JP3551174B2 - Moving stage using electromechanical transducer - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a movement that drives a moving table using a linear actuator.stageMovement, which is preferably used for a camera shake correction device or the like.stageAbout.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, a camera shake correction apparatus has been disclosed in which an image sensor is attached to a lens barrel so as to be movable in two axial directions, and the image sensor is moved in accordance with swing of an optical system due to camera shake. The image stabilizing device includes a moving device using a linear actuator to move the image sensor, and the image sensor is fixed to a moving table that moves linearly along the linear actuator.
[0003]
The moving device generally includes a piezoelectric actuator in which a drive shaft is fixed to one end in the expansion and contraction direction of the piezoelectric element and a weight is fixed to the other end. Then, in order to allow the drive shaft to vibrate in the axial direction, the piezoelectric actuator is elastically fixed to the fixing plate. By applying an asymmetrical drive pulse to the piezoelectric element, the drive shaft vibrates, and the moving table, which is frictionally coupled, moves along the drive shaft overcoming the static frictional force with the drive shaft.
[0004]
As described above, the moving table can move in the direction along the drive shaft, but cannot move in the direction perpendicular to the drive shaft. Here, when an impact is applied to the moving device, an external force may act in a direction perpendicular to the drive shaft of the piezoelectric actuator, which may cause breakage, breakage, or malfunction of the piezoelectric actuator. For this reason, a means for providing a guide shaft or the like on the moving table to protect the piezoelectric actuator and prevent destruction by an external force is taken.
[0005]
However, when such a member is attached to a moving device, the moving device becomes large, and, as a result, the entire equipment on which the moving device is mounted becomes large.
[0006]
[Problems to be solved by the invention]
[0007]
Therefore, a technical problem to be solved by the present invention is to provide a moving device capable of preventing destruction, breakage, and malfunction due to impact without increasing the size.
[0008]
[Means for Solving the Problems and Functions / Effects]
The present invention provides a mobile device having the following configuration in order to solve the above technical problem.
[0009]
According to a first aspect of the present invention, there is provided an electromechanical transducer, and a drive shaft fixed to one end of the electromechanical transducer in the expansion and contraction direction.FirstA linear actuator,
At leastFirstA support arm for supporting the drive shaft of the linear actuator,FirstA fixed table for fixing the linear actuator,
A moving table that is arranged to face the fixed table and that can be translated relative to the fixed table;,ToOn the moving stage equipped,
The moving table,
A second linear actuator including an electromechanical transducer and a drive shaft fixed to one end of the electromechanical transducer in the expansion and contraction direction;
The first linear actuator is constituted by a plate-like body having an opening at a central portion, and a surface thereof has a first contact portion frictionally engaged with the drive shaft of the first linear actuator, and a drive shaft of the second linear actuator. A first slider having a second contact portion that frictionally engages;
A second slider fixed to the side of the first linear actuator in a direction orthogonal to the first linear actuator and accommodated in an opening of the first slider;
The support arm and the1st sliderHas fitting means for fitting each other, and the fitting means1st sliderIsOf the second linear actuatorDrive shaftExtension ofCharacterized by blocking movement in the directionProvide a moving stage.
[0010]
In the above configuration, the moving device includes the linear actuator, the fixed table, and the moving table. The fixed table and the moving table are arranged to face each other, and the moving table slides relative to the fixed table along the drive axis of the linear actuator. The fixed table is a member for fixing the linear actuator, and includes a support arm for that purpose.
[0011]
The support arm and the moving table are provided with fitting means for fitting each other. The fitting means allows the moving table to move in the drive shaft direction and prevents the moving table from moving in the direction perpendicular to the drive shaft. It is required that the moving table does not hinder the sliding of the moving table in the drive axis direction.
[0012]
According to the above configuration, since the fixed table and the movable table are fitted by the fitting means provided on the support arm and the movable table, when an impact is applied in a direction perpendicular to the drive shaft, the fitting means is used. The impact is absorbed and the movement of the moving table is restricted. Further, since the fitting means is provided so as to fit the support arm and the moving table, the size of the apparatus can be reduced.
