JP2001201467A - Sample analyzer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sample analyzer in which a detection mechanism can be made small, simple and compact. SOLUTION: The sample analyzer is provided with an X-ray gun 2, by which a sample 1 is irradiated with X-rays. The sample analyzer is provided with an X-ray waveguide capillary body 3D, composed of many X-ray waveguide capillaries 3 which are constituted, in such a way that their respective opening parts on one end use the X-ray radiation point from the X-ray gun 2 as their vertex, that they are converged along a conical direction using an X-ray irradiation axis L as their axial center, such that their respective opening parts on the other end side use one point on the axial center of the X-ray irradiation axis L as their vertex and that they are converged along the conical direction, using the X-ray irradiation axis L as their axial center and which are divided into two parts by a plane passing the X-ray irradiation axis L, in such a way that one part forms a waveguide capillary body 3S for irradiation X-rays, on which the X-rays from the X-ray gun 2 is incident so as to guided to the opening parts on the other end side and by which the sample 1 is irradiated and that the other part forms a waveguide capillary body 3U, for signal X-rays, on which the signal X-rays from the sample 1 are incident from the opening parts on the other end side so as to be guided to the opening parts on one end side. The sample analyzer is provided with an X-ray detector 4, which detects the signal X-rays radiated from the waveguide capillary body 3U for the signal X-rays. The sample 1 is analyzed on the basis of an output signal from the X-ray detector 4. Consequently, it is possible to realize a sample analyzer, in which the X-ray gun 2 and the X-ray detector 4 can be arranged on the same axis and whose constitution can be simplified and miniaturized.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for irradiating a sample, for example, a metal or nonmetal material, or a material to be inspected such as a structure, with an X-ray or the like, and detecting a signal X-ray from the sample. The present invention relates to a sample analyzer for analyzing components and the like.

[0002]

2. Description of the Related Art An example of this type of sample analyzer is a fluorescent X-ray device. This fluorescent X-ray apparatus irradiates a sample with X-rays generated from an X-ray gun (X-ray source), and detects fluorescent X-rays emitted from the sample by the irradiation with an X-ray detector. By measuring the wavelength of the fluorescent X-ray, the elements constituting the sample can be known. In such an apparatus, as shown in FIG. 6, the X-ray detector is installed in an inclined direction having a certain angle with respect to the X-ray irradiation axis, and the X-ray gun 2 and the X-ray detector 4 are arranged.
Are arranged at positions separated from each other.

On the other hand, in the above-mentioned fluorescent X-ray apparatus, X-ray photoelectron spectroscopy apparatus and the like, it is necessary to irradiate a small part of a sample with X-rays from an X-ray gun. Research has been conducted, and a new "X-ray beam converging device" (Japanese Patent Application Laid-Open No. 62-299241) and an "X-ray focusing device" (Japanese Patent Application Laid-Open No. 2-21992) have been proposed. This new “X-ray beam focusing device” is designed to combine a large number of small-diameter pipes such that one collecting surface is large and the other collecting surface is small, and the center extension line of each pipe from the other collecting surface is one point. Into a frustoconical shape, converging on
One of the collective surfaces is defined as an X-ray incident surface, and the other
It is a line emission surface. According to this X-ray beam converging device, a finer X-ray beam can be obtained with high power. Further, in the "X-ray concentration apparatus", the extension of the center line of each tube outward from one tube end intersects at one point, and the extension of the center line at the other end of each tube outward from the tube end is as described above. A number of tubes are interconnected so as to be associated with one point different from one point, the X-ray source is located at the meeting point of each tube center line extension at one end of the tube group, and each tube center line at the other end is connected. The irradiation point of the sample is positioned at the extension meeting point. Further, there has been proposed a coaxial ion beam analyzer in which an ion beam is irradiated on a sample, and ions reflected from the sample are detected by a detector arranged around an irradiation axis.

