JP3541436B2 - Ultra small micro motor - Google Patents

Ultra small micro motor Download PDF

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Publication number
JP3541436B2
JP3541436B2 JP14104894A JP14104894A JP3541436B2 JP 3541436 B2 JP3541436 B2 JP 3541436B2 JP 14104894 A JP14104894 A JP 14104894A JP 14104894 A JP14104894 A JP 14104894A JP 3541436 B2 JP3541436 B2 JP 3541436B2
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JP
Japan
Prior art keywords
yoke
metal layer
frame
coil
lead wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP14104894A
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Japanese (ja)
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JPH07327348A (en
Inventor
智弘 松尾
義和 冨永
武文 椛島
美和 御厨
毅 浅沼
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Yaskawa Electric Corp
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Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to JP14104894A priority Critical patent/JP3541436B2/en
Publication of JPH07327348A publication Critical patent/JPH07327348A/en
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Publication of JP3541436B2 publication Critical patent/JP3541436B2/en
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  • Permanent Magnet Type Synchronous Machine (AREA)

Description

【0001】
【産業上の利用分野】
本発明は、薄膜磁石を用いた超小形マイクロモータに関する。
【0002】
【従来の技術】
電子部品や精密機械に組み込まれる超小形のマイクロモータは、図5に1例を示すように、直径2.5mm、厚さ0.5mm程度のケイ素鋼板にスパッタ法で40μmの膜磁石を形成し、所定の極数に着磁したロータ51と、その着磁面に軸方向に対向させてヨーク52に取り付けた磁極53をそなえ、この磁極53に20〜50μmφの細い導線を巻回した磁極コイル54を設けている。55は引き出し線で、磁極コイル54からフレーム56の外側に引き出され、前記ヨーク52を取り付けたベース57の周縁部に給電端子58を設けて半田付けにより接続しており、この給電端子58にリード線59を接続している。
【0003】
【発明が解決しようとする課題】
したがって、モータそのものは小形に構成されるが、引き出し線55を給電端子58に接続するために、フレーム56の外径より大きいベース57が必要になり、取付スペースが大きくなる欠点があり、細い引き出し線55をフレーム56の外側に導出しているため、取り扱い中に断線させるおそれがあった。
本発明は、ベース57を不要にし、引き出し線55をフレームの外側に導出しないようにしたものである。
【0004】
【課題を解決するための手段】
このため本発明は、高分子合成樹脂で形成されたカップ状のフレームと、このフレームに回転自由に支持され、膜磁石をそなえたロータと、細い導線からなるコイルを巻回し前記ロータに軸方向空隙を介して対向させた磁極と、磁極を取り付けたヨークを設け、前記ヨークが、ヨーク材料による磁性層と、磁性層の磁極取付面の反対側面に形成した絶縁層と、絶縁層の外側に重ねてパターニングされた金属層とで構成され、内周面に絶縁被膜を設けたスルーホールを磁極位置に応じて複数個そなえ、このスルーホールにコイルの引き出し線を挿入して導電性充填材を充填し、この導電性充填材をスルーホールから前記金属層に連結するようにした超小形マイクロモータにおいて、フレームの開口側端部の内面に嵌合段部を設けてヨークの外周を嵌合させ、このヨークより開口端側のフレーム内面にパターニングされた金属層相互に跨がらない縦方向の溝状段部をそなえ、この溝状段部内面に固定用金属層を設け、ヨークの金属層とフレームの固定用金属層とを導電性充填材で 結している。
【0005】
ヨークの金属層とフレームの固定用金属層とを連結する導電性充填材は、スルーホールに充填したものを固定用金属層に延長させればよく、これとは別個に設けてもよい。
【0006】
【作用】
したがって、コイルからの細い引き出し線は、スルーホール内で導電性充填材で保持され、線径の大きいリード線をスルーホール内に引き出し線とは反対方向から挿入し、あるいは、スルーホールに引き出し線だけを挿入し、充填した導電性充填材やパターニングされた金属層にリード線端子を形成させることができるとともに、導電性充填材でヨークを嵌合段部に固定させ、確実に取り付け保持させる。
【0007】
【実施例】
これを図1および図2に示す実施例について説明する。
1はロータで、厚さ0.5mm、径2.5mmのケイ素鋼板を用い、一方の面に膜磁石をスパッタ法で形成し、たとえば6極に着磁させている。2は前記ロータ1を取り付けたステンレス製のシャフトで、軸受3を介してフレーム4に支持させている。5はヨークで、厚さ0.5mm、径3mmのケイ素鋼板で構成しており、ヨーク5の外周とフレーム4の端部を嵌合段部6で嵌合保持させている。7はヨーク5に取り付けた磁極で、4個そなえ2相たとえばA相とB相になるように20〜50μmφの導線でコイル8を巻装している。
【0008】
前記ヨーク5は、図3(a)に示すように、ヨーク材料による磁性層21の磁極取付位置相互間に、好ましくはなるべく磁極間隔の大きい外周側に寄せて、プレス加工、ドリル加工あるいは放電加工等により加工された孔22を設け、図3(b)に示すように、この孔22内および磁極取付面とは反対側の面に、ポリイミドなどの合成樹脂絶縁材をスピンコートにより成膜した絶縁層23を形成し、さらに図3(c)のように絶縁層23に重ねて孔位置に合わせてパターニングされた金や銅などの金属層24を蒸着形成し、図3(d)で示すように、絶縁層を埋めた孔22にプレス加工、ドリル加工あるいは放電加工等により孔22より小径の孔加工を行い、スルーホール25を形成してある。
【0009】
9はコイル8からの引き出し線、10は引き出し線9より大きな線径たとえば0.8mmφの心線をもったリード線で、その心線を引き出し線9の端部とともに両側からヨーク5のスルーホール25に挿入し、スルーホール25内に導電性接着剤あるいは半田などの導電性充填材11を充填し、導電性充填材11を金属層24に連結させている。