[0013]
The moving device of the present invention can be specifically configured in various modes as described below.
[0014]
According to a second aspect of the present invention, the fitting means includes: a projection provided on the support arm;1st sliderProvided in the aboveOf the first linear actuatorThe first aspect, wherein the elongated hole extends in the drive shaft direction.Provide a moving stage.
[0015]
In the above configuration, the fitting means is constituted by a projection provided on the support arm and an elongated hole provided on the moving table. Here, the elongated hole is configured to be long in the drive axis direction so as to enable movement of the moving table along the drive axis. Further, it is preferable that the length is equal to or longer than the moving amount of the moving table. According to the above configuration, the fitting means can be configured with a simple configuration.
[0016]
According to a third aspect of the present invention, the fitting means comprises:1st sliderFixed tableOpposing surfaceProvided in andThe first linear actuatorA belt-shaped protrusion extending in the drive shaft direction, and a fork provided on the support arm and fitted to sandwich the band-shaped protrusion.Moving stageI will provide a.
[0017]
In the above configuration, the fitting means includes a band-shaped protrusion provided on the fixed table opposing surface of the movable table, and a fork fixed to a support arm configured to sandwich the band-shaped protrusion. Since the belt-shaped protrusion extends in the drive shaft direction, the fork portion can change its position in the drive shaft direction so as to sandwich it, thereby achieving sliding of the moving table. can do. According to the above configuration, the fitting means can be configured with a simple configuration.
[0018]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, an embodiment of a camera shake correction device using the moving device of the present invention will be described with reference to the drawings.
[0019]
The camera shake correction device is mounted on a digital camera 1 and used as shown in FIG. The digital camera 1 includes a camera body 2 and a lens barrel 3 which is an optical system including a lens 4 and the like. The camera shake correction device 10 is attached to an end of the lens barrel 3. As will be described later, the image stabilizing apparatus 10 is provided with an image sensor such as a CCD. Then, as shown by an arrow 5 in FIG. 1, when the digital camera 1 is shaken during photographing and the optical axis L incident on the lens barrel 3 is shifted, the image sensor is moved as shown by an arrow 6 to Correct axis misalignment.
[0020]
FIG. 2 is an exploded perspective view of the camera shake correction apparatus. FIG. 3 is a cross-sectional view of the camera shake correction apparatus of FIG. 2 cut along a II section. FIG. 4 is a cross-sectional view of the camera shake correction apparatus of FIG. 2 taken along the line II-II. The camera shake correction apparatus 10 includes a base plate 12 serving as a base, a first slider 14 that moves in a horizontal direction (hereinafter, referred to as an X-axis direction) with respect to the base plate 12, and a moving direction of the first slider. And a second slider that moves in the vertical direction (hereinafter, referred to as a Y-axis direction) with respect to the second slider, and an imaging element 16 fixed to the second slider.
[0021]
As shown in FIGS. 3 and 4, the base plate 12 is fixed to the lens barrel 3 by adjusting the position (tilt and lens back) with respect to the lens barrel 3, and is fixed to the lens barrel 3 by a screw 98 and a spring 100. The distance to the device can be adjusted. The base plate 12 is composed of an annular metal frame 19 that is orthogonal to the direction of the optical path (hereinafter, described as the Z-axis direction) and has a large hole 20 at the center.
[0022]
From the base plate 12, various arms (press spring hooks 21, substrate holding arms 22, lifting prevention locking claws 24, positioning arms 31, rod support arms 36) described later extend in the optical axis direction (Z-axis direction). . A first linear actuator 28 having a configuration in which a piezoelectric element 32 is sandwiched between a vibration transmission rod 34 and a weight 30 is fixed to the metal frame 19 in the X-axis direction.
[0023]
The first linear actuator 28 has the tip and the end (the piezoelectric element 32 side) of the vibration transmission rod 34 fitted to two rod support arms provided on the base plate, and the weight 30 on the positioning arm 31 of the base plate 12. Are abutted, the two fitting points with the rod support arm 36 and the weight 30 are adhered to the base plate 12. Adhesion between the rod support arm 30 and the vibration transmission rod 34 is made of an adhesive such as a silicone adhesive which remains elastic even after being hardened. Adhesion between the positioning arm 31 and the weight 30 is made of a soft rubber or silicone. A contained adhesive is preferably used.
