JP3556289B2 - Microscope photo mask slider device - Google Patents

Description

[0001]
[Industrial applications]
The present invention relates to a photographic mask slider device for inserting and removing a photographic mask at an image forming position on an optical path of a microscope.
[0002]
[Prior art]
In a microscope equipped with a photographing device that photographs a specimen image magnified by the optical system of the microscope, a photographic mask such as a glass plate or a liquid crystal plate on which a frame or a scale indicating a photographing area is drawn is focused on an optical path. May be placed in
[0003]
FIG. 8 shows a configuration of a microphotograph eyepiece disclosed in Japanese Patent Application Laid-Open No. 57-196205, in which defocus is prevented by a photographic mask. FIG. 3A shows a state where the reticle is not inserted, and FIG. 2B shows a state where the reticle is inserted. The middle frame 3 is fitted to the eyepiece frame 2 supporting the eyepiece 1 so as to be able to advance and retreat in the optical axis direction with the middle frame 3 urged toward the eyepiece by the spring 4, and the field lens 5 is supported by the middle frame 3. ing. An opening 6 is formed in the vicinity of the step of the eyepiece frame 2 with which the end face of the middle frame 3 contacts, and the tapered surface comes into contact between the opening 6 and the end face of the middle frame 3 and the step of the eyepiece frame 2. And the focusing screen frame 7 is inserted.
[0004]
Therefore, in a state where the reticle frame 7 is not inserted on the optical path, the field lens 5 is fixed at a position where the middle frame 3 is urged by the spring 4 and abuts on the step, and the reticle frame 7 is inserted on the optical path. In this state, the field lens 5 is fixed at a position separated from the eyepiece lens by a displacement due to the taper against the spring force due to the taper of the reticle frame 7. That is, the lens position is shifted by the tapered surface of the reticle frame 7 in conjunction with the insertion operation of the reticle frame 7, and the optical path length is corrected.
[0005]
FIG. 9 shows an optical arrangement of an optical microscope including an observation optical system and a photographing optical system. The luminous flux from the objective lens 10 arranged opposite to the sample is incident on an optical path switching element 11 that splits the luminous flux in a plurality of directions. The optical path switching element 11 has semi-transparent mirrors 11a and 11c and a transparent portion 11b, and can be switched by the operation knob 12. When the mirror 11a is arranged on the optical axis, the light beam is split into the film surface 13 of the photographing optical system and the observation optical system, and when the transparent portion 11b is arranged on the optical axis, the light beam enters only the observation optical system. When the mirror 11c is arranged on the optical axis, the light is branched into the film surface 14 of another photographing optical system and the observation optical system. A focusing plate 15, a dummy glass plate 16 for correcting the optical path length, and a focusing plate 17 are arranged at an image forming position on the observation optical path where light transmitted through the optical path switching element 11 is incident so as to be selectively inserted into and removed from the optical path. ing. By supporting the focusing plates 15 and 17 and the dummy glass plate 16 on the operation knob 12 via the connecting member 18, the focusing plates 15 and 17 corresponding to the movement of the optical path switching element 11 by the operation knob 12 are supported. 17, a dummy glass plate 16 is inserted into the observation optical path.
Therefore, the focus plate (photomask) and the dummy glass plate 16 can be switched at the same time as the switching of the optical path.
[0006]
[Problems to be solved by the invention]
However, since the position of the field lens 5 is shifted using the tapered surface of the reticle frame 7 in the eyepiece of the microphotograph shown in FIG. 8 described above, deterioration of optical performance due to movement of the lens is expected. You. In addition, the work of replacing the reticle frame 7 is complicated and causes a reduction in operability.
[0007]
The optical microscope shown in FIG. 9 described above has a problem that the insertion and removal of the focusing plates 15 and 17 with respect to the optical path are interlocked with the optical path switching element 11, and it is difficult to adjust the focusing plates 15 and 17 and the optical path switching element 11. is there. Further, when the focusing screens 15 and 17 are soiled, it is difficult to clean them and maintenance is difficult.
[0008]
SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and has a small deterioration in optical performance due to insertion and removal of a photographic mask, can easily replace a photographic mask, and has excellent maintainability. The purpose is to provide.
