresponding to the component of the sample. It is required that the detection of X-rays including X (hereinafter, referred to as signal X-rays) be performed well. However, in the conventional fluorescent X-ray apparatus, since the X-ray gun and the X-ray detector are installed separately, it is difficult to simplify and downsize the apparatus. In addition, there is a problem that adjustment for adjusting the irradiation position to coincide with the detection focus position and work for setting the sample position are required, and the operability is poor and skill is required.
[0005]
As shown in FIG. 7, the intensity of the signal X-ray emitted from the sample increases as the angle θ with respect to the irradiated X-ray decreases. However, it is difficult to install the X-ray detector at a position where the angle θ is small. In addition, newly proposed “X-ray beam convergence device” and “X-ray concentration device” are technologies that can converge and irradiate X-rays to minute spots or efficiently detect X-rays generated from minute spots. Although it is a technique, there is a problem that an adjustment operation for matching the irradiation position and the X-ray detection position is required, and considerable skill is required.
An object of the present invention is to provide a sample analyzer which solves such a problem.
[0006]
[Means for Solving the Problems]
In order to solve the above-mentioned problems, a sample analyzer provided by the present invention has an X-ray generator for irradiating a sample with X-rays, and an opening on one end side of which emits X-rays from the X-ray generator. A point is set as an apex, and the light is focused along a conical direction with the X-ray irradiation axis as an axis. It is composed of a number of X-ray waveguide tubes focused along a conical direction as a core, and these are divided into two, one of which receives X-rays from an X-ray generator from the one end opening and receives the other end. An X-ray waveguide tubing for irradiating the sample by guiding it to the opening is formed, and the other end receives a signal X-ray from the sample through the other end side opening and guides it to the one end side opening. X-ray waveguide forming a waveguide thin-film body for use, and detecting a signal X-ray emitted from the signal X-ray waveguide thin-film. And an X-ray detector, in which so as to analyze the sample by the output signal from the X-ray detector. Therefore, the signal X-rays emitted from the sample are guided to the X-ray waveguide tube and irradiated, and the signal X-rays are guided to the X-ray detector. The source and the X-ray detector can be arranged coaxially, and the configuration can be simplified and downsized.
[0007]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, a sample analyzer provided by the present invention will be described with reference to an example of an analyzer using X-rays.
FIG. 1 shows a basic configuration of a sample analyzer according to the present invention. That is, in FIG. 1, reference numeral 1 denotes a sample to be analyzed, specifically, a metal material or a non-metal material, that is, any material such as cement, concrete, food, medicine, and a structure. Reference numeral 2 denotes an X-ray generator which emits and irradiates the sample 1 with X-rays, specifically an X-ray gun, and 4 denotes an X-ray detector which detects a signal X-ray from the sample.
[0008]
3D is an X-ray waveguide tube that irradiates the sample 1 with X-rays from the X-ray gun 2 and guides the signal X-rays from the sample 1 to the X-ray detector 4.
The X-ray waveguide tube 3D is an aggregate of a number of X-ray waveguide tubes 3, for example, an X-ray fiber, that is, a bundle, and is configured as follows.
That is, each X-ray waveguide tube 3 of the X-ray waveguide tube 3D is focused, but the opening at one end has the X-ray emission point 2P of the X-ray generator 2 as the apex as shown in the figure, and It is focused along the direction of a cone whose axis is the X-ray irradiation axis L. The other end is located on the axis centered on the X-ray irradiation axis L and different from the X-ray emission point 2P, specifically, one point on the sample 1 side or one point near the sample. Are focused along the direction of a cone whose axis is the vertex and whose axis is the X-ray irradiation axis on the sample.
[0009]
Moreover, this bundle is characterized in that it is divided into two parts. More specifically, in the example shown in the drawing, the image is vertically divided into two parts by a plane passing through the X-ray irradiation axis L. One side, that is, the lower side is formed as an irradiated X-ray waveguide tube 3S for guiding the irradiated X-rays from the X-ray gun 2 to the other end side opening and irradiating the sample with the X-rays.
