JP3593651B2 - Sample analyzer - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention provides a sample for irradiating a sample, for example, a metal material or a nonmetal material, or a material to be inspected such as a structure, and analyzing a sample component or the like by detecting a signal X-ray from the sample. It relates to an analyzer.
[0002]
[Prior art]
An example of this type of sample analyzer is a fluorescent X-ray device. This X-ray fluorescence apparatus irradiates a sample with X-rays generated from an X-ray gun (X-ray source), and detects X-ray fluorescence emitted from the sample by the irradiation with an X-ray detector. By measuring the wavelength of the fluorescent X-ray, the elements constituting the sample can be known. In such an apparatus, as shown in FIG. 8, the X-ray detector is installed in an inclined direction having a certain angle with respect to the X-ray irradiation axis, and the X-ray gun 2 and the X-ray detector 4 They are located away from each other.
[0003]
On the other hand, in the above-mentioned fluorescent X-ray apparatus, X-ray photoelectron spectroscopy apparatus, etc., since it is necessary to irradiate X-rays from an X-ray gun to a minute part of a sample, research on converting X-rays into a beam with a small diameter has been conducted. New "X-ray beam converging devices" (Japanese Patent Application Laid-Open No. 62-299241) and "X-ray concentrating devices" (Japanese Patent Application Laid-Open No. 2-21992) have been proposed. This new "X-ray beam converging device" has a structure in which a large number of small-diameter pipes are formed such that one collecting surface is large and the other collecting surface is small, and the center extension line of each pipe from the other collecting surface is one point. Are converged to form a truncated cone, the one collecting surface being an X-ray incident surface, and the other collecting surface being an X-ray emitting surface. According to this X-ray beam converging device, a finer X-ray beam can be obtained with high power. Further, in the "X-ray concentration apparatus", the extension of the center line of each tube outward from one end of the tube intersects at one point, and the extension of the center line at the other end of each tube outward from the end of the tube is as described above. A number of tubes are interconnected so as to be associated with one point different from one point, the X-ray source is located at the meeting point of each tube center line extension at one end of this tube group, and each tube center line at the other end is connected. The irradiation point of the sample is positioned at the extension meeting point. Further, there has been proposed a coaxial ion beam analyzer that irradiates a sample with an ion beam and detects ions reflected from the sample with a detector arranged around an irradiation axis.
[0004]
[Problems to be solved by the invention]
As described above, when analyzing and analyzing various materials using X-rays, it is necessary to converge the X-rays to a minute point, or to obtain a secondary X-ray from the sample, that is, a signal corresponding to the component of the sample. It is required that the detection of X-rays including X (hereinafter, referred to as signal X-rays) be performed well. However, in the conventional fluorescent X-ray apparatus, since the X-ray gun and the X-ray detector are installed separately, it is difficult to simplify and downsize the apparatus. In addition, there is a problem that adjustment for adjusting the irradiation position to coincide with the detection focus position and work for setting the sample position are required, and the operability is poor and skill is required.
[0005]
Further, as shown in FIG. 9, the intensity of the signal X-ray emitted from the sample increases as the angle θ with respect to the irradiation X-ray decreases. However, it is difficult to install the X-ray detector at a position where the angle θ is small. In addition, newly proposed “X-ray beam convergence device” and “X-ray concentration device” are technologies that can converge and irradiate X-rays to minute spots or efficiently detect X-rays generated from minute spots. Although it is a technique, there is a problem that an adjustment operation for matching the irradiation position and the X-ray detection position is required, and considerable skill is required.
An object of the present invention is to provide a sample analyzer which solves such a problem.
[0006]
[Means for Solving the Problems]
In order to solve the above-described problems, a sample analyzer provided by the present invention has an X-ray generator that irradiates a sample with X-rays, and each one end side opening has an X-ray irradiation point of the sample as a vertex. Arranged along a conical surface, signal X-rays from the sample enter, and the other end opening emits the incident signal X-rays around an irradiation axis connecting the X-ray generator and the X-ray irradiation point. An X-ray waveguide combined with a large number of X-ray waveguides arranged to cause the X-ray, and an X-ray detector for detecting a signal X-ray emitted from the X-ray waveguide. The sample is analyzed by the output signal from the line detector. Therefore, the signal X-rays emitted from the sample are received by the X-ray waveguide tube and guided to the X-ray detector, so that the X-ray detection is performed appropriately and the X-ray source and X-ray detection are performed. Can be arranged coaxially, and the configuration can be simplified and downsized.
[0007]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, a sample analyzer provided by the present invention will be described with reference to an example of an analyzer using X-rays.
FIG. 1 is a perspective view showing an example of a basic configuration of a sample analyzer according to the present invention. That is, in FIG. 1, reference numeral 1 denotes a sample to be analyzed, specifically, a metal material or a non-metal material, that is, any material such as cement, concrete, food, medicine, and a structure. Reference numeral 2 denotes an X-ray generator for emitting and irradiating the sample 1 with X-rays, specifically, an X-ray gun. P indicates this X-ray irradiation point.
