JP3560219B2 - Processing unit construct - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a processing unit construct in which processing units for performing a series of processing on a semiconductor wafer, a glass substrate, and the like are assembled.
[0002]
[Prior art]
Many steps are required to form an integrated circuit on a semiconductor wafer or to form an element such as a TFT on a glass substrate.
For example, examples of steps for forming an excimer resist film on a substrate surface include dehydration bake, BARC (bottom anti-reflection coating) application, bake, resist pretreatment, resist application, pre-bake, exposure, and post-exposure bake. (PEB), development and post-baking steps.
[0003]
Conventionally, in order to continuously perform the above-described steps, apparatuses for performing the respective steps are arranged in a line shape in the order of the steps while being horizontally separated from each other. For this reason, the occupied area increases, and it is difficult to omit or add steps.
[0004]
Therefore, the present applicant has proposed Japanese Patent Application Laid-Open No. Hei 10-12693. As shown in FIG. 4, the content of the proposal is to configure a processing unit 100 including a pair of processing blocks 101 and a transfer robot 102 disposed between the pair of processing blocks 101. That is, the processing unit construct 200 is configured by being connected in series.
[0005]
[Problems to be solved by the invention]
According to the above-described processing unit structure, space can be saved as compared with the conventional case, and it is easy to cope with deletion and addition of a process.
However, in the above-described processing unit construct, the transfer robot 102 is disposed between the pair of processing blocks 101. Therefore, if the glass substrate falls from the transfer robot 102 of the intermediate processing unit 100, for example. However, it takes time and effort to take out the glass substrate, and particularly when the glass substrate is finely broken, it becomes extremely difficult to recover the glass substrate.
In addition, not only in the above-mentioned unexpected situation, but also in the case where periodic maintenance is performed on the transfer robot 102, since the robot is hidden between the processing blocks, it is difficult to work, and it is difficult to replace parts. is there.
[0006]
[Means for Solving the Problems]
In order to solve the above-mentioned problems, the present invention provides a processing unit by arranging a transfer robot between a pair of processing blocks, and forming a processing unit construct by connecting a plurality of the processing units. Can be pulled out independently in a direction perpendicular to the direction in which they are connected.
Here, the length of the processing unit that can be pulled out is, for example, a length that one processing block and a transfer robot are drawn out between adjacent processing units.
[0007]
With the above configuration, maintenance and the like of the transfer robot and the processing block that constitute the processing unit disposed in the middle of the processing unit structure are simplified.
[0008]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. Here, FIG. 1 is an overall perspective view of a processing unit structure according to the present invention, FIG. 2 is an overall perspective view showing a state where one of the processing units constituting the processing unit structure is pulled out, and FIG. (a) and (b) are plan views showing an example of pulling out a processing unit.
[0009]
The processing unit assembly 1 is provided on a base 2. The processing unit construct 1 is configured by connecting a plurality of (in the illustrated example, four, but not limited thereto) processing units 3 in one direction (the left-right direction in FIG. 3).
[0010]
The processing unit 3 includes a pair of processing blocks 4 and 5 and a transfer robot 6 disposed between the processing blocks 4 and 5. The processing blocks 4 and 5 are formed by stacking a plurality of processing devices 4-1 to 4-n and 5-1 to 5-n in the vertical direction. When stacked, one rectangular parallelepiped is constituted.
[0011]
Specifically, the processing block includes, for example, a rotating cup type coating device (RC), an open cup type coating device (SC), a reduced pressure dryer (VD), a cool plate (CP), a hot plate (HP), and a back surface cleaning device. (BR), an adhesion device (AD), an ultraviolet irradiation device (UV), an air processor (AP), a developing device (DEV), and a post-exposure bake device (PB).
[0012]
In order to perform a predetermined process on an object to be processed such as a semiconductor wafer or a glass substrate by the processing unit assembly 1 described above, the object to be processed is processed via an interface unit (not shown) arranged at one end of the processing unit assembly 1. The first processing unit 3 is carried into the receiving position.