[0004]

As described above, when various materials are analyzed and analyzed using X-rays, it is necessary to converge the X-rays to minute points or to use secondary X-rays from the sample. ,
That is, X-rays containing signals corresponding to the components of the sample (hereinafter referred to as X-rays)
Signal X-rays) must be detected satisfactorily. However, in the conventional fluorescent X-ray apparatus,
Since the X-ray gun and the X-ray detector are installed separately, it is difficult to simplify and downsize the apparatus. In addition, there is a problem that adjustment for adjusting the irradiation position to coincide with the detection focus position and work for setting the sample position are required, and the operability is poor and skill is required.

As shown in FIG. 7, the intensity of the signal X-ray emitted from the sample increases as the angle θ with respect to the irradiated X-ray decreases. However, it is difficult to install the X-ray detector at a position where the angle θ is small. In addition, newly proposed “X-ray beam converging device” and “X-ray concentrating device” are technologies that can converge and irradiate X-rays to minute spots, or efficiently detect X-rays generated from minute spots. Technology,
There is a problem that an adjustment operation for matching the irradiation position and the X-ray detection position is required, and considerable skill is required. An object of the present invention is to provide a sample analyzer which solves such a problem.

[0006]

In order to solve the above-mentioned problems, a sample analyzer provided by the present invention uses X
An X-ray generator for irradiating a ray, and each one end side opening portion is focused on an X-ray emission point from the X-ray generator as a vertex, and along a conical direction with the X-ray irradiation axis as an axis, The other end side opening is composed of a large number of X-ray waveguide thin tubes focused along a conical direction with one point on the axis of the X-ray irradiation axis as the apex and the X-ray irradiation axis as the axis. Is divided into two parts,
One of them forms an irradiated X-ray waveguide tube for irradiating a sample by introducing X-rays from the X-ray generator through the one end side opening and guiding the X-rays to the other end side opening. Signal X-ray from the sample is incident from the part and guided to the one end side opening.
An X-ray waveguide forming an X-ray waveguide; and an X-ray detector detecting a signal X-ray emitted from the signal X-ray waveguide. A sample is analyzed by a signal. Therefore, the signal X-rays emitted from the sample are guided and radiated to the X-ray waveguide tube, and the signal X-rays are guided to the X-ray detector. The source and the X-ray detector can be arranged coaxially, and the configuration can be simplified and downsized.

[0007]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, a sample analyzer provided by the present invention will be described with reference to an embodiment of an analyzer using X-rays. FIG. 1 shows a basic configuration of a sample analyzer according to the present invention. That is, in FIG. 1, reference numeral 1 denotes a sample to be analyzed, specifically, a metal material or a non-metal material, that is, any material such as cement, concrete, food, and medicine, and a structure. Reference numeral 2 denotes an X-ray generator that emits and irradiates the sample 1 with X-rays, specifically an X-ray gun, and 4 denotes an X-ray detector that detects a signal X-ray from the sample.

The 3D irradiates the sample 1 with X-rays from the X-ray gun 2 and converts the signal X-rays from the sample 1 into an X-ray detector 4.
Is an X-ray waveguide tube that leads to. This X-ray waveguide tube 3D
Is an aggregate of a plurality of X-ray waveguides 3, for example, X-ray fibers, that is, a bundle, which is constructed as follows. That is, each X-ray waveguide tube 3 of this X-ray waveguide tube body 3D is focused, but one end side opening has the X-ray emission point 2P of the X-ray generator 2 as a vertex as shown in the figure, and It is focused along the direction of a cone whose axis is the X-ray irradiation axis L. And the other end side is on another axis different from the X-ray emission point 2P on the axis centered on the X-ray irradiation axis L,
Specifically, it is focused along a direction of a cone with one point on the sample 1 side or one point close to the sample as an apex and an X-ray irradiation axis on the sample as an axis.