61はフレーム4の開口側の端部内面に設けられ、ヨーク5を嵌合させる嵌合段部、62はフレーム4の開口端部内面の、前記嵌合段部61に保持されるヨーク5より開口側に、パターニングされた金属層24の位置に合わせて、隣接する金属層24相互に跨がらない幅で設けた縦方向の溝状段部、63は溝状段部62内に蒸着などにより、嵌合段部61の内径面より突出しないように設けられた固定用金属層である。
【0010】
なお、溝状段部62と固定用金属層63はパターニングされた全部の金属層に合わせて設ける必要はないが、少なくとも対向する位置に設けておくことが望ましい。
【0011】
ヨーク5をフレームの嵌合段部61に挿入嵌合させたのちに、金属層24と溝状段部の固定金属層63を、スルーホール25に充填した充填導電材11と一体に、またはスルーホール25に充填した充填導電材とは別個に導電性充填材11で連結し、ヨーク5のフレーム4からの抜け出しを防止し、ヨークを確実に保持させる。
また、ヨーク5のスルーホール25に引き出し線9だけを挿入して導電性充填材11を充填し、あるいは、リード線10をフレームの内側で金属層24または金属層24と固定 用金属層63を連結する導電性充填材11に接続することもできる。
【0012】
このように構成されたモータは、図4の動作説明図で示すように、A相コイル7Aに電気角でπ/2の位相差をもつ2相分の矩形波の負の電流Iを通電し、B相コイル7Bにも負の電流Iを通電すると、ロータ1の磁石とコイル7A、7Bの関係は図4(イ)の状態になる。
つぎにA相コイル7Aに正の電流Iを通電し、B相コイル7Bに負の電流Iを通電すると、ロータ磁石とコイルとの関係は(ロ)の状態になり、次いで、A相コイルに正の電流Iを通電し、B相コイルにも正の電流Iを通電すると、ロータ磁石1とコイル7の関係は(ハ)の状態になる。
さらに、A相コイル7Aに負の電流Iを通電し、B相コイル7Bに正の電流Iを通電するとロータとコイルとの関係は(ニ)の状態になり、これを繰り返すことにより、安定点が順次移動して機械角でπ/6度づつ反時計方向に連続回転させることができる。
【0013】
なお、以上はロータ磁石を6極、回転子が2相の場合について述べたが、他の極数、相数についても同様である。
【0014】
【発明の効果】
本発明は上述のように、フレームを高分子合成樹脂で形成させ、ヨークが、磁性層と、磁極取付面とは反対側の外面に形成した絶縁層と、絶縁層の外側に重ねてパターニングされた金属層とをそなえ、磁極の位置に応じて複数個設けられ内周面を絶縁したスルーホールを設けており、このスルーホールに前記コイルの細い引き出し線を挿入し、導電性充填材を充填して前記金属層に連結した超小形マイクロモータにおいて、フレームの開口側端部内面に、ヨークの外周を嵌合させる嵌合段部を設けるとともに、この嵌合段部よりフレームの開口端側に縦方向の溝状段部を設け、この溝状段部内に固定用金属層を形成し、導電性充填材でヨークの金属層と連結することにより、コイルの引き出し線より線径の大きいリード線を、スルーホールから直接引き出し、あるいは導電性充填材や金属層に接続させることができ、リード線の接続が容易になるとともに、ヨークのフレームからの抜けを防止でき、ヨークを確実に保持させ、ロータと磁極との間隙を規定値に保つことができ、モータの性能を保持し得るなどの効果がある。
また、ヨークの金属層と溝状段部内の固定用金属層とをスルーホールの導電性充填材とは別個に連結させることにより、ヨークをフレームの嵌合段部に嵌合させ引き出し線をスルーホール内の導電性充填材で固定させた後にリード線を取り付けることができ、引き出し線の接続に影響を与えることがない。
【図面の簡単な説明】
【図1】本発明の実施例を示す側断面図である。
【図2】図1の下面図である。
【図3】ヨークの製作工程の例を示す説明図である。
【図4】実施例によるモータの動作説明図である。
【図5】従来の例を示す側断面図である。
【符号の説明】
1 ロータ
4 フレーム
5 ヨーク
6 嵌合段部
7 磁極
8 コイル
9 引き出し線
10 リード線
11 導電性充填材
12 給電端子
21 磁性層
23 絶縁層
24 金属層
25 スルーホール
61 嵌合段部
62 溝状段部
63 固定用金属層
[0001]
[Industrial applications]
The present invention relates to a microminiature motor using a thin film magnet.
[0002]
[Prior art]
As shown in FIG. 5, an ultra-small micromotor incorporated in an electronic component or precision machine forms a 40 μm film magnet by sputtering on a silicon steel plate having a diameter of 2.5 mm and a thickness of about 0.5 mm. A magnetic pole coil having a rotor 51 magnetized to a predetermined number of poles, and a magnetic pole 53 attached to a yoke 52 so as to face the magnetized surface in the axial direction, and a thin conductive wire of 20 to 50 μmφ is wound around the magnetic pole 53. 54 are provided. Reference numeral 55 denotes a lead wire which is drawn out of the magnetic pole coil 54 to the outside of the frame 56, is provided with a power supply terminal 58 on the periphery of a base 57 to which the yoke 52 is attached, and is connected by soldering. Line 59 is connected.
[0003]
[Problems to be solved by the invention]
Therefore, although the motor itself is formed in a small size, a base 57 having a larger diameter than the outer diameter of the frame 56 is required to connect the lead wire 55 to the power supply terminal 58. Since the wire 55 is led out of the frame 56, the wire 55 may be broken during handling.
In the present invention, the base 57 is not required, and the lead-out line 55 is not led out of the frame.
[0004]
[Means for Solving the Problems]