[0009]
[Means for Solving the Problems]
The present invention provides a photographic mask slider device for inserting and removing a photographic mask at an image forming position on an optical path of a microscope, a slider for holding the photographic mask, and a guide for guiding the slider to the image forming position within a microscope main body. A guide member on which a slider is detachably provided, a locking member for positioning the slider held by the guide member at a predetermined position, and a microscope body located at a position corresponding to the insertion opening of the slider of the guide member. And an operation window provided on the guide member, and the slider can be inserted into and removed from the guide member through the operation window.
[0011]
[Action]
According to the present invention, the slider holding the photographic mask is inserted into the microscope main body from the operation window from outside the microscope main body, and inserted into the image forming position of the microscope via the guide member. For example, the slider can hold the photomask and the dummy glass, and the locking member can selectively position the photomask and the dummy glass on the optical path. Since the photographic mask and the like can be replaced by the slider, the locking member, and the guide member, there is no movement of other lenses and no deterioration in optical performance. Further, since the slider holding the photomask can be easily taken out of the microscope main body, cleaning and replacement of the photomask can be easily performed.
[0013]
【Example】
Hereinafter, examples of the present invention will be described.
FIG. 1 shows an embodiment of an inverted optical microscope to which the slider device of the present invention is applied. The inverted optical microscope is provided with a stage 22 on which the specimen S is mounted on the upper surface of the microscope main body 1. An objective lens 23 is arranged in a concave portion below the stage 22. Inside the microscope main body 1, a splitting prism 24 and a reflecting prism 25 are arranged in series on the optical axis of the objective lens 23. The reflection prism 25 reflects the light transmitted through the split prism 24 in a direction parallel to the desk surface. A primary image 26 is formed on the optical axis of the light reflected by the reflection prism 25. This primary image 26 is guided to an observation unit 29 by a relay lens system 27 and a reflection prism 28. The observation section 29 includes an intermediate lens barrel 31 and an eyepiece 32 for magnifying and observing the image of the objective lens 23.
[0014]
On the other hand, an illumination unit 33 is attached to the upper surface of the microscope main body 1, and an illumination optical system that irradiates illumination light emitted from a light source 34 of the illumination unit 33 to the upper surface of the sample S is formed.
[0015]
A slider device for selectively inserting and removing a photographic mask and a dummy glass plate on an optical path is provided at a place where a primary image 26 is formed in the microscope main body 1. This slider device includes a slider receiving portion 41 shown in FIG. 2 and a slider 42 shown in FIG.
[0016]
The slider receiving portion 41 includes a receiving portion main body 43 formed of a hollow pipe having a rectangular cross section and a locking mechanism described later. The receiving portion main body 43 has one side surface cut off along the longitudinal direction with a small amount of side wall left at the upper and lower ends to form a side opening 44. The hollow portion of the receiving portion main body 43 is used as a slider sliding path. An optical path hole 45 is formed on the other side surface of the receiving portion main body 43 at a position close to one end. An opening of a predetermined size is formed on the upper surface of the receiving portion main body 43, and the base end of the leaf spring 46 is fixed to the periphery of the opening with a screw 47. A click ball 48 is fixed to the tip of the leaf spring 46 corresponding to the opening position on the upper surface of the receiving portion main body. The leaf spring 46 and the click ball 48 constitute a part of the locking mechanism. A fixing plate 49 protruding horizontally from the side surface is integrated with the lower surface of the receiving portion main body 43.
[0017]
The slider receiving portion 41 having such a structure is arranged such that the optical path hole 45 coincides with the optical axis, the longitudinal direction of the receiving portion main body 43 is orthogonal to the optical axis, and the slider insertion opening of the slider receiving portion 41 is the microscope main body 1. The fixing plate 49 is fixed to the fixing portion of the microscope main body 1 with a screw 51 so as to face the side of the microscope. The microscope main body 1 is provided with an operation window for inserting and removing the slider 42 at a position corresponding to the slider insertion opening of the slider receiving portion 41.
[0018]
The slider 42 has a quadrangular prism shape corresponding to the cross-sectional shape of the slider sliding path of the receiving part main body 43, and is inserted into the slider sliding path of the receiving part main body 43 from the slider insertion opening. On the side surface of the slider 42, an opening 52a into which a photographic mask is fitted and an opening 52b into which a dummy glass for optical path length correction is fitted are formed. Click grooves 53a and 53b are formed on the upper surface of the slider 42 so as to correspond to the openings 52a and 52b. When the click ball 48 is engaged with the click groove 53a, the opening 52a is arranged at the position of the optical path hole 45 of the slider receiving portion 41. When the click ball 48 is engaged with the click groove 53b, the opening 52b is closed. The relative positions of the openings 52a and 52b and the click grooves 53a and 53b are adjusted so as to be arranged at the position of the optical path hole 45 of the slider receiving portion 41. Further, a depression 54 is formed at an end of the slider 42 facing the insertion end as a knob when operating the slider.