[0024]
The two rod support arms 36 of the base plate 12 are provided with protrusions 38 extending on the upper surface thereof in the Z-axis direction. The protrusion 38 is fitted into the movement restriction hole 79 of the first slider 14 during assembly, as described later.
[0025]
The first slider 14 is located on the image plane side with respect to the base plate 12 in the optical axis direction (Z-axis direction), and is made of aluminum having an opening 68 for accommodating the second slider 13 in substantially the same plane. Is formed by an annular frame 66. The first slider 14 includes a first rod contact portion 74 that contacts the vibration transmission rod 34 of the actuator 28 fixed to the base plate 12 and a vibration transmission rod 60 of an actuator 56 fixed to a second slider described later. A pressing spring hook 72 for locking the pressing spring 70 between the second rod abutting portion 76 to be in contact with the pressing spring hook 26 of the base plate 12 and a movement restriction hole 79 are provided.
[0026]
As shown in FIG. 4, the first slider 14 is biased toward the base plate 12 by a pressing spring 70 provided on a pressing spring hook 72 provided on the base plate 12 and the first slider 14 at the time of assembly. The rotation of the first slider 14 around the vibration transmission rod 34 is prevented.
[0027]
The first rod contact portion is provided with a groove having a V-shaped cross section (see FIG. 3), and the vibration is transmitted using the cap 40 in a state where the groove is in contact with the vibration transmission rod 34 of the actuator 28. By sandwiching the rod 34, the rod 34 is slidably and frictionally coupled along the vibration transmission rod 34. A holding spring 42 is used for fixing the first rod contact portion and the cap 40. FIG. 5 shows a structural diagram of the first actuator 28 in which the first slider 14 is frictionally engaged. As described above, the actuator 28 has a configuration in which the piezoelectric element 32 is sandwiched between the vibration transmission rod 34 and the weight 30, and is fitted to the rod supporting arm 36 and the positioning arm 31 of the base plate 12 to fix the fitting play. Are fixed with an adhesive 33.
[0028]
As a modified example of fixing between the actuator 28 and the base plate 12, a plate spring as shown in FIG. 6 can be used. That is, the leaf spring 35 bent into an L-shape is fixed on the base plate 12 so as to be located at the tip of the vibration transmission rod 34, and the pointed tip 39 attached to the leaf spring 35 has the tip of the vibration transmission rod 34. To pierce. The leaf spring always urges the vibration transmitting rod 34 toward the piezoelectric element by elastic force, thereby preventing the fitting of the rod 34 and preventing the rod 34 from vibrating due to the elastic force during vibration. You can do it.
[0029]
The first slider 14 is disposed on the vibration transmission rod 34 of the actuator 28 as described above. The first slider 14 frictionally couples the vibration transmission rod 34 between the first rod contact portion 74 and the cap 40. The holding spring 42 is used to fix the first rod contact portion 74 to the cap 40. One end of the cap 40 is locked to the first rod contact portion 74, the center portion contacts the vibration transmission rod 34, and the other end is pulled by the holding spring 42. The contact pressure between the cap 40 and the vibration transmission rod 34 is about twice as large as the holding spring 42 used. The holding spring 42 has an oval shape, and both ends come to the center of one linear portion. The sandwiching spring 42 fixes the both ends so as to bridge the end portion and the center of the straight portion between the hook of the cap 40 and the spring hook of the first rod contact portion 74 of the first slider.
[0030]
The movement restricting hole 79 is loosely fitted with the protrusion 38 provided on the upper surface of the rod support arm 36 of the base plate 12 described above. The movement restricting hole 79 is a long hole extending in the moving direction of the first slider 14 by the movable width of the first slider 14, that is, in the extending direction (X-axis direction) of the vibration transmission rod 34. The first slider 14 is fitted to the projection 38 on the upper surface of the support arm 36 to prevent the first slider 14 from moving (falling) in the short side direction (Y-axis direction) of the movement restriction hole.