Therefore, the present invention provides a cup-shaped frame formed of a polymer synthetic resin, a rotor rotatably supported by the frame and having a membrane magnet, and a coil formed of a thin conductive wire wound around the rotor in an axial direction. A magnetic pole opposing via a gap and a yoke to which the magnetic pole is attached are provided, and the yoke is a magnetic layer made of a yoke material, an insulating layer formed on the side opposite to the magnetic pole mounting surface of the magnetic layer, and an outer side of the insulating layer. It is composed of a metal layer that is superimposed and patterned, and has a plurality of through holes with an insulating coating on the inner peripheral surface according to the position of the magnetic pole. filled, the outer periphery of the conductive filler in the ultra-small micro-motor to be coupled to the metal layer from the through hole, the yoke provided with the fitting step portion on the inner surface of the open end of the frame Fitted, provided with a groove-like step portion of the longitudinal unwilling extend over the metal layer mutually patterned in a frame inner surface of the open end side of the yoke, the locking metal layer provided on the groove-like stepped portion inner surface of the yoke and fixing the metal layer of the metal layer and the frame are consolidated with a conductive filler.
[0005]
The conductive filler for connecting the metal layer of the yoke and the metal layer for fixing the frame may be provided separately from the metal layer for fixing as long as the material filled in the through hole is extended to the metal layer for fixing.
[0006]
[Action]
Therefore, the thin lead wire from the coil is held in the through hole by the conductive filler, and a lead wire having a large wire diameter is inserted into the through hole from the opposite direction to the lead wire, or the lead wire is inserted into the through hole. The lead wire terminal can be formed on the filled conductive filler or the patterned metal layer by inserting only the conductive filler, and the yoke is fixed to the fitting step by the conductive filler, and is securely attached and held.
[0007]
【Example】
This will be described with reference to the embodiment shown in FIGS.
Reference numeral 1 denotes a rotor, which uses a silicon steel plate having a thickness of 0.5 mm and a diameter of 2.5 mm, and has a film magnet formed on one surface by a sputtering method, for example, magnetized to six poles. Reference numeral 2 denotes a stainless steel shaft to which the rotor 1 is attached, which is supported by a frame 4 via a bearing 3. Reference numeral 5 denotes a yoke, which is made of a silicon steel plate having a thickness of 0.5 mm and a diameter of 3 mm. The outer periphery of the yoke 5 and the end of the frame 4 are fitted and held by a fitting step 6. Numeral 7 denotes magnetic poles attached to the yoke 5, and the coil 8 is wound around a conductor having a diameter of 20 to 50 μm so that four magnetic poles are provided, for example, A and B phases.
[0008]
