JP3543686B2 - Apparatus and method for supplying conductive balls - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a conductive ball supply device that supplies conductive balls in an array.
[0002]
[Prior art]
As a method of forming a metal bump on an electrode of a substrate or an electronic component, there is known a method of transferring a conductive ball such as a solder ball onto the electrode and performing solder bonding. For transferring the conductive balls, a method of vacuum-sucking the conductive balls by a transfer head is widely used. In this method, the conductive balls are sucked into a large number of suction holes provided on the lower surface of the suction tool of the transfer head, the suction tool is moved onto the work, and the conductive balls are released by releasing the vacuum suction. It is transferred to. As a method of attracting conductive balls to the lower surface of the suction tool, the suction tool is lowered into a ball tank that has stored a large number of conductive balls, and the lower surface of the suction tool is settled in the conductive ball layer. In this method, a method of vacuum suction through the suction hole has been used.
[0003]
[Problems to be solved by the invention]
However, the above method of directly adsorbing the conductive balls from the ball tank to the adsorption tool has the following problems. First, since the conductive balls in the ball tank are in a random state in which they are thrown at random, it is difficult to cause the conductive balls to be quickly and completely sucked into the suction holes on the lower surface of the suction tool. For this reason, means for promoting adsorption of the conductive ball, such as fluidizing the conductive ball by blowing gas into the conductive ball layer, or vibrating the suction tool relative to the conductive ball layer. Therefore, it takes a considerable time for the conductive balls to be adsorbed to each of the suction holes.
[0004]
In addition, the suction tool that has absorbed the conductive balls shifts to the transfer operation to the workpiece. However, no operation for ball suction is performed in the ball tank until the suction head finishes the transfer operation and returns to the ball tank again. Had not been done. For this reason, it is difficult to shorten the tact time of the transfer operation of the conductive ball, and it is not possible to expect a significant improvement in productivity, in addition to the fact that the ball suction operation itself requires time. Further, in the suction operation by the suction tool, suction holes are generated in which the conductive balls are not sucked, and suction errors such as extra conductive balls being sucked on the lower surface of the suction tool are likely to occur. This was a cause of transfer errors. As described above, conventionally, there has been a problem that it is difficult to quickly and accurately attract the conductive ball to the transfer head.
[0005]
SUMMARY OF THE INVENTION An object of the present invention is to provide a conductive ball supply device that can quickly and accurately attract a conductive ball to a transfer head.
[0006]
[Means for Solving the Problems]
The conductive ball supply device according to claim 1, wherein the conductive ball supply device supplies the conductive balls in an array state to a transfer head that transfers the conductive balls to a work by attracting the conductive balls, An array member having a predetermined arrangement of a plurality of ball holding portions each formed of a concave portion capable of accommodating one conductive ball and a through hole provided in the concave portion on the upper surface, and an opening portion on the lower surface through which the conductive ball can pass. A container for accommodating a plurality of conductive balls, moving means for relatively moving the container along the upper surface of the arrangement member in a state where the opening is closed by the arrangement member, and arrangement integrally with the container. Light emitting means for irradiating light from above the array member to the ball holding portion while relatively moving with respect to the member, and detecting means for detecting light of the light emitting means penetrating the through hole.
[0007]
The conductive ball supply device according to claim 2 is the conductive ball supply device according to claim 1, wherein the detection means is an optical sensor disposed in a dark room formed below the arrangement member. It is.
[0008]
The conductive ball supply device according to claim 3 is the conductive ball supply device according to claim 1, wherein an arrangement error determination unit that determines an arrangement error of the conductive ball based on a signal from the detection unit. With.
[0009]
According to a fourth aspect of the present invention, there is provided a method for supplying a conductive ball, comprising: an array member provided with a plurality of ball holders in a predetermined arrangement, each having a recess capable of accommodating one conductive ball on an upper surface and a through hole provided in the recess. A container having an opening on the lower surface through which the conductive balls can pass, and housing a plurality of conductive balls, and the conductive balls housed in the container are housed in the ball holding portion in an arrayed state. A method for supplying a conductive ball to be supplied, wherein the opening and the arrangement member are relatively slid in a state where the opening is closed by an upper surface of the arrangement member so that the opening is located above the ball holding portion. , The step of relatively sliding the container and the arrangement member to retract the container from above the ball holding section, and the step of retracting irradiates light toward the ball holding section. Te and detecting the light passing through the through hole.