[0031]
FIG. 7 shows a modification of the fitting between the rod supporting arm and the first slider. In this modification, a band-shaped projection 77 extending in the moving direction of the first slider, that is, the extending direction of the vibration transmission rod 34 (X-axis direction) is provided on the surface of the first slider 14 facing the base plate. . The rod support arm 36 is provided with a fork portion comprising a concave portion 39 provided between the projecting portions 38 so as to sandwich the projecting portions 38 provided at both ends of the upper surface thereof and the band-shaped projecting portion 77 of the first slider. . When the first rod contact portion 74 of the first slider 14 is frictionally coupled to the vibration transmitting rod 34 by the cap 40, the recess 39 of the fork portion is arranged to fit into the band-shaped projection 77 of the first slider 14. Is done.
[0032]
The second slider 13 is a resin box having an opening 48 in the bottom wall 44, and holds the imaging element 16, the heat radiating plate 18, the low-pass filter 17, and the second actuator 56. The heat radiating plate 18 is in contact with the back side of the imaging element 16 on which the imaging surface is not provided, and covers the space defined by the peripheral wall 46 of the second slider, and the screws 62 penetrating the screw holes 64 are used. Fixed to the second slider. As shown in FIGS. 3 and 4, a first substrate 80 is provided on the rear surface of the heat sink, and is connected to the image sensor 16. On the back side of the first substrate 80, an infrared LED 94 for detecting the position of the second slider and a part of the output circuit 81 of the image sensor are mounted as shown in FIGS.
[0033]
The low-pass filter 17 is closely attached so as to cover the effective imaging surface of the imaging device, and is fitted into the opening 48 of the second slider. At this time, the image sensor 16 is pressed by a close contact spring disposed around the opening 48 so that the back surface of the image sensor 16 is in close contact with the heat sink 18.
[0034]
The second actuator 56 held by the second slider 13 is adhesively held by a rod support arm 50 provided on the side of the peripheral wall. The tip and the end (the piezoelectric element 59 side) of the vibration transmission rod 60 were fitted to the two rod supporting arms of the second slider 13, respectively, and the weight 58 was also brought into contact with the positioning surface 57 of the second slider. In this state, the two fitting portions and the weight 58 are bonded to the second slider 13. Similar to the bonding of the first actuator described above, the bonding of the vibration transmitting rod 60 is performed by bonding an adhesive such as a silicone adhesive that remains elastic after being cured, and the bonding of the weight 58 is performed by using a soft rubber or silicon-containing material. Is preferably used.
[0035]
The second actuator 56 of the second slider is sandwiched between the second rod contact portion 76 of the first slider 13 and the cap 75, and the first slider 14 is frictionally coupled to the second slider 13. A holding spring 78 is used to fix the second rod contact portion 76 and the cap. One end of the cap is locked to the second rod contact portion 76, the center portion contacts the vibration transmission rod 60, and the other end is pulled by the holding spring 78. The contact pressure between the cap and the vibration transmission rod 60 is about twice as large as the holding spring 78 used. The holding spring 78 has an oval shape like the one used for the first actuator, and both ends come to the center of one linear portion. The sandwiching spring 78 fixes both ends of the straight portion between the hook of the cap and the spring hook of the second rod contact portion 76 of the first slider so as to span the center between the ends.
[0036]
The direction reference plate 54 attached to the opposing peripheral wall 44 of the second actuator of the second slider is provided with a concave hard ball receiver 52 for holding the hard ball 15 on the front and back thereof, and the hard ball 15 is loosely fitted in the hard ball receiver 52. In this state, the first slider 14 and the base plate 12 are fixed so as to be sandwiched by the rigid balls 15 therebetween. As described above, the pressing spring 70 is hung between the first slider 14 and the base plate 12, so that the second slider 13 is prevented from rotating around the vibration transmission rod 60 of the second actuator.