As shown in FIG. 3 (a), the yoke 5 is pressed, drilled, or subjected to electric discharge machining between magnetic pole attachment positions of the magnetic layer 21 made of a yoke material, preferably on the outer peripheral side where the magnetic pole interval is as large as possible. As shown in FIG. 3B, a synthetic resin insulating material such as polyimide was formed by spin coating on the inside of the hole 22 and on the surface opposite to the magnetic pole mounting surface, as shown in FIG. An insulating layer 23 is formed, and as shown in FIG. 3C, a metal layer 24, such as gold or copper, which is superimposed on the insulating layer 23 and is patterned in accordance with the position of the hole is formed by vapor deposition. As described above, the through hole 25 is formed in the hole 22 in which the insulating layer is buried by performing a hole process with a smaller diameter than the hole 22 by press working, drilling, electric discharge machining or the like.
[0009]
9 is a lead wire from the coil 8 and 10 is a lead wire having a core wire having a wire diameter larger than that of the lead wire 9, for example, 0.8 mmφ. The conductive filler 11 is connected to the metal layer 24 by filling the through hole 25 with the conductive filler 11 such as a conductive adhesive or solder.
Reference numeral 61 denotes a fitting step portion provided on the inner end of the opening side of the frame 4 for fitting the yoke 5. Reference numeral 62 denotes a portion of the inner surface of the opening end of the frame 4 from the yoke 5 held by the fitting step portion 61. On the opening side, in accordance with the position of the patterned metal layer 24, a vertical groove-shaped step portion provided with a width not straddling the adjacent metal layers 24, 63 is formed in the groove-shaped step portion 62 by vapor deposition or the like. , A fixing metal layer provided so as not to protrude from the inner diameter surface of the fitting step 61.
[0010]
It is not necessary to provide the groove-shaped step 62 and the fixing metal layer 63 in accordance with all of the patterned metal layers, but it is preferable to provide them at least at positions facing each other.
[0011]
After the yoke 5 is inserted and fitted into the fitting step 61 of the frame, the metal layer 24 and the fixed metal layer 63 of the groove-like step are integrated with the filled conductive material 11 filled in the through-hole 25, or The conductive filler 11 is connected separately from the conductive filler filled in the hole 25 to prevent the yoke 5 from coming out of the frame 4 and securely hold the yoke.
Further, only the lead wire 9 is inserted into the through hole 25 of the yoke 5 and the conductive filler 11 is filled, or the lead wire 10 is connected to the metal layer 24 or the metal layer 24 and the fixing metal layer 63 inside the frame. It can also be connected to the conductive filler 11 to be connected.
[0012]
In the motor configured as described above, as shown in the operation explanatory diagram of FIG. 4, a negative current I of a two-phase rectangular wave having a phase difference of π / 2 in electrical angle is applied to the A-phase coil 7A. When the negative current I is also applied to the B-phase coil 7B, the relationship between the magnet of the rotor 1 and the coils 7A and 7B is as shown in FIG.