[0008]
When X-rays are irradiated, signal X-rays are generated along the conical surface having the irradiation point P as the vertex as described above. Numeral 3 denotes an X-ray waveguide tube which receives the signal X-rays at an opening on one end side thereof, and a large number thereof are arranged along the conical surface. The X-ray waveguide tube 3 is specifically composed of an X-ray fiber for guiding X-rays, and an X-ray waveguide tube body 3D is constituted by a combination of these many tubes. In the illustrated example, this X-ray waveguide thin tube 3 is thick for ease of understanding, and only two tubes are representatively shown. A large number are provided along a conical surface whose axis is the X-ray irradiation axis L. In the illustrated example, the shape is a single conical surface, but it may be arranged double along a double conical surface, or may be triple or quadruple. However, they are opened in the directions of the conical surfaces with the irradiation point P as the apex, so that the signal X-ray can be efficiently and appropriately incident. The apex angle of the conical surface is desirably small as described with reference to FIG. 9, and specifically, is preferably within a 45 ° angle.
[0009]
The other end of the X-ray waveguide tube 3D is provided with an opening for emitting the incident signal X-ray, but this opening converges on the X-ray irradiation axis L in the illustrated example. Are arranged along the conical surface. That is, it is formed as a curved tube, and thus this X-ray waveguide thin tube 3D has the function of a lens. Since there are many fibers and X-rays can be converged, this X-ray waveguide tube 3D can also be called a multi-capillary X-ray fiber lens. Reference numeral 4 denotes an X-ray detector installed in the vicinity of the opening, which is an embodiment in which one X-ray waveguide 3 is provided for each X-ray waveguide capillary 3 in the illustrated example. Since the opening on the other end side has a ring shape, it can be a single annular X-ray detector. Alternatively, one provided at the convergence position, such as an X-ray detector indicated by 4S, may be used.
Note that, as will be described later, in the present invention, it is not an essential requirement that the other end side opening of the X-ray waveguide thin tube 3D be arranged so that the emitted X-rays converge.
[0010]
With the above-described configuration, the X-ray signal generated from the sample is detected by the X-ray detector 4 and its wavelength is measured to clarify the element of the sample 1 and qualitative analysis becomes possible. Alternatively, quantitative analysis in which the amount of the contained element is known by measuring the intensity of the signal X-ray can be performed.
[0011]
In the configuration shown in FIG. 1, the X-ray detectors 4 and 4S are located behind the X-ray gun 2, but this arrangement is not limited in the present invention, and the X-ray detectors 4 and 4S are located in front of the X-ray gun. (Close to the sample side).
The embodiment shown in FIG. 2 is an example in which the X-ray waveguide thin tubes 3L are linearly arranged in a ring around the X-ray irradiation axis L. In this embodiment, the X-ray waveguide tube 3D does not have a lens function, but the X-ray gun 2 can be disposed inside the multi-capillary X-ray fiber, that is, the X-ray waveguide tube 3D, so that the size can be reduced.
[0012]
Next, in the embodiment shown in FIG. 3, the fractionation of the X-ray waveguide tube 3D is performed in a concentric circle, and the irradiation X-ray waveguide tube 3S is arranged on the inner side, and on the outer side. A signal X-ray waveguide tube 3U is arranged. The X-ray detector 4 may have an annular shape. Further, the embodiment shown in FIG. 4 shows an example in which the X-ray waveguide capillary 3D is formed in a truncated cone shape, and similarly to FIG. 3, the irradiation X-ray waveguide capillary 3S and the signal X are concentrically formed. It is fractionated into 3U of line waveguide tubing. In the embodiment shown in FIGS. 3 and 4, X-rays are emitted and incident at the opening of the X-ray waveguide tube 3D having a certain area, thereby ensuring more accurate analysis.
[0013]
FIG. 5 is different from FIG. 1 in the arrangement of the X-ray waveguide tube 3D. That is, although the X-ray waveguide tube 3 is arranged along a conical surface having the irradiation point P as the vertex, a combination thereof is shown. The conical axis of the X-ray waveguide tube 3D, which is the body, is not the same as the irradiation axis L of the X-ray gun 2. Although it has a certain angle with respect to the irradiation axis L, this inclination may be fixed or adjustable (variable). It is desirable that this angle is small, for example, within about 30 °.
Although the modifications described above have been described, the present invention is basically characterized in that the X-ray gun is located within the range of the conical surface whose apex is the irradiation point.