On the other side, that is, on the upper side, a signal X-ray from the irradiation point P of the sample 1 is incident (accepted) from the other end side opening, guided to the one end side opening, and input to the X-ray detector 4. It is formed as a waveguide capillary 3U.
[0010]
Since the X-ray waveguide tube 3D is a combination of curved lines, has a lens function, and is capable of converging a large number of X-rays, the X-ray waveguide tube 3D is connected to a multi-capillary X-ray fiber lens. It can also be called. The X-ray detector 4 installed close to the opening has a certain area so that signal X-rays emitted from a large number of fiber end openings can be detected. A flat panel X-ray detector is preferred. Moreover, the positional relationship between the X-ray waveguide tube 3D and the sample 1 is such that the vertex of the cone (one point on the axis of the X-ray irradiation axis) in the convergence of the X-ray waveguide tube 3D is the irradiation point on the sample 1. Must match P. It is desirable to provide a guide mechanism that opposes the X-ray waveguide capillary 3D with respect to the sample 1 so as to have such a positional relationship.
In such a configuration, the effect is almost the same unless the solid angle of the X-ray waveguide capillary 3D (X-ray lens) is particularly large, and there is an advantage that the number of X-ray detectors 4 is reduced.
[0011]
Embodiments according to the present invention basically include the above-described embodiments. As an actual device, a probe-type device shown in FIG. 2 can be provided. That is, in the figure, reference numeral 5 denotes an X-ray shielded probe, which is configured as a housing and has an X-ray generation unit and a detection unit provided inside the housing. The internal configuration is the same as that of the embodiment shown in FIG. 1 and detailed description is omitted. However, the probe can be downsized and can be used as a portable X-ray analyzer. Further, there can be mentioned modified embodiments as shown in FIGS. In both of these modified examples, the axis at which the X-ray is emitted from the X-ray gun 2 and the X-ray irradiation axis L to the sample 1 are not coaxial and have a certain angle, or have a certain angle. It is something that can be changed to. That is, FIG. 3 shows a modification in which a fixed angle is fixed by the probe 5, and FIG. 4 shows an example in which it can be deformed by the provision of the bellows 7. FIG. 3 shows a simple form, and FIG. 4 has an advantage that it can freely cope with the inclination of the sample 1.
[0012]
A contact member 6 as the above-described guide mechanism is provided at the tip of the probe 5. Of course, the attachment of this member is not an essential condition. 1 to 4 also show a state in which X-rays are emitted from the X-ray gun 2 and signal X-rays from the sample 1 are incident on the X-ray detector 4 as in FIG. FIG. 5 shows an example of a mobile X-ray analysis apparatus for inspecting a concrete inner wall surface of a tunnel in which an object to be inspected, that is, a sample is a real object (structure). That is, the investigator OP can hold the probe 5 in one hand and directly oppose the inner wall surface, and on the other hand, carry out the investigation by hanging the power supply and control unit for the X-ray gun and the detector and the power supply control unit CD including the computer on the shoulder. it can. The power control unit CD is provided with an antenna TP so that a safety check can be performed by transmitting a measurement result to a work management office or catching information such as traffic. HD is a head-mounted display, and the analysis results can be observed in real time during work.
[0013]
The sample analyzer provided by the present invention is as described in detail above, but is not limited to the above and illustrated examples, but includes various modifications.
First, in the above and illustrated examples, a beam handled for analysis is an X-ray, and a so-called X-linear sample analyzer is used in combination with an X-ray generator, that is, an X-ray gun or an X-ray detector. May be an electron beam. In this case, a combination of an electron gun and an X-ray detector is used. Alternatively, the beam can be an ion. In this case, a combination of an ion generator (ion gun) and an X-ray detector is used. These electron beams and ions have the advantage that the beam direction can be deflected by an electromagnetic field. Further, the beam can be a laser, in which case a combination of a laser oscillator and an X-ray detector is used. Thus, the beam in the analyzer of the present invention is not limited to X-rays only. Therefore, the "X-ray generator" defined in the claims of the present invention includes the above-mentioned electron beam generator, ion generator, or laser oscillator.