Next, when a positive current I is applied to the A-phase coil 7A and a negative current I is applied to the B-phase coil 7B, the relationship between the rotor magnet and the coil becomes a state (b). When the positive current I is supplied and the positive current I is supplied to the B-phase coil, the relationship between the rotor magnet 1 and the coil 7 becomes the state (c).
Further, when a negative current I is applied to the A-phase coil 7A and a positive current I is applied to the B-phase coil 7B, the relationship between the rotor and the coil is in the state (d). Are sequentially moved, and can be continuously rotated counterclockwise by π / 6 degrees in mechanical angle.
[0013]
In the above, the case where the rotor magnet has six poles and the rotor has two phases has been described, but the same applies to other pole numbers and phase numbers.
[0014]
【The invention's effect】
The invention as described above, the frame over arm is formed of a polymeric synthetic resin, yoke, and the magnetic layer, an insulating layer formed on the outer surface opposite to the pole mounting surface, superimposed on the outside of the insulating layer With a patterned metal layer, a plurality of through-holes are provided according to the position of the magnetic pole and provided insulated on the inner peripheral surface, and a thin lead wire of the coil is inserted into the through-hole, and a conductive filler is provided. In the ultra-small micro motor, which is filled with the metal layer and connected to the metal layer, a fitting step for fitting the outer periphery of the yoke is provided on the inner surface of the opening side end of the frame, and the opening end of the frame is provided from the fitting step. By providing a vertical groove-shaped step on the side, forming a metal layer for fixing in this groove-shaped step, and connecting with a metal layer of the yoke with a conductive filler, the wire diameter is larger than the lead wire of the coil If the lead wire is a through hole Direct drawer, or can be connected to the conductive filler and the metal layer, it becomes easy to connect the lead wire, it can be prevented from coming off the yoke of the frame, securely to hold the yoke of the rotor and pole There is an effect that the gap can be maintained at a specified value and the performance of the motor can be maintained.
Also, by connecting the metal layer of the yoke and the metal layer for fixing in the groove-shaped step separately from the conductive filler of the through hole, the yoke is fitted to the fitting step of the frame, and the lead wire is passed through. After fixing with the conductive filler in the hole, the lead wire can be attached, and the connection of the lead wire is not affected.
[Brief description of the drawings]
FIG. 1 is a side sectional view showing an embodiment of the present invention.
FIG. 2 is a bottom view of FIG.
FIG. 3 is an explanatory view showing an example of a manufacturing process of a yoke.
FIG. 4 is an explanatory diagram of an operation of the motor according to the embodiment.
FIG. 5 is a side sectional view showing a conventional example.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Rotor 4 Frame 5 Yoke 6 Fitting step 7 Magnetic pole 8 Coil 9 Lead wire 10 Lead wire 11 Conductive filler material 12 Power supply terminal 21 Magnetic layer 23 Insulating layer 24 Metal layer 25 Through hole 61 Fitting step 62 Groove step Part 63 Metal layer for fixing