[0037]
When the base plate 12 and the first slider 14 are assembled, the first slider 14 is arranged so as to fit within a region surrounded by the four substrate holding arms 22 provided on the base plate 12, and in order to prevent floating, , And is locked by the floating prevention locking claw 24. On the other hand, the second slider 13 is incorporated into the first slider 14 so that the box portion of the second slider 13 fits into the opening 68 of the first slider 14. The second slider 13 is integrally formed so as to hang from the first slider 14. Be composed. As described above, the first slider 14 is slidable in the X-axis direction along the first actuator. At this time, the second slider 13 moves integrally with the movement of the first slider 14, and The imaging element 16 fixed to the slider 13 also moves in the X-axis direction. On the other hand, the second slider 13 is movable in the Y-axis direction independently of the first slider 14, and since the first slider is fixed to the base plate 12, , Y-axis direction. Therefore, the imaging element 16 fixed to the second slider 13 also moves in the Y-axis direction.
[0038]
The second substrate 82 is fixed to the substrate holding arm 22 of the base plate 12 with the first and second sliders 14 and 13 incorporated therein. Since the first substrate 80 is fixed to the second slider 13 as described above, the movement of the second slider causes the first substrate 80 to move in parallel with the second substrate 82. Therefore, as shown in FIGS. 3 and 4, the second substrate 82 is disposed on the back surface of the imaging surface so as to face the first substrate 80, and both are connected by the flexible substrate 84. Immediately after leaving the first substrate 80 in the horizontal direction, the flexible substrate 84 is once bent in the optical axis direction (Z-axis direction) and connected to the second substrate 82.
[0039]
On the second substrate 82, a circuit for processing a signal from the imaging element 16 (first substrate 80), a position detection element 88 (hereinafter, referred to as PSD) for detecting the position of the second slider 13, and a position of the PSD. A circuit for controlling two linear actuators based on a signal and an angular velocity signal from the gyro circuit 86 is mounted. The PSD is covered with a cover 92 having a slit in order to prevent a detection error, and a light receiving element 90 receiving light from an infrared LED provided on the first substrate 80 detects the position. The angular velocity signals in the orthogonal detection directions (X axis, Y axis) are input from the gyro element 86 to the second substrate 82. The second substrate 82 outputs a linear actuator control signal and the processed image sensor signal.
[0040]
The base plate 12, the first slider 14, and the second slider 13, which are mechanisms for supporting and swinging the image sensor 16, are assembled so as to fit each other, and are directly connected to the image sensor 16 and the image sensor 16. It is located around one substrate 80 and on the upstream side in the optical axis direction. Therefore, as shown in FIGS. 3 and 4, when the camera shake correction unit 10 is attached to the lens barrel 3, a mechanism for supporting and swinging the image sensor is provided in an optical system including the lens barrel 3 and the image sensor 16. An optical unit in a broad sense including a mechanism for supporting and swinging the image sensor, which is arranged so as to fill a surplus space with the contour of a necessary member, can be reduced in size.
[0041]
Next, the operation of the camera shake correction apparatus according to the present embodiment will be described. FIG. 8 is a block diagram illustrating an electrical structure of a drive control circuit of the camera shake correction apparatus according to the present embodiment.
[0042]
The control circuit detects the position of the gyro element 86 and the second slider 13 (imaging element 16), which detect the shake 5 of the optical axis L incident on the camera body, that is, the lens barrel 3 and output an angular velocity signal. 90, a microcomputer 102 that performs comprehensive control of the circuit and calculates a movement amount and a position based on an input signal, and a drive circuit 104 that generates a drive pulse of a predetermined frequency based on a drive signal from the microcomputer. It is composed of The drive pulse generated from the drive circuit is output to the first and second actuators 28 and 56, and the first and second sliders 14 and 13 move along the actuators.
[0043]
The gyro element 86 is fixed to the lens barrel 3 as shown in FIG. 4, and detects the angular velocity in two axial directions (X-axis direction, Y-axis direction) when the camera body is shaken as shown by an arrow 5 and a microcomputer. Output to 102.