[0014]
Embodiments according to the present invention basically include the above-described embodiments. As an actual apparatus, a probe-type apparatus shown in FIG. 6 can be provided. That is, in the figure, reference numeral 5 denotes an X-ray shielded probe, which is configured as a housing and has an X-ray generation unit and a detection unit provided inside the housing. The internal configuration is the same as that of the embodiment shown in FIG. 2 and detailed description is omitted. However, the probe can be downsized and can be used as a portable (mobile) X-ray analyzer.
[0015]
FIG. 7 shows an example of a mobile X-ray analysis apparatus for inspecting an object to be inspected, that is, a specimen (structure), specifically, a concrete inner wall surface of a tunnel. That is, the investigator OP holds the probe 5 with one hand and directly opposes the inner wall surface, while the CD is a power supply and control unit for the X-ray gun and the detector and a power supply control unit composed of a computer, and conducts a survey by hanging on the shoulder. be able to. An antenna TP is provided in the power supply control unit CD so that a measurement result can be transmitted to a work management office (not shown) or information such as traffic traffic can be caught so that a safety investigation can be performed. Has become. HD is a head mounted display, which allows the analysis results to be observed in real time during work.
[0016]
The sample analyzer provided by the present invention is as described in detail above, but is not limited to the above and illustrated examples, but includes various modifications.
First, in the above and illustrated examples, a beam handled for analysis is an X-ray, and a so-called X-linear sample analyzer is used in combination with an X-ray generator, that is, an X-ray gun or an X-ray detector. May be an electron beam. In this case, a combination of an electron gun and an X-ray detector is used. Alternatively, an ion-type sample analyzer using a beam as an ion can be used. In this case, a combination of an ion generator (ion gun) and an X-ray detector is used. These electron beams and ions have the advantage that the beam direction can be deflected by an electromagnetic field. Further, the beam can be a laser, in which case a combination of a laser oscillator and an X-ray detector is used. Thus, the beam in the analyzer of the present invention is not limited to X-rays only. Therefore, the "X-ray generator" defined in the claims of the present invention includes the above-mentioned electron beam generator, ion generator, or laser oscillator.
[0017]
Next, in the above and illustrated examples, the example of application to a mobile type, that is, a portable type or a mobile type apparatus has been mainly described. The present invention can provide an analysis apparatus which is reduced in size, weight, and simplification, and which is economically excellent. The present invention covers all these variations.
[0018]
【The invention's effect】
Since the sample analyzer provided by the present invention has been described in detail above, the detection mechanism can be downsized and simplified, and a portable and mobile analyzer can be provided. In connection with this, in the past, it was necessary to cut the sample to a size that could be measured and set it at the sample table position of the large analyzer that had been set up, and this required work. It can be omitted and it can correspond directly to the sample on site, and the workability of analysis and analysis is dramatically improved. The X-ray gun and the X-ray detector can be arranged coaxially, so that the task of matching the irradiation position with the X-ray detection position becomes extremely easy. In addition, there is an advantage that one operator can operate the apparatus in a hand-held manner, and analysis and analysis can be easily performed. Provided is a sample analyzer that can be reduced in size and weight, has excellent economy, operability, and is easy to handle, even in the case of a large analyzer installed in a research laboratory or the like.
[Brief description of the drawings]
FIG. 1 is a diagram showing a basic configuration of a sample analyzer according to the present invention.
FIG. 2 is a diagram showing a configuration of a modified example of the sample analyzer according to the present invention.
FIG. 3 is a diagram showing a configuration of a modified example of the sample analyzer according to the present invention.
FIG. 4 is a diagram showing a configuration of a modified example of the sample analyzer according to the present invention.
FIG. 5 is a diagram showing a configuration of a modified example of the sample analyzer according to the present invention.
FIG. 6 is a diagram showing a practical configuration of a sample analyzer according to the present invention.
FIG. 7 is a diagram showing a usage example of the sample analyzer according to the present invention.
FIG. 8 is a diagram showing the principle of X-ray analysis.
FIG. 9 is a diagram showing characteristics of a signal X-ray.
[Explanation of symbols]
1 ... Sample 2 ... X-ray gun 3 ... X-ray waveguide capillary 3D ... X-ray waveguide capillary 3S ... Irradiation X-ray waveguide capillary 3U ... Signal X-ray waveguide capillary 3L ... Linear X-ray waveguide capillary 4, 4S X-ray detector 5 Probe L X-ray irradiation axis P X-ray irradiation point

Claims (1)

An X-ray generator that irradiates the sample with X-rays, and each one end side opening is arranged along a conical surface whose vertex is the X-ray irradiation point of the sample, and receives a signal X-ray from the sample. The other end side opening is an X-ray waveguide combining a large number of X-ray waveguide tubes arranged to emit an incident signal X-ray around an irradiation axis connecting the X-ray generator and the X-ray irradiation point. A wave capillary tube; and an X-ray detector for detecting a signal X-ray emitted from the X-ray waveguide capillary tube, wherein the sample is analyzed by an output signal from the X-ray detector. Sample analyzer.

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