[0009] In addition, this converged body is characterized in that it is divided into two parts. Specifically, in the example shown in the drawing, the upper and lower parts are divided into two in a plane passing through the X-ray irradiation axis L. One side, that is, the lower side is formed as an irradiated X-ray waveguide tube 3S for guiding the irradiated X-rays from the X-ray gun 2 to the other end side opening and irradiating the sample with the X-rays. On the other side, that is, on the upper side, a signal X-ray from the irradiation point P of the sample 1 is incident (accepted) from the other end side opening, guided to the one end side opening, and input to the X-ray detector 4. It is formed as a waveguide thin tube 3U.

The X-ray waveguide tube 3D is a combination of curved lines, has a lens function, is large in number, and can converge X-rays. It can also be called a fiber lens. The X-ray detector 4 installed close to the opening has a certain area so as to detect signal X-rays emitted from a large number of fiber end openings. Flat panel type X
Line detectors are preferred. Moreover, this X-ray waveguide capillary 3
The positional relationship between D and the sample 1 needs to be such that the vertex of the cone (one point on the axis of the X-ray irradiation axis) in the convergence of the X-ray waveguide capillary 3D coincides with the irradiation point P on the sample 1. It is desirable to provide a guide mechanism that opposes the X-ray waveguide capillary 3D with respect to the sample 1 so as to have such a positional relationship. In such a configuration, the X-ray waveguide capillary 3D (X-ray lens)
If the solid angle of is not particularly large, the effect is almost the same,
There is an advantage that the number of X-ray detectors 4 is reduced.

The embodiment according to the present invention basically includes the above-described embodiment. As an actual apparatus, a probe-type apparatus shown in FIG. 2 can be provided. That is, in the drawing, reference numeral 5 denotes an X-ray shielded probe, which is configured as a housing, and has an X-ray generation unit and a detection unit provided inside thereof. The internal configuration is the same as the embodiment shown in FIG.
Although detailed description is omitted, the probe can be downsized and can be used as a portable X-ray analyzer. Further, a modified embodiment as shown in FIGS. 3 and 4 can be mentioned. In these two modifications, the axis at which the X-ray is emitted from the X-ray gun 2 and the X-ray irradiation axis L to the sample 1 are not coaxial and have a certain angle, or have a certain angle. It can be changed to. That is, FIG. 3 shows a modified example in which a fixed angle is fixed by the probe 5, and FIG. 4 shows an example in which it can be deformed by providing the bellows 7. FIG. 3 shows a simple form, and FIG. 4 has an advantage that it can freely cope with the inclination of the sample 1.

At the tip of the probe 5, a contact member 6 as the above-described guide mechanism is provided. Of course, the attachment of this member is not an essential condition. 1 to 4
1 also shows a state in which X-rays are emitted from the X-ray gun 2 and signal X-rays from the sample 1 are incident on the X-ray detector 4 as in FIG. FIG. 5 shows an example of a mobile X-ray analysis apparatus for inspecting an object to be inspected, that is, a specimen (structure), specifically, a concrete inner wall surface of a tunnel. In other words, the investigator OP can hold the probe 5 in one hand and directly face the inner wall surface, and on the other hand, carry out the investigation by hanging the power supply and control unit for the X-ray gun and the detector and the power supply control unit CD including the computer on the shoulder. it can. An antenna TP is provided in the power supply control unit CD so that a safety check can be performed by transmitting a measurement result to a work management office or catching information such as traffic traffic. HD is a head mounted display, which allows the analysis results to be observed in real time during work.

The sample analyzer provided by the present invention has been described in detail above, but is not limited to the above and illustrated examples, but includes various modifications. First, in the above and illustrated examples, the beam handled for analysis is X
This is a so-called X-linear sample analyzer using a combination of an X-ray generator, that is, an X-ray gun and an X-ray detector. However, this beam can also be used as an electron beam. It is a combination of line detectors. Alternatively, the beam can be an ion. In this case, a combination of an ion generator (ion gun) and an X-ray detector is used. These electron beams and ions have the advantage that the beam direction can be deflected by an electromagnetic field. Further, the beam can be a laser, in which case a combination of a laser oscillator and an X-ray detector is used. Thus, the beam in the analyzer of the present invention is not limited to X-rays only. Therefore, the present invention defines "X
The “beam generator” includes the above-described electron beam generator, ion generator, or laser oscillator.