[0044]
When the angular velocity signal is input from the gyro element 86, the microcomputer 102 calculates the moving amount and the moving speed of the image due to the blur on the image sensor (on the image plane) from the focal length signal of the optical system. Based on the calculated moving speed and the position of the second slider 13 (image sensor 16), a supply voltage of a predetermined frequency to be applied to the two linear actuators is determined. That is, the microcomputer 102 captures an image based on the position where the second slider 13 (imaging element 16), which is calculated based on the signal input from the PSD 90, is present, and the angular velocity signal input from the gyro element 86. The element 16 calculates the original position, compares the difference with the current position, and performs feedback control to move the slider so that the imaging element returns to the desired position.
[0045]
The drive circuit 104 receives a signal from the microcomputer 102 and outputs a drive pulse having a frequency of about 70% of the resonance frequency of the actuators 28 and 56. The driving pulse is applied to the piezoelectric elements 32 and 59, and moves the first and second sliders along the vibration transmitting rods 34 and 60 according to the following principle.
[0046]
When a driving pulse of a sawtooth wave having a gentle rising 110 and a sharp falling portion 112 as shown in FIG. 9A is applied to the piezoelectric elements 32 and 59, the driving pulse becomes gentle as shown in FIG. 9B. In the rising portion 110, the piezoelectric elements 32, 59 gradually expand and displace in the thickness direction, and the vibration transmitting rods 34, 60 fixed to the piezoelectric element gradually displace in the axial direction. At this time, the sliders 13 and 14 frictionally coupled to the vibration transmission rods 34 and 60 move together with the vibration transmission rods 34 and 60 due to frictional force.
[0047]
On the other hand, in the sharp falling portion 112 of the drive pulse, the piezoelectric elements 32 and 59 are rapidly contracted and displaced in the thickness direction, and the vibration transmitting rods 34 and 60 connected to the piezoelectric elements 32 and 59 are also rapidly displaced in the axial direction. . At this time, as shown in (b3), the sliders 13 and 14 frictionally coupled to the vibration transmission rods 34 and 60 overcome the frictional coupling force due to the inertial force and substantially stay at that position and do not move. As a result, the slider moves to the right along the vibration transmission rod from the initial state shown in (b1). By continuously applying the driving pulse of the sawtooth wave to the piezoelectric elements 32 and 59, the sliders 13 and 14 can be continuously moved in the axial direction. Here, the phrase “substantially stays at that position and does not move” means that the slider 13, 14 and the vibration transmitting rods 34, 60 can move between the sliders 13, 14 and the vibration transmitting rods 34, 60 both when the vibration transmitting rods 34, 60 expand and contract in the positive and negative directions. The sliders move while slipping, but the amount of movement is not symmetrical, so that the sliders 13 and 14 may move in any arbitrary direction as a whole.
[0048]
In order to move the sliders 13 and 14 to the left, the above is achieved by changing the waveform of the sawtooth wave applied to the piezoelectric elements 32 and 59 and applying a drive pulse consisting of a rapid rise and a gentle fall. This can be achieved by the opposite action. Note that a square wave or another waveform can be applied to the drive pulse.
[0049]
When a drive pulse is applied to the piezoelectric element of the first actuator held on the base plate, the piezoelectric element 32 repeatedly expands and contracts as described above. The expansion and contraction of the piezoelectric element 32 is transmitted to the weight 30 and the vibration transmission rod 34. Due to the difference in the inertial mass between the weight 30 and the vibration transmission rod 34, the weight 30 hardly moves, and the expansion and contraction is transmitted only to the vibration transmission rod 34. The vibration transmission rod 34 is bonded to the rod support arm 36 as described above, but the elasticity of the adhesive 33 does not hinder expansion and contraction. As described above, the first slider 14 that frictionally couples with the speed difference moving right and left of the rod moves in the X-axis direction along the vibration transmission rod 34. As the first slider 14 is accelerated or decelerated, a force for moving the first actuator 28 within the fitting play acts. However, since the vibration transmission rod 34 and the rod support arm 36 are adhered, no movement occurs. In addition, it is possible to prevent not only the correction performance but also the optical performance deterioration due to the focus movement.