[0010]
ADVANTAGE OF THE INVENTION According to this invention, on the arrangement | sequence member provided with the some ball holding part, the container which has the opening part which a conductive ball can pass through and accommodates a some conductive ball, and goes to a ball holding part from the upper part of an arrangement member. By moving the light-emitting means for irradiating light integrally, the arrangement of the conductive balls on the arrangement member and the inspection of the arrangement state can be performed by the same operation, thereby simplifying the mechanism and shortening the operation time. Shortening can be achieved.
[0011]
BEST MODE FOR CARRYING OUT THE INVENTION
Next, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view of an apparatus for transferring conductive balls according to an embodiment of the present invention, FIG. 2 is a perspective view of a ball supply unit of the apparatus for transferring conductive balls, and FIG. FIG. 4A is a partial plan view of the ball supply unit of the conductive ball transfer device, and FIG. 4B is a sectional view of the ball supply unit of the conductive ball transfer device. 5A is a partial plan view of an arrangement member of the ball supply unit, FIG. 5B is a cross-sectional view of an arrangement member of the ball supply unit, FIGS. 6, 7, and FIG. 8 and 9 are explanatory diagrams of a ball supply operation of the conductive ball transfer device, and FIG. 10 is an explanatory diagram of remaining ball detection by the remaining ball detecting means.
[0012]
First, the structure of the conductive ball transfer device will be described with reference to FIG. In FIG. 1, a transport path 2 is provided in the center of a base 1 in the X direction. The transport path 2 transports and positions the substrate 3. Two Y-axis tables 5 are arranged at both ends of the upper surface of the base 1. An X-axis table 6 is provided on the Y-axis table 5, and a transfer head 7 having a suction tool 8 is mounted on the X-axis table 6. By driving the X-axis table 6 and the Y-axis table 5, the transfer head 7 moves horizontally.
[0013]
A ball supply unit 9 (conductive ball supply device) for the conductive balls 4 is provided in front of the transport path 2. The ball supply unit 9 includes an arrangement member 10 for arranging the conductive balls 4 in a predetermined arrangement pattern. The transfer head 7 is positioned above the array member 10, and the transfer head 7 is lowered with respect to the array member 10, so that the conductive balls 4 arranged on the array member 10 can be held by the suction tool. The conductive balls 4 are picked up by suction and transferred to a predetermined position on the substrate 3.
[0014]
Next, the ball supply unit 9 will be described with reference to FIGS. 2, 3, and 4, the arrangement member 10 is mounted on the upper part of the box member 11, and a lower part of the arrangement member 10 of the box member 11 is an airtight dark room. An upper portion of the box member 11 is provided with an overhang portion 11 a extending in the Y direction and having the same upper surface as the upper surface of the array member 10. A slider 50 is fixed to the bottom surface of the box member 11, and the slider 50 is slidably fitted on a guide rail 51 provided on the upper surface of the base 1 in the Y direction.
[0015]
Here, the arrangement member 10 will be described with reference to FIG. As shown in FIG. 5A, a plurality of circular concave portions 10 a are provided in a grid on the upper surface of the array member 10. The arrangement pitches Px and Py of the concave portions 10a are set in a predetermined arrangement, that is, equal to the arrangement pitch of the suction holes 8a provided in the suction tool 8 of the transfer head 7. FIG. 5B shows a BB cross section, and the diameter D and the depth d1 of the concave portion 10a are set to a size that can accommodate one conductive ball 4.
[0016]
A through hole 10c penetrating the array member 10 is provided on the bottom surface of the concave portion 10a, and the conductive ball 4 is sucked from the through hole 10c in a state where the conductive ball 4 is present in the concave portion 10a. It is held in the recess 10a. Therefore, the concave portion 10a and the through hole 10c form a ball holding portion for holding the conductive ball 4. Further, a straight groove 10b is provided in the X direction so as to intersect with the center of each of the recesses 10a forming the concave row in the X direction.
[0017]
As shown in FIG. 2, a tube 53 is connected to a lower portion of the box member 11, and the tube 53 is connected to a vacuum suction source and an air supply source (not shown) via a switching valve 37. By switching the switching valve 37, the inside of the box member 11 can be vacuum-sucked, or can be supplied with positive-pressure air. By vacuum-suctioning the inside of the box member 11 in a state where the conductive balls 4 are present in the concave portions 10a of the array member 10, the conductive balls 4 are held in the concave portions 10a by vacuum suction. Further, by supplying air to the inside of the box member 11, the conductive balls 4 in the concave portions 10a are discharged to the outside by air blow.