[0019]
Next, the operation of the present embodiment configured as described above will be described.
The slider 42 is inserted into the main body from the side surface of the microscope main body 1, and the slider 42 is inserted into the receiving part of the slider receiving part 41 from the slider insertion opening. When the slider 42 is inserted into the slider receiving portion 41, when the opening 52 b of the slider 42 overlaps the optical path hole 45 of the slider receiving portion 41, the click ball 48 urged by the leaf spring 46 is moved to the groove 53 b of the slider 42. And the slider 42 is clicked at that position.
[0020]
In this embodiment, since a dummy glass plate is fitted into the opening 52b of the slider 42, this state is selected when observation is performed without inserting a photomask on the optical path.
[0021]
When inserting a photomask on the optical path, the slider 42 is pushed in against a locking force corresponding to the urging force of the leaf spring 46. When the force pushing the slider 42 exceeds the locking force, the slider 42 starts moving, and the locking force decreases when the click ball 48 comes off the groove 53a of the slider 42. When the slider 42 is further pressed, the click ball 48 urged by the leaf spring 46 is dropped into the groove 53a of the slider 42 when the opening 52a of the slider 42 overlaps the circular optical path hole 45 of the slider receiving portion 41. Slider 42 is clicked at that position.
[0022]
In this embodiment, since the photographic mask is fitted into the opening 52a of the slider 42, this state is a state where the photographic mask is inserted on the optical path.
When the photographic mask or the dummy glass plate becomes dirty, or when replacing the slider with a focusing plate different from the photographic mask, the slider 42 is pulled out from the slider insertion opening of the slider receiving portion 41 and faces the slider insertion opening. The slider 42 is taken out from the operation window of the microscope main body unit 1. The removed slider 42 is cleaned, or another slider is inserted into the slider insertion opening of the slider receiving portion 41 from the operation window of the microscope main body 1 and pushed to an arbitrary position.
[0023]
As described above, according to the present embodiment, the slider receiving portion 41 is installed at the primary image forming position on the optical axis of the microscope main body portion 1, and the slider receiving portion 41 is provided with the photographic mask and the dummy glass plate. Since the photomask 42 and the dummy glass plate can be selectively positioned on the optical path by the click operation of the locking mechanism, the photomask 42 can be moved by the slider 42 without moving other lenses or the like. In addition, the dummy glass plate can be replaced, and deterioration of optical performance due to movement of the lens can be prevented.
[0024]
According to the present embodiment, since the slider 42 can be inserted into and removed from the microscope main body 1, dirt adhering to the photomask and the dummy glass plate can be easily removed, and a focusing plate different from the photomask is provided. It can be easily replaced with a slider.
[0025]
Next, another embodiment of the present invention will be described.
FIG. 4 is a diagram illustrating the entire configuration of the inverted optical microscope according to the present embodiment. Parts having the same functions as those of the microscope shown in FIG. 1 are denoted by the same reference numerals.
[0026]
In this embodiment, the split prism 24 and the reflecting mirror 61 are arranged in series on the optical axis of the objective lens 23 inside the microscope main body 1. The reflecting mirror 61 reflects the light transmitted through the split prism 24 at an angle of 45 degrees with respect to the desk surface. The light reflected by the reflecting mirror 61 forms a primary image 26 on the optical axis. The primary image 26 is guided to the observation unit 29 by a relay lens system 63 supported by an integrated support member 62. A slider device 64 is attached to the tip of the support member 62 at the position where the primary image 26 is formed.
[0027]
The slider device 64 includes a slider receiving portion 65 shown in FIG. 5, a slider 66 shown in FIGS. 6 and 7, and the like. FIG. 5A is a perspective view showing a state in which the support member is removed from the slider receiving portion, and FIG. 5B is a plan view showing the slider receiving portion partially cut away and viewed from the relay lens system side.