[0014]
Next, in the illustrated example, the X-ray waveguide tube 3D is divided into two parts vertically in a plane passing through the X-ray irradiation axis, or the divided screen may be a curved surface (arc) instead of a plane. For example, the cross-section of the irradiated X-ray waveguide can be crescent-shaped, or the cross-section of the signal X-ray waveguide can be crescent-shaped. Moreover, the fraction does not need to pass through the center, and the cross-sectional areas of both the waveguide X-rays for irradiation and the signal X-rays do not necessarily have to be the same. In the above and illustrated examples, examples of application to a mobile type, that is, a portable type or a mobile type apparatus have been mainly described. However, the present invention is applied to a large-sized instrument such as a fluorescent X-ray apparatus installed as a research facility or an analyzer as a general-purpose instrument. By applying the present invention, it is possible to provide an analysis device which is reduced in size, weight, and simplification, and is economically excellent. In addition, the configuration shown in FIG. 3 that allows the direction of the irradiation axis to be made variable is not limited to the illustrated example, and is not limited to the illustrated example. The present invention covers all these variations.
[0015]
【The invention's effect】
Since the sample analyzer provided by the present invention has been described in detail above, the detection mechanism can be downsized and simplified, and a portable and mobile analyzer can be provided. In connection with this, in the past, it was necessary to cut the sample to a size that could be measured and set it at the sample table position of the large analyzer that had been set up, and this required work. It can be omitted and it can correspond directly to the sample on site, and the workability of analysis and analysis is dramatically improved. The X-ray gun and the X-ray detector can be arranged coaxially, so that the task of matching the irradiation position with the X-ray detection position becomes extremely easy. In addition, there is an advantage that one operator can operate the apparatus in a hand-held manner, and analysis and analysis can be easily performed. Even in the case of a large analyzer installed in a research laboratory or the like, an analyzer that can be reduced in size and weight, has excellent economic efficiency and operability, and is easy to handle is provided.
[Brief description of the drawings]
FIG. 1 is a diagram showing a basic configuration of a sample analyzer according to the present invention.
FIG. 2 is a diagram showing a modification of the sample analyzer according to the present invention.
FIG. 3 is a diagram showing a modification of the sample analyzer according to the present invention.
FIG. 4 is a diagram showing a practical configuration of a sample analyzer according to the present invention.
FIG. 5 is a diagram showing a configuration of a usage example of the sample analyzer according to the present invention.
FIG. 6 is a diagram showing the principle of X-ray analysis.
FIG. 7 is a diagram showing characteristics of a signal X-ray.
[Explanation of symbols]
1 ... Sample 2 ... X-ray gun 3 ... X-ray waveguide capillary 3D ... X-ray waveguide capillary 3S ... Irradiation X-ray waveguide capillary 3U ... Signal X-ray waveguide capillary L ... X-ray irradiation axis P ... X-ray irradiation point

Claims (1)

An X-ray generator that irradiates the sample with X-rays, and each opening on one end side has an X-ray emission point from the X-ray generator as an apex and an X-ray irradiation axis as a conical direction. A number of X-ray waveguide tubes focused along a conical direction with the other end side opening being a vertex at one point on the axis of the X-ray irradiation axis and having the X-ray irradiation axis as the axis. And these are divided into two parts, one of which is an irradiation X-ray waveguide tubing for irradiating a sample by irradiating an X-ray from an X-ray generator through the one end opening and guiding the X-ray to the other end opening. An X-ray waveguide tube for forming a signal X-ray waveguide tube for receiving a signal X-ray from a sample through the other end side opening and guiding the signal X-ray to the one end side opening; An X-ray detector for detecting a signal X-ray emitted from the line waveguide capillary, and analyzing the sample with an output signal from the X-ray detector Sample analyzing apparatus characterized by the way.

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