Then, the transfer robot 6 of the first processing unit 3 grips the object to be processed, and any one of the processing units 4-1 to 4-n, 5 of the processing blocks 4 and 5 constituting the first processing unit 3. The object to be processed is sent to -1 to 5-n to perform a predetermined process.
Then, when the processing in the specific processing device is completed, the processed object is received by the transfer robot 6 and sent to another processing device to perform predetermined processing.
[0013]
When the processing in the first processing unit 3 is completed as described above, the processing on the second or lower downstream side is performed by the shuttle conveyor that transfers the object to be processed between the adjacent processing units 3. The object to be processed is sent to the unit 3 and predetermined processing is performed in the same manner as described above.
The location where the shuttle conveyor is provided is not particularly limited, for example, the upper end portion or the intermediate portion of the processing unit 3.
[0014]
On the other hand, rails 7 are laid on the upper surface of the base 2 in the vertical direction in FIG. 3, and the processing units 3 are engaged with the rails 7. Thus, a specific processing unit 3 can be pulled out separately from other processing units 3.
[0015]
For example, when performing maintenance or the like of the transfer robot 6 constituting the second processing unit 3, as shown in FIG. 3A, the second processing unit 3 needs to be about ／ of the entire unit length. When the transfer robot 6 is pulled out, the transfer robot 6 comes out to a position where maintenance work can be easily performed.
[0016]
As another example, the transfer robot 6 is pulled out by pulling out the second processing unit 3 by about 1/3 of the entire length and pushing out the first and / or third processing unit 3 by about 1/3 of the entire length. The maintenance can be performed from both sides or from one side, and the moving time of the processing unit 3 can be shortened and the alignment can be facilitated.
[0017]
Further, when performing maintenance or the like of the processing block 4 constituting the second processing unit 3, as shown in FIG. Pull out about three. Thereby, since both side surfaces of the processing block 4 constituting the second processing unit 3 are exposed, operations such as maintenance can be easily performed.
[0018]
In this example, the first and third processing unit 3 drawn approximately 2/3 the overall length of the unit, even when the processing block 4 side of the second processing unit 3 out press approximately 1/3 It goes without saying that it is good.
[0019]
In the illustrated example, the processing unit assembly 1 is provided on the base 2. However, when the processing unit assembly 1 is installed on the floor, the processing unit is moved to the floor. Rail 7 may be laid.
[0020]
【The invention's effect】
As described above, according to the present invention, when a transfer robot is disposed between a pair of processing blocks to form a processing unit, and when a plurality of processing units are connected to form a processing unit construct, The processing unit can be pulled out by a predetermined length independently in the direction perpendicular to the continuous direction. The object can be easily taken out of the processing unit structure.
In addition, all maintenance blocks and transfer robots can be exposed easily by simply pulling out the processing unit, so that maintenance work can be easily performed.
[Brief description of the drawings]
FIG. 1 is an overall perspective view of a processing unit structure according to the present invention. FIG. 2 is an overall perspective view showing a state in which one of processing units constituting the processing unit structure is pulled out. FIGS. 4A and 4B are plan views showing examples of pulling out processing units. FIG. 4 is an overall perspective view of a conventional processing unit assembly.
DESCRIPTION OF SYMBOLS 1 ... Processing unit construct, 2 ... Base, 3 ... Processing unit, 4, 5 ... Processing block, 6 ... Transfer robot, 4-1 to 4-n, 5-1 to 5-n ... Processing device, 7 ... rail.

Claims (1)

In a processing unit construct configured by connecting a plurality of processing units in which transfer robots are arranged between a pair of processing blocks, the processing units can be independently pulled out in a direction orthogonal to the connection direction, In a processing unit construct in which the length that can be pulled out is transferred to one processing block and the robot is drawn out between adjacent processing units, the processing unit to be drawn out is fixed to the adjacent processing unit, and the entire processing unit is fixed. By pulling out 2/3 or pulling out the processing unit to pull out 1/3 of the whole unit and pushing out the adjacent processing unit by 1/3, the transfer robot with one processing block is drawn out from between the adjacent processing units. A processing unit construct, characterized in that:

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