Claims (1)

高分子合成樹脂で形成されたフレームと、このフレームに回転自由に支持され、膜磁石をそなえたロータと、細い導線からなるコイルを巻回し前記ロータに軸方向空隙を介して対向する磁極と、前記磁極を取り付けたヨークをそなえ、前記ヨークが、磁性層と、磁極取付面とは反対側の面に形成した絶縁層と、この絶縁層の外面にそれぞれの磁極に対応してパターニングされた金属層とを設け、前記ヨークを貫通し内面に絶縁被膜を設けたスルーホールを形成してコイルの引き出し線を挿入し、導電性充填材でコイルの引き出し線を前記金属層に連結する超小形マイクロモータにおいて、前記フレームの開口側端部内面にヨークの外周を嵌合させる嵌合段部をそなえ、この嵌合段部に嵌合したヨークより開口端側のフレーム内面に、ヨークのパターニングされた金属層相互に跨がらない縦方向の溝状段部と、この溝状段部内に形成した固定用金属層を設け、ヨークの金属層と前記固定用金属層とを導電性充填材で連結したことを特徴とする超小形マイクロモータ。 A frame formed of a polymer synthetic resin, a rotor rotatably supported by the frame and having a film magnet, and a magnetic pole wound around a coil formed of a thin conductive wire and opposed to the rotor via an axial gap, A magnetic layer, an insulating layer formed on a surface opposite to the magnetic pole mounting surface, and a metal patterned on the outer surface of the insulating layer corresponding to each magnetic pole. A micro-hole for penetrating the yoke, forming a through hole provided with an insulating coating on the inner surface, inserting a lead wire of the coil, and connecting the lead wire of the coil to the metal layer with a conductive filler. In the motor, a fitting step portion for fitting the outer periphery of the yoke is provided on the inner surface of the opening side end of the frame, and the yoke of the yoke is provided on the inner surface of the frame closer to the opening end than the yoke fitted to the fitting step portion. The metal layer thus turned is provided with a vertical groove-shaped step portion that does not straddle each other, and a fixing metal layer formed in the groove-shaped step portion, and the metal layer of the yoke and the fixing metal layer are electrically conductive fillers. An ultra-small micro motor, characterized by being connected by:
JP14104894A 1994-05-30 1994-05-30 Ultra small micro motor Expired - Fee Related JP3541436B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14104894A JP3541436B2 (en) 1994-05-30 1994-05-30 Ultra small micro motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14104894A JP3541436B2 (en) 1994-05-30 1994-05-30 Ultra small micro motor

Publications (2)

Publication Number Publication Date
JPH07327348A JPH07327348A (en) 1995-12-12
JP3541436B2 true JP3541436B2 (en) 2004-07-14

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JP14104894A Expired - Fee Related JP3541436B2 (en) 1994-05-30 1994-05-30 Ultra small micro motor

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CN103905704A (en) * 2014-04-10 2014-07-02 惠州友华微电子科技有限公司 Electronic device, camera and optical image stable driving device
CN106300722A (en) * 2015-05-18 2017-01-04 德昌电机(深圳)有限公司 Motor and electrodynamic pump
US10277084B1 (en) 2016-10-19 2019-04-30 Waymo Llc Planar rotary transformer
US10530209B2 (en) * 2016-10-28 2020-01-07 Waymo Llc Devices and methods for driving a rotary platform

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