[0018]
As shown in FIG. 3, a feed screw 61 that is rotationally driven by a motor 62 is screwed into a nut 60 fixed to the bottom surface of the box member 11. By driving the motor 62, the box member 11 moves horizontally in the Y direction. As shown in FIG. 2, a column 59 is erected on the base 1 over the guide rail 51 in a moving range of the box member 11, and a plurality of horizontal plate members 58 supported by the column 59 are provided. A container 54 for storing the conductive balls 4 is provided.
[0019]
The container 54 includes a frame portion 54a and a guide member 55 that is the bottom of the container 54. The guide member 55 is detachably attached to the frame portion 54a. As shown in FIG. 4A, the guide member 55 has guide holes 55a, which are openings, formed in a lattice shape. The arrangement pitch of the guide holes 55a corresponds to the arrangement pitches Px and Py of the concave portions 10a of the arrangement member 10. Therefore, when the arrangement member 10 is replaced with one having a different arrangement pitch or concave portion size, the guide member 55 is also exchanged with one that conforms thereto. As shown in FIG. 4 (b), the guide hole 55a has a diameter that allows only one conductive ball to pass through, and an upper surface of the guide hole 55a has a guide hole for facilitating entry of the conductive ball 4. A tapered portion 55b is provided as a portion.
[0020]
The lower surface of the guide member 55 and the upper surfaces of the array member 10 and the overhang portion 11a face each other with a distance equal to or less than the radius of the conductive ball 4 and are relatively slidable while maintaining this state. ing. In the state where the box member 11 has advanced in the Y direction (the state shown in FIG. 2), the overhang portion 11a is located below the guide member 55, and in the state where the box member 11 is retracted in the Y direction (the direction of the arrow b). The arrangement member 10 is located below the guide member 55. In this movement operation, the lower surface of the guide hole 55a is closed by the upper surface of the array member 10, and therefore, the motor 62 for moving the box member 11, the feed screw 61, and the nut 60 move the guide hole 55a. The container 54 serves as moving means for relatively moving the container 54 along the upper surface of the arrangement member 10 in a state where the container 54 is closed by the arrangement member 10.
[0021]
As shown in FIG. 2, on the upper surface of the plate member 58, an optical sensor in which a light emitting unit 29A and a light receiving unit 29B are combined in a pair is attached. An optical axis a from which light emitted from the light emitting unit 29A reaches the light receiving unit 29B has a height direction parallel to the upper surface of the array member 10 and a direction in a horizontal plane parallel to the groove 10b. And the height position matches the height position of the groove 10b (see FIG. 10). By driving the motor 62 to horizontally move the box member 11, the optical axis a emitted from the light emitting unit 29 </ b> A and reaching the light receiving unit 29 </ b> B relatively moves with respect to the array member 10 of the box member 11. The axis a scans the height position of the groove 10b of the array member 10. Therefore, the above-described moving means for moving the box member 11 is also a moving means for moving the optical axis a in parallel with the upper surface of the array member 10.
[0022]
When the conductive ball 4 exists in the concave portion 10a during this movement, the optical axis a is shielded by the conductive ball 4, and the light intensity received by the light receiving section 29B decreases. By detecting this decrease in light intensity, it is possible to detect the conductive balls 4 present in the recess 10a. This ball detection is used for detecting the conductive balls remaining in the concave portion 10a of the array member 10, ie, the remaining balls, after the pickup operation of picking up the conductive balls 4 arranged on the array member 10 by the transfer head 7. Can be
[0023]
The light receiving unit 29B is connected to the detecting unit 70 (FIG. 10), and receives a signal from the light receiving unit 29B at the detecting unit 70, so that the detecting unit 70 detects a remaining ball based on a waveform of a graph described later. Therefore, the optical sensor including the light emitting unit 29A and the light receiving unit 29B and the detecting unit 70 serve as a remaining ball detecting unit. When the remaining ball is detected, the determination unit 71 (FIG. 10) determines that a pickup error has occurred in the pickup operation by the transfer head 7. Therefore, the determination unit 71 is a pickup error determination unit.
[0024]
In the present embodiment, a groove 10b intersecting with the concave portion 10a is provided, and the remaining ball is detected by passing the optical axis a through the groove 10b. However, when the groove 10b is not provided, Can detect the remaining ball by the same method. In this case, the depth of the concave portion 10a is set to a depth such that the upper portion of the conductive ball 4 projects, and the optical axis a is scanned along the upper surface of the array member 10 so that the optical axis a The remaining ball may be detected based on whether or not the amount of light is reduced by being shielded from light by the upper portion of the conductive ball 4. However, if the ball diameter of the conductive ball 4 becomes small, it becomes difficult to stably detect the presence or absence of light shielding by only the upper protruding portion. Therefore, it is preferable to provide the groove 10b.