[0028]
In the slider receiving portion 65, both sides on the long side of the rectangular receiving portion main body 71 are L-shaped in the same direction, and a guide for the slider 66 is formed. A base end of a leaf spring 73 is fixed to the upper surface of the slider receiving portion 65 with a screw 74, and a click ball 75 is fixed to a tip end thereof. An opening for projecting the click ball 75 toward the guide side is formed at a position on the upper surface of the receiving portion main body 71 where the click ball 75 faces. Further, a plate-shaped elastic body 76 having an L-shaped distal end portion 76a is fixed with a screw on the upper surface of the receiving portion main body 71 and closer to the slider insertion port than the leaf spring 73.
[0029]
The receiving portion main body 71 is integrally formed with a convex portion 71a on the back surface opposite to the surface on which the slider guide 66 is formed, into which the distal end portion of the cylindrical support member 62 fits. The protrusion 71a has a fitting hole 71b into which the tip of the support member 62 is inserted without any gap, and is formed concentrically with the optical path hole 72. An abutment surface 71c is formed at the tip of the fitting hole 71b and the center thereof is formed. An optical path hole 72 appears in the portion. A V-shaped groove 62a is formed on the outer periphery of the distal end of the support member 62 inserted into the fitting hole 71b. On the other hand, on the left and right side surfaces of the convex portion 71a, two positions on one side and one position on the opposite side are located at positions where the distance from the abutting surface 71c is slightly shorter than the distance between the end surface of the support member 62 and the center of the V-groove. A set screw hole 71d is formed. The three setscrew holes 71d are screwed with set screws 71e each having a tip formed in a 90-degree conical shape, and each tip is pressed by the V groove 62a of the support member 62. The set screw 71e inserted from the two set screw holes 71d on one side is abutted against the support member 62 at a vertically symmetrical position across the center thereof, and is inserted from the set screw hole 71d on the opposite side. The set screw 71e is abutted against the center of the support member 62.
[0030]
When the slider 66 is positioned by the click ball 75 as shown in FIG. 6 (the photographic mask or the dummy glass plate is fixed on the optical path at the same time), a slight gap is formed in the upper right corner of the slider 66 as shown in FIG. Has been adjusted to empty. The force of the elastic body 76 is set to be about twice as large as that of the leaf spring 73.
[0031]
A stopper pin 77 is attached to a side surface on the insertion end side of the receiving portion main body 71. The stopper pin 77 is adjusted so as to leave a slight gap with the left end face of the slider 66 when the opening 82b of the slider 66 is positioned on the optical path by the click ball 75.
[0032]
On the other hand, the slider 66 includes a slider main body 81 processed into a shape that can slide the guide of the slider receiving portion 65. The slider body 81 has two openings formed therein. For example, a photographic mask is fitted into one opening 82a, and a dummy glass plate is fitted into the other opening 82b. Grooves 83a, 83b are formed corresponding to the openings 82a, 82b. The length of the slider 66 in the moving direction is such that when the opening 82a is aligned with the optical path hole 72, the end opposite to the insertion end of the slider 66 is slightly spaced from the distal end 76a of the elastic body 76 at the upper right corner. Is set to be empty.
[0033]
One end of a knob shaft 84 is fixed to one end of the slider body 81. The other end of the knob shaft 84 is provided with a knob 85 that protrudes outside the microscope main body. A dustproof washer 86 for dustproofing the microscope main body 21 and a lid 87 made of a magnetic material such as iron and showing a display or the like are provided coaxially with the knob shaft 84 on the knob shaft 84.
[0034]
On the outer surface of the microscope main body 21, a recess 91 having a diameter larger than that of the slider insertion port of the slider sliding portion is formed at a position corresponding to the slider insertion port of the slider receiving portion 65. An operation window 92 penetrating into the main body is formed in a region of the recess 91 corresponding to the slider insertion opening. The positional relationship between the two is set so that the slider insertion port of the slider receiving portion 65 faces the operation window 92 from the inside of the main body.
[0035]
A slider guide 93 having an oblong shape 93 a corresponding to the operation window 92 is fitted into the recess 91. A plate-shaped magnet 94 having an opening 94 a having a shape corresponding to the ellipse 93 a is attached to the slider guide 93. Note that the opening 94a is machined into a shape whose central portion matches the outer shape of the dustproof washer 86.