[0050]
When the first slider 14 moves in the X-axis direction, the second slider 13 connected to the first slider also moves in the X-axis direction. The second slider 13 has a low resistance and does not fluctuate in the optical axis direction due to the pressing spring 70 between the first slider 14 and the base plate 12 and the hard sphere 15 between the second slider 13 and the base plate 12. Moving. At this time, the bent open angle of the flexible substrate 84 connecting the first and second substrates 80 and 82 fluctuates to absorb the movement of the first slider.
[0051]
On the other hand, when a drive pulse is applied to the piezoelectric element 59 of the second actuator held by the second slider 13, the piezoelectric element 59 repeats expansion and contraction as described above. The expansion and contraction of the piezoelectric element 59 is transmitted to the weight 58 and the vibration transmission rod 60. Due to the difference in inertial mass between the weight 58 and the vibration transmission rod 60, the weight 58 hardly moves, and the expansion and contraction is transmitted only to the vibration transmission rod 60. As described above, the vibration transmission rod 60 is adhered to the rod support arm 50 of the second slider 13, but the adhesive is elastically bent, so that expansion and contraction is not hindered. As described above, the second slider 13 moves (self-propelled) relative to the first slider 14 in the extending direction (Y-axis direction) of the vibration transmission rod 60 at a speed difference of moving the rod left and right. As the second slider 13 is accelerated or decelerated, a force is applied to the second actuator 56 to move within the fitting play. However, since the vibration transmission rod 60 and the rod support arm 50 are bonded, no movement occurs. In addition, it is possible to prevent not only the correction performance but also the optical performance deterioration due to the focus movement.
[0052]
When the drive pulse is thus applied to the second actuator, only the second slider moves (self-propelled) in the Y-axis direction independently of the first slider. The second slider 13 has a low resistance due to the pressing spring 70 between the first slider 14 and the base plate 12 and the hard sphere 15 between the second slider 13 and the first slider, and causes fluctuation in the optical axis direction. Move without. At this time, the flexible substrate 84 connecting the first and second substrates 80 and 82 absorbs the movement of the second slider due to the bent portion being bent.
[0053]
As described above, the camera shake correction apparatus according to the present embodiment drives the first and second actuators so as to correct the shake of the camera body detected by the gyro element 86, thereby setting the image sensors to X and X, respectively. It can be moved in the axial direction and the Y-axis direction.
[0054]
Further, in the event that an impact is applied to the camera shake correction device such as dropping the camera body, the rod supporting arm and the first slider are fitted by fitting means to prevent the actuator from being broken or damaged. , So that a large force is not applied to the actuator.
[0055]
That is, when an impact is applied in the Y-axis direction, the first slider is fitted in the movement limiting hole of the first slider and the projection 38 of the rod support arm of the base plate, and thus the first slider is moved in the Y-axis direction. , And a large force is not applied to the first actuator 28. Further, since the second actuator 56 has the vibration transmission rod in the Y-axis direction, the second slider slides along the rod, so that a large force is not applied to the second actuator.
[0056]
On the other hand, when an impact is applied in the X-axis direction, the first slider 14 slides with the vibration transmission rod 34, so that a large force is not applied to the first actuator. In addition, the movement restriction hole has a length corresponding to the movement amount of the first slider, and can prevent the first slider from slipping beyond the movement width. Further, the second slider is fitted into the opening 68 of the first slider, and the peripheral wall 46 of the second slider contacts the edge of the opening to restrict the movement in the X-axis direction. No large force is applied.
[0057]
In addition, the means for restricting the movement of the first and second sliders is provided on the rod supporting arm and the slider itself, so that the above-mentioned effect can be exhibited without increasing the size of the device.
[0058]
The present invention is not limited to the above embodiment, but can be implemented in various other modes.
[0059]
For example, in the above embodiment, the second actuator is mounted on the second slider, and the second slider is of a self-propelled type. However, the second actuator is fixed to the first slider, and the second slider is moved. It may be configured as follows. Even with such a configuration, the same operation can be realized. In this case, the first slider is provided with a rod supporting arm, and the second slider is provided with a second rod contact portion.
[0060]
Further, in the above embodiment, the substrate is divided so that the second substrate 82 substantially overlaps the first substrate 80, and both are arranged to face each other. However, the size of the first substrate and the second substrate is changed. Alternatively, it may be configured such that only a part of the parts overlaps by changing the arrangement position.