[0025]
A ball supply unit 56 is provided diagonally behind the container 54, and the conductive balls 4 are supplied into the container 54 from a supply port 57 located on the container 54. On the front side surface of the container 54, a line light emitting section 26 is provided. The line light emitting unit 26 is connected to a light source device 28 via a cable 27. When the lamp in the light source device 28 is turned on in a state where the line light emitting unit 26 is positioned on the arrangement member 10, light is emitted to the concave portion 10 a from above the arrangement member 10. Therefore, the light source device 28 and the line light emitting section 26 are light emitting means. In the present embodiment, the line light-emitting unit 26 is used as the light-emitting means, but an LED (light-emitting diode) arranged in a line may be used.
[0026]
A dark room is formed below the arrangement member 10 of the box member 11, and the box penetrates through the through-hole 10 c when there is no light-shielding material for blocking the light emitted from the line light emitting unit 26 in the concave portion 10 a. Light enters the inside of the member 11 and is reflected in the horizontal direction by the reflecting plate 31 disposed obliquely inside. The reflected light is incident on an optical sensor 32 disposed on the inner surface of the box member 11. The optical sensor 32 is connected to the detection unit 34, and the detection unit 34 detects that light has entered the optical sensor 32. That is, the optical sensor 32 and the detection unit 34 serve as detection means for detecting light emitted from the line light emission unit 26 and passing through the through hole 10c.
[0027]
A determination unit 35 is connected to the detection unit 34, and the determination unit 35 determines the arrangement state of the conductive balls 4 based on a signal of a detection result of the detection unit 34. That is, if light incident on the optical sensor 32 is detected, it is determined that an alignment error in which the conductive ball 4 is not accommodated in any of the concave portions 10a of the alignment member 10 has occurred. Therefore, the judging section 35 serves as an alignment error determining means for determining an alignment error based on a signal from the detecting means.
[0028]
By driving the motor 62 to move the box member 11, the line light emitting unit 26 moves relatively to the arrangement member 10. That is, the above-described moving means for moving the box member 11 also serves as a moving means for moving the line light-emitting portion 26 as the light-emitting means with respect to the array member 10 integrally with the container 54. In this movement, when there is a concave portion 10a in which the conductive ball 4 is not accommodated as shown in FIG. 7, light emitted from the line light emitting portion 26 passes through the through hole 10c in the concave portion 10a and is The light beam L that enters the dark room inside the member 11 and is reflected by the reflection plate 31 enters the optical sensor 32. The light entering the optical sensor 32 is detected by the detection unit 34. When the input is detected, the determination unit 35 determines that there is a ball alignment error.
[0029]
Next, a ball supply operation to the transfer head 7 by the ball supply unit 9A will be described with reference to FIGS. 6, 7, 8, and 9. First, prior to the state shown in FIG. 6, the conductive balls 4 are supplied into the container 54 by the ball supply unit 56. Thus, the conductive balls 4 enter the guide holes 55a of the guide member 55.
[0030]
After replenishing the balls, the motor 62 is driven to retreat the box member 11 in the direction of the arrow, and the arrangement member 10 is positioned immediately below the guide member 55. As a result, the guide holes 55a pass over the concave portions 10a one after another with the upper surfaces of the array members 10 closed. The conductive ball 4 has already entered the guide hole 55a. When the conductive ball 4 moves to a position coinciding with the recess 10a, the conductive ball 4 moves downward in the guide hole 55a and is accommodated in the recess 10a. Is done. At this time, by transmitting the vibration to the guide member 55 by driving the vibrator 63, the movement of the conductive ball 4 in the guide hole 55a is promoted. Then, the conductive balls 4 housed in the recesses 10a are vacuum-sucked by the through holes 10c by vacuum suction from the tube 53, and are held in the recesses 10a.
[0031]
When the conductive balls 4 are held in the respective recesses 10a in this way, the motor 62 is driven to move the box member 11 in the direction of arrow d as shown in FIG. As a result, the arrangement member 10 holding the conductive balls 4 in the recess 10a slides horizontally with respect to the lower surface of the guide member 55, and retracts the container 54 from above the recess 10a.