[0036]
The microscope main body 21 is provided with a round hole 95 large enough to insert the receiving part main body 71 on both sides on the eyepiece side of the mounting position of the slider device 64. The width of the microscope main body in the portion having the round hole is slightly wider than the width of the slider device 64.
[0037]
Here, the assembly order according to the present embodiment will be described.
First, the intermediate lens barrel 31 is inserted into the microscope main body 21 along the optical axis. Next, the slider receiving portion 65 is inserted through the round hole 95 of the microscope main body 21.
[0038]
Next, the support member 62 at the tip of the intermediate lens barrel 31 is inserted into the fitting hole 71b of the receiving portion main body 71. With the end surface of the support member 62 abutting against the abutment surface 71c of the fitting hole 71b, set screws 71e are screwed into three set screw holes 71d to fix the support member 62 and the receiving portion main body 71. At this time, since the set screw hole 71d and the support member 62 are in the above-described positional relationship, just by tightening the set screw 71e, the tip bites into the V-groove 62a, and the support member 62 is brought into contact with the receiving body 71. 71c. Therefore, the support member 62 and the receiving portion main body 71 are always fixed in the same positional relationship.
[0039]
Next, the integrated body of the intermediate lens barrel 31 and the slider receiving portion 65 is further inserted along the optical axis, and fixed to the microscope main body 21 at a predetermined position. A cover plate (not shown) is attached to the round hole 95 into which the slider receiving portion 65 is inserted to prevent outside light and dust from entering.
[0040]
Next, the operation of the present embodiment configured as described above will be described.
When the slider main body 81 of the slider 66 is inserted from the operation window 92 of the microscope main body 21, the slider main body 81 is inserted into the slider insertion opening of the slider receiving portion 65 which is continuous from the operation window 92. At this time, since the distal end portion 76 a of the elastic body 76 is hung on the slider insertion opening of the receiving portion main body 71, a force is required to push the distal end portion 76 a upward with the distal end of the slider main body 81.
[0041]
When the slider 66 is pushed in from the outside of the microscope main body 21 via the knob 85 and the knob shaft 84 against the force of the elastic body 76, the slider main body 81 moves on the slider sliding path, and the opening 82a becomes the slider receiving portion 65. When the click ball 75 falls into the click groove 83a corresponding to the opening 82a when the light path hole 72 coincides with the optical path hole 72, the slider 66 is fixed at that position. At this time, the distal end portion 76a of the elastic body 76 pushed up by the slider main body 81 changes to a state in which a slight gap is formed with respect to the end surface of the slider main body 81.
[0042]
In this embodiment, since the photomask is fitted into the opening 82a, the photomask is inserted at the position where the primary image is formed.
When the slider 66 is inserted, the magnet 94 on the main body side and the lid 87 are magnetically joined via the dustproof washer 86, so that the dustproof washer 86 is securely attached to the operation window 23.
[0043]
When replacing the photographic mask with a dummy glass plate, the knob 85 is further pushed in from the outside of the microscope main body 21. When the slider 66 is pushed in, only the pressing force of the click ball 75 urged by the leaf spring 73 is applied. When the slider body 81 moves on the slider sliding path, and the opening 82b coincides with the optical path hole 72 of the slider receiving portion 65, the click ball 75 falls into the click groove 83b corresponding to the opening 82b, so that the slider 66 is moved. Fixed in position. In this state, the dummy glass plate has been inserted into the primary image forming position.
[0044]
When the slider 66 is operated in a further pushing direction, the insertion end surface of the slider 66 comes into contact with the stopper pin 77, and the insertion in the same direction is restricted. On the other hand, when removing the slider 66 from the microscope main body for removing dirt attached to a photographic mask or replacing the slider itself, the knob 85 is pulled against the force of the elastic body 76. When the end surface of the slider 66 reaches the side surface of the microscope main body 21, it hits the dustproof washer 86. By pulling the knob 85 with a force greater than the magnetic force between the magnet 94 and the lid 87, the connection between the magnet 94 and the lid 87 is released, and the slider 66 is taken out of the operation window 93a of the slider guide 93.
[0045]
As described above, according to the present embodiment, the slider 66 inserted into the slider receiving portion 65 provided at the primary image forming position of the optical system is provided to the outside of the microscope main body 21 via the knob shaft 84 via the knob shaft 84. Since the slider 85 is provided, the slider 66 can be operated from the outside of the microscope main body 21, the photographic mask and the dummy glass plate can be switched without moving the lens, and deterioration of optical performance can be prevented. .