[0061]
In the above embodiment, the gyro element 86 is attached to the lens barrel 3 and configured to transmit an angular velocity signal to the first and second substrates 80 and 82. It may be directly attached to the opposing surfaces of the substrates 80 and 82.
[Brief description of the drawings]
FIG. 1 is a diagram showing a schematic configuration of a digital camera equipped with a camera shake correction device using a moving device of the present invention.
FIG. 2A is an exploded perspective view of a camera shake correction device using the moving device of the present invention. (B) is a detailed view of the first actuator portion of (a).
FIG. 3 is a cross-sectional view of the camera shake correction apparatus of FIG. 2 taken along a line II.
FIG. 4 is a cross-sectional view of the camera shake correction apparatus of FIG. 2 cut along a II-II cross section.
FIG. 5 is a structural diagram of a first actuator in which a first slider is frictionally engaged.
FIG. 6 is a view showing a modification of the fixing structure of the first actuator.
FIG. 7 is a view showing a modification of the fitting between the rod support arm and the first slider. (A) is a perspective view showing a structure of a rod supporting arm, and (b) is a cross-sectional view showing a fitted state.
FIG. 8 is a block diagram illustrating an electrical structure of a drive control circuit of the camera shake correction apparatus of FIG. 2;
FIG. 9 is a diagram for explaining the driving principle of the actuator. (A) is an example of the waveform of the drive pulse applied to the piezoelectric element. (B) is a diagram for explaining the movement of the actuator.
[Explanation of symbols]
1 Digital camera
2 body
3 lens barrel
4 Lens
10 Camera shake correction device
12 Base plate
13 Second slider
14 First slider
15 Hard ball
16 Image sensor
17 Low-pass filter
18 Heat sink
19 frames
20 large holes
21,72 Pressing spring
22 Board holding arm
24 Floating prevention locking claw
26 Positioning arm
28 1st linear actuator
30 weights
32 Piezoelectric element
34 drive shaft
36 Rod support arm
38 Projection
40 cap
42,78 Holding spring
44 Bottom plate
46 Perimeter wall
48 opening
50 Rod support arm
52 direction reference plate
54 Hard Ball Receiver
56 2nd linear actuator
57 Positioning surface
58 weights
60 drive shaft
62 screws
64 through hole
66 frames
68 opening
70 Press spring
74 1st rod contact part
76 Second rod contact part
79 Movement restriction hole
80 1st substrate
82 Second substrate
84 Flexible board
86 gyro element

Claims (3)

A first linear actuator including an electromechanical transducer, and a drive shaft fixed to one end of the electromechanical transducer in a telescopic direction;
At least a support arm for supporting the drive shaft of the first linear actuator, a fixed table for fixing the first linear actuator,
In the disposed opposite to the fixed table, mobile stage and a movable table capable relative translation with respect to the fixed table,
The moving table,
A second linear actuator including an electromechanical transducer and a drive shaft fixed to one end of the electromechanical transducer in the expansion and contraction direction;
The first linear actuator is constituted by a plate-like body having an opening at a central portion, and a surface thereof has a first contact portion frictionally engaged with the drive shaft of the first linear actuator, and a drive shaft of the second linear actuator. A first slider having a second contact portion that frictionally engages;
A second slider fixed to the side of the first linear actuator in a direction orthogonal to the first linear actuator and accommodated in an opening of the first slider;
The support arm and the first slider each have fitting means for fitting each other, and the fitting means moves the first slider in the direction in which the drive shaft of the second linear actuator extends . A moving stage characterized by preventing movement . The said fitting means is a protrusion provided in the said support arm, and the long hole provided in the said 1st slider and extending in the drive axis direction of the said 1st linear actuator, The said 1st characterized by the above-mentioned. Moving stage . The fitting means includes a band-shaped protrusion provided on the fixed table facing surface of the first slider and extending in the drive axis direction of the first linear actuator, and a band-shaped protrusion provided on the support arm and The moving stage according to claim 1, wherein the moving stage is a fork portion fitted so as to sandwich the same.

Images