[0032]
In this evacuation operation, the lamp in the light source device 28 (see FIG. 2) is turned on to emit light toward the array member 10 below the line light emitting section 26. Accordingly, the light irradiates the array member 10, and when there is a concave portion 10a that does not hold the conductive ball 4 as shown in FIG. 7, the light emitted from the line light emitting portion 26 passes through the concave portion 10a. After passing through the hole 10c, the light enters the dark room inside the box member 11, is reflected by the reflection plate 31, and enters the optical sensor 32. Then, the detection unit 34 detects the incidence of light, and based on the detection result, the determination unit 35 determines whether or not there is a misalignment of the conductive balls 4.
[0033]
In the present embodiment, since the light emitting means (the line light emitting unit 26) is integrally attached to the container 54, it is possible to detect an alignment error while the container 54 is retracting from the upper surface of the array member 10. As a result, the time for performing the alignment error detection overlaps with the evacuation operation to be substantially zero, thereby improving the work efficiency.
[0034]
Thereafter, as shown in FIG. 8, the box member 11 further advances in the direction of arrow e, and the container 54 moves onto the overhang portion 11a. As a result, when the concave portions 10a of the arrangement member 10 are completely exposed and the arrangement member 10 is in a free state, the transfer head 7 is moved onto the arrangement member 10. Then, the transfer head 7 is lowered by aligning the suction hole 8a of the suction tool 8 with the concave portion 10a. Then, as the suction tool 8 performs vacuum suction, the conductive balls 4 held in the concave portions 10a are vacuum-sucked into the suction holes 8a.
[0035]
At this time, the switching valve 37 may be switched to supply slightly positive pressure air to the inside of the box member 11. This has the effect of facilitating the separation of the conductive balls 4 from the recesses 10a and promoting the suction of the conductive balls 4 into the suction holes 8. Thereafter, as shown in FIG. 9, the transfer head 7 is lifted, and the transfer head 7 picking up the conductive balls 4 by the suction holes 8a of the suction tool 8 places the conductive balls 4 at predetermined positions on the substrate 3. Transfer.
[0036]
As a result, the conductive ball 4 does not exist in the concave portion 10a of the array member 10, but an erroneous suction to the suction hole 8a occurs for some reason, and even after the pickup operation, as shown in FIG. As shown, the conductive ball 4 may remain in the recess 10a. Therefore, a ball detecting operation for detecting such a remaining ball is performed. That is, by driving the motor 62 to move the box member 11, the optical axis a from the light emitting unit 29A to the light receiving unit 29B is relatively moved with respect to the array member 10, and the optical axis a is set at the height of the groove 10b. Scan at the position.
[0037]
At this time, if there is no conductive ball 4 remaining in each of the concave portions 10a where the grooves 10b intersect, the light from the light emitting portion 29A is received by the light receiving portion 29B. A waveform graph showing peaks and valleys is obtained (see FIGS. 10B and 10A). On the other hand, when the conductive ball 4 remains in any of the recesses 10a, the light from the light emitting unit 29A is blocked by the conductive ball 4 and does not reach the light receiving unit 29B. Accordingly, in such a case, a graph is obtained in which the waveform of the mountain (broken line indicated by the arrow in the figure) which should originally appear at the position corresponding to the concave row to which the concave portion 10a belongs is missing (FIG. 10B). )reference).
[0038]
The detection of the remaining ball by the graph waveform is performed by receiving the signal from the light receiving unit 29B by the detection unit 70, and based on the detection result of the remaining ball by the detection unit 70, the determination unit 71 determines whether or not the pick-up error by the transfer head 7 The presence or absence is determined. In the present embodiment, since the light emitting portion 29A and the light receiving portion 29B are moved integrally with the container 54, the conductive ball 4 is accommodated in the empty concave portion 10a simultaneously with the operation of detecting the remaining ball. Accordingly, the cycle time of the conductive ball supply by the ball supply unit 9 is shortened, and the productivity of the conductive ball transfer device is increased.
[0039]
As described above, in the present embodiment, in the supply of the conductive balls to be supplied to the transfer head in a state where the conductive balls are held on the arrangement member in the arrangement state, the conductive balls 4 are arranged on the arrangement member 10. The container 54 for arranging and the line light emitting section 26 for irradiating light from above the arranging member 10 toward the concave portion 10a of the arranging member 10 are integrally moved. Thereby, the arrangement of the conductive balls 4 on the arrangement member 10 and the inspection of the arrangement state can be performed by the same operation, and the mechanism can be simplified and the operation time can be shortened.