[0046]
According to the present embodiment, since the elastic body 76 is provided in addition to the click mechanism for positioning the slider 66, the amount of force when replacing the photographic mask and the dummy glass plate is different from the amount of force when replacing the slider. Thus, the operation of switching the mask and the operation of exchanging the slider can be distinguished by the sense of the hand, and a reliable operation can be performed.
[0047]
According to the present embodiment, the relay lens system 63 is held by the support member 62 integral with the intermediate lens barrel 31, and the distal end of the support member 62 is inserted into the fitting hole 71 b of the slider receiving portion 65 to form the V-groove. Since both are fixed by fitting, the fixing between the intermediate lens barrel 31 and the slider receiving portion 65 can be uniquely determined without position adjustment. Therefore, by adjusting the optical path hole 72, the slider insertion portion, and the leaf spring 73 with reference to the fitting hole of the receiving portion main body 71, the positional relationship when the slider device 64 is assembled to the microscope main body 21 is determined. 63, and further, the optical accuracy and the assemblability of the entire microscope optical system can be improved. Further, since the support member 62 of the relay lens system 63 is optically adjusted and fixed to the microscope main body 21, there is an advantage that the optical accuracy of the photographic mask with respect to the entire optical system is easily obtained.
[0048]
According to this embodiment, a dust-proof washer 86 coaxially provided with the knob shaft 84 attached to the slider 66 can provide a dust-proof effect to the microscope main body 21, and the lid can be closed with the dust-proof washer 86 by a magnet. Therefore, there is no problem that impairs operability.
[0049]
In the above description, an example in which the invention is applied to an inverted optical microscope has been described, but the invention can be applied to an upright microscope.
The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit of the present invention.
[0050]
【The invention's effect】
As described above in detail, according to the present invention, it is possible to provide a photographic mask slider device of a microscope which has little deterioration in optical performance due to insertion / removal of a photographic mask, can easily replace a photographic mask, and has excellent maintainability.
[Brief description of the drawings]
FIG. 1 is an overall configuration diagram of an inverted optical microscope according to one embodiment of the present invention.
FIG. 2 is a perspective view of a slider receiving portion provided in the inverted optical microscope of FIG.
FIG. 3 is a perspective view of a slider provided in the inverted optical microscope of FIG.
FIG. 4 is an overall configuration diagram of an inverted optical microscope according to another embodiment of the present invention.
5 is a perspective view and a plan view of a slider receiving portion provided in the inverted optical microscope of FIG.
FIG. 6 is a side view showing a state where a slider is inserted into a slider receiving portion provided in the inverted optical microscope of FIG. 4;
FIG. 7 is a diagram showing a relationship between a microscope main body and a slider in the inverted optical microscope in FIG.
FIG. 8 is a configuration diagram of a conventional microscope eyepiece.
FIG. 9 is a configuration diagram of a conventional microscope having a photographing function.
[Explanation of symbols]
Reference numeral 21: microscope body, 23: objective lens, 26: primary image, 27, 62: relay lens system, 29: observation unit, 40, 64: slider device, 41, 65: slider receiver, 42, 65: slider 45, 72: optical path hole, 46, 73: leaf spring, 48, 75: click ball, 76: elastic body, 84: knob, 85: knob, 86: dustproof washer, 93: slider guide.

Claims (3)

In a photographic mask slider device for inserting and removing a photographic mask at an image forming position on an optical path of a microscope,
A slider for holding the photomask,
A guide member that guides the slider to the image forming position in the microscope body and that is detachably provided with the slider;
A locking member for positioning the slider held by the guide member at a predetermined position,
An operation window provided in the microscope main body at a position corresponding to the insertion opening of the slider of the guide member,
A photographic mask slider device for a microscope, wherein the slider can be inserted into and removed from the guide member through the operation window. 2. The apparatus according to claim 1, further comprising a second locking member that exerts, on the slider, a different drag force from the locking member when the slider is inserted into and removed from the guide member. 3. The photographic mask slider device of the microscope according to the above. 2. The microscope according to claim 1, further comprising a magnet provided near the operation window provided on the microscope main body, and a lid provided on the slider and adsorbing the magnet. Photo mask slider device.

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