In the illustrated example, the X-ray waveguide tube 3D is divided into upper and lower parts by a plane passing through the X-ray irradiation axis. This division screen is not a plane but a curved surface (arc). Alternatively, for example, the cross-section of the irradiation X-ray waveguide can be crescent-shaped, or the cross-section of the signal X-ray waveguide can be crescent-shaped. In addition, the fraction does not need to pass through the center, and the cross-sectional areas of both the irradiation X-ray and the signal X-ray need not necessarily be the same. In the above and illustrated examples, examples of application to a mobile type, that is, a portable type and a mobile type are mainly described. However, the present invention is applied to a large-sized instrument such as a fluorescent X-ray apparatus installed as a research facility and an analyzer as a general-purpose instrument. By applying the present invention, it is possible to provide an analysis device which is reduced in size, weight, and simplification, and which is economically excellent. Also, there is a method other than that shown in FIG. 3 for making the direction of the irradiation axis variable.
It is not limited to the illustrated example. The present invention covers all these variations.

[0015]

The sample analyzer provided by the present invention is as described in detail above, so that the detection mechanism can be reduced in size and simplified, and a portable and mobile analyzer can be provided. In connection with this, in the past, it was necessary to cut the sample into a size that could be measured and set it at the sample table position of the large analyzer that had been set up, and this required work. It can be omitted and it can correspond directly to the sample on site, and the workability of analysis and analysis is dramatically improved. The X-ray gun and the X-ray detector can be arranged coaxially, so that the task of matching the irradiation position with the X-ray detection position becomes extremely easy. In addition, there is also an advantage that one operator can perform a hand-held operation, and analysis and analysis can be easily performed. Even in the case of a large-sized analyzer installed in a research laboratory or the like, an analyzer that can be reduced in size and weight, has excellent economy and operability, and is easy to handle is provided.

[Brief description of the drawings]

FIG. 1 is a diagram showing a basic configuration of a sample analyzer according to the present invention.

FIG. 2 is a diagram showing a modification of the sample analyzer according to the present invention.

FIG. 3 is a diagram showing a modification of the sample analyzer according to the present invention.

FIG. 4 is a diagram showing a practical configuration of a sample analyzer according to the present invention.

FIG. 5 is a diagram showing a configuration of a usage example of the sample analyzer according to the present invention.

FIG. 6 is a diagram showing the principle of X-ray analysis.

FIG. 7 is a diagram showing characteristics of a signal X-ray.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Sample 2 ... X-ray gun 3 ... X-ray waveguide capillary 3D ... X-ray waveguide capillary 3S ... Irradiation X-ray waveguide capillary 3U ... Signal X-ray waveguide capillary L ... X-ray irradiation axis P ... X-ray irradiation point

Claims (1)

[Claims] An X-ray generator for irradiating a sample with X-rays, and an opening on one end side of the X-ray generator is provided with an X-ray from the X-ray generator.
The X-ray irradiating axis is focused at a point on the axis of the X-ray irradiating axis, and is focused along a conical direction with the X-ray irradiating point as the apex and the X-ray irradiating axis as the axis. And a plurality of X-ray waveguides converged along a conical direction having an axis as the axis, and these are divided into two, one of which receives the X-rays from the X-ray generator through the one end opening and the other. A waveguide X-ray tube for irradiating the sample by guiding it to the end side opening is formed, and the other end receives a signal X-ray from the sample from the other end side opening and guides it to the one end side opening. X to form a waveguide for wire
A line waveguide tube; and an X-ray detector for detecting a signal X-ray emitted from the signal X-ray waveguide tube, and analyzing the sample with an output signal from the X-ray detector. A sample analyzer characterized by the above-mentioned.