[0040]
The conductive balls arranged in this manner are supplied to the transfer head 7 only by sucking the conductive balls arranged in accordance with the suction holes of the suction tool. The conductive balls can be supplied to the transfer head in a very short time as compared with the method of directly lowering the conductive balls to suck the conductive balls.
[0041]
In addition, while the transfer head picking up the conductive balls performs the transfer operation to the work, the operation of arranging new conductive balls on the array member can be performed in parallel. Compared with the method of performing the pickup operation and the transfer operation of the conductive ball by one transfer head, the tact time required for transfer of the conductive ball can be greatly reduced, and the productivity can be improved.
[0042]
【The invention's effect】
ADVANTAGE OF THE INVENTION According to this invention, on the arrangement | sequence member provided with the some ball holding part, the container which has the opening part which a conductive ball can pass through and accommodates a some conductive ball, and goes to a ball holding part from the upper part of an arrangement member. Since the light emitting means for irradiating light is moved integrally, the arrangement of the conductive balls on the arrangement member and the inspection of the arrangement state can be performed by the same operation, thereby simplifying the mechanism and shortening the operation time. Can be achieved.
[Brief description of the drawings]
FIG. 1 is a perspective view of an apparatus for transferring conductive balls according to an embodiment of the present invention; FIG. 2 is a perspective view of a ball supply unit of the apparatus for transferring conductive balls according to an embodiment of the present invention; 3 is a sectional view of a ball supply unit of the conductive ball transfer device according to one embodiment of the present invention. FIG. 4 (a) is a ball supply unit of a conductive ball transfer device according to one embodiment of the present invention. FIG. 5B is a cross-sectional view of an opening of a ball supply unit of the conductive ball transfer device according to one embodiment of the present invention. FIG. 5A is a ball supply unit according to one embodiment of the present invention. (B) Cross-sectional view of an arrangement member of a ball supply unit according to an embodiment of the present invention. FIG. 6: Ball supply operation of a conductive ball transfer device according to an embodiment of the present invention. FIG. 7 is an explanatory view of a ball supply operation of a conductive ball transfer device according to an embodiment of the present invention. FIG. 9 is an explanatory diagram of a ball supply operation of the conductive ball transfer device according to one embodiment. FIG. 9 is an explanatory diagram of a ball supply operation of the conductive ball transfer device of one embodiment of the present invention. Explanatory diagram of detection of a remaining ball by a remaining ball detection unit according to an embodiment of the present invention.
REFERENCE SIGNS LIST 3 substrate 4 conductive ball 7 transfer head 8 suction tool 9 ball supply unit 10 arranging member 10a recess 10b groove 10c through hole 11 box member 26 line light emitting unit 28 light emitting device 29A light emitting unit 29B light receiving unit 32 optical sensor 34 detecting unit 35 Judgment unit 54 Container 55 Guide member 55a Guide hole (opening)

Claims (4)

A conductive ball supply device for supplying conductive balls in an array state, wherein a plurality of ball holding portions each including a concave portion capable of accommodating one conductive ball on an upper surface and a through hole provided in the concave portion are arranged in a predetermined arrangement. An arrangement member provided, a container having a lower surface having an opening through which the conductive ball can pass and accommodating a plurality of conductive balls, and an upper surface of the arrangement member in a state where the opening is closed by the arrangement member Moving means for relatively moving along the container, light emitting means for irradiating light from above the arrangement member to the ball holding portion while moving relative to the arrangement member integrally with the container, and And a detecting means for detecting the light of the light emitting means penetrating the hole. 2. The conductive ball supply device according to claim 1, wherein the detection unit is an optical sensor disposed in a dark room formed below the arrangement member. Feeder of the conductive ball according to claim 1, wherein you comprising the sequence error determination means for determining a sequence errors of the conductive balls on the basis of a signal from said detecting means. An arrangement member having a predetermined arrangement of a plurality of ball holding portions each having a recess capable of accommodating one conductive ball on the upper surface and through holes provided in the recess, and an opening capable of passing the conductive ball on the lower surface. And a container for accommodating a plurality of conductive balls, the method comprising: supplying a conductive ball accommodated in the container to the ball holding portion and supplying the conductive balls in an arrayed state; A step of relatively sliding the container and the arranging member in a state in which the opening is closed by the upper surface of the arranging member, thereby causing the opening to pass above the ball holding portion; and Retreating the container from above the ball holding portion by relatively sliding, and irradiating light to the ball holding portion in the retreating step to detect light passing through the through hole. The method of supplying the conductive ball, which